CN104236487A - Flatness detection device and method - Google Patents
Flatness detection device and method Download PDFInfo
- Publication number
- CN104236487A CN104236487A CN201410514042.7A CN201410514042A CN104236487A CN 104236487 A CN104236487 A CN 104236487A CN 201410514042 A CN201410514042 A CN 201410514042A CN 104236487 A CN104236487 A CN 104236487A
- Authority
- CN
- China
- Prior art keywords
- length measuring
- measuring instrument
- plane
- measured
- adjustment seat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 50
- 238000000034 method Methods 0.000 title abstract description 6
- 239000013078 crystal Substances 0.000 claims abstract description 40
- 238000005259 measurement Methods 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims description 16
- 238000003384 imaging method Methods 0.000 claims description 8
- 238000007405 data analysis Methods 0.000 claims description 3
- 238000013519 translation Methods 0.000 claims description 3
- 239000000523 sample Substances 0.000 claims 3
- 238000012360 testing method Methods 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
技术领域technical field
本发明属于应用于光学和机械元件高精度平面度检测、微透镜焦点共面性检测领域，涉及一种基于标准平晶的高精度平面度检测装置及方法。The invention belongs to the field of high-precision flatness detection applied to optical and mechanical components and the coplanarity detection of microlens focus, and relates to a high-precision flatness detection device and method based on a standard flat crystal.
背景技术Background technique
目前国内对光学和机械件高精度平面度的检测主要仪靠圆度仪及三坐标测量机及干涉仪；圆度仪只能检测环带且非连续平面；高精度检测中，三坐标测量机的精度不够，干涉仪只能检测反射面。At present, the domestic detection of high-precision flatness of optical and mechanical parts mainly relies on roundness meters, three-coordinate measuring machines and interferometers; roundness meters can only detect rings and non-continuous planes; in high-precision testing, three-coordinate measuring machines The accuracy is not enough, the interferometer can only detect the reflective surface.
国外检测高精度元件主要是运用高精度三坐标测量机及高精度二维移动台加上高精度测长仪来检测。The detection of high-precision components in foreign countries mainly uses high-precision three-coordinate measuring machines, high-precision two-dimensional mobile platforms and high-precision length measuring instruments for detection.
从国内目前检测条件来看，无法达到检测需求，高精度三坐标测量机及高精度二维移动台国外对我国禁运，或者价格相当昂贵；特别是针对非接触检测的，国内尚无精确的检测方法。Judging from the current domestic testing conditions, it is impossible to meet the testing requirements. High-precision three-dimensional coordinate measuring machines and high-precision two-dimensional mobile platforms are embargoed to my country abroad, or the price is quite expensive; especially for non-contact testing, there is no accurate domestic testing. Detection method.
发明内容Contents of the invention
为了克服现有二维移动台检测平面度时二维移动台直线度对检测结果的影响；本发明的目的是提出一种成本低、结构简单、高精度用于检测平面度接触测量及非接触测量的方法。In order to overcome the influence of the straightness of the two-dimensional mobile station on the detection results when the existing two-dimensional mobile station detects the flatness; method of measurement.
