CN104428263A - Scribing method and scribing device - Google Patents
Scribing method and scribing device Download PDFInfo
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- CN104428263A CN104428263A CN201380036795.5A CN201380036795A CN104428263A CN 104428263 A CN104428263 A CN 104428263A CN 201380036795 A CN201380036795 A CN 201380036795A CN 104428263 A CN104428263 A CN 104428263A
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- China
- Prior art keywords
- alignment mark
- coordinate system
- coordinate
- workpiece
- ccd camera
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/037—Controlling or regulating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
A scribing device (1) is provided with: a worktable (6) on which a glass substrate (5) as a brittle material substrate on which alignment marks (M1, M2, M3...) are made on the upper surface thereof, is mounted, aligned, and secured by suction; a scribing head (2) that moves in a XY plane coordinate system and parallel to the upper surface of the glass substrate (5) above the worktable (6); a CCD camera (10) disposed beside the scribing head (2) and integratedly formed with the scribing head (2); a common X axis moving means (3) and Y axis moving means (4) that moves the scribing head (2) and CCD camera (10) as a unit in the XY plane coordinate system; an image processing device that implements imaging instructions by means of the CCD camera (10), image processing of images taken, and calculation processing; and an NC device that carries out numerical control of movement of the X axis moving means (3) and the Y axis moving means (4).
Description
Technical field
The present invention relates to the scribble method and the chalker that brittle substrates such as being adapted at glass substrate, semiconductor substrate and substrate used for solar batteries are formed line.
Particularly, the present invention relates on the brittle substrates such as the glass substrate being marked with alignment mark, semiconductor substrate and substrate used for solar batteries, form scribble method and the chalker of line according to alignment mark.
In addition, the present invention relates to CCD camera the alignment mark of brittle substrate behind location is taken, image procossing, the position of metering alignment mark, carries out scribble method and the chalker of line action after having carried out required process.
Background technology
A kind of chalker forming line on the glass substrate being marked with alignment mark according to alignment mark is proposed in patent documentation 1.
Chalker described in patent documentation 1 will be marked with the glass substrate location of alignment mark and be absorbed and fixed on worktable, then respectively the left and right two place alignment mark on glass substrate is taken by setting two CCD camera be fixed on above worktable, image procossing is carried out to the image of the alignment mark photographed, and calculation process is carried out to the result after image procossing, and the amount of angular deviation of glass substrate behind location and position deviation amount are measured, then, for amount of angular deviation, the position of rotation of worktable is corrected, for position deviation amount, the movement of the Y-axis position of worktable is corrected and the movement of the X-axis position of scribe head is corrected, line action is carried out after these correction operations above-mentioned terminate, this correction operation and line action are carried out for each new glass substrate.
Prior art document
Patent documentation
Patent documentation 1: Japanese Patent Laid-Open 2011 – No. 251900 publications
Summary of the invention
Invent technical problem to be solved
In addition, chalker in the past described in patent documentation 1 utilizes the CCD camera be fixed to take mark alignment mark on the glass substrate, image based on the alignment mark photographed by CCD camera carries out image procossing and calculation process, thus the amount of angular deviation of reflex glass substrate and position deviation amount, the correction instruction value from NC device after being corrected by variable based on this departure sends to worktable rotary element, movable workbench element and scribe head moving meter, the position of rotation carrying out worktable corrects, the position correction of worktable and the position correction of scribe head.But, there is thermal expansion and mechanical error in worktable rotary element, movable workbench element and scribe head moving meter, therefore in this chalker in the past, relative to the correction instruction value from NC device, the amount of movement of the reality of the rotation amount of the reality of worktable, worktable and scribe head is sometimes inconsistent, therefore in order to correct according to accurate positioning states, needs the correction operation repeatedly carried out repeatedly, labor intensive and time, very inefficent.
In addition, in chalker in the past, in the post-job line action of the position correction that glass substrate is carried out, also because of the difference of worktable, worktable rotary element, movable workbench element and the thermal expansion of scribe head moving meter, the impact of mechanical error and the thermal expansion of glass substrate and the thermal expansion of above-mentioned worktable and moving meter, and when forming line according to alignment mark, also need to carry out correction to program, need to carry out examination line etc., expend time in.
The object of the invention is to, be positioned under the state of position deviation and angle deviation appearred in the brittle substrate on worktable even if provide, the line obtained according to alignment mark is formed under the state that also can directly exist in this position deviation and angle deviation, even if worktable, movable workbench element and scribe head moving meter exist difference, the mechanical error of thermal expansion in addition, scribble method and the chalker of the line obtained according to alignment mark also can be formed.
In addition, the present invention also aims to, the differentia influence of the thermal expansion of the moving meter not being subject to brittle substrate and scribe head is provided, scribble method and the chalker of the line obtained according to alignment mark can be obtained.
