CN104516010B - X-ray beam intensity monitoring device and X-ray inspection system - Google Patents

Abstract

The invention discloses a kind of X-ray beam intensity monitoring device and X-ray inspection systems.X-ray beam intensity monitoring device includes strength investigation module and data processing module, strength investigation module is used to receive the irradiation of X-ray line and issues detectable signal, data processing module is coupled with strength investigation module to receive detectable signal and export X-ray beam intensity monitoring signal, wherein, X-ray beam intensity monitoring signal includes the dosage monitoring signal of X-ray line and the gamma correction signal of X-ray line.The X-ray beam intensity monitoring device can carry out dosage monitoring and brightness monitoring simultaneously, improve the service efficiency of X-ray beam intensity monitoring device.

Description

X-ray beam intensity monitoring device and X-ray inspection system

technical field

The invention relates to the technical field of X-ray applications, in particular to an X-ray beam intensity monitoring device and an X-ray inspection system.

Background technique

In the X-ray inspection system, the X-ray emitting device is mainly an electron accelerator or an X-ray tube. The X-ray emitting device and the detector array for X-ray inspection are placed on both sides of the inspected object. Generally, the X-ray beams emitted by the X-ray emitting device include working beams directly irradiated on the detector array and redundant beams irradiated outside the detector array.

The X-ray beam is usually a fan-shaped beam, and the fan-shaped beam is perpendicular to the ground. In the fan-shaped beam, the width of the working beam at the detector array is generally required to be approximately equal to the width of the detector array. For this purpose, a collimator is often arranged between the x-ray emission device and the detector array. The collimator is used to shield the redundant beam in the X-ray beam. When inspecting the object to be inspected, the collimator is located between the X-ray emitting device and the object to be inspected.

Generally, the monitoring of the intensity of the X-ray beam is realized through dose monitoring or brightness monitoring of the X-ray beam. Dose monitoring refers to monitoring the dose intensity of the X-ray beam and judging whether it exceeds the specified dose value. If it exceeds, a dose monitoring signal will be sent to alarm or cut off the power supply of the X-ray emitting device. Brightness monitoring refers to collecting the fluctuating change value of the X-ray beam intensity in each measurement cycle, and sending out a brightness correction signal to correct the value collected by the detector array, so as to obtain more accurate information of the inspected object.

The dose monitoring device and the brightness monitoring device of the X-ray beam are commonly used in the X-ray inspection system, and generally these two devices exist independently in the X-ray inspection system.

The X-ray inspection system and its X-ray beam intensity monitoring device in the prior art will be described below by taking an X-ray inspection system using an electron accelerator as an X-ray emitting device as an example.

The dose monitoring device in the prior art includes a detection module, which is generally placed directly at the X-ray beam outlet of the electron accelerator, in the box of the electron accelerator, and the X-rays directly penetrate the sensitive volume of the detection module, and then irradiated onto the object to be inspected.

The monitoring method adopted by the luminance monitoring device in the prior art is to use redundant detectors located in the upper edge region of the fan-shaped beam in the X-ray inspection detector array to collect luminance signals and send out luminance correction signals to correct the detector arrays. value.

In the process of realizing the present invention, the inventor of the present invention finds that the above prior art has the following deficiencies:

In the dose monitoring device of the prior art, the X-ray beam intensity is lost due to the need to penetrate the sensitive volume of the detection module, that is, the detection sensitive volume interferes with the X-ray beam intensity and energy spectrum structure reaching the inspected object. And because the electron accelerator is a strong electric device, and the detection module of the dose monitoring device is a weak electric device, the detection module is very susceptible to electromagnetic interference from the former, and generally can only provide average dose information within a period of time, such as a few seconds. In order to ensure safety in the X-ray inspection system, when the dose of the X-ray beam current is greater than the prescribed threshold, the power supply of the X-ray emitting device must be cut off as soon as possible, so the dose monitoring device must be reliable and accurate, and the above prior art It is difficult for a dose monitoring device to meet this requirement.

