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CN104465809B - Double-face growing silicon-based four-junction solar cell - Google Patents

Double-face growing silicon-based four-junction solar cell Download PDF

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CN104465809B
CN104465809B CN201410718143.6A CN201410718143A CN104465809B CN 104465809 B CN104465809 B CN 104465809B CN 201410718143 A CN201410718143 A CN 201410718143A CN 104465809 B CN104465809 B CN 104465809B
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CN104465809A (en
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陈丙振
张小宾
王雷
潘旭
张露
张杨
杨翠柏
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ZHONGSHAN DEHUA CHIP TECHNOLOGY CO., LTD.
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/12Active materials
    • H10F77/124Active materials comprising only Group III-V materials, e.g. GaAs
    • H10F77/1248Active materials comprising only Group III-V materials, e.g. GaAs having three or more elements, e.g. GaAlAs, InGaAs or InGaAsP
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/16Photovoltaic cells having only PN heterojunction potential barriers
    • H10F10/161Photovoltaic cells having only PN heterojunction potential barriers comprising multiple PN heterojunctions, e.g. tandem cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/16Photovoltaic cells having only PN heterojunction potential barriers
    • H10F10/163Photovoltaic cells having only PN heterojunction potential barriers comprising only Group III-V materials, e.g. GaAs/AlGaAs or InP/GaInAs photovoltaic cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/544Solar cells from Group III-V materials
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

The invention discloses a double-face growing silicon-based four-junction solar cell which comprises a Si sub cell serving as a substrate, a GaAsxP1-x sub cell, a GaInxP1-x sub cell and a Ge sub cell located on the lower surface of the substrate, wherein the GaAsxP1-x sub cell and the GaInxP1-x sub cell are located on the upper surface of the substrate. The GaAsxP1-x sub cell and the GaInxP1-x sub cell are connected with the Si sub cell through a GaAsxP1-x component gradient buffer layer. The Ge sub cell is connected with the Si sub cell through a SixGel-x component gradient buffer layer. The GaAsxP1-x sub cell is connected with the GaInxP1-x sub cell through a tunnel junction. The GaAsxP1-x sub cell is connected with the Si sub cell through a tunnel junction. The Si sub cell is connected with the Ge sub cell through a tunnel junction. According to the double-face growing silicon-based four-junction solar cell, the cascaded four-junction solar cell is prepared through the Si substrate, band gaps are combined at the voltage about 1.95/1.5/1.12/0.67 eV, and the cost can be reduced while the photoelectric conversion efficiency of the cell is improved.

Description

一种双面生长的硅基四结太阳电池A silicon-based four-junction solar cell grown on both sides

技术领域technical field

本发明涉及太阳能光伏的技术领域,尤其是指一种双面生长的硅基四结太阳电池。The invention relates to the technical field of solar photovoltaics, in particular to a silicon-based four-junction solar cell grown on both sides.

