[go: up one dir, main page]

CN104464837B - High-precision based on DC motor Driver and three-dimensional motion system - Google Patents

High-precision based on DC motor Driver and three-dimensional motion system Download PDF

Info

Publication number
CN104464837B
CN104464837B CN201410597979.5A CN201410597979A CN104464837B CN 104464837 B CN104464837 B CN 104464837B CN 201410597979 A CN201410597979 A CN 201410597979A CN 104464837 B CN104464837 B CN 104464837B
Authority
CN
China
Prior art keywords
positioning platform
axis positioning
base
axis
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201410597979.5A
Other languages
Chinese (zh)
Other versions
CN104464837A (en
Inventor
段吉安
徐聪
郑煜
李帅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hunan Zhongnan Hongsi Automation Technology Co Ltd
Original Assignee
Central South University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central South University filed Critical Central South University
Priority to CN201410597979.5A priority Critical patent/CN104464837B/en
Publication of CN104464837A publication Critical patent/CN104464837A/en
Application granted granted Critical
Publication of CN104464837B publication Critical patent/CN104464837B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Machine Tool Units (AREA)
  • Details Of Measuring And Other Instruments (AREA)

Abstract

本发明公开了一种基于直流电机驱动的高精度定位平台,包括底座和运动台面,底座设有凹入的容置腔,运动台面通过位于两侧的两个交叉滚珠导轨滑设于底座上,且运动台面位于容置腔的开口端形成一封闭空间,封闭空间内设有用于驱动运动台面往复滑动的驱动装置、用于检测运动台面滑动位置的光栅尺以及用于限制运动台面滑动行程的光电限位开关,驱动装置包括直流电机以及连接于底座和运动台面之间的滚珠丝杠驱动机构,直流电机通过传动机构与滚珠丝杠驱动机构相连。本发明具有结构简单紧凑、成本低廉、动作稳定可靠、运行阻尼小、响应灵敏度高等优点。

The invention discloses a high-precision positioning platform driven by a DC motor, which includes a base and a motion table. The base is provided with a recessed accommodation cavity, and the motion table is slid on the base through two cross ball guide rails located on both sides. And the moving table is located at the opening end of the accommodating cavity to form a closed space, and the closed space is provided with a driving device for driving the moving table to slide back and forth, a grating ruler for detecting the sliding position of the moving table, and a photoelectric sensor for limiting the sliding stroke of the moving table. The limit switch, the driving device includes a DC motor and a ball screw driving mechanism connected between the base and the motion table, and the DC motor is connected with the ball screw driving mechanism through a transmission mechanism. The invention has the advantages of simple and compact structure, low cost, stable and reliable action, small running damping, high response sensitivity and the like.

Description

基于直流电机驱动的高精度定位平台及三维运动系统 High-precision positioning platform and three-dimensional motion system driven by DC motor

技术领域 technical field

本发明涉及精密运动装备技术领域,具体涉及一种基于直流电机驱动的高精度定位平台及三维运动系统。 The invention relates to the technical field of precision motion equipment, in particular to a high-precision positioning platform driven by a DC motor and a three-dimensional motion system.

背景技术 Background technique

随着信息技术的发展,以及一系列高端芯片的问世,光电子封装系统的对准精度要求越来越高。目前光电子封装企业主要依靠手动耦合为主,不仅效率低、质量差,而且难以对精度要求更高的新一代芯片进行耦合对准。 With the development of information technology and the advent of a series of high-end chips, the alignment accuracy requirements of optoelectronic packaging systems are getting higher and higher. At present, optoelectronic packaging companies mainly rely on manual coupling, which not only has low efficiency and poor quality, but also makes it difficult to couple and align new-generation chips that require higher precision.

研究表明,单模光纤的芯径8~9μm,而光子芯片的光通道截面特征尺寸为4~8μm,均为微米级的尺度。要求耦合系统要达到这样的精度,对准系统运动平台的定位精度必须是亚微米级,才能满足光纤与光子芯片的精密对准要求。精密运动平台通常采用步进电机、伺服电机作为驱动装置,存在结构复杂、成本高、响应速度慢等缺点。 Studies have shown that the core diameter of a single-mode fiber is 8-9 μm, while the characteristic size of the optical channel section of a photonic chip is 4-8 μm, both of which are on the micron scale. The coupling system is required to achieve such accuracy, and the positioning accuracy of the motion platform of the alignment system must be sub-micron to meet the precise alignment requirements of optical fibers and photonic chips. Precision motion platforms usually use stepper motors and servo motors as driving devices, which have disadvantages such as complex structure, high cost, and slow response speed.

发明内容 Contents of the invention

本发明要解决的技术问题是克服现有技术存在的不足,提供一种结构简单紧凑、成本低廉、动作稳定可靠、运行阻尼小、响应灵敏度高的基于直流电机驱动的高精度定位平台及三维运动系统。 The technical problem to be solved by the present invention is to overcome the deficiencies in the prior art, and provide a high-precision positioning platform driven by a DC motor and a three-dimensional motion based on a simple and compact structure, low cost, stable and reliable action, small operating damping, and high response sensitivity. system.

为解决上述技术问题,本发明采用以下技术方案: In order to solve the problems of the technologies described above, the present invention adopts the following technical solutions:

一种基于直流电机驱动的高精度定位平台,包括底座和运动台面,所述底座设有凹入的容置腔,所述运动台面通过位于两侧的两个交叉滚珠导轨滑设于底座上,且运动台面位于容置腔的开口端形成一封闭空间,所述封闭空间内设有用于驱动运动台面往复滑动的驱动装置、用于检测运动台面滑动位置的光栅尺以及用于限制运动台面滑动行程的光电限位开关,所述驱动装置包括直流电机以及连接于底座和运动台面之间的滚珠丝杠驱动机构,所述直流电机通过传动机构与滚珠丝杠驱动机构相连。 A high-precision positioning platform driven by a DC motor, including a base and a motion table, the base is provided with a recessed accommodation cavity, and the motion table is slid on the base through two cross ball guide rails on both sides, And the moving table is located at the opening end of the accommodating chamber to form a closed space, and the closed space is provided with a driving device for driving the moving table to slide back and forth, a grating ruler for detecting the sliding position of the moving table, and a grating ruler for limiting the sliding stroke of the moving table. The photoelectric limit switch, the driving device includes a DC motor and a ball screw driving mechanism connected between the base and the motion table, and the DC motor is connected with the ball screw driving mechanism through a transmission mechanism.