In the brightness monitoring device of the prior art, the redundant detectors of the detector array are easily interfered by factors such as reflected signals and mechanical deformation of the inspected object. And when the X-ray emitting device is an electron accelerator, in the direction of the "main beam" of the X-ray beam (that is, the direction of the electron beam), the intensity of the X-ray beam is high, and the position where the angle between the "main beam" and the "main beam" is larger The weaker the X-ray beam intensity is, the weaker the X-ray beam intensity in the area where the redundant detector is located is generally weaker, which ultimately affects the monitoring effect.

Contents of the invention

The object of the present invention is to provide an X-ray beam intensity monitoring device and an X-ray inspection system, which can improve the use efficiency of the X-ray beam intensity monitoring device.

The first aspect of the present invention provides an X-ray beam intensity monitoring device, including an intensity detection module and a data processing module. The intensity detection module is coupled to receive the detection signal and output an X-ray beam intensity monitoring signal, wherein the X-ray beam intensity monitoring signal includes a dose monitoring signal of the X-ray beam and the X-ray beam intensity monitoring signal. The brightness correction signal for the stream.

Further, the X-ray beam intensity monitoring device includes multiple intensity detection modules, and the multiple intensity detection modules are coupled to the same data processing module.

Further, each intensity detection module is independently sealed.

Further, the data processing module includes an integral amplifier and a signal conversion device, the integral amplifier is coupled to the intensity detection module to receive the detection signal and output a voltage signal, the signal conversion device is coupled to the integral amplifier to The voltage signal is received and the dose monitoring signal and the brightness correction signal are output.

Further, the signal conversion device includes a voltage comparator and an analog-to-digital converter, the voltage comparator is coupled to the integrating amplifier to receive the voltage signal and output a level signal as the dose monitoring signal, the analog A digital converter is coupled with the integrating amplifier to receive the voltage signal and output a digital signal as the brightness correction signal.

Further, the intensity detection module is a scintillation detection module or a gas detection module.

Further, the intensity detection module is a scintillation detection module, the scintillation detection module includes a scintillator, a photosensitive device and a shielding layer, one end of the scintillator is coupled to the photosensitive device, and the shielding layer is arranged on the photosensitive device periphery.

The second aspect of the present invention provides an X-ray inspection system, including an X-ray emitting device, a detector array, and an X-ray beam intensity monitoring device, wherein the X-ray beam intensity monitoring device is any one of the X-ray beam intensity monitoring devices in the first aspect of the present invention. One said X-ray beam intensity monitoring device.

Further, the X-ray beam emitted by the X-ray emitting device includes a working beam irradiated on the detector array and a redundant beam irradiated outside the detector array, and the X-ray beam The intensity detection module of the intensity monitoring device is arranged between the X-ray emitting device and the detector array to receive the irradiation of the redundant beam and send out the detection signal.

Further, the X-ray inspection system further includes a collimator, and the intensity detection module is arranged between the X-ray emitting device and the collimator.

Based on the X-ray beam intensity monitoring device and the X-ray inspection system provided by the present invention, the X-ray beam intensity monitoring device includes an intensity detection module and a data processing module, and the intensity detection module is used to accept the irradiation of the X-ray beam and send a detection signal , the data processing module is coupled with the intensity detection module to receive the detection signal and output the X-ray beam intensity monitoring signal, wherein the X-ray beam intensity monitoring signal includes a dose monitoring signal of the X-ray beam and a brightness correction signal of the X-ray beam Therefore, the X-ray beam intensity monitoring device can simultaneously perform dose monitoring and brightness monitoring, thereby improving the use efficiency of the X-ray beam intensity monitoring device.

Other features of the present invention and advantages thereof will become apparent from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings.