背景技术Background technique

当前,晶格匹配性的砷化镓多结太阳电池因其转换效率明显高于晶硅电池而被广泛地应用于聚光光伏发电(CPV)系统和空间电源系统。砷化镓多结电池的主流结构是由GaInP、GaInAs和Ge子电池组成的三结太阳电池,电池结构上保持晶格匹配,带隙组合在1.85/1.40/0.67eV左右。此外,为获得更高效率,还有部分多结太阳能电池采用晶格失配的材料进行生长,如无定形结构的GaInP/GaInAs/Ge电池,为弥补晶格失配带来的应力和材料质量等问题,通过在Ge衬底上生长一个组分渐变GaInAs缓冲层,并增加GaInP、GaInAs电池中的In组分来实现1.8/1.3/0.67eV的带隙组合。此外,还有的机构在GaAs衬底上,生个两个不同组分的GaInAs电池,并用两个组分渐变缓冲层来衔接,实现1.85/1.3/0.9eV的带隙组合。Currently, lattice-matched GaAs multi-junction solar cells are widely used in concentrated photovoltaic (CPV) systems and space power systems because their conversion efficiency is significantly higher than that of crystalline silicon cells. The mainstream structure of gallium arsenide multi-junction solar cells is a triple-junction solar cell composed of GaInP, GaInAs and Ge sub-cells. The cell structure maintains lattice matching, and the band gap combination is around 1.85/1.40/0.67eV. In addition, in order to obtain higher efficiency, some multi-junction solar cells are grown with lattice-mismatched materials, such as GaInP/GaInAs/Ge cells with amorphous structure, in order to compensate for the stress and material quality caused by lattice mismatch and other issues, by growing a composition graded GaInAs buffer layer on the Ge substrate, and increasing the In composition in GaInP and GaInAs cells to achieve a bandgap combination of 1.8/1.3/0.67eV. In addition, there are some institutions that grow two GaInAs cells with different compositions on the GaAs substrate, and connect them with two composition graded buffer layers to achieve a bandgap combination of 1.85/1.3/0.9eV.

迄今为止,以上电池在效率方面均取得了一定突破,达到了40%甚至更高水平。但是,当这类电池被应用到对成本敏感的地面聚光电站中时,其昂贵的成本往往使得聚光电站的造价提升,竞争力下降。而Ge基、GaAs基多结电池成本高的一个主要原因在于衬底所采用的Ge或者Ga、As在地壳中含量很少,且很难直接提取和加工,因此成本高,使得仅衬底就占电池成本的1/3~1/2,不利于多结电池的大规模推广利用。So far, the above batteries have made some breakthroughs in terms of efficiency, reaching 40% or even higher levels. However, when this type of battery is applied to a cost-sensitive ground concentrating power station, its high cost often increases the cost of the concentrating power station and reduces its competitiveness. One of the main reasons for the high cost of Ge-based and GaAs-based multi-junction cells is that the content of Ge or Ga and As used in the substrate is very small in the earth's crust, and it is difficult to directly extract and process, so the cost is high, making only the substrate. It accounts for 1/3 to 1/2 of the battery cost, which is not conducive to the large-scale promotion and utilization of multi-junction batteries.

而硅衬底由于经历IC产业和光伏产业数十年的开发和规模生产,具有非常明显的成本优势,已被消费品和能源市场广泛接受。但由Si直接做成晶硅电池,由于硅晶格常数为与GaAs系列的存在4%的晶格失配度,一直以来只以单结电池结构出现,受电池结数和吸收谱限制,其理论效率仅为27%,而晶硅单结电池的实际产品效率一直在15~20%区间徘徊,很难进一步提升。The silicon substrate has a very obvious cost advantage due to decades of development and large-scale production in the IC industry and the photovoltaic industry, and has been widely accepted by the consumer goods and energy markets. However, crystalline silicon cells are directly made from Si, since the lattice constant of silicon is with GaAs series of There is a lattice mismatch of 4%, and it has only appeared in the single-junction cell structure. Due to the limitation of the number of cell junctions and absorption spectrum, its theoretical efficiency is only 27%, while the actual product efficiency of crystalline silicon single-junction cells has been 15% The ~20% range is hovering, and it is difficult to further improve.

发明内容Contents of the invention

本发明的目的在于克服现有技术的不足与缺点,提供一种双面生长的硅基四结太阳电池,通过组分渐变缓冲层,在作为衬底的Si电池的两面分别生长Ge电池和GaAsxP1-x/GaxIn1-xP电池,不仅可以有效提升电池的光电转换效率,还可充分利用硅的成本优势,具有良好的产业化前景。The purpose of the present invention is to overcome the deficiencies and shortcomings of the prior art, to provide a silicon-based quadruple-junction solar cell grown on both sides, and to grow Ge cells and GaAs on both sides of the Si cell as the substrate through a composition gradient buffer layer. The x P 1-x /Ga x In 1-x P battery can not only effectively improve the photoelectric conversion efficiency of the battery, but also make full use of the cost advantage of silicon, and has a good industrialization prospect.

