CN104377268A - Solar cell panel and crystal silicon wafer thereof - Google Patents
Solar cell panel and crystal silicon wafer thereof Download PDFInfo
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- CN104377268A CN104377268A CN201410308401.3A CN201410308401A CN104377268A CN 104377268 A CN104377268 A CN 104377268A CN 201410308401 A CN201410308401 A CN 201410308401A CN 104377268 A CN104377268 A CN 104377268A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 10
- 229910052710 silicon Inorganic materials 0.000 title claims description 10
- 239000010703 silicon Substances 0.000 title claims description 10
- 239000013078 crystal Substances 0.000 title claims description 9
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 238000001704 evaporation Methods 0.000 claims abstract description 11
- 230000008020 evaporation Effects 0.000 claims abstract description 9
- 239000011521 glass Substances 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 2
- 229910052681 coesite Inorganic materials 0.000 claims 2
- 229910052906 cristobalite Inorganic materials 0.000 claims 2
- 239000000377 silicon dioxide Substances 0.000 claims 2
- 235000012239 silicon dioxide Nutrition 0.000 claims 2
- 229910052682 stishovite Inorganic materials 0.000 claims 2
- 229910052905 tridymite Inorganic materials 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 claims 1
- 229910021419 crystalline silicon Inorganic materials 0.000 abstract description 36
- 229910052782 aluminium Inorganic materials 0.000 abstract description 16
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 12
- 238000006243 chemical reaction Methods 0.000 abstract description 5
- 238000005215 recombination Methods 0.000 abstract description 5
- 230000006798 recombination Effects 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 2
- 238000005530 etching Methods 0.000 abstract description 2
- 238000002834 transmittance Methods 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 29
- 239000000463 material Substances 0.000 description 6
- 238000000059 patterning Methods 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910000676 Si alloy Inorganic materials 0.000 description 2
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 241000282414 Homo sapiens Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 230000009103 reabsorption Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/30—Coatings
- H10F77/306—Coatings for devices having potential barriers
- H10F77/311—Coatings for devices having potential barriers for photovoltaic cells
- H10F77/315—Coatings for devices having potential barriers for photovoltaic cells the coatings being antireflective or having enhancing optical properties
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/137—Batch treatment of the devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/138—Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
- H10F77/244—Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/52—PV systems with concentrators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Photovoltaic Devices (AREA)
Abstract
本发明涉及太阳能技术领域,具体涉及一种太阳能能电池板及其晶体硅片,太阳能电池板由以下部分组成:一面上叠层有蒸镀层的玻璃基板、蒸镀层的下层有透明电极层、透光电极层的下层有晶体硅片、晶体硅片的下层有背面电极层,所述晶体硅片的背面设有第一层SiO2薄膜、第二层TiO2薄膜、第三层SiO2薄膜,本发明增强了其对阳光的再吸收,与现有技术中晶体硅片背表面只设置全铝背场相比,阳光的透射率显著降低,大大提高了晶体硅片的光电转换效率。此外,通过刻蚀接触窗,在接触窗上设置铝膜而形成的局部铝背场,与全铝背场相比,因为铝背场的高复合区域减小,其对晶体硅片背表面的少数载流子寿命的影响也相应降低,进一步提高了晶体硅片的光电转换效率。The invention relates to the technical field of solar energy, in particular to a solar energy battery panel and a crystalline silicon wafer thereof. The solar battery panel is composed of the following parts: a glass substrate with an evaporation layer laminated on one side, a transparent electrode layer on the lower layer of the evaporation layer, a transparent The lower layer of the photoelectrode layer has a crystalline silicon wafer, and the lower layer of the crystalline silicon wafer has a back electrode layer. Compared with the prior art where the back surface of the crystalline silicon wafer is only provided with an all-aluminum back field, the transmittance of sunlight is significantly reduced, and the photoelectric conversion efficiency of the crystalline silicon wafer is greatly improved. In addition, the local aluminum back field formed by etching the contact window and setting the aluminum film on the contact window, compared with the full aluminum back field, because the high recombination area of the aluminum back field is reduced, its effect on the back surface of the crystalline silicon wafer The impact of the minority carrier lifetime is also reduced accordingly, further improving the photoelectric conversion efficiency of the crystalline silicon wafer.
