CN104506081A - Cylindrical piezoelectric motor capable of generating spiral linear movement - Google Patents
Cylindrical piezoelectric motor capable of generating spiral linear movement Download PDFInfo
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Abstract
本发明公布了一种产生螺旋直线运动的圆筒状压电马达,包括定子和转子,定子由压电陶瓷外圆筒与弹性体内圆筒组成;定子与转子之间有相互配合的螺纹,并通过螺纹副传动,施加一对交流信号于定子的压电陶瓷外圆筒,可激发定子产生沿圆周方向的行波,通过螺纹副驱动,转子产生螺旋直线运动输出。本发明可解决现有旋转直线压电马达结构复杂、微型化困难等问题,可省去其它传动机构,结构简单,能更好地适合微型化,在精密驱动领域,特别是微型光学模组中具有重要应用前景。
The invention discloses a cylindrical piezoelectric motor that produces spiral linear motion, including a stator and a rotor. The stator is composed of a piezoelectric ceramic outer cylinder and an elastic inner cylinder; the stator and the rotor are provided with mutually matched threads, and Through the screw pair transmission, a pair of AC signals are applied to the piezoelectric ceramic outer cylinder of the stator, which can excite the stator to generate traveling waves along the circumferential direction. Driven by the screw pair, the rotor generates a helical linear motion output. The present invention can solve the problems of complex structure and difficulty in miniaturization of the existing rotary linear piezoelectric motor, can save other transmission mechanisms, has a simple structure, and can be better suitable for miniaturization, especially in the field of precision driving, especially in micro-optical modules It has important application prospects.
Description
技术领域technical field
本发明属于精密驱动与定位技术领域,涉及一种螺旋直线压电马达,尤其涉及一种产生螺旋直线运动的圆筒状压电马达。The invention belongs to the technical field of precision driving and positioning, and relates to a helical linear piezoelectric motor, in particular to a cylindrical piezoelectric motor for generating helical linear motion.
背景技术Background technique
压电马达是一种利用压电元件的逆压电效应激发振子(或称定子)产生微幅度、高频的超声振动,在振子表面特定点或特定区域形成具有特定轨迹的质点运动,通过振子与动子间的摩擦耦合实现机械能输出的新型马达。压电马达具有结构紧凑、低转速大力矩、响应快、断电自锁、不受磁电干扰等优点,作为一种新型驱动器有着十分广泛的应用,现已开始广泛应用到照相机、扫描电子显微镜、机器人、精密机械等各个领域。Piezoelectric motor is a kind of vibrator (or stator) that uses the inverse piezoelectric effect of piezoelectric elements to excite the vibrator (or stator) to generate micro-amplitude, high-frequency ultrasonic vibration, and forms a particle motion with a specific trajectory at a specific point or area on the vibrator surface. A new type of motor that achieves mechanical energy output through frictional coupling with the mover. The piezoelectric motor has the advantages of compact structure, low speed and high torque, fast response, self-locking when power off, and no magnetoelectric interference. As a new type of drive, it has a very wide range of applications. , robotics, precision machinery and other fields.
按照动子的输出形式不同,压电马达能分为直线、旋转与多自由度等几种输出类型。旋转直线超声马达作为目前诸多输出类型压电马达中的一种,其振子与动子之间主要采用螺纹副进行传动,通过螺纹副传动实现旋转直线两自由度—螺旋直线运动的输出。与其它类超声马达相比,旋转直线超声马达具有结构简单、易于微型化、定位精度高等优势,可广泛应用于精密驱动与传动的技术领域。According to the different output forms of movers, piezoelectric motors can be divided into several output types such as linear, rotary and multi-degree-of-freedom. The rotary linear ultrasonic motor is one of the current output types of piezoelectric motors. The vibrator and the mover are mainly driven by a thread pair, and the output of the two degrees of freedom of the rotating line—the helical linear motion is realized through the thread pair transmission. Compared with other types of ultrasonic motors, rotary linear ultrasonic motors have the advantages of simple structure, easy miniaturization, and high positioning accuracy, and can be widely used in the technical field of precision drive and transmission.