为实现上述目的,本发明所提供的技术方案为:一种双面生长的硅基四结太阳电池,包括作为衬底的Si子电池,在所述Si子电池的上表面按照层状叠加结构从上至下依次设置有GaInxP1-x子电池、GaAsxP1-x子电池、GaAsxP1-x组分渐变缓冲层;在所述Si子电池的下表面按照层状叠加结构从上至下依次设置有SixGe1-x组分渐变缓冲层和Ge子电池;其中,所述GaInxP1-x子电池和GaAsxP1-x子电池之间通过第三隧道结连接,所述GaAsxP1-x子电池和Si子电池之间通过位于GaAsxP1-x组分渐变缓冲层之上的第二隧道结连接,所述Si子电池和Ge子电池之间通过位于SixGe1-x组分渐变缓冲层之上的第一隧道结连接;所述GaInxP1-x子电池和GaAsxP1-x子电池晶格匹配。In order to achieve the above object, the technical solution provided by the present invention is: a silicon-based four-junction solar cell grown on both sides, including a Si sub-cell as a substrate, and the upper surface of the Si sub-cell is stacked according to a layered structure. GaIn x P 1-x sub-cells, GaAs x P 1-x sub-cells, and GaAs x P 1-x composition gradient buffer layers are arranged in sequence from top to bottom; the lower surface of the Si sub-cells is stacked in layers The structure is provided with a Six Ge 1-x composition graded buffer layer and a Ge sub-cell in sequence from top to bottom; wherein, the GaIn x P 1-x sub -cell and the GaAs x P 1-x sub-cell are connected by a third Tunnel junction connection, the GaAs x P 1-x sub-cell and the Si sub-cell are connected through a second tunnel junction located on the GaAs x P 1-x composition graded buffer layer, the Si sub-cell and the Ge sub-cell are connected The batteries are connected through the first tunnel junction located on the Si x Ge 1-x composition gradient buffer layer; the GaIn x P 1-x sub-cells and the GaAs x P 1-x sub-cells are lattice-matched.

所述GaInxP1-x子电池的内部结构从上至下依次包括有晶格匹配的n型AlGaInP或AlInP窗口层,n型GaInxP1-x发射区,p型GaInxP1-x基区,p型AlGaInP或AlInP背场层;其中,所述GaInxP1-x子电池中,x值在0.5~0.65区间内,对应GaInxP1-x材料带隙在1.85eV~2.05eV区间内。The internal structure of the GaIn x P 1-x subcell includes, from top to bottom, a lattice-matched n-type AlGaInP or AlInP window layer, an n-type GaIn x P 1-x emission region, and a p-type GaIn x P 1 -x x base region, p-type AlGaInP or AlInP back field layer; wherein, in the GaIn x P 1-x sub-cell, the value of x is in the range of 0.5 to 0.65, and the corresponding GaIn x P 1-x material band gap is 1.85 eV to 2.05eV range.

所述GaAsxP1-x子电池的内部结构从上至下依次包括有晶格匹配的n型GaInP窗口层,n型GaInP或GaAsxP1-x发射区,p型GaAsxP1-x基区,p型GaInP背场层;其中,所述GaInxP1-x子电池中,x值在0.85~1区间内,对应GaAsxP1-x材料带隙在1.42eV~1.6eV区间内。The internal structure of the GaAs x P 1-x subcell includes, from top to bottom, a lattice-matched n-type GaInP window layer, an n-type GaInP or GaAs x P 1-x emitter, and a p-type GaAs x P 1 -x x base region, p-type GaInP back field layer; wherein, in the GaIn x P 1-x subcell, the value of x is in the range of 0.85 to 1, corresponding to the band gap of the GaAs x P 1-x material in the range of 1.42eV to 1.6eV within the range.

