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CN104553221B - High-performance optical spectral selectivity inhales ripple element and solar thermal photovoltaic system - Google Patents

High-performance optical spectral selectivity inhales ripple element and solar thermal photovoltaic system Download PDF

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CN104553221B
CN104553221B CN201510026282.7A CN201510026282A CN104553221B CN 104553221 B CN104553221 B CN 104553221B CN 201510026282 A CN201510026282 A CN 201510026282A CN 104553221 B CN104553221 B CN 104553221B
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refractive index
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CN104553221A (en
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莫磊
杨柳
陈拓
何赛灵
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Zhejiang University ZJU
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B33/00Layered products characterised by particular properties or particular surface features, e.g. particular surface coatings; Layered products designed for particular purposes not covered by another single class
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02SGENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
    • H02S10/00PV power plants; Combinations of PV energy systems with other systems for the generation of electric power
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/40Properties of the layers or laminate having particular optical properties
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract

本发明公开了一种高性能光谱选择性吸波元件及太阳能热光伏系统,包括金属基底、低折射率介质第一薄膜、高折射率半导体纳米方块阵列、低折射率介质第二薄膜和低折射率介质第三薄膜;低折射率介质第一薄膜均匀覆盖在金属基底上,其上构建棋盘状周期排列的高折射率半导体纳米方块阵列,在高折射率半导体纳米方块阵列之间填充低折射率介质第二薄膜,在其顶部覆盖低折射率介质第三薄膜。本发明通过对金属表面介质薄膜的结构设计,获得良好的光谱选择性;通过选择不同的金属、半导体、介质材料,和(或)改变结构参数,实现灵活的截止波长调控及光谱选择性;本发明同样适用于耐高温的金属、半导体、介质材料,可在太阳能热光伏系统中得到广泛应用。

The invention discloses a high-performance spectrally selective wave-absorbing element and a solar thermal photovoltaic system. The third thin film of low refractive index medium; the first thin film of low refractive index medium is uniformly covered on the metal substrate, on which a high refractive index semiconductor nano-square array arranged in a checkerboard pattern is constructed, and low refractive index semiconductor nano-square arrays are filled between the high refractive index semiconductor nano-square arrays. The second medium thin film covers the third thin film of low refractive index medium on top of it. The invention obtains good spectral selectivity by designing the structure of the dielectric thin film on the metal surface; by selecting different metals, semiconductors, and dielectric materials, and (or) changing the structural parameters, flexible cut-off wavelength regulation and spectral selectivity are realized; The invention is also applicable to high-temperature-resistant metals, semiconductors, and dielectric materials, and can be widely used in solar thermal photovoltaic systems.

Description

高性能光谱选择性吸波元件及太阳能热光伏系统High-performance Spectral Selective Absorbing Components and Solar Thermal Photovoltaic System

技术领域technical field

本发明涉及太阳能技术与应用领域,尤其涉及一种可应用于太阳能热光伏系统的光谱选择性吸波元件。The invention relates to the field of solar energy technology and application, in particular to a spectrally selective wave-absorbing element applicable to solar thermal photovoltaic systems.