The technical scheme that technical solution problem adopts
According to scribble method of the present invention, under the state of locating the brittle substrate being marked with alignment mark is set in the workpiece coordinate system on NC device in the upper surface foundation of worktable, scribe head and CCD camera is made to utilize the moving meter shared to move in above-mentioned workpiece coordinate system as one, make the image center of above-mentioned CCD camera and to be marked on above-mentioned brittle substrate and to be in the alignment mark M1 of at least three points of orthogonal collocation relation, the setting coordinate figure M1 (X=X1 in above-mentioned workpiece coordinate system of M2 and M3, Y=Y1), M2 (X=X2, and M3 (X=X1 Y=Y1), Y=Y2) align, to each alignment mark M1, M2 and M3 takes, to the alignment mark M1 photographed, the image of M2 and M3 carries out image procossing, based on the result of this image procossing to above-mentioned alignment mark M1, M2 and M3 mark center M1C separately, the coordinate figure of the physical location in above-mentioned workpiece coordinate system of M2C and M3C measures, based on these mark center M1C, each coordinate figure that the metering of M2C and M3C obtains, and above-mentioned alignment mark M1, the setting coordinate figure M1 (X=X1 of M2 and M3, Y=Y1), M2 (X=X2, and M3 (X=X1 Y=Y1), Y=Y2) calculation process is carried out, change to and make the above-mentioned coordinate figure of the physical location of the mark center M1C of above-mentioned alignment mark M1 become the coordinate figure (X=0 be instructed to, Y=0), coordinate figure (the X=X2 – X1 above-mentioned coordinate figure of the physical location of the mark center M2C of above-mentioned alignment mark M2 being become be instructed to, Y=0), and make the above-mentioned coordinate figure of the physical location of the mark center M3C of above-mentioned alignment mark M3 become the coordinate figure (X=0 be instructed to, Y=Y2 – Y1) workpiece coordinate system, in this workpiece coordinate system after change, scribe head is moved based on the program of setting, the brittle substrate being in above-mentioned positioning states is formed the line obtained according to alignment mark.
Chalker of the present invention comprises: workpiece worktable 16, this workpiece worktable 16 has X-direction stop part and Y-direction stop part at upper surface, this X-direction stop part is consistent with the X-axis of the workpiece coordinate system be set on NC device in front end edge, and this Y-direction stop part is consistent with the Y-axis of the above-mentioned workpiece coordinate system be set on NC device in front end edge, scribe head, this scribe head, above the brittle substrate being positioned above-mentioned workpiece coordinate system according to the front end edge of above-mentioned X-direction stop part of above-mentioned workpiece worktable and the front end edge of Y-direction stop part, moves and on above-mentioned brittle substrate, forms line in workpiece coordinate system, CCD camera, this CCD camera and above-mentioned scribe head are juxtaposed on shared support, move integratedly with scribe head in workpiece coordinate system, the X-axis moving meter shared and Y-axis moving meter, this X-axis moving meter shared and Y-axis moving meter make above-mentioned scribe head and CCD camera move in workpiece coordinate system as one, image processing apparatus, this image processing apparatus carries out the shooting instruction implemented by above-mentioned CCD camera, carries out image procossing and calculation process to the image photographed, and NC device, this NC device indicates the shooting sent to CCD camera by above-mentioned image processing apparatus, image procossing instruction and calculation process instruction, being formed of the line to brittle substrate undertaken by above-mentioned scribe head, the action of above-mentioned shared X-axis moving meter and Y-axis moving meter controls, NC device makes to be marked with under the brittle substrate of alignment mark aligns with the front end edge of above-mentioned X-direction stop part of above-mentioned workpiece worktable and the front end edge of Y-direction stop part and be positioned at the state in above-mentioned workpiece coordinate system, scribe head and CCD camera are moved in workpiece coordinate system as one, make the image center of above-mentioned CCD camera and to be marked on brittle substrate and to be in the alignment mark M1 of at least three points of orthogonal collocation relation, the setting coordinate figure M1 (X=X1 in above-mentioned workpiece coordinate system of M2 and M3, Y=Y1), M2 (X=X2, and M3 (X=X1 Y=Y1), Y=Y2) align, utilize CCD camera to each alignment mark M1, M2 and M3 takes, image processing apparatus is utilized to carry out image procossing and calculation process to the image photographed, to above-mentioned alignment mark M1, M2 and M3 mark center M1C separately, the coordinate figure of the physical location in above-mentioned workpiece coordinate system of M2C and M3C measures, based on the mark center M1C that the metering from image processing apparatus obtains, M2C and M3C coordinate figure separately, with above-mentioned alignment mark M1, the setting coordinate figure M1 (X=X1 of M2 and M3, Y=Y1), M2 (X=X2, and M3 (X=X1 Y=Y1), Y=Y2) calculation process is carried out, change to and make the above-mentioned coordinate figure of the physical location of the mark center M1C of above-mentioned alignment mark M1 become the coordinate figure (X=0 be instructed to, Y=0), coordinate figure (the X=X2 – X1 above-mentioned coordinate figure of the physical location of the mark center M2C of above-mentioned alignment mark M2 being become be instructed to, Y=0), the above-mentioned coordinate figure of the physical location of the mark center M3C of above-mentioned alignment mark M3 is made to become the coordinate figure (X=0 be instructed to, Y=Y2 – Y1) workpiece coordinate system, in this workpiece coordinate system after change, move based on the program of setting to make scribe head, and utilize scribe head on the brittle substrate being in above-mentioned positioning states, form the line obtained according to alignment mark, the shooting of CCD camera is indicated, the X-axis moving meter shared and the work of Y-axis moving meter control.
