CN104345328A - Radiation detection circuit - Google Patents
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Abstract
本发明提供了一种辐射探测电路,包括:用于感测待测辐射的第一PMOS晶体管;与第一PMOS晶体管连接的第一放大器;不感测待测辐射的第二PMOS晶体管;与第二PMOS晶体管相连的第二放大器;以及比较模块,用于将第一放大器和第二放大器的输出进行比较,并将其差值进行放大输出。本发明简化了辐射探测电路的结构,与现有技术相比极大地降低了功耗。
The present invention provides a radiation detection circuit, comprising: a first PMOS transistor for sensing radiation to be measured; a first amplifier connected to the first PMOS transistor; a second PMOS transistor not to sense radiation to be measured; and a second a second amplifier connected to the PMOS transistor; and a comparison module, used to compare the outputs of the first amplifier and the second amplifier, and amplify the difference for output. The invention simplifies the structure of the radiation detection circuit and greatly reduces the power consumption compared with the prior art.
Description
技术领域 technical field
本发明涉及半导体技术领域,尤其涉及一种辐射探测电路。 The invention relates to the technical field of semiconductors, in particular to a radiation detection circuit. the
背景技术 Background technique
在太空中,很多电子设备都会暴露在一定的辐射环境下。为了保证这些电子设备的可靠性,对总剂量辐射的检测很有必要。因为一旦辐射总剂量超过某一额度,就会导致电子系统的失效。 In space, many electronic devices will be exposed to certain radiation environments. In order to ensure the reliability of these electronic devices, it is necessary to detect the total dose of radiation. Because once the total radiation dose exceeds a certain amount, it will cause the failure of the electronic system. the
PMOS总剂量辐射探测器主要包括由特定工艺制成的辐射敏感场效应晶体管。由于辐射后产生的氧化物陷阱与界面陷阱电荷使得MOSFET阈值电压发生漂移。通过标定阈值电压漂移量与辐照剂量的关系,测出阈值电压漂移量得到辐射剂量的大小。一般说来,NMOS辐射后,氧化物陷阱电荷使其阈值电压发生负向漂移,但是界面电荷使其阈值电压发生正向漂移;PMOS辐射后产生的氧化物陷阱电荷和界面电荷都使得其阈值电压负向漂移,因此大部分的总剂量辐射探测电路一般采用PMOS场效应晶体管作为总剂量辐射探测器。 PMOS total dose radiation detectors mainly include radiation-sensitive field-effect transistors made by a specific process. The MOSFET threshold voltage drifts due to oxide traps and interface trap charges generated after irradiation. By calibrating the relationship between the threshold voltage drift and the radiation dose, the threshold voltage drift is measured to obtain the radiation dose. Generally speaking, after NMOS is irradiated, oxide trap charges cause its threshold voltage to shift negatively, but interface charges cause its threshold voltage to shift positively; both oxide trap charges and interface charges generated after PMOS radiation make its threshold voltage Negative drift, so most of the total dose radiation detection circuits generally use PMOS field effect transistors as the total dose radiation detector. the
由上述原理可知,可以根据pMOS晶体管阈值电压产生的变化设计出电路,使之能够反映出所受总剂量辐射环境的大小。如图1所示,为现有技术的探测电路示意图,该读出电路由四个主要的模块构成,能够将模拟信号转化为数字信号输出。因此这个探测电路为了满足某些数字自动化系统而过于复杂。但是在一般的应用中,并不需要AD转换。 From the above principles, it can be known that the circuit can be designed according to the change of the threshold voltage of the pMOS transistor, so that it can reflect the size of the total dose radiation environment. As shown in FIG. 1 , it is a schematic diagram of a detection circuit in the prior art. The readout circuit is composed of four main modules, which can convert an analog signal into a digital signal for output. Therefore this detection circuit is too complex to satisfy some digital automation systems. But in general application, AD conversion is not needed. the
因此,希望提出一种能应用在实验室中,较为简单的pMOS总剂量辐射监测电路。 Therefore, it is hoped to propose a relatively simple pMOS total dose radiation monitoring circuit that can be applied in the laboratory. the
发明内容 Contents of the invention
本发明的一个目的是提供一种结构更简单、功耗更低的辐射探测电路。 An object of the present invention is to provide a radiation detection circuit with simpler structure and lower power consumption. the
本发明提供了一种一种辐射探测电路,包括:用于感测待测辐射的第一PMOS晶体管;与第一PMOS晶体管连接的第一放大器;不感测待测辐射的第二PMOS晶体管;与第二PMOS晶体管相连的第二放大器;以及比较模块,用于将第一放大器和第二放大器的输出进行比较,并将其差值进行放大输出。 The present invention provides a radiation detection circuit, comprising: a first PMOS transistor for sensing radiation to be measured; a first amplifier connected to the first PMOS transistor; a second PMOS transistor not to sense radiation to be measured; and a second amplifier connected to the second PMOS transistor; and a comparison module, used to compare the outputs of the first amplifier and the second amplifier, and amplify and output the difference. the
可选地,第一放大器是运算放大器,所述第一PMOS晶体管的源极接电源电压,漏极连接第一放大器的共模输入端,栅极连接所述第一放大器的差模输入端,所述第一放大器的输出连接所述比较模块的共模输入端。 Optionally, the first amplifier is an operational amplifier, the source of the first PMOS transistor is connected to the power supply voltage, the drain is connected to the common-mode input terminal of the first amplifier, and the gate is connected to the differential-mode input terminal of the first amplifier, The output of the first amplifier is connected to the common mode input terminal of the comparison module. the
可选地,所述第一PMOS晶体管的栅极和第一放大器的差模输入端之间存在第一稳流电阻。 Optionally, there is a first ballast resistor between the gate of the first PMOS transistor and the differential mode input terminal of the first amplifier. the
可选地,第二放大器是运算放大器,所述第二PMOS晶体管的源极接电源电压,漏极连接第二放大器的差模输入端,栅极连接所述第二放大器的共模输入端,所述第二放大器的输出连接所述比较模块的差模输入端。 Optionally, the second amplifier is an operational amplifier, the source of the second PMOS transistor is connected to the power supply voltage, the drain is connected to the differential mode input terminal of the second amplifier, and the gate is connected to the common mode input terminal of the second amplifier, The output of the second amplifier is connected to the differential mode input terminal of the comparison module. the
可选地,所述第二PMOS晶体管的栅极和第二放大器的共模输入端之间存在第二稳流电阻。 Optionally, there is a second ballast resistor between the gate of the second PMOS transistor and the common-mode input terminal of the second amplifier. the
可选地,第一PMOS晶体管和第二PMOS晶体管配置完全相同,第一放大器和第二放大器的配置完全相同。 Optionally, configurations of the first PMOS transistor and the second PMOS transistor are completely the same, and configurations of the first amplifier and the second amplifier are completely the same. the
可选地,所述第一、第二PMOS晶体管工作于饱和区。 Optionally, the first and second PMOS transistors work in a saturation region. the
可选地,所述比较模块包括第三放大器,其输出信号反映待测辐射的大小。 Optionally, the comparison module includes a third amplifier whose output signal reflects the magnitude of the radiation to be measured. the
可选地,所述辐射探测电路还包括稳流模块,所述稳流模块用于为第一PMOS晶体管和第二PMOS晶体管的漏极提供相等的稳定电流。 Optionally, the radiation detection circuit further includes a steady current module, and the steady current module is configured to provide equal steady currents to drains of the first PMOS transistor and the drains of the second PMOS transistor. the
可选地,所述稳流模块包括:恒定电压源,其正极连接所述第一放大器的共模输入端和第二放大器的差模输入端,负极接地;第三稳流电阻,其一端接恒定电压源的正极,一端接地;第四稳流电阻,其一端接恒定电压源的正极,一端接地;所述第三稳流电阻和第四稳流电阻阻值相等。 Optionally, the current stabilization module includes: a constant voltage source, the anode of which is connected to the common-mode input terminal of the first amplifier and the differential-mode input terminal of the second amplifier, and the cathode is grounded; a third current stabilization resistor, one end of which is connected to One end of the positive pole of the constant voltage source is grounded; one end of the fourth stabilizing resistor is connected to the positive pole of the constant voltage source, and the other end is grounded; the resistance values of the third stabilizing resistor and the fourth stabilizing resistor are equal. the
现有技术的辐射探测电路采用AD转换。本发明的发明人发现,不用 AD转换,采用模拟器件,同样能实现准确的辐射探测,这样结构更简单、功耗更低。本发明利用PMOS辐射后产生的氧化物陷阱电荷和界面电荷都使得阈值电压负向漂移的特点,利用阈值电压漂移量与辐照剂量的关系,用第一PMOS晶体管感测待测辐射。由于待测辐射的影响,使第一PMOS晶体管的输出偏移,经第一放大器放大。而第二PMOS晶体管是未经受辐射的,它的输出也经第二放大器放大。第一放大器和第二放大器放大的信号再经比较模块比较,这个输出就能够反映由于辐射的影响造成的第一PMOS晶体管的输出电压的偏移,该偏移反映了辐射量。通过这种方式,采用简单的模拟电路,仍然能够实现探测待测辐射的目的,达到了以更简单的辐射、更低的功耗探测辐射的效果。 The radiation detection circuit in the prior art adopts AD conversion. The inventors of the present invention have found that accurate radiation detection can also be achieved by using analog devices without AD conversion, which has a simpler structure and lower power consumption. The present invention utilizes the characteristic that the oxide trap charge and interface charge generated after PMOS radiation both cause the threshold voltage to drift negatively, and uses the relationship between the threshold voltage drift and the radiation dose to sense the radiation to be measured with the first PMOS transistor. Due to the influence of the radiation to be measured, the output of the first PMOS transistor is offset and amplified by the first amplifier. While the second PMOS transistor is not subjected to radiation, its output is also amplified by the second amplifier. The signals amplified by the first amplifier and the second amplifier are compared by the comparison module, and the output can reflect the offset of the output voltage of the first PMOS transistor caused by the influence of radiation, and the offset reflects the amount of radiation. In this way, the purpose of detecting the radiation to be measured can still be achieved by using a simple analog circuit, and the effect of detecting radiation with simpler radiation and lower power consumption is achieved. the
附图说明 Description of drawings
通过阅读参照以下附图所作的对非限制性实施例所作的详细描述,本发明的其它特征、目的和优点将会变得更明显。 Other characteristics, objects and advantages of the present invention will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings. the
图1为现有技术的辐射探测电路示意图; Fig. 1 is the radiation detection circuit schematic diagram of prior art;
图2根据本发明的实施例的辐射探测电路的结构图。 Fig. 2 is a structural diagram of a radiation detection circuit according to an embodiment of the present invention. the
具体实施方式 Detailed ways
下面详细描述本发明的实施例。 Embodiments of the present invention are described in detail below. the
所述实施例的示例在附图中示出,其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的,仅用于解释本发明,而不能解释为对本发明的限制。下文的公开提供了许多不同的实施例或例子用来实现本发明的不同结构。为了简化本发明的公开,下文中对特定例子的部件和设置进行描述。当然,它们仅仅为示例,并且目的不在于限制本发明。 Examples of the described embodiments are shown in the drawings, wherein like or similar reference numerals designate like or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention. The following disclosure provides many different embodiments or examples for implementing different structures of the present invention. To simplify the disclosure of the present invention, components and arrangements of specific examples are described below. Of course, they are only examples and are not intended to limit the invention. the
本发明提供了一种基于运算放大器的PMOS辐射探测电路。下面,将通过本发明的一个实施例对图2所示的辐射探测电路进行具体描述。如图2所示,本发明所提供的辐射探测电路包括以下结构: The invention provides a PMOS radiation detection circuit based on an operational amplifier. Next, the radiation detection circuit shown in FIG. 2 will be described in detail through an embodiment of the present invention. As shown in Figure 2, the radiation detection circuit provided by the present invention includes the following structures:
用于感测待测辐射的第一PMOS晶体管M1; A first PMOS transistor M1 for sensing radiation to be measured;
与第一PMOS晶体管M1连接的第一放大器A1; A first amplifier A1 connected to the first PMOS transistor M1;
不感测待测辐射的第二PMOS晶体管M2; The second PMOS transistor M2 that does not sense the radiation to be measured;
与第二PMOS晶体管M2相连的第二放大器A2;以及 a second amplifier A2 connected to the second PMOS transistor M2; and
比较模块,用于将第一放大器A1和第二放大器A2的输出进行比较,并将其差值进行放大输出。 The comparison module is used to compare the outputs of the first amplifier A1 and the second amplifier A2, and amplify and output the difference. the
可选地,第一放大器A1是运算放大器,所述第一PMOS晶体管M1的源极接电源电压,漏极连接第一放大器A1的共模输入端,栅极连接所述第一放大器A1的差模输入端,所述第一放大器A1的输出连接所述比较模块的共模输入端。但第一放大器也可以采用其它放大器,只要能对第一PMOS管输出的信号放大即可。由于第一PMOS输出的信号太小,无法直接测量或进入比较模块比较,因此要经过第一放大器。采用运算放大器有利于结构进一步简单、进一步降低功耗。 Optionally, the first amplifier A1 is an operational amplifier, the source of the first PMOS transistor M1 is connected to the power supply voltage, the drain is connected to the common-mode input terminal of the first amplifier A1, and the gate is connected to the differential voltage of the first amplifier A1. mode input terminal, the output of the first amplifier A1 is connected to the common mode input terminal of the comparison module. But the first amplifier can also use other amplifiers, as long as it can amplify the signal output by the first PMOS transistor. Since the signal output by the first PMOS is too small to be directly measured or entered into the comparison module for comparison, it must pass through the first amplifier. The use of operational amplifiers is beneficial to further simplifying the structure and further reducing power consumption. the
可选地,所述第一PMOS晶体管M1的栅极和第一放大器A1的差模输入端之间存在第一稳流电阻R3。它有利于稳定所述第一PMOS晶体管M1的栅极和第一放大器A1的差模输入端之间的电流。 Optionally, there is a first current stabilizing resistor R3 between the gate of the first PMOS transistor M1 and the differential mode input terminal of the first amplifier A1. It helps to stabilize the current between the gate of the first PMOS transistor M1 and the differential input terminal of the first amplifier A1. the
优选地,第二放大器A2是运算放大器,所述第二PMOS晶体管M2的源极接电源电压,漏极连接第二放大器A2的差模输入端,栅极连接所述第二放大器A2的共模输入端,所述第二放大器A2的输出连接所述比较模块的差模输入端。但第二放大器也可以采用其它放大器,只要能对第二PMOS管输出的信号放大即可。由于第二PMOS输出的信号太小,无法直接测量或进入比较模块比较,因此要经过第二放大器。采用运算放大器有利于结构进一步简单、进一步降低功耗。 Preferably, the second amplifier A2 is an operational amplifier, the source of the second PMOS transistor M2 is connected to the power supply voltage, the drain is connected to the differential mode input terminal of the second amplifier A2, and the gate is connected to the common mode of the second amplifier A2 The input terminal, the output of the second amplifier A2 is connected to the differential mode input terminal of the comparison module. But the second amplifier can also use other amplifiers, as long as it can amplify the signal output by the second PMOS transistor. Since the signal output by the second PMOS is too small to be directly measured or entered into the comparison module for comparison, it must pass through the second amplifier. The use of operational amplifiers is beneficial to further simplifying the structure and further reducing power consumption. the
可选地,所述第二PMOS晶体管M2的栅极和第二放大器A2的共模输入端之间存在第二稳流电阻R4。它的作用与R3类似。 Optionally, there is a second current stabilizing resistor R4 between the gate of the second PMOS transistor M2 and the common-mode input terminal of the second amplifier A2. It works similarly to R3. the
其中,第一PMOS晶体管M1和第二PMOS晶体管M2配置完全相同,第一放大器A1和第二放大器A2的配置完全相同。 Wherein, the configurations of the first PMOS transistor M1 and the second PMOS transistor M2 are completely the same, and the configurations of the first amplifier A1 and the second amplifier A2 are completely the same. the
其中,所述第一、第二PMOS晶体管M1、M2工作于饱和区。 Wherein, the first and second PMOS transistors M1 and M2 work in a saturation region. the
可选地,所述比较模块包括第三放大器A3,,其输出信号反映待测 辐射的大小。但也可以采用其它比较模块,如搭建的比较电路。 Optionally, the comparison module includes a third amplifier A3, whose output signal reflects the size of the radiation to be measured. However, other comparison modules, such as built-up comparison circuits, may also be used. the
其中,所述辐射探测电路还包括稳流模块,所述稳流模块用于为第一PMOS晶体管M1和第二PMOS晶体管M2的漏极提供相等的稳定电流。 Wherein, the radiation detection circuit further includes a steady current module, and the steady current module is used for providing equal steady currents to the drains of the first PMOS transistor M1 and the second PMOS transistor M2. the
其中,所述稳流模块包括: Wherein, the steady flow module includes:
恒定电压源V,其正极连接所述第一放大器A1的共模输入端和第二放大器A2的差模输入端,负极接地; A constant voltage source V, the positive pole of which is connected to the common-mode input terminal of the first amplifier A1 and the differential-mode input terminal of the second amplifier A2, and the negative pole is grounded;
第三稳流电阻R1,其一端接恒定电压源的正极,一端接地; The third steady current resistor R1, one end of which is connected to the positive pole of the constant voltage source, and one end is grounded;
第四稳流电阻R2,其一端接恒定电压源的正极,一端接地; The fourth stabilizing resistor R2, one end of which is connected to the positive pole of the constant voltage source, and one end of which is grounded;
所述第三稳流电阻R1和第四稳流电阻R2阻值相等。 The resistance values of the third steady current resistor R1 and the fourth steady current resistor R2 are equal. the
下面对详细结构进行具体介绍。 The detailed structure is introduced in detail below. the
所述辐射感应探测器主要是由特定工艺制成的辐射敏感场效应晶体管。由于辐射后产生的氧化物陷阱与界面陷阱电荷使得MOSFET阈值电压发生漂移。通过标定阈值电压漂移量与辐照剂量的关系,测出阈值电压漂移量得到辐射剂量的大小。一般说来,NMOS辐射后,氧化物陷阱电荷使其阈值电压发生负向漂移,但是界面电荷使其阈值电压发生正向漂移;PMOS辐射后产生的氧化物陷阱电荷和界面电荷都使得其阈值电压负向漂移,这就是一般采用PMOS场效应晶体管作为总剂量辐射探测器的原因。 The radiation-sensitive detector is mainly a radiation-sensitive field-effect transistor made by a specific process. The MOSFET threshold voltage drifts due to oxide traps and interface trap charges generated after irradiation. By calibrating the relationship between the threshold voltage drift and the radiation dose, the threshold voltage drift is measured to obtain the radiation dose. Generally speaking, after NMOS is irradiated, oxide trap charges cause its threshold voltage to shift negatively, but interface charges cause its threshold voltage to shift positively; both oxide trap charges and interface charges generated after PMOS radiation make its threshold voltage Negative drift, which is why PMOS field effect transistors are generally used as total dose radiation detectors. the
辐射后,处于饱和区的PMOS的阈值电压产生负向漂移,根据PMOS晶体管饱和区的电流公式: After radiation, the threshold voltage of the PMOS in the saturation region has a negative drift, according to the current formula in the saturation region of the PMOS transistor:
根据PMOS晶体管饱和区的电流公式: According to the current formula in the saturation region of the PMOS transistor:
其中,ID表示MOS管的源漏电流,μP表示PMOS中空穴的迁移率,W和L分别表示MOS管的宽和长,COX表示栅氧电容,VGS表示栅源电压,VTH是阈值电压。 Among them, ID represents the source-drain current of the MOS tube, μ P represents the mobility of holes in the PMOS, W and L represent the width and length of the MOS tube respectively, C OX represents the gate oxide capacitance, V GS represents the gate-source voltage, and V TH is the threshold voltage.
M1和M2是辐射敏感的PMOS管,其中M1作为辐射探测器,接受辐射信号,M2作为参考晶体管,置于无辐射环境中,为M1提供对比信号,M1和M2晶体管的尺寸和工艺相等。为了使电路结构对称,此处M2也选用辐射敏感晶 体管。 M1 and M2 are radiation-sensitive PMOS transistors, where M1 is used as a radiation detector to receive radiation signals, and M2 is used as a reference transistor, placed in a radiation-free environment to provide a comparison signal for M1, and the size and process of M1 and M2 transistors are equal. In order to make the circuit structure symmetrical, here M2 also selects a radiation-sensitive transistor. the
由第三、第四稳流电阻R1、R2的阻值相等可知,流过R1和R2的电流相等,由基尔霍夫电流定律可知,流过第一、第二PMOS管M1、M2的电流也相等。接收辐射之后,M1的阈值电压发生变化,由于恒流源对电流的稳定作用,M1中的电流大小保持不变,因此M1的栅极电压必须产生相应的变化,并通过第一稳流电阻R3传输到第一放大器A1的差模输入端,经过A1把M1的栅极和漏极的电压差放大。与此同时,晶体管M2未接受辐射,其电流和电压都保持不变,与M1接受辐射之前的电流、电压值相等,A2把辐射之前的M2的栅极和漏极之间的参考电压电压差放大并输出。 It can be seen that the resistance values of the third and fourth steady-state resistors R1 and R2 are equal, and the currents flowing through R1 and R2 are equal. It can be known from Kirchhoff’s current law that the currents flowing through the first and second PMOS transistors M1 and M2 Also equal. After receiving the radiation, the threshold voltage of M1 changes. Due to the stabilizing effect of the constant current source on the current, the current in M1 remains unchanged. Therefore, the gate voltage of M1 must change accordingly and pass through the first stabilizing resistor R3 It is transmitted to the differential mode input terminal of the first amplifier A1, and the voltage difference between the gate and the drain of M1 is amplified through A1. At the same time, transistor M2 does not receive radiation, and its current and voltage remain unchanged, which are equal to the current and voltage values of M1 before radiation, and A2 takes the reference voltage difference between the gate and drain of M2 before radiation Amplify and output. the
辐射感应模块和参考模块的输出分别连接第三放大器A3的共模、差模输入端,两者之间的差异由A3放大后输出,最后得到了放大后的电压。据此可以计算出总剂量辐射的大小。最后通过测量最终放大后的电压的变化,并根据电路设计的放大倍数,即可计算出辐射敏感PMOS晶体管阈值电压的改变量,并最终求出总剂量辐射的大小。 The outputs of the radiation sensing module and the reference module are respectively connected to the common-mode and differential-mode input ends of the third amplifier A3, the difference between them is amplified by A3 and output, and finally the amplified voltage is obtained. Based on this, the total dose of radiation can be calculated. Finally, by measuring the change of the final amplified voltage, and according to the magnification of the circuit design, the change amount of the threshold voltage of the radiation-sensitive PMOS transistor can be calculated, and finally the total dose of radiation can be calculated. the
本领域技术人员可根据需要选择所需的第一、第二、第三放大器A1、A2、A3,并设计相关参数,来设定一定的放大倍数差分信号进行放大并输出。 Those skilled in the art can select the required first, second, and third amplifiers A1, A2, and A3 as required, and design relevant parameters to set a certain amplification factor for amplifying and outputting the differential signal. the
与现有技术相比,本发明能够通过使用恒定电流源将由辐射敏感PMOS管所产生的电流,转换为源漏两端电位的变化,作为差分放大电路的差分输入,实现了将辐射引起的单向且微小的阈值电压变化转变成较大双向变化的电压,使得对辐射总剂量的检测变得简便易行。与现有技术相比,不仅简便易行,且电路结构简单,无多余的耗电元件,极大地降低了功耗。 Compared with the prior art, the present invention can use a constant current source to convert the current generated by the radiation-sensitive PMOS tube into the change of the potential at both ends of the source and the drain, and use it as the differential input of the differential amplifier circuit to realize the single output caused by radiation. Direct and small threshold voltage changes are transformed into larger bidirectional voltage changes, which makes it easy to detect the total radiation dose. Compared with the prior art, it is not only convenient and easy to operate, but also has a simple circuit structure, no redundant power consumption components, and greatly reduces power consumption. the
虽然已结合具体实施例对本发明及其优点进行了详细说明,应当理解在不脱离本发明的精神和所附权利要求限定的保护范围的情况下,可以对这些实施例进行各种变化、替换和修改。对于其他例子,本领域的普通技 术人员应当容易理解在保持本发明保护范围内的同时,工艺步骤的次序可以变化。 Although the present invention and its advantages have been described in detail in conjunction with specific embodiments, it should be understood that various changes, substitutions and modifications can be made to these embodiments without departing from the spirit of the present invention and the scope of protection defined by the appended claims. Revise. For other examples, it should be readily understood by those of ordinary skill in the art that the order of the process steps can be varied while remaining within the scope of the present invention. the
此外,本发明的应用范围不局限于说明书中描述的特定实施例的工艺、机构、制造、物质组成、手段、方法及步骤。从本发明的公开内容,作为本领域的普通技术人员将容易地理解,对于目前已存在或者以后即将开发出的工艺、机构、制造、物质组成、手段、方法或步骤,其中它们执行与本发明描述的对应实施例大体相同的功能或者获得大体相同的结果,依照本发明可以对它们进行应用。因此,本发明所附权利要求旨在将这些工艺、机构、制造、物质组成、手段、方法或步骤包含在其保护范围内。 In addition, the scope of application of the present invention is not limited to the process, mechanism, manufacture, material composition, means, method and steps of the specific embodiments described in the specification. From the disclosure of the present invention, those of ordinary skill in the art will easily understand that for the processes, mechanisms, manufacturing, material compositions, means, methods or steps that currently exist or will be developed in the future, they are implemented in accordance with the present invention Corresponding embodiments described which function substantially the same or achieve substantially the same results may be applied in accordance with the present invention. Therefore, the appended claims of the present invention are intended to include these processes, mechanisms, manufacture, material compositions, means, methods or steps within their protection scope. the
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