公布号为CN1767347的中国专利公开了一种螺纹驱动多面体超声马达,将4-12个压电元件粘贴到金属薄壁圆筒定子外侧的平面上,转子与金属薄壁圆筒定子通过螺纹相啮合,通过激励压电片使定子中产生沿圆周方向的面内弯曲行波,通过螺纹直接驱动转子旋转并转换成转子的螺旋直线运动。但是该马达的转子为多面体管体结构,多个压电陶瓷片粘贴在多面体的各个面上构成驱动体,对加工要求较高,制作工序也较为复杂,为马达的批量化生产与微型化带来制作工艺复杂等技术难题。The Chinese patent with the publication number CN1767347 discloses a thread-driven polyhedral ultrasonic motor. 4-12 piezoelectric elements are pasted on the plane outside the metal thin-walled cylindrical stator. The rotor and the metal thin-walled cylindrical stator are meshed through threads. The electric sheet makes the in-plane bending traveling wave along the circumferential direction in the stator, which directly drives the rotor to rotate through the screw thread and converts it into the helical linear motion of the rotor. However, the rotor of this motor has a polyhedron tube structure, and multiple piezoelectric ceramic sheets are pasted on each face of the polyhedron to form a driving body, which requires high processing requirements and complicated manufacturing procedures, which is a major obstacle for mass production and miniaturization of motors. To solve technical problems such as complex manufacturing process.
公布号为US6940209的美国专利公开了一种杆状型直线压电马达,其利用两个压电堆元件在两个端部产生“呼啦圈”(wobbling)运动,通过螺纹驱动原理推动一个插入其内的螺杆产生直线运动,其可以做成小直径的杆状结构,但是其在长度方向上的尺寸较大,不适合用于做超薄型的镜头模块。此外,这种马达的不足还在于需要较多的辅助机械结构。The U.S. patent with the publication number US6940209 discloses a rod-shaped linear piezoelectric motor, which uses two piezoelectric stack elements to generate a "hula hoop" (wobbling) motion at both ends, and pushes a motor inserted into it through the principle of screw drive. The inner screw produces linear motion, which can be made into a small-diameter rod-shaped structure, but its size in the length direction is relatively large, which is not suitable for making ultra-thin lens modules. In addition, the disadvantage of this motor is that it requires more auxiliary mechanical structures.
发明内容Contents of the invention
为了克服上述现有技术的不足,本发明提供一种可产生螺旋直线运动的圆筒状压电马达,定子与转子之间通过螺纹直接产生运动,实现旋转与直线两个自由度的运动,可省去其他传动机构,使其结构更加简单紧凑,能更好地适应微型化以及批量化生产。In order to overcome the deficiencies of the prior art above, the present invention provides a cylindrical piezoelectric motor that can produce spiral linear motion. The stator and rotor can directly generate motion through threads to realize two degrees of freedom of rotation and linear motion. Omitting other transmission mechanisms makes the structure simpler and more compact, and can better adapt to miniaturization and mass production.
本发明提供的技术方案是:The technical scheme provided by the invention is:
一种产生螺旋直线运动的圆筒状压电马达,包括定子与转子,所述定子包括压电陶瓷外圆筒和内表面带有螺纹的弹性体内圆筒;所述转子为具有外螺纹的中空弹性体圆环;所述转子的外螺纹与所述定子的弹性体内圆筒内表面的螺纹相吻合并旋入定子中;所述定子与所述转子通过螺纹副传动,实现转子的螺旋直线运动输出。A cylindrical piezoelectric motor that produces spiral linear motion, including a stator and a rotor, the stator includes a piezoelectric ceramic outer cylinder and an elastic inner cylinder with threads on the inner surface; the rotor is a hollow cylinder with external threads Elastomer ring; the external thread of the rotor coincides with the thread on the inner surface of the elastic inner cylinder of the stator and is screwed into the stator; the stator and the rotor are driven by thread pairs to realize the helical linear motion of the rotor output.
