CN104570219A - Integrated optical sensor based on period waveguide microcavity resonance interference effect - Google Patents
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
- G01N2021/458—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods using interferential sensor, e.g. sensor fibre, possibly on optical waveguide
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Abstract
The invention discloses an integrated optical sensor based on a period waveguide microcavity resonance interference effect. The integrated optical sensor comprises an input waveguide, an output waveguide, a reference arm, a sensing arm, an input coupling area and an output coupling area. The two ends of the reference arm and the two ends of the sensing arm are coupled in the input coupling area and the output coupling area respectively. A signal light source is connected to the input coupling area through the input waveguide, the output coupling area is connected with a signal light detector through the output waveguide, and the sensing arm is provided with a period waveguide microcavity structure. The integrated optical sensor has the advantages of being easy to manufacture, compact in structure, wide in testing range, high in sensitivity, small in consumption of objects to be tested and the like.
Description
Technical field
The present invention relates to a kind of resonance interference optical device, particularly relate to a kind of integrated optical sensor based on period waveguide microcavity resonance interference effect in optical sensor device field.
Background technology
The mankind are growing in the demand of field to high-performance sensors such as food security, biochemical investigation, environmental monitorings in recent years.Integrated optical sensor is owing to having that size is little, highly sensitive, cost is low and the feature such as electromagnetism interference, and on the sheets such as biochemical sensitive, sensory field has and applies very widely.Develop multiple integrated optical sensor structure at present, the sensors such as such as Mach-Zehnder interferometer, micro-resonant cavity (micro-ring, micro-dish, photon crystal micro cavity etc.) and surface plasma waveguide.Under determinand effect, the effective refractive index of optical waveguide will change, and the optic response spectral line of senser element is changed, by analyzing the drift of spectrum line style or certain set wave strong point intensity variation thus can obtaining the information of determinand.Traditional Mach-Zehnder interferometer structure is simple, and Free Spectral Range (FSR) is also comparatively large, but due to the spectrum line style of Mach-Zehnder interferometer be sine function, therefore the change of refractive index is very inresponsive.Generally for the sensing sensitivity improving Mach-Zehnder type sensor and need increase the length of two interference arms to strengthen the effect of determinand and optical waveguide, be unfavorable for the microminiaturization of sensing unit device.Micro-ring resonant cavity sensor has higher quality factor (Q value), and its resonance line, in more sharp-pointed lorentzian curve, is easy to detect the resonance wavelength caused by determinand effect and drifts about or Strength Changes.But, because the Q value of micro-ring resonant cavity and its size and FSR exist restricting relation (the larger then Q of diameter is larger but FSR is less), the test specification of micro-ring resonant cavity is restricted, expending determinand when being also unfavorable for the microminiaturization of device and reducing test.Photon crystal micro cavity is then the sensing unit structures of another kind of great potential, and it can meet few mould or single mode condition while acquisition high q-factor, and its test specification is not limited by FSR.Photon crystal micro cavity size is minimum, and (V value is (λ/n) to have the mode volume lower than other optical microcavities
3magnitude), the interaction of light and determinand in chamber is strengthened greatly, effectively can improve transducer sensitivity.But due to the state of the art restriction, the photon crystal micro cavity Q value that actual fabrication goes out is more much lower than the Q value of design, and its Q value can reduce further because absorption, scattering etc. affect under determinand environment, the sensitivity of thus actual sensor needs to be improved further.
Summary of the invention
In order to solve Problems existing in background technology, the object of the present invention is to provide a kind of integrated optical sensor based on period waveguide microcavity resonance interference effect, be easy to make, simple and compact for structure, highly sensitive, test specification is wide, and material consumption expense to be measured is lacked.
The technical solution used in the present invention is:
The present invention includes input waveguide, output waveguide, reference arm, pickup arm, input coupled zone and export coupled zone; Reference arm and pickup arm two ends are coupled in input coupled zone and output coupled zone respectively; Signal optical source is connected to input coupled zone through input waveguide, and export coupled zone and be connected with flashlight detecting device through output waveguide, pickup arm has period waveguide micro-cavity structure, is the 1-D photon crystal micro-cavity structure that a kind of periodic unit arranges along pickup arm direction
Described periodic waveguide micro-cavity structure adopts the waveguiding structure containing the multiple apertures along the arrangement of pickup arm direction.