作为本发明的进一步改进: As a further improvement of the present invention:

所述滚珠丝杠驱动机构包括相配合的丝杆和丝杆螺母,所述丝杆通过一轴承组件以单边支撑的方式安装于底座上,所述丝杆螺母通过螺母转接座与运动台面相连。 The ball screw driving mechanism includes a matched screw and a screw nut, the screw is installed on the base in a unilaterally supported manner through a bearing assembly, and the screw nut is connected to the motion table through a nut adapter seat connected.

所述轴承组件包括固接于底座上的轴承座,所述丝杆通过两个并排设置的角接触滚珠轴承装设于轴承座中。 The bearing assembly includes a bearing seat fixedly connected to the base, and the screw rod is installed in the bearing seat through two angular contact ball bearings arranged side by side.

所述传动机构为同步带传动机构或者全周压延超薄钢带传动机构;所述同步带传动机构包括同步带和两个与同步带相配合的带轮,所述两个带轮分别与直流电机的输出轴及滚珠丝杠驱动机构的丝杆相连。 The transmission mechanism is a synchronous belt transmission mechanism or a full-circle rolled ultra-thin steel belt transmission mechanism; the synchronous belt transmission mechanism includes a synchronous belt and two pulleys matched with the synchronous belt, and the two pulleys are respectively connected to the DC The output shaft of the motor is connected with the screw rod of the ball screw drive mechanism.

所述定位平台还包括用于对同步带进行预紧的预紧机构,所述预紧机构包括摆杆和调节螺钉,所述摆杆的一端铰接于底座上,所述摆杆的另一端设有与同步带相抵的压紧轮,所述压紧轮为一滚动轴承,所述底座上开设有螺纹孔,所述调节螺钉配合装设于螺纹孔中并与摆杆的中部相抵。 The positioning platform also includes a pre-tensioning mechanism for pre-tensioning the synchronous belt. The pre-tensioning mechanism includes a swing rod and an adjusting screw. One end of the swing rod is hinged on the base, and the other end of the swing rod is set There is a pinch wheel against the synchronous belt, the pinch wheel is a rolling bearing, the base is provided with a threaded hole, and the adjusting screw is fitted in the threaded hole and offset against the middle of the swing rod.

所述底座包括座体和两块侧盖板,所述座体设有一U形通槽,两块侧盖板通过紧固件分别连接于U型通槽的两端形成所述容置腔;其中一块侧盖板上装设有电气接头以及与丝杆相连的用于手动调整运动台面滑动位置的调整旋钮。 The base includes a seat body and two side cover plates, the seat body is provided with a U-shaped through groove, and the two side cover plates are respectively connected to the two ends of the U-shaped through groove through fasteners to form the accommodating cavity; One of the side cover plates is provided with an electrical connector and an adjustment knob connected with the screw rod for manually adjusting the sliding position of the motion table.

所述直流电机为双轴输出直流电机,双轴输出直流电机的末端轴上安装有直流测速机。 The DC motor is a dual-axis output DC motor, and a DC speed measuring machine is installed on the end shaft of the dual-axis output DC motor.

所述运动台面上设有螺栓安装孔;所述底座和运动台面均为航空铝材制件。 Bolt mounting holes are provided on the moving platform; both the base and the moving platform are made of aviation aluminum.

作为一个总的技术构思,本发明还提供一种三维运动系统,包括X轴定位平台、Y轴定位平台、Z轴定位平台和工作台面,所述X轴定位平台、Y轴定位平台和Z轴定位平台均为上述权利要求至中任一项所述的定位平台,所述Y轴定位平台的底座安装于X轴定位平台的运动台面上,所述Z轴定位平台的底座通过转接部件与Y轴定位平台的运动台面相连,所述工作台面与Z轴定位平台的运动台面相连;所述Z轴定位平台位于X轴定位平台和Y轴定位平台的一侧,且Z轴定位平台的运动台面的中部位置与X轴定位平台和Y轴定位平台的连接处相对应,所述工作台面位于Y轴定位平台相对于X轴定位平台的一侧且靠近Y轴定位平台的运动台面设置。 As a general technical concept, the present invention also provides a three-dimensional motion system, including an X-axis positioning platform, a Y-axis positioning platform, a Z-axis positioning platform and a working table, the X-axis positioning platform, Y-axis positioning platform and Z-axis positioning platform The positioning platforms are all the positioning platforms described in any one of the above claims to, the base of the Y-axis positioning platform is installed on the motion table of the X-axis positioning platform, and the base of the Z-axis positioning platform is connected with the The motion table of the Y-axis positioning platform is connected, and the work surface is connected with the motion table of the Z-axis positioning platform; the Z-axis positioning platform is located on one side of the X-axis positioning platform and the Y-axis positioning platform, and the movement of the Z-axis positioning platform The middle position of the table corresponds to the junction of the X-axis positioning platform and the Y-axis positioning platform, and the working table is located on the side of the Y-axis positioning platform relative to the X-axis positioning platform and is set near the motion table of the Y-axis positioning platform.

上述的三维运动系统,优选的,所述转接部件包括分别连接于Y轴定位平台的运动台面两侧的两个连接板,各连接板设有一与Y轴定位平台的运动台面相连的L型连接部,所述L型连接部延伸形成有竖板部,所述竖板部所在的平面与X轴垂直,所述Z轴定位平台通过固定底板及紧固件固接于两个连接板的竖板部之间;所述工作台面包括连接为一体的安装面板和连接面板,所述连接面板与Z轴定位平台的运动台面相连,所述安装面板与Z轴定位平台的运动台面平行。 In the above-mentioned three-dimensional motion system, preferably, the adapter part includes two connection plates respectively connected to both sides of the motion table of the Y-axis positioning platform, and each connection plate is provided with an L-shaped joint connected to the motion table of the Y-axis positioning platform. The connection part, the L-shaped connection part is extended to form a vertical plate part, the plane where the vertical plate part is located is perpendicular to the X-axis, and the Z-axis positioning platform is fixed to the two connecting plates through the fixed bottom plate and fasteners. Between the risers; the worktable includes an integrally connected installation panel and a connection panel, the connection panel is connected to the motion table of the Z-axis positioning platform, and the installation panel is parallel to the motion table of the Z-axis positioning platform.

