CN104330470B - Detection means based on SAW sensor - Google Patents
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- CN104330470B CN104330470B CN201410522221.5A CN201410522221A CN104330470B CN 104330470 B CN104330470 B CN 104330470B CN 201410522221 A CN201410522221 A CN 201410522221A CN 104330470 B CN104330470 B CN 104330470B
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Abstract
It can be realized to the liquid-tight envelope of biological detection and sealing means cost is low, the simple and effective detection means based on SAW sensor the invention discloses a kind of.The detection means includes bottom plate, matrix, SAW wafer, and detection circuit is provided with the bottom plate；Described matrix is fixed on bottom plate, the surface that described matrix is in contact with bottom plate is provided with wafer slots and multiple metallic channels, the SAW wafer is arranged in wafer slots and is fixed on bottom plate, the bottom land of the wafer slots is provided with annular groove, sealing ring is provided with the annular groove, the sensor film of the sealing ring and SAW, the bottom land of wafer slots surround a closed detection space jointly, and conduction hole is provided with the middle part of the annular groove.The detection means causes biological detection liquid not leak, while can ensure that testing result is more accurate, and due to the presence of conduction hole, can easily make biological detection liquid stream enter to detect in space.It is adapted in detection device technical field popularization and application.
Description
Technical field
The present invention relates to detection device technical field, more particularly, to a kind of detection means based on SAW sensor.
Background technology
SAW is British scientist Rayleigh to be found during the eighties in 19th century Study of Seismic ripple, but skill at that time
Art is limited, and SAW does not obtain practical application；Nineteen sixty-five American scientist White, Voltmer invention can be in piezoelectric crystal material table
The metal interdigital transducers of drive surface ripple and surface acoustic wave signal is effectively detected on face, make SAW extensive uses.
SAW belongs to piezo-type sensor, is realized using piezoelectric as substrate, using piezo-electric effect, by interdigital transducer
Electric signal and acoustical signal are mutually changed, and have simple in construction, small volume, cost is low, the response time is short, high sensitivity, reliability
The advantages that good, applied to analytical chemistry, environmental monitoring and gas on-site detection etc..
SAW sensor is divided into delay line type resonator type sensor by structure.Resonator type small volume, quality factor value
Height, frequency characteristic is good, return loss is smaller, but sensitive area is smaller, is usually used in physical sensors；Delay-line structure have than
Longer sonic transmissions approach, very big sensitive area can be obtained, while design is simple, SAW device craft precision is wanted
Ask low, but frequency characteristic does not have resonator good.
Delay line type SAW sensor chip architecture includes electrode, piezoelectric substrate, sensor film, input interdigital transducer, defeated
Go out five parts of interdigital transducer.Pumping signal acts on input interdigital transducer, sound surface is converted to by inverse piezoelectric effect
Ripple signal, surface acoustic wave signal travel to up to output interdigital transducer, by direct piezoelectric effect through piezoelectric substrate and are converted to telecommunications
Number.SAW device sensor film is exposed under certain environment, due to environment such as humidity, temperature, pressure, quality, viscosity, density etc.
Change, cause surface acoustic wave velocity of wave to change, so as to cause input/output signal frequency, phase, amplitude produce difference, root
According to input, output signal difference can heat transfer agent.
The existing detection means bodily form based on SAW sensor is huge, manufacturing cost is high, detection efficiency is low, can not meet
Real-time detection demand, and it is existing based on the detection means of SAW sensor to liquid without sealing or take plastics solidification to seal
Mode, no sealing causes detection liquid leakage while testing result is forbidden, and plastics solidification seals to form permanent seal, and device is difficult
In dismounting.In addition, the existing detection means based on SAW sensor uses wire, electrode slice, electrode needle connecting detection circuit,
Configuration is cumbersome, high processing costs.
The content of the invention
The technical problems to be solved by the invention, which are to provide one kind, can realize to the liquid-tight envelope of biological detection and sealing means
Cost is low, the simple and effective detection means based on SAW sensor.
