CN104409953B - A kind of plasma excitation source device of high-power laser system - Google Patents
A kind of plasma excitation source device of high-power laser system Download PDFInfo
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- CN104409953B CN104409953B CN201410622876.XA CN201410622876A CN104409953B CN 104409953 B CN104409953 B CN 104409953B CN 201410622876 A CN201410622876 A CN 201410622876A CN 104409953 B CN104409953 B CN 104409953B
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- 238000000429 assembly Methods 0.000 claims abstract description 13
- 238000010891 electric arc Methods 0.000 claims description 11
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- 238000010894 electron beam technology Methods 0.000 abstract description 6
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Abstract
A kind of plasma excitation source device of high-power laser system, it is related to a kind of plasma excitation source device, it is made up of support, negative electrode, spiral stream guidance device and anode assemblies, the internal layer wall body of support forms cooling mozzle, the intermediate layer wall body of support forms cathode connecting bar, cool down space in the pipe of mozzle and form cooling water channel, the space between the outer wall and support outer layer wall body of cathode connecting bar forms air chamber；In spiral stream guidance device, the pitch space of spiral stream guidance rib forms helical airflow passages；Anode assemblies include anode jacket and anode, and anode is embedded among the wall body of anode jacket；Negative electrode is connected to the cathode connecting bar front end of support, and the rear end of spiral stream guidance device is arranged on the outer layer wall body of support, and anode assemblies are arranged on the front end of spiral stream guidance device, and the head of negative electrode is stretched out in space out of anode ring body structurc ring.The present invention produces strong arc light and high-power electron beam under electric discharge phenomena, as the driving source of high-power laser system, makes the powerful, simple in construction of laser.
Description
Technical field
The present invention relates to laser equipment, especially relates to a kind of plasma excitation source device.
Background technology
Since laser was 20th century, after atomic energy, computer, semiconductor, the another invention of great significance of the mankind, it has been referred to as
" most fast knife ", " most accurate chi ", " most bright light " and " unusual laser ".Currently, laser technology laser weapon field,
It is used widely on industrial production and office equipment, the field using maximum is laser processing technology, and laser processing technology is
Metal material and nonmetallic materials are cut with matter interaction using laser beam, welds, are surface-treated, punching, micro-
Processing etc..
The energisation mode of laser has optical pumping mode to encourage, gas discharge mode encourages, high-power electron beam injection mode swashs
Encourage, nuclear pumping mode encourages.Plasma is a kind of state formed under gas discharge phenomenon, along with electric discharge phenomena
Strong light and high-power electron beam will be produced, such as the driving source application as high power laser, the power of laser can not only be made
It is powerful, and there is the characteristics of simple in construction, energy consumption is low.
The content of the invention
It is an object of the invention to provide a kind of excitation source device of high-power laser system, using plasma technique,
Strong arc light and high-power electron beam are produced under electric discharge phenomena, as the driving source of high-power laser system, makes the power of laser
It is powerful, simple in construction low with energy consumption.
