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CN104503177A - Array substrate, manufacturing method thereof and display panel - Google Patents

Array substrate, manufacturing method thereof and display panel Download PDF

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Publication number
CN104503177A
CN104503177A CN201410836655.2A CN201410836655A CN104503177A CN 104503177 A CN104503177 A CN 104503177A CN 201410836655 A CN201410836655 A CN 201410836655A CN 104503177 A CN104503177 A CN 104503177A
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array substrate
layer
gate
driving
substrate
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楼均辉
马俊超
龚华
钱旭
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Tianma Microelectronics Co Ltd
Shanghai Tianma Microelectronics Co Ltd
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Tianma Microelectronics Co Ltd
Shanghai Tianma Microelectronics Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136286Wiring, e.g. gate line, drain line
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1345Conductors connecting electrodes to cell terminals
    • G02F1/13452Conductors connecting driver circuitry and terminals of panels
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136227Through-hole connection of the pixel electrode to the active element through an insulation layer
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/1368Active matrix addressed cells in which the switching element is a three-electrode device
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01Manufacture or treatment
    • H10D86/021Manufacture or treatment of multiple TFTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/441Interconnections, e.g. scanning lines
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

本发明公开了一种阵列基板及其制作方法、显示面板,包括多条栅极线、多条数据线和多条驱动引线,所述栅极线与所述驱动引线一一对应;所述数据线与所述驱动引线隔层设置;两条相邻的数据线与两条相邻的栅极线围成一个像素区域;所述像素区域包括薄膜晶体管和像素电极;所述像素电极与所述薄膜晶体管的漏极或源极中之一相连通;所述栅极线与所述薄膜晶体管的栅极相连通;所述栅极线与所述驱动引线相连通,所述驱动引线用于将栅极驱动电路产生的驱动信号传递给所述栅极线;所述数据线与所述薄膜晶体管的源极或漏极中另一相连通。本发明提高显示器的开口率。

The invention discloses an array substrate, a manufacturing method thereof, and a display panel, including a plurality of gate lines, a plurality of data lines, and a plurality of drive leads, wherein the gate lines correspond to the drive leads one by one; the data Lines and the driving lead wires are arranged in a spacer; two adjacent data lines and two adjacent gate lines enclose a pixel area; the pixel area includes a thin film transistor and a pixel electrode; the pixel electrode and the One of the drain or the source of the thin film transistor is connected; the gate line is connected with the gate of the thin film transistor; the gate line is connected with the driving lead, and the driving lead is used to connect The driving signal generated by the gate driving circuit is transmitted to the gate line; the data line is connected to the other of the source or the drain of the thin film transistor. The invention improves the aperture ratio of the display.

Description

一种阵列基板及其制作方法、显示面板Array substrate, manufacturing method thereof, and display panel

技术领域technical field

本发明涉及电子设备领域,具体的涉及一种阵列基板及其制作方法、显示面板。The present invention relates to the field of electronic equipment, in particular to an array substrate, a manufacturing method thereof, and a display panel.

背景技术Background technique

薄膜晶体管液晶显示器(Thin Film Transistor Liquid Crystal Display,TFT-LCD)由于具有微功耗、低工作电压、无X射线辐射、高清晰度、小体积等优点,目前广泛应用于手机、掌上电脑等便携式电子产品中。在市场竞争的推动下,更轻便、显示效果更优越、价格更低的薄膜晶体管液晶显示受到了越来越多的追捧。将非晶硅栅极驱动器与有源矩阵集成的栅极驱动技术可以使薄膜晶体管液晶显示器减少一颗驱动芯片,可以有效地使显示屏变的更轻、降低成本,并且可以增加显示器的可靠性。Thin Film Transistor Liquid Crystal Display (TFT-LCD) is currently widely used in mobile phones, handheld computers and other portable devices due to its advantages such as low power consumption, low operating voltage, no X-ray radiation, high definition, and small size. in electronic products. Driven by market competition, thin-film transistor liquid crystal displays with lighter weight, better display effect and lower price are becoming more and more popular. The gate drive technology that integrates the amorphous silicon gate driver with the active matrix can reduce the number of TFT-LCDs by one driver chip, which can effectively make the display lighter, reduce costs, and increase the reliability of the display. .

因此,近年来栅极驱动技术逐步成为开发研究的热点。但是,目前大部分显示器中的栅极驱动电路都设计在边框部分,占用例边框很大的位置,为了使得显示器的边框变窄,可以将栅极驱动电路设计到显示区域的下方(即台阶区域),以减小边框的尺寸,甚至做到无边框。这种方法使得需要额外的驱动引线将栅极驱动的扫描信号连接到栅极线中,由于引入了驱动引线,如何确保显示器的开口率是一个需要重点关注的问题。因此,亟需一种可以将提高显示器开口率的阵列基板。Therefore, in recent years, gate drive technology has gradually become a hot spot in development and research. However, at present, the gate drive circuit in most displays is designed in the frame part, which occupies a large position of the frame. In order to narrow the frame of the display, the gate drive circuit can be designed below the display area (that is, the step area ) to reduce the size of the border, or even achieve no border. This method requires additional driving wires to connect the scanning signal of the gate drive to the gate lines. Due to the introduction of the driving wires, how to ensure the aperture ratio of the display is a problem that needs to be paid attention to. Therefore, there is an urgent need for an array substrate that can increase the aperture ratio of a display.

发明内容Contents of the invention

本发明实施例提供一种阵列基板及其制作方法、显示面板,用以解决窄边框或无边框显示器开口率低的问题。Embodiments of the present invention provide an array substrate, a manufacturing method thereof, and a display panel, which are used to solve the problem of low aperture ratio of narrow-frame or frameless displays.

为了实现上述目的,本发明实施例提供了一种阵列基板,包括:In order to achieve the above purpose, an embodiment of the present invention provides an array substrate, including:

多条栅极线、多条数据线和多条驱动引线,所述栅极线与所述驱动引线一一对应;所述数据线与所述驱动引线隔层设置;两条相邻的数据线与两条相邻的栅极线围成一个像素区域;A plurality of gate lines, a plurality of data lines and a plurality of drive leads, the gate lines correspond to the drive leads one by one; the data lines and the drive leads are arranged in separate layers; two adjacent data lines A pixel area is surrounded by two adjacent gate lines;

所述像素区域包括薄膜晶体管和像素电极;The pixel area includes a thin film transistor and a pixel electrode;

所述像素电极与所述薄膜晶体管的漏极或源极中之一相连通;The pixel electrode is connected to one of the drain or the source of the thin film transistor;

所述栅极线与所述薄膜晶体管的栅极相连通;所述栅极线与所述驱动引线相连通,所述驱动引线用于将栅极驱动电路产生的驱动信号传递给所述栅极线;The gate line is connected to the gate of the thin film transistor; the gate line is connected to the driving lead, and the driving lead is used to transmit the driving signal generated by the gate driving circuit to the gate Wire;

所述数据线与所述薄膜晶体管的源极或漏极中另一相连通。The data line communicates with the other of the source or the drain of the thin film transistor.