The present invention utilizes the moving meter shared to move owing to making scribe head and CCD camera as one, therefore, it is possible to do not affect ground by the thermal expansion of moving meter and mechanical error, make the amount of movement of scribe head consistent all the time with the amount of movement of CCD camera, thus CCD camera and scribe head move integratedly, according to based on the command value of being measured the variable obtained by CCD camera, make the movement value of scribe head and make the command value of scribe head movement consistent all the time.
In addition, the present invention makes scribe head and CCD camera utilize the moving meter shared to move in the workpiece coordinate system of locating brittle substrate as one, make the image center of CCD camera and to be marked on brittle substrate and to be in the alignment mark M1 of at least three points of orthogonal collocation relation, the setting coordinate figure M1 (X=X1 of M2 and M3, Y=Y1), M2 (X=X2, and M3 (X=X1 Y=Y1), Y=Y2) align and take, to alignment mark M1, M2 and M3 mark center M1C separately, the coordinate figure of the physical location in workpiece coordinate system of M2C and M3C measures, carry out based on mark center M1C, the calculation process of the coordinate figure that the metering of M2C and M3C obtains, change to and make the coordinate figure of the reality be metered into of the mark center M1C of alignment mark M1 become the coordinate figure (X=0 be instructed to, Y=0), coordinate figure (the X=X2 – X1 coordinate figure of the reality be metered into of the mark center M2C of alignment mark M2 being become be instructed to, Y=0), the coordinate figure of the reality be metered into of the mark center M3C of alignment mark M3 is made to become the coordinate figure (X=0 be instructed to, Y=Y2 – Y1) workpiece coordinate system.
Workpiece coordinate system after change is formed as being set as by the physical location of the mark center M1C of the alignment mark M1 of brittle substrate of locating and initial point (X=0, Y=0) align, the physical location of the mark center M2C of alignment mark M2 is set as and coordinate figure (the X=X2 – X1 in X-axis, Y=0) align, the physical location of the mark center M3C of alignment mark M3 is set as and the workpiece coordinate system that the coordinate figure (X=0, Y=Y2 – Y1) in Y-axis aligns.
That is, the workpiece coordinate system after change is the variable based on being obtained by CCD camera, the physical location of mark center M1C, M2C and M3C is set as the workpiece coordinate system of benchmark.
Thus, in the workpiece coordinate system after this change, brittle substrate is rule, the line that the alignment mark that can form foundation physical location on brittle substrate obtains.
In addition, can work in coordination with above-mentioned effect and form the accurate line consistent with the predetermined location of instruction.
In addition, the line coordinate figure in drawing is directly made to align with the physical location of alignment mark and carry out line action.
In addition, when positioning brittle substrate, even if location deviation and angle deviation, the line that the alignment mark that also can not form foundation physical location with affecting by this position deviation and angle deviation obtains.
In addition, by brittle substrate and the differentia influence ground of thermal expansion of moving meter making scribe head movement, the line obtained according to the alignment mark of brittle substrate can not be formed.
Such as, adopt scribble method of the present invention, even if in the size of drawing, in alignment mark M1 and alignment mark M2, be of a size of 300mm in the heart and the distance between centers of reality is 300.5mm, if define the line of the straight line of the straight line by the X=0 of M1 and the X=300 by M2, then two line be spaced apart 300.5mm.
It is desirable that the present invention makes scribe head carry out moving and moving along Y-axis along X-axis, in addition in the present invention, brittle substrate can be glass substrate, semiconductor substrate or substrate used for solar batteries etc., but it is desirable to glass substrate.
Invention effect
Adopt the present invention, a kind of scribble method and chalker can be provided, even if be positioned under the state of position deviation and angle deviation appearred in the brittle substrate on worktable, the line obtained according to alignment mark is formed under the state that also can directly exist in this position deviation and angle deviation, in addition, even if worktable, movable workbench element and scribe head moving meter exist difference, the mechanical error of thermal expansion, the line obtained according to alignment mark also can be formed.
In addition, adopt the present invention, a kind of scribble method and chalker can be provided, the differentia influence ground of the thermal expansion of the moving meter of the brittle substrates such as glass substrate, semiconductor substrate and substrate used for solar batteries and scribe head can not be subject to, the line obtained according to alignment mark can be formed.
Accompanying drawing explanation
Fig. 1 is the vertical view of the chalker representing one embodiment of the invention.
Fig. 2 is the side-view of the chalker shown in Fig. 1.
Fig. 3 is for benchmark has carried out to workpiece coordinate system the explanatory view correcting conversion with the centre coordinate of the alignment mark of three orthogonal points of glass substrate.
Fig. 4 is the schema of scribble method of the present invention.
Embodiment
Next, the example based on the desirable embodiment represented in figure is described in further detail the present invention.In addition, the present invention is at all not limited to these examples.