上述压电马达中,所述压电陶瓷外圆筒沿筒壁方向极化,在筒的内外壁分别镀有电极,内壁的电极是一个整体,外壁的电极沿圆周方向分成多个区域,每个区域为一个电极;所述压电陶瓷外圆筒内壁的电极接地,外壁的多个电极接通一对高频交流激励信号;定子的压电陶瓷外圆筒在所述一对高频交流激励信号的激励下,激发出两个具有相位差的弯曲谐振振动模态,经叠加耦合形成沿所述定子的弹性体内外圆周方向上传播的行波;通过所述行波和定子与转子之间的螺纹副,所述定子驱动所述转子沿定子轴向做螺旋直线运动。In the above piezoelectric motor, the piezoelectric ceramic outer cylinder is polarized along the direction of the cylinder wall, and the inner and outer walls of the cylinder are respectively plated with electrodes. The electrodes on the inner wall are integrated, and the electrodes on the outer wall are divided into multiple regions along the circumferential direction. Each area is an electrode; the electrodes on the inner wall of the piezoelectric ceramic outer cylinder are grounded, and a plurality of electrodes on the outer wall are connected to a pair of high-frequency AC excitation signals; the piezoelectric ceramic outer cylinder of the stator is connected to the pair of high-frequency AC excitation signals Under the excitation of the excitation signal, two bending resonance vibration modes with a phase difference are excited, and the superimposed coupling forms a traveling wave propagating along the inner and outer circumferential directions of the elastic body of the stator; through the traveling wave and the connection between the stator and the rotor Between the thread pair, the stator drives the rotor to make a helical linear motion along the stator axis.
上述压电马达中,压电陶瓷外圆筒的外壁分成多个区域具体是沿圆周方向均分成四的倍数个区域;在本发明的一个实施例中,压电陶瓷外圆筒的外壁的电极为八个,按顺时针顺序依次为电极11~电极18,所述电极11和15为A1激振组,电极13和17为A2激振组,A1和A2激振组构成A激振组;电极12和16为B1激振组,电极14和18为B2激振组,B1和B2激振组构成B激振组;所述A激振组和B激振组所接通的高频交流激励信号为频率相同、电压幅值相同,但相位不同的两个超声频率电信号。本发明实施例中,两个超声频率电信号有的相位差。In the above-mentioned piezoelectric motor, the outer wall of the piezoelectric ceramic outer cylinder is divided into multiple regions, specifically divided into multiples of four regions along the circumferential direction; in one embodiment of the present invention, the electrodes of the outer wall of the piezoelectric ceramic outer cylinder There are eight electrodes, which are electrodes 11 to 18 in clockwise order, the electrodes 11 and 15 are the A1 excitation group, the electrodes 13 and 17 are the A2 excitation group, and the A1 and A2 excitation groups form the A excitation group; The electrodes 12 and 16 are the B1 excitation group, the electrodes 14 and 18 are the B2 excitation group, and the B1 and B2 excitation groups form the B excitation group; The excitation signals are two ultrasonic frequency electrical signals with the same frequency and the same voltage amplitude but different phases. In the embodiment of the present invention, the two ultrasonic frequency electric signals have phase difference.
上述压电马达中,压电陶瓷外圆筒和弹性体内圆筒通过胶粘或冷焊工艺固结。定子和转子弹性体的材料为钛合金、铜合金、合金钢、铝合金或高强度弹性高分子聚合物。高强度弹性高分子聚合物为聚酰胺(PA)、聚碳酸酯(PC)、聚甲醛(POM)、聚苯醚(PPO)、聚醚醚酮(PEEK)等工程塑料。In the above piezoelectric motor, the piezoelectric ceramic outer cylinder and the elastic inner cylinder are consolidated by gluing or cold welding. The material of the stator and the rotor elastic body is titanium alloy, copper alloy, alloy steel, aluminum alloy or high-strength elastic polymer. High-strength elastic polymers are engineering plastics such as polyamide (PA), polycarbonate (PC), polyoxymethylene (POM), polyphenylene oxide (PPO), and polyetheretherketone (PEEK).
压电陶瓷外圆筒的压电陶瓷是具有强压电效应的锆钛酸铅系列陶瓷或具有优异压电性能的无铅压电陶瓷,包括钛酸钡(BaTiO3)基无铅压电陶瓷、钛酸铋钠((Bi0.5Na0.5)TiO3)基无铅压电陶瓷和碱金属铌酸钾钠((K,Na)NbO3)基无铅压电陶瓷等。The piezoelectric ceramics of the piezoelectric ceramic outer cylinder are lead zirconate titanate series ceramics with strong piezoelectric effect or lead-free piezoelectric ceramics with excellent piezoelectric properties, including barium titanate (BaTiO 3 )-based lead-free piezoelectric ceramics , sodium bismuth titanate ((Bi 0.5 Na 0.5 )TiO 3 ) based lead-free piezoelectric ceramics and alkali metal potassium sodium niobate ((K,Na)NbO 3 ) based lead-free piezoelectric ceramics, etc.
