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CN104483018A - Light path structure of small asymmetric high-spectrum-resolution grating monochromator - Google Patents

Light path structure of small asymmetric high-spectrum-resolution grating monochromator Download PDF

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Publication number
CN104483018A
CN104483018A CN201410819995.4A CN201410819995A CN104483018A CN 104483018 A CN104483018 A CN 104483018A CN 201410819995 A CN201410819995 A CN 201410819995A CN 104483018 A CN104483018 A CN 104483018A
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grating
light
turntable
monochromator
small
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崔继承
杨增鹏
唐玉国
齐向东
朱继伟
尹禄
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Abstract

一种非对称式小型高光谱分辨率光栅单色仪的光路结构属于光谱分析仪器技术领域,该结构包括:入射狭缝、准直物镜、平面光栅、会聚物镜、折转反射镜、出射狭缝和转台;入射狭缝发出的光束照射于准直物镜进行准直,光束准直之后由平面光栅色散分光,色散光束由会聚物镜会聚,经折转反射镜折转光路后聚焦于出射狭缝处,从而获得准单色光,平面光栅固定在转台上,通过转台转动光栅使不同波长的单色光在出射狭缝处输出。本发明系统结构紧凑,体积小,重量轻,加工和装校简单。会聚物镜可获得较大的焦距从而使单色仪谱线线色散率显著提高。折转反射镜将光路折叠于仪器内部有效压缩了仪器体积,可有效减小系统象散从而提高仪器出射光谱的能量集中度。

The optical path structure of an asymmetric small-scale high spectral resolution grating monochromator belongs to the technical field of spectral analysis instruments. And the turntable; the light beam emitted by the incident slit is irradiated on the collimating objective lens for collimation, after the beam is collimated, it is dispersed and split by the plane grating, and the dispersed light beam is converged by the converging objective lens, and then focused on the exit slit after refracting the light path by the deflection mirror , so as to obtain quasi-monochromatic light, the plane grating is fixed on the turntable, and the monochromatic light of different wavelengths is output at the exit slit by rotating the grating through the turntable. The system of the invention has the advantages of compact structure, small volume, light weight, and simple processing and assembly. The converging objective lens can obtain a larger focal length so that the spectral line dispersion rate of the monochromator is significantly improved. The folding mirror folds the optical path inside the instrument to effectively compress the volume of the instrument, which can effectively reduce the astigmatism of the system and improve the energy concentration of the output spectrum of the instrument.

Description

一种非对称式小型高光谱分辨率光栅单色仪的光路结构Optical path structure of an asymmetric small high spectral resolution grating monochromator

技术领域technical field

本发明属于光谱分析仪器技术领域,涉及一种非对称式小型高光谱分辨率光栅单色仪的光路结构。The invention belongs to the technical field of spectral analysis instruments, and relates to an optical path structure of an asymmetric small-scale high-spectral resolution grating monochromator.

背景技术Background technique

单色仪是一种用来获取准单色光的分光仪器,是进行光谱分析和光谱特性测量的基本测试设备,如今广泛应用于科研、生产和质控等领域。A monochromator is a spectroscopic instrument used to obtain quasi-monochromatic light. It is a basic test equipment for spectral analysis and spectral characteristic measurement. It is widely used in scientific research, production and quality control.

随着现代科学技术的不断发展,小型化、轻量化、便携化和高分辨率逐渐成为了单色仪发展的主流趋势。常规的单色仪采用Czerney-Turner光路结构,此结构的光路较为对称,仪器的准直物镜和成像物的镜焦距相近甚至相等,为提高仪器谱线线色散率则需同时增大仪器准直物镜和成像物镜的焦距导致仪器体积增大,重量增大。With the continuous development of modern science and technology, miniaturization, light weight, portability and high resolution have gradually become the mainstream trend of monochromator development. The conventional monochromator adopts the Czerney-Turner optical path structure. The optical path of this structure is relatively symmetrical. The collimating objective lens of the instrument and the mirror focal length of the imaging object are similar or even equal. To improve the spectral line dispersion rate of the instrument, it is necessary to increase the collimation of the instrument. The focal length of the objective lens and imaging objective lens increases the volume and weight of the instrument.