The chalker 1 of this example shown in Fig. 1 and Fig. 2 comprises: workpiece worktable 6, will be marked with alignment mark M1, M2, M3 at upper surface ... the glass substrate 5 as brittle substrate load, locate, be absorbed and fixed on this workpiece worktable 6; Scribe head 2, this scribe head 2 fastens movement at XY planimetric coordinates abreast with the upper surface of glass substrate 5 above workpiece worktable 6; CCD camera 10, this CCD camera 10 is set up in parallel with scribe head 2, becomes to be integrated together with scribe head 2; The X-axis moving meter 3 shared and Y-axis moving meter 4, this X-axis moving meter 3 shared and Y-axis moving meter 4 make scribe head 2 and CCD camera 10 one-tenth be integrated and fasten movement at XY planimetric coordinates; Image processing apparatus (not shown), this image processing apparatus carries out the shooting instruction implemented by CCD camera 10, and carries out image procossing and calculation process to the image photographed; And NC device (not shown), this NC device moves forward into row Numerical Control to X-axis moving meter 3 and Y-axis moving meter 4.
The X-direction stop part 7 consistent with the workpiece coordinate system Z ' be arranged on NC device and Y-direction stop part 8 are configured on the upper surface of workpiece worktable 6 in an orthogonal manner.The front end edge 7A of X-direction stop part 7 represents the X-axis 7B consistent with the X-axis of workpiece coordinate system Z ', and the front end edge 8A of Y-direction stop part 8 represents the Y-axis 8B consistent with the Y-axis of workpiece coordinate system Z '.X-axis 7B and Y-axis 8B is orthogonal, and the intersection point of X-axis 7B and Y-axis 8B is exactly the initial point of workpiece coordinate system Z '.
Scribe head 2 and CCD camera 10 are disposed in parallel on the front surface as the head plate 9 of shared support.
Be disposed in parallel in scribe head 2 on a plate 9 and CCD camera 10 utilizes the moving meter 30 shared to move on XY system of coordinates, the moving meter 30 shared is made up of the X-axis moving meter 3 shared and Y-axis moving meter 4.
X-axis moving meter 3 is formed by clipping X1 axle moving meter 3 – 1 that workpiece worktable 6 arranges along X-axis at two side positions respectively and X2 axle moving meter 3 – 2.
X1 axle moving meter 3 – 1 and X2 axle moving meter 3 – 2 comprises respectively: guide rail 12, and this guide rail 12 is installed on base station 11 along X-axis 7B; Slide block 13A, this slide block 13A is movably held in guide rail 12 along X-axis 7B; Moving body 13, this moving body 13 is installed on slide block 13A, and is installed with nut portions 15A; Servo-electric motor 14, this servo-electric motor 14 is arranged on the upper surface of base station 11 together with workpiece worktable 6 and guide rail 12; And ball-screw 15, this ball-screw 15 configures along guide rail 12, and one end is connected with the rotating output shaft of servo-electric motor 14, and ball-screw 15 is connected to moving body 13 by the nut portions 15A with ball-screw 15 thread fit.
The rotation of the ball-screw 15 that X1 axle moving meter 3 – 1 and X2 axle moving meter 3 – 2 inspires by the work by servo-electric motor 14 respectively and moving body 13 is moved in X direction, the respective servo-electric motor 14 of X1 axle moving meter 3 – 1 and X2 axle moving meter 3 – 2 works asynchronously, the respective moving body 13 of X1 axle moving meter 3 – 1 and X2 axle moving meter 3 – 2 is synchronous because of the synchronous working of each servo-electric motor 14, moves along X-axis.
Y-axis moving meter 4 comprises: pontic 16, and this pontic 16 configures orthogonally with X-axis, and is erected on the moving body 13 of X1 axle moving meter 3 – 1 and the moving body 13 of X2 axle moving meter 3 – 2; Pair of guide rails 17, this pair of guide rails 17 is arranged on pontic 16 along Y-axis; Slide block 17A, this slide block 17A movably remains on guide rail 17 along Y-axis; The Y-axis balladeur train 18 of L shape, this Y-axis balladeur train 18 is arranged on slide block 17A, and is installed with nut portions 20A; Y-axis servomotor 19, this Y-axis servomotor 19 is arranged on one end of pontic 16; And ball-screw 20, this ball-screw 20 is at one end connected with the output rotating shaft of Y-axis servomotor 19, and arranges along guide rail 17, and ball-screw 20 is connected with Y-axis balladeur train 18 by with the nut portions 20A of this ball-screw 20 thread fit.
The rotation of the ball-screw 20 that Y-axis moving meter 4 inspires by the work by Y-axis servo-electric motor 19 and Y-axis balladeur train 18 is moved along Y-axis.
At the side surface part 18B of Y-axis balladeur train 18, vertical with the upper surface of workpiece worktable 6 and be configured with pair of guide rails 21 along the vertical direction, the slide block 21A being movably held in these guide rails 21 is along the vertical direction provided with a plate 9, head plate 9 is fixed with nut portions 9B, ball-screw 9C and nut portions 9B thread fit, the output shaft of ball-screw 9C in upper end with upper and lower servomotor 22 is connected, and upper and lower servomotor 22 is fixed on the upper end 18A of Y-axis balladeur train 18.
Head plate 9 and even scribe head 2 and CCD camera 10 are integrated because the work of upper and lower servomotor 22 forms, carried out Numerical Control and along the vertical direction H move.
