CN104269386A - Multi-chip packaging bonding layer heat-conducting tooth structure - Google Patents
Multi-chip packaging bonding layer heat-conducting tooth structure Download PDFInfo
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- CN104269386A CN104269386A CN201410428872.8A CN201410428872A CN104269386A CN 104269386 A CN104269386 A CN 104269386A CN 201410428872 A CN201410428872 A CN 201410428872A CN 104269386 A CN104269386 A CN 104269386A
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- adhesive layer
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- 238000004806 packaging method and process Methods 0.000 title claims abstract description 18
- 239000012790 adhesive layer Substances 0.000 claims abstract description 29
- 239000004065 semiconductor Substances 0.000 claims abstract description 25
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 238000003466 welding Methods 0.000 claims abstract description 8
- 238000005516 engineering process Methods 0.000 claims description 17
- 229910000679 solder Inorganic materials 0.000 claims description 10
- 239000000919 ceramic Substances 0.000 claims description 9
- 238000005476 soldering Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- 229910052709 silver Inorganic materials 0.000 claims description 6
- 239000004332 silver Substances 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims description 3
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 claims description 3
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 3
- 229910002601 GaN Inorganic materials 0.000 claims description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- OLXNZDBHNLWCNK-UHFFFAOYSA-N [Pb].[Sn].[Ag] Chemical compound [Pb].[Sn].[Ag] OLXNZDBHNLWCNK-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 239000010432 diamond Substances 0.000 claims description 3
- 239000003822 epoxy resin Substances 0.000 claims description 3
- 230000005496 eutectics Effects 0.000 claims description 3
- 229910052732 germanium Inorganic materials 0.000 claims description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 3
- 229920000647 polyepoxide Polymers 0.000 claims description 3
- 239000000741 silica gel Substances 0.000 claims description 3
- 229910002027 silica gel Inorganic materials 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive effect Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 claims 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
- 230000017525 heat dissipation Effects 0.000 description 6
- 238000004026 adhesive bonding Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
本发明公开了一种多芯片封装粘结层导热齿结构,它包含鳍状散热片(3),该鳍状散热片(3)的上表面通过粘合剂层(4)与封装基板(2)相连,所述的封装基板(2)的上表面设有导热齿(6),该导热齿(6)通过焊接粘接层(5)焊接在封装基板(2),所述的导热齿(6)上固定有多个间歇排列的半导体芯片(1)。本发明结构简单,能够在半导体芯片与鳍状散热片之间开辟了热量传导快速通道,使每个芯片都能够很好的散热,从而既能够保护芯片,又能够对芯片进行有效的散热。
The invention discloses a heat conduction tooth structure of a multi-chip package adhesive layer, which comprises a fin-shaped heat sink (3), and the upper surface of the fin-shaped heat sink (3) is connected to a packaging substrate (2) through an adhesive layer (4) ), the upper surface of the package substrate (2) is provided with heat conduction teeth (6), and the heat conduction teeth (6) are welded to the package substrate (2) through the welding adhesive layer (5), and the heat conduction teeth ( 6) A plurality of intermittently arranged semiconductor chips (1) are fixed on it. The invention has a simple structure, and can open a fast heat conduction channel between the semiconductor chip and the fin-shaped heat sink, so that each chip can dissipate heat well, thereby not only protecting the chip, but also effectively dissipating heat on the chip.
Description
技术领域technical field
本发明涉及半导体散热技术领域,具体涉及一种多芯片封装粘结层导热齿结构。The invention relates to the technical field of semiconductor heat dissipation, in particular to a multi-chip package adhesive layer heat conduction tooth structure.
背景技术Background technique
现代集成电路的制造包括若干步骤。首先在半导体晶圆上制造集成电路,该半导体晶圆包含多个重复的半导体芯片,每个都包括半导体集成电路。然后从晶圆切割半导体芯片并且对其进行封装。The fabrication of modern integrated circuits involves several steps. Integrated circuits are first fabricated on a semiconductor wafer containing a plurality of repeating semiconductor chips, each including a semiconductor integrated circuit. Semiconductor chips are then diced from the wafer and packaged.