发明内容Contents of the invention

为了解决现有技术中存在的问题,本发明提供了一种非对称式小型高光谱分辨率光栅单色仪的光路结构,该结构在有限的体积范围内,会聚物镜可获得较大的焦距从而使单色仪谱线线色散率显著提高,具有分辨率高,体积小,结构紧凑等特点。In order to solve the problems existing in the prior art, the present invention provides an optical path structure of an asymmetric small-scale high spectral resolution grating monochromator. In this structure, within a limited volume range, the converging objective lens can obtain a larger focal length so that The spectral line dispersion rate of the monochromator is significantly improved, and it has the characteristics of high resolution, small volume, and compact structure.

本发明解决技术问题所采用的技术方案如下:The technical solution adopted by the present invention to solve technical problems is as follows:

一种非对称式小型高光谱分辨率光栅单色仪的光路结构,该结构包括:入射狭缝、准直物镜、平面光栅、会聚物镜、出射狭缝和转台,该结构还包括:折转反射镜;入射狭缝发出的光束照射于准直物镜进行准直,光束准直之后由平面光栅色散分光,色散光束由会聚物镜会聚,经折转反射镜折转光路后聚焦于出射狭缝处,从而获得准单色光,平面光栅固定在转台上,通过转台转动平面光栅使不同波长的单色光在出射狭缝处输出。An optical path structure of an asymmetrical small scale high spectral resolution grating monochromator, the structure includes: incident slit, collimating objective lens, plane grating, converging objective lens, exit slit and turntable, the structure also includes: catadioptric reflection Mirror; the light beam emitted by the incident slit is irradiated on the collimating objective lens for collimation. After the beam is collimated, it is dispersed and split by the plane grating. In order to obtain quasi-monochromatic light, the flat grating is fixed on the turntable, and the flat grating is rotated by the turntable so that monochromatic light of different wavelengths is output at the exit slit.

本发明的有益效果是:本发明系统结构紧凑,体积小,重量轻,加工和装校简单。在有限的体积范围内,会聚物镜可获得较大的焦距从而使单色仪谱线线色散率显著提高。折转反射镜将光路折叠于仪器内部有效压缩了仪器体积,且采用柱面反射镜作为折转反射镜时可有效减小系统象散从而提高仪器出射光谱的能量集中度。The beneficial effects of the invention are: the system of the invention is compact in structure, small in volume, light in weight, and simple in processing and assembly. In a limited volume range, the converging objective lens can obtain a larger focal length, so that the spectral line dispersion rate of the monochromator is significantly improved. The folding mirror folds the optical path inside the instrument to effectively compress the volume of the instrument, and when the cylindrical mirror is used as the folding mirror, it can effectively reduce the astigmatism of the system and improve the energy concentration of the output spectrum of the instrument.

附图说明Description of drawings

图1本发明一种非对称式小型高光谱分辨率光栅单色仪的光路结构的示意图。Fig. 1 is a schematic diagram of an optical path structure of an asymmetrical small-scale high spectral resolution grating monochromator of the present invention.

具体实施方式Detailed ways

下面结合附图和实施例对本发明做进一步详细说明。The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

如图1所示,本发明一种非对称式小型高光谱分辨率光栅单色仪的光路结构,包括入射狭缝1、准直物镜2、平面光栅3、会聚物镜4、折转反射镜5、出射狭缝6和转台7;准直物镜2和会聚物镜4均采用凹球面反射镜,会聚物镜4焦距远大于准直物镜焦距以提高仪器谱线线色散率;平面光栅3采用反射式平面光栅;折转反射镜5用于将光路折叠于仪器内部以缩小仪器体积,即可采用平面反射镜也可采用柱面反射镜(可消除系统象散);转台7用于转动平面光栅3以使不同波长的单色光在出射狭缝处输出。从入射狭缝1发出的光束照射于准直物镜2,光束准直之后由平面光栅3色散分光,色散光束由会聚物镜4会聚,经折转反射镜5折转光路后聚焦于出射狭缝6处,从而获得准单色光。As shown in Figure 1, the optical path structure of an asymmetric small-scale high spectral resolution grating monochromator of the present invention includes an incident slit 1, a collimating objective lens 2, a plane grating 3, a converging objective lens 4, and a refracting mirror 5 , the exit slit 6 and the turntable 7; the collimating objective lens 2 and the converging objective lens 4 all adopt concave spherical reflectors, and the focal length of the converging objective lens 4 is much greater than the focal length of the collimating objective lens to improve the spectral line dispersion rate of the instrument; the plane grating 3 adopts a reflective plane Grating; folding reflector 5 is used to fold the optical path inside the instrument to reduce the volume of the instrument, either a plane reflector or a cylindrical reflector (can eliminate system astigmatism); turntable 7 is used to rotate the plane grating 3 to Monochromatic light of different wavelengths is output at the exit slit. The light beam emitted from the incident slit 1 is irradiated on the collimating objective lens 2. After the beam is collimated, it is dispersed and split by the plane grating 3. The dispersed light beam is converged by the converging objective lens 4, and then focused on the exit slit 6 after refracting the optical path by the deflection mirror 5. to obtain quasi-monochromatic light.