The plasma excitation source device of a kind of high-power laser system of the present invention, it is characterized in that device is by support（1）、
Negative electrode（4）, spiral stream guidance device（2）Formed with anode assemblies, wherein, support（1）For the rotary structure of three layers of wall body, support
（1）Internal layer wall body form cooling mozzle（1-5）, support（1）Intermediate layer wall body form cathode connecting bar（1-4）, cooling leads
Flow tube（1-5）Pipe in space form cooling water channel（Ⅶ）, cool down mozzle（1-5）Outer wall and cathode connecting bar（1-4）
Space between inwall forms cooling backwater passage（Ⅵ）, cathode connecting bar（1-4）Outer wall and support（1）Between outer layer wall body
Space forms air chamber（Ⅰ）；Negative electrode（4）It is made up of hollow pole body and entity head, negative electrode（4）Pole in space form it is cold
But chamber（Ⅳ）；Spiral stream guidance device（2）For rotary structure, spiral stream guidance device（2）Revolving body in have spiral stream guidance rib（2-1）,
Spiral stream guidance rib（2-1）Pitch space form helical airflow passages（Ⅱ）；Anode assemblies include anode jacket（3-4）And anode
（3-3）, anode jacket（3-4）For hollow rotary structure, anode jacket（3-4）Wall body in have annular cooling chamber（Ⅴ）, anode（3-
3）For ring body structurc, anode（3-3）It is embedded into anode jacket（3-4）Wall body among；Negative electrode（4）It is connected to support（1）Negative electrode
Connecting rod（1-4）Front end, spiral stream guidance device（2）Rear end be arranged on support（1）Outer layer wall body on, anode assemblies are arranged on spiral
Air deflector（2）Front end, negative electrode（4）From spiral stream guidance device（2）Interior space in pass through, negative electrode（4）Head from anode（3-3）
Space is stretched out in the ring of ring body structurc；Air chamber（Ⅰ）Pass through helical airflow passages（Ⅱ）It is communicated to negative electrode（4）The external space on head；
During work, negative electrode（4）Head end formed circular arc discharge face（4-1）, anode（3-3）Ring body front end form ring discharge face（3-
2）, negative electrode（4）Circular arc discharge face（4-1）With anode（3-3）Ring discharge face（3-2）Between space form region of discharge.
In the present invention, support（1）Outer layer wall body on have installation screw socket（1-3）, spiral stream guidance device（2）Rear end have screw thread
Notch（2-3）, spiral stream guidance device（2）The screw thread notch of rear end（2-3）Screw in support（1）The installation screw socket of outer layer wall body（1-
3）On；Cool down mozzle（1-5）Interior cooling water channel（Ⅶ）There is cooling water input interface（1-6）Access, cooling are supplied water logical
Road（Ⅶ）Pass through negative electrode（4）Interior cooling chamber（Ⅳ）It is communicated to cooling backwater passage（Ⅵ）, cooling backwater passage（Ⅵ）There is cooling
Water output interface（1-1）Pick out；Negative electrode（4）Entity head rear end have cooling tail cone（4-3）, cool down tail cone（4-3）It extend into
Cooling chamber（Ⅳ）With cooling mozzle（1-5）Delivery port in；Support（1）In air chamber（Ⅰ）There is protection gas input interface（1-2）
Access；Negative electrode（4）Entity head be conical structure narrowed from the front to the back, negative electrode（4）Head end be arc-shaped structure；Spiral shell
Revolve air deflector（2）Front end have nipple（2-2）, anode jacket（3-4）Rear end have screw channel（3-6）, anode jacket（3-4）Rear end
Screw channel（3-6）Screw in spiral stream guidance device（2）The nipple of front end（2-2）On；Anode jacket（3-4）In annular cooling chamber
（Ⅴ）There is coolant inlet（3-5）And coolant outlet（3-1）；Anode（3-3）Ring body in space be narrowed from the front to the back
Structure, anode（3-3）Ring body in from the front to the back narrowed space form constraint mouth（Ⅲ）.