较佳地,所述数据线在阵列基板上的投影的中心线与所述驱动引线在阵列基板上的投影的中心线完全重叠。Preferably, the centerline of the projection of the data lines on the array substrate completely overlaps the centerline of the projection of the driving leads on the array substrate.

较佳地,所述数据线在阵列基板上的投影与所述驱动引线在阵列基板上的投影部分重叠。Preferably, the projection of the data lines on the array substrate partially overlaps the projection of the driving leads on the array substrate.

较佳地,所述数据线在阵列基板上的投影与所述驱动引线在阵列基板上的投影无重叠。Preferably, the projections of the data lines on the array substrate and the projections of the driving leads on the array substrate do not overlap.

较佳地,所述栅极线与所述驱动引线通过第一连接孔相连通。Preferably, the gate line communicates with the driving lead through a first connection hole.

较佳地,所述数据线与所述薄膜晶体管的源极和漏极同层。Preferably, the data line is in the same layer as the source and drain of the thin film transistor.

较佳地,所述阵列基板还包括一遮光层,所述遮光层与所述驱动引线同层。Preferably, the array substrate further includes a light-shielding layer, and the light-shielding layer is on the same layer as the driving leads.

较佳地,所述驱动引线与所述数据线之间依次设有缓冲层、第一绝缘层和第二绝缘层。Preferably, a buffer layer, a first insulating layer and a second insulating layer are sequentially arranged between the driving lead wire and the data line.

较佳地,所述阵列基板包括:依次设置在基板上的遮光层、缓冲层、半导体层、第一绝缘层、栅极、第二绝缘层、以及通过第二连接孔、第三连接孔与所述半导体层相连的源极和漏极。Preferably, the array substrate includes: a light-shielding layer, a buffer layer, a semiconductor layer, a first insulating layer, a gate, a second insulating layer, and the second connection hole, the third connection hole and the The source and drain of the semiconductor layer are connected.

本发明实施例还提供了一种阵列基板的制作方法,所述方法包括:The embodiment of the present invention also provides a method for manufacturing an array substrate, the method comprising:

提供一基板;providing a substrate;

在基板上设置第一金属层并图形化出遮光层和驱动引线;disposing a first metal layer on the substrate and patterning a light-shielding layer and driving leads;

在所述基板上依次设置缓冲层、半导体层和第一绝缘层,在所述驱动引线上制作贯穿所述第一绝缘层和所述缓冲层的第一连接孔;a buffer layer, a semiconductor layer, and a first insulating layer are sequentially arranged on the substrate, and a first connection hole penetrating through the first insulating layer and the buffer layer is formed on the driving lead;

在所述基板上设置第二金属层并图形化出栅极线,所述栅极线通过所述第一连接孔连接至所述驱动引线;disposing a second metal layer on the substrate and patterning a gate line, the gate line is connected to the driving lead through the first connection hole;

在所述基板上依次设置第二绝缘层、第三金属层,并图形化出源极、漏极、数据线,所述数据线与所述源极或漏极中之一相连通;A second insulating layer and a third metal layer are sequentially arranged on the substrate, and a source electrode, a drain electrode, and a data line are patterned, and the data line is connected to one of the source electrode or the drain electrode;

在所述基板上依次设置钝化层和透明导电层,并图形化所述透明导电层形成像素电极,所述像素电极与所述漏极或源极中另一相连通。A passivation layer and a transparent conductive layer are sequentially arranged on the substrate, and the transparent conductive layer is patterned to form a pixel electrode, and the pixel electrode communicates with the other of the drain electrode or the source electrode.

较佳地,所述方法还包括,在所述第一绝缘层和第二绝缘层上制作第二连接孔和第三连接孔,所述源极和漏极分别通过所述第二连接孔和所述第三连接孔与所述半导体层连接。Preferably, the method further includes making a second connection hole and a third connection hole on the first insulating layer and the second insulating layer, and the source and the drain pass through the second connection hole and the third connection hole respectively. The third connection hole is connected to the semiconductor layer.

较佳地,所述数据线在基板上的投影的中心线与所述驱动引线在基板上的投影的中心线完全重叠。Preferably, the centerline of the projection of the data lines on the substrate completely overlaps the centerline of the projection of the driving leads on the substrate.

较佳地,所述数据线在基板上的投影与所述驱动引线在基板上的投影部分重叠。Preferably, the projection of the data lines on the substrate partially overlaps the projection of the driving leads on the substrate.

较佳地,所述数据线在基板上的投影与所述驱动引线在基板上的投影无重叠。Preferably, the projections of the data lines on the substrate do not overlap with the projections of the driving leads on the substrate.

本发明实施例还提供了一种显示面板,包括上述阵列基板。An embodiment of the present invention also provides a display panel, including the above-mentioned array substrate.

上述实施例中,所述阵列基板包括多条栅极线、多条数据线和多条驱动引线,所述栅极线与所述驱动引线一一对应;所述数据线与所述驱动引线隔层设置;两条相邻的数据线与两条相邻的栅极线围成一个像素区域;所述像素区域包括薄膜晶体管和像素电极;所述像素电极与所述薄膜晶体管的漏极或源极中之一相连通;所述栅极线与所述薄膜晶体管的栅极相连通;所述栅极线与所述驱动引线相连通,所述驱动引线用于将栅极驱动电路产生的驱动信号传递给所述栅极线;所述数据线与所述薄膜晶体管的源极或漏极中另一相连通。本发明实施例中将驱动引线放置在数据线的下方,驱动引线在阵列基板上的投影与数据线在阵列基板上的投影可以部分重叠,重叠的部分越多,显示器的开口率越大,显示器的像素越高,开口率提升的越明显。In the above embodiment, the array substrate includes a plurality of gate lines, a plurality of data lines, and a plurality of driving leads, and the gate lines are in one-to-one correspondence with the driving leads; the data lines are separated from the driving leads. Layer setting; two adjacent data lines and two adjacent gate lines form a pixel area; the pixel area includes a thin film transistor and a pixel electrode; the pixel electrode and the drain or source of the thin film transistor One of the poles is connected; the gate line is connected with the gate of the thin film transistor; the gate line is connected with the driving lead, and the driving lead is used to drive the gate drive circuit generated The signal is transmitted to the gate line; the data line is connected to the other of the source or the drain of the thin film transistor. In the embodiment of the present invention, the drive leads are placed under the data lines, and the projections of the drive leads on the array substrate and the projections of the data lines on the array substrate can partially overlap. The more overlapping parts, the greater the aperture ratio of the display, and the display The higher the pixels, the more obvious the aperture ratio will be improved.