背景技术Background technique

太阳能作为世界上储量最大的清洁能源,已在世界范围内吸引了广泛关注,如何有效且高效地利用太阳能直接影响到人类的可持续发展。传统太阳能产业一般基于太阳能光伏技术,利用半导体二极管将入射太阳光转化为可为人类直接使用的电能。然而该技术对太阳能的利用率不高,受限于Schockley-Queisser(SQ)限制:能量低于半导体带隙宽度的入射光子不能被半导体吸收;而高能量入射光子的高于半导体带隙宽度的部分能量将以热弛豫方式耗散掉。即便在理想情况下,不考虑非辐射损耗的前提下,单结太阳能电池(禁带宽度1.1 eV)的全聚焦最高转换效率也仅仅是41%。为了突破SQ限制,人们提出在光伏电池前放置选择性吸波-辐射单元,利用选择性吸波元件吸收太阳光使得与之相连的选择性辐射元件温度升高(1000-2000 K),向后置电池选择性地辐射与该电池禁带宽度相匹配的光子,此时后置电池便可达到最高的转换效率。该系统称为太阳能热光伏系统,其理论极限效率可达85%,远高于SQ限制给出的数值。其中,选择性吸波元件决定了前置选择性吸波-辐射单元可达到的最高温度以及选择性辐射元件的辐射光子能量,是该系统的核心器件。根据基尔霍夫定律,物体的吸收效率等于热平衡条件下的辐射效率。因此,若要保持恒定的高温状态,选择性吸波元件的吸收谱必须具有良好的光谱选择性,要求它在太阳光覆盖的可见光至近红外波段具有尽可能高的吸收,而在长波段具有尽可能低的吸收(也即极低的辐射损耗)。此外,高温工作环境要求选择性吸波元件必须采用耐高温材料。As the clean energy with the largest reserves in the world, solar energy has attracted widespread attention worldwide. How to effectively and efficiently utilize solar energy directly affects the sustainable development of human beings. The traditional solar energy industry is generally based on solar photovoltaic technology, which uses semiconductor diodes to convert incident sunlight into electrical energy that can be directly used by humans. However, this technology does not have a high utilization rate of solar energy, which is limited by Schockley-Queisser (SQ): incident photons with energy lower than the semiconductor bandgap width cannot be absorbed by the semiconductor; while high-energy incident photons higher than the semiconductor bandgap width Part of the energy will be dissipated in thermal relaxation. Even under ideal conditions, the highest all-focus conversion efficiency of single-junction solar cells (with a band gap of 1.1 eV) is only 41% without considering non-radiative losses. In order to break through the SQ limitation, it is proposed to place a selective absorbing-radiation unit in front of the photovoltaic cell, and use the selective absorbing element to absorb sunlight to increase the temperature of the selective radiation element connected to it (1000-2000 K), and the rearward The rear cell selectively radiates photons that match the forbidden band width of the cell, and the rear cell can achieve the highest conversion efficiency at this time. The system is called a solar thermal photovoltaic system, and its theoretical limit efficiency can reach 85%, which is much higher than the value given by the SQ limit. Among them, the selective absorbing element determines the maximum temperature that the pre-selective absorbing-radiation unit can reach and the radiation photon energy of the selective radiating element, which is the core device of the system. According to Kirchhoff's law, the absorption efficiency of an object is equal to the radiation efficiency under the condition of thermal equilibrium. Therefore, in order to maintain a constant high temperature state, the absorption spectrum of the selective absorbing element must have good spectral selectivity, requiring it to have as high absorption as possible in the visible to near-infrared band covered by sunlight, and as high as possible in the long-wave band. Possibly low absorption (ie very low radiation losses). In addition, the high temperature working environment requires that the selective absorbing components must be made of high temperature resistant materials.