与现有技术相比,本发明的优点在于:本发明基于直流电机驱动的高精度定位平台为一种亚微米级的高精度定位平台,其采用运动台面通过交叉滚珠导轨滑设于底座上,并与底座的容置腔配合形成一封闭空间,驱动装置装设在封闭空间内,驱动装置采用直流电机作为驱动件,同时在封闭空间内设有用于检测运动台面滑动位置的光栅尺以及用于限制运动台面滑动行程的光电限位开关。一方面,驱动装置、光栅尺和光电限位开关等部件位于封闭空间内,可以得到有效的保护,能够避免在工作过程中与其他部件之间产生干扰;另一方面,该定位平台的结构简单紧凑、运行稳定可靠、制作成本低、运行阻尼小、运动精度高,用于光电领域的小器件加工设备设备时,可以大大提高设备整体结构的紧凑性,并提高设备的整体精度;再者,定位平台采用直流电机进行驱动,具有成本低廉、响应灵敏等优点,结合PID等控制算法后非常适用于精密运动定位领域。本发明的三维运动系统结构简单紧凑,系统的整体高度大大降低,有利于提高系统搭建后的整体精度。 Compared with the prior art, the advantage of the present invention is that the high-precision positioning platform driven by a DC motor is a sub-micron high-precision positioning platform, which adopts a moving table and is slid on the base through a cross ball guide rail. It cooperates with the accommodating cavity of the base to form a closed space. The driving device is installed in the closed space. The driving device adopts a DC motor as the driving part. At the same time, a grating ruler for detecting the sliding position of the moving table and a A photoelectric limit switch that limits the sliding travel of the motion table. On the one hand, components such as the drive device, grating ruler and photoelectric limit switch are located in a closed space, which can be effectively protected and can avoid interference with other components during the working process; on the other hand, the structure of the positioning platform is simple It is compact, stable and reliable in operation, low in production cost, small in operation damping, and high in motion precision. When used in small device processing equipment in the optoelectronic field, it can greatly improve the compactness of the overall structure of the equipment and improve the overall accuracy of the equipment; moreover, The positioning platform is driven by a DC motor, which has the advantages of low cost and sensitive response. Combined with PID and other control algorithms, it is very suitable for the field of precision motion positioning. The structure of the three-dimensional motion system of the present invention is simple and compact, and the overall height of the system is greatly reduced, which is beneficial to improving the overall precision of the system after construction.

附图说明 Description of drawings

图1为本发明中采用实验面板式台面的定位平台的立体结构示意图。 Fig. 1 is the three-dimensional structure diagram of the positioning platform adopting the experimental panel type table top in the present invention.

图2为本发明中采用转接式台面的定位平台的立体结构示意图。 Fig. 2 is a schematic diagram of the three-dimensional structure of the positioning platform adopting the transfer table in the present invention.

图3为本发明的定位平台去除运动台面后的俯视结构示意图。 Fig. 3 is a top structural schematic view of the positioning platform of the present invention after removing the moving platform.

图4为本发明的定位平台去除运动台面后的立体结构示意图。 Fig. 4 is a schematic diagram of the three-dimensional structure of the positioning platform of the present invention after removing the moving platform.

图5为本发明的定位平台在丝杆驱动机构处的剖视结构示意图。 Fig. 5 is a schematic cross-sectional structure diagram of the positioning platform of the present invention at the screw driving mechanism.

图6为本发明的定位平台的侧视结构示意图。 Fig. 6 is a schematic side view of the positioning platform of the present invention.

图7为本发明三维运动系统的立体结构示意图。 Fig. 7 is a schematic diagram of the three-dimensional structure of the three-dimensional motion system of the present invention.

图8为本发明三维运动系统另一视角的立体结构示意图。 FIG. 8 is a schematic perspective view of the three-dimensional motion system of the present invention from another perspective.

图9为本发明三维运动系统中连接板的立体结构示意图。 Fig. 9 is a schematic diagram of the three-dimensional structure of the connecting plate in the three-dimensional motion system of the present invention.

图10为本发明三维运动系统中固定底板的立体结构示意图。 Fig. 10 is a schematic diagram of the three-dimensional structure of the fixed base plate in the three-dimensional motion system of the present invention.

图11为本发明三维运动系统中工作台面的立体结构示意图。 Fig. 11 is a schematic diagram of the three-dimensional structure of the working table in the three-dimensional motion system of the present invention.

图12为本发明三维运动系统的分解结构示意图。 Fig. 12 is a schematic diagram of the exploded structure of the three-dimensional motion system of the present invention.

图例说明: illustration:

1、底座;11、容置腔;12、座体;13、侧盖板;2、运动台面;21、螺栓安装孔;3、交叉滚珠导轨;4、驱动装置;41、直流电机;42、丝杆;43、丝杆螺母;44、螺母转接座;45、轴承座;46、角接触滚珠轴承;47、同步带传动机构;471、同步带;472、带轮;48、预紧机构;481、摆杆;482、调节螺钉;483、压紧轮;49、调整旋钮;5、栅尺;6、光电限位开关;7、直流测速机;8、转接部件;81、连接板;811、L型连接部;812、竖板部;82、固定底板;901、X轴定位平台;902、Y轴定位平台;903、Z轴定位平台;904、工作台面;9041、安装面板;9042、连接面板;10、电气接头。 1. Base; 11. Accommodating cavity; 12. Base body; 13. Side cover; 2. Motion table; 21. Bolt mounting holes; 3. Cross ball guide rail; 4. Driving device; 41. DC motor; 42. Screw rod; 43, screw nut; 44, nut adapter seat; 45, bearing seat; 46, angular contact ball bearing; 47, synchronous belt transmission mechanism; 471, synchronous belt; 472, pulley; 48, pretension mechanism ;481, swing rod; 482, adjusting screw; 483, pressing wheel; 49, adjusting knob; 5, scale; 6, photoelectric limit switch; 7, DC speed measuring machine; ; 811, L-shaped connection part; 812, vertical plate part; 82, fixed bottom plate; 901, X-axis positioning platform; 902, Y-axis positioning platform; 903, Z-axis positioning platform; 904, work table; 9041, installation panel; 9042, connection panel; 10, electrical connector.

