CN104358979A - Split type ultra-precision aerostatic uniaxial rotary table - Google Patents
Split type ultra-precision aerostatic uniaxial rotary table Download PDFInfo
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Abstract
本发明是一种分体式超精密空气静压单轴转台，包括转台回转轴系、驱动轴系和工作台面，还包括有空气静压联轴节，所述驱动轴系通过空气静压联轴节连接并驱动转台回转轴系，所述工作台面同轴固接在转台回转轴系上，所述驱动轴系内设置有密珠轴承，所述密珠轴承的轴孔与驱动电机同轴固接，所述空气静压联轴节与密珠轴承的同轴固接，所述转台回转轴系内设置有径向空气静压轴承，所述径向空气静压轴承与空气静压联轴节同轴固接，在所述空气静压轴承的轴孔端面处同轴设置有止推空气静压轴承。采用本发明技术方案，安装精度要求降低，装调工艺简化，转台的回转精度和平面定位精度高，空气静压联轴节具有自动微调能力，运动精度高。
The invention is a split-type ultra-precision air static pressure single-axis turntable, which includes a rotary shaft system of the turntable, a drive shaft system and a working table, and also includes an air static pressure coupling, and the drive shaft system passes through the air static pressure coupling The joint is connected and drives the rotary shaft system of the turntable. The working table is coaxially fixed on the rotary shaft system of the turntable. A dense ball bearing is arranged in the drive shaft system. The shaft hole of the dense ball bearing is fixed coaxially with the drive motor. Then, the aerostatic coupling is coaxially fixed with the dense ball bearing, and the radial aerostatic bearing is arranged in the rotary shaft system of the turntable, and the radial aerostatic bearing and the aerostatic coupling The joints are coaxially fixed, and a thrust aerostatic bearing is coaxially arranged at the end face of the shaft hole of the aerostatic bearing. By adopting the technical solution of the invention, the requirements for installation accuracy are reduced, the assembly and adjustment process is simplified, the rotation accuracy of the turntable and the plane positioning accuracy are high, and the aerostatic coupling has automatic fine-tuning capability and high motion accuracy.
Description
技术领域 technical field
本发明属于一种超精密传动技术领域，具体涉及一种分体式超精密空气静压单轴转台。 The invention belongs to the technical field of ultra-precision transmission, and in particular relates to a split-type ultra-precision air static pressure single-axis turntable.
背景技术 Background technique
在超精密传动技术领域中，超精密单轴转台是精密机械技术领域的核心基础元件，它为各类高精密科学仪器、设备提供了超精密回转运动基准与角位移计量基准，是衡量精密机械系统技术性能的主要技术指标之一。超精密单轴转台的研制过程涵盖了机械工程、电子工程、机构动力学、材料科学、精密工程设计、精密超精密工艺技术、精密超精密检测技术等众多学科和技术领域，凝聚了众多学科和领域的最新科技成果，它是现代设计技术、现代先进制造技术的综合体现和具体实践。传统的单轴转台结构由于自身结构特点等原因，要求结构安装精度高，装调工艺复杂，并且振动、冲击等不良影响通过传动结构的传递，直接影响转台的运动精度，这是现有传动结构不可避免的。 In the field of ultra-precision transmission technology, the ultra-precision single-axis turntable is the core basic component in the field of precision machinery technology. It provides ultra-precision rotary motion benchmarks and angular displacement measurement benchmarks for various high-precision scientific instruments and equipment. One of the main technical indicators of system technical performance. The development process of the ultra-precision single-axis turntable covers many disciplines and technical fields such as mechanical engineering, electronic engineering, mechanism dynamics, material science, precision engineering design, precision ultra-precision technology, precision ultra-precision detection technology, etc. It is the comprehensive embodiment and specific practice of modern design technology and modern advanced manufacturing technology. Due to its structural characteristics and other reasons, the traditional single-axis turntable structure requires high structural installation accuracy, complex assembly and adjustment process, and the transmission of vibration, impact and other adverse effects through the transmission structure directly affects the motion accuracy of the turntable. This is the existing transmission structure. inevitable.
