CN104375242B - Nesting sub-ring based wavelength selection switch for silica-based micro-ring resonant cavity - Google Patents

Abstract

A nesting sub-ring based wavelength selection switch for a silica-based micro-ring resonant cavity in the technical field of optical fiber communication comprises a to-be-processed signal producing module, a wavelength selection switch module and a processed signal observation and analysis module, wherein the to-be-processed signal producing module produces a to-be-processed optical signal and inputs the to-be-processed optical signal into the input end of the wavelength selection switch module, and the output end of the wavelength selection switch module outputs a processed signal to the processed signal observation and analysis module. The nesting sub-ring based wavelength selection switch for the silica-based micro-ring resonant cavity is applied to a wavelength division multiplexing photo-communication network, and a configuration scheme is provided for the wavelength selection switch in a reconfigurable optical add drop multiplexer unit.

Description

Wavelength Selective Switching Based on Nested Sub-Ring Pairs of Silicon Microring Resonators

technical field

The invention relates to a device in the technical field of optical fiber communication, in particular to a wavelength selective switch based on a nested sub-ring pair silicon-based micro-ring resonant cavity.

Background technique

With the rapid development of the information age, the total amount of network data continues to increase, which requires more efficient data management and distribution schemes in optical communication networks based on wavelength division multiplexing technology. The reconfigurable optical add-drop multiplexing unit can provide flexible wavelength channel management and configuration technology, and is a basic component in the next-generation wavelength division multiplexing optical communication network. The wavelength selective switch is the core device in the reconfigurable optical add-drop multiplexing unit. By controlling the transmittance of each wavelength channel, the wavelength selective switch can realize flexible routing between different optical network switching nodes.

After searching the literature of the prior art, it is found that the existing wavelength selective switches are mainly divided into four categories, which are based on micro-electromechanical adjustment systems, liquid crystal gratings, silicon dioxide planar optical waveguide circuits, and silicon-based integrated optical waveguides. Compared with the other three types of wavelength selective switches, wavelength selective switches based on silicon-based integrated optical waveguides can be combined with mature complementary metal oxide semiconductor CMOS processes to achieve large-scale on-chip integration, which can greatly reduce the cost of manufacturing and development. At the same time, the high refractive index of silicon materials and the strong optical field confinement characteristics of silicon waveguides can effectively reduce the device size, which is more in line with the development trend of device miniaturization.

C.Doerr et al published "Monolithic gridless 1x2 wavelength-selective switch in silicon monolithic integrated gridless 1x2 silicon-based wavelength selective switch" at the 2011 American Optoelectronics Laser Conference CLEO and Y.Goebuchi et al. in 2008 Optics Express volume 16, pages 535-548, "Optical cross-connect circuit using hitless wavelength selective switch based on lossless wavelength selective switch optical cross-connect interconnection circuit" respectively proposed a cascaded Mach-Zehnder interferometer and a microring resonator The silicon-based wavelength selective switch, both of these two solutions realize the routing selection between different wavelength channels, but the disadvantages are that the volume is large, the overall structure is relatively complicated, and the precise coordination and alignment of multiple subunits is required, which increases the actual Difficulty of adjustment.

Chinese patent document number CN103986671, published on August 13, 2014, discloses a non-blocking 2×2 optical switching node based on a nested silicon-based microring resonator in the field of optical fiber communication technology, which is symmetrically arranged by two centers and It is composed of a nested silicon-based microring resonator with an S-shaped structure made of silicon-on-insulator. Two U-shaped waveguides opposite to the nested silicon-based microring resonator are coupled to form a directional coupler, and two U-shaped A micro-ring resonator is arranged on the outside of the waveguide; the optical switching node includes two sets of input and output ports and a total of four switching ports. However, the disadvantage of this prior art compared with the present application is that it can only realize the routing of two wavelengths to two ports, but cannot realize the routing of multiple wavelengths to two ports.

Contents of the invention

The present invention aims at the above-mentioned deficiencies in the prior art, and provides a wavelength selective switch based on nested sub-rings paired with silicon-based microring resonators. A construction scheme is provided by using a wavelength selective switch in the unit. The device overall preparation process of the present invention is compatible with the mature complementary metal oxide semiconductor CMOS process, and also has the advantages of compact structure and easy adjustment.