That is, utilize upper and lower servomotor 22 by scribe head 2 and CCD camera 10 relative to the upper surface of workpiece worktable 6 and even the glass substrate 5 being positioned in this upper surface, and be positioned at required height location.Thus, when utilizing CCD camera 10 couples of alignment marks M1, M2 and M3 to take, the focus adjustment of CCD camera 10 being carried out, in addition when utilizing scribe head 2 to form line to glass substrate 5, scribe head 2 can be set in suitable height location relative to glass substrate 5.
Make by carrying out Numerical Control to the scribe head 2 be arranged on a plate 9 and CCD camera about 10 this example of this scribe head 2 and CCD camera 10 movement to move up and down element described above, comprise the guide rail 21 be arranged on Y-axis balladeur train 18 that cross section is L shape, move up and down the slide block 21A remained on freely on guide rail 21, be arranged on the head plate 9 on slide block 21A, be fixedly mounted on the nut portions 9B on a plate 9, with the ball-screw 9C of nut portions 9B thread fit, and the servomotor up and down 22 that ball-screw 9C is rotated, but moving up and down element and also can being configured to possess linear motor of this scribe head 2 and CCD camera 10 movement is made by carrying out Numerical Control to this scribe head 2 and CCD camera about 10.
Scribe head 2 comprises tracing wheel 2a, cylinder 24 and Angle ambiguity electric motor 25, above-mentioned cylinder 24 makes tracing wheel 2a be elevated, when forming line, this cylinder 24 makes tracing wheel 2a decline, utilize aeroelastic that tracing wheel 2a is pushed on glass substrate 5, above-mentioned Angle ambiguity electric motor 25 according to line direction change tracing wheel 2a towards, cylinder 24 and Angle ambiguity electric motor 25 are arranged on a plate 9, tracing wheel 2a is arranged on and connects on apparatus 28, this connection apparatus 28 is fixedly mounted on piston rod 26, only utilize cylinder 24 that this tracing wheel 2a is declined when forming line, the rotation of the output rotating shaft of Angle ambiguity electric motor 25 is via pinion(gear) 25a, pinion(gear) 27 be connected apparatus 28 and be delivered to tracing wheel 2a, make thus tracing wheel 2a according to line direction change towards, above-mentioned pinion(gear) 25a is arranged on the output rotating shaft of Angle ambiguity electric motor 25, above-mentioned pinion(gear) 27 is so that relative to pinion(gear) 25a, the mode moved up and down freely engages with pinion(gear) 25a, and be arranged on the piston rod 26 of cylinder 24, above-mentioned connection apparatus 28 is arranged on piston rod 26, and support tracing wheel 2a, when forming line, relative to moving up and down of scribe head 2 and CCD camera 10, carry out the decline of the tracing wheel 2a inspired by cylinder 24 independently, rise, and the break-in towards line direction of the tracing wheel 2a to be undertaken by Angle ambiguity electric motor 24.
Chalker 1, except above structure, also comprises: X-axis moving meter 3, Y-axis moving meter 4, up and down servomotor 22 and Angle ambiguity electric motor 25 are carried out to Numerical Control and carry out the NC device (CNC) of the calculation process of workpiece coordinate system conversion etc.; And carry out based on the shooting undertaken by CCD camera 10 of the order of NC device (CNC) and image procossing carried out to the image photographed and processing result image is carried out to the image processing apparatus etc. of calculation process.
Next, the scribble method undertaken by chalker 1 is described based on Fig. 3 and Fig. 4.
Make to be marked with alignment mark M1, M2, M3 ... glass substrate 5 contact with the front end edge 7A of X-direction stop part 7 and the front end edge 8A of Y-direction stop part 8 with each orthogonal limit at the upper surface of workpiece worktable 6.By this operation, the foundation in advance workpiece coordinate system Z ' be set on NC device positions glass substrate 5, makes the orthogonal limit of glass substrate 5 consistent with the X-axis of workpiece coordinate system Z ' and Y-axis difference.(step I)
Next, scribe head 2 and CCD camera 10 is made to utilize the moving meter 30 shared above to move at workpiece coordinate system Z ' as one, make the image center 31 of CCD camera 10 respectively with the glass substrate 5 being in positioning states on workpiece worktable 6 on mark and be in the alignment mark M1 of at least three points of orthogonal collocation relation, M2's and M3, setting coordinate figure M1 (X=X1 in workpiece coordinate system Z ', Y=Y1), M2 (X=X2, and M3 (X=X1 Y=Y1), Y=Y2) align, alignment mark is taken, image procossing is carried out in image processing apparatus, calculation process is carried out based on the result after image procossing, to alignment mark M1, M2 and M3 mark center M1C separately, the coordinate figure of the physical location of M2C and M3C in workpiece coordinate system Z ' measures.(Step II)
By above-mentioned mark center M1C, coordinate figure after the metering of M2C and M3C sends to NC device, in NC device, based on above-mentioned mark center M1C, coordinate figure after the metering of M2C and M3C, with alignment mark M1, the setting coordinate figure M1 (X=X1 of M2 and M3, Y=Y1), M2 (X=X2, and M3 (X=X1 Y=Y1), Y=Y2), carry out the calculation process of the correction of coordinate rotational right angle degree and amount of movement correction etc., the coordinate figure changed to after the metering making the physical location of the mark center M1C of alignment mark M1 becomes the coordinate figure (X=0 be instructed to, Y=0), coordinate figure (X=X2 – X1 coordinate figure after the metering of the physical location of the mark center M2C of alignment mark M2 being become be instructed to, Y=0), coordinate figure (X=0 coordinate figure after the metering of the physical location of the mark center M3C of alignment mark M3 being become be instructed to, Y=Y2 – Y1) workpiece coordinate system Z.(Step II I)