具体实施方式 detailed description

以下结合附图和具体实施例对本发明作进一步详细说明。 The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

如图1至图6所示,本发明基于直流电机驱动的高精度定位平台,包括底座1和运动台面2,底座1设有凹入的容置腔11,运动台面2通过位于两侧的两个交叉滚珠导轨3滑设于底座1上,运动台面2可以沿着交叉滚珠导轨3的导向方向滑动,且运动台面2位于容置腔11的开口端形成一封闭空间,封闭空间内设有用于驱动运动台面2往复滑动的驱动装置4、用于检测运动台面2滑动位置的光栅尺5以及用于限制运动台面2滑动行程的光电限位开关6,光栅尺5和光电限位开关6分设于底座1的两侧,两者均为现有技术,运动台面2运动时,光栅尺5的动尺和光电限位开关6的挡块跟随运动台面2一起运动,从而完成位移的反馈及行程限位。驱动装置4包括直流电机41以及滚珠丝杠驱动机构,滚珠丝杠驱动机构连接于底座1和运动台面2之间,直流电机41通过传动机构与滚珠丝杠驱动机构相连,直流电机41通过传动机构可以驱动滚珠丝杠驱动机构动作,进而驱动运动台面2往复滑动,实现高精度平移定位。 As shown in Figures 1 to 6, the present invention is based on a high-precision positioning platform driven by a DC motor, including a base 1 and a moving table 2. The base 1 is provided with a recessed accommodation cavity 11, and the moving table 2 passes through two Two cross ball guide rails 3 are slidably arranged on the base 1, and the moving table 2 can slide along the guiding direction of the cross ball guide rail 3, and the moving table 2 is located at the opening end of the accommodation cavity 11 to form a closed space, and the closed space is provided with a The driving device 4 that drives the moving table 2 to slide back and forth, the grating ruler 5 used to detect the sliding position of the moving table 2, and the photoelectric limit switch 6 used to limit the sliding stroke of the moving table 2, the grating ruler 5 and the photoelectric limit switch 6 are respectively located in Both sides of the base 1 are prior art. When the moving table 2 moves, the moving scale of the grating ruler 5 and the stopper of the photoelectric limit switch 6 move together with the moving table 2, thereby completing the feedback of the displacement and the stroke limit. bit. The driving device 4 includes a DC motor 41 and a ball screw drive mechanism, the ball screw drive mechanism is connected between the base 1 and the motion table 2, the DC motor 41 is connected with the ball screw drive mechanism through a transmission mechanism, and the DC motor 41 is connected through the transmission mechanism It can drive the ball screw drive mechanism to move, and then drive the motion table 2 to reciprocate and slide, so as to realize high-precision translational positioning.

本发明基于直流电机驱动的高精度定位平台,采用运动台面2通过交叉滚珠导轨3滑设于底座1上,并与底座1的容置腔11配合形成一封闭空间,驱动装置4装设在封闭空间内,驱动装置4采用直流电机41作为驱动件,同时在封闭空间内设有用于检测运动台面2滑动位置的光栅尺5以及用于限制运动台面2滑动行程的光电限位开关6。一方面,驱动装置4、光栅尺5和光电限位开关6等部件位于封闭空间内,可以得到有效的保护,能够避免在工作过程中与其他部件之间产生干扰;另一方面,该定位平台的结构简单紧凑、运行稳定可靠、制作成本低、运行阻尼小、运动精度高,用于光电领域的小器件加工设备设备时,可以大大提高设备整体结构的紧凑性,降低设备的安装精度要求,并提高设备安装后的整体精度;再者,定位平台采用直流电机41进行驱动,具有成本低廉、响应灵敏等优点,结合PID等控制算法后非常适用于精密运动定位领域。 The present invention is based on a high-precision positioning platform driven by a DC motor. The motion table 2 is slid on the base 1 through the cross ball guide rail 3, and cooperates with the accommodating cavity 11 of the base 1 to form a closed space. The driving device 4 is installed in the closed space. In the space, the driving device 4 adopts a DC motor 41 as a driving member, and a grating ruler 5 for detecting the sliding position of the moving table 2 and a photoelectric limit switch 6 for limiting the sliding stroke of the moving table 2 are provided in the closed space. On the one hand, components such as the driving device 4, the grating ruler 5 and the photoelectric limit switch 6 are located in a closed space, which can be effectively protected and can avoid interference with other components during the working process; on the other hand, the positioning platform The structure is simple and compact, the operation is stable and reliable, the production cost is low, the operation damping is small, and the motion precision is high. When used in small device processing equipment in the optoelectronic field, it can greatly improve the compactness of the overall structure of the equipment and reduce the installation accuracy requirements of the equipment. And improve the overall accuracy of the equipment after installation; moreover, the positioning platform is driven by a DC motor 41, which has the advantages of low cost and sensitive response, and is very suitable for the field of precision motion positioning when combined with control algorithms such as PID.

本实施例中,如图5所示,滚珠丝杠驱动机构包括相配合的丝杆42和丝杆螺母43,丝杆42通过一轴承组件以单边支撑的方式安装于底座1上,丝杆螺母43通过螺母转接座44与运动台面2连接固定。轴承组件包括固接于底座1上的轴承座45,丝杆42通过两个并排设置的角接触滚珠轴承46装设于轴承座45中,该种单边支撑的安装方式不仅增加了结构的紧凑性,同时也降低了滚珠丝杠驱动机构的安装精度要求。直流电机41通过电机座与丝杆42平行的安装在底座1上,传动机构为同步带传动机构47或者全周压延超薄钢带传动机构;本实施例采用的是同步带传动机构47,同步带传动机构47包括同步带471和两个与同步带471相配合的带轮472,两个带轮472分别与直流电机41的输出轴及滚珠丝杠驱动机构的丝杆42相连,并且实现直流电机41到丝杆42的减速比传动。工作时,直流电机41通过相配合的同步带471和带轮472驱动丝杆42相应转动,丝杆42使丝杆螺母43沿其轴线方向往复直线运动,进而可通过螺母转接座44驱动运动台面2相应做往复直线运动。 In this embodiment, as shown in FIG. 5 , the ball screw driving mechanism includes a matched screw 42 and a screw nut 43 , the screw 42 is installed on the base 1 in a unilaterally supported manner through a bearing assembly, and the screw The nut 43 is connected and fixed with the motion table 2 through the nut adapter 44 . The bearing assembly includes a bearing seat 45 fixed on the base 1, and the screw 42 is installed in the bearing seat 45 through two angular contact ball bearings 46 arranged side by side. This kind of unilateral support installation method not only increases the compactness of the structure It also reduces the installation accuracy requirements of the ball screw drive mechanism. The DC motor 41 is installed on the base 1 parallel to the screw mandrel 42 through the motor seat, and the transmission mechanism is a synchronous belt transmission mechanism 47 or a full-circle rolling ultra-thin steel belt transmission mechanism; The belt transmission mechanism 47 includes a synchronous belt 471 and two pulleys 472 matched with the synchronous belt 471. The two pulleys 472 are respectively connected to the output shaft of the DC motor 41 and the screw rod 42 of the ball screw drive mechanism, and realize DC Motor 41 to the reduction ratio transmission of screw mandrel 42. When working, the DC motor 41 drives the screw rod 42 to rotate correspondingly through the matching synchronous belt 471 and the pulley 472, and the screw rod 42 makes the screw nut 43 reciprocate and linearly move along its axis direction, and then can be driven by the nut adapter seat 44 to move The table top 2 makes a reciprocating linear motion correspondingly.