Technical scheme is used by the present invention solves above-mentioned technical problem：The detection means based on SAW sensor, bag
Bottom plate, matrix, SAW wafer are included, detection circuit is provided with the bottom plate；The SAW wafer is thin including piezoelectric substrate, sensing
Film, input interdigital electrode, output interdigital electrode, the sensor film, input interdigital electrode, output interdigital electrode are arranged at pressure
The same surface of electric substrate, the input interdigital electrode, output interdigital electrode are separately positioned on the both sides of sensor film, described defeated
Enter the input electrode being connected with interdigital electrode for accessing external signal, the input electrode is connected with detection circuit, described
The output electrode for output signal is connected with output interdigital electrode, the output electrode is connected with detection circuit；The base
Body is fixed on bottom plate, and the surface that described matrix is in contact with bottom plate is provided with wafer slots and multiple metallic channels, and the SAW is brilliant
Piece is arranged in wafer slots and is fixed on bottom plate, and the multiple metallic channel is separately positioned on the both sides of wafer slots, the chip
The bottom land of groove is provided with annular groove, is provided with sealing ring in the annular groove, and the sensor film of the SAW wafer is towards wafer slots
Bottom land and the sealing ring and SAW sensor film, the bottom land of wafer slots surround a closed detection space, institute jointly
State and conduction hole is provided with the middle part of annular groove, the detection space is in communication with the outside by conduction hole.
It is further that the bottom plate is made using pcb board.
It is further that the detection circuit includes signal incoming end, signal output part, the first connection electrode, the second company
Receiving electrode, the signal incoming end are connected with the first connection electrode, and the signal output part is connected with the second connection electrode, described
Build-out resistor is provided between signal incoming end and the first connection electrode, between signal output part and the second connection electrode, institute
State input electrode with the first connection electrode to be connected, the output electrode is connected with the second connection electrode.
It is further that the surface area of the sensor film is more than the circle inner area of sealing ring.
It is further that the bottom plate is bolted with matrix.
It is further that the bolt uses nylon material system using interior hexagonal round head bolt and interior hexagonal round head bolt
Form.
It is further that described matrix is made using polymethyl methacrylate materials.
It is further that the piezoelectric substrate is cut quartz using ST- and is made.
It is further that the sensor film, input interdigital electrode, output interdigital electrode, input electrode, output electrode are equal
It is made using Au materials.
It is further that the sealing ring is made using silica gel material.
The beneficial effects of the invention are as follows：By setting annular groove in the bottom land of wafer slots, sealing ring is set in annular groove,
The sensor film of SAW wafer is total to towards the bottom land of the bottom land and the sealing ring and SAW sensor film of wafer slots, wafer slots
With a closed detection space is surrounded, conduction hole is provided with the middle part of annular groove, the detection space passes through conduction hole and the external world
Connection, when being detected to biological detection liquid, biological detection liquid is flowed into detection space by conduction hole, due to detecting space
It is closed so that biological detection liquid will not leak, while can ensure that testing result is more accurate, and due to conduction hole
In the presence of can easily make biological detection liquid stream enter to detect in space, without carrying out any dismounting work, use is very square
Just, in addition, the sealing in detection space is pressurized using sealing ring and produced, sealing means are easy and effective, cost is low, furthermore SAW wafer
It is placed in wafer slots, effectively SAW wafer can be prevented to be subjected to displacement in vibration processes.
Brief description of the drawings
Fig. 1 is the three dimensional structure diagram of the detection means of the present invention based on SAW sensor；
Fig. 2 is the cross-sectional view of the detection means of the present invention based on SAW sensor；
Fig. 3 is SAW wafer structural representation of the present invention；
Fig. 4 is the S11 transmission characteristic figures of the detection means of the invention based on SAW sensor；
Fig. 5 is the S12 transmission characteristic figures of the detection means of the invention based on SAW sensor；
Fig. 6 is the S12 time-delay characteristics figures of the detection means of the invention based on SAW sensor；
Fig. 7 is the impedance Smith chart of the detection means of the invention based on SAW sensor；
Fig. 8 is the theory and actual parameter compares figure tested during the detection means reality of the invention based on SAW sensor；
Description of reference numerals：Bottom plate 1, matrix 2, SAW wafer 3, piezoelectric substrate 301, sensor film 302, the interdigital electricity of input
Pole 303, output interdigital electrode 304, input electrode 305, output electrode 306, wafer slots 4, metallic channel 5, annular groove 6, sealing ring
7th, conduction hole 8, bolt 9.
Embodiment
The embodiment of the present invention is further described below in conjunction with the accompanying drawings.