附图说明Description of drawings

为了更清楚地说明本发明实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简要介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域的普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings that need to be used in the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present invention. For Those of ordinary skill in the art can also obtain other drawings based on these drawings without making creative efforts.

图1为本发明实施例中一种阵列基板的结构示意图;FIG. 1 is a schematic structural diagram of an array substrate in an embodiment of the present invention;

图2a至2d为本发明实施例中一种阵列基板部分及横截面的结构示意图;2a to 2d are structural schematic diagrams of an array substrate part and cross section in an embodiment of the present invention;

图3a至3c为本发明实施例中另一种阵列基板部分及横截面的结构示意图;3a to 3c are structural schematic diagrams of another array substrate part and cross section in an embodiment of the present invention;

图4a至4c为本发明实施例中另一种阵列基板部分及横截面的结构示意图;4a to 4c are structural schematic diagrams of another array substrate part and cross section in an embodiment of the present invention;

图5为本发明实施例中一种阵列基板的制作方法的流程示意图;5 is a schematic flowchart of a method for manufacturing an array substrate in an embodiment of the present invention;

图6a至图6f为本发明实施例中另一种阵列基板的制作方法的流程示意图;6a to 6f are schematic flowcharts of another manufacturing method of an array substrate in an embodiment of the present invention;

图7为本发明实施例中一种显示面板。FIG. 7 is a display panel in an embodiment of the present invention.

具体实施方式Detailed ways

为了使本发明的目的、技术方案和优点更加清楚,下面将结合附图对本发明作进一步地详细描述,显然,所描述的实施例仅仅是本发明一部份实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其它实施例,都属于本发明保护的范围。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, rather than all embodiments . Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

本发明实施例提供了一种阵列基板,图1示出了所述阵列基板的结构示意图,图2a至图2d示出了所述阵列基板部分及横截面示意图,由于本发明实施例中驱动引线103与数据线101重叠,为了便于显示,图1省去了数据线101。图2d示出了一种阵列基板部分俯视结构,为了能够清楚的表示本发明实施例,图2d中省去了遮光层106、缓冲层107、第一绝缘层109、第二绝缘层110和钝化层113,各膜层的具体结构位置可以参见图2a至图2c,为了能更清楚的显示各结构间的连接关系,数据线101与栅极线交汇处作透明处理,可以从图中清楚显示第一连接孔201、第二连接孔202、第三连接孔203和第四连接孔204。图2a至2c是选取了图2d所示部分阵列基板的三个区域的横截面,分别为A-A'301,B-B'302和C-C'303三个区域的横截面。本发明实施例中所述A-A'301区域为阵列基板上的薄膜晶体管的横截面。An embodiment of the present invention provides an array substrate. FIG. 1 shows a schematic structural view of the array substrate, and FIGS. 103 overlaps with the data line 101 , and for the convenience of display, the data line 101 is omitted in FIG. 1 . Figure 2d shows a partial top view structure of an array substrate. In order to clearly show the embodiment of the present invention, the light shielding layer 106, the buffer layer 107, the first insulating layer 109, the second insulating layer 110 and the passivation layer are omitted in Figure 2d. layer 113, the specific structural positions of each film layer can be referred to in Figure 2a to Figure 2c, in order to more clearly show the connection relationship between the various structures, the intersection of the data line 101 and the gate line is treated transparently, which can be clearly seen from the figure A first connection hole 201 , a second connection hole 202 , a third connection hole 203 and a fourth connection hole 204 are shown. 2a to 2c are the cross-sections of three regions of part of the array substrate shown in Fig. 2d, which are the cross-sections of A-A'301, B-B'302 and C-C'303 respectively. The A-A' 301 area in the embodiment of the present invention is a cross section of the thin film transistor on the array substrate.

结合图1和图2a至图2d,所述阵列基板包括:多条栅极线102、多条数据线101和多条驱动引线103,所述栅极线102与所述驱动引线103一一对应;所述数据线101与所述驱动引线103隔层设置;两条相邻的数据线101与两条相邻的栅极线102围成一个像素区域104;所述像素区域104包括薄膜晶体管和像素电极105;所述像素电极105与所述薄膜晶体管的漏极112或源极111中之一相连通;所述栅极线102与所述薄膜晶体管的栅极115相连通;所述栅极线102与所述驱动引线103相连通,所述驱动引线103用于将栅极驱动电路产生的驱动信号传递给所述栅极线102;所述数据线101与所述薄膜晶体管的源极111或漏极112中另一相连通。如图1所示,每一条驱动引线103对应一条栅极线102,用于连通栅极线102和栅极驱动电路。本发明实施例中所述数据线101在阵列基板上的投影与所述驱动引线103在阵列基板上的投影可以部分重叠,可以完全重叠,也可以不重叠,重叠的部分越多,显示器的开口率越大,显示器的像素越高,开口率提升的越明显;从而使得虽然新增了驱动引线103但不会影响开口率或者影响比较小。图1和图2a至图2d示出的是所述数据线101在阵列基板上的投影与所述驱动引线103在阵列基板上的投影完全重叠的情况。1 and 2a to 2d, the array substrate includes: a plurality of gate lines 102, a plurality of data lines 101 and a plurality of driving leads 103, and the gate lines 102 correspond to the driving leads 103 one by one The data line 101 and the driving lead wire 103 are arranged in a separate layer; two adjacent data lines 101 and two adjacent gate lines 102 form a pixel area 104; the pixel area 104 includes a thin film transistor and A pixel electrode 105; the pixel electrode 105 is connected to one of the drain 112 or the source 111 of the thin film transistor; the gate line 102 is connected to the gate 115 of the thin film transistor; the gate The line 102 communicates with the driving lead 103, and the driving lead 103 is used to transmit the driving signal generated by the gate drive circuit to the gate line 102; the data line 101 is connected to the source 111 of the thin film transistor Or another phase of the drain 112 is connected. As shown in FIG. 1 , each driving lead 103 corresponds to one gate line 102 , and is used to connect the gate line 102 with the gate driving circuit. In the embodiment of the present invention, the projection of the data line 101 on the array substrate and the projection of the driving lead 103 on the array substrate may partially overlap, completely overlap, or not overlap. The larger the ratio, the higher the pixels of the display, and the more obvious the improvement of the aperture ratio; thus, although the driving lead 103 is newly added, the aperture ratio will not be affected or the influence will be relatively small. FIG. 1 and FIG. 2a to FIG. 2d show the situation that the projection of the data line 101 on the array substrate completely overlaps the projection of the driving lead wire 103 on the array substrate.

