CN104297825B - Light laser vortex reflecting mirror - Google Patents
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- 239000000758 substrate Substances 0.000 claims abstract description 8
- 238000005530 etching Methods 0.000 claims abstract description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000005350 fused silica glass Substances 0.000 claims abstract description 4
- 239000005304 optical glass Substances 0.000 claims abstract description 4
- 238000000206 photolithography Methods 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 4
- 230000004927 fusion Effects 0.000 abstract description 3
- 230000000694 effects Effects 0.000 description 7
- 238000001459 lithography Methods 0.000 description 4
- 230000008685 targeting Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 230000001934 delay Effects 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
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- 238000006243 chemical reaction Methods 0.000 description 1
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- 239000002245 particle Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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Abstract
一种强激光涡旋反射镜,其特征在于:在光学玻璃或熔融石英基底上通过光刻的方法刻蚀出N瓣扇区N个台阶的微结构,第n个台阶对应的刻蚀深度为其中l为该涡旋反射镜携带涡旋的拓扑荷;n=1,2,…,N,N取为2的高阶幂次值,如N=4,8,16,32等。然后通过在该微结构上镀有45度入射下的高效率、高损伤阈值介质反射膜即构成强激光涡旋反射镜。从而使得45度入射的强激光通过该涡旋反射镜反射后变成45度出射的携带拓扑荷为l的涡旋强激光。这种具有涡旋相位波前的超强激光对于惯性约束核聚变具有重要的科学研究意义及潜在的实用价值。
A kind of strong laser vortex reflector, it is characterized in that: on the optical glass or fused silica substrate, the microstructure of N steps in N lobe sectors is etched by photolithography, and the etching depth corresponding to the nth step is Where l is the topological charge of the vortex carried by the vortex mirror; n=1, 2, ..., N, where N is taken as a high-order power value of 2, such as N=4, 8, 16, 32 and so on. Then, a high-efficiency, high-damage-threshold dielectric reflective film is coated on the microstructure to form a strong laser vortex reflector. Thus, the intense laser light incident at 45 degrees is reflected by the vortex reflector and becomes a strong vortex laser with a topological charge of 1 emitted at 45 degrees. This ultra-intense laser with vortex phase wavefront has important scientific research significance and potential practical value for inertial confinement nuclear fusion.
Description
技术领域technical field
本发明涉及惯性约束超强涡旋激光,特别是一种产生超强涡旋激光的强激光涡旋反射镜。The invention relates to an inertial-constrained ultra-intensive vortex laser, in particular to an intense laser vortex reflector for generating an ultra-intensive vortex laser.
背景技术Background technique
自1960年激光器问世以来,激光技术就被提出用来产生惯性约束核聚变。我们知道,激光光场模式分布主要由激光器谐振腔决定,对矩形腔镜为厄米高斯模式;对圆对称腔镜为拉盖尔高斯模式。一般情形下,基模的高斯光束聚焦光斑具有更小的空间局域性和更高的能量密度,因而一般基模的高斯光束被广泛应用。对激光打靶而言,通常的高斯激光虽然可以产生极高的能量密度,从而在金属靶面产生的较强的等离子体云。然而,随着激光能量的进一步提高,等离子体云在金属表面形成了很强的屏蔽效应,从而影响激光能量的进一步吸收。聚焦的激光中心随着聚焦点的轴向传播因为很强的等离子体云屏蔽效应而漂移和扩散,从而使得激光打靶效果变差。Laser technology has been proposed to produce inertial confinement fusion since the invention of lasers in 1960. We know that the mode distribution of the laser light field is mainly determined by the laser resonator, which is the Hermitian Gaussian mode for the rectangular cavity mirror and the Laguerre Gaussian mode for the circular symmetric cavity mirror. In general, the Gaussian beam of the fundamental mode has smaller spatial localization and higher energy density, so the Gaussian beam of the general fundamental mode is widely used. For laser targeting, although the usual Gaussian laser can generate extremely high energy density, a strong plasma cloud is generated on the metal target surface. However, with the further increase of laser energy, the plasma cloud forms a strong shielding effect on the metal surface, which affects the further absorption of laser energy. The focused laser center drifts and diffuses with the axial propagation of the focused point due to the strong plasma cloud shielding effect, which makes the laser targeting effect worse.