Description of drawings

The accompanying drawings described here are used to provide a further understanding of the present invention and constitute a part of the application. The schematic embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations to the present invention. In the attached picture:

FIG. 1 is a schematic layout diagram of an X-ray inspection system according to a first embodiment of the present invention.

Fig. 2 is a schematic sectional view along the line BB of the X-ray inspection system shown in Fig. 1 .

FIG. 3 is a schematic structural diagram of the intensity detection module of the X-ray beam intensity monitoring device in the X-ray inspection system shown in FIG. 1 .

FIG. 4 is a schematic diagram of the CC-direction sectional structure principle of the intensity detection module shown in FIG. 3 .

FIG. 5 is a schematic block diagram of the X-ray beam intensity monitoring device of the X-ray inspection system shown in FIG. 1 .

FIG. 6 is a schematic diagram of the structural principle in the top view direction of the intensity detection module of the X-ray beam intensity monitoring device in the X-ray inspection system according to the second embodiment of the present invention.

FIG. 7 is a schematic diagram of the structural principle of the intensity detection module shown in FIG. 6 when observed perpendicular to the X-ray fan-shaped beam.

Among Fig. 1 to Fig. 7, each reference sign represents respectively:

1. Electron accelerator;

2. Detector array;

3. Collimator;

4. The inspected object;

5. Flicker detection module;

51. Scintillator;

52. Photosensitive device;

53. Shielding layer;

6. Gas detection module;

61. High voltage electrode plate;

62. Collecting electrode plate;

63. Working gas.

Detailed ways

The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

The relative arrangements of components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise. At the same time, it should be understood that, for the convenience of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship. Techniques, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such techniques, methods and devices should be considered part of the Authorized Specification. In all examples shown and discussed herein, any specific values should be construed as exemplary only, and not as limitations. Therefore, other examples of the exemplary embodiment may have different values. It should be noted that like numerals and letters denote like items in the following figures, therefore, once an item is defined in one figure, it does not require further discussion in subsequent figures.

first embodiment

1 to 5 show an X-ray inspection system according to a first embodiment of the present invention.

FIG. 1 is a schematic layout diagram of an X-ray inspection system according to a first embodiment of the present invention. Fig. 2 is a schematic sectional view along the line BB of the X-ray inspection system shown in Fig. 1 . As shown in Figures 1 and 2, the X-ray inspection system of the first embodiment includes an X-ray emitting device for emitting X-rays, a collimator 3, a detector array 2 for X-ray inspection, and an X-ray beam intensity monitoring device.

Wherein the X-ray beam intensity monitoring device is used for monitoring the X-ray beam intensity of the X-ray emitting device. The X-ray beam intensity monitoring device includes an intensity detection module and a data processing module. The data processing module is coupled with the intensity detection module to receive the detection signal sent by the intensity detection module and output the X-ray beam intensity monitoring signal. The X-ray beam intensity monitoring signal includes a dose monitoring signal of the X-ray beam and a brightness correction signal of the X-ray beam. The X-ray beam intensity monitoring device can simultaneously perform dose monitoring and brightness monitoring, thereby improving the use efficiency of the X-ray beam intensity monitoring device.

The X-ray beams emitted by the X-ray emitting device include working beams irradiated on the detector array 2 and redundant beams irradiated outside the detector array 2 . The intensity detection module of the X-ray beam intensity monitoring device is preferably arranged between the emitting device and the detector array 2 to receive the irradiation of redundant beams and send out detection signals. The intensity detection module of the X-ray inspection system utilizes the redundant beam current of the X-ray beam, and the intensity detection module is basically not affected by the X-ray emitting device and the inspected object 4, so that the monitoring of the X-ray beam intensity The result is more accurate and reliable. In addition, since the intensity detection module has no influence on the working beam, it does not affect the intensity of the working beam reaching the inspected object 4 and the detector array 2 .

In the first embodiment, the X-ray emitting device is an electron accelerator 1 . In other unshown embodiments, it may be other X-ray emitting devices such as an X-ray tube.