关于吸波元件的研究已有诸多报道,其中,人工电磁介质的使用极大地拓宽了吸波器的设计思路。Landy等人首次提出基于人工电磁介质的单波长完美吸波元件(N. I.Landy, et al, Phys. Rev. Lett. 100, 207402, 2008.)。通过电、磁共振以及阻抗匹配,特定波长的入射光可以被该人工电磁介质完美吸收。改变单元结构形状和尺寸,可灵活调控其共振波长也即吸收峰值波长。将不同尺寸和不同谐振波长的谐振腔合理地放置在一起,可在一定程度上拓展其吸收谱范围(Y. Q. Ye, et al, J. Opt. Soc. Am. B 27,498, 2010.)。我们也曾提出了基于多重光学效应的狭缝波导光栅结构实现了300-1400 nm的宽带吸收(F. Zhang, et al, Progress In Electromagnetics Research 134, 95(2013).)。为了进一步拓展其工作带宽,Søndergaard等人提出了基于狭缝表面等离子体纳米聚焦效应的非谐振宽带吸波元件(T. Søndergaard, et al, Nat. Commun. 3, 969,2012.)。基于慢光效应的锯齿状人工电磁介质结构设计可实现从可见光-近红外-中红外的超宽带吸收(F. Ding, et al, Laser Photon. Rev. 8, 946 (2014).)。但是,以上这些吸波元件并不能满足太阳能热光伏系统的需要,它们不具有良好的光谱选择性:过窄的吸收谱可导致太阳光吸收效率低下,而过宽的吸收谱又可引起吸波元件在长波段的热辐射损耗。且上述吸波元件所使用的材料也不能满足太阳能热光伏系统的高温需求。“V.Rinnerbauer, et al, Adv. Energy Mater. 4, 1400334 (2014).”和“Y. Nam, et al,Sol. Energy Mater. Sol. Cells 122, 287, 2014.”这两篇文章均报道了基于钨或钽光子晶体结构的选择性吸波元件,尽管它们解决了高温问题,但光子晶体结构的光谱选择性并不突出。There have been many reports on the research of absorbing components, among which, the use of artificial electromagnetic medium has greatly broadened the design ideas of absorbers. Landy et al. first proposed a single-wavelength perfect absorbing element based on an artificial electromagnetic medium (N. I. Landy, et al, Phys. Rev. Lett. 100, 207402, 2008.). Through electrical, magnetic resonance and impedance matching, the incident light of a specific wavelength can be perfectly absorbed by the artificial electromagnetic medium. Changing the shape and size of the unit structure can flexibly adjust its resonance wavelength, that is, the absorption peak wavelength. Reasonable placement of resonant cavities with different sizes and different resonance wavelengths can expand the range of its absorption spectrum to a certain extent (Y. Q. Ye, et al, J. Opt. Soc. Am. B 27,498, 2010.). We have also proposed a slit waveguide grating structure based on multiple optical effects to achieve broadband absorption at 300-1400 nm (F. Zhang, et al, Progress In Electromagnetics Research 134, 95(2013).). In order to further expand its working bandwidth, Søndergaard et al. proposed a non-resonant broadband absorbing element based on the slit surface plasmon nano-focusing effect (T. Søndergaard, et al, Nat. Commun. 3, 969, 2012.). The design of jagged artificial electromagnetic dielectric structure based on slow light effect can realize ultra-broadband absorption from visible light to near infrared to mid infrared (F. Ding, et al, Laser Photon. Rev. 8, 946 (2014).). However, the above absorbing components cannot meet the needs of solar thermal photovoltaic systems, and they do not have good spectral selectivity: too narrow absorption spectrum can lead to low absorption efficiency of sunlight, and too wide absorption spectrum can cause absorption The thermal radiation loss of the element in the long-wave band. Moreover, the materials used in the above absorbing components cannot meet the high temperature requirements of the solar thermal photovoltaic system. “V.Rinnerbauer, et al, Adv. Energy Mater. 4, 1400334 (2014).” and “Y. Nam, et al, Sol. Energy Mater. Sol. Cells 122, 287, 2014.” Both reported selective absorbing elements based on tungsten or tantalum photonic crystal structures, although they solved the high-temperature problem, the spectral selectivity of photonic crystal structures was not outstanding.

发明内容Contents of the invention

本发明的目的是针对现有技术的不足,为太阳能热光伏系统提供一种高性能光谱选择性吸波元件。The object of the present invention is to provide a high-performance spectrally selective wave-absorbing element for a solar thermo-photovoltaic system aiming at the deficiencies of the prior art.