Above-mentioned invention is in use, cooling water passes through cooling water input interface all the way（1-6）Enter cooling mozzle（1-
5）Interior cooling water channel（Ⅶ）In, through cooling down mozzle（1-5）The delivery port of front end is to negative electrode（4）The cooling of head rear end
Tail cone（4-3）Carry out washing away cooling, cooling water absorbs negative electrode（4）After the heat on head, then through cooling chamber（Ⅳ）Enter cold
But backwater channel（Ⅵ）, then by cooling water output interface（1-1）Return in the loop of cooling system；Another way cooling water leads to
Supercooling agent import（3-5）Enter anode jacket（3-4）Annular cooling chamber（Ⅴ）In, after the heat for absorbing anode, by cooling down
Agent exports（3-1）Return in the loop of cooling system；Protective gas is by protection gas input interface（1-2）Enter air chamber（Ⅰ）
In, then by helical airflow passages（Ⅱ）Negative electrode is entered in a spiral manner（4）Head end and anode（3-3）Put ring body front end
Electric area, protective gas is by anode（3-3）Ring body in constraint mouth（Ⅲ）Constraint and inswept negative electrode（4）Head end, play pair
Negative electrode（4）Protective effect；Support（1）As negative electrode（4）Electrical fitting, anode jacket（3-4）As anode（3-3）Electricity
Gas connector, in anode（3-3）With negative electrode（4）Between apply electric energy, use high-frequency arc strike power supply（7）Make negative electrode（4）Circular arc
Discharge face（4-1）With anode（3-3）Ring discharge face（3-2）Between initiate electric arc, plasma is just formed in region of discharge
Electric arc, emittance, strong plasma arc light and high-power electron beam are produced, high power laser system is supplied to as driving source
System application.
During above-mentioned invention work, negative electrode（4）Head be subjected to rush of current and the high temperature of tens thousand of degree is burnt, therefore,
Must anticathode head take effective cooling provision and gas shield to increase the service life of negative electrode.The present invention takes
In spiral stream guidance device（2）Middle setting spiral stream guidance rib（2-1）Measure, to form spiral protection air-flow, air-flow center will not produce
Raw vacuum or negative pressure, enable the comprehensive covered cathode of protection air-flow（4）Head end, realize and effective gas shield carried out to negative electrode,
With reference to cooling protection measure, it is not easy negative electrode ablated.The present invention is also in negative electrode（4）Head rear end on set cooling tail cone
（4-3）, make cooling mozzle（1-5）Delivery port against cooling tail cone（4-3）Wash away, quickly negative electrode（4）The heat on head
Take away, enhance the cooling effect of negative electrode.
The beneficial effects of the invention are as follows：Using plasma technique, strong arc light and high energy electricity is produced under electric discharge phenomena
Beamlet, as the driving source of high-power laser system, make the powerful, simple in construction low with energy consumption of laser.It is of the invention real
Effective gas shield now is carried out to negative electrode, with reference to cooling protection measure, is not easy negative electrode ablated, improves production efficiency and section
About production cost.
Brief description of the drawings
Fig. 1 is a kind of plasma excitation source device structure figure of high-power laser system of the present invention.
Fig. 2 is the spiral stream guidance device structure chart in Fig. 1.
Fig. 3 is the electric discharge schematic diagram of Fig. 1 devices.
In figure：1. support, 1-1. cooling water output interfaces, 1-2. protection gas input interfaces, 1-3. installation screw sockets, 1-4. are cloudy
Pole connecting rod, 1-5. cooling mozzles, 1-6. cooling water input interfaces, 2. spiral stream guidance devices, 2-1. spiral stream guidance ribs, 2-2. screw threads
Joint, 2-3. screw thread notches, 3. anode assemblies, 3-1. coolant outlets, 6-2. ring discharges face, 3-3. anodes, 3-4. anodes
Set, 3-5. coolant inlets, 3-6. screw channels, the conductor interface of 3-7. anodes, 4. negative electrodes, the circular arc discharge face of 4-1. negative electrodes, 4-
2. the entity head of negative electrode, 4-3. cooling tail cones, the pole body of 4-4. negative electrodes, 5. high voltage silicon rectifier stacks, 6. working powers, 7. high frequencies draw
Arc power, 8. connecting plates, 9. fixing bolts, the electric interfaces of 10. negative electrodes, 11. plasma arc lights, I, air chambers, II, spiral gas
Circulation road, III, constraint mouths, IV, cooling chambers, V, annular cooling chambers, VI, cooling backwater passages, VII, cooling water channels.