本发明中的分体式超精密空气静压单轴转台采用空气静压技术设计整体结构，转台回转轴系采用空气静压轴承，径向空气静压轴承保证转台径向跳动量的控制，提高转台的回转精度；止推空气静压轴承保证转台端面跳动量的控制，提高转台的平面定位精度。驱动轴系采用高刚性的密珠轴系结构，提供准确、恒定的驱动力。在驱动轴系与转台回转轴系之间通过空气静压联轴节相连接，简洁有效的减小了驱动系统产生的振动、冲击等对从动部件运动的影响，由于分体式超精密空气静压单轴转台可以通过气膜等自身进行微量的位置调整，安装精度要求可以大大降低。 The split-type ultra-precision air static pressure single-axis turntable in the present invention adopts air static pressure technology to design the overall structure, and the rotary shaft system of the turntable adopts air static pressure bearings, and the radial air static pressure bearings ensure the control of the radial runout of the turntable, and improve the accuracy of the turntable. Rotation accuracy; the thrust aerostatic bearing ensures the control of the runout of the end face of the turntable and improves the plane positioning accuracy of the turntable. The drive shaft system adopts a highly rigid dense ball shaft structure to provide accurate and constant driving force. The drive shaft system and the rotary shaft system of the turntable are connected by an aerostatic coupling, which simply and effectively reduces the impact of the vibration and impact generated by the drive system on the movement of the driven parts. Due to the split ultra-precision aerostatic The single-axis rotary table can be adjusted in a small amount through the air film itself, and the installation accuracy requirements can be greatly reduced.
发明内容 Contents of the invention
本发明的目的在于克服现有技术存在的问题，提供种分体式超精密空气静压单轴转台，该装置克服传统单轴转台现有技术存在的振动、倾斜、安装要求精度高，装调工艺复杂等缺点，转台回转轴系与驱动轴系分体独立装调好后通过空气静压联轴节相连接，可实现将驱动系统提供的驱动力恒定、准确的传递给转台回转结构，安装精度要求降低，装调工艺大大简化，在运动过程中静压腔中气膜可以微量的自动调整位置和姿态，不会产生侧向、径向的摆动，运行平稳，系统可靠性高。 The purpose of the present invention is to overcome the problems existing in the prior art and provide a split-type ultra-precision aerostatic single-axis turntable. Complicated and other shortcomings, the rotary shaft system of the turntable and the drive shaft system are separately installed and adjusted, and then connected by an aerostatic coupling, which can realize the constant and accurate transmission of the driving force provided by the drive system to the rotary structure of the turntable, and the installation accuracy The requirements are reduced, and the assembly and adjustment process is greatly simplified. During the movement, the air film in the static pressure chamber can automatically adjust the position and attitude in a small amount, without lateral and radial swings, stable operation, and high system reliability.
为实现上述技术目的，达到上述技术效果，本发明通过以下技术方案实现： In order to achieve the above-mentioned technical purpose and achieve the above-mentioned technical effect, the present invention is realized through the following technical solutions:
一种分体式超精密空气静压单轴转台，包括转台回转轴系、驱动轴系和工作台面，还包括有空气静压联轴节，所述驱动轴系通过空气静压联轴节连接并驱动转台回转轴系，所述工作台面同轴固接在转台回转轴系上，所述驱动轴系内设置有密珠轴承，所述密珠轴承的轴孔与驱动电机同轴固接，所述空气静压联轴节与密珠轴承通过定位子口保证同轴，并用螺钉紧固，所述转台回转轴系内设置有径向空气静压轴承，所述径向空气静压轴承与空气静压联轴节通过定位子口保证同轴，并用螺钉紧固，在所述空气静压轴承的轴孔端面处同轴设置有止推空气静压轴承。 A split-type ultra-precision air static pressure single-axis turntable, including the rotary shaft system of the turntable, the drive shaft system and the work table, and also includes the air static pressure coupling, and the drive shaft system is connected through the air static pressure coupling and Drive the rotary shaft system of the turntable, the worktable surface is coaxially fixed on the rotary shaft system of the turntable, the dense ball bearing is arranged in the drive shaft system, the shaft hole of the dense ball bearing is coaxially fixed with the driving motor, the The air static pressure coupling and the dense ball bearing are coaxial through the positioning hole, and are fastened with screws. The radial air static pressure bearing is arranged in the rotary shaft system of the turntable, and the radial air static pressure bearing and the air The static pressure coupling ensures coaxiality through the positioning spigot, and is fastened with screws, and a thrust aerostatic bearing is arranged coaxially at the end face of the shaft hole of the aerostatic bearing.