所述GaAsxP1-x组分渐变缓冲层,从上往下其x值在1~0区间渐变,对应的晶格常数从与GaAsxP1-x匹配渐变为与Si匹配,亦即是在区间的渐变。The GaAs x P 1-x composition graded buffer layer has an x value that gradually changes from 1 to 0 from top to bottom, and the corresponding lattice constant gradually changes from matching GaAs x P 1-x to matching Si, that is is in interval gradient.

所述SixGe1-x组分渐变缓冲层,从上往下其x值在1~0区间渐变,对应的晶格常数从与GaAsxP1-x匹配渐变为与Si匹配,亦即是在区间的渐变。The Si x Ge 1-x composition graded buffer layer has an x value that gradually changes from 1 to 0 from top to bottom, and the corresponding lattice constant gradually changes from matching GaAs x P 1-x to matching Si, that is, is in interval gradient.

所述Si子电池从上到下依次包括有窗口层、n型P扩散层、p型层、背场层,作为衬底使用前需进行双面抛光处理。The Si sub-cell includes a window layer, an n-type P diffusion layer, a p-type layer, and a back field layer sequentially from top to bottom, and needs to be polished on both sides before being used as a substrate.

所述Ge子电池从上到下依次包括有窗口层、n型层、p型层、背场层。The Ge sub-cell includes a window layer, an n-type layer, a p-type layer, and a back field layer sequentially from top to bottom.

本发明与现有技术相比,具有如下优点与有益效果:Compared with the prior art, the present invention has the following advantages and beneficial effects:

利用Si子电池作为双面衬底,并引入组分渐变缓冲层,在Si衬底之上设置有GaInxP1-x和GaAsxP1-x子电池,在Si衬底之下设置带隙约0.67eV的Ge子电池,最终可得到带隙结构在1.95/1.5/1.12/0.67eV左右的GaInxP1-x/GaAsxP1-x/Si/Ge四结电池,不仅可满足太阳光谱下的四结电池最佳带隙组合,有望得到较高的电池效率,还可显著降低电池的制造成本,为高效率电池的广泛应用创造了条件。Using Si sub-cells as double-sided substrates, and introducing composition graded buffer layers, GaIn x P 1-x and GaAs x P 1-x sub-cells are set on the Si substrate, and strips are set under the Si substrate. A Ge sub-cell with a gap of about 0.67eV can finally be obtained with a GaIn x P 1-x /GaAs x P 1-x /Si/Ge four-junction cell with a bandgap structure of about 1.95/1.5/1.12/0.67eV, which can not only meet The optimal bandgap combination of the four-junction cell under the solar spectrum is expected to obtain higher cell efficiency, and can also significantly reduce the manufacturing cost of the cell, creating conditions for the wide application of high-efficiency cells.

附图说明Description of drawings

图1为本发明所述双面生长的硅基四结太阳电池结构示意图。FIG. 1 is a schematic diagram of the structure of a silicon-based four-junction solar cell grown on both sides according to the present invention.

具体实施方式detailed description

下面结合具体实施例对本发明作进一步说明。The present invention will be further described below in conjunction with specific examples.