As shown in Figure 1, 2, 3, the detection means based on SAW sensor, including bottom plate 1, matrix 2, SAW wafer 3 are somebody's turn to do, it is described
Detection circuit is provided with bottom plate 1；The SAW wafer 3 includes piezoelectric substrate 301, sensor film 302, input interdigital electrode
303rd, output interdigital electrode 304, the sensor film 302, input interdigital electrode 303, output interdigital electrode 304 are arranged at pressure
The same surface of electric substrate 301, the input interdigital electrode 303, output interdigital electrode 304 are separately positioned on sensor film 302
Both sides, be connected with input electrode 305 for accessing external signal, the input electrode in the input interdigital electrode 303
305 are connected with detection circuit, and the output electrode 306 for output signal is connected with the output interdigital electrode 304, described defeated
Go out electrode 306 with detection circuit to be connected；Described matrix 2 is fixed on bottom plate 1, and the surface that described matrix 2 is in contact with bottom plate 1 is set
Wafer slots 4 and multiple metallic channels 5 are equipped with, the SAW wafer 3 is arranged in wafer slots 4 and is fixed on bottom plate 1, described more
Individual metallic channel 5 is separately positioned on the both sides of wafer slots 4, and the bottom lands of the wafer slots 4 is provided with annular groove 6, in the annular groove 6
It is provided with sealing ring 7, the bottom land and the sealing ring 7 and SAW of the sensor film 302 of the SAW wafer 3 towards wafer slots 4
Sensor film 302, the bottom land of wafer slots 4 surround a closed detection space jointly, the middle part of the annular groove 6, which is provided with, draws
Discharge orifice 8, the detection space are in communication with the outside by conduction hole 8.Annular groove 6, annular groove are set by the bottom land in wafer slots 4
Sealing rings 7 are set in 6, and the sensor film 302 of SAW wafer 3 is towards the bottom land and the sealing ring 7 of wafer slots 4 and SAW sense
Answer film 302, the bottom land of wafer slots 4 surrounds a closed detection space jointly, the middle part of annular groove 6 is provided with conduction hole 8, institute
State detection space to be in communication with the outside by conduction hole 8, when detecting biological detection liquid, biological detection liquid passes through conduction hole
8 flow into detection space, because detection space is closed so that biological detection liquid will not leak, while can ensure to detect
As a result it is more accurate, and due to the presence of conduction hole 8, can easily make biological detection liquid stream enter to detect in space, nothing
Any dismounting work need to be carried out, it is very easy to use, in addition, the sealing in detection space is pressurized using sealing ring 7 and produced, sealing side
Formula is easy and effective, cost is low, furthermore SAW wafer 3 is placed in wafer slots 4, can effectively prevent SAW wafer 3 in vibration processes
In be subjected to displacement.
In order to guarantee to biological detection liquid qualitative and quantitative analysis, it is disposable to be somebody's turn to do the detection means based on SAW sensor
It is low using, cost.
In order to simplify the detection circuit layout set on bottom plate 1, high processing costs are reduced.Bottom plate 1 of the present invention preferably uses
Pcb board is made, and so detecting circuit can be printed on pcb board, realizes wireless layout, pcb board small volume, light weight,
Beneficial to mechanization production, the overall volume of detection means can be reduced, reduce processing cost, from pcb board as bottom plate 1, its
Circuit has the advantages that highly integrated, high reliability, productibility are strong.
In order on the premise of the detection accuracy of detection circuit is ensured, simplify the structure of detection circuit, institute as far as possible
Stating detection circuit includes signal incoming end, signal output part, the first connection electrode, the second connection electrode, the signal incoming end
It is connected with the first connection electrode, the signal output part is connected with the second connection electrode, and the signal incoming end is connected with first
Between electrode, build-out resistor is provided between signal output part and the second connection electrode, the input electrode 305 and first connects
Receiving electrode is connected, and the output electrode 306 is connected with the second connection electrode.The detection circuit structure of this structure is simple, processing
It is convenient, processing cost can be substantially reduced.Input electrode 305 is connected with the first connection electrode, and output electrode 306 is connected with second
Electrode is connected so that SAW wafer 3 is connected into detection circuit, and signal incoming end, signal output part facilitate external resonant frequency measuring instrument
Be connected into, build-out resistor can reduce back wave on transmission line, realize the maximum transmitted of energy.