进一步的，所述驱动轴系包括有驱动轴系机座，所述密珠轴承同轴安装在驱动轴系机座的轴孔内。 Further, the drive shaft system includes a drive shaft system frame, and the dense ball bearing is coaxially installed in the shaft hole of the drive shaft frame frame.
进一步的，所述转台回转轴系包括转台回转轴系机座，所述径向空气静压轴承同轴安装在空气静压轴系外套的轴孔内，空气静压轴系外套同轴安装在转台回转轴系机座的轴孔内。 Further, the rotary shafting of the turntable includes a base of the rotary shafting of the turntable, the radial aerostatic bearing is coaxially installed in the shaft hole of the aerostatic shafting casing, and the aerostatic shafting casing is coaxially installed in the back of the turntable. In the shaft hole of the shaft system base.
进一步的，所述驱动轴系机座底端设置有多个用于调整驱动轴系水平的调平地脚。 Further, a plurality of leveling feet for adjusting the level of the drive shaft system are provided at the bottom end of the drive shaft system base.
进一步的，所述驱动轴系机座顶端设置有多个用于调整转台回转轴系与驱动轴系的相对位置的调平支撑座。 Further, the top of the drive shaft base is provided with a plurality of leveling support seats for adjusting the relative positions of the rotary shaft of the turntable and the drive shaft.
进一步的，所述调平地脚用于调平驱动轴系。 Further, the leveling feet are used for leveling the drive shaft system.
进一步的，所述调平支撑座用于调平转台回转轴系。 Further, the leveling support base is used for leveling the rotary shaft system of the turntable.
本发明的有益效果是: The beneficial effects of the present invention are:
1、分体式超精密空气静压单轴转台可独立保证转台回转轴系、驱动轴系、空气静压联轴节的结构精度，安装精度要求降低，装调工艺大大简化。 1. The split-type ultra-precision air static pressure single-axis turntable can independently guarantee the structural accuracy of the rotary shaft system, drive shaft system, and air static pressure coupling of the turntable, the installation accuracy requirements are reduced, and the assembly and adjustment process is greatly simplified.
2、转台回转轴系采用采用空气静压轴承，径向空气静压轴承保证转台径向跳动量的控制，提高转台的回转精度；止推空气静压轴承保证转台端面跳动量的控制，提高转台的平面定位精度。 2. The rotary shaft system of the turntable adopts air static pressure bearings. The radial air static pressure bearings ensure the control of the radial runout of the turntable and improve the rotation accuracy of the turntable; plane positioning accuracy.
3、空气静压联轴节装置在正常工作状态下，空气静压止推板在静压腔中可以微量的自动调整位置和姿态，保证空气静压联轴节运动的精度，不会产生侧向、径向的摆动，在垂直方向上也不存在旋转运动等。 3. Under the normal working condition of the air static pressure coupling device, the air static pressure thrust plate can automatically adjust the position and attitude in a small amount in the static pressure chamber, so as to ensure the accuracy of the air static pressure coupling movement without sideways Direct and radial swings, and there is no rotational movement in the vertical direction.
附图说明 Description of drawings
图1为本发明整体结构立体图； Fig. 1 is a perspective view of the overall structure of the present invention;
图2为本发明整体结构剖视图； Fig. 2 is a sectional view of the overall structure of the present invention;
图3为本发明转台回转轴系示意视图； Fig. 3 is a schematic view of the rotary shaft system of the turntable of the present invention;
图4为本发明转台驱动轴系示意视图； Fig. 4 is a schematic view of the drive shaft system of the turntable of the present invention;
图5为本发明空气静压联轴节结构示意视图； Fig. 5 is a schematic view of the structure of the aerostatic coupling of the present invention;
图6为本发明工作台面结构示意图。 Fig. 6 is a schematic diagram of the structure of the working table of the present invention.