芯片封装的热可靠性和热稳定性已经成为芯片设计亟待解决的问题之一,对于芯片散热,除了利用硬件(散热器)实现芯片散热外,芯片本身的设计也会对散热产生明显影响。而芯片本身产生的热量,除了少部分通过芯片表面以及焊点向外散热以外,主要热量是通过芯片底部向散热基板传导散热的。因此,现今芯片设计一般有两种思路,一种是采用高热导率新型半导体材料如碳化硅(SiC),其热导率是传统硅器件的三到四倍,以提高芯片对高温应用的性能;另一种是采用不同结构不同导热材料粘设计散热器对芯片进行散热。但是,由于需要考虑到芯片到基板的可靠粘结,一般采用的粘结焊料并不能有效地进行热量传输,限制了以上两种思路在改进散热功能上的作用。因此,对于芯片封装结构不能有效的对芯片进行散热,芯片发生热奔、破裂风险很高。The thermal reliability and thermal stability of the chip package have become one of the urgent problems to be solved in chip design. For chip heat dissipation, in addition to using hardware (radiator) to realize chip heat dissipation, the design of the chip itself will also have a significant impact on heat dissipation. The heat generated by the chip itself, except for a small part of the heat dissipated through the surface of the chip and the solder joints, is mainly dissipated through the bottom of the chip to the heat dissipation substrate. Therefore, there are generally two ideas for chip design today. One is to use new semiconductor materials with high thermal conductivity such as silicon carbide (SiC), whose thermal conductivity is three to four times that of traditional silicon devices, in order to improve the performance of chips for high-temperature applications. ; The other is to use different structures and different heat-conducting materials to stick design radiators to dissipate heat from chips. However, due to the need to consider the reliable bonding of the chip to the substrate, the generally used bonding solder cannot effectively transmit heat, which limits the role of the above two ideas in improving the heat dissipation function. Therefore, the chip packaging structure cannot effectively dissipate heat from the chip, and the risk of chip thermal runaway and rupture is high.
发明内容Contents of the invention
本发明目的是提供一种多芯片封装粘结层导热齿结构,它能有效地解决背景技术中所存在的问题。The object of the present invention is to provide a multi-chip package adhesive layer heat conduction tooth structure, which can effectively solve the problems existing in the background technology.
为了解决背景技术中所存在的问题,它包含鳍状散热片3,该鳍状散热片3的上表面通过粘合剂层4与封装基板2相连,所述的封装基板2的上表面设有导热齿6,该导热齿6通过焊接粘接层5焊接在封装基板2,所述的导热齿6上固定有多个间歇排列的半导体芯片1。In order to solve the problems existing in the background technology, it includes a fin-shaped heat sink 3, the upper surface of the fin-shaped heat sink 3 is connected with the packaging substrate 2 through the adhesive layer 4, and the upper surface of the packaging substrate 2 is provided with The heat conduction teeth 6 are welded to the package substrate 2 through the welding adhesive layer 5 , and a plurality of intermittently arranged semiconductor chips 1 are fixed on the heat conduction teeth 6 .
所述的半导体芯片1的半导体材料为选自硅、锗、碳化硅和氮化镓中的至少一种。The semiconductor material of the semiconductor chip 1 is at least one selected from silicon, germanium, silicon carbide and gallium nitride.
所述的焊接粘接层5为铅锡焊料或者锡铅银焊料中的至少一种焊料焊接而成。The soldering adhesive layer 5 is formed by soldering at least one of lead-tin solder or tin-lead-silver solder.
所述的焊接粘接层5为银浆粘接技术、低熔点玻璃粘接技术、导电胶粘接技术、环氧树脂粘接技术或共晶焊技术中的至少一种。The soldering adhesive layer 5 is at least one of silver paste bonding technology, low melting point glass bonding technology, conductive adhesive bonding technology, epoxy resin bonding technology or eutectic soldering technology.
所述的封装基板2为铜基板、氧化铝(Al2O3)陶瓷、氧化铍(BeO)陶瓷、氮化铝(AlN)陶瓷中的至少一种。The packaging substrate 2 is at least one of copper substrate, alumina (Al 2 O 3 ) ceramics, beryllium oxide (BeO) ceramics, and aluminum nitride (AlN) ceramics.