一种高性能光谱选择性吸波元件,其包括金属基底、低折射率介质第一薄膜、高折射率半导体纳米方块阵列、低折射率介质第二薄膜、低折射率介质第三薄膜;低折射率介质第一薄膜均匀覆盖在金属基底上,低折射率介质第一薄膜上构建棋盘状周期排列的高折射率半导体纳米方块阵列,在高折射率半导体纳米方块阵列之间露出低折射率介质第一薄膜的凹陷区填充低折射率介质第二薄膜,高折射率半导体纳米方块阵列顶部及填充区均覆盖低折射率介质第三薄膜。A high-performance spectrally selective wave-absorbing element, which includes a metal substrate, a first film of a low-refractive-index medium, a high-refractive-index semiconductor nano-square array, a second film of a low-refractive-index medium, and a third film of a low-refractive-index medium; The first thin film of medium with low refractive index is uniformly covered on the metal substrate, and the first thin film of low refractive index medium is constructed with high-refractive index semiconductor nano-square arrays arranged periodically in a checkerboard pattern, and the low-refractive index medium is exposed between the arrays of high-refractive index semiconductor nano-squares. The concave area of the first film is filled with the second film of low-refractive index medium, and the top of the high-refractive index semiconductor nano-square array and the filling area are covered with the third film of low-refractive index medium.

所述的低折射率介质第一薄膜、低折射率介质第二薄膜、低折射率介质第三薄膜的折射率均低于高折射率半导体纳米方块阵列的折射率。The refractive indices of the first low-refractive-index medium film, the second low-refractive-index medium film, and the third low-refractive-index medium film are all lower than that of the high-refractive index semiconductor nano-square array.

所述的低折射率介质第一薄膜、低折射率介质第二薄膜、低折射率介质第三薄膜为不同介质材料或同种材料。The first low-refractive-index medium film, the second low-refractive-index medium film, and the third low-refractive-index medium film are made of different dielectric materials or the same material.

所述的金属基底,厚度大于入射光在其中的衰减长度,作为金属反射镜对截止波长以外的长波段入射光进行调制,也作为热的导体传递热量给与之相连的选择性辐射元件。The thickness of the metal substrate is greater than the attenuation length of the incident light therein, and it is used as a metal reflector to modulate the long-wavelength incident light other than the cut-off wavelength, and also serves as a heat conductor to transfer heat to the selective radiation element connected thereto.

所述的高折射率半导体纳米方块阵列构建于低折射率介质第一薄膜上,用于选择性吸收入射太阳光,改变纳米方块阵列的尺寸和材料,可调控该结构的光谱选择性。The high-refractive-index semiconductor nano-square array is constructed on the first thin film of low-refractive-index medium to selectively absorb incident sunlight, and the spectral selectivity of the structure can be regulated by changing the size and material of the nano-square array.

所述的低折射率介质第二薄膜、低折射率介质第二薄膜用于保护高折射率半导体纳米方块阵列,同时减少表面反射。The second low-refractive-index medium thin film and the low-refractive-index medium second thin film are used to protect the high-refractive index semiconductor nano-square array while reducing surface reflection.

一种采用所述的高性能光谱选择性吸波元件的太阳能热光伏系统。A solar thermal photovoltaic system adopting the high-performance spectrally selective wave-absorbing element.

本发明的有益效果包括:The beneficial effects of the present invention include:

(1)本发明仅通过对金属表面介质薄膜的结构设计,来实现器件对太阳光吸收光谱范围的灵活调控,进而获得良好的光谱选择性。避免了对金属基底的微纳加工,因此,制备方法简单。器件结构中的高折射率半导体纳米方块可通过电子束曝光技术制备,也可利用纳米压印技术实现大面积、低成本的加工。(1) The present invention only realizes the flexible control of the solar light absorption spectral range of the device through the structural design of the dielectric thin film on the metal surface, and then obtains good spectral selectivity. The micro-nano processing of the metal substrate is avoided, so the preparation method is simple. The high-refractive-index semiconductor nanocubes in the device structure can be prepared by electron beam exposure technology, and nanoimprint technology can also be used to realize large-area and low-cost processing.