图中标号说明：1、转台回转轴系，2、空气静压联轴节，3、调平支撑座，4、驱动轴系，5、调平地脚，6、驱动轴系机座，7、驱动电机，8、密珠轴系，9、转台回转轴系机座，10、空气静压轴系外套，11、径向空气静压轴承，12、止推空气静压轴承，13、工作台面。 Explanation of symbols in the figure: 1. Turntable rotary shafting, 2. Aerostatic pressure coupling, 3. Leveling support base, 4. Driving shafting, 5. Leveling feet, 6. Driving shafting base, 7. Drive motor, 8. dense ball shafting, 9. turntable rotary shafting base, 10. aerostatic shafting jacket, 11. radial aerostatic bearing, 12. thrust aerostatic bearing, 13. working table.
具体实施方式 Detailed ways
下面将参考附图并结合实施例，来详细说明本发明。 The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.
参照图1至图6所示，一种分体式超精密空气静压单轴转台，包括转台回转轴系1、驱动轴系4和工作台面13，还包括有空气静压联轴节2，所述驱动轴系4通过空气静压联轴节2连接并驱动转台回转轴系1，所述工作台面13同轴固接在转台回转轴系1上，所述驱动轴系4内设置有密珠轴承8，所述密珠轴承8的轴孔与驱动电机7同轴固接，所述空气静压联轴节2与密珠轴承8通过定位子口保证同轴，并用螺钉紧固，所述转台回转轴系1内设置有径向空气静压轴承11，所述径向空气静压轴承11与空气静压联轴节2通过定位子口保证同轴，并用螺钉紧固，在所述空气静压轴承11的轴孔端面处同轴设置有止推空气静压轴承12。 Referring to Figures 1 to 6, a split-type ultra-precision aerostatic single-axis turntable includes a turntable rotary shaft system 1, a drive shaft system 4, and a working table 13, and also includes an air static pressure coupling 2. The drive shaft system 4 is connected to and drives the rotary shaft system 1 of the turntable through the aerostatic coupling 2, the working table surface 13 is coaxially fixed on the rotary shaft system 1 of the turntable, and the drive shaft system 4 is provided with dense beads Bearing 8, the shaft hole of the dense ball bearing 8 is coaxially fixed with the drive motor 7, the aerostatic coupling 2 and the dense ball bearing 8 are coaxial through the positioning slot, and are fastened with screws. The rotary shaft system 1 of the turntable is equipped with a radial air static pressure bearing 11, and the radial air static pressure bearing 11 and the air static pressure coupling 2 are coaxially ensured through the positioning slot, and are fastened with screws. A thrust aerostatic bearing 12 is coaxially arranged on the end face of the shaft hole of the static pressure bearing 11 .
在本实施例中，将密珠轴系8同轴安装在驱动轴系机座6的轴孔内，保证轴系的回转精度及端面跳动量在要求范围内；进一步的将驱动电机7与密珠轴系8同轴安装后固定，保证驱动轴系4在电机工作状态下运行平稳、无振动、无噪音等。 In this embodiment, the dense ball shaft system 8 is coaxially installed in the shaft hole of the drive shaft system base 6 to ensure that the rotation accuracy of the shaft system and the runout of the end surface are within the required range; further, the drive motor 7 and the dense The bead shaft system 8 is coaxially installed and then fixed to ensure that the drive shaft system 4 runs smoothly, without vibration and noise, etc. under the working state of the motor.
将调平地脚5安装到装配后的驱动轴系4指定支撑位置，通过调整调平地脚5的高低及角度，调整驱动轴系4的水平。 Install the leveling foot 5 to the designated support position of the assembled drive shaft 4, and adjust the level of the drive shaft 4 by adjusting the height and angle of the leveling foot 5.
将调平支撑座3固定安装到驱动轴系4的支撑位置，通过调整调平支撑座3的高低及角度，调整水平。 Fix the leveling support base 3 to the support position of the drive shaft system 4, and adjust the level by adjusting the height and angle of the leveling support base 3.
将空气静压联轴节2同轴安装在驱动轴系4的输出轴端。 The aerostatic pressure coupling 2 is coaxially installed on the output shaft end of the drive shaft system 4 .