Embodiment
In embodiment shown in embodiment Fig. 1, a kind of plasma excitation source device of high-power laser system is by machine
Seat（1）, negative electrode（4）, spiral stream guidance device（2）Formed with anode assemblies, wherein, support（1）For the rotary structure of three layers of wall body,
Support（1）Internal layer wall body form cooling mozzle（1-5）, support（1）Intermediate layer wall body form cathode connecting bar（1-4）, machine
Seat（1）Outer layer wall body on have installation screw socket（1-3）, cool down mozzle（1-5）Pipe in space form cooling water channel
（Ⅶ）, cool down water channel（Ⅶ）There is cooling water input interface（1-6）Access, cool down mozzle（1-5）Outer wall and negative electrode connect
Bar（1-4）Space between inwall forms cooling backwater passage（Ⅵ）, cooling backwater passage（Ⅵ）There is cooling water output interface（1-
1）Pick out, cathode connecting bar（1-4）Outer wall and support（1）Space between outer layer wall body forms air chamber（Ⅰ）, air chamber（Ⅰ）There is guarantor
Protect gas input interface（1-2）Access；Negative electrode（4）It is made up of hollow pole body and entity head, negative electrode（4）Entity head be
Narrowed conical structure from the front to the back, negative electrode（4）Head end be arc-shaped structure, negative electrode（4）Pole in space form it is cold
But chamber（Ⅳ）Negative electrode（4）Entity head rear end have cooling tail cone（4-3）, cool down tail cone（4-3）It extend into cooling chamber（Ⅳ）With
Cool down mozzle（1-5）Delivery port in；Spiral stream guidance device（2）For rotary structure, spiral stream guidance device（2）Rear end have screw thread
Notch（2-3）, spiral stream guidance device（2）Revolving body in have spiral stream guidance rib（2-1）, spiral stream guidance rib（2-1）Pitch space
Form helical airflow passages（Ⅱ）, spiral stream guidance device（2）Front end have nipple（2-2）；Anode assemblies include anode jacket（3-
4）And anode（3-3）, anode jacket（3-4）For hollow rotary structure, anode jacket（3-4）Rear end have screw channel（3-6）, anode jacket
（3-4）Wall body in have annular cooling chamber（Ⅴ）, annular cooling chamber（Ⅴ）There is coolant inlet（3-5）And coolant outlet（3-
1）, anode（3-3）For ring body structurc, anode（3-3）Ring body in space be structure narrowed from the front to the back, anode（3-3）'s
Space narrowed from the front to the back forms constraint mouth in ring body（Ⅲ）, anode（3-3）It is embedded into anode jacket（3-4）Wall body among；
Negative electrode（4）It is connected to support（1）Cathode connecting bar（1-4）Front end, spiral stream guidance device（2）Rear end be arranged on support（1）It is outer
On layer wall body, spiral stream guidance device（2）The screw thread notch of rear end（2-3）Screw in support（1）The installation screw socket of outer layer wall body（1-3）
On, anode assemblies are arranged on spiral stream guidance device（2）Front end, anode jacket（3-4）The screw channel of rear end（3-6）Screw in spiral stream guidance
Device（2）The nipple of front end（2-2）On；Negative electrode（4）From spiral stream guidance device（2）Interior space in pass through, negative electrode（4）Head
From anode（3-3）Space is stretched out in the ring of ring body structurc；Air chamber（Ⅰ）Pass through helical airflow passages（Ⅱ）It is communicated to negative electrode（4）Head
The external space in portion；Cool down water channel（Ⅶ）Pass through negative electrode（4）Interior cooling chamber（Ⅳ）It is communicated to cooling backwater passage（Ⅵ）；Work
When making, negative electrode（4）Head end formed circular arc discharge face（4-1）, anode（3-3）Ring body front end form ring discharge face（3-2）,
Negative electrode（4）Circular arc discharge face（4-1）With anode（3-3）Ring discharge face（3-2）Between space form region of discharge.