所谓涡旋激光是指具有螺旋形相位波面的激光束,其光轴中心存在一个相位奇点,因而可以产生一个携带角动量的空心光场结构,即光轴中心为暗斑。这种涡旋激光的能量密度矢量具有螺旋锥状结构,因而在圆周切向上具有一个角动量分量,从而这种切向的角动量可以传递到被辐射的物体上去。涡旋激光的这种特殊性质,可期待被用于激光惯性约束聚变中的快点火方案,粒子模拟研究已经初步发现它可以产生一种类似于螺钉的钻洞效果【Phys.Rev.Lett.112,235001(2014)】,一方面,和传统的线偏激光相比,它有可能形成更好的“钻洞”效果,使得激光更接近压缩后的靶丸中心,形成快点火。另一方面,这种螺钉式的推进可能有益于打洞过程的准直性。涡旋超强激光会使得等离子体沿中心旋转起来,使产生的质子约束在轴向传播中心,从而有利于激光能量向金属靶面的传递,这将在激光打靶中具有非常重要的研究和应用价值。The so-called vortex laser refers to a laser beam with a spiral phase wavefront, and there is a phase singularity in the center of its optical axis, so a hollow light field structure carrying angular momentum can be generated, that is, the center of the optical axis is a dark spot. The energy density vector of this vortex laser has a spiral cone structure, so it has an angular momentum component in the circumferential tangential direction, so that this tangential angular momentum can be transmitted to the irradiated object. The special properties of the vortex laser can be expected to be used in the fast ignition scheme in laser inertial confinement fusion. Particle simulation research has initially found that it can produce a drilling effect similar to that of a screw [Phys.Rev.Lett.112 ,235001(2014)] On the one hand, compared with the traditional linear polarization laser, it may form a better "drilling" effect, making the laser closer to the center of the compressed target, forming a faster ignition. On the other hand, this screw-like advancement may be beneficial for the alignment of the hole punching process. The vortex ultra-intensive laser will make the plasma rotate along the center, so that the generated protons are confined to the center of the axial propagation, which is conducive to the transmission of laser energy to the metal target surface, which will be very important in the research and application of laser targeting value.
发明内容Contents of the invention
本发明的目的在于提供一种实现超强涡旋激光的强激光涡旋反射镜。The object of the present invention is to provide a strong laser vortex reflector for realizing super strong vortex laser.
本发明的技术解决方案如下:Technical solution of the present invention is as follows:
一种强激光涡旋反射镜,其特点是在光学玻璃或熔融石英基底上通过光刻的方法刻蚀出N瓣扇区N个台阶的微结构,第n个台阶对应的刻蚀深度为且相邻扇区的台阶深度差相等,均为其中n=1,2,…,N;N取为2的高阶幂次值,如N=4,8,16,32等;l为该强激光涡旋反射镜携带的涡旋的拓扑荷;然后通过在该微结构上针对工作波长镀有高效率介质反射膜即构成强激光涡旋反射镜。A kind of strong laser vortex reflector, which is characterized in that the microstructure of N-lobe sector N steps is etched on the optical glass or fused silica substrate by photolithography, and the etching depth corresponding to the nth step is And the step depth differences of adjacent sectors are equal, both Where n=1,2,...,N; N is taken as a high-order power value of 2, such as N=4, 8, 16, 32, etc.; l is the topological charge of the vortex carried by the strong laser vortex mirror ; Then, a high-efficiency dielectric reflection film is coated on the microstructure for the working wavelength to form a strong laser vortex mirror.
所述的强激光涡旋反射镜工作方式为45度入射且45度出射。The working mode of the strong laser vortex reflector is 45 degrees incident and 45 degrees exit.
所述的强激光涡旋反射镜上的入射光斑投影为椭圆形,其中半长轴与半短轴比例为且入射光的椭圆区域被所述的N瓣扇区分为等面积的N份。The incident spot projection on the described strong laser vortex mirror is elliptical, wherein the ratio of the semi-major axis to the semi-minor axis is And the elliptical area of the incident light is divided into N equal-area parts by the N-lobe sectors.
本发明的技术效果:Technical effect of the present invention:
本发明可以实现超强激光向超强涡旋激光的高效率转换。The invention can realize high-efficiency conversion of ultra-intensive laser to ultra-intensive vortex laser.
附图说明Description of drawings
图1典型的八瓣强激光涡旋反射镜的台阶高度分布及对应的相位延迟分布:①~⑧对应的台阶高度分别为 对应的相位延迟分别为π/4,π/2,3π/4,π,5π/4,3π/2,7π/4,2π。Figure 1. The step height distribution and corresponding phase delay distribution of a typical eight-lobed intense laser vortex mirror: ①~⑧The corresponding step heights are respectively The corresponding phase delays are π/4, π/2, 3π/4, π, 5π/4, 3π/2, 7π/4, 2π.
图2是本发明强激光涡旋反射镜波面变换示意图。Fig. 2 is a schematic diagram of the wavefront transformation of the intense laser vortex mirror of the present invention.
图3是加工的强激光涡旋反射镜的表面三维形貌。Figure 3 is the surface three-dimensional morphology of the processed strong laser vortex mirror.