所述的粘合剂层4为导热硅胶、银浆、铝粉浆或锡粉浆中的至少一种。The adhesive layer 4 is at least one of thermally conductive silica gel, silver paste, aluminum paste or tin paste.
所述的鳍状散热片3为铜、铜合金或金刚石材料中的至少一种加工制作而成。The finned heat sink 3 is made of at least one of copper, copper alloy or diamond material.
由于采用了以上技术方案,本发明具有以下有益效果:结构简单,能够在半导体芯片与鳍状散热片之间开辟了热量传导快速通道,使每个芯片都能够很好的散热,从而既能够保护芯片,又能够对芯片进行有效的散热。Due to the adoption of the above technical scheme, the present invention has the following beneficial effects: the structure is simple, and a fast channel for heat conduction can be opened between the semiconductor chip and the fin-shaped heat sink, so that each chip can dissipate heat well, thereby protecting the chip, and can effectively dissipate heat from the chip.
附图说明Description of drawings
为了更清楚地说明本发明,下面将结合附图对实施例作简单的介绍。In order to illustrate the present invention more clearly, the embodiments will be briefly introduced below in conjunction with the accompanying drawings.
图1是本发明的结构示意图;Fig. 1 is a structural representation of the present invention;
图2是本发明中实施例2的俯视图;Fig. 2 is the top view of embodiment 2 among the present invention;
图3是本发明中实施例3的俯视图;Fig. 3 is the top view of embodiment 3 among the present invention;
图4是本发明中实施例4的俯视图。Fig. 4 is a top view of Embodiment 4 of the present invention.
具体实施方式detailed description
为了使本发明实现的技术手段、创作特征、达成目的与功效易于明白了解,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述。In order to make the technical means, creative features, goals and effects achieved by the present invention easy to understand, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention.
实施例1Example 1
参看图1,它包含鳍状散热片3,该鳍状散热片3的上表面通过粘合剂层4与封装基板2相连,所述的封装基板2的上表面设有导热齿6,该导热齿6通过焊接粘接层5焊接在封装基板2,所述的导热齿6上固定有多个间歇排列的半导体芯片1。Referring to Fig. 1, it includes a fin-shaped heat sink 3, the upper surface of the fin-shaped heat sink 3 is connected with the package substrate 2 through the adhesive layer 4, and the upper surface of the package substrate 2 is provided with heat conduction teeth 6, the heat conduction The teeth 6 are welded to the packaging substrate 2 through the welding adhesive layer 5 , and a plurality of intermittently arranged semiconductor chips 1 are fixed on the heat conduction teeth 6 .
所述的半导体芯片1的半导体材料为选自硅、锗、碳化硅和氮化镓中的至少一种。The semiconductor material of the semiconductor chip 1 is at least one selected from silicon, germanium, silicon carbide and gallium nitride.
所述的焊接粘接层5为铅锡焊料或者锡铅银焊料中的至少一种焊料焊接而成。The soldering adhesive layer 5 is formed by soldering at least one of lead-tin solder or tin-lead-silver solder.
所述的焊接粘接层5为银浆粘接技术、低熔点玻璃粘接技术、导电胶粘接技术、环氧树脂粘接技术或共晶焊技术中的至少一种。The soldering adhesive layer 5 is at least one of silver paste bonding technology, low melting point glass bonding technology, conductive adhesive bonding technology, epoxy resin bonding technology or eutectic soldering technology.
所述的封装基板2为铜基板、氧化铝(Al2O3)陶瓷、氧化铍(BeO)陶瓷、氮化铝(AlN)陶瓷中的至少一种。The packaging substrate 2 is at least one of copper substrate, alumina (Al 2 O 3 ) ceramics, beryllium oxide (BeO) ceramics, and aluminum nitride (AlN) ceramics.
所述的粘合剂层4为导热硅胶、银浆、铝粉浆或锡粉浆中的至少一种。The adhesive layer 4 is at least one of thermally conductive silica gel, silver paste, aluminum paste or tin paste.
所述的鳍状散热片3为铜、铜合金或金刚石材料中的至少一种加工制作而成。The finned heat sink 3 is made of at least one of copper, copper alloy or diamond material.
