CN104517879A - Convey manipulator with adjustable finger interval and wafer convey device - Google Patents
Convey manipulator with adjustable finger interval and wafer convey device Download PDFInfo
- Publication number
- CN104517879A CN104517879A CN201310451911.1A CN201310451911A CN104517879A CN 104517879 A CN104517879 A CN 104517879A CN 201310451911 A CN201310451911 A CN 201310451911A CN 104517879 A CN104517879 A CN 104517879A
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- Prior art keywords
- finger
- finger unit
- bearing
- unit
- adjustable
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- Pending
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- 230000009286 beneficial effect Effects 0.000 description 1
- 210000005056 cell body Anatomy 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/08—Programme-controlled manipulators characterised by modular constructions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
Abstract
The invention relates to the manipulator technical field, and provides a convey manipulator with an adjustable finger interval and a wafer convey device; the manipulator comprises finger units (10) with machinery fingers (11), and link rods (20) fixed with bearings, wherein one bearing is fixed with one finger unit (10), and one side of rear ends of the other finger units (10) is provided with a slot (40) in a machinery finger direction, and the bearing is nested in the slot (40) and moves to form a slider-crank mechanism; the other side of the rear ends of the finger units (10) is provided with a guide rail (60) arranged in a vertical direction, and the finger unit (10) moves along the guide rail (60) through a slide piece (50); one finger unit (10) moves in the vertical direction so as to drive the link rod (20) to rotate around the bearing fixed with the finger unit (10), thus driving other finger units (10) to move up and down along the guide rail (60). The finger interval of the machinery fingers can be effectively adjusted.
Description
[technical field]
The present invention relates to manipulator technical field, particularly relate to and a kind ofly point the adjustable conveying robot of spacing and wafter delivery appts thereof.
[background technology]
In the production process of semiconductor device, current existing wafer conveying robot mechanism, generally can only transport a wafer.When transporting multiple wafer at the same time, cannot adjust the finger spacing of manipulator, therefore its adaptability and range of application receive certain restriction, and this manipulator can only complete multiple wafer in certain circumstances and carry simultaneously, thus also limit the operating efficiency of manipulator.
Given this, the defect overcome existing for the prior art is the art problem demanding prompt solution.
[summary of the invention]
The technical problem to be solved in the present invention be to provide a kind of can to the finger spacing conveying robot that adjust and wafter delivery appts thereof.
The present invention adopts following technical scheme:
Point the conveying robot that spacing is adjustable, described manipulator comprises:
At least 2 finger units (10), each finger unit (10) is provided with a mechanical finger (11);
One connecting rod (20), described connecting rod (20) is fixedly installed and finger unit (10) bearing one to one;
One of them bearing is fixedly connected with a finger unit (10), the side, rear end of remaining finger unit (10) offers the groove (40) along mechanical finger direction, also can move along mechanical finger (11) direction in groove (40) in all the other bearing embedded grooves (40), connecting rod (20), bearing and groove (40) composition slider-crank mechanism;
The rear end opposite side of described finger unit (10) is provided with guide rail (60), guide rail (60) is vertically arranged and vertical with mechanical finger (11) direction, the rear end opposite side of finger unit (10) is fixed with slide block (50), and finger unit (10) is moved along guide rail (60) by slide block (50);
One of them finger unit (10) vertically moves, drivening rod (20) rotates around the described bearing be fixedly connected with a finger unit (10), drives other finger units (10) to move up and down along guide rail (60) by described slider-crank mechanism.
Further, described bearing is external screw thread bearing (30).
Further, described manipulator also comprises a shell, and the described finger unit (10) be fixedly connected with bearing is fixed on shell.
Further, described guide rail (60) is arranged on shell.
Further, described each finger unit (10) is also provided with tray (12) and cover plate (13), and described mechanical finger (11) is fixed between tray (12) and cover plate (13); Described groove (40) is opened on tray (12).
In an embodiment of the present invention, described finger unit (10) is provided with 5, and in the vertical direction is respectively from top to bottom: the first finger unit (101), second finger unit (102), the 3rd finger unit (103), the 4th finger unit (104) and the 5th finger unit (105);
Wherein, the 3rd finger unit (103) is fixed on shell, and one of them bearing is fixedly connected with the 3rd finger unit (103);
5th finger unit (105) vertically moves, and drivening rod (20) rotates around the bearing be fixedly connected with the 3rd finger unit (103), drives other finger units (10) to move up and down along guide rail (60) by slider-crank mechanism.