本实施例中,定位平台还包括用于对同步带471进行预紧的预紧机构48,如图6所示,预紧机构48包括摆杆481和调节螺钉482,摆杆481的一端铰接于底座1上,摆杆481的另一端设有与同步带471相抵的压紧轮483,压紧轮483为一滚动轴承,底座1上开设有螺纹孔,调节螺钉482配合装设于螺纹孔中并与摆杆481的中部相抵。旋拧调节螺钉482可以调整摆杆481的摆动角度,进而调整压紧轮483对同步带471的抵紧力度,实现对同步带471的预紧。该杠杆式的预紧机构48结构简单、调节方便、动作稳定可靠。 In this embodiment, the positioning platform also includes a pretension mechanism 48 for pretensioning the synchronous belt 471. As shown in FIG. On the base 1, the other end of the swing rod 481 is provided with a pinch wheel 483 which is offset against the timing belt 471. The pinch wheel 483 is a rolling bearing, and the base 1 is provided with a threaded hole, and the adjusting screw 482 is fitted in the threaded hole and Offset with the middle part of fork 481. Turning the adjusting screw 482 can adjust the swing angle of the swing rod 481, and then adjust the pressing force of the pressing wheel 483 on the timing belt 471, so as to realize the pre-tightening of the timing belt 471. The lever-type pretensioning mechanism 48 is simple in structure, convenient to adjust, and stable and reliable in action.

本实施例中,底座1包括座体12和两块侧盖板13,座体12设有一U形通槽,两块侧盖板13通过紧固件分别连接于U型通槽的两端,两块侧盖板13将U型通槽的两端封闭从而形成容置腔11;其中一块侧盖板13上装设有电气接头10以及调整旋钮49,调整旋钮49穿过侧盖板13与丝杆42的端部相连,通过调整旋钮49可以使丝杆42转动,进而实现手动调整运动台面2滑动位置。 In this embodiment, the base 1 includes a seat body 12 and two side cover plates 13, the seat body 12 is provided with a U-shaped through groove, and the two side cover plates 13 are respectively connected to both ends of the U-shaped through groove through fasteners, Two side cover plates 13 seal the two ends of the U-shaped through groove to form an accommodating cavity 11; one of the side cover plates 13 is provided with an electrical connector 10 and an adjustment knob 49, and the adjustment knob 49 passes through the side cover plate 13 and the wire The ends of the rod 42 are connected, and the screw rod 42 can be rotated by adjusting the knob 49, thereby realizing manual adjustment of the sliding position of the moving table 2.

本实施例中,直流电机41为双轴输出直流电机,双轴输出直流电机的末端轴上安装有直流测速机7,也即双轴输出直流电机具有前端轴和末端轴,前端轴通过同步带传动机构47与滚珠丝杠驱动机构相连,直流测速机7安装在末端轴上,直流测速机7可以检测并反馈直流电机41的运转速度。 In the present embodiment, the DC motor 41 is a dual-shaft output DC motor, and a DC tachometer 7 is installed on the terminal shaft of the dual-axis output DC motor, that is, the dual-axis output DC motor has a front shaft and a terminal shaft, and the front shaft passes through a synchronous belt. The transmission mechanism 47 is connected with the ball screw driving mechanism, and the DC tachometer 7 is installed on the end shaft, and the DC tachometer 7 can detect and feed back the running speed of the DC motor 41 .

本实施例中,运动台面2上设有螺栓安装孔21,螺栓安装孔21的数量和开设位置根据实际情况而定。运动台面2既可以是实验面板式台面,也可以是转接式台面,当运动台面2为实验面板式台面时,螺栓安装孔21的数量较多,包括用于定位平台之间安装的螺栓安装孔21和用于转接其他外设构件的螺栓安装孔21,且其板面较厚;当运动台面2为转接式台面时,则仅设置用于定位平台之间安装的螺栓安装孔21即可,其板面可以设置得较薄。上述底座1和运动台面2均为航空铝材制件。 In this embodiment, bolt mounting holes 21 are provided on the moving platform 2, and the number and opening positions of the bolt mounting holes 21 are determined according to actual conditions. The motion table 2 can be either an experimental panel type table or a transfer type table. When the motion table 2 is an experimental panel type table, the number of bolt installation holes 21 is relatively large, including bolt installation for positioning between platforms. Holes 21 and bolt mounting holes 21 for connecting other peripheral components, and the board surface is thicker; when the moving table 2 is a transfer table, only the bolt mounting holes 21 for installation between positioning platforms are provided That is, the board surface can be set to be thinner. Above-mentioned base 1 and motion platform 2 are aviation aluminum parts.

如图7至图12所示,本发明的三维运动系统,包括X轴定位平台901、Y轴定位平台902、Z轴定位平台903和工作台面904,X轴定位平台901、Y轴定位平台902和Z轴定位平台903均为上述的定位平台。Y轴定位平台902的底座1安装于X轴定位平台901的运动台面2上,Z轴定位平台903的底座1通过转接部件8与Y轴定位平台902的运动台面2相连,工作台面904与Z轴定位平台903的运动台面2相连;Z轴定位平台903位于X轴定位平台901和Y轴定位平台902的一侧,且Z轴定位平台903的运动台面2的中部位置与X轴定位平台901和Y轴定位平台902的连接处相对应,工作台面904位于Y轴定位平台902相对于X轴定位平台901的一侧且靠近Y轴定位平台902的运动台面2设置。 As shown in Figures 7 to 12, the three-dimensional motion system of the present invention includes an X-axis positioning platform 901, a Y-axis positioning platform 902, a Z-axis positioning platform 903 and a worktable 904, an X-axis positioning platform 901, and a Y-axis positioning platform 902 and the Z-axis positioning platform 903 are the above-mentioned positioning platforms. The base 1 of the Y-axis positioning platform 902 is installed on the motion table 2 of the X-axis positioning platform 901, the base 1 of the Z-axis positioning platform 903 is connected to the motion table 2 of the Y-axis positioning platform 902 through the adapter part 8, and the work table 904 is connected to the motion table 2 of the Y-axis positioning platform 902. The motion table 2 of the Z-axis positioning platform 903 is connected; the Z-axis positioning platform 903 is located on one side of the X-axis positioning platform 901 and the Y-axis positioning platform 902, and the middle position of the motion table 2 of the Z-axis positioning platform 903 is in line with the X-axis positioning platform. 901 corresponds to the connection of the Y-axis positioning platform 902 , and the worktable 904 is located on the side of the Y-axis positioning platform 902 relative to the X-axis positioning platform 901 and is set close to the motion table 2 of the Y-axis positioning platform 902 .