(2)本发明的结构设计非常灵活,通过选择不同的金属、半导体、介质材料,和(或)改变结构参数,便可实现灵活的截止波长调控及光谱选择性。(2) The structural design of the present invention is very flexible. By selecting different metals, semiconductors, and dielectric materials, and/or changing structural parameters, flexible cut-off wavelength regulation and spectral selectivity can be realized.

(3)本发明的结构设计适用于耐高温的金属、半导体、介质材料。若材料选择得当,本发明将具有良好的高温稳定性,可在太阳能热光伏系统中得到广泛应用。(3) The structural design of the present invention is suitable for high-temperature-resistant metals, semiconductors, and dielectric materials. If the material is properly selected, the invention will have good high temperature stability and can be widely used in solar thermal photovoltaic systems.

附图说明Description of drawings

图1为高性能光谱选择性吸波元件的三维结构示意图(2×2单元);Figure 1 is a schematic diagram of the three-dimensional structure of a high-performance spectrally selective wave-absorbing element (2×2 units);

图2为高性能选择性吸波元件的结构示意图(俯视图;2×2单元);Figure 2 is a schematic structural diagram of a high-performance selective absorbing element (top view; 2×2 units);

图3为高性能选择性吸波单元的截面图(2×2单元),该截面沿着图2的虚线截取;Figure 3 is a cross-sectional view of a high-performance selective absorbing unit (2×2 unit), which is taken along the dotted line in Figure 2;

图4为数值仿真得到的选择性吸波元件在平面波垂直入射条件下的吸收谱(实线),以及太阳光谱的能量强度(虚线),λc = 1.2 μm为截止波长;Figure 4 shows the absorption spectrum (solid line) of the selective absorbing element under the condition of normal incidence of plane waves obtained by numerical simulation, and the energy intensity of the solar spectrum (dashed line), λ c = 1.2 μm is the cut-off wavelength;

图5为选择性吸波元件的反射谱:数值仿真结果(虚线);实验测量结果(实线);Figure 5 shows the reflection spectrum of the selective absorbing element: numerical simulation results (dotted line); experimental measurement results (solid line);

图中,金属基底1、低折射率介质第一薄膜2、高折射率半导体纳米方块阵列3、低折射率介质第二薄膜4、低折射率介质第三薄膜5。In the figure, a metal substrate 1 , a first low-refractive-index medium film 2 , a high-refractive-index semiconductor nano-square array 3 , a low-refractive-index medium second film 4 , and a low-refractive-index medium third film 5 .

具体实施方式detailed description

下面结合附图和实施例对本发明作进一步说明。The present invention will be further described below in conjunction with drawings and embodiments.

如图1、2、3所示,一种高性能光谱选择性吸波元件,包括金属基底1、低折射率介质第一薄膜2、高折射率半导体纳米方块阵列3、低折射率介质第二薄膜4、低折射率介质第三薄膜5;低折射率介质第一薄膜2均匀覆盖在金属基底1上,低折射率介质第一薄膜2上构建棋盘状周期排列的高折射率半导体纳米方块阵列3,用于选择性吸收入射太阳光,在高折射率半导体纳米方块阵列3之间露出低折射率介质第一薄膜2的凹陷区填充低折射率介质第二薄膜4,高折射率半导体纳米方块阵列3顶部及填充区均覆盖低折射率介质第三薄膜5,以便保护高折射率半导体纳米方块阵列3并减少表面反射。As shown in Figures 1, 2, and 3, a high-performance spectrally selective wave-absorbing element includes a metal substrate 1, a first thin film 2 of a low-refractive-index medium, a high-refractive-index semiconductor nano-square array 3, and a second low-refractive-index medium. Thin film 4, the third thin film 5 of low-refractive-index medium; the first thin-film 2 of low-refractive-index medium is evenly covered on the metal substrate 1, and an array of high-refractive-index semiconductor nano-squares arranged periodically in a checkerboard pattern is constructed on the first low-refractive index medium film 2 3. For selectively absorbing incident sunlight, the recessed area of the first film 2 of the low-refractive-index medium is exposed between the high-refractive-index semiconductor nano-square arrays 3 and filled with the second film 4 of the low-refractive-index medium, and the high-refractive index semiconductor nano-square Both the top of the array 3 and the filling area are covered with the third thin film 5 of the low-refractive index medium, so as to protect the high-refractive index semiconductor nano-square array 3 and reduce surface reflection.