为达成所述目的，本发明第一方面提出一种平面度检测装置，该装置是由标准平晶、调整座、基座、第一测长仪、第一调整座、联接板、一维移动台、二维移动台、第二调整座、第二测长仪、被测件、第三调整座组成；其中基座包括第一基板、第二基板、第三基板和两根框架，在两根框架的上、中、下的位置分别固接第一基板、第二基板、第三基板；调整座安装在第一基座上，将标准平晶通过调整座安装在第一基座上；第三调整座安装在第三基座上，被测件通过第三调整座安装在第三基座上；标准平晶的标准平面与被测件的被测面相互平行放置；将二维移动台安装在第二基座上；一维移动台安装在二维移动台上，用于组成三维平移台；第一调整座安装在联接板上面，第二调整座安装在联接板下面，第一测长仪的底部置于第一调整座中，第二测长仪的底部置于第二调整座中，第一测长仪通过第一调整座安装在联接板上，第二测长仪通过第二调整座安装在联接板上，第一测长仪与第二测长仪的测头反向安装，第一测长仪的测头与标准平晶平面接触，第二测长仪的测头与被测件的被测平面接触；一维移动台的工作面与联接板的工作面联接，再由第一测长仪、第二测长仪组成的检测单元通过联接板安装在一维移动台上；检测时，由二维移动台带着由第一测长仪、第一调整座、联接板、第二调整座、第二测长仪组成的测量单元，按设定步距对被测件进行二维扫描检测，并对第一测长仪、第二测长仪自动记录的示值进行数据分析，得到被测件被测平面的平面度。In order to achieve the stated purpose, the first aspect of the present invention proposes a flatness detection device, which is composed of a standard flat crystal, an adjustment seat, a base, a first length measuring instrument, a first adjustment seat, a connecting plate, a one-dimensional moving stage, a two-dimensional mobile stage, the second adjustment seat, the second length measuring instrument, the measured piece, and the third adjustment seat; the base includes the first base plate, the second base plate, the third base plate and two frames. The upper, middle and lower positions of the root frame are respectively fixed to the first substrate, the second substrate, and the third substrate; the adjustment seat is installed on the first base, and the standard flat crystal is installed on the first base through the adjustment seat; The third adjustment base is installed on the third base, and the tested piece is installed on the third base through the third adjustment base; the standard plane of the standard flat crystal and the measured surface of the tested piece are placed parallel to each other; the two-dimensional moving The stage is installed on the second base; the one-dimensional moving stage is installed on the two-dimensional moving stage to form a three-dimensional translation stage; the first adjustment seat is installed on the connecting plate, the second adjusting seat is installed under the connecting plate, and the first The bottom of the length measuring instrument is placed in the first adjustment seat, the bottom of the second length measuring instrument is placed in the second adjustment seat, the first length measuring instrument is installed on the connecting plate through the first adjustment seat, and the second length measuring instrument passes through The second adjustment seat is installed on the connecting plate, the measuring head of the first length measuring instrument and the measuring head of the second measuring instrument are installed in reverse, the measuring head of the first measuring instrument is in contact with the standard flat crystal plane, and the measuring head of the second measuring instrument The head is in contact with the measured plane of the measured part; the working surface of the one-dimensional mobile table is connected with the working surface of the connecting plate, and then the detection unit composed of the first length measuring instrument and the second measuring instrument is installed on the one-dimensional measuring instrument through the connecting plate. On the mobile platform; during detection, the two-dimensional mobile platform carries the measuring unit composed of the first length measuring instrument, the first adjusting seat, the connecting plate, the second adjusting seat, and the second length measuring instrument, and the measuring unit is set according to the set step distance. Two-dimensional scanning inspection is performed on the tested part, and data analysis is performed on the indication values automatically recorded by the first length measuring instrument and the second length measuring instrument to obtain the flatness of the measured plane of the tested part.
为达成所述目的，本发明第二方面提出一种平面度检测方法的技术方案是使用所述的平面度检测装置，该平面度检测步骤包括：In order to achieve the stated purpose, the second aspect of the present invention proposes a technical solution of a flatness detection method using the flatness detection device, and the flatness detection step includes:
步骤S1：用标准平晶的标准面与被测件的理论平面之间距离作为基准平面，用于消除二维移动台的直线性对测量的影响；Step S1: Use the distance between the standard plane of the standard flat crystal and the theoretical plane of the measured piece as the reference plane to eliminate the influence of the linearity of the two-dimensional mobile stage on the measurement;
步骤S2：将第一测长仪和第二测长仪的各一测头反向安装；Step S2: Reversely install each measuring head of the first length measuring instrument and the second length measuring instrument;
步骤S3：将一测头与标准平晶的平面接触，将另一测头与被测件的被测平面接触；Step S3: contact one measuring head with the plane of the standard flat crystal, and contact the other measuring head with the measured plane of the measured piece;
步骤S4：由二维移动台带着由第一调整座、联接板、第二调整座组成的测量单元，对标准平晶的平面和被测件的被测平面进行二维扫描测量，对第一测长仪和第二测长仪记录的数据进行分析，获得到被测件的被测平面的平面度。Step S4: The two-dimensional mobile platform carries the measuring unit composed of the first adjustment seat, the connecting plate and the second adjustment seat, and performs two-dimensional scanning measurement on the plane of the standard flat crystal and the measured plane of the measured piece, and the second The data recorded by the first length measuring instrument and the second length measuring instrument are analyzed to obtain the flatness of the measured plane of the measured piece.