上述压电马达中,转子的中空部分用于固定需要驱动的元件。In the piezoelectric motor described above, the hollow part of the rotor is used to fix the components to be driven.
与现有技术相比,本发明的有益效果是:Compared with prior art, the beneficial effect of the present invention is:
本发明提供的压电马达的定子与转子之间通过螺纹直接产生旋转与直线两个自由度的运动,可省去其他传动机构,大幅减小了压电马达系统的体积,其结构简单紧凑,简化了制造工艺,可解决现有旋转直线压电马达结构复杂、微型化困难等问题,能更好地适应微型化以及批量化生产,在精密驱动领域,特别是微型光学模组中具有重要应用前景。The stator and rotor of the piezoelectric motor provided by the present invention directly produce two degrees of freedom of rotation and linear motion through threads, which can save other transmission mechanisms and greatly reduce the volume of the piezoelectric motor system. Its structure is simple and compact. The manufacturing process is simplified, which can solve the problems of the existing rotary linear piezoelectric motor, such as complex structure and difficulty in miniaturization, and can better adapt to miniaturization and mass production. It has important applications in the field of precision drives, especially in micro-optical modules. prospect.
附图说明Description of drawings
图1为本发明的立体结构示意图;Fig. 1 is the three-dimensional structure schematic diagram of the present invention;
其中,1—压电陶瓷外圆筒;2—弹性体内圆筒;3—转子。Among them, 1—piezoelectric ceramic outer cylinder; 2—elastic inner cylinder; 3—rotor.
图2为本发明实施例中压电陶瓷外圆筒的结构示意图,外电极沿圆周划分为八(4×2)等分;Fig. 2 is a structural schematic diagram of a piezoelectric ceramic outer cylinder in an embodiment of the present invention, and the outer electrode is divided into eight (4×2) equal parts along the circumference;
图3为本发明实施例中压电陶瓷外圆筒的俯视图;Fig. 3 is a top view of the piezoelectric ceramic outer cylinder in the embodiment of the present invention;
图4为本发明实施例中压电陶瓷外圆筒采用第一种电压激励方式的结构示意图;Fig. 4 is a structural schematic diagram of the piezoelectric ceramic outer cylinder adopting the first voltage excitation method in the embodiment of the present invention;
图5为本发明实施例中压电陶瓷外圆筒采用第二种电压激励方式的结构示意图;Fig. 5 is a structural schematic diagram of the piezoelectric ceramic outer cylinder adopting the second voltage excitation method in the embodiment of the present invention;
图2~图5中,11~18为将外电极均分成的八个电极,其中,电极11和15为A1激振组,电极13和17为A2激振组,A1和A2激振组构成A激振组,电极12和16为B1激振组,电极14和18为B2激振组;B1和B2激振组构成B激振组;19为内电极;In Figures 2 to 5, 11 to 18 are eight electrodes that divide the external electrodes equally, among which, electrodes 11 and 15 are A1 excitation group, electrodes 13 and 17 are A2 excitation group, A1 and A2 excitation group constitute A vibration group, electrodes 12 and 16 are B1 vibration group, electrodes 14 and 18 are B2 vibration group; B1 and B2 vibration group constitute B vibration group; 19 is the inner electrode;
图4~图5中,ω—高频交流信号的角频率;t—时间。In Figures 4 to 5, ω—angular frequency of high-frequency AC signal; t—time.
图6为本发明实施例中压电陶瓷外圆筒在电压激励下的弯曲振动模态示意图;6 is a schematic diagram of a bending vibration mode of a piezoelectric ceramic outer cylinder under voltage excitation in an embodiment of the present invention;
其中,(a)为单独对A激振组施加交变信号,压电陶瓷外圆筒产生的驻波谐振振动;(b)为单独对B激振组施加交变信号,压电陶瓷外圆筒产生的驻波谐振振动。Among them, (a) is the standing wave resonant vibration generated by the piezoelectric ceramic outer cylinder by applying the alternating signal to the excitation group A alone; (b) is the alternating signal applied to the excitation group B alone, and the piezoelectric ceramic outer cylinder The standing wave resonant vibration generated by the barrel.
具体实施方式Detailed ways
下面结合附图,通过实施例进一步描述本发明,但不以任何方式限制本发明的范围。Below in conjunction with accompanying drawing, further describe the present invention through embodiment, but do not limit the scope of the present invention in any way.