当X轴定位平台901运动时,驱动Y轴定位平台902、Z轴定位平台903以及工作台面904一起沿X轴方向运动,当Y轴定位平台902运动时,驱动Z轴定位平台903以及工作台面904一起沿Y轴方向运动,当Z轴定位平台903运动时,驱动工作台面904沿Z轴方向运动,相应控制X轴定位平台901、Y轴定位平台902和Z轴定位平台903的运动,进而实现驱动工作台面904的三维运动以及在三维空间内的定位。显然,上述Z轴定位平台903与X轴定位平台901之间应留有足够间隙,以保证在进行Y轴运动时不会发生干涉,工作台面904与Y轴定位平台902的运动台面2之间也应留有足够的间隙,以保证在进行Z轴运动时不会发生干涉。 When the X-axis positioning platform 901 moves, drive the Y-axis positioning platform 902, the Z-axis positioning platform 903 and the worktable 904 to move together along the X-axis direction, and when the Y-axis positioning platform 902 moves, drive the Z-axis positioning platform 903 and the worktable 904 move together along the Y-axis direction, when the Z-axis positioning platform 903 moves, the drive table 904 moves along the Z-axis direction, correspondingly control the movement of the X-axis positioning platform 901, the Y-axis positioning platform 902 and the Z-axis positioning platform 903, and then Realize the three-dimensional movement of the driving table 904 and the positioning in the three-dimensional space. Obviously, there should be enough clearance between the Z-axis positioning platform 903 and the X-axis positioning platform 901 to ensure that there will be no interference during the Y-axis movement. There should also be enough clearance to ensure that no interference occurs when making Z-axis motion.

该三维运动系统将Z轴定位平台903位于X轴定位平台901和Y轴定位平台902的一侧,且Z轴定位平台903的运动台面2的中部位置与X轴定位平台901和Y轴定位平台902的连接处相对应,整个三维运动系统呈类似于“品”字型的空间布局,大大降低了系统的整体高度,系统的结构更加紧凑,占用空间也更少,也有利于提高系统搭建后的整体精度;同时工作台面904位于Y轴定位平台902相对于X轴定位平台901的一侧,并且工作台面904靠近Y轴定位平台902的运动台面2设置,也进一步提高了系统结构的紧凑性。 In this three-dimensional motion system, the Z-axis positioning platform 903 is located on one side of the X-axis positioning platform 901 and the Y-axis positioning platform 902, and the middle position of the motion table 2 of the Z-axis positioning platform 903 is aligned with the X-axis positioning platform 901 and the Y-axis positioning platform. Corresponding to the connection of 902, the entire three-dimensional motion system has a spatial layout similar to the "pin" font, which greatly reduces the overall height of the system, and the system is more compact in structure and takes up less space, which is also conducive to improving At the same time, the worktable 904 is located on the side of the Y-axis positioning platform 902 relative to the X-axis positioning platform 901, and the worktable 904 is set close to the motion table 2 of the Y-axis positioning platform 902, which further improves the compactness of the system structure .

本实施例中,如图9和图10所示,转接部件8包括分别连接于Y轴定位平台902的运动台面2两侧的两个连接板81,各连接板81设有一与Y轴定位平台902的运动台面2相连的L型连接部811,L型连接部811延伸形成有竖板部812,竖板部812所在的平面与X轴垂直,Z轴定位平台903通过固定底板82及紧固件固接于两个连接板81的竖板部812之间。如图11所示,运动台面2包括连接为一体的安装面板9041和连接面板9042,其中,安装面板9041和连接面板9042相互垂直,连接面板9042与Z轴定位平台903的运动台面2相连,其位于Z轴定位平台903的运动台面2与X轴定位平台901和Y轴定位平台902之间,安装面板9041与Z轴定位平台903的运动台面2平行。 In this embodiment, as shown in Fig. 9 and Fig. 10, the adapter part 8 includes two connecting plates 81 respectively connected to the two sides of the motion table 2 of the Y-axis positioning platform 902, each connecting plate 81 is provided with a Y-axis positioning The L-shaped connecting portion 811 connected to the moving platform 2 of the platform 902, the L-shaped connecting portion 811 is extended to form a vertical plate portion 812, the plane where the vertical plate portion 812 is located is perpendicular to the X-axis, and the Z-axis positioning platform 903 passes through the fixed base plate 82 and the tight The firmware is fixed between the vertical plate portions 812 of the two connecting plates 81 . As shown in Figure 11, the motion table 2 includes an integrally connected installation panel 9041 and a connection panel 9042, wherein the installation panel 9041 and the connection panel 9042 are perpendicular to each other, and the connection panel 9042 is connected to the motion table 2 of the Z-axis positioning platform 903, which Located between the motion table 2 of the Z-axis positioning platform 903 and the X-axis positioning platform 901 and the Y-axis positioning platform 902 , the installation panel 9041 is parallel to the motion table 2 of the Z-axis positioning platform 903 .

以上所述仅是本发明的优选实施方式,本发明的保护范围并不仅局限于上述实施例。对于本技术领域的技术人员来说,在不脱离本发明技术构思前提下所得到的改进和变换也应视为本发明的保护范围。 The above descriptions are only preferred implementations of the present invention, and the scope of protection of the present invention is not limited to the above examples. For those skilled in the art, improvements and transformations obtained without departing from the technical concept of the present invention should also be regarded as the protection scope of the present invention.