Described periodic waveguide micro-cavity structure adopts and contains along pickup arm direction periodic arrangement and with the waveguiding structure of multiple apertures of pickup arm intermediate symmetry.
Described input coupled zone and output coupled zone are Y bifurcated coupling mechanism, 3dB directional coupler or multi-mode interference coupler.
The duct width of described period waveguide microcavity is constant, and hole diameter successively decreases at equal intervals by being positioned at the aperture of the aperture in the middle of pickup arm to coupled zone, both sides end.
The orifice size of described period waveguide microcavity is constant, and duct width is that quafric curve increases progressively by centre to both sides.
The orifice size of described period waveguide microcavity is constant, and duct width is that quafric curve successively decreases by centre to both sides.
The aperture of described period waveguide microcavity is circular port, square opening.
Periodic waveguide microcavity of the present invention is waveguiding structure, makes resonator cavity and waveguide can direct-coupling; Period waveguide microcavity can obtain high quality factor (Q value) and extremely low mode volume (V value), greatly can strengthen the interaction of determinand and light; Further, period waveguide microcavity can be designed to few mould even single mode operation, makes the test specification of sensor not by the restriction of Free Spectral Range (FSR); Extremely precipitous Fano spectrum line style is produced by the humorous polarization state light wave of period waveguide microcavity and the continuous wave interference of reference arm.
When light is by period waveguide microcavity by determinand package action, if the refractive index of determinand changes, the humorous polarization state of period waveguide microcavity can change, and the change of its resonance wavelength and then the spectrum line style that two-arm can be caused to interfere change.Because the continuous state optical interference that humorous polarization state light wave that period waveguide microcavity place pickup arm passes through and reference arm pass through can produce extremely sharp-pointed asymmetric Fano spectral line, therefore by monitor with analyze interfere the drift of wave spectrum or the changed power of spectral line Near The Extreme Point fixed wave length very easily obtain determinand concentration, become grading information.
The beneficial effect that the present invention has is:
Present invention utilizes period waveguide microcavity high q-factor, low V value, by FSR restriction and the feature of compact conformation, the direct wherein arm period waveguide microcavity of waveguiding structure being produced on traditional Mach-Zehnder interference structure serves as pickup arm, obtain extremely precipitous Fano spectrum line style, thus realize that structure is simple, compact dimensions, highly sensitive, test specification large, the sensor few to material consumption expense to be measured.
The present invention utilizes ripe standard CMOS process, makes involved sensor realize extensive sheet makes, greatly can reduce the production cost of sensing chip.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is the enforcement illustration that the present invention adopts Y bifurcated coupling mechanism and the gradual change of circular port dimension linearity.
Fig. 3 is the enforcement illustration that the present invention adopts 3dB directional coupler, circular port and the gradual change of waveguide dimensions quafric curve.
Fig. 4 is the enforcement illustration that the present invention adopts multi-mode interference coupler, circular port and the gradual change of waveguide dimensions quafric curve.
Fig. 5 be the present invention adopt Y bifurcated coupling mechanism and the gradual change of square opening dimension linearity enforcement illustration.
Fig. 6 is the variations in refractive index-spectrum line illustration of embodiment 1.
In figure: 1, input waveguide, 2, output waveguide, 3, reference arm, 4, pickup arm, 5, coupled zone is inputted, 6, coupled zone is exported, 7, period waveguide microcavity, 8, Y bifurcated coupling mechanism, 9, three-dB coupler, 10, multi-mode interference coupler, 11, the period waveguide microcavity of orifice size linear gradient, 12, waveguide dimensions by mediad both sides be quafric curve reduce period waveguide microcavity, 13, waveguide dimensions by mediad both sides be quafric curve increase period waveguide microcavity, 14, circular port, 15, square opening.
Embodiment
Below in conjunction with drawings and Examples, the present invention is further illustrated.