本发明与现有技术相比有如下优点：Compared with the prior art, the present invention has the following advantages:
本发明方法简便，本发明能够对各连续平面及非连续平面平面度的测量；同时也测量二维移动台的直线性；也可将被测件换成微透镜，并与之相关的高精度测长仪换成CCD成像系统，可测量微透镜焦点的共面性，拓展了标准平晶的高精度平面度检测装置的功能。现有技术二维移动台的直线度为0.005mm以上，本发明解决了现有二维移动台扫描检测时二维移动台的直线度对检测结果的影响，可实现对150mm×150mm平面的平面度进行检测，测量不确定度为0.0005mm；The method of the present invention is simple and convenient, and the present invention can measure the flatness of each continuous plane and discontinuous plane; meanwhile, it also measures the linearity of the two-dimensional mobile platform; The length measuring instrument is replaced with a CCD imaging system, which can measure the coplanarity of the focus of the microlens, and expand the function of the standard flat crystal high-precision flatness detection device. The straightness of the two-dimensional mobile station in the prior art is above 0.005mm. The present invention solves the influence of the straightness of the two-dimensional mobile station on the detection result when the existing two-dimensional mobile station scans and detects, and can achieve a flatness of 150mm×150mm. degree of detection, the measurement uncertainty is 0.0005mm;
附图说明Description of drawings
图1为本发明基于标准平晶的高精度平面度检测方法示意图；Fig. 1 is the schematic diagram of the high-precision flatness detection method based on the standard flat crystal of the present invention;
图2为本发明中两测高精度测长仪安装位置关系示意图；Fig. 2 is a schematic diagram of the installation positions of the two measuring high-precision length measuring instruments in the present invention;
图3为本发明中种基于标准平晶的非接触测量微透镜焦点的共面性检测装置示意图；3 is a schematic diagram of a coplanarity detection device based on a standard flat crystal non-contact measurement microlens focus in the present invention;
1-标准平晶， 2-平晶调整座，1-Standard flat crystal, 2-Flat crystal adjustment seat,
3a-第一基板， 3b-第二基板，3a-first substrate, 3b-second substrate,
3c-第三基板， 4-第一测长仪，3c-the third substrate, 4-the first length measuring instrument,
5-第一调整座， 6-联接板，5-the first adjustment seat, 6-connecting plate,
7-一维移动台， 8-二维移动台，7-one-dimensional mobile station, 8-two-dimensional mobile station,
9-第二调整座， 10-第二度测长仪，9-Second adjustment seat, 10-Second degree length measuring instrument,
11-被测件， 12-第三调整座，11- the tested part, 12- the third adjustment seat,
13-安装座， 14-显微成像单元，13-mounting seat, 14-microscopic imaging unit,
15-微透镜， 16-微透镜安装座，15-microlens, 16-microlens mount,
17-平行光学系统。17-parallel optical system.
具体实施方式Detailed ways
为了使本发明的目的、技术方案和优点更加清楚明白，以下结合具体实施例，并参照附图，对本发明作进一步详细说明。In order to make the objectives, technical solutions and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
本发明基于标准平晶的平面度检测装置用标准平晶1的标准面与被测件11的理论平面之间距离作为基准，旨在消除二维移动台8的直线性对测量的影响，能够对各连续平面及非连续平面平面度的测量。运用一个基准平面和两个测长仪4、10，用于测量二维移动台8的直线度。The flatness detection device based on the standard flat crystal of the present invention uses the distance between the standard surface of the standard flat crystal 1 and the theoretical plane of the measured object 11 as a reference, and aims to eliminate the influence of the linearity of the two-dimensional mobile platform 8 on the measurement, and can Measurement of the flatness of each continuous plane and discontinuous plane. A datum plane and two length measuring instruments 4 and 10 are used to measure the straightness of the two-dimensional mobile platform 8 .