In this workpiece coordinate system Z after change, make scribe head 2 based on the NC program preset be on workpiece worktable 6 on the glass substrate 5 of positioning states move, action, and form the line obtained according to alignment mark.(step IV)
As mentioned above, the scribble method undertaken by the chalker 1 of this example is under the state of being located according to being set in the workpiece coordinate system Z ' on NC device on the upper surface of workpiece worktable 6 by the glass substrate 5 being marked with alignment mark, scribe head 2 and CCD camera 10 is made to utilize the moving meter 30 shared to move in workpiece coordinate system Z ' as one, make the image center 31 of CCD camera 10 and mark on a glass substrate 5 and be in the alignment mark M1 of at least three points of orthogonal collocation relation, coordinate figure M1 (the X=X1 of M2 and M3 in workpiece coordinate system Z ', Y=Y1), M2 (X=X2, and M3 (X=X1 Y=Y1), Y=Y2) align, to each alignment mark M1, M2 and M3 takes, image procossing and calculation process, to alignment mark M1, M2 and M3 mark center M1C separately, the coordinate figure of the physical location of M2C and M3C in workpiece coordinate system Z ' measures, the mark center M1C obtained will be measured, the respective coordinate figure of M2C and M3C sends to NC device, based on above-mentioned mark center M1C in NC device, coordinate figure after the metering of M2C and M3C, with alignment mark M1, the setting coordinate figure M1 (X=X1 of M2 and M3, Y=Y1), M2 (X=X2, and M3 (X=X1 Y=Y1), Y=Y2) calculation process is carried out, change to the coordinate figure (X=0 coordinate figure of the physical location of the mark center M1C of alignment mark M1 being become be instructed to, Y=0), coordinate figure (the X=X2 – X1 coordinate figure of the physical location of the mark center M2C of alignment mark M2 being become be instructed to, Y=0), coordinate figure (the X=0 coordinate figure of the physical location of the mark center M3C of alignment mark M3 being become be instructed to, Y=Y2 – Y1) workpiece coordinate system Z, in this workpiece coordinate system Z after change, scribe head 2 is on the glass substrate 5 of positioning states based on the NC program preset on workpiece worktable 6 move, form the line obtained according to alignment mark.
And, chalker 1 comprises: workpiece worktable 6, this workpiece worktable 6 has X-direction stop part 7 and Y-direction stop part 8 at upper surface, this X-direction stop part 7 is consistent with the X-axis 7B of the workpiece coordinate system Z ' be set on NC device at front end edge 7A, and above-mentioned Y-direction stop part 8 is consistent with the Y-axis 8B of workpiece coordinate system Z ' at front end edge 8A, scribe head 2, this scribe head 2 forms line 32,33 on a glass substrate 5 above glass substrate 5, and above-mentioned glass substrate 5 is positioned in workpiece coordinate system Z ' according to the front end edge 7A of the X-direction stop part 7 of the upper surface of workpiece worktable 6 and the front end edge 8A of Y-direction stop part 8, CCD camera 10, this CCD camera 10 is set up in parallel with scribe head 2, mobile with scribe head 2 one, the X-axis moving meter 3 shared and Y-axis moving meter 4, this X-axis moving meter 3 shared and Y-axis moving meter 4 make scribe head 2 and CCD camera 10 move in the XY system of coordinates of workpiece coordinate system Z ', Z as one, image processing apparatus, the shooting that this image processing apparatus carries out being implemented by CCD camera 10, image procossing, calculation process and export data to NC device, and NC device, this NC device indicates the shooting of CCD camera 10, the image procossing of image processing apparatus, the calculation process of processing result image, the line 32 implemented by scribe head 2, the formation of 33, the X-axis moving meter 3 shared and the movement of Y-axis moving meter 4 control, NC device makes to be marked with alignment mark M1, M2, M3 ... glass substrate 5 and the front end edge 7A of the X-direction stop part 7 of workpiece worktable 6 and the front end edge 8A of Y-direction stop part 8 state of aliging and being positioned workpiece coordinate system Z ' under, make scribe head 2 and CCD camera 10 mobile in workpiece coordinate system Z ' as one, make the image center 31 of CCD camera 10 and mark on a glass substrate 5 and be in the alignment mark M1 of at least three points of the orthogonal collocation relation in workpiece coordinate system Z ', coordinate figure M1 (the X=X1 of M2 and M3 in workpiece coordinate system Z ', Y=Y1), M2 (X=X2, and M3 (X=X1 Y=Y1), Y=Y2) align, utilize CCD camera 10 to each alignment mark M1, M2 and M3 takes, image processing apparatus is utilized to carry out image procossing, result based on image procossing carries out calculation process, to alignment mark M1, M2 and M3 mark center M1C separately, the coordinate figure of the physical location of M2C and M3C in workpiece coordinate system Z ' measures, based on measuring the mark center M1C obtained, M2C and M3C coordinate figure separately, with alignment mark M1, the setting coordinate figure M1 (X=X1 of M2 and M3, Y=Y1), M2 (X=X2, and M3 (X=X1 Y=Y1), Y=Y2) calculation process is carried out, change to the coordinate figure (X=0 coordinate figure of the physical location of the mark center M1C of alignment mark M1 being become be instructed to, Y=0), coordinate figure (the X=X2 – X1 coordinate figure of the physical location of the mark center M2C of alignment mark M2 being become be instructed to, Y=0), coordinate figure (the X=0 coordinate figure of the physical location of the mark center M3C of alignment mark M3 being become be instructed to, Y=Y2 – Y1) workpiece coordinate system Z, in this workpiece coordinate system Z after change, utilize X-axis moving meter 3 and Y-axis moving meter 4 that scribe head 2 is moved on the glass substrate 5 being in positioning states based on NC sequence of control, respectively formed according to alignment mark obtain such as by the line 32 of the X-direction of mark center M3C and the line 33 by the Y-direction of mark center M2C.