实施例1Example 1

设置金属基底1为耐高温的钽,其厚度足够厚,没有光可透过;低折射率介质第一薄膜2为二氧化硅,厚度100 nm;高折射率半导体纳米方块阵列3为高吸收材料锗,锗方块的高度为180 nm,边长为270 nm;低折射率介质第二薄膜4、低折射率介质第三薄膜5仍设为二氧化硅,厚度270 nm,填充在高折射率半导体纳米线方块阵列3的间隙并覆盖其顶部。本实施例涉及的材料均为高温材料,可承受1000 K左右的高温。数值仿真结果显示,本发明的选择性吸波元件在截止波长1.2 μm以内的波段具有高达95%的平均吸收效率,正好覆盖太阳光谱的主峰;而在1.2 μm以外的长波段,其吸收效率快速降低到0.1左右,具有良好的光谱选择性,如附图4所示。定义品质因子FoM为FoM = ηt • ηc,其中,ηt表示其光谱选择性的好坏,ηc表示截止波长λc以内的吸收率的高低,两者表达式如下:The metal substrate 1 is set to be high-temperature-resistant tantalum, which is thick enough that no light can pass through; the first thin film 2 of the low-refractive index medium is silicon dioxide, and the thickness is 100 nm; the high-refractive index semiconductor nano-square array 3 is a high-absorbing material Germanium, the height of the germanium square is 180 nm, and the side length is 270 nm; the second thin film 4 of the low-refractive index medium and the third thin film 5 of the low-refractive index medium are still set as silicon dioxide, with a thickness of 270 nm, filled in the high-refractive index semiconductor The gaps between the nanowire square array 3 and the top are covered. The materials involved in this embodiment are all high-temperature materials, which can withstand high temperatures of about 1000 K. Numerical simulation results show that the selective absorbing element of the present invention has an average absorption efficiency as high as 95% in the band within the cut-off wavelength of 1.2 μm, just covering the main peak of the solar spectrum; Reduced to about 0.1, it has good spectral selectivity, as shown in Figure 4. Define the quality factor FoM as FoM=η t · η c , wherein, η t represents the quality of its spectral selectivity, η c represents the height of the absorptivity within the cut-off wavelength λ c , both expressions are as follows:

其中α(λ)表示选择性吸波元件的吸收光谱,IAM1.5(λ)表示AM1.5太阳光谱。针对本实施例的结构设计,其FoM高达0.91,远高于光子晶体结构的FoM。Among them, α(λ) represents the absorption spectrum of the selective wave-absorbing element, and I AM1.5 (λ) represents the AM1.5 solar spectrum. For the structural design of this embodiment, its FoM is as high as 0.91, much higher than the FoM of the photonic crystal structure.