如图1基于标准平晶的平面度检测装置由标准平晶1、调整座2、基座、第一测长仪4、第一调整座5、联接板6、一维移动台7、二维移动台8、第二调整座9、第二测长仪10、被测件11、第三调整座12组成。其中基座包括第一基板3a、第二基板3b、第三基板3c和两根框架3d，两根在框架3d的上、中、下的位置分别固接第一基板3a、第二基板3b、第三基板3c，第一度测长仪4和第二测长仪10的精度均为0.0002mm，实现对150mm×150mm平面的平面度进行检测，测量不确定度为0.0005mm。As shown in Figure 1, the flatness detection device based on the standard flat crystal is composed of a standard flat crystal 1, an adjustment seat 2, a base, a first length measuring instrument 4, a first adjustment seat 5, a connecting plate 6, a one-dimensional mobile platform 7, a two-dimensional The mobile platform 8, the second adjustment seat 9, the second length measuring instrument 10, the measured object 11 and the third adjustment seat 12 are composed. Wherein the base comprises a first base plate 3a, a second base plate 3b, a third base plate 3c and two frames 3d, and the two frames are respectively fixed on the first base plate 3a, the second base plate 3b, The accuracy of the third substrate 3c, the first length measuring instrument 4 and the second length measuring instrument 10 are all 0.0002mm, which can detect the flatness of a 150mm×150mm plane, and the measurement uncertainty is 0.0005mm.
调整座2安装在第一基座3a上，将标准平晶1通过调整座2安装在第一基座3a上；第三调整座12安装在第三基座3c上，将被测件11通过第三调整座12安装在第三基座3c上；将标准平晶1的标准平面与被测件11的被测面相互平行放置；将二维移动台8安装在第二基座3b上；将一维移动台7安装在二维移动台8上，用于组成三维平移台；第一调整座5安装在联接板6上面，第二调整座9安装在联接板6下面，第一测长仪4的底部置于第一调整座5中，第二测长仪10的底部置于第二调整座9中，将第一测长仪4通过第一调整座5安装在联接板6上，将第二测长仪10通过第二调整座9安装在联接板6上，第一测长仪4与第二测长仪10的测头反向安装，第一测长仪4的测头与标准平晶平面接触，第二测长仪10的测头与被测件11的被测平面接触；一维移动台7的工作面与联接板6的工作面联接，再将由第一测长仪4、第二测长仪10组成的检测单元通过联接板6安装在一维移动台7上；检测时，由二维移动台8带着由第一测长仪4、第一调整座5、联接板6、第二调整座9、第二测长仪10组成的测量单元，按设定步距对被测件11进行二维扫描检测，并对第一测长仪4、第二测长仪10自动记录的示值进行数据分析，得到被测件11被测平面的平面度。第一测长仪4、第二测长仪10的位置关系为测杆测长方向遵循阿贝原则。第一基板3a、第二基板3b、第三基板3c相互平行，且安置于两根框架3d中。第一第一度测长仪4和第二测长仪10的精度为0.0002mm，实现对150mm×150mm平面的平面度进行检测，测量不确定度为0.0005mm。The adjustment base 2 is installed on the first base 3a, and the standard flat crystal 1 is installed on the first base 3a through the adjustment base 2; the third adjustment base 12 is installed on the third base 3c, and the DUT 11 is passed through The third adjustment base 12 is installed on the third base 3c; the standard plane of the standard flat crystal 1 and the measured surface of the measured object 11 are placed parallel to each other; the two-dimensional mobile platform 8 is installed on the second base 3b; Install the one-dimensional mobile platform 7 on the two-dimensional mobile platform 8 to form a three-dimensional translation platform; the first adjustment seat 5 is installed on the connecting plate 6, the second adjusting seat 9 is installed under the connecting plate 6, and the first length measurement The bottom of the instrument 4 is placed in the first adjustment seat 5, the bottom of the second length measuring instrument 10 is placed in the second adjustment seat 9, and the first length measuring instrument 4 is installed on the connecting plate 6 through the first adjustment seat 5, The second length measuring instrument 10 is installed on the connecting plate 6 through the second adjustment seat 9, the measuring head of the first length measuring instrument 4 and the second length measuring instrument 10 are installed in reverse, and the measuring head of the first length measuring instrument 4 is connected to the Standard flat crystal plane contact, the measuring head of the second length measuring instrument 10 is in contact with the measured plane of the measured piece 11; 4. The detection unit composed of the second length measuring instrument 10 is installed on the one-dimensional mobile platform 7 through the connecting plate 6; The measuring unit composed of the connecting plate 6, the second adjustment seat 9 and the second length measuring instrument 10 performs two-dimensional scanning detection on the measured piece 11 according to the set step distance, and performs two-dimensional scanning detection on the first length measuring instrument 4 and the second length measuring instrument 4. The indication value automatically recorded by the instrument 10 is used for data analysis to obtain the flatness of the measured plane of the tested object 11 . The positional relationship between the first length measuring instrument 4 and the second length measuring instrument 10 is that the length measuring direction of the measuring rod follows Abbe's principle. The first substrate 3a, the second substrate 3b, and the third substrate 3c are parallel to each other and arranged in two frames 3d. The accuracy of the first first-degree length measuring instrument 4 and the second length measuring instrument 10 is 0.0002mm, which can detect the flatness of a 150mm×150mm plane, and the measurement uncertainty is 0.0005mm.