优选地,所述数据线101在阵列基板上的投影的中心线与所述驱动引线103在阵列基板上的投影中心线完全重叠。如图2a至图2d所示,在本实施例中,所述数据线101与所述驱动引线103完全重叠,数据线101与驱动引线103不同层,可以尽可能大的提高显示器的开口率,显示器的像素越高,开口率提升的越明显。Preferably, the projection centerline of the data line 101 on the array substrate completely overlaps the projection centerline of the driving lead 103 on the array substrate. As shown in FIGS. 2a to 2d, in this embodiment, the data lines 101 and the driving leads 103 are completely overlapped, and the data lines 101 and the driving leads 103 are in different layers, which can increase the aperture ratio of the display as much as possible. The higher the pixels of the display, the more obvious the increase in aperture ratio.

优选地,所述栅极线102与所述驱动引线103通过第一连接孔201相连通。所栅极线102与所述驱动引线103通过第一连接孔201过孔连接,如图2b所示。Preferably, the gate line 102 communicates with the driving lead 103 through the first connection hole 201 . The gate line 102 is connected to the driving lead 103 through a first connection hole 201 , as shown in FIG. 2 b .

优选地,所述数据线101与所述薄膜晶体管的源极111和漏极112同层。本实施例中,所述数据线101与所述薄膜晶体管的源极111相连,在制作的过程中,源极111和漏极112通过同一种材料同时制作而成。Preferably, the data line 101 is in the same layer as the source 111 and the drain 112 of the TFT. In this embodiment, the data line 101 is connected to the source electrode 111 of the thin film transistor, and the source electrode 111 and the drain electrode 112 are simultaneously manufactured from the same material during the manufacturing process.

优选地,所述阵列基板还包括一遮光层106,所述遮光层106与所述驱动引线103同层。如图2a至图2c中A-A'301和B-B'302、C-C'303三个区域所示,在A-A'301区域中,位于基板114上的一层为遮光层106,在B-B'302和C-C'303区域中,位于基板114上的一层为驱动引线103,在制作的过程中,遮光层106与驱动引线103同时制作,可以节约一张掩膜板。同时,由于数据线101与驱动引线103不同层,可以将数据线101与驱动引线103重叠设置,减少遮挡,增加显示器的开口率。Preferably, the array substrate further includes a light-shielding layer 106 , and the light-shielding layer 106 is in the same layer as the driving leads 103 . As shown in the three regions A-A'301, B-B'302, and C-C'303 in Fig. In the area 303, the layer on the substrate 114 is the driving lead 103. During the manufacturing process, the light-shielding layer 106 and the driving lead 103 are manufactured at the same time, which can save a mask. At the same time, since the data lines 101 and the driving wires 103 are in different layers, the data lines 101 and the driving wires 103 can be overlapped to reduce shading and increase the aperture ratio of the display.

优选地,所述驱动引线103与所述数据线101之间依次设有缓冲层107、第一绝缘层109和第二绝缘层110。所述缓冲层107、所述第一绝缘层109和所述第二绝缘层110用以隔离所述驱动引线103和所述数据线101。Preferably, a buffer layer 107 , a first insulating layer 109 and a second insulating layer 110 are sequentially provided between the driving leads 103 and the data lines 101 . The buffer layer 107 , the first insulating layer 109 and the second insulating layer 110 are used to isolate the driving lead 103 from the data line 101 .

优选地,所述阵列基板包括:依次设置在基板114上的遮光层106、缓冲层107、半导体层108、第一绝缘层109、栅极115、第二绝缘层110、以及通过第二连接孔202、第三连接孔203与所述半导体层108相连的源极111和漏极112。其中,所述栅极115与所述栅极线102相连通,所述源极111与所述数据线101相连通,所述漏极112与所述像素电极105相连通,所述源极111通过所述半导体层108与所述漏极112相连通。所述缓冲层107用于隔离所述遮光层106和所述半导体层108,所述第一绝缘层109用于隔离所述半导体层108和所述栅极115,所述第二绝缘层110用于隔离所述栅极115与所述源极111和以及隔离所述栅极115与所述漏极112。Preferably, the array substrate includes: a light shielding layer 106, a buffer layer 107, a semiconductor layer 108, a first insulating layer 109, a gate 115, a second insulating layer 110, and 202 . The third connection hole 203 is connected to the source 111 and the drain 112 of the semiconductor layer 108 . Wherein, the gate 115 is connected to the gate line 102, the source 111 is connected to the data line 101, the drain 112 is connected to the pixel electrode 105, and the source 111 It communicates with the drain 112 through the semiconductor layer 108 . The buffer layer 107 is used to isolate the light shielding layer 106 from the semiconductor layer 108, the first insulating layer 109 is used to isolate the semiconductor layer 108 from the gate 115, and the second insulating layer 110 is used to for isolating the gate 115 from the source 111 and isolating the gate 115 from the drain 112 .