图1为本发明的立体结构示意图;图2为本发明实施例中压电陶瓷外圆筒的结构示意图,外电极沿圆周划分为八(4×2)等分;图3为本发明实施例中压电陶瓷外圆筒的俯视图。由图可见,本发明提供的可产生螺旋直线运动的圆筒状压电马达主要由压电陶瓷外圆筒1、弹性体内圆筒2和转子3组成。Fig. 1 is the three-dimensional structure schematic diagram of the present invention; Fig. 2 is the structural representation of piezoelectric ceramic outer cylinder in the embodiment of the present invention, and external electrode is divided into eight (4 * 2) equal parts along the circumference; Fig. 3 is the embodiment of the present invention Top view of the outer cylinder of the medium piezoelectric ceramic. It can be seen from the figure that the cylindrical piezoelectric motor capable of generating helical linear motion provided by the present invention is mainly composed of a piezoelectric ceramic outer cylinder 1 , an elastic inner cylinder 2 and a rotor 3 .
其中,压电陶瓷外圆筒1,沿着筒壁的方向极化。压电陶瓷外圆筒1在筒壁的内外两面镀有电极,内电极19是一个整体的电极,筒壁的外电极均分为八个部分(所分电极的数量可以是4的整数倍),外电极为电极11、12、13、14、15、16、17、18。压电陶瓷外圆筒1通过胶粘(环氧树脂)或者冷焊工艺实现与弹性体内圆筒2的固结,压电陶瓷外圆筒1跟弹性体内圆筒2共同构成定子。Wherein, the piezoelectric ceramic outer cylinder 1 is polarized along the direction of the cylinder wall. The piezoelectric ceramic outer cylinder 1 is plated with electrodes on the inner and outer sides of the cylinder wall, the inner electrode 19 is an integral electrode, and the outer electrode of the cylinder wall is divided into eight parts (the number of divided electrodes can be an integer multiple of 4) , the external electrodes are electrodes 11 , 12 , 13 , 14 , 15 , 16 , 17 , and 18 . The piezoelectric ceramic outer cylinder 1 is consolidated with the elastic inner cylinder 2 through gluing (epoxy resin) or cold welding process, and the piezoelectric ceramic outer cylinder 1 and the elastic inner cylinder 2 together form a stator.
转子3为具有外螺纹的中空结构的弹性体圆环,需要驱动的元件(例如镜头)可以固定在转子3的内部。转子3外部带有外螺纹,转子3与弹性体内圆筒2之间通过螺纹副实现传动。The rotor 3 is a hollow elastomeric ring with external threads, and elements to be driven (such as lenses) can be fixed inside the rotor 3 . The rotor 3 is externally threaded, and the transmission between the rotor 3 and the elastic inner cylinder 2 is realized through a thread pair.
压电陶瓷外圆筒的外电极中,电极11跟电极15沿压电陶瓷外圆筒的直径方向对称分布,称为A1激振组;电极13跟电极17也是沿压电陶瓷外圆筒的直径方向对称分布,称为A2激振组;A1激振组跟A2激振组构成A激振组。电极12跟电极16也沿压电陶瓷外圆筒的直径方向对称分布,称为B1激振组;电极14跟电极18也沿压电陶瓷外圆筒的直径方向对称分布,称为B2激振组;B1激振组与B2激振组构成B激振组。Among the external electrodes of the piezoelectric ceramic outer cylinder, the electrodes 11 and 15 are symmetrically distributed along the diameter direction of the piezoelectric ceramic outer cylinder, which is called the A1 excitation group; the electrodes 13 and 17 are also arranged along the piezoelectric ceramic outer cylinder. The symmetrical distribution in the diameter direction is called the A2 excitation group; the A1 excitation group and the A2 excitation group form the A excitation group. The electrodes 12 and 16 are also distributed symmetrically along the diameter of the piezoelectric ceramic outer cylinder, which is called the B1 excitation group; the electrodes 14 and 18 are also symmetrically distributed along the diameter of the piezoelectric ceramic outer cylinder, which is called the B2 excitation group. group; B1 excitation group and B2 excitation group constitute the B excitation group.