实施实例1:Implementation example 1:

本发明的光路结构中,单色仪工作波段为200~850nm,物方数值孔径为0.1;准直物镜2和会聚物镜4均为凹球面反射镜,曲率半径分别为90mm和193mm,离轴角分别为8°和30°,焦距分别为45.2mm和80.8mm;平面光栅3采用光栅常数为1/600mm的反射式刻划光栅;采用柱面反射镜作为折转反射镜5消除系统象散时,柱面反射镜曲率半径为294mm。In the optical path structure of the present invention, the working band of the monochromator is 200-850nm, and the object-side numerical aperture is 0.1; the collimating objective lens 2 and the converging objective lens 4 are concave spherical reflectors, and the radii of curvature are respectively 90mm and 193mm, and the off-axis angle 8° and 30° respectively, focal lengths are 45.2mm and 80.8mm respectively; planar grating 3 adopts reflective ruled grating whose grating constant is 1/600mm; cylindrical reflector is used as refracting reflector 5 to eliminate system astigmatism , The radius of curvature of the cylindrical mirror is 294mm.

通过光学设计软件追迹,本实例构成的一种非对称式小型高光谱分辨率光栅单色仪的光路结构的理论分辨率可达1nm,光路长宽为56mm×47mm。Through optical design software tracking, the theoretical resolution of the optical path structure of an asymmetrical small-scale high spectral resolution grating monochromator constructed in this example can reach 1nm, and the optical path length and width are 56mm×47mm.

Claims (4)

1. a light channel structure for the small-sized high spectral resolution grating monochromator of asymmetric, this structure comprises: entrance slit, collimator objective, plane grating, convergence object lens, exit slit and turntable, is characterized in that, this structure also comprises: refluxing reflection mirror; The light beam irradiation that described entrance slit sends collimates in collimator objective, by plane grating dispersion light splitting after beam collimation, dispersed light beam is assembled by assembling object lens, exit slit place is focused on after refluxing reflection mirror turns back light path, thus acquisition quasi-monochromatic light, plane grating is fixed on turntable, by turntable rotational plane grating, the monochromatic light of different wave length is exported at exit slit place.
2. the light channel structure of the small-sized high spectral resolution grating monochromator of a kind of asymmetric as claimed in claim 1, is characterized in that, described collimator objective and convergence object lens are concave spherical mirror; Assemble the focal length of focal length much larger than collimator objective of object lens.
3. the light channel structure of the small-sized high spectral resolution grating monochromator of a kind of asymmetric as claimed in claim 1, is characterized in that, described plane grating is reflective planar grating.
4. the light channel structure of the small-sized high spectral resolution grating monochromator of a kind of asymmetric as claimed in claim 1, is characterized in that, described refluxing reflection mirror is cylindrical mirror.
CN201410819995.4A 2014-12-25 2014-12-25 Light path structure of small asymmetric high-spectrum-resolution grating monochromator Pending CN104483018A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107588363A (en) * 2017-08-24 2018-01-16 中国电子科技集团公司第四十研究所 The polarized monochromatic light source generation system and method for a kind of Programmable and Variable wavelength

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1373351A (en) * 2002-04-10 2002-10-09 天津大学 Apparatus for measuring raster angle with linear CCD array to determine wavelength
CN103245488A (en) * 2013-04-02 2013-08-14 中国科学院长春光学精密机械与物理研究所 Broadband large size plane grating diffraction efficiency tester

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1373351A (en) * 2002-04-10 2002-10-09 天津大学 Apparatus for measuring raster angle with linear CCD array to determine wavelength
CN103245488A (en) * 2013-04-02 2013-08-14 中国科学院长春光学精密机械与物理研究所 Broadband large size plane grating diffraction efficiency tester

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107588363A (en) * 2017-08-24 2018-01-16 中国电子科技集团公司第四十研究所 The polarized monochromatic light source generation system and method for a kind of Programmable and Variable wavelength

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Application publication date: 20150401