The collimator 3 is located between the X-ray emitting device and the detector array 2 . The collimator 3 is used to shield redundant beam currents. When inspecting the inspected object 4, the collimator 3 is located between the X-ray emitting device and the inspected object 4, and the working beam of the X-ray beam passes through the collimator 3 and irradiates the inspected object 4 and the detector array2.

When the X-ray inspection system has a collimator 3 , the intensity detection module is located between the X-ray emitting device and the collimator 3 . This setting avoids the direct electromagnetic interference of the electron accelerator 1 and at the same time, the setting of the collimator 3 will not affect the monitoring result of the X-ray beam intensity.

Preferably, the X-ray beam intensity monitoring device includes a plurality of intensity detection modules arranged symmetrically with respect to the working beam. Arranging multiple intensity detection modules symmetrically with respect to the working beam can make the detection signals sent by each intensity detection module compensate each other when the X-ray beam emitted by the X-ray emitting device is deflected, so that the X-ray beam intensity can The monitoring results are more accurate and reliable than only setting a single intensity detection module. Specifically, two intensity detection modules are provided in the first embodiment. In other unshown embodiments, more intensity detection modules, for example four, may be provided.

In the first embodiment, the working beam is a fan-shaped beam, and the intensity detection module is located at the side of the fan-shaped beam. This setting puts the intensity detection module at the "main beam" of the X-ray beam, closer to the center of the X-ray beam, so that the intensity information of the X-ray beam can be provided more effectively.

As shown in Figures 1 and 2, the fan of the fan-shaped beam is perpendicular to the ground, the side where the electron accelerator 1 is located is the front side, the side where the detector array 2 is located is the rear side, and the left and right sides of the fan-shaped beam are Each intensity detection module is arranged (hereinafter referred to as the left detection module and the right detection module). The left detection module and the right detection module are placed between the electron accelerator 1 and the collimator 3, and the obtained detection signals are transmitted to the data processing module for combined processing and conversion to generate X-ray beam intensity monitoring signals.

The left detection module and the right detection module are symmetrically arranged on both sides of the fan of the fan-shaped beam and are located at a position where the redundant beam can directly irradiate, so as to monitor the intensity of the X-ray beam by using the redundant beam. There is a certain gap between the left detection module and the right detection module, and the width of the gap ensures that the working beam can be irradiated within the range required by the width of the detector array 2 without being affected.

The left detection module and the right detection module are two geometrically symmetrical detectors with the same structure. In the direction perpendicular to the fan of the X-ray beam, there is enough sensitive size to satisfy the coverage width of the sensitive volumes of the two detectors when the fan-shaped beam is deflected left and right. The intensity detection module can be realized in many ways. FIG. 3 is a schematic structural diagram of an intensity detection module of the X-ray beam intensity monitoring device shown in FIG. 1 . FIG. 4 is a schematic diagram of the CC-direction sectional structure principle of the intensity detection module shown in FIG. 3 . 3 and 4 illustrate the working principle of the intensity detection module of the first embodiment by taking one of the left detection module and the right detection module as an example. In FIG. 4, L represents the incident direction of the X-ray beam.

As shown in FIG. 3 and FIG. 4 , the left detection module and the right detection module in the first embodiment are scintillation detection modules 5 . The scintillation detection module 5 includes a scintillator 51 , a photosensitive device 52 , a shielding layer 53 and a reflective layer (not shown). One end of the scintillator 51 is coupled with the photosensitive device 52 and located between the photosensitive device 52 and the working beam. The shielding layer 53 is disposed on the periphery of the photosensitive device 52 to shield the photosensitive device 52 from being damaged by scattered X-rays. The shielding layer 53 is preferably made of heavy metal. The non-coupling surface of the scintillator 51 that is not coupled with the photosensitive device 52 is wrapped with a reflective layer. The material of the reflective layer may be titanium dioxide. In addition, each scintillation detection module 5 has its own light sealing structure, and the scintillator 51 and photosensitive device 52 are arranged inside the corresponding sealing structure to ensure that the sealing structure does not leak light.