本实施方式的激励方法:参照图4、图5和图6进行说明。单独对A激振组中A1激振组施加使其产生伸长或缩短变形的交变信号,对A2激振组施加使其产生缩短或伸长变形的交变信号,因为逆压电效应的作用,在两个垂直的方向上分别产生伸长和收缩的形变,整个压电陶瓷外圆筒将产生一个如图6(a)所示的驻波谐振振动R1。单独对B激振组中B1激振组施加使其产生伸长或缩短变形的交变信号,B2激振组施加使其产生缩短或伸长变形的交变信号,因为逆压电效应的作用,在两个垂直的方向上分别产生伸长和收缩的形变,整个压电陶瓷外圆筒将产生一个如图6(b)所示的驻波谐振振动R2。驻波谐振振动R1跟R2在空间上存在45°的角度差。The excitation method of this embodiment: it will be described with reference to FIG. 4 , FIG. 5 and FIG. 6 . In the A1 excitation group, the alternating signal of elongation or shortening deformation is applied to the A1 excitation group alone, and the alternating signal of shortening or elongation deformation is applied to the A2 excitation group, because of the inverse piezoelectric effect effect, respectively produce elongation and contraction deformation in two perpendicular directions, and the entire piezoelectric ceramic outer cylinder will produce a standing wave resonant vibration R1 as shown in Figure 6(a). Separately apply alternating signals to the B1 excitation group in the B excitation group to cause it to produce elongation or shortening deformation, and B2 excitation group to apply an alternating signal to cause it to generate shortening or elongation deformation, because of the inverse piezoelectric effect , respectively produce elongation and contraction deformation in two perpendicular directions, and the entire piezoelectric ceramic outer cylinder will produce a standing wave resonant vibration R2 as shown in Figure 6(b). There is a 45° angle difference between the standing wave resonance vibration R1 and R2 in space.
A激振组与B激振组所接交变信号的频率相同,都处于超声频段,电压幅值相同,但有的相位差。当A激振组与B激振组同时被激发时,压电陶瓷外圆筒1将会同时激励R1和R2两个驻波谐振振动,它们的叠加会耦合形成一个行波谐振振动。其中,当加载在A激振组和B激振组上交变信号的相位差满足的正交关系时,如图4所示,A激振组与B激振组激发压电陶瓷外圆筒1产生2个波长的行波,整个定子也将随之振动,通过螺纹副传动,驱动转子3顺时针螺旋直线输出。当加载在A激振组和B激振组上交变信号的相位差满足的正交关系时,如图5所示,A激振组与B激振组激发压电陶瓷外圆筒1产生2个波长的反向行波,整个定子也将随之振动,通过螺纹副传动,驱动转子3逆时针螺旋直线输出。The frequency of the alternating signal connected to the excitation group A and the excitation group B is the same, both in the ultrasonic frequency band, and the voltage amplitude is the same, but there is phase difference. When the excitation group A and the excitation group B are excited at the same time, the piezoelectric ceramic outer cylinder 1 will simultaneously excite two standing wave resonance vibrations of R1 and R2, and their superposition will be coupled to form a traveling wave resonance vibration. Among them, when the phase difference of the alternating signal loaded on the excitation group A and the excitation group B satisfies When the orthogonal relationship is shown in Figure 4, the excitation group A and the excitation group B excite the piezoelectric ceramic outer cylinder 1 to generate traveling waves of two wavelengths, and the entire stator will also vibrate accordingly, and through the screw pair transmission, Drive the rotor 3 clockwise to spiral and output linearly. When the phase difference of the alternating signal loaded on the excitation group A and the excitation group B satisfies When the orthogonal relationship is shown in Figure 5, the excitation group A and the excitation group B excite the piezoelectric ceramic outer cylinder 1 to generate reverse traveling waves of two wavelengths, and the entire stator will also vibrate accordingly. Transmission, driving the rotor 3 counterclockwise spiral linear output.
需要注意的是,公布实施例的目的在于帮助进一步理解本发明,但是本领域的技术人员可以理解:在不脱离本发明及所附权利要求的精神和范围内,各种替换和修改都是可能的。因此,本发明不应局限于实施例所公开的内容,本发明要求保护的范围以权利要求书界定的范围为准。It should be noted that the purpose of the disclosed embodiments is to help further understand the present invention, but those skilled in the art can understand that various replacements and modifications are possible without departing from the spirit and scope of the present invention and the appended claims of. Therefore, the present invention should not be limited to the content disclosed in the embodiments, and the protection scope of the present invention is subject to the scope defined in the claims.