In order to ensure detection accuracy, it is ensured that biological detection also with the Full connected of sensor film 302, therefore, the sense
The surface area of film 302 is answered to should be greater than the circle inner area of sealing ring 7.
In order to further avoid SAW wafer 3 from being subjected to displacement in vibration processes, the bottom plate 1 passes through bolt 9 with matrix 2
It is fixed.
The bolt 9 is made using interior hexagonal round head bolt 9 and interior hexagonal round head bolt 9 using nylon material.
Interior hexagonal round head bolt 9 is in detection means, in addition to connecting bottom board 1 and matrix 2 play fastening effect, while play balance,
The effect of support meanss.The material of bolt 9 is nylon plastic(s), the advantages that possessing good electrical insulating property, wear-resistant, weatherability.
Described matrix 2 is made using polymethyl methacrylate materials, and polymetylmethacrylate has height
Transparency, it is easy to observe detection process, PMMA is macromolecule light transmissive material most excellent at present, reaches 92%；Secondly, poly- methyl
Methyl acrylate PMMA has chemical-resistant reagent, solvent resistance, and matrix 2 can be avoided to be chemically reacted with biological detection liquid；
Furthermore polymetylmethacrylate, which has, is resistant to bases, is resistant to salt and grease type, resistance to fat hydrocarbon, not soluble in water, first
Alcohol, glycerine etc., it can avoid matrix 2 that etching reaction occurs with biological detection liquid；In addition, polymetylmethacrylate has
Resistance to weathering, its service life is longer, and PMMA has excellent resistance to weathering, is tested through natural ageing test, printing opacity
Rate is declined slightly, color and luster slightly has yellowing, and other physical properties almost do not change, and finally, polymetylmethacrylate has
Workability-lucite can also use the molding bondeds such as acetone, chloroform, simultaneously by lathe grinding, drilling machine Drilling operation
Also the method for the plastic shapings such as blowing, injection, extrusion can be used to process
In order that SAW wafer 3 has a preferable Detection results, the piezoelectric substrate 301 using ST- cut quartz make and
Into the sensor film 302, input interdigital electrode 303, output interdigital electrode 304, input electrode 305, output electrode 306 are equal
It is made using Au materials.
It is further that the sealing ring 7 is made using silica gel material.Sealing ring 7 act as preventing because of biology
Detect liquid intrusion electrode, circuit and caused by short circuit, silica gel material, sealing property is fabulous, can effectively prevent leakage；Silica gel is complete
Atoxic is tasteless while does not produce harmful substance in high temperature, it is ensured that detection is had no effect.
Fig. 4 is the S11 transmission characteristics of the detection means of the invention based on SAW sensor, and Fig. 5 is passed for the present invention based on SAW
The S12 transmission characteristics of the detection means of sensor, Fig. 6 are the S12 time-delay characteristics of the detection means of the invention based on SAW sensor,
Fig. 7 is the impedance Smith chart of the detection means of the invention based on SAW sensor, can be drawn according to Fig. 4,5,6,7：This is based on
The detection means resonant frequency of SAW sensor is 78.600000MHz, and the propagation delay time is 2.5 μ s, based on SAW sensor
Detection means equiva lent impedance is 46.802-j*22.123 Ω.
Fig. 8 is that the theory tested during the detection means reality of the invention based on SAW sensor compares with actual parameter, from
Detection means resonant frequency of the it can be seen from the figure that based on SAW sensor is 78.600000MHz, its theoretical value
78.950000MHz, the Au electrodes that mass effect is cut quartz substrate top by ST- cause, it is known that the detection based on SAW sensor
Device has excellent transmission characteristic, and its transmission delay is 2.5 μ s, and the influence to device practical application can be neglected；It hinders
Resist for 46.802-j*22.123 Ω, close with the Ω of theoretical value 50, ensure that the energy of test system can maximumlly put on
On sensor, so as to further improve the sensitivity of detection means.It can be drawn according to mass effect, the present invention is passed based on SAW
The sensitivity of the detection means of sensor can reach 10-12G, the error influence of this detection means is minimum, can be neglected.