如图1所示,本实施例所述的双面生长的硅基四结太阳电池,包括有作为衬底的Si子电池,在所述Si子电池的上表面按照层状叠加结构从上至下依次设置有GaInxP1-x子电池、GaAsxP1-x子电池、GaAsxP1-x组分渐变缓冲层,在所述Si子电池的下表面按照层状叠加结构从上至下依次设置有SixGe1-x组分渐变缓冲层和Ge子电池;所述GaInxP1-x子电池和GaAsxP1-x子电池之间通过第三隧道结连接,所述GaAsxP1-x子电池和Si子电池之间通过位于GaAsxP1-x组分渐变缓冲层之上的第二隧道结连接,所述Si子电池和Ge子电池之间通过位于SixGe1-x组分渐变缓冲层之上的第一隧道结连接;所述GaInxP1-x子电池和GaAsxP1-x子电池晶格匹配。As shown in Figure 1, the silicon-based four-junction solar cell grown on both sides described in this embodiment includes a Si sub-cell as a substrate, and the upper surface of the Si sub-cell is stacked from top to bottom according to a layered superposition structure. A GaIn x P 1-x sub-cell, a GaAs x P 1-x sub-cell, and a GaAs x P 1-x composition graded buffer layer are sequentially arranged on the bottom, and the lower surface of the Si sub-cell is layered from the top to the bottom. The six Ge 1-x composition graded buffer layer and the Ge sub-cell are arranged in sequence from the bottom; the GaIn x P 1-x sub -cell and the GaAs x P 1-x sub-cell are connected through a third tunnel junction, so The GaAs x P 1-x sub-cell and the Si sub-cell are connected through a second tunnel junction located on the GaAs x P 1-x composition graded buffer layer, and the Si sub-cell and the Ge sub-cell are connected by a The first tunnel junction connection on the Si x Ge 1-x composition graded buffer layer; the GaIn x P 1-x sub-cell and the GaAs x P 1-x sub-cell are lattice-matched.

所述Si子电池,从上到下依次包括有窗口层、n型P扩散层、p型层、背场层,作为衬底使用前需进行双面抛光处理。The Si sub-cell includes a window layer, an n-type P diffusion layer, a p-type layer, and a back field layer in order from top to bottom, and needs to be polished on both sides before being used as a substrate.

所述GaInxP1-x子电池的内部结构从上至下依次包括有晶格匹配的n型AlGaInP或AlInP窗口层(在本实施例中,具体选择n型AlGaInP窗口层),n型GaInxP1-x发射区,p型GaInxP1-x基区,p型AlGaInP或AlInP背场层(在本实施例中,具体选择p型AlGaInP背场层);其中,所述GaInxP1-x子电池中,x值在0.5~0.65区间内,对应GaInxP1-x材料带隙在1.85eV~2.05eV区间内,而在本实施例中,x值取0.59,对应GaInxP1-x材料带隙在1.95eV左右,晶格常数约为5.62。The internal structure of the GaIn x P 1-x subcell includes, from top to bottom, a lattice-matched n-type AlGaInP or AlInP window layer (in this embodiment, an n-type AlGaInP window layer is specifically selected), and an n-type GaIn x P 1-x emission region, p-type GaIn x P 1-x base area, p-type AlGaInP or AlInP back field layer (in this embodiment, specifically select p-type AlGaInP back field layer); wherein, the GaIn x In the P 1-x sub-cell, the value of x is in the range of 0.5 to 0.65, corresponding to the GaIn x P 1-x material band gap in the range of 1.85eV to 2.05eV, and in this embodiment, the value of x is 0.59, corresponding to GaIn The band gap of x P 1-x material is about 1.95eV, and the lattice constant is about 5.62.

所述GaAsxP1-x子电池的内部结构从上至下依次包括有晶格匹配的n型GaInP窗口层,n型GaInP或GaAsxP1-x发射区(在本实施例中,具体选择n型GaInP),p型GaAsxP1-x基区,p型GaInP背场层;其中,所述GaInxP1-x子电池中,x值在0.85~1区间内,对应GaAsxP1-x材料带隙在1.42eV~1.6eV区间内,而在本实施例中,x值取0.85,对应GaAsxP1-x材料带隙在1.59eV左右,晶格常数约为5.62,与GaInxP1-x子电池晶格匹配。The internal structure of the GaAs x P 1-x sub-cell includes, from top to bottom, a lattice-matched n-type GaInP window layer, an n-type GaInP or GaAs x P 1-x emission region (in this embodiment, specifically Select n-type GaInP), p-type GaAs x P 1-x base region, and p-type GaInP back field layer; wherein, in the GaIn x P 1-x sub-cell, the value of x is in the range of 0.85 to 1, corresponding to GaAs x The bandgap of the P 1-x material is in the range of 1.42eV to 1.6eV, and in this embodiment, the value of x is 0.85, corresponding to the bandgap of the GaAs x P 1-x material is about 1.59eV, and the lattice constant is about 5.62. Lattice matched to GaIn x P 1-x subcells.