优选地,图3a至图3c示出了本发明实施例另一种阵列基板,其中图3c中所示的A-A'301可以参见图2a所示。所述阵列基板包括:多条栅极线102、多条数据线101和多条驱动引线103,所述栅极线102与所述驱动引线103一一对应;所述数据线101与所述驱动引线103隔层设置;所述数据线101在阵列基板上的投影与所述驱动引线103在阵列基板上的投影不重叠,且所述数据线101在阵列基板上的投影与所述驱动引线103在阵列基板上的投影相邻;两条相邻的数据线101与两条相邻的栅极线102围成一个像素区域104;所述像素区域104包括薄膜晶体管和像素电极105;所述像素电极105与所述薄膜晶体管的漏极112相连通;所述栅极线102与所述薄膜晶体管的栅极115相连通;所述栅极线102与所述驱动引线103相连通,所述驱动引线103用于将栅极驱动电路产生的驱动信号传递给所述栅极线102;所述数据线101与所述薄膜晶体管的源极111相连通。结合图1和图3a至图3c所示,数据线101在阵列基板上的投影与驱动引线103在阵列基板上的投影不重叠,B-B'302和C-C'303区域的数据线101和驱动引线103所示,所述数据线101与所述驱动引线103不重叠,且数据线101与驱动引线103不同层,可以减小所述数据线101与所述驱动引线103间的寄生电容,同时因为所述数据线101在阵列基板上的投影与所述驱动引线103在阵列基板上的投影相邻,可以减少黑矩阵的遮挡面积,因此与现有技术相比,还可以提高显示器的开口率,显示器的像素越高,开口率提升的越明显。Preferably, Fig. 3a to Fig. 3c show another array substrate according to the embodiment of the present invention, wherein A-A'301 shown in Fig. 3c can be referred to Fig. 2a. The array substrate includes: a plurality of gate lines 102, a plurality of data lines 101 and a plurality of drive leads 103, the gate lines 102 correspond to the drive leads 103 one by one; the data lines 101 correspond to the drive leads 103; The lead wires 103 are arranged in separate layers; the projection of the data line 101 on the array substrate and the projection of the drive lead wire 103 on the array substrate do not overlap, and the projection of the data line 101 on the array substrate is not overlapped with the projection of the drive lead wire 103 on the array substrate. The projections on the array substrate are adjacent; two adjacent data lines 101 and two adjacent gate lines 102 form a pixel area 104; the pixel area 104 includes a thin film transistor and a pixel electrode 105; the pixel The electrode 105 is connected with the drain 112 of the thin film transistor; the gate line 102 is connected with the gate 115 of the thin film transistor; the gate line 102 is connected with the driving lead 103, and the driving The wire 103 is used to transmit the driving signal generated by the gate driving circuit to the gate line 102; the data line 101 is connected to the source 111 of the thin film transistor. As shown in Figure 1 and Figures 3a to 3c, the projection of the data line 101 on the array substrate and the projection of the driving lead 103 on the array substrate do not overlap, the data line 101 and the driving lead 103 in the B-B'302 and C-C'303 regions As shown, the data line 101 and the driving lead 103 do not overlap, and the data line 101 and the driving lead 103 are in different layers, which can reduce the parasitic capacitance between the data line 101 and the driving lead 103, and because the The projection of the data line 101 on the array substrate is adjacent to the projection of the driving lead 103 on the array substrate, which can reduce the shielding area of the black matrix. Therefore, compared with the prior art, the aperture ratio of the display can also be improved. The higher the pixels, the more obvious the aperture ratio will be improved.

优选地,图4a至图4c示出了本发明实施例另一种阵列基板,其中图4c中所示的A-A'301可以参见图2a所示。所述阵列基板包括:多条栅极线102、多条数据线101和多条驱动引线103,所述栅极线102与所述驱动引线103一一对应;所述数据线101与所述驱动引线103隔层设置;所述数据线101在阵列基板上的投影与所述驱动引线103在阵列基板上的投影部分重叠;两条相邻的数据线101与两条相邻的栅极线102围成一个像素区域104;所述像素区域104包括薄膜晶体管和像素电极105;所述像素电极105与所述薄膜晶体管的漏极112相连通;所述栅极线102与所述薄膜晶体管的栅极115相连通;所述栅极线102与所述驱动引线103相连通,所述驱动引线103用于将栅极驱动电路产生的驱动信号传递给所述栅极线102;所述数据线101与所述薄膜晶体管的源极111相连通。结合图1和图4a至图4c所示,数据线101在阵列基板上的投影与驱动引线103在阵列基板上的投影部分重叠,重叠的部分越多,显示器的开口率越大,显示器的像素越高,开口率提升的越明显,同时还可以减小所述数据线101与所述驱动引线103间产生的寄生电容。Preferably, Fig. 4a to Fig. 4c show another array substrate according to the embodiment of the present invention, wherein A-A'301 shown in Fig. 4c can be referred to Fig. 2a. The array substrate includes: a plurality of gate lines 102, a plurality of data lines 101 and a plurality of drive leads 103, the gate lines 102 correspond to the drive leads 103 one by one; the data lines 101 correspond to the drive leads 103; Lead wires 103 are arranged in separate layers; the projection of the data line 101 on the array substrate partially overlaps the projection of the driving lead wire 103 on the array substrate; two adjacent data lines 101 and two adjacent gate lines 102 A pixel area 104 is enclosed; the pixel area 104 includes a thin film transistor and a pixel electrode 105; the pixel electrode 105 is connected to the drain 112 of the thin film transistor; the gate line 102 is connected to the gate of the thin film transistor The pole 115 is connected; the gate line 102 is connected with the drive lead 103, and the drive lead 103 is used to transmit the drive signal generated by the gate drive circuit to the gate line 102; the data line 101 It is connected with the source 111 of the thin film transistor. As shown in FIG. 1 and FIG. 4a to FIG. 4c, the projection of the data line 101 on the array substrate and the projection of the driving lead 103 on the array substrate partially overlap. The higher the aperture ratio is, the more obvious the improvement is, and at the same time, the parasitic capacitance generated between the data line 101 and the driving lead line 103 can be reduced.

图5示出了阵列基板的制作方法的流程,该流程可以用于制作上述阵列基板,但不限于本实施例提供的阵列基板。所述流程的具体步骤包括:FIG. 5 shows the flow of the manufacturing method of the array substrate, which can be used to make the above-mentioned array substrate, but is not limited to the array substrate provided in this embodiment. Specific steps of the described process include:

步骤S501,提供一基板114。Step S501 , providing a substrate 114 .

步骤S502,在基板114上设置第一金属层并图形化出遮光层106和驱动引线103。Step S502 , disposing a first metal layer on the substrate 114 and patterning the light shielding layer 106 and the driving leads 103 .

步骤S503,在所述基板114上依次设置缓冲层107、半导体层108和第一绝缘层109,在所述驱动引线上制作贯穿所述第一绝缘层109和所述缓冲层的第一连接孔201。In step S503, a buffer layer 107, a semiconductor layer 108, and a first insulating layer 109 are sequentially provided on the substrate 114, and a first connection hole penetrating through the first insulating layer 109 and the buffer layer is formed on the driving lead 201.

步骤S504,在所述基板114上设置第二金属层并图形化出栅极线102和栅极115,所述栅极线102与所述栅极115相连,所述栅极线102通过所述第一连接孔201连接至所述驱动引线103。Step S504, disposing a second metal layer on the substrate 114 and patterning a gate line 102 and a gate 115, the gate line 102 is connected to the gate 115, and the gate line 102 passes through the The first connection hole 201 is connected to the driving lead 103 .