As shown in Figure 1, the present invention includes input waveguide 1, output waveguide 2, reference arm 3, pickup arm 4, input coupled zone 5 and export coupled zone 6; Reference arm 3 and period waveguide microcavity pickup arm 4 two ends are coupled in input coupled zone 5 and output coupled zone 6 respectively; Signal optical source is connected to the input end of input coupled zone 5 through input waveguide 1, the output terminal of input coupled zone 5 connects reference arm 3 and period waveguide microcavity pickup arm 4 respectively, the output terminal exporting coupled zone 6 is connected with flashlight detecting device through output waveguide 2, the input end exporting coupled zone 6 connects reference arm 3 and pickup arm 4 respectively, and pickup arm 4 has period waveguide microcavity 7 structure.Flashlight passes through to interfere the phase differential of arm and pickup arm to be (n+1/2) π after input coupled zone beam splitting, wherein n round numbers.
Above-mentioned periodic waveguide micro-cavity structure adopt along pickup arm direction periodic arrangement, cycle constant and with multiple small structures of pickup arm intermediate symmetry.
Preferably, as shown in Figure 2, the width of period waveguide is constant, the aperture that the size of aperture is held to coupled zone, both sides (input coupled zone and output coupled zone) by the aperture be positioned in the middle of pickup arm successively decreases at equal intervals, the orifice size linear gradient being positioned at period waveguide microcavity pickup arm 4 centre is decreased to the aperture at input coupled zone 5,6 place, forms the period waveguide microcavity 11 of orifice size linear gradient.
Preferably, as shown in Figure 3, orifice size is constant, and duct width successively decreases in quafric curve to coupled zone, both sides 5,6 by the middle of pickup arm 4, and forming waveguide dimensions by mediad both sides is the period waveguide microcavity 12 that quafric curve reduces.
Preferably, as shown in Figure 4, orifice size is constant, and duct width increases progressively in quafric curve to coupled zone, both sides 5,6 by the middle of pickup arm 4, and forming waveguide dimensions by mediad both sides is the period waveguide microcavity 13 that quafric curve increases.
Preferably, as shown in Fig. 2-Fig. 4, input coupled zone 5 and output coupled zone 6 can adopt Y bifurcated coupling mechanism 8,3dB directional coupler 9 or multi-mode interference coupler 10.
Preferably, as shown in Fig. 2-Fig. 4, the aperture of period waveguide microcavity can adopt circular port 14 or square opening 15.
The course of work of the present invention is: allow determinand wrap up and directly fully to contact with period waveguide microcavity pickup arm, and flashlight, from input waveguide coupling input, is divided into two bundles behind input coupled zone.In pickup arm side, the luminous energy meeting period waveguide microcavity resonance wavelength is by pickup arm, and the light not meeting resonance wavelength place will be reflected by period waveguide microcavity; In reference arm side, all continuous wavelength light signals are all by reference arm.In output coupled zone, the continuous light wave transmitted from reference arm with produce extremely precipitous Fano spectrum line style by the humorous polarization state optical interference of pickup arm.When the concentration of determinand, shape and composition etc. change, its refractive index is corresponding to change, and the resonance wavelength of period waveguide microcavity can be made to drift about, and then causes the movement of Fano resonance line.To be moved by extreme point wavelength in monitoring Fano resonance line or the change of Near The Extreme Point fixed wave length luminous power can obtain high sensing sensitivity.
Embodiments of the invention are as follows:
Embodiment 1
Specifically implement structure with the one shown in Fig. 2 below and adopt silicon on insulation course (SOI) to be explained as an example for device material.
As shown in Figure 2, input coupled zone 5 and output coupled zone 6 all adopt Y bifurcated coupling mechanism, and all constituents of this sensor is all positioned at top silicon layer plane.The SOI substrate top silicon layer thickness adopted is 220nm, oxide layer SiO2 thickness is 2 μm, and the bottom is also silicon.Adopt electron beam lithography definition component graphics.Adopt PMMA495 photoresist to be ICP etching mask layer, form three-dimensional structure device by ICP etching by Graphic transitions to top layer silicon.In this example, the splitting ratio of Y bifurcated coupling mechanism is 50%:50%, duct width is 450nm, the periodic unit crystal constant of periodic wave guide cavity is 360nm, microcavity central authorities greatest circle bore dia is 175nm, be decreased to through 30 all after date circular hole dimension linearity the minimum circular hole that close microcavity both sides Y crotch diameter is 85nm, numerical evaluation shows that the Q value of this period waveguide microcavity is up to 2 × 10
6, V value is only 1.1 (λ/n
si)
3, light can be strengthened greatly and determinand interacts.In this example, the period waveguide microcavity pickup arm district area of sensor is only 8 μm
3, therefore only need a small amount of determinand can period waveguide microcavity effect fully and on pickup arm, i.e. this sensor expending seldom determinand.