The scintillator 51 (ie, the sensitive volume) of the scintillation detection module 5 is preferably made of scintillation crystals. The length between the scintillator 51 and the photosensitive device 52 preferably ensures that the deflection of the fan-shaped beam will not reach the position of the photosensitive device 52 . The scintillator 51 is preferably perpendicular to the incident direction L of the X-ray beam.

When the scintillation detection module 5 detects the intensity of the X-ray beam, the X-rays are irradiated on the scintillation crystal to emit scintillation light, and the photosensitive device 52 absorbs the scintillation light to generate an electrical signal, and the electrical signal output by the photosensitive device 52 is input to the data processing module for the next step deal with.

Using the scintillation detection module 5 has the advantages of high density of sensitive medium and high sensitivity.

FIG. 5 is a schematic block diagram of the X-ray beam intensity monitoring device of the X-ray inspection system shown in FIG. 1 . As shown in Figure 5, the data processing module is coupled with each intensity detection module, and the detection signals output by each intensity detection module are transmitted to the data processing module together, and the data processing module receives the detection signals of each intensity detection module and processes the detection signals Combine, process and output X-ray beam intensity monitoring signals in the module.

As shown in Figure 5, the data processing module includes an integral amplifier and a signal conversion device. The integral amplifier is coupled with each intensity detection module to receive the detection signal sent by each intensity detection module and output a voltage signal. The magnitude of the voltage signal is proportional to the intensity of the X-ray beam. The signal conversion device is coupled with the integral amplifier to receive the voltage signal of the integral amplifier and output the X-ray beam intensity monitoring signal.

As shown in FIG. 5 , in the first embodiment, the signal conversion device specifically includes a voltage comparator and an analog-to-digital converter. The voltage comparator and the analog-to-digital converter perform conversions independently of each other.

The voltage comparator is coupled with the integral amplifier to receive the voltage signal of the integral amplifier and output the level signal as the dose monitoring signal of the X-ray beam. The reference voltage of the voltage comparator is determined according to the prescribed X-ray dose intensity. The dose monitoring signal controls whether the X-ray emitting device should be powered off or alarmed.

The analog-to-digital converter is coupled with the integral amplifier to receive the voltage signal of the integral amplifier and output a digital signal as a brightness correction signal of the X-ray beam.

The X-ray beam intensity monitoring device of the X-ray inspection system of the first embodiment can perform dose monitoring and brightness monitoring at the same time, which improves the use efficiency of the X-ray beam intensity monitoring device. And dose monitoring no longer affects the intensity of the working beam, and avoids the electromagnetic interference of the electron accelerator 1 . Brightness monitoring is no longer affected by the mechanical deformation of the inspected object 4 and the system.

second embodiment

The difference between the second embodiment and the first embodiment is that in the second embodiment, the gas detection module 6 replaces the scintillation detection module 5 of the first embodiment as the intensity detection module. Wherein, the left detection module and the right detection module each use a gas detection module 6 with the same structure to detect the intensity of the X-ray beam.

FIG. 6 is a schematic diagram of the structural principle in the top view direction of the intensity detection module of the X-ray beam intensity monitoring device in the X-ray inspection system according to the second embodiment of the present invention. FIG. 7 is a schematic diagram of the structural principle of the intensity detection module shown in FIG. 6 when it is perpendicular to the X-ray fan-shaped beam. 6 and 7 illustrate the working principle of the intensity detection module of the second embodiment by taking one of the left detection module and the right detection module as an example. In FIG. 6 and FIG. 7, L represents the incident direction of the X-ray beam.