如图2，第一测长仪4、第一调整座5、联接板6，、第二调整座9、第二测长仪10的位置关系，第一测长仪4和第二测长仪10应反向安装，两测长仪测头的同轴度应在1mm以内。As shown in Figure 2, the positional relationship between the first length measuring instrument 4, the first adjusting seat 5, the connecting plate 6, the second adjusting seat 9, and the second length measuring instrument 10, the first length measuring instrument 4 and the second length measuring instrument 10 should be installed in reverse, and the coaxiality of the measuring heads of the two length measuring instruments should be within 1mm.
如图3示出本发明基于标准平晶的平面度检测装置进行非接触检测时，当只要将第二测长仪10是显微成像单元，被测件11是微透镜时，微透镜的物面与平行光学系统13的平行安放；检测时，将显微成像单元通过一维移动台7及二维移动台8能清晰地看到星点像，记下第一测长仪4的示值；通过二维移动台8将显微成像单元移到成下一个微透镜的位置，再通过一维移动台7使显微成像单元能看到清晰的星点像，再记下第一测长仪4的示值，依次进行扫描检测；最后经数据处后得到微透镜焦点的共面性。As shown in Figure 3, when the flatness detection device based on the standard flat crystal of the present invention carries out non-contact detection, as long as the second length measuring instrument 10 is a microscopic imaging unit, and when the object under test 11 is a microlens, the object of the microlens surface parallel to the parallel optical system 13; when testing, the microscopic imaging unit can clearly see the star point image through the one-dimensional mobile platform 7 and the two-dimensional mobile platform 8, and write down the indication value of the first length measuring instrument 4 Move the microscopic imaging unit to the position of the next microlens by the two-dimensional mobile platform 8, then make the microscopic imaging unit see a clear star point image by the one-dimensional mobile platform 7, and write down the first length measurement The display value of the instrument 4 is scanned and tested in turn; finally, the coplanarity of the microlens focus is obtained after data processing.
本发明的检测装置是测量标准平晶1的标准面与被测件11的理论平面之间距离的变化值，与带动第一测长仪测长仪4、第二测长仪10扫描测量的二维移动台在测量方向的直线性无关；两扫描方向的直线性不影响检测结果；二维移动台8的角晃对测量结果影响相当小；取标准平晶1和标准平晶1与被测件11的理论平面之间距离为1000mm，目前国内的二维移动台8的角晃做到30"是相当容易的，则影响的测量结果为1000*(1-cos(30"))＝0.0001mm；综合各项不确定度，基于标准平晶1的平面度检测方法的测量不确度为0.0005mm。The detection device of the present invention is to measure the change value of the distance between the standard plane of the standard flat crystal 1 and the theoretical plane of the measured piece 11, and drive the first length measuring instrument length measuring instrument 4 and the second length measuring instrument 10 to scan and measure. The linearity of the two-dimensional mobile platform in the measurement direction has nothing to do; the linearity of the two scanning directions does not affect the detection results; the angle of the two-dimensional mobile platform 8 has a relatively small impact on the measurement results; The distance between the theoretical planes of the test piece 11 is 1000mm. It is quite easy for the current domestic two-dimensional mobile station 8 to achieve an angle of 30", and the affected measurement result is 1000*(1-cos(30"))= 0.0001mm; comprehensive uncertainty, the measurement uncertainty based on the flatness detection method of the standard flat crystal 1 is 0.0005mm.