The present invention is realized through the following technical solutions, and the present invention includes: a signal generating module to be processed, a wavelength selective switch module and a signal observation and analysis module after processing, wherein: the signal generating module to be processed generates an optical signal to be processed and is controlled by the wavelength selective switch The input terminal of the module is input, and the output terminal of the wavelength selective switch module outputs the processed signal to the processed signal observation and analysis module;

The wavelength selective switch module is a 1×2 wavelength selective switch, which specifically includes a silicon-based microring resonator based on a structural mode of an outer ring nested sub-ring pair, in which there are simultaneously The two interacting modes of the wavelength channel are realized by adjusting the two interacting modes.

The mode of adjusting the two interacting modes refers to: adjusting the ratio of the circumference of the outer ring in the silicon-based microring resonator to the circumference of the nested sub-ring to adjust the unsplit resonance peak between the split resonance peaks number, and then adjust the transmittance of the wavelength channel to realize the opening or closing of the wavelength channel.

The transmission equations of the two output terminals of the wavelength selective switch module are respectively:

in:

r _i and κ _i , i=1,2 are the through coefficient and coupling coefficient of the directional coupler whose length is L _i , i=1,2 respectively, A and a are respectively the outer ring and a single nested sub-ring single-turn transmission rate, Ф and is the single-turn phase shift of the outer ring and the single nested sub-ring.

The single-turn phase shift Φ and This is achieved by modulating the power on the micro-nano heater chips surrounding the nested sub-ring pairs.

The optical signal to be processed is a 10Gb/s optical non-return-to-zero pseudo-random sequence.

The number of nested sub-ring pairs is 1 or more.

The signal generation module to be processed includes an adjustable laser and an electro-optical modulation module, wherein the adjustable laser generates a continuous optical carrier and the output port is connected to the input port of the electro-optic modulation module, and the electro-optic modulation module converts the electrical pseudo signal generated by the electrical signal generator The random sequence is modulated onto the optical carrier to generate the optical pseudo-random sequence to be processed.

The processed signal observation and analysis module includes: a power beam splitter, a frequency domain observation and analysis system and a time domain observation and analysis system, wherein the input end of the power beam splitter communicates with the output end of the 1×2 wavelength selective switch module, The output of the power beam splitter is respectively connected with the time-domain observation and analysis system and the frequency-domain observation and analysis system, and is respectively used for observing the eye pattern after wavelength selection processing and observing the frequency spectrum of the output signal.

The invention increases the number of nested sub-ring pairs to realize the selective opening and closing of several wavelength channels between two adjacent split resonance peaks.

The wavelength selective switch of the present invention can make full use of the space inside the resonant cavity, so that the overall structure of the device is compact, and the volume is only on the order of microns. The actual prepared silicon-based 1 contains one set of nested sub-ring pairs and two nested sub-ring pairs. The dimensions of the ×2 wavelength selective switches are only 140 μm × 40 μm and 240 μm × 40 μm, respectively. At the same time, since the wavelength selective switch proposed by the present invention selectively splits the original resonant wavelength of a single silicon-based microring resonator, it does not need to be precisely tuned compared to the wavelength selective switch based on cascaded silicon-based microring resonators. The resonance peak of each sub-ring is accurate, so the actual adjustment will be more convenient. In addition, the overall fabrication process of the device is fully compatible with the mature complementary metal-oxide-semiconductor CMOS process, which is suitable for low-cost development and large-scale integration. The feasibility of this scheme has been systematically verified by 10-Gb/s optical non-return-to-zero pseudo-random sequence. Since the 1×2 wavelength selective switch based on the nested sub-ring pair silicon-based microring resonator has many advantages above, the wavelength selective switch with this kind of structure has a good development and application prospect.

Description of drawings

Fig. 1 is a schematic diagram of the overall structure of the present invention;

In Fig. 2: (a) is a schematic structural diagram of a 1×2 wavelength selective switch based on a set of nested sub-ring pairs of silicon-based microring resonators, and (b) is a part of the nested sub-ring pairs in the dotted line box in (a). Zoom in;

In Fig. 3: (a) is based on a set of nested sub-rings to the normalized transmission spectrum of the output terminal 1 in the 1 × 2 wavelength selective switch of the silicon-based microring resonator, (b) is based on a set of nested sub-rings The normalized transmission spectrum of the output terminal 2 in the 1×2 wavelength selective switch of the ring-to-silicon-based micro-ring resonator, (c) is in the wavelength range of 1551.8nm to 1555.8nm in (a) and (b) Partial enlarged view of

In Figure 4: (a) is the micro-nano microscopic photo of the actually prepared wavelength selective switch containing a set of nested sub-ring pairs, (b) is the micro-nano microscopic photo of the wavelength selective switch containing two nested sub-ring pairs ;