Further, one of them bearing is fixed on the tray (12) of the 3rd finger unit (103).
Further, described manipulator is used for wafer carrying.
Present invention also offers a kind of wafter delivery appts, in described wafter delivery appts, be provided with the conveying robot that finger spacing as above is adjustable.
Compared with prior art, beneficial effect of the present invention is: in finger structure, add slider-crank mechanism, realize the effective adjustment to mechanical finger spacing, improve the operating efficiency of manipulator, add adaptability and the versatility of mechanical finger, make mechanical finger can realize transporting while multiple article to be handled under different operating environment.
[accompanying drawing explanation]
Fig. 1 is the structural representation pointing the adjustable conveying robot of spacing in the embodiment of the present invention;
Fig. 2 is the local structural graph in Fig. 1 after hidden parts connecting rod.
Reference numeral is as follows:
10-finger unit, 101-first finger unit,
102-second finger unit, 103-the 3rd finger unit,
104-the 4th finger unit, 105-the 5th finger unit,
11-mechanical finger, 12-tray,
13-cover plate, 20-connecting rod,
30-external screw thread bearing, 40-groove,
50-slide block, 60-guide rail.
[embodiment]
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
In addition, if below in described each execution mode of the present invention involved technical characteristic do not form conflict each other and just can mutually combine.
The invention provides and a kind ofly point the adjustable conveying robot of spacing, comprise as lower component:
At least 2 finger units, each finger unit is provided with a mechanical finger; One connecting rod, connecting rod is fixedly installed and finger unit bearing one to one; One of them bearing is fixedly connected with a finger unit, the side, rear end of remaining finger unit offers the groove along mechanical finger direction, also can move along mechanical finger direction in groove in all the other bearing embedded grooves, connecting rod, bearing and groove composition slider-crank mechanism; The rear end opposite side of finger unit is provided with guide rail, and guide rail is vertically arranged and vertical with mechanical finger direction, and the rear end opposite side of finger unit is fixed with slide block, finger unit by slide block along guide rail movement; One of them finger unit vertically moves, and drivening rod rotates around the bearing be fixedly connected with a finger unit, drives other finger units to move up and down along guide rail by slider-crank mechanism.
The present invention adds slider-crank mechanism in finger structure, realize the effective adjustment to mechanical finger spacing, improve the operating efficiency of manipulator, add adaptability and the versatility of mechanical finger, make mechanical finger can realize transporting while multiple article to be handled under different operating environment.
Wherein, the number of finger unit is preferably odd number, such as 3,5, etc.For 5 finger units, the present invention is described in detail below.
As depicted in figs. 1 and 2, in the present embodiment, finger unit 10 is provided with 5, and in the vertical direction is respectively from top to bottom: the first finger unit 101, second finger unit 102, the 3rd finger unit 103, the 4th finger unit 104 and the 5th finger unit 105.The length of finger unit 10 is different, and in the present embodiment, finger unit is followed successively by the first finger unit 101, second finger unit 102, the 3rd finger unit 103, the 4th finger unit 104 and the 5th finger unit 105 from long to short according to length.Except mechanical finger 11, each finger unit 10 is also provided with tray 12 and cover plate 13, and mechanical finger 11 is fixed between tray 12 and cover plate 13 by screw.
In the present embodiment, bearing adopts external screw thread bearing 30, these four finger unit rear end trays 12 of first finger unit 101, second finger unit 102, the 4th finger unit 104 and the 5th finger unit 105 have groove 40, groove 40 matches with the external screw thread bearing 30 be fixed on connecting rod 20, external screw thread bearing 30 is embedded in the groove 40 of above-mentioned four tray 12 rear ends respectively, and there is certain transverse shifting space, also namely along the mobile space on mechanical finger direction.
Be positioned at the 3rd middle finger unit 103 and be different from all the other four finger units, the 3rd finger unit 103 external screw thread bearing 30 is corresponding thereto fixedly connected with, and this external screw thread bearing 30 is embedded in the cell body offered at connecting rod 20 geometric center place.This manipulator also comprises a shell (not shown), and the tray 12 of the 3rd finger unit 103 is fixedly connected with shell by screw.