用标准平晶1和标准平晶1的标准面与被测件11的理论平面之间距离作为基准，旨在消除二维移动台8的直线性对测量的影响，能够对各连续平面及非连续平面平面度的测量。The distance between the standard flat crystal 1 and the standard surface of the standard flat crystal 1 and the theoretical plane of the measured object 11 is used as a benchmark, aiming to eliminate the influence of the linearity of the two-dimensional mobile stage 8 on the measurement, and to be able to measure each continuous plane and non-linear Measurement of flatness of continuous planes.
本发明平面度检测方法是使用所述的平面度检测装置，该平面度检测步骤包括：The flatness detection method of the present invention uses the described flatness detection device, and the flatness detection step comprises:
步骤S1：用标准平晶1的标准面与被测件11的理论平面之间距离作为基准平面，用于消除二维移动台8的直线性对测量的影响；Step S1: using the distance between the standard surface of the standard flat crystal 1 and the theoretical plane of the measured object 11 as the reference plane, which is used to eliminate the influence of the linearity of the two-dimensional mobile platform 8 on the measurement;
步骤S2：将第一测长仪4和第二测长仪10的各一测头反向安装；Step S2: Reversely install each measuring head of the first length measuring instrument 4 and the second length measuring instrument 10;
步骤S3：将一测头与标准平晶1的平面接触，将另一测头与被测件11的被测平面接触；Step S3: contacting one measuring head with the plane of the standard flat crystal 1, and contacting the other measuring head with the measured plane of the DUT 11;
步骤S4：由二维移动台8带着由、第一调整座5、联接板6、第二调整座9组成的测量单元，对标准平晶1的平面和被测件11的被测平面进行二维扫描测量，对第一测长仪4第二测长仪10记录的数据进行分析，获得到被测件11的被测平面的平面度。被测平面是连续平面及非连续平面。运用一个基准平面、第一测长仪4和第二测长仪10，用于测量二维移动台的直线度。被测件11是微透镜。第一测长仪4和第二测长仪10为CCD成像单元，用于对微透镜焦点的共面性进行非接触测量。Step S4: The two-dimensional mobile platform 8 carries the measuring unit composed of the first adjustment seat 5, the connecting plate 6, and the second adjustment seat 9, and carries out the measurement on the plane of the standard flat crystal 1 and the measured plane of the measured object 11. In the two-dimensional scanning measurement, the data recorded by the first length measuring instrument 4 and the second length measuring instrument 10 are analyzed to obtain the flatness of the measured plane of the measured object 11 . The measured plane is a continuous plane and a discontinuous plane. A reference plane, the first length measuring instrument 4 and the second length measuring instrument 10 are used to measure the straightness of the two-dimensional mobile platform. The object under test 11 is a microlens. The first length measuring instrument 4 and the second length measuring instrument 10 are CCD imaging units for non-contact measurement of the coplanarity of the microlens focus.
以上所述，仅为本发明中的具体实施方式，但本发明的保护范围并不局限于此，任何熟悉该技术的人在本发明所揭露的技术范围内，可理解想到的变换或替换，都应涵盖在本发明的包含范围之内。The above is only a specific implementation mode in the present invention, but the scope of protection of the present invention is not limited thereto. Anyone familiar with the technology can understand the conceivable transformation or replacement within the technical scope disclosed in the present invention. All should be covered within the scope of the present invention.
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410514042.7A CN104236487A (en) | 2014-09-29 | 2014-09-29 | Flatness detection device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410514042.7A CN104236487A (en) | 2014-09-29 | 2014-09-29 | Flatness detection device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104236487A true CN104236487A (en) | 2014-12-24 |
Family
ID=52225038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410514042.7A Pending CN104236487A (en) | 2014-09-29 | 2014-09-29 | Flatness detection device and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104236487A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105651211A (en) * | 2016-03-08 | 2016-06-08 | 哈尔滨工程大学 | Mirror surface out-plane displacement measurement device and method based on geometrical optics |
| CN106524955A (en) * | 2016-12-16 | 2017-03-22 | 甘肃省计量研究院 | Plane equal thickness interference digital display measurement device and method of measuring optical flat flatness |
| CN106596237A (en) * | 2016-11-09 | 2017-04-26 | 石长海 | Detection method of bent sheet generated by cutting wafer |
| CN106813600A (en) * | 2015-