The resonance wavelength of above-mentioned period waveguide microcavity is positioned near 1557nm, and Fig. 6 gives when variations in refractive index is Δ n=1 × 10
-5time, spectrum line style becomes the situation of dotted line from solid line.Figure can see thus, and the spectral line slope near resonance wavelength 1557nm is very large, and valley point drift is greater than 10
3nm/RIU.According to judging that 1557.03nm wavelength place power becomes situation, the changed power of 7dB can be detected.
Embodiment 2
As shown in Figure 3, input coupled zone 5 and output coupled zone 6 all adopt 3dB directional coupler, and their splitting ratio is all 1:1, the cycle a=480nm of period waveguide, and circular aperture radius is that r=0.3a immobilizes.Period waveguide microcavity is symmetrical structure, is designed with 28 circular apertures, and namely the total length of period waveguide microcavity is l=28a.The duct width of pickup arm centre is designed to w
0=650nm, is decreased to the normal duct width w of coupled zone, both sides with quafric curve gradual change law
1=450nm.The gradual change equation of the duct width of period waveguide microcavity is w (x)=w
0+ x
2(w
1-w
0)/(l/2)
2, l is the waveguide length of period waveguide microcavity, and in formula, x leaves the distance in the middle of pickup arm along aspect, sensing both sides, and its span is 0<x<l/2.FDTD calculates and shows that the period waveguide microcavity Q value of the present embodiment reaches 4.7 × 10
6, mode volume is about 2.2 (λ/n
si)
3.The top layer silicon of the SOI substrate adopted is 220nm, and the element manufacturing in the present embodiment is on this one deck.Insulation course is silicon dioxide, and thickness is 3 μm, and the bottom is silicon.Owing to not relating to the small structure that size is less than below 150nm in the present embodiment, thus can CMOS technology be directly adopted to make.Adopt 192nm uv-exposure technology definition component graphics, then by RIE-ICP technique, device is transferred to 220nm silicon layer.The transducer sensitivity produced with this embodiment can more than 10
3nm/RIU.
Embodiment 3
As shown in Figure 4, input coupled zone 5 and output coupled zone 6 all adopt multi-mode interference coupler, and their splitting ratio is all 1:1.The cycle a=350nm of period waveguide, circular aperture radius is that r=0.28a immobilizes.Period waveguide microcavity is symmetrical structure, and design 30 circular apertures altogether, namely the total length of period waveguide microcavity is l=30a.The duct width of pickup arm centre is designed to w
0=420nm, is decreased to the normal duct width w of coupled zone, both sides with quafric curve gradual change law
1=580nm.The gradual change equation of the duct width of period waveguide microcavity is w (x)=w
0+ x
2(w
1-w
0)/(l/2)
2, l is the waveguide length of period waveguide microcavity, and in formula, x leaves the distance in the middle of pickup arm along aspect, sensing both sides, and its span is 0<x<l/2.FDTD calculates and shows that the period waveguide microcavity Q value of the present embodiment reaches 7 × 10
6, mode volume is about 0.9 (λ/n
si)
3.The top layer silicon of the SOI substrate adopted is 220nm, and the element manufacturing in the present embodiment is on this one deck.Insulation course is silicon dioxide, and thickness is 3 μm, and the bottom is silicon.Owing to not relating to the small structure that diameter is less than below 190nm in the present embodiment, thus can CMOS technology be directly adopted to make.Adopt 190nm uv-exposure technology definition component graphics, then by RIE-ICP technique, device is transferred to 220nm silicon layer.The transducer sensitivity produced with this embodiment can reach 1.5 × 10
3nm/RIU.