实施例2Example 2
参看图2,通过焊接粘接层5固定在封装基板2上的导热齿6由若干个经过分切的子导热齿条组成,每个独立的子导热齿条首尾分别通过焊接粘接层5固定在相邻的两个半导体芯片1底部,且半导体芯片1底部的两侧的子导热齿之间为相互平行错开的设置。Referring to Fig. 2, the heat conduction tooth 6 fixed on the packaging substrate 2 through the welding adhesive layer 5 is composed of several sub-heat conduction racks that have been cut, and the head and tail of each independent sub heat conduction rack are respectively fixed through the welding adhesive layer 5 At the bottom of two adjacent semiconductor chips 1 , and between the sub-thermal conduction teeth on both sides of the bottom of the semiconductor chip 1 , they are arranged in parallel and staggered with each other.
实施例3Example 3
参看图3,通过焊接粘接层5固定在封装基板2上的导热齿6由两根完整的子导热齿条组成,两根独立的子导热齿条在半导体芯片1的底部回形弯折,相互为镜像的错开设置,弯折完成后延伸至与相邻的下一个半导体芯片1的底部继续弯折。Referring to FIG. 3 , the heat conduction teeth 6 fixed on the packaging substrate 2 through the welding adhesive layer 5 are composed of two complete sub heat conduction racks, and the two independent sub heat conduction racks are bent back at the bottom of the semiconductor chip 1 . The staggered configurations are mirror images of each other, and after the bending is completed, it extends to the bottom of the next adjacent semiconductor chip 1 to continue bending.
实施例4Example 4
参看图4,通过焊接粘接层5固定在封装基板2上的导热齿6由位于半导体芯片1上下两侧的两根主导热齿和子导热齿组成,所述子导热齿的一端与与主导热齿焊接连接,其另一端延伸至半导体芯片1的底部,两根主导热齿上的子导热齿之间为相互错开设置。Referring to Fig. 4, the heat conduction tooth 6 fixed on the packaging substrate 2 through the welding adhesive layer 5 is composed of two main heat conduction teeth and sub heat conduction teeth located on the upper and lower sides of the semiconductor chip 1, and one end of the sub heat conduction tooth is connected with the main heat conduction tooth. The teeth are welded and connected, the other end of which extends to the bottom of the semiconductor chip 1, and the sub-heat-conducting teeth on the two main heat-conducting teeth are mutually staggered.
由于采用了以上技术方案,本发明具有以下有益效果:结构简单,能够在半导体芯片与鳍状散热片之间开辟了热量传导快速通道,使每个芯片都能够很好的散热,从而既能够保护芯片,又能够对芯片进行有效的散热。Due to the adoption of the above technical scheme, the present invention has the following beneficial effects: the structure is simple, and a fast channel for heat conduction can be opened between the semiconductor chip and the fin-shaped heat sink, so that each chip can dissipate heat well, thereby protecting the chip, and can effectively dissipate heat from the chip.
最后应说明的是:以上实施例仅用以说明本发明的技术方案,而非对其限制;尽管参照前述实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解,其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本发明各实施例技术方案的精神和范围。Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that it can still be Modifications are made to the technical solutions described in the foregoing embodiments, or equivalent replacements are made to some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.
Claims (7)
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CN110660678A (en) * | 2019-10-11 | 2020-01-07 | 广州安波通信科技有限公司 | Chip structure assembling method and chip structure |
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CN103782381A (en) * | 2011-07-11 | 2014-05-07 | 德克萨斯仪器股份有限公司 | Electronic assembly including die on substrate with heat spreader having an open window on the die |
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2014
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US5661902A (en) * | 1993-10-08 | 1997-09-02 | Northern Telecom Limited | Methods of making printed circuit boards and heat sink structures |
JPH08111568A (en) * | 1994-10-07 | 1996-04-30 | Mitsubishi Electric Corp | Printed wiring board provided with heat sink |
US5990550A (en) * | 1997-03-28 | 1999-11-23 | Nec Corporation | Integrated circuit device cooling structure |
CN103782381A (en) * | 2011-07-11 | 2014-05-07 | 德克萨斯仪器股份有限公司 | Electronic assembly including die on substrate with heat spreader having an open window on the die |
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