In the present embodiment, support（1）Made from stainless steel material, anode（3-3）With the entity head of negative electrode（4-2）Choosing
Made of tungsten alloy material, anode jacket（3-4）With the pole body of negative electrode（4-4）Made from red copper material, spiral stream guidance device（2）
Made from polytetrafluoroethylmaterial material or compression moulding bakelite material.
The present embodiment is in use, cooling water passes through cooling water input interface all the way（1-6）Enter cooling mozzle（1-5）
Interior cooling water channel（Ⅶ）In, through cooling down mozzle（1-5）The delivery port of front end is to negative electrode（4）The cooling tail of head rear end
Cone（4-3）Carry out washing away cooling, cooling water absorbs negative electrode（4）After the heat on head, then through cooling chamber（Ⅳ）Enter cooling
Backwater channel（Ⅵ）, then by cooling water output interface（1-1）Return in the loop of cooling system；Another way cooling water passes through
Coolant inlet（3-5）Enter anode jacket（3-4）Annular cooling chamber（Ⅴ）In, after the heat for absorbing anode, by cooling agent
Outlet（3-1）Return in the loop of cooling system；Protective gas is by protection gas input interface（1-2）Enter air chamber（Ⅰ）In,
Then by helical airflow passages（Ⅱ）Negative electrode is entered in a spiral manner（4）Head end and anode（3-3）The electric discharge of ring body front end
Area, protective gas is by anode（3-3）Ring body in constraint mouth（Ⅲ）Constraint and inswept negative electrode（4）Head end, play to the moon
Pole（4）Protective effect；Support（1）As negative electrode（4）Electrical fitting, anode jacket（3-4）As anode（3-3）It is electric
Connector, in anode（3-3）With negative electrode（4）Between apply electric energy, use high-frequency arc strike power supply（7）Make negative electrode（4）Circular arc put
Electric face（4-1）With anode（3-3）Ring discharge face（3-2）Between initiate electric arc, just in region of discharge formed plasma electricity
Arc, emittance, strong plasma arc light and high-power electron beam are produced, high-power laser system is supplied to as driving source
Using.The present embodiment in the course of the work, helical airflow passages（Ⅱ）Spiral protection air-flow is formed, air-flow center will not produce very
Empty or negative pressure, enables the comprehensive covered cathode of protection air-flow（4）Head end, realize and effective gas shield carried out to negative electrode, with reference to
Cooling protection measure, it is not easy negative electrode ablated.In negative electrode（4）Head rear end on set cooling tail cone（4-3）, lead cooling
Flow tube（1-5）Delivery port against cooling tail cone（4-3）Wash away, quickly negative electrode（4）The heat on head is taken away, and enhances negative electrode
Cooling effect.
Claims (7)
- A kind of 1. plasma excitation source device of high-power laser system, it is characterized in that device is by support（1）, negative electrode（4）, spiral shell Revolve air deflector（2）Formed with anode assemblies, wherein, support（1）For the rotary structure of three layers of wall body, support（1）Inner layer wall Body forms cooling mozzle（1-5）, support（1）Intermediate layer wall body form cathode connecting bar（1-4）, cool down mozzle（1-5）'s Space forms cooling water channel in pipe（Ⅶ）, cool down mozzle（1-5）Outer wall and cathode connecting bar（1-4）Sky between inwall Between form cooling backwater passage（Ⅵ）, cathode connecting bar（1-4）Outer wall and support（1）Space between outer layer wall body forms air chamber （Ⅰ）；Negative electrode（4）It is made up of hollow pole body and entity head, negative electrode（4）Pole in space form cooling chamber（Ⅳ）；Spiral shell Revolve air deflector（2）For rotary structure, spiral stream guidance device（2）Revolving body in have spiral stream guidance rib（2-1）, spiral stream guidance rib （2-1）Pitch space form helical airflow passages（Ⅱ）；Anode assemblies include anode jacket（3-4）And