所述GaAsxP1-x组分渐变缓冲层,从上往下其x值在1~0区间渐变,对应的晶格常数从与GaAsxP1-x匹配渐变为与Si匹配,亦即是在区间的渐变,在渐变完成后保持x=0生长2um的GaP,作为Si子电池的窗口层,并起到成核过渡作用。The GaAs x P 1-x composition graded buffer layer has an x value that gradually changes from 1 to 0 from top to bottom, and the corresponding lattice constant gradually changes from matching GaAs x P 1-x to matching Si, that is is in Gradual change in the interval, keep x=0 to grow 2um GaP after the gradual change is completed, as the window layer of the Si sub-cell, and play the role of nucleation transition.

所述SixGe1-x组分渐变缓冲层,从上往下其x值在1~0区间渐变,对应的晶格常数从与GaAsxP1-x匹配渐变为与Si匹配,亦即是在区间的渐变。The Si x Ge 1-x composition graded buffer layer has an x value that gradually changes from 1 to 0 from top to bottom, and the corresponding lattice constant gradually changes from matching GaAs x P 1-x to matching Si, that is, is in interval gradient.

所述Ge子电池从上到下依次包括有窗口层、n型层、p型层、背场层。The Ge sub-cell includes a window layer, an n-type layer, a p-type layer, and a back field layer sequentially from top to bottom.

下面为本实施例上述双面生长的硅基四结太阳电池的具体制备过程,其情况如下:The following is the specific preparation process of the above-mentioned double-sided silicon-based four-junction solar cell in this embodiment, and the situation is as follows:

首先,对一个双面抛光的4英寸p型Si单晶片进行正面P扩散,形成n型层,初步形成Si子电池;然后采用金属有机化学气相沉积技术(MOCVD)或分子束外延生长技术(MBE)在作为衬底的Si子电池的上表面依次生长GaAsxP1-x组分渐变缓冲层、第二隧道结、GaAsxP1-x子电池、第三隧道结和GaInxP1-x子电池;最后将衬底翻转180°,再在作为衬底的Si子电池的下表面依次生长SixGe1-x组分渐变缓冲层和Ge子电池,即可完成双面生长的硅基四结太阳电池的制备。First, a double-sided polished 4-inch p-type Si single wafer is subjected to front-side P diffusion to form an n-type layer and initially form a Si sub-cell; then metal-organic chemical vapor deposition (MOCVD) or molecular beam epitaxy (MBE ) grow GaAs x P 1-x composition graded buffer layer, second tunnel junction, GaAs x P 1-x sub-cell, third tunnel junction and GaIn x P 1 -x sequentially on the upper surface of Si sub-cell as substrate x sub-cell; finally, the substrate is turned over 180°, and then the Si x Ge 1-x composition graded buffer layer and Ge sub-cell are sequentially grown on the lower surface of the Si sub-cell as the substrate, and the double-sided growth of silicon can be completed. Fabrication of base four-junction solar cells.