Guide rail 60 is arranged on shell.The rear end opposite side of the tray 12 of all finger units 10 is all connected with slide block 50, makes finger unit 10 only can do movement on vertical direction, also namely move up and down by the guiding of guide rail 60.
By pneumatic, electronic or other type of drive (driver part is not shown in the drawings), the tray 12 of the 5th finger unit 105 is made vertically to face upward or downward motion, coordinated with the external screw thread bearing 30 be fixed on connecting rod 20 respectively by the groove 40 of rear end on the tray 12 of each finger unit 10, them are made to form slider-crank mechanism, the tray 12 of the 3rd finger unit 103 is fixed on shell motionless, under the moving up and down of the tray 12 of the 5th finger unit 105, drivening rod 20 rotates around the external screw thread bearing 30 be fixedly connected with the 3rd finger unit 103, the finger unit 10 making other also to be completed along guide rail 60 by slide block 50 and moves up and down, thus realize effective adjustment of five mechanical finger spacing.This slider-crank mechanism, according to point line segment theorems such as parallel lines, achieves the equidistant adjustment of the five fingers spacing, can complete the carrying of the objects such as wafer under the environment of different spacing.
The manipulator that the present embodiment provides is mainly used in wafer carrying, and certainly, this manipulator can also be applicable to the carrying of other article, does not limit herein.
The embodiment of the present invention additionally provides a kind of wafter delivery appts, is provided with the conveying robot that above-mentioned finger spacing is adjustable in this wafter delivery appts.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1. point the conveying robot that spacing is adjustable, it is characterized in that, described manipulator comprises:
At least 2 finger units (10), each finger unit (10) is provided with a mechanical finger (11);
One connecting rod (20), described connecting rod (20) is fixedly installed and finger unit (10) bearing one to one;
One of them bearing is fixedly connected with a finger unit (10), the side, rear end of remaining finger unit (10) offers the groove (40) along mechanical finger direction, also can move along mechanical finger (11) direction in groove (40) in all the other bearing embedded grooves (40), connecting rod (20), bearing and groove (40) composition slider-crank mechanism;
The rear end opposite side of described finger unit (10) is provided with guide rail (60), guide rail (60) is vertically arranged and vertical with mechanical finger (11) direction, the rear end opposite side of finger unit (10) is fixed with slide block (50), and finger unit (10) is moved along guide rail (60) by slide block (50);
One of them finger unit (10) vertically moves, drivening rod (20) rotates around the described bearing be fixedly connected with a finger unit (10), drives other finger units (10) to move up and down along guide rail (60) by described slider-crank mechanism.
2. the conveying robot that finger spacing as claimed in claim 1 is adjustable, it is characterized in that, described bearing is external screw thread bearing (30).
3. the conveying robot that finger spacing as claimed in claim 1 is adjustable, it is characterized in that, described manipulator also comprises a shell, and the described finger unit (10) be fixedly connected with bearing is fixed on shell.
4. the conveying robot that finger spacing as claimed in claim 3 is adjustable, it is characterized in that, described guide rail (60) is arranged on shell.
5. the conveying robot that finger spacing as claimed in claim 1 is adjustable, it is characterized in that, described each finger unit (10) is also provided with tray (12) and cover plate (13), and described mechanical finger (11) is fixed between tray (12) and cover plate (13); Described groove (40) is opened on tray (12).
6. the conveying robot that the finger spacing as described in any one of claim 1-5 is adjustable, it is characterized in that, described finger unit (10) is provided with 5, and in the vertical direction is respectively from top to bottom: the first finger unit (101), second finger unit (102), the 3rd finger unit (103), the 4th finger unit (104) and the 5th finger unit (105);
Wherein, the 3rd finger unit (103) is fixed on shell, and one of them bearing is fixedly connected with the 3rd finger unit (103);
5th finger unit (105) vertically moves, and drivening rod (20) rotates around the bearing be fixedly connected with the 3rd finger unit (103), drives other finger units (10) to move up and down along guide rail (60) by slider-crank mechanism.
7. the conveying robot that finger spacing as claimed in claim 6 is adjustable, it is characterized in that, one of them bearing is fixed on the tray (12) of the 3rd finger unit (103).
8. the conveying robot that the finger spacing as described in any one of claim 1-5 is adjustable, is characterized in that, described manipulator is used for wafer carrying.