步骤S505,在所述基板114上依次设置第二绝缘层110、第三金属层,并图形化出源极111、漏极112、数据线101,所述数据线101与所述源极111或漏极112中之一相连通。其中,所述数据线101在基板114上的投影与所述驱动引线103在基板114上的投影可以部分重叠,也可以不重叠,所述数据线101在基板114上的投影的中心线与所述驱动引线103在基板114上的投影的中心线完全重叠。可以提高显示器的开口率,重叠的部分越多,显示器的开口率越大,显示器的像素越高,开口率提升的越明显,完全重叠的时候可以最大化的提高显示器的开口率,当所述数据线101在基板114上的投影与所述驱动引线103在基板114上的投影不重叠时,减小所述数据线101与所述驱动引线103间的寄生电容最明显。In step S505, the second insulating layer 110 and the third metal layer are sequentially arranged on the substrate 114, and the source electrode 111, the drain electrode 112, and the data line 101 are patterned, and the data line 101 is connected to the source electrode 111 or One of the drains 112 is connected. Wherein, the projection of the data line 101 on the substrate 114 and the projection of the driving lead 103 on the substrate 114 may partially overlap or may not overlap. The centerlines of the projections of the driving leads 103 on the substrate 114 are completely overlapped. The aperture ratio of the display can be improved, the more overlapping parts, the larger the aperture ratio of the display, the higher the pixels of the display, the more obvious the aperture ratio is improved, and the aperture ratio of the display can be maximized when the overlap is complete, when the When the projection of the data line 101 on the substrate 114 does not overlap with the projection of the driving lead 103 on the substrate 114 , reducing the parasitic capacitance between the data line 101 and the driving lead 103 is most obvious.

在步骤S505中,还包括:在所述第一绝缘层109和第二绝缘层110上制作第二连接孔202和第三连接孔203,所述源极111和漏极112分别通过所述第二连接孔202和所述第三连接孔203与所述半导体层108连接。In step S505, it also includes: making a second connection hole 202 and a third connection hole 203 on the first insulating layer 109 and the second insulating layer 110, and the source electrode 111 and the drain electrode 112 respectively pass through the first insulating layer 109 and the second insulating layer 110. The second connection hole 202 and the third connection hole 203 are connected to the semiconductor layer 108 .

步骤S506,在所述基板114上依次设置钝化层113和透明导电层,并图形化所述透明导电层形成像素电极105,所述像素电极105与所述漏极112或源极111中另一相连通。Step S506, sequentially disposing a passivation layer 113 and a transparent conductive layer on the substrate 114, and patterning the transparent conductive layer to form a pixel electrode 105, the pixel electrode 105 is connected to the other of the drain electrode 112 or the source electrode 111 Connected one by one.

在所述步骤S506中,当公共电极在顶部时,在所述钝化层113上制作第一连接孔201,通过所述第四连接孔204,所述像素电极105与所述漏极112相连通;当公共电极在中间位置时,在所述钝化层113和所述第二绝缘层110上制作所述第四连接孔204,所述像素电极105与所述漏极112或源极111中另一相连通。In the step S506, when the common electrode is at the top, a first connection hole 201 is made on the passivation layer 113, and the pixel electrode 105 is connected to the drain electrode 112 through the fourth connection hole 204 pass; when the common electrode is in the middle position, make the fourth connection hole 204 on the passivation layer 113 and the second insulating layer 110, the pixel electrode 105 and the drain electrode 112 or the source electrode 111 The other one is connected.

为了更好的解释本发明,本发明实施例还提供了一种制作阵列基板的方法,该方法可以用于制作上述阵列基板,但不限于本实施例提供的阵列基板。In order to better explain the present invention, an embodiment of the present invention also provides a method for manufacturing an array substrate, which can be used for manufacturing the above-mentioned array substrate, but is not limited to the array substrate provided in this embodiment.

图6a至图6f示出了阵列基板的制作方法的流程。6a to 6f show the flow of the manufacturing method of the array substrate.

所述制作方法包括:如图6a所示,提供一基板114,所述基板114通常为透明的玻璃基板,也可以是其他透明基板,如透明塑料基板。在基板114上形成第一金属层,对所述第一金属层进行光刻,图形化出遮光层106和驱动引线103。所述第一金属层通常选取电阻较低的金属,如Cr、W、Ti、Ta、Mo、Al、Cu中的一种或两种以上组合形成的合金。The manufacturing method includes: as shown in FIG. 6 a , providing a substrate 114 , the substrate 114 is usually a transparent glass substrate, and may also be other transparent substrates, such as a transparent plastic substrate. A first metal layer is formed on the substrate 114 , and photolithography is performed on the first metal layer to pattern the light shielding layer 106 and the driving lead 103 . The first metal layer is usually selected from a metal with low resistance, such as an alloy formed by one or more combinations of Cr, W, Ti, Ta, Mo, Al, and Cu.

如图6b所示,为了便于显示,图6b中的俯视图未示出遮光层106、缓冲层107、第一绝缘层109。在所述基板114和所述第一金属层上依次形成缓冲层107、半导体层108和第一绝缘层109,并所述半导体层108进行光刻,图形化所述半导体层108,图形化后的半导体层108位于遮光层对应的区域,即图6b中的A-A'301区域所示;在驱动引线103上制作贯穿第一绝缘层109和缓冲层107的第一连接孔201,暴露部分驱动引线103,如图6b中的B-B'302区域所示。所述第一连接孔201被用作连接栅极线102,栅极线102通过所述第一连接孔201与驱动引线103相连通,所述第一绝缘层109通常选用氮化硅,当然也可以是其它绝缘的材料。所述半导体层108通常为非晶硅或多晶硅。As shown in FIG. 6 b , for ease of display, the top view in FIG. 6 b does not show the light shielding layer 106 , the buffer layer 107 , and the first insulating layer 109 . A buffer layer 107, a semiconductor layer 108, and a first insulating layer 109 are sequentially formed on the substrate 114 and the first metal layer, and the semiconductor layer 108 is subjected to photolithography, and the semiconductor layer 108 is patterned. After patterning The semiconductor layer 108 is located in the area corresponding to the light-shielding layer, which is shown in the A-A'301 area in FIG. 103, as shown in the area B-B' 302 in Fig. 6b. The first connection hole 201 is used to connect the gate line 102, and the gate line 102 communicates with the driving lead 103 through the first connection hole 201. The first insulating layer 109 is usually made of silicon nitride. Other insulating materials are possible. The semiconductor layer 108 is usually amorphous silicon or polycrystalline silicon.