Description
技术领域 technical field
本发明涉及太阳能技术领域,具体涉及一种太阳能能电池板及其晶体硅片。 The invention relates to the technical field of solar energy, in particular to a solar energy battery panel and a crystalline silicon wafer thereof.
背景技术 Background technique
随着能源的日益短缺,可再生能源的开发开发越来越受到人们的关注,对太阳能电池研究的不断深入,晶体硅太阳能电池发展的重点是高效率及低成本。太阳能是人类取之不尽用之不竭的可再生能源.也是清洁能源,不产生任何的环境污染。在太阳能的有效利用当中;大阳能光电利用是近些年来发展最快,最具活力的研究领域, 是其中最受瞩目的项目之一。为此,人们研制和开发了太阳能电池。制作太阳能电池主要是以半导体材料为基础,其工作原理是利用光电材料吸收光能后发生光电于转换反应, With the increasing shortage of energy, the development of renewable energy has attracted more and more attention, and the research on solar cells has continued to deepen. The focus of the development of crystalline silicon solar cells is high efficiency and low cost. Solar energy is an inexhaustible renewable energy source for human beings. It is also clean energy and does not produce any environmental pollution. Among the effective utilization of solar energy; solar photovoltaic utilization is the fastest-growing and most dynamic research field in recent years, and it is one of the most eye-catching projects. To this end, people have researched and developed solar cells. The production of solar cells is mainly based on semiconductor materials. Its working principle is to use photoelectric materials to absorb light energy and then undergo photoelectric conversion reactions.
常规太阳能电池板的晶体硅片采用背面印刷全铝背场结构,其具体生产工艺是:晶体硅片在经制绒、扩散、去PSG,含有较高磷浓度的硅氧化层,被称为磷硅玻璃)和正面形成减反射膜(晶体硅片受光面所涂的一层减少阳光反射的膜)后,在其背表面设置一层铝层,以提高开路电压及短路电流,即全铝背场。尽管采用此种工艺设置的结构有很多优点,但由于烧结形成的铝硅合金背表面在减少复合(复合:晶体硅片背面的少数载流子减少的一种方式)和背反射效果方面具有一定的局限,特别是铝硅合金区本身即高复合区的局限更加明显,而且铝背场对太阳光的反射率偏低,长波响应较差,限制了太阳能电池光电转换效率的进一步提高。 The crystalline silicon wafer of a conventional solar panel adopts an all-aluminum back field structure printed on the back. The specific production process is: the crystalline silicon wafer undergoes texturing, diffusion, and PSG removal, and contains a silicon oxide layer with a relatively high phosphorus concentration, which is called phosphorus. Silicon glass) and an anti-reflection film (a film coated on the light-receiving surface of a crystalline silicon wafer to reduce sunlight reflection) are formed on the front, and an aluminum layer is placed on the back surface to increase the open-circuit voltage and short-circuit current, that is, the all-aluminum back field. Although the structure set by this process has many advantages, the back surface of the aluminum-silicon alloy formed by sintering has certain advantages in reducing recombination (recombination: a way to reduce the minority carriers on the back of the crystal silicon wafer) and back reflection. The limitations of the aluminum-silicon alloy region itself, which is the high recombination region, are more obvious, and the reflectivity of the aluminum back field to sunlight is low, and the long-wave response is poor, which limits the further improvement of the photoelectric conversion efficiency of solar cells.
发明内容 Contents of the invention
为解决上述问题,本发明提供一种太阳能电池板及其晶体硅片。 To solve the above problems, the present invention provides a solar cell panel and a crystalline silicon wafer thereof.