Claims (8)

1.一种基于直流电机驱动的高精度定位平台,包括底座(1)和运动台面(2),其特征在于:所述底座(1)设有凹入的容置腔(11),所述运动台面(2)通过位于两侧的两个交叉滚珠导轨(3)滑设于底座(1)上,且运动台面(2)位于容置腔(11)的开口端形成一封闭空间,所述封闭空间内设有用于驱动运动台面(2)往复滑动的驱动装置(4)、用于检测运动台面(2)滑动位置的光栅尺(5)以及用于限制运动台面(2)滑动行程的光电限位开关(6),所述驱动装置(4)包括直流电机(41)以及连接于底座(1)和运动台面(2)之间的滚珠丝杠驱动机构,所述直流电机(41)通过传动机构与滚珠丝杠驱动机构相连;所述滚珠丝杠驱动机构包括相配合的丝杆(42)和丝杆螺母(43),所述丝杆(42)通过一轴承组件以单边支撑的方式安装于底座(1)上,所述丝杆螺母(43)通过螺母转接座(44)与运动台面(2)相连;所述传动机构为同步带传动机构(47)或者全周压延超薄钢带传动机构;所述同步带传动机构(47)包括同步带(471)和两个与同步带(471)相配合的带轮(472),所述两个带轮(472)分别与直流电机(41)的输出轴及滚珠丝杠驱动机构的丝杆(42)相连。 1. A high-precision positioning platform driven by a DC motor, including a base (1) and a moving table (2), characterized in that: the base (1) is provided with a concave accommodation cavity (11), the The motion table (2) is slid on the base (1) through two cross ball guide rails (3) on both sides, and the motion table (2) is located at the opening end of the accommodation chamber (11) to form a closed space, the The closed space is provided with a driving device (4) for driving the moving table (2) to slide back and forth, a grating ruler (5) for detecting the sliding position of the moving table (2), and a photoelectric sensor for limiting the sliding stroke of the moving table (2). limit switch (6), the drive device (4) includes a DC motor (41) and a ball screw drive mechanism connected between the base (1) and the motion table (2), the DC motor (41) passes The transmission mechanism is connected with the ball screw drive mechanism; the ball screw drive mechanism includes a matched screw (42) and a screw nut (43), and the screw (42) is unilaterally supported by a bearing assembly. The screw nut (43) is connected to the motion table (2) through the nut adapter (44); the transmission mechanism is a synchronous belt transmission mechanism (47) or a super Thin steel belt transmission mechanism; the synchronous belt transmission mechanism (47) includes a synchronous belt (471) and two pulleys (472) matched with the synchronous belt (471), and the two pulleys (472) are respectively connected with The output shaft of the DC motor (41) is connected to the screw mandrel (42) of the ball screw drive mechanism. 2.根据权利要求1所述的定位平台,其特征在于:所述轴承组件包括固接于底座(1)上的轴承座(45),所述丝杆(42)通过两个并排设置的角接触滚珠轴承(46)装设于轴承座(45)中。 2. The positioning platform according to claim 1, characterized in that: the bearing assembly includes a bearing seat (45) fixed on the base (1), and the screw rod (42) passes through two corners arranged side by side. The contact ball bearing (46) is installed in the bearing seat (45). 3.根据权利要求1所述的定位平台,其特征在于:所述定位平台还包括用于对同步带(471)进行预紧的预紧机构(48),所述预紧机构(48)包括摆杆(481)和调节螺钉(482),所述摆杆(481)的一端铰接于底座(1)上,所述摆杆(481)的另一端设有与同步带(471)相抵的压紧轮(483),所述压紧轮(483)为一滚动轴承,所述底座(1)上开设有螺纹孔,所述调节螺钉(482)配合装设于螺纹孔中并与摆杆(481)的中部相抵。 3. The positioning platform according to claim 1, characterized in that: the positioning platform further includes a pretensioning mechanism (48) for pretensioning the synchronous belt (471), and the pretensioning mechanism (48) includes Swing rod (481) and adjusting screw (482), one end of the swing rod (481) is hinged on the base (1), and the other end of the swing rod (481) is provided with a pressing force against the timing belt (471). The pinch wheel (483), the pinch wheel (483) is a rolling bearing, the base (1) is provided with a threaded hole, and the adjusting screw (482) is fitted in the threaded hole and connected with the swing rod (481 ) offset in the middle. 4.根据权利要求1所述的定位平台,其特征在于:所述底座(1)包括座体(12)和两块侧盖板(13),所述座体(12)设有一U形通槽,两块侧盖板(13)通过紧固件分别连接于U型通槽的两端形成所述容置腔(11);其中一块侧盖板(13)上装设有电气接头(10)以及与丝杆(42)相连的用于手动调整运动台面(2)滑动位置的调整旋钮(49)。 4. The positioning platform according to claim 1, characterized in that: the base (1) includes a seat body (12) and two side cover plates (13), and the seat body (12) is provided with a U-shaped through The two side cover plates (13) are respectively connected to the two ends of the U-shaped through groove by fasteners to form the accommodating cavity (11); one of the side cover plates (13) is equipped with an electrical connector (10) And the adjustment knob (49) that is used to manually adjust the sliding position of the motion table (2) that links to each other with the screw mandrel (42). 5.根据权利要求1所述的定位平台,其特征在于:所述直流电机(41)为双轴输出直流电机,双轴输出直流电机的末端轴上安装有直流测速机(7)。 5. The positioning platform according to claim 1, characterized in that: the DC motor (41) is a dual-axis output DC motor, and a DC speed measuring machine (7) is installed on the end shaft of the dual-axis output DC motor. 6.根据权利要求1所述的定位平台,其特征在于:所述运动台面(2)上设有螺栓安装孔(21);所述底座(1)和运动台面(2)均为航空铝材制件。 6. The positioning platform according to claim 1, characterized in that: bolt mounting holes (21) are provided on the moving table (2); the base (1) and the moving table (2) are made of aviation aluminum parts. 7.一种三维运动系统,其特征在于:包括X轴定位平台(901)、Y轴定位平台(902)、Z轴定位平台(903)和工作台面(904),所述X轴定位平台(901)、Y轴定位平台(902)和Z轴定位平台(903)均为上述权利要求1至6中任一项所述的定位平台,所述Y轴定位平台(902)的底座(1)安装于X轴定位平台(901)的运动台面(2)上,所述Z轴定位平台(903)的底座(1)通过转接部件(8)与Y轴定位平台(902)的运动台面(2)相连,所述工作台面(904)与Z轴定位平台(903)的运动台面(2)相连;所述Z轴定位平台(903)位于X轴定位平台(901)和Y轴定位平台(902)的一侧,且Z轴定位平台(903)的运动台面(2)的中部位置与X轴定位平台(901)和Y轴定位平台(902)的连接处相对应,所述工作台面(904)位于Y轴定位平台(902)相对于X轴定位平台(901)的一侧且靠近Y轴定位平台(902)的运动台面(2)设置。 7. A three-dimensional motion system, characterized in that it includes an X-axis positioning platform (901), a Y-axis positioning platform (902), a Z-axis positioning platform (903) and a working table (904), and the X-axis positioning platform ( 901), the Y-axis positioning platform (902) and the Z-axis positioning platform (903) are all positioning platforms described in any one of claims 1 to 6, and the base (1) of the Y-axis positioning platform (902) Installed on the motion table (2) of the X-axis positioning platform (901), the base (1) of the Z-axis positioning platform (903) is connected with the motion table ( 2) connected, the worktable (904) is connected with the motion table (2) of the Z-axis positioning platform (903); the Z-axis positioning platform (903) is located between the X-axis positioning platform (901) and the Y-axis positioning platform ( 902), and the middle position of the motion table (2) of the Z-axis positioning platform (903) corresponds to the connection between the X-axis positioning platform (901) and the Y-axis positioning platform (902), and the working table ( 904) The Y-axis positioning platform (902) is located on one side of the X-axis positioning platform (901) and close to the motion table (2) of the Y-axis positioning platform (902). 8.根据权利要求7所述的三维运动系统,其特征在于:所述转接部件(8)包括分别连接于Y轴定位平台(902)的运动台面(2)两侧的两个连接板(81),各连接板(81)设有一与Y轴定位平台(902)的运动台面(2)相连的L型连接部(811),所述L型连接部(811)延伸形成有竖板部(812),所述竖板部(812)所在的平面与X轴垂直,所述Z轴定位平台(903)通过固定底板(82)及紧固件固接于两个连接板(81)的竖板部(812)之间;所述工作台面(904)包括连接为一体的安装面板(9041)和连接面板(9042),所述连接面板(9041)与Z轴定位平台(903)的运动台面(2)相连,所述安装面板(9042)与Z轴定位平台(903)的运动台面(2)平行。 8. The three-dimensional motion system according to claim 7, characterized in that: the adapter part (8) includes two connecting plates ( 81), each connecting plate (81) is provided with an L-shaped connecting part (811) connected with the moving table (2) of the Y-axis positioning platform (902), and the L-shaped connecting part (811) is extended to form a vertical plate part (812), the plane where the vertical plate (812) is located is perpendicular to the X-axis, and the Z-axis positioning platform (903) is fixed to the two connecting plates (81) through the fixed bottom plate (82) and fasteners Between the vertical boards (812); the worktable (904) includes an integrally connected installation panel (9041) and a connection panel (9042), and the movement of the connection panel (9041) and the Z-axis positioning platform (903) The table (2) is connected, and the installation panel (9042) is parallel to the motion table (2) of the Z-axis positioning platform (903).
CN201410597979.5A 2014-10-31 2014-10-31 High-precision based on DC motor Driver and three-dimensional motion system Active CN104464837B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410597979.5A CN104464837B (en) 2014-10-31 2014-10-31 High-precision based on DC motor Driver and three-dimensional motion system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410597979.5A CN104464837B (en) 2014-10-31 2014-10-31 High-precision based on DC motor Driver and three-dimensional motion system