如图6c所示,为了便于显示,图6c中的俯视图未示出遮光层106、缓冲层107、第一绝缘层109。在所述基板114上形成第二金属层,对所述第二金属层进行光刻,图形化所述第二金属层,形成栅极线102和栅极115,所述栅极线102与所述栅极115相连,所述栅极线102通过所述第一连接孔201与所述驱动引线103相连通。所述第二金属层通常选取电阻较低的金属,如Cr、W、Ti、Ta、Mo、Al、Cu中的一种或两种以上组合形成的合金。As shown in FIG. 6 c , for ease of display, the top view in FIG. 6 c does not show the light shielding layer 106 , the buffer layer 107 , and the first insulating layer 109 . Form a second metal layer on the substrate 114, perform photolithography on the second metal layer, and pattern the second metal layer to form the gate line 102 and the gate 115, and the gate line 102 and the gate line 102 are The gate line 115 is connected, and the gate line 102 is connected to the driving lead line 103 through the first connection hole 201 . The second metal layer is usually selected from a metal with low resistance, such as an alloy formed by one or more combinations of Cr, W, Ti, Ta, Mo, Al, and Cu.

如图6d所示,为了便于显示,图6d中的俯视图未示出遮光层106、缓冲层107、第一绝缘层109、第二绝缘层110。在所述基板114上形成第二绝缘层110,在所述第二绝缘层110上制作第二连接孔202和第三连接孔203,所述第二连接孔202和所述第三连接孔203暴露出部分半导体层108,如图6d中的A-A'301区域所示,所述第二连接孔202被用作连接源极111,所述第三连接孔203被用作漏极112。所述第二绝缘层110通常选用氮化硅,当然也可以是其它绝缘的材料。As shown in FIG. 6d , for ease of display, the top view in FIG. 6d does not show the light shielding layer 106 , the buffer layer 107 , the first insulating layer 109 , and the second insulating layer 110 . Form a second insulating layer 110 on the substrate 114, make a second connection hole 202 and a third connection hole 203 on the second insulation layer 110, the second connection hole 202 and the third connection hole 203 Part of the semiconductor layer 108 is exposed, as shown in the region A-A' 301 in FIG. The second insulating layer 110 is usually made of silicon nitride, and of course other insulating materials can also be used.

如图6e所示,为了便于显示,图6e中的俯视图未示出遮光层106、缓冲层107、第一绝缘层109、第二绝缘层110。在所述基板114上形成第三金属层,对所述第三金属层进行光刻,图形化所述第三金属层,形成数据线101、源极111、漏极112,所述源极111与所述数据线101相连,所述源极111通过所述第二连接孔202与所述半导体层108相连通,所述漏极112通过所述第三连接孔203与所述半导体层108相连接。所述数据线101在基板114上的投影与所述驱动引线103在所述基板114上的投影完全重叠,可以提高显示器的开口率。所述第三金属层通常选取电阻较低的金属,如Cr、W、Ti、Ta、Mo、Al、Cu中的一种或两种以上组合形成的合金。As shown in FIG. 6e , for ease of illustration, the top view in FIG. 6e does not show the light shielding layer 106 , the buffer layer 107 , the first insulating layer 109 , and the second insulating layer 110 . Form a third metal layer on the substrate 114, perform photolithography on the third metal layer, and pattern the third metal layer to form data lines 101, source electrodes 111, and drain electrodes 112. The source electrodes 111 Connected to the data line 101, the source electrode 111 communicates with the semiconductor layer 108 through the second connection hole 202, and the drain electrode 112 communicates with the semiconductor layer 108 through the third connection hole 203. connect. The projection of the data line 101 on the substrate 114 completely overlaps the projection of the driving lead 103 on the substrate 114 , which can increase the aperture ratio of the display. The third metal layer is usually selected from a metal with low resistance, such as an alloy formed by one or more combinations of Cr, W, Ti, Ta, Mo, Al, and Cu.

如图6f所示,为了便于显示,图6f中的俯视图未示出遮光层106、缓冲层107、第一绝缘层109、第二绝缘层110、钝化层113。在所述基板114上形成钝化层113,在所述钝化层113上制作第四连接孔204,暴露出部分漏极112,所述第四连接孔204被用作连接像素电极105。所述钝化层113可以为透明的绝缘膜,优选为氮化硅或有机膜。As shown in FIG. 6f , for ease of illustration, the top view in FIG. 6f does not show the light shielding layer 106 , the buffer layer 107 , the first insulating layer 109 , the second insulating layer 110 , and the passivation layer 113 . A passivation layer 113 is formed on the substrate 114 , and a fourth connection hole 204 is formed on the passivation layer 113 to expose part of the drain electrode 112 . The fourth connection hole 204 is used to connect the pixel electrode 105 . The passivation layer 113 can be a transparent insulating film, preferably silicon nitride or an organic film.

在所述基板114上形成第四金属层,对所述第四金属层进行光刻,图形化所述第四金属层,所述第四金属层通过所述第四连接孔204与所述漏极112相连通。具体结构可见图2a至图2d,所述第四金属层通常选用透明的导电材料。Form a fourth metal layer on the substrate 114, perform photolithography on the fourth metal layer, and pattern the fourth metal layer, and connect the fourth metal layer to the drain via the fourth connection hole 204. The poles 112 are connected. The specific structure can be seen in Fig. 2a to Fig. 2d, and the fourth metal layer is usually made of a transparent conductive material.

通过上述制作过程,制作成的阵列基板,可以提高显示器的开口率,显示器的像素越高,开口率提高的越明显。Through the above manufacturing process, the manufactured array substrate can increase the aperture ratio of the display, and the higher the pixel of the display, the more obvious the aperture ratio is improved.

优选地,如图7所示,本发明实施例还提供了一种显示面板,包括上述阵列基板。所述显示面板可以提供显示器的开口率。Preferably, as shown in FIG. 7 , an embodiment of the present invention further provides a display panel, including the above-mentioned array substrate. The display panel may provide an aperture ratio of the display.

尽管已描述了本发明的优选实施例,但本领域内的技术人员一旦得知了基本创造性概念,则可对这些实施例作出另外的变更和修改。所以,所附权利要求意欲解释为包括优选实施例以及落入本发明范围的所有变更和修改。While preferred embodiments of the invention have been described, additional changes and modifications to these embodiments can be made by those skilled in the art once the basic inventive concept is appreciated. Therefore, it is intended that the appended claims be construed to cover the preferred embodiment as well as all changes and modifications which fall within the scope of the invention.

显然,本领域的技术人员可以对本发明进行各种改动和变型而不脱离本发明的精神和范围。这样,倘若本发明的这些修改和变型属于本发明权利要求及其等同技术的范围之内,则本发明也意图包含这些改动和变型在内。Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and equivalent technologies thereof, the present invention also intends to include these modifications and variations.