In Fig. 5: (a) is the normalized transmission spectrum of the 1 × 2 wavelength selective switch output port 2 based on a set of nested sub-ring pairs of silicon-based microring resonators measured, and the solid line in (b) is the graph (a ) in the normalized transmission spectrum near λ ₁ wavelength, the dotted line is the normalized transmission spectrum obtained by fitting calculation using the scattering matrix method, (c) ~ (f) are the heaters in Fig. 4(a) respectively Normalized transmission spectrum of output 1 after applying heating power of 0.0mW, 5.8mW, 11.1mW and 16.1mW;

In Fig. 6: (a) is the measured normalized transmission spectrum of the output terminal 1 of the 1×2 wavelength selective switch based on two sets of nested sub-rings paired with the silicon-based microring resonator, and (b) to (f) are Fig. 4 (b) The normalized transmission spectrum of the output terminal 1 after applying 4.5mW, 8.8mW, 13.0mW, 17.0mW and 20.7mW heating power to the heater respectively;

Fig. 7 is the system testing device figure of embodiment 1;

In Fig. 8: (aI) and (a-II) are respectively applied 0.0mW, 5.8mW, and 11.1mW to the heater of the 1×2 wavelength selective switch of the silicon-based microring resonator based on a group of nested sub-rings and 16.1mW heating power of output end 1 and output end 2 at the wavelength λ ₁ ~ λ ₄ time-domain eye diagrams, (bI) and (b-II) are respectively when based on two groups of nested sub-rings on silicon The heaters of the 1×2 wavelength selective switch of the microring resonator respectively apply 0.0mW, 4.5mW, 8.8mW, 13.0mW, 17.0mW and 20.7mW heating power to the output terminal 1 and output terminal 2 at the wavelength λ1'～λ6 ' The time-domain eye diagram at .

detailed description

The embodiments of the present invention are described in detail below. This embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following implementation example.

Example 1

As shown in FIG. 1 , this embodiment includes: a signal generation module to be processed, a 1×2 wavelength selective switch module based on a nested sub-ring pair of silicon-based microring resonators, and a processed signal observation and analysis module. Among them, the signal generation module to be processed is connected to the input of the 1×2 wavelength selective switch module based on the nested sub-ring pair silicon-based micro-ring resonator, and the processed signal observation and analysis module is connected to the silicon-based micro-ring resonant cavity based on the nested sub-ring pair. The output of the 1×2 wavelength selective switch module of the ring resonator is connected to each other.

(a) in Fig. 2 is a schematic diagram of the device structure of a 1×2 wavelength selective switch based on a group of nested sub-ring pairs of silicon-based microring resonators. By introducing nested sub-ring pairs into a single silicon-based microring resonator, two modes propagating in opposite directions exist simultaneously in the same resonator. The mutual coupling and interaction between these two modes will cause resonance splitting at some wavelengths of the outer ring resonator, thereby changing the transmittance of the original wavelength channel, and realizing the opening or closing of the wavelength channel. According to the derivation and calculation of the scattering matrix method, the transmission equations of output terminal 1 and output terminal 2 in Figure 2 are respectively:

Among them: M _T and M _D respectively represent the transmission equations of the nested sub-rings to the transmission end and the reflection end, which can be expressed as:

Among them: r _i and κ _i , i=1, 2 are the through coefficient and coupling coefficient of the directional coupler whose length is L _i , i=1, 2 respectively, A and a are the outer ring and a single nested sub The single-turn transmission rate of the ring, Ф and is the single-turn phase shift of the outer ring and the single nested sub-ring. In practice, Ф and value, and then change the position of the split resonance wavelength without moving the outer ring resonance wavelength, so as to realize the routing of different wavelengths. The simulation results show that when the slit width is 0.18 μm, the linear coupling lengths L ₁ = 4 μm, L ₂ = 2 μm, the nested sub-ring radius R = 10 μm, and the perimeter ratio of the inner and outer rings is equal to 4, the device output 1 and the output The extinction ratios of end 2 are 18dB and 20dB, respectively. The extinction ratio can be further increased by increasing the coupling between the nested sub-ring pairs and the outer ring or by reducing the loss of the device.

As shown in FIG. 4 , the microscopic photos of the 1×2 wavelength selective switch based on a silicon-based microring resonator based on one set and two sets of nested sub-ring pairs. The device to be tested is fabricated on a silicon-on-insulator wafer, and the thickness of the top silicon is 220nm. The overall structure of the device is completed by 248-nm deep ultraviolet lithography and subsequent plasma deep silicon etching process. The input and output ports of the device are coupled with a single-mode optical fiber by a grating coupler. The prepared thermo-optic effect micro-nano heating plate partially overlaps with the nested sub-ring pair, so as to adjust the position of the split resonance peak through the thermo-optic effect and realize the routing selection of the wavelength.