本发明采用的技术方案为:太阳能电池板是以多个太阳能电池单元电连接地集成在一个板上的形态制造,为此,首先地提供作为透明绝缘层的玻璃基板,在玻璃基板上用TCO 等材料蒸镀透明电极层。为了蒸镀透明电极层,可采用等离子体蒸镀、真空蒸镀、溅射(Sputtering) 等多种物理、化学蒸镀方法。之后,利用激光刻划机在透明电极层上进行构图,分离成多个细长带状的透明电极,然后,用a-Si 等材料蒸镀覆盖透明电极层的晶体硅片,之后,利用激光刻划机进行构图而分割成多个晶体硅片,此时,晶体硅片之间的分割槽沿着与透明电极层之间的分离槽相同的方向延长,而后,用铝等金属材料蒸镀覆盖晶体硅片的背面电极层,利用激光刻划机进行构图而分离成多个背面电极,通过如上所述的工序制作的太阳能电池板中,相互重叠着层叠的带状透明电极、晶体硅片以及背面电极成为一个单元,整体上由多个太阳能电池集成而成。由于背面电极层以填充晶体硅片之间的分割槽的方式进行蒸镀,所以,任一太阳能电池的透明电极与同该电池邻接的另一电池的背面电极连接。即,晶体硅片之间的分割槽也作为电池间的连接用槽而利用,所以基板上的所有太阳能电池相互以电连接方式串联。在串联的多个太阳能电池的两端部连接着外部电极。 The technical solution adopted by the present invention is: solar cell panels are manufactured in the form of a plurality of solar cell units electrically connected and integrated on one plate. For this reason, a glass substrate as a transparent insulating layer is first provided, and TCO and other materials to vapor-deposit transparent electrode layers. In order to evaporate the transparent electrode layer, various physical and chemical evaporation methods such as plasma evaporation, vacuum evaporation, and sputtering can be used. Afterwards, patterning is carried out on the transparent electrode layer by using a laser scribing machine, and it is separated into a plurality of elongated strip-shaped transparent electrodes, and then a crystalline silicon wafer covering the transparent electrode layer is vapor-deposited with a-Si and other materials. The scribing machine performs patterning and divides into a plurality of crystalline silicon wafers. At this time, the dividing grooves between the crystalline silicon wafers are extended in the same direction as the separating grooves between the transparent electrode layers, and then vapor-deposited with metal materials such as aluminum The back electrode layer covering the crystalline silicon wafer is patterned with a laser scribing machine and separated into multiple back electrodes. In the solar cell panel manufactured through the above-mentioned process, the strip-shaped transparent electrodes and the crystalline silicon wafer are stacked on top of each other. And the back electrode becomes a unit, which is integrated by multiple solar cells as a whole. Since the back electrode layer is vapor-deposited so as to fill the dividing grooves between the crystalline silicon wafers, the transparent electrode of any solar cell is connected to the back electrode of another cell adjacent to the cell. That is, the dividing grooves between the crystalline silicon wafers are also used as the grooves for connecting cells, so all the solar cells on the substrate are electrically connected in series. External electrodes are connected to both ends of a plurality of solar cells connected in series.
本发明的有益效果在于:通过由以上三层薄膜构成的钝化结构对晶体硅片背表面的悬挂键进行钝化,提高了晶体硅片对阳光的利用率,而且采用三层膜的设置方式,使得钝化结构沿靠近晶体硅片背表面到远离晶体硅片背表面的方向,折射率依次由低到高,膜厚依次由高到低,进而对阳光形成多重反射,最大程度的提高了晶体硅片背表面的反射率,增强了其对阳光的再吸收,与现有技术中晶体硅片背表面只设置全铝背场相比,阳光的透射率显著降低,大大提高了晶体硅片的光电转换效率。此外,通过刻蚀接触窗,在接触窗上设置铝膜而形成的局部铝背场,与全铝背场相比,因为铝背场的高复合区域减小,其对晶体硅片背表面的少数载流子寿命的影响也相应降低,进一步提高了晶体硅片的光电转换效率。 The beneficial effect of the present invention is that the dangling bonds on the back surface of the crystalline silicon wafer are passivated through the passivation structure composed of the above three-layer film, which improves the sunlight utilization rate of the crystalline silicon wafer, and adopts the arrangement mode of the three-layer film , so that the passivation structure is along the direction from close to the back surface of the crystalline silicon wafer to far away from the back surface of the crystalline silicon wafer, the refractive index is from low to high, and the film thickness is from high to low, thereby forming multiple reflections on sunlight, which improves the maximum The reflectivity of the back surface of the crystalline silicon wafer enhances its reabsorption of sunlight. Compared with the prior art where the back surface of the crystalline silicon wafer is only provided with an all-aluminum back field, the transmittance of sunlight is significantly reduced, greatly improving the performance of the crystalline silicon wafer. photoelectric conversion efficiency. In addition, the local aluminum back field formed by etching the contact window and setting the aluminum film on the contact window, compared with the full aluminum back field, because the high recombination area of the aluminum back field is reduced, its effect on the back surface of the crystalline silicon wafer The impact of the minority carrier lifetime is also reduced accordingly, further improving the photoelectric conversion efficiency of the crystalline silicon wafer.