9. a wafter delivery appts, is characterized in that, is provided with the conveying robot that finger spacing described in any one of claim 1-8 is adjustable in described wafter delivery appts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310451911.1A CN104517879A (en) | 2013-09-28 | 2013-09-28 | Convey manipulator with adjustable finger interval and wafer convey device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310451911.1A CN104517879A (en) | 2013-09-28 | 2013-09-28 | Convey manipulator with adjustable finger interval and wafer convey device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104517879A true CN104517879A (en) | 2015-04-15 |
Family
ID=52792988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310451911.1A Pending CN104517879A (en) | 2013-09-28 | 2013-09-28 | Convey manipulator with adjustable finger interval and wafer convey device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104517879A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106346458A (en) * | 2015-07-13 | 2017-01-25 | 日本电产三协株式会社 | Industrial robot |
| JPWO2016190344A1 (en) * | 2015-05-26 | 2018-03-15 | Ｓｋマシナリー株式会社 | Multi-base type single-axis robot and multi-base type single-axis robot |
| CN108656123A (en) * | 2017-03-27 | 2018-10-16 | 日本电产三协株式会社 | Industrial robot |
| CN110223947A (en) * | 2019-04-23 | 2019-09-10 | 欧金森 | A kind of multistage wafer transfer device |
| CN113119144A (en) * | 2021-04-19 | 2021-07-16 | 深圳众为兴技术股份有限公司 | End effector for robot, and wafer transfer apparatus |
| CN117766446A (en) * | 2024-02-20 | 2024-03-26 | 无锡星微科技有限公司 | Wafer conveying manipulator and wafer conveying system with same |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020153735A1 (en) * | 2000-03-03 | 2002-10-24 | Micron Technology, Inc. | Variable-pitch pick and place device |
| US20050123383A1 (en) * | 2003-10-08 | 2005-06-09 | Kawasaki Jukogyo Kabushiki Kaisha | Substrate holding device |
| US20080031717A1 (en) * | 2006-07-26 | 2008-02-07 | Hans-Peter Wild | Gripper device |
| WO2010103876A1 (en) * | 2009-03-13 | 2010-09-16 | 川崎重工業株式会社 | Robot provided with end effector, and method for operating the robot |
-
2013
- 2013-09-28 CN CN201310451911.1A patent/CN104517879A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020153735A1 (en) * | 2000-03-03 | 2002-10-24 | Micron Technology, Inc. | Variable-pitch pick and place device |
| US20050123383A1 (en) * | 2003-10-08 | 2005-06-09 | Kawasaki Jukogyo Kabushiki Kaisha | Substrate holding device |
| US20080031717A1 (en) * | 2006-07-26 | 2008-02-07 | Hans-Peter Wild | Gripper device |
| WO2010103876A1 (en) * | 2009-03-13 | 2010-09-16 | 川崎重工業株式会社 | Robot provided with end effector, and method for operating the robot |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2016190344A1 (en) * | 2015-05-26 | 2018-03-15 | Ｓｋマシナリー株式会社 | Multi-base type single-axis robot and multi-base type single-axis robot |
| CN106346458A (en) * | 2015-07-13 | 2017-01-25 | 日本电产三协株式会社 | Industrial robot |
| CN106346458B (en) * | 2015-07-13 | 2021-05-28 | 日本电产三协株式会社 | Industrial robot |
| CN108656123A (en) * | 2017-03-27 | 2018-10-16 | 日本电产三协株式会社 | Industrial robot |
| CN108656123B (en) * | 2017-03-27 | 2021-08-06 | 日本电产三协株式会社 | Industrial robot |
| CN110223947A (en) * | 2019-04-23 | 2019-09-10 | 欧金森 | A kind of multistage wafer transfer device |
| CN110223947B (en) * | 2019-04-23 | 2021-08-10 | 思泰基智能科技(上海)有限公司 | Multistage wafer conveyer |
| CN113119144A (en) * | 2021-04-19 | 2021-07-16 | 深圳众为兴技术股份有限公司 | End effector for robot, and wafer transfer apparatus |
| CN117766446A (en) * | 2024-02-20 | 2024-03-26 | 无锡星微科技有限公司 | Wafer conveying manipulator and wafer conveying system with same |
| CN117766446B (en) * | 2024-02-20 | 2024-05-03 | 无锡星微科技有限公司 | Wafer conveying manipulator and wafer conveying system with same |
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Application publication date: 20150415 |