图4是加工的强激光涡旋反射镜的远场衍射光斑强度分布。Figure 4 shows the far-field diffraction spot intensity distribution of the processed strong laser vortex mirror.
具体实施方式detailed description
如图1所示,所述的强激光涡旋反射镜的台阶数取N=8,即图1中椭圆形区域被分为8个扇区,每个扇区对应的刻蚀深度依据编号依次为 对应的相位延迟分别为π/4,π/2,3π/4,π,5π/4,3π/2,7π/4,2π。针对工作波长800nm,则各台阶的刻蚀深度依次为35nm,70nm,105nm,140nm,175nm,210nm,245nm,280nm。本实施例中通过光刻方法在光学玻璃或熔融石英基片上加工这种多扇区多台阶微结构。为了充分利用光刻机的有效光刻面积,本实施例中,通过切除矩形基片的四角,从而变成八边形基片。切除的尺寸设计如图1中标注,其中原先的矩形基片长、宽分别为和a,从而最大的通光孔径为a。利用光刻有效面积为Φ80mm的光刻机,能够加工的强激光涡旋反射镜的最大通光孔径约为a=50mm。通过三步套刻,我们能够得到该8扇区强激光涡旋反射镜的8台阶微结构。然后,通过在该微结构上镀一层高效率、高损伤阈值的介质高反膜,即形成了所述的强激光涡旋反射镜。图3给出了通过该方法加工出的强激光涡旋反射镜的表面3D形貌。图4给出了对应的强激光涡旋反射镜产生的远场光斑强度分布,从中可以看出涡旋激光所具有的明显的中心暗斑效果。As shown in Figure 1, the number of steps of the strong laser vortex reflector is N=8, that is, the elliptical area in Figure 1 is divided into 8 sectors, and the etching depth corresponding to each sector is sequentially numbered for The corresponding phase delays are π/4, π/2, 3π/4, π, 5π/4, 3π/2, 7π/4, 2π. For the working wavelength of 800nm, the etching depth of each step is 35nm, 70nm, 105nm, 140nm, 175nm, 210nm, 245nm, 280nm in sequence. In this embodiment, this multi-sector and multi-step microstructure is processed on an optical glass or fused silica substrate by photolithography. In order to make full use of the effective lithography area of the lithography machine, in this embodiment, the four corners of the rectangular substrate are cut off to form an octagonal substrate. The cut-off size design is marked in Figure 1, where the length and width of the original rectangular substrate are and a, so the maximum clear aperture is a. Using a lithography machine with an effective lithography area of Φ80mm, the maximum clear aperture of the strong laser vortex mirror that can be processed is about a=50mm. Through three-step overlaying, we can obtain the 8-step microstructure of the 8-sector intense laser vortex mirror. Then, by coating a high-efficiency, high-damage-threshold dielectric high-reflection film on the microstructure, the above-mentioned strong laser vortex mirror is formed. Figure 3 shows the surface 3D topography of the intense laser vortex mirror processed by this method. Figure 4 shows the far-field spot intensity distribution generated by the corresponding strong laser vortex mirror, from which it can be seen that the vortex laser has an obvious central dark spot effect.
综上所述,本发明提出了一种超强激光条件工作下的强激光涡旋反射镜。该涡旋反射镜能够在超强激光中引入涡旋相位波前,因而对超强激光打靶及超强激光物理方面具有重要的科学研究价值和重要的潜在应用前景。In summary, the present invention proposes a strong laser vortex reflector working under super strong laser conditions. The vortex reflector can introduce a vortex phase wavefront into the ultra-intensive laser, so it has important scientific research value and important potential application prospects in ultra-intensive laser targeting and ultra-intensive laser physics.
以上所述强激光涡旋反射镜的实施方式仅表达了本发明的一种具体实施方式,并不能因此而理解为对本发明保护范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本发明基本思想的前提下,还可以对本专利所提出的加工工艺及基片形状等技术细节做出若干变形和改进,这些都属于本发明的保护范围。The implementation of the above-mentioned strong laser vortex reflector is only a specific implementation of the present invention, and should not be construed as limiting the protection scope of the present invention. It should be pointed out that for those skilled in the art, without departing from the basic idea of the present invention, some deformations and improvements can be made to the technical details such as the processing technology and the shape of the substrate proposed in this patent. All belong to the protection scope of the present invention.
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CN112034626B (en) * | 2020-08-25 | 2022-04-08 | 之江实验室 | A high-throughput 3D dark spot generation device |
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《用反射式纯相位液晶空间光调制器产生涡旋光束》;薄斌,等;《光电子.激光》;20120131;第23卷(第1期);第74-78页 * |
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