(nomenclature)
1 ... chalker
2 ... scribe head
3 ... X-axis moving meter
4 ... Y-axis moving meter
5 ... glass substrate
6 ... workpiece worktable
7 ... X-direction stop part
8 ... Y-direction stop part
9 ... head plate
10 ... CCD camera
11 ... base station
12,17,21 ... guide rail
13 ... moving body
13A, 17A, 21A ... slide block
14 ... servo-electric motor
9C, 15,20 ... ball-screw
9B, 15A, 20A ... nut portions
16 ... pontic
18 ... Y-axis balladeur train
19 ... Y-axis servomotor
22 ... upper and lower servomotor
24 ... cylinder
25 ... Angle ambiguity electric motor
26 ... piston rod
27 ... pinion(gear)
28 ... connect apparatus
Claims (6)
1. a scribble method, is characterized in that,
Under the state that the brittle substrate being marked with alignment mark is located at the upper surface of worktable according to the workpiece coordinate system be set on NC device, scribe head and CCD camera is made to utilize the moving meter shared to move in described workpiece coordinate system as one, make the image center of described CCD camera and to be marked on described brittle substrate and to be in the alignment mark M1 of at least three points of orthogonal collocation relation, the setting coordinate figure M1 (X=X1 in described workpiece coordinate system of M2 and M3, Y=Y1), M2 (X=X2, and M3 (X=X1 Y=Y1), Y=Y2) align, to each alignment mark M1, M2 and M3 takes, to the alignment mark M1 photographed, the image of M2 and M3 carries out image procossing, based on the result of this image procossing to described alignment mark M1, M2 and M3 mark center M1C separately, the coordinate figure of the physical location in described workpiece coordinate system of M2C and M3C measures, based on these mark center M1C, each coordinate figure that the metering of M2C and M3C obtains, and described alignment mark M1, the setting coordinate figure M1 (X=X1 of M2 and M3, Y=Y1), M2 (X=X2, and M3 (X=X1 Y=Y1), Y=Y2) calculation process is carried out, change to and make the described coordinate figure of the physical location of the mark center M1C of described alignment mark M1 become the coordinate figure (X=0 be instructed to, Y=0), coordinate figure (the X=X2 – X1 described coordinate figure of the physical location of the mark center M2C of described alignment mark M2 being become be instructed to, Y=0), the described coordinate figure of the physical location of the mark center M3C of described alignment mark M3 is made to become the coordinate figure (X=0 be instructed to, Y=Y2 – Y1) workpiece coordinate system, in this workpiece coordinate system after change, scribe head is moved based on program, the described brittle substrate being in positioning states is formed the line obtained according to alignment mark.
2. scribble method as claimed in claim 1, is characterized in that,
Scribe head is made to move along X-axis and move along Y-axis.
3. scribble method as claimed in claim 1 or 2, is characterized in that,
Brittle substrate is glass substrate.