本发明的选择性吸波元件可采用如下步骤制备:在任意平面基底上溅射约200 nm厚的金属钽,作为本发明的选择性吸波元件的金属基底,其厚度足以防止光透过;在金属钽基底上,依次溅射100 nm厚的二氧化硅作为低折射率介质第一薄膜和180 nm厚的锗用于制备高折射率半导体纳米方块阵列;在锗薄膜上旋涂270 nm厚的负性光刻胶MAN2403,并用电子束曝光技术(或者纳米压印技术以实现大面积、低成本纳米加工)在光刻胶上制备棋盘状周期排列的方块阵列图形,方块单元的边长为 270 nm;以光刻胶图形作为掩模,利用感应耦合等离子刻蚀方法对锗进行干法刻蚀,并去掉MAN2403,从而制备出棋盘状周期排列的锗方块阵列;在此基础上溅射270 nm的二氧化硅薄膜填充锗方块之间的空隙,并覆盖在其顶部。图5所示为本样品实验测得的反射谱(实线)和数值仿真得到的反射谱(虚线)。从本图可见,该样品的实验结果与数值仿真结果吻合地非常好。The selective wave-absorbing element of the present invention can be prepared by the following steps: sputtering metal tantalum with a thickness of about 200 nm on any planar substrate, as the metal substrate of the selective wave-absorbing element of the present invention, its thickness is sufficient to prevent light transmission; On the metal tantalum substrate, 100 nm thick silicon dioxide was sequentially sputtered as the first film of low refractive index medium and 180 nm thick germanium was used to prepare high refractive index semiconductor nano-square arrays; 270 nm thick germanium film was spin-coated Negative photoresist MAN2403, and use electron beam exposure technology (or nanoimprinting technology to achieve large-area, low-cost nanofabrication) on the photoresist to prepare a checkerboard-like periodic array of square array patterns, the side length of the square unit is 270 nm; use the photoresist pattern as a mask, use the inductively coupled plasma etching method to dry-etch germanium, and remove the MAN2403, so as to prepare a checkerboard periodic array of germanium squares; on this basis, sputter 270 nm nm silicon dioxide film fills the gaps between the germanium squares and covers them on top. Figure 5 shows the experimentally measured reflectance spectrum (solid line) and the numerically simulated reflectance spectrum (dotted line) of this sample. It can be seen from this figure that the experimental results of this sample are in good agreement with the numerical simulation results.

实施例2Example 2

设置金属基底1为耐高温的钨,其厚度足够厚,没有光可透过;低折射率介质第一薄膜2为二氧化硅;高折射率半导体纳米方块阵列3为高吸收材料硅,其高度和边长均为亚微米量级;低折射率介质第二薄膜4、低折射率介质第三薄膜5设为二氧化硅,填充在高折射率半导体纳米线方块阵列3的间隙并覆盖其顶部。本实施例涉及的材料均为高温材料,可承受1000 K左右的高温。The metal substrate 1 is set to be high-temperature-resistant tungsten, and its thickness is thick enough so that no light can pass through; the first thin film 2 of the low-refractive index medium is silicon dioxide; and side lengths are on the order of sub-micron; the second low-refractive-index medium film 4 and the third low-refractive-index medium film 5 are made of silicon dioxide, filling the gaps in the high-refractive index semiconductor nanowire square array 3 and covering the top thereof . The materials involved in this embodiment are all high-temperature materials, which can withstand high temperatures of about 1000 K.

实施例3Example 3

设置金属基底1为耐高温的钽,其厚度足够厚,没有光可透过;低折射率介质第一薄膜2为二氧化硅;高折射率半导体纳米方块阵列3为高吸收材料硅,其高度和边长均为亚微米量级;低折射率介质第二薄膜4、低折射率介质第三薄膜5设为低折射率氧化铝,填充在高折射率半导体纳米线方块阵列3的间隙并覆盖其顶部。本实施例涉及的材料均为高温材料,可承受1000 K左右的高温。The metal substrate 1 is set to be high-temperature-resistant tantalum, and its thickness is thick enough so that no light can pass through; the first thin film 2 of the low-refractive index medium is silicon dioxide; and side lengths are on the order of submicron; the second film 4 of the low-refractive-index medium and the third film 5 of the low-refractive-index medium are made of low-refractive-index alumina, which fills the gaps in the square array of high-refractive-index semiconductor nanowires 3 and covers the its top. The materials involved in this embodiment are all high-temperature materials, which can withstand high temperatures of about 1000 K.