6 and 7, the gas detection module 6 includes a gas ionization chamber. The gas ionization chamber includes two electrode plates, namely a high-voltage electrode plate 61 and a collecting electrode plate 62 . Both electrode plates are perpendicular to the incident direction L of the X-ray beam. The high-voltage electrode plate 61 is externally connected to high-voltage electricity and receives the irradiation of redundant beams, and the collecting electrode plate 62 is coupled with the data processing module. Between the high voltage electrode plate 61 and the collecting electrode plate 62 is the working gas 63 . The high-voltage electrode plate 61, the collecting electrode plate 62 and the working gas 63 need to be installed in a sealed structure.

The advantage of using the gas detection module 6 as the intensity detection module is that there is no radiation damage, it is easy to increase the detection area, and the cost is low.

For other unexplained parts in the second embodiment, reference may be made to the relevant content of the first embodiment, and details will not be repeated here.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them; although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that: the present invention can still be Modifications to the specific implementation of the invention or equivalent replacement of some technical features; without departing from the spirit of the technical solution of the present invention, should be included in the scope of the technical solution claimed in the present invention.

Claims (8)

1. An X-ray beam intensity monitoring device, characterized in that it comprises an intensity detection module and a data processing module, the intensity detection module is used to accept the irradiation of the X-ray beam and sends a detection signal, and the data processing module and The intensity detection module is coupled to receive the detection signal and output an X-ray beam intensity monitoring signal, wherein the X-ray beam intensity monitoring signal includes a dose monitoring signal of the X-ray beam and the X-ray beam intensity monitoring signal. The brightness correction signal of the stream; the data processing module includes an integral amplifier and a signal conversion device, the integral amplifier is coupled with the intensity detection module to receive the detection signal and output a voltage signal, and the signal conversion device is connected to the integral an amplifier coupled to receive the voltage signal and output the dose monitoring signal and the brightness correction signal; the signal converting means includes a voltage comparator and an analog-to-digital converter, and the voltage comparator is coupled to the integrating amplifier to receive the voltage signal and output a level signal as the dose monitoring signal, the analog-to-digital converter is coupled with the integrating amplifier to receive the voltage signal and output a digital signal as the brightness correction signal; the voltage comparator and the ADC perform conversions independently of each other. 2. The X-ray beam intensity monitoring device according to claim 1, characterized in that, the X-ray beam intensity monitoring device comprises a plurality of intensity detection modules, and the plurality of intensity detection modules are connected to the same The above data processing module is coupled. 3 . The X-ray beam intensity monitoring device according to claim 2 , wherein each intensity detection module is independently sealed. 4 . 4. The X-ray beam intensity monitoring device according to any one of claims 1 to 3, characterized in that the intensity detection module is a scintillation detection module (5) or a gas detection module (6). 5. The X-ray beam intensity monitoring device according to claim 4, characterized in that, the intensity detection module is a scintillation detection module (5), and the scintillation detection module (5) includes a scintillator (51), a photosensitive A device (52) and a shielding layer (53), one end of the scintillator (51) is coupled to the photosensitive device (52), and the shielding layer (53) is arranged on the periphery of the photosensitive device (52). 6. An X-ray inspection system, comprising an X-ray emission device, a detector array (2) and an X-ray beam intensity monitoring device, wherein, the X-ray beam intensity monitoring device is according to any one of claims 1 to 5 One said X-ray beam intensity monitoring device. 7. The X-ray inspection system according to claim 6, characterized in that, the X-ray beams emitted by the X-ray emitting device include a working beam irradiated on the detector array (2) and a beam irradiated on the detector array (2). Redundant beams outside the detector array (2), the intensity detection module of the X-ray beam intensity monitoring device is arranged between the X-ray emitting device and the detector array (2) to receiving the irradiation of the redundant beam and sending out the detection signal. 8. The X-ray inspection system according to claim 7, characterized in that, the X-ray inspection system further comprises a collimator (3), and the intensity detection module is arranged on the X-ray emitting device and the collimator between the straighteners (3).