Claims (15)

1.一种阵列基板,其特征在于,包括:1. An array substrate, characterized in that, comprising: 多条栅极线、多条数据线和多条驱动引线,所述栅极线与所述驱动引线一一对应;所述数据线与所述驱动引线隔层设置;两条相邻的数据线与两条相邻的栅极线围成一个像素区域;A plurality of gate lines, a plurality of data lines and a plurality of drive leads, the gate lines correspond to the drive leads one by one; the data lines and the drive leads are arranged in separate layers; two adjacent data lines A pixel area is surrounded by two adjacent gate lines; 所述像素区域包括薄膜晶体管和像素电极;The pixel area includes a thin film transistor and a pixel electrode; 所述像素电极与所述薄膜晶体管的漏极或源极中之一相连通;The pixel electrode is connected to one of the drain or the source of the thin film transistor; 所述栅极线与所述薄膜晶体管的栅极相连通;所述栅极线与所述驱动引线相连通,所述驱动引线用于将栅极驱动电路产生的驱动信号传递给所述栅极线;The gate line is connected to the gate of the thin film transistor; the gate line is connected to the driving lead, and the driving lead is used to transmit the driving signal generated by the gate driving circuit to the gate Wire; 所述数据线与所述薄膜晶体管的源极或漏极中另一相连通。The data line communicates with the other of the source or the drain of the thin film transistor. 2.如权利要求1所述的阵列基板,其特征在于,所述数据线在阵列基板上的投影的中心线与所述驱动引线在阵列基板上的投影的中心线完全重叠。2 . The array substrate according to claim 1 , wherein the central line of the projection of the data lines on the array substrate completely overlaps the central line of the projection of the driving leads on the array substrate. 3.如权利要求1所述的阵列基板,其特征在于,所述数据线在阵列基板上的投影与所述驱动引线在阵列基板上的投影部分重叠。3. The array substrate according to claim 1, wherein the projection of the data lines on the array substrate partially overlaps the projection of the driving leads on the array substrate. 4.如权利要求1所述的阵列基板,其特征在于,所述数据线在阵列基板上的投影与所述驱动引线在阵列基板上的投影无重叠。4. The array substrate according to claim 1, wherein the projections of the data lines on the array substrate and the projections of the driving leads on the array substrate do not overlap. 5.如权利要求1所述的阵列基板,其特征在于,所述栅极线与所述驱动引线通过第一连接孔相连通。5 . The array substrate according to claim 1 , wherein the gate lines communicate with the driving leads through a first connection hole. 6.如权利要求1所述的阵列基板,其特征在于,所述数据线与所述薄膜晶体管的源极和漏极同层。6. The array substrate according to claim 1, wherein the data line is in the same layer as the source and drain of the thin film transistor. 7.如权利要求6所述的阵列基板,其特征在于,所述阵列基板还包括一遮光层,所述遮光层与所述驱动引线同层。7. The array substrate according to claim 6, further comprising a light-shielding layer, the light-shielding layer being in the same layer as the driving leads. 8.如权利要求7所述的阵列基板,其特征在于,所述驱动引线与所述数据线之间依次设有缓冲层、第一绝缘层和第二绝缘层。8 . The array substrate according to claim 7 , wherein a buffer layer, a first insulating layer and a second insulating layer are sequentially disposed between the driving lead wire and the data line. 9.如权利要求1所述的阵列基板,其特征在于,所述阵列基板包括:依次设置在基板上的遮光层、缓冲层、半导体层、第一绝缘层、栅极、第二绝缘层、以及通过第二连接孔、第三连接孔与所述半导体层相连的源极和漏极。9. The array substrate according to claim 1, wherein the array substrate comprises: a light-shielding layer, a buffer layer, a semiconductor layer, a first insulating layer, a gate, a second insulating layer, And a source and a drain connected to the semiconductor layer through the second connection hole and the third connection hole. 10.一种阵列基板的制作方法,其特征在于,所述方法包括:10. A method for manufacturing an array substrate, characterized in that the method comprises: 提供一基板;providing a substrate; 在基板上设置第一金属层并图形化出遮光层和驱动引线;disposing a first metal layer on the substrate and patterning a light-shielding layer and driving leads; 在所述基板上依次设置缓冲层、半导体层和第一绝缘层,在所述驱动引线上制作贯穿所述第一绝缘层和所述缓冲层的第一连接孔;a buffer layer, a semiconductor layer, and a first insulating layer are sequentially arranged on the substrate, and a first connection hole penetrating through the first insulating layer and the buffer layer is formed on the driving lead; 在所述基板上设置第二金属层并图形化出栅极线,所述栅极线通过所述第一连接孔连接至所述驱动引线;disposing a second metal layer on the substrate and patterning a gate line, the gate line is connected to the driving lead through the first connection hole; 在所述基板上依次设置第二绝缘层、第三金属层,并图形化出源极、漏极、数据线,所述数据线与所述源极或漏极中之一相连通;A second insulating layer and a third metal layer are sequentially arranged on the substrate, and a source electrode, a drain electrode, and a data line are patterned, and the data line is connected to one of the source electrode or the drain electrode; 在所述基板上依次设置钝化层和透明导电层,并图形化所述透明导电层形成像素电极,所述像素电极与所述漏极或源极中另一相连通。A passivation layer and a transparent conductive layer are sequentially arranged on the substrate, and the transparent conductive layer is patterned to form a pixel electrode, and the pixel electrode communicates with the other of the drain electrode or the source electrode. 11.如权利要求10所述的方法,其特征在于,所述方法还包括,在所述第一绝缘层和第二绝缘层上制作第二连接孔和第三连接孔,所述源极和漏极分别通过所述第二连接孔和所述第三连接孔与所述半导体层连接。11. The method according to claim 10, further comprising, forming a second connection hole and a third connection hole on the first insulating layer and the second insulating layer, and the source and The drain is connected to the semiconductor layer through the second connection hole and the third connection hole respectively. 12.如权利要求10所述的方法,其特征在于,所述数据线在基板上的投影的中心线与所述驱动引线在基板上的投影的中心线完全重叠。12. The method according to claim 10, wherein the centerline of the projection of the data line on the substrate completely overlaps the centerline of the projection of the driving lead line on the substrate. 13.如权利要求10所述的方法,其特征在于,所述数据线在基板上的投影与所述驱动引线在基板上的投影部分重叠。13. The method according to claim 10, wherein the projection of the data line on the substrate partly overlaps the projection of the driving lead line on the substrate. 14.如权利要求10所述的方法,其特征在于,所述数据线在基板上的投影与所述驱动引线在基板上的投影无重叠。14. The method according to claim 10, wherein the projections of the data lines on the substrate do not overlap with the projections of the driving leads on the substrate. 15.一种显示面板,其特征在于,包括如权利要求1至9任一所述的阵列基板。15. A display panel, characterized by comprising the array substrate according to any one of claims 1-9.
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Application publication date: 20150408