实施例4Example 4

设置金属基底1为耐高温的钨,其厚度足够厚,没有光可透过;低折射率介质第一薄膜2为二氧化硅;高折射率半导体纳米方块阵列3为高吸收材料硅,其高度和边长均为亚微米量级;低折射率介质第二薄膜4、低折射率介质第三薄膜5设为低折射率氧化铝,填充在高折射率半导体纳米线方块阵列3的间隙并覆盖其顶部。本实施例涉及的材料均为高温材料,可承受1000 K左右的高温。The metal substrate 1 is set to be high-temperature-resistant tungsten, and its thickness is thick enough so that no light can pass through; the first thin film 2 of the low-refractive index medium is silicon dioxide; and side lengths are on the order of submicron; the second film 4 of the low-refractive-index medium and the third film 5 of the low-refractive-index medium are made of low-refractive-index alumina, which fills the gaps in the square array of high-refractive-index semiconductor nanowires 3 and covers the its top. The materials involved in this embodiment are all high-temperature materials, which can withstand high temperatures of about 1000 K.

通过选择不同材料并设置不同结构尺寸,本发明的选择性吸波元件的吸收谱可被调节到不同的截止波长上,也即其光谱选择性可灵活调控。因此,本领域技术人员可以在本发明的基础上做出有针对性地修改和改进。By selecting different materials and setting different structural dimensions, the absorption spectrum of the selective wave-absorbing element of the present invention can be adjusted to different cut-off wavelengths, that is, its spectral selectivity can be flexibly adjusted. Therefore, those skilled in the art can make targeted modifications and improvements on the basis of the present invention.

Claims (7)

1. a high-performance optical spectral selectivity inhales ripple element, it is characterised in that include metallic substrates (1), low refractive index dielectric the One thin film (2), high-index semiconductor nano square array (3), low refractive index dielectric the second thin film (4), low refractive index dielectric 3rd thin film (5);Low refractive index dielectric the first film (2) uniform fold is in metallic substrates (1), and low refractive index dielectric first is thin Upper high-index semiconductor nano square array (3) building checkerboard periodic arrangement of film (2), in high-index semiconductor nanometer Low refractive index dielectric the second thin film is filled in the depressed area exposing low refractive index dielectric the first film (2) between square array (3) (4), high-index semiconductor nano square array (3) top and fill area all cover low refractive index dielectric the 3rd thin film (5);
Described high-index semiconductor uses germanium, silicon.
High-performance optical spectral selectivity the most according to claim 1 inhales ripple element, it is characterised in that described low-refraction is situated between Matter the first film (2), low refractive index dielectric the second thin film (4), the refractive index of low refractive index dielectric the 3rd thin film (5) are below height The refractive index of refractive index semiconductor nano square array (3).
High-performance optical spectral selectivity the most according to claim 1 inhales ripple element, it is characterised in that described low-refraction is situated between Matter the first film (2), low refractive index dielectric the second thin film (4), low refractive index dielectric the 3rd thin film (5) are different materials or of the same race Material.
4. a kind of high-performance optical spectral selectivity as claimed in claim 1 inhales ripple element, it is characterised in that described Metal Substrate The end, thickness is more than incident illumination attenuation length wherein, both incident to the long-wave band beyond cutoff wavelength as metallic mirror Light is modulated, and the conductor as heat transfers heat to the selective radiation element being attached thereto again.
5. a kind of high-performance optical spectral selectivity as claimed in claim 1 inhales ripple element, it is characterised in that described high index of refraction Semiconductor nano square array (3) is implemented on low refractive index dielectric the first film (2), for the selective absorbing incidence sun Light, changes size and material, the spectral selection of this structure of controllable of nano square array.
6. a kind of high-performance optical spectral selectivity as claimed in claim 1 inhales ripple element, it is characterised in that described low-refraction Medium the second thin film (4), low refractive index dielectric the 3rd thin film (5) are used for protecting high-index semiconductor nano square array, with Time reduce surface reflection.
7. one kind uses the solar thermal photovoltaic system that high-performance optical spectral selectivity according to claim 1 inhales ripple element.
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