将空气静压轴系外套10同轴安装在转台回转轴系机座9的轴孔内，进一步的，将径向空气静压轴承11同轴安装在空气静压轴系外套10的轴孔内，保证轴系的回转精度及端面跳动量在要求范围内；进一步的止推空气静压轴承12同轴安装在径向空气静压轴承11的轴孔端面处，保证轴系的回转精度及端面跳动量在要求范围内；保证转台回转轴系1在工作状态下运行平稳、无振动、无噪音等。 The aerostatic shafting outer casing 10 is coaxially installed in the shaft hole of the rotary shafting base 9 of the turntable, and further, the radial aerostatic bearing 11 is coaxially installed in the shaft hole of the aerostatic shafting outer casing 10 to ensure The rotation accuracy and end surface runout of the shafting system are within the required range; the further thrust aerostatic bearing 12 is coaxially installed on the end surface of the shaft hole of the radial aerostatic bearing 11 to ensure the rotation accuracy and end surface runout of the shafting system Within the required range; ensure that the rotary shaft system 1 of the turntable runs smoothly, without vibration and noise, etc. under working conditions.
将工作台面13同轴固定安装在转台回转轴系1上，保证工作台面13的回转精度及端面跳动量在要求范围内。 The worktable 13 is coaxially and fixedly installed on the rotary shaft system 1 of the turntable to ensure that the rotation accuracy of the worktable 13 and the runout of the end surface are within the required range.
将转台回转轴系1与空气静压联轴节2同轴安装，并将转台回转轴系1固定安装到调平支撑座3的支撑位置；调整转台回转轴系1与驱动轴系4的相对位置，当驱动轴系4提供驱动力时，通过空气静压联轴节2可以将驱动力恒定、准确、平稳的传递给转台回转轴系1，保证系统工作状态下运行平稳、无振动、无噪音等。 Install the turntable rotary shaft system 1 coaxially with the aerostatic coupling 2, and fix the turntable rotary shaft system 1 to the support position of the leveling support base 3; adjust the relative position between the turntable rotary shaft system 1 and the drive shaft system 4 position, when the driving shaft system 4 provides the driving force, the driving force can be transmitted to the turntable rotary shafting system 1 in a constant, accurate and stable manner through the aerostatic coupling 2, ensuring that the system runs smoothly, without vibration and without vibration. noise etc.
以上所述仅为本发明的优选实施例而已，并不用于限制本发明，对于本领域的技术人员来说，本发明可以有各种更改和变化。凡在本发明的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。 The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.
Claims (7)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410588399.XA CN104358979B (en) | 2014-10-29 | 2014-10-29 | A kind of split type ultraprecise static air pressure single axle table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410588399.XA CN104358979B (en) | 2014-10-29 | 2014-10-29 | A kind of split type ultraprecise static air pressure single axle table |
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| Publication Number | Publication Date |
|---|---|
| CN104358979A true CN104358979A (en) | 2015-02-18 |
| CN104358979B CN104358979B (en) | 2016-08-31 |
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| CN201410588399.XA Active CN104358979B (en) | 2014-10-29 | 2014-10-29 | A kind of split type ultraprecise static air pressure single axle table |
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| CN109356998A (en) * | 2018-12-12 | 2019-02-19 | 中核新科（天津） 精密机械制造有限公司 | The close roller shafting of retarder heavy duty |
| CN109356999A (en) * | 2018-12-12 | 2019-02-19 | 中核新科（天津） 精密机械制造有限公司 | The close roller shafting of retarder high precision overloading |
| CN109386590A (en) * | 2018-12-12 | 2019-02-26 | 中核新科（天津） 精密机械制造有限公司 | Retarder high precision dense bead shafting |
| CN113124055A (en) * | 2021-04-27 | 2021-07-16 | 北京工业大学 | Air-float thrust bearing based on radial dense-bead adsorption |
| CN117086655A (en) * | 2023-10-19 | 2023-11-21 | 无锡星微科技有限公司杭州分公司 | High-precision microminiature air static pressure air floatation turntable |
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| CN109356998A (en) * | 2018-12-12 | 2019-02-19 | 中核新科（天津） 精密机械制造有限公司 | The close roller shafting of retarder heavy duty |
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| CN117086655A (en) * | 2023-10-19 | 2023-11-21 | 无锡星微科技有限公司杭州分公司 | High-precision microminiature air static pressure air floatation turntable |
| CN117086655B (en) * | 2023-10-19 | 2024-01-19 | 无锡星微科技有限公司杭州分公司 | High-precision microminiature air static pressure air floatation turntable |
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