anode（3-3）, anode jacket （3-4）For hollow rotary structure, anode jacket（3-4）Wall body in have annular cooling chamber（Ⅴ）, anode（3-3）For ring body knot Structure, anode（3-3）It is embedded into anode jacket（3-4）Wall body among；Negative electrode（4）It is connected to support（1）Cathode connecting bar（1-4）Before End, spiral stream guidance device（2）Rear end be arranged on support（1）Outer layer wall body on, anode assemblies are arranged on spiral stream guidance device（2）'s Front end, negative electrode（4）From spiral stream guidance device（2）Interior space in pass through, negative electrode（4）Head from anode（3-3）Ring body structurc Space is stretched out in ring；Air chamber（Ⅰ）Pass through helical airflow passages（Ⅱ）It is communicated to negative electrode（4）The external space on head；Spiral stream guidance device （2）Front end have nipple（2-2）, anode jacket（3-4）Rear end have screw channel（3-6）, anode jacket（3-4）The screw channel of rear end （3-6）Screw in spiral stream guidance device（2）The nipple of front end（2-2）On；Anode（3-3）Ring body in space for from the front to the back Narrowed structure, anode（3-3）Ring body in from the front to the back narrowed space form constraint mouth（Ⅲ）；During work, negative electrode（4）'s Head end forms circular arc discharge face（4-1）, anode（3-3）Ring body front end form ring discharge face（3-2）, negative electrode（4）Circular arc Discharge face（4-1）With anode（3-3）Ring discharge face（3-2）Between space form region of discharge.
- A kind of 2. plasma excitation source device of high-power laser system according to claim 1, it is characterized in that support （1）Outer layer wall body on have installation screw socket（1-3）, spiral stream guidance device（2）Rear end have screw thread notch（2-3）, spiral stream guidance device （2）The screw thread notch of rear end（2-3）Screw in support（1）The installation screw socket of outer layer wall body（1-3）On.
- A kind of 3. plasma excitation source device of high-power laser system according to claim 1, it is characterized in that cooling Mozzle（1-5）Interior cooling water channel（Ⅶ）There is cooling water input interface（1-6）Access, cool down water channel（Ⅶ）Pass through Negative electrode（4）Interior cooling chamber（Ⅳ）It is communicated to cooling backwater passage（Ⅵ）, cooling backwater passage（Ⅵ）There is cooling water output interface （1-1）Pick out.
- A kind of 4. plasma excitation source device of high-power laser system according to claim 1, it is characterized in that negative electrode （4）Entity head rear end have cooling tail cone（4-3）, cool down tail cone（4-3）It extend into cooling chamber（Ⅳ）With cooling mozzle（1- 5）Delivery port in.
- A kind of 5. plasma excitation source device of high-power laser system according to claim 1, it is characterized in that support （1）In air chamber（Ⅰ）There is protection gas input interface（1-2）Access.
- A kind of 6. plasma excitation source device of high-power laser system according to claim 1, it is characterized in that negative electrode （4）Entity head be conical structure narrowed from the front to the back, negative electrode（4）Head end be arc-shaped structure.
- A kind of 7. plasma excitation source device of high-power laser system according to claim 1, it is characterized in that anode Set（3-4）In annular cooling chamber（Ⅴ）There is coolant inlet（3-5）And coolant outlet（3-1）.
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| US6403915B1 (en) * | 2000-08-31 | 2002-06-11 | Hypertherm, Inc. | Electrode for a plasma arc torch having an enhanced cooling configuration |
| CN101360384A (en) * | 2007-08-01 | 2009-02-04 | 烟台龙源电力技术股份有限公司 | Plasma generator and cathode thereof |
| CN103906337A (en) * | 2014-04-27 | 2014-07-02 | 衢州昀睿工业设计有限公司 | Plasma torch for dielectric heating |
| CN204167675U (en) * | 2014-11-08 | 2015-02-18 | 衢州迪升工业设计有限公司 | A kind of plasma excitation source apparatus of high-power laser system |
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