For the 1 × 2 wavelength selective switch based on silicon-based microring resonators containing one and two sets of nested sub-ring pairs, four and six system tests are respectively designed and demonstrated to prove the feasibility of the present invention: 1) for A 1×2 wavelength selective switch based on a silicon-based microring resonator with a set of nested sub-ring pairs, and observe four wavelength channels λ after applying 0.0mW, 5.8mW, 11.1mW and 16.1mW heating power to the micro-nano heater The eye diagram at ₁ ~ λ ₄ , 2) For the 1×2 wavelength selective switch of the silicon-based micro-ring resonator based on two sets of nested sub-ring pairs, apply 0.0mW, 4.5mW, 8.8mW to the micro-nano heater respectively , After 13.0mW, 17.0mW and 20.7mW heating power, observe the eye patterns at the six wavelength channels λ1'～λ6'. The eye diagrams of the output terminal 1 and output terminal 2 of each group of experiments in the test are shown in Figures 7 and 8. It can be seen that the measured structure has proved that the device proposed by the present invention can realize the routing selection function of the wavelength channel, which is very good The feasibility of the 1×2 wavelength selective switch based on the nested sub-ring pair silicon-based microring resonator proposed by the present invention is proved.

Claims (7)

1. A wavelength selective switch based on nested sub-rings to silicon-based microring resonators, comprising: a signal generation module to be processed, a wavelength selective switch module and a signal observation and analysis module after processing, wherein: the signal to be processed The generating module generates the optical signal to be processed and is input by the input terminal of the wavelength selective switch module, and the output terminal of the wavelength selective switch module outputs the processed signal to the processed signal observation and analysis module; The wavelength selective switch module is a 1×2 wavelength selective switch, which specifically includes a silicon-based microring resonator based on a structural mode of an outer ring nested sub-ring pair, in which there are simultaneously The two interacting modes of the silicon-based microring resonator adjust the ratio of the circumference of the outer ring to the circumference of the nested sub-ring to adjust the number of unsplit resonance peaks between the split resonance peaks, and then adjust the wavelength channel Transmittance, to realize the opening or closing of the wavelength channel. 2. The wavelength selective switch based on nested sub-rings to silicon-based microring resonators according to claim 1, wherein the transmission equations of the two output terminals of the 1 × 2 wavelength selective switch module are respectively: ${\mathrm{<span\; class="notranslate">\; T</span>}}_{\mathrm{<span\; class="notranslate">\; o</span>}\mathrm{<span\; class="notranslate">\; u</span>}\mathrm{<span\; class="notranslate">\; T</span>}\mathrm{<span\; class="notranslate">\; 1</span>}}<span\; class="notranslate">\; =</span>\frac{<span\; class="notranslate">\; -</span>\sqrt{\mathrm{<span\; class="notranslate">\; A</span>}}{\mathrm{<span\; class="notranslate">\; \&kappa;</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; e</span>}}^{\mathrm{<span\; class="notranslate">\; i</span>}\mathrm{<span\; class="notranslate">\; \&Phi;</span>}<span\; class="notranslate">\; /</span>\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; m</span>}}_{\mathrm{<span\; class="notranslate">\; T</span>}}<span\; class="notranslate">\; \&lsqb;</span>\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; Ar</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; e</span>}}^{\mathrm{<span\; class="notranslate">\; i</span>}\mathrm{<span\; class="notranslate">\; \&Phi;</span>}}<span\; class="notranslate">\; (</span>{\mathrm{<span\; class="notranslate">\; m</span>}}_{\mathrm{<span\; class="notranslate">\; T</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; m</span>}}_{\mathrm{<span\; class="notranslate">\; D.</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; \&rsqb;</span>}{\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; -</span>\mathrm{<span\; class="notranslate">\; 2</span>}{\mathrm{<span\; class="notranslate">\; Ar</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; e</span>}}^{\mathrm{<span\; class="notranslate">\; i</span>}\mathrm{<span\; class="notranslate">\; \&Phi;</span>}}<span\; class="notranslate">\; +</span>{\mathrm{<span\; class="notranslate">\; A</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; r</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}^{\mathrm{<span\; class="notranslate">\; 4</span>}}{\mathrm{<span\; class="notranslate">\; e</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}\mathrm{<span\; class="notranslate">\; i</span>}\mathrm{<span\; class="notranslate">\; \&Phi;</span>}}{<span\; class="notranslate">\; (</span>{\mathrm{<span\; class="notranslate">\; m</span>}}_{\mathrm{<span\; class="notranslate">\; T</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; m</span>}}_{\mathrm{<span\; class="notranslate">\; D.