Publications (2)

Publication Number Publication Date
CN104464837A CN104464837A (en) 2015-03-25
CN104464837B true CN104464837B (en) 2016-10-05

Family

ID=52910763

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410597979.5A Active CN104464837B (en) 2014-10-31 2014-10-31 High-precision based on DC motor Driver and three-dimensional motion system

Country Status (1)

Country Link
CN (1) CN104464837B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106526883B (en) * 2015-09-09 2019-07-30 中国科学院西安光学精密机械研究所 A device for adjusting the position of an optical element
CN105244061B (en) * 2015-10-13 2017-10-17 天津大学 The big stroke mini positioning platform of the pressure controllable driven based on stick-slip
CN106424302A (en) * 2016-09-21 2017-02-22 宁波震裕科技股份有限公司 Manufacturing die and method for variable-cross-section iron core
CN107139019A (en) * 2017-05-24 2017-09-08 上海嘉幸自动化设备科技有限公司 A kind of electronic cylinder structure controlled for machine tool accuracy
CN109140146B (en) * 2018-09-05 2020-08-18 三英精控(天津)仪器设备有限公司 High-precision lifting platform based on flexible hinge

Also Published As

Publication number Publication date
CN104464837A (en) 2015-03-25

Similar Documents

Publication Publication Date Title
CN104464837B (en) High-precision based on DC motor Driver and three-dimensional motion system
CN103010689B (en) Linear moving device
CN102152133B (en) Five-coordinate locating mechanism
CN107315265B (en) ACF laminating machine with pressure precision structure and using method of ACF laminating machine
CN106594070B (en) Sub-nano-scale precision drive workbench based on flexible structure
CN106910534A (en) Angular displacement stage apparatus
CN102723296A (en) XY motion platform driven by double-layer linear motor
CN2536348Y (en) Unitary platform with movements in two dimensions
KR20120121105A (en) A scribing apparatus
CN202037455U (en) Five-coordinate positioning mechanism
CN118237224A (en) Die head air floatation moving device for flat slit type coating
CN208172348U (en) A kind of high-precision focusing device in direct-write photoetching encapsulation type
CN103050151B (en) X-Y workbench with two degrees of freedom
CN211361222U (en) Linear module mechanism
CN110316948B (en) High-precision glass upper and lower cutter bisection structure
JP5890296B2 (en) Linear movement mechanism
CN220762315U (en) Accurate UVW cavity alignment platform
CN202463138U (en) Positioning seat of charge coupled device (CCD) vision system
CN102221734A (en) SDOF (Single Degree of Freedom) jogging platform for packaging and aligning optoelectronic device
CN222103536U (en) A carrying device and optical equipment
CN211880722U (en) Binding machine pressure head device
CN106526883B (en) A device for adjusting the position of an optical element
CN214544465U (en) Lightweight cell-phone lens equipment head
CN221824287U (en) A linear module
CN110667169A (en) High-precision detection device for position of slide block of servo press

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20190201

Address after: 410000 Room A411, Headquarters Building of Changsha Zhongdian Software Park, 39 Jianshan Road, Changsha High-tech Development Zone, Hunan Province

Patentee after: Hunan Zhongnan Hongsi Automation Technology Co., Ltd.

Address before: 410083 No. 932 Lushan South Road, Changsha City, Hunan Province

Patentee before: Central South University

TR01 Transfer of patent right