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106089715A (en) * | 2016-08-25 | 2016-11-09 | 深圳沃海森科技有限公司 | Ultrasound wave frequency converting air-conditioner compressor |
CN106391435A (en) * | 2016-10-19 | 2017-02-15 | 杭州电子科技大学 | Device for realizing particle suspension and rotation |
CN111312027A (en) * | 2018-12-11 | 2020-06-19 | 北京纳米能源与系统研究所 | Micro motor, driver and braille display based on polylactic acid piezoelectric film |
CN111911126A (en) * | 2020-09-07 | 2020-11-10 | 中国石油天然气集团有限公司 | Setting bridge plug for repeated fracturing and repeated fracturing construction method of oil and gas field well |
CN112706822A (en) * | 2019-10-25 | 2021-04-27 | 比亚迪股份有限公司 | Steering system and vehicle |
US11043907B2 (en) | 2018-11-27 | 2021-06-22 | Industrial Technology Research Institute | Ultrasonic linear actuation device utilizing standing wave oscillations for actuation |
CN113630037A (en) * | 2021-08-13 | 2021-11-09 | 中国工程物理研究院机械制造工艺研究所 | Device and method for improving motion resolution of standing wave type piezoelectric motor |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1767347A (en) * | 2005-11-18 | 2006-05-03 | 清华大学 | Thread driven polyhedron ultrasonic motor |
TW200847607A (en) * | 2007-04-03 | 2008-12-01 | Shu-Xiang Dong | Miniature piezoelectric motor and method of driving elements using same |
CN101420190A (en) * | 2007-10-26 | 2009-04-29 | 博立码杰通讯(深圳)有限公司 | Ultrasonic motor driving method |
DE102010022812A1 (en) * | 2010-06-05 | 2011-12-08 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultrasonic motor, has element to be driven and contact element, which are in threaded engagement, and ultrasound actuator surrounding contact element on outer circumferential surface completely |
CN103227279A (en) * | 2012-01-31 | 2013-07-31 | 三星电子株式会社 | Slip-stick piezoelectric actuator |
-
2015
- 2015-01-05 CN CN201510002335.1A patent/CN104506081B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1767347A (en) * | 2005-11-18 | 2006-05-03 | 清华大学 | Thread driven polyhedron ultrasonic motor |
TW200847607A (en) * | 2007-04-03 | 2008-12-01 | Shu-Xiang Dong | Miniature piezoelectric motor and method of driving elements using same |
CN101420190A (en) * | 2007-10-26 | 2009-04-29 | 博立码杰通讯(深圳)有限公司 | Ultrasonic motor driving method |
DE102010022812A1 (en) * | 2010-06-05 | 2011-12-08 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultrasonic motor, has element to be driven and contact element, which are in threaded engagement, and ultrasound actuator surrounding contact element on outer circumferential surface completely |
CN103227279A (en) * | 2012-01-31 | 2013-07-31 | 三星电子株式会社 | Slip-stick piezoelectric actuator |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106089715A (en) * | 2016-08-25 | 2016-11-09 | 深圳沃海森科技有限公司 | Ultrasound wave frequency converting air-conditioner compressor |
CN106391435A (en) * | 2016-10-19 | 2017-02-15 | 杭州电子科技大学 | Device for realizing particle suspension and rotation |
CN106391435B (en) * | 2016-10-19 | 2019-06-21 | 杭州电子科技大学 | A device for realizing particle suspension and rotation |
US11043907B2 (en) | 2018-11-27 | 2021-06-22 | Industrial Technology Research Institute | Ultrasonic linear actuation device utilizing standing wave oscillations for actuation |
CN111312027A (en) * | 2018-12-11 | 2020-06-19 | 北京纳米能源与系统研究所 | Micro motor, driver and braille display based on polylactic acid piezoelectric film |
CN112706822A (en) * | 2019-10-25 | 2021-04-27 | 比亚迪股份有限公司 | Steering system and vehicle |
CN111911126A (en) * | 2020-09-07 | 2020-11-10 | 中国石油天然气集团有限公司 | Setting bridge plug for repeated fracturing and repeated fracturing construction method of oil and gas field well |
CN113630037A (en) * | 2021-08-13 | 2021-11-09 | 中国工程物理研究院机械制造工艺研究所 | Device and method for improving motion resolution of standing wave type piezoelectric motor |
CN113630037B (en) * | 2021-08-13 | 2023-07-25 | 中国工程物理研究院机械制造工艺研究所 | Motion resolution improving device and method for standing wave type piezoelectric motor |
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