</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; )</span>}^{\mathrm{<span\; class="notranslate">\; 2</span>}}}<span\; class="notranslate">\; ,</span>{\mathrm{<span\; class="notranslate">\; T</span>}}_{\mathrm{<span\; class="notranslate">\; o</span>}\mathrm{<span\; class="notranslate">\; u</span>}\mathrm{<span\; class="notranslate">\; T</span>}\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; =</span>\frac{{\mathrm{<span\; class="notranslate">\; r</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}<span\; class="notranslate">\; \&lsqb;</span>\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; -</span>\mathrm{<span\; class="notranslate">\; 2</span>}{\mathrm{<span\; class="notranslate">\; Ae</span>}}^{\mathrm{<span\; class="notranslate">\; i</span>}\mathrm{<span\; class="notranslate">\; \&Phi;</span>}}<span\; class="notranslate">\; +</span>{\mathrm{<span\; class="notranslate">\; A</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; r</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; e</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}\mathrm{<span\; class="notranslate">\; i</span>}\mathrm{<span\; class="notranslate">\; \&Phi;</span>}}{<span\; class="notranslate">\; (</span>{\mathrm{<span\; class="notranslate">\; m</span>}}_{\mathrm{<span\; class="notranslate">\; T</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; m</span>}}_{\mathrm{<span\; class="notranslate">\; D.</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; )</span>}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; \&rsqb;</span>}{\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; -</span>\mathrm{<span\; class="notranslate">\; 2</span>}{\mathrm{<span\; class="notranslate">\; Ar</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; e</span>}}^{\mathrm{<span\; class="notranslate">\; i</span>}\mathrm{<span\; class="notranslate">\; \&Phi;</span>}}<span\; class="notranslate">\; +</span>{\mathrm{<span\; class="notranslate">\; A</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}{\mathrm{<span\; class="notranslate">\; r</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}^{\mathrm{<span\; class="notranslate">\; 4</span>}}{\mathrm{<span\; class="notranslate">\; e</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}\mathrm{<span\; class="notranslate">\; i</span>}\mathrm{<span\; class="notranslate">\; \&Phi;</span>}}{<span\; class="notranslate">\; (</span>{\mathrm{<span\; class="notranslate">\; m</span>}}_{\mathrm{<span\; class="notranslate">\; T</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; m</span>}}_{\mathrm{<span\; class="notranslate">\; D.</span>}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; )</span>}^{\mathrm{<span\; class="notranslate">\; 2</span>}}}<span\; class="notranslate">\; ,</span>$ in: r _i and κ _i , i=1,2 are the through coefficient and coupling coefficient of the directional coupler whose length is L _i , i=1,2 respectively, A and a are respectively the outer ring and a single nested sub-ring single-turn transmission rate, Ф and is the single-turn phase shift of the outer ring and the single nested sub-ring. 3. The wavelength selective switch based on nested sub-rings to silicon-based microring resonators according to claim 2, characterized in that, the single-turn phase shift Φ and This is achieved by modulating the power on the micro-nano heater chips surrounding the nested sub-ring pairs. 4 . The wavelength selective switch based on nested sub-ring pairs of silicon-based microring resonators according to claim 2 , wherein the optical signal to be processed is a 10Gb/s optical non-return-to-zero pseudo-random sequence. 5. The wavelength selective switch based on nested sub-ring pairs according to claim 3 or 4, wherein the number of said nested sub-ring pairs is at least one pair. 6. The wavelength selective switch based on nested sub-rings to silicon-based microring resonators according to claim 5, wherein said signal generation module to be processed includes an adjustable laser and an electro-optical modulation module, wherein the The laser modulation device generates continuous optical carrier and the output port is connected to the input port of the electro-optical modulation module. The electro-optic modulation module modulates the electrical pseudo-random sequence generated by the electrical signal generator onto the optical carrier to generate the optical pseudo-random sequence to be processed. 7. The wavelength selective switch based on nested sub-rings to silicon-based microring resonators according to claim 5, wherein the signal observation and analysis module after processing includes: power beam splitter, frequency domain observation and analysis system and time-domain observation and analysis system, wherein, the input end of the power beam splitter communicates with the output end of the 1×2 wavelength selective switch module, and the output of the power beam splitter is respectively connected with the time-domain observation and analysis system and the frequency-domain observation and analysis system , which are used to observe the eye diagram after wavelength selection processing and observe the spectrum of the output signal respectively.