综上所述,本发明利用Si衬底制备级联的四结电池,并引入组分渐变缓冲层,在Si衬底之上设置有GaInxP1-x和GaAsxP1-x子电池,在Si衬底之下设置带隙约0.67eV的Ge子电池,最终可得到带隙结构在1.95/1.5/1.12/0.67eV左右的GaInxP1-x/GaAsxP1-x/Si/Ge四结电池,这样不仅可满足太阳光谱下的四结电池最佳带隙组合,有望得到较高的电池效率,还可显著降低电池的制造成本,为高效率电池的广泛应用创造了条件,值得推广。In summary, the present invention utilizes a Si substrate to prepare a cascaded four-junction cell, and introduces a composition graded buffer layer, and GaIn x P 1-x and GaAs x P 1-x sub-cells are arranged on the Si substrate , a Ge subcell with a bandgap of about 0.67eV is set under the Si substrate, and finally GaIn x P 1-x /GaAs x P 1-x /Si with a bandgap structure of about 1.95/1.5/1.12/0.67eV can be obtained /Ge four-junction battery, which not only meets the best bandgap combination of four-junction batteries under the solar spectrum, is expected to obtain higher battery efficiency, but also significantly reduces the manufacturing cost of the battery, creating conditions for the wide application of high-efficiency batteries. , is worth promoting.

以上所述之实施例子只为本发明之较佳实施例,并非以此限制本发明的实施范围,故凡依本发明之形状、原理所作的变化,均应涵盖在本发明的保护范围内。The implementation examples described above are only preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. Therefore, all changes made according to the shape and principle of the present invention should be covered within the scope of protection of the present invention.

Claims (3)

1. a kind of silicon substrate four-junction solar battery of two-sided growth, including as substrate si battery it is characterised in that: described The upper surface of si battery is disposed with gain from top to bottom according to stratiform overlaying structurexp1-xSub- battery, gaasxp1-xSon electricity Pond, gaasxp1-xComponent-gradient buffer layer;Described si battery lower surface according to stratiform overlaying structure from top to bottom successively It is provided with sixge1-xComponent-gradient buffer layer and ge battery;Wherein, described gainxp1-xSub- battery and gaasxp1-xSub- battery Between by the 3rd tunnel knot connect, described gaasxp1-xBy positioned at gaas between sub- battery and si batteryxp1-xComponent is gradually Become the second tunnel knot on cushion to connect, by positioned at si between described si battery and ge batteryxge1-xComponent is gradually Become the first tunnel knot on cushion to connect;Described gainxp1-xSub- battery and gaasxp1-xSub- battery Lattice Matching;Described gainxp1-xThe internal structure of sub- battery includes N-shaped algainp or the alinp Window layer of Lattice Matching, n from top to bottom successively Type gainxp1-xLaunch site, p-type gainxp1-xBase, p-type algainp or alinp back surface field layer;Wherein, described gainxp1-xSon electricity Chi Zhong, x value, in 0.5~0.65 interval, corresponds to gainxp1-xMaterial band gap is in 1.85ev~2.05ev interval;Described gaasxp1-xThe internal structure of sub- battery includes the N-shaped gainp Window layer of Lattice Matching from top to bottom successively, N-shaped gainp or gaasxp1-xLaunch site, p-type gaasxp1-xBase, p-type gainp back surface field layer;Wherein, described gainxp1-xIn sub- battery, x value exists 0.85~1 is interval interior, corresponding gaasxp1-xMaterial band gap is in 1.42ev~1.6ev interval;Described gaasxp1-xContent gradually variational delays Rush layer, its x value is in 1~0 interval gradual change from top to bottom, corresponding lattice paprmeter from gaasxp1-xCoupling fades to and si Join, be alsoInterval gradual change;Described sixge1-xComponent-gradient buffer layer, from top to bottom its x value 1~ 0 interval gradual change, corresponding lattice paprmeter from gaasxp1-xCoupling fade to mate with si, be alsoArea Between gradual change.
2. a kind of two-sided growth according to claim 1 silicon substrate four-junction solar battery it is characterised in that: described si electricity Pond includes Window layer, N-shaped p diffusion layer, p-type layer, back surface field layer from top to bottom successively.
3. a kind of two-sided growth according to claim 1 silicon substrate four-junction solar battery it is characterised in that: described ge electricity Pond includes Window layer, n-layer, p-type layer, back surface field layer from top to bottom successively.
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