具体实施方式 Detailed ways
太阳能电池板是以多个太阳能电池单元电连接地集成在一个板上的形态制造,为此,首先地提供作为透明绝缘层的玻璃基板,在玻璃基板上用TCO 等材料蒸镀透明电极层。为了蒸镀透明电极层,可采用等离子体蒸镀、真空蒸镀、溅射(Sputtering) 等多种物理、化学蒸镀方法。之后,利用激光刻划机在透明电极层上进行构图,分离成多个细长带状的透明电极,然后,用a-Si 等材料蒸镀覆盖透明电极层的晶体硅片,之后,利用激光刻划机进行构图而分割成多个晶体硅片,此时,晶体硅片之间的分割槽沿着与透明电极层之间的分离槽相同的方向延长,而后,用铝等金属材料蒸镀覆盖晶体硅片的背面电极层,利用激光刻划机进行构图而分离成多个背面电极,通过如上所述的工序制作的太阳能电池板中,相互重叠着层叠的带状透明电极、晶体硅片以及背面电极成为一个单元,整体上由多个太阳能电池集成而成。由于背面电极层以填充晶体硅片之间的分割槽的方式进行蒸镀,所以,任一太阳能电池的透明电极与同该电池邻接的另一电池的背面电极连接。即,晶体硅片之间的分割槽也作为电池间的连接用槽而利用,所以基板上的所有太阳能电池相互以电连接方式串联。在串联的多个太阳能电池的两端部连接着外部电极。 A solar cell panel is manufactured in the form of a plurality of solar cell units electrically connected and integrated on one plate. For this purpose, a glass substrate as a transparent insulating layer is firstly provided, and a transparent electrode layer is evaporated on the glass substrate with TCO and other materials. In order to evaporate the transparent electrode layer, various physical and chemical evaporation methods such as plasma evaporation, vacuum evaporation, and sputtering can be used. Afterwards, patterning is carried out on the transparent electrode layer by using a laser scribing machine, and it is separated into a plurality of elongated strip-shaped transparent electrodes, and then a crystalline silicon wafer covering the transparent electrode layer is vapor-deposited with a-Si and other materials. The scribing machine performs patterning and divides into a plurality of crystalline silicon wafers. At this time, the dividing grooves between the crystalline silicon wafers are extended in the same direction as the separating grooves between the transparent electrode layers, and then vapor-deposited with metal materials such as aluminum The back electrode layer covering the crystalline silicon wafer is patterned with a laser scribing machine and separated into multiple back electrodes. In the solar cell panel manufactured through the above-mentioned process, the strip-shaped transparent electrodes and the crystalline silicon wafer are stacked on top of each other. And the back electrode becomes a unit, which is integrated by multiple solar cells as a whole. Since the back electrode layer is vapor-deposited so as to fill the dividing grooves between the crystalline silicon wafers, the transparent electrode of any solar cell is connected to the back electrode of another cell adjacent to the cell. That is, the dividing grooves between the crystalline silicon wafers are also used as the grooves for connecting cells, so all the solar cells on the substrate are electrically connected in series. External electrodes are connected to both ends of a plurality of solar cells connected in series.
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