4. a chalker, is characterized in that, comprising:
Workpiece worktable, this workpiece worktable has X-direction stop part and Y-direction stop part at upper surface, described X-direction stop part is consistent with the X-axis of the workpiece coordinate system be set on NC device in front end edge, and described Y-direction stop part is consistent with the Y-axis of the described workpiece coordinate system be set on NC device in front end edge;
Scribe head, this scribe head, above the brittle substrate being positioned described workpiece coordinate system according to the front end edge of described X-direction stop part of described workpiece worktable and the front end edge of Y-direction stop part, moves and on described brittle substrate, forms line in workpiece coordinate system;
CCD camera, this CCD camera and described scribe head are juxtaposed on shared support, move integratedly with scribe head in workpiece coordinate system;
The X-axis moving meter shared and Y-axis moving meter, described shared X-axis moving meter and Y-axis moving meter make described scribe head and CCD camera move in workpiece coordinate system as one;
Image processing apparatus, described image processing apparatus sends the shooting instruction implemented by described CCD camera, carries out image procossing and calculation process to the image photographed; And
NC device, this NC device to the shooting instruction sent to CCD camera by described image processing apparatus, image procossing instruction and calculation process instruction, by described scribe head carry out form line to brittle substrate, the action of described shared X-axis moving meter and Y-axis moving meter controls
NC device makes to be marked with under the brittle substrate of alignment mark aligns with the front end edge of described X-direction stop part of described workpiece worktable and the front end edge of Y-direction stop part and be positioned at the state in described workpiece coordinate system, scribe head and CCD camera are moved in workpiece coordinate system as one, make the image center of described CCD camera and to be marked on brittle substrate and to be in the alignment mark M1 of at least three points of orthogonal collocation relation, the setting coordinate figure M1 (X=X1 in described workpiece coordinate system of M2 and M3, Y=Y1), M2 (X=X2, and M3 (X=X1 Y=Y1), Y=Y2) align, utilize CCD camera to each alignment mark M1, M2 and M3 takes, image processing apparatus is utilized to carry out image procossing and calculation process to the image photographed, to described alignment mark M1, M2 and M3 mark center M1C separately, the coordinate figure of the physical location in described workpiece coordinate system of M2C and M3C measures, based on the mark center M1C that the metering from image processing apparatus obtains, M2C and M3C coordinate figure separately, and described alignment mark M1, the setting coordinate figure M1 (X=X1 of M2 and M3, Y=Y1), M2 (X=X2, and M3 (X=X1 Y=Y1), Y=Y2) calculation process is carried out, change to and make the described coordinate figure of the physical location of the mark center M1C of described alignment mark M1 become the coordinate figure (X=0 be instructed to, Y=0), coordinate figure (the X=X2 – X1 described coordinate figure of the physical location of the mark center M2C of described alignment mark M2 being become be instructed to, Y=0), the described coordinate figure of the physical location of the mark center M3C of described alignment mark M3 is made to become the coordinate figure (X=0 be instructed to, Y=Y2 – Y1) workpiece coordinate system, in this workpiece coordinate system after change, move based on program to make scribe head, and utilize scribe head on the described brittle substrate being in positioning states, form the line obtained according to alignment mark, the shooting of CCD camera is indicated, the X-axis moving meter shared and the action of Y-axis moving meter control.
5. chalker as claimed in claim 4, is characterized in that,
Scribe head moves along X-axis and moves along Y-axis.
6. the chalker as described in claim 4 or 5, is characterized in that,
Brittle substrate is glass substrate.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012157017 | 2012-07-12 | ||
| JP2012-157017 | 2012-07-12 | ||
| PCT/JP2013/002571 WO2014010154A1 (en) | 2012-07-12 | 2013-04-16 | Scribing method and scribing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104428263A true CN104428263A (en) | 2015-03-18 |
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| CN201380036795.5A Pending CN104428263A (en) | 2012-07-12 | 2013-04-16 | Scribing method and scribing device |
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| JP (1) | JPWO2014010154A1 (en) |
| KR (1) | KR20150020217A (en) |
| CN (1) | CN104428263A (en) |
| WO (1) | WO2014010154A1 (en) |
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| CN105538518A (en) * | 2016-02-19 | 2016-05-04 | 李谋遵 | Intelligent stone cutting robot and cutting method thereof |
| CN105710978A (en) * | 2016-03-21 | 2016-06-29 | 李谋遵 | Intelligent stone cutting production line and cutting method thereof |
| CN107205318A (en) * | 2016-03-17 | 2017-09-26 | 塔工程有限公司 | Scribing equipment and dicing method |
| CN107571416A (en) * | 2016-07-05 | 2018-01-12 | 浙江融创磁业有限公司 | One kind is on magnetic material multi-wire saw automatic positioning equipment |
| CN111908780A (en) * | 2019-05-10 | 2020-11-10 | 塔工程有限公司 | Scribing device and control method thereof |
| CN117654985A (en) * | 2023-12-04 | 2024-03-08 | 山东金诺新材料科技有限公司 | Filtering and washing device for producing cuprous cyanide by utilizing boric acid |
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| KR101991269B1 (en) * | 2017-09-29 | 2019-06-20 | 주식회사 탑 엔지니어링 | Scribing apparatus |
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| CN105710978A (en) * | 2016-03-21 | 2016-06-29 | 李谋遵 | Intelligent stone cutting production line and cutting method thereof |
| CN105710978B (en) * | 2016-03-21 | 2017-08-29 | 李谋遵 | A kind of cutting method for applying intelligent stone material to cut streamline |
| CN107571416A (en) * | 2016-07-05 | 2018-01-12 | 浙江融创磁业有限公司 | One kind is on magnetic material multi-wire saw automatic positioning equipment |
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| CN117654985A (en) * | 2023-12-04 | 2024-03-08 | 山东金诺新材料科技有限公司 | Filtering and washing device for producing cuprous cyanide by utilizing boric acid |
| CN117654985B (en) * | 2023-12-04 | 2024-08-06 | 山东金诺新材料科技有限公司 | Filtering and washing device for producing cuprous cyanide by utilizing boric acid |
Also Published As
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| WO2014010154A1 (en) | 2014-01-16 |
| JPWO2014010154A1 (en) | 2016-06-20 |
| KR20150020217A (en) | 2015-02-25 |
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Application publication date: 20150318 |