Thus, present invention utilizes the feature of period waveguide microcavity, using the period waveguide microcavity of waveguiding structure as pickup arm, obtain extremely precipitous Fano spectrum line style, achieve that structure is simple, compact dimensions, highly sensitive, test specification large, the sensor few to material consumption expense to be measured, on a large scale sheet can make, reduce the production cost of sensing chip, there is significant technique effect.
Above-described embodiment is used for explaining and the present invention is described, instead of limits the invention, and in the protection domain of spirit of the present invention and claim, any amendment make the present invention and change, all fall into protection scope of the present invention.
Claims (8)
1. based on an integrated optical sensor for period waveguide microcavity resonance interference effect, it is characterized in that: comprise input waveguide (1), output waveguide (2), reference arm (3), pickup arm (4), input coupled zone (5) and export coupled zone (6); Reference arm (3) and pickup arm (4) two ends are coupled in input coupled zone (5) and output coupled zone (6) respectively; Signal optical source is connected to input coupled zone (5) through input waveguide (1), export coupled zone (6) to be connected with flashlight detecting device through output waveguide (2), pickup arm (4) has period waveguide microcavity (7) structure.
2. a kind of integrated optical sensor based on period waveguide microcavity resonance interference effect according to claim 1, is characterized in that: described periodic waveguide microcavity (7) structure adopts the waveguiding structure containing the multiple apertures along the arrangement of pickup arm direction.
3. a kind of integrated optical sensor based on period waveguide microcavity resonance interference effect according to claim 2, is characterized in that: described periodic waveguide microcavity (7) structure adopts and contains along pickup arm direction periodic arrangement and with the waveguiding structure of multiple apertures of pickup arm intermediate symmetry.
4. a kind of integrated optical sensor based on period waveguide microcavity resonance interference effect according to claim 1, is characterized in that: described input coupled zone (5) and export that coupled zone (6) is Y bifurcated coupling mechanism (8), 3dB directional coupler (9) or multi-mode interference coupler (10).
5. according to a kind of integrated optical sensor based on period waveguide microcavity resonance interference effect of Claims 2 or 3, it is characterized in that: the duct width of described period waveguide microcavity (7) is constant, hole diameter successively decreases at equal intervals by being positioned at the aperture of the aperture in the middle of pickup arm to coupled zone, both sides end.
6. according to a kind of integrated optical sensor based on period waveguide microcavity resonance interference effect of Claims 2 or 3, it is characterized in that: the orifice size of described period waveguide microcavity (7) is constant, duct width is that quafric curve increases progressively by centre to both sides.
7. according to a kind of integrated optical sensor based on period waveguide microcavity resonance interference effect of Claims 2 or 3, it is characterized in that: the orifice size of described period waveguide microcavity (7) is constant, duct width is that quafric curve successively decreases by centre to both sides.
8. according to a kind of integrated optical sensor based on period waveguide microcavity resonance interference effect of Claims 2 or 3, it is characterized in that: the aperture of described period waveguide microcavity (7) is circular port (14), square opening (15).
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| CN106680933A (en) * | 2017-03-10 | 2017-05-17 | 浙江大学宁波理工学院 | Transversely asymmetrical non-reflective periodic waveguide micro-cavity bandpass filter |
| CN107356558A (en) * | 2017-08-28 | 2017-11-17 | 兰州大学 | Micro-nano optical detection device and optical detection system |
| CN113589556A (en) * | 2021-07-05 | 2021-11-02 | 华中科技大学 | Optical switch and manufacturing method thereof |
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| CN106680933B (en) * | 2017-03-10 | 2019-02-19 | 浙江大学宁波理工学院 | A kind of asymmetrical areflexia period waveguide microcavity bandpass filter of transverse direction |
| CN107356558A (en) * | 2017-08-28 | 2017-11-17 | 兰州大学 | Micro-nano optical detection device and optical detection system |
| CN113589556A (en) * | 2021-07-05 | 2021-11-02 | 华中科技大学 | Optical switch and manufacturing method thereof |
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