Claims (10)
1. the detection means based on SAW sensor, it is characterised in that：It is described including bottom plate (1), matrix (2), SAW wafer (3)
Bottom plate is provided with detection circuit on (1)；The SAW wafer (3) includes piezoelectric substrate (301), sensor film (302), input fork
Refer to electrode (303), output interdigital electrode (304), the sensor film (302), input interdigital electrode (303), output interdigital electricity
Pole (304) is arranged at the same surface of piezoelectric substrate (301), the input interdigital electrode (303), output interdigital electrode
(304) both sides of sensor film (302) are separately positioned on, are connected with the input interdigital electrode (303) for accessing outside
The input electrode (305) of signal, the input electrode (305) are connected with detection circuit, connected on the output interdigital electrode (304)
The output electrode (306) for output signal is connected to, the output electrode (306) is connected with detection circuit；Described matrix (2) is solid
It is scheduled on bottom plate (1), described matrix (2) is provided with wafer slots (4) and multiple metallic channels with the surface that bottom plate (1) is in contact
(5), the SAW wafer (3) is arranged in wafer slots (4) and is fixed on bottom plate (1), and the multiple metallic channel (5) sets respectively
Put and be provided with annular groove (6) in the both sides of wafer slots (4), the bottom land of the wafer slots (4), be provided with the annular groove (6)
Sealing ring (7), the sensor film (302) of the SAW wafer (3) towards wafer slots (4) bottom land and the sealing ring (7) with
SAW sensor film (302), the bottom land of wafer slots (4) surrounds a closed detection space jointly, the annular groove (6)
Middle part is provided with conduction hole (8), and the detection space is in communication with the outside by conduction hole (8).
2. the detection means based on SAW sensor as claimed in claim 1, it is characterised in that：The bottom plate (1) uses PCB
Plate is made.
3. the detection means based on SAW sensor as claimed in claim 2, it is characterised in that：The detection circuit includes letter
Number incoming end, signal output part, the first connection electrode, the second connection electrode, the signal incoming end and the first connection electrode phase
Even, the signal output part is connected with the second connection electrode, between the signal incoming end and the first connection electrode, signal output
Build-out resistor is provided between end and the second connection electrode, the input electrode (305) is connected with the first connection electrode, described
Output electrode (306) is connected with the second connection electrode.
4. the detection means based on SAW sensor as claimed in claim 1, it is characterised in that：The sensor film (302)
Surface area is more than the circle inner area of sealing ring (7).
5. the detection means based on SAW sensor as claimed in claim 1, it is characterised in that：The bottom plate (1) and matrix
(2) it is fixed by bolt (9).
6. the detection means based on SAW sensor as claimed in claim 5, it is characterised in that：Six in bolt (9) use
Angle snap bolt (9) and interior hexagonal round head bolt (9) is made using nylon material.
7. the detection means based on SAW sensor as claimed in claim 1, it is characterised in that：Described matrix (2) uses poly- first
Base methyl acrylate material is made.
8. the detection means based on SAW sensor as claimed in claim 1, it is characterised in that：The piezoelectric substrate (301) is adopted
Quartz is cut with ST- to be made.
9. the detection means based on SAW sensor as claimed in claim 1, it is characterised in that：The sensor film (302),
Input interdigital electrode (303), output interdigital electrode (304), input electrode (305), output electrode (306) use Au material systems
Form.
10. the detection means based on SAW sensor as claimed in claim 1, it is characterised in that：The sealing ring (7) uses
Silica gel material is made.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109765269A (en) * | 2018-12-27 | 2019-05-17 | 西安交通大学 | A kind of blood clotting test macro of sound wave driving |
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| CN107209153B (en) * | 2015-02-27 | 2021-03-02 | 京瓷株式会社 | Measurement method for detecting body fluids |
| CN105445366B (en) * | 2015-10-30 | 2018-08-17 | 中国人民解放军理工大学气象海洋学院 | Dew point transducer based on two-way SAW device offset-type |
| EP3371583B1 (en) * | 2015-11-06 | 2024-08-14 | Qorvo Us, Inc. | Acoustic resonator devices and fabrication methods providing hermeticity and surface functionalization |
| US10374266B2 (en) * | 2016-05-11 | 2019-08-06 | Ford Global Technologies, Llc | Wireless traction battery force sensor |
| CN112649128B (en) * | 2020-11-30 | 2021-11-26 | 华东理工大学 | Sensing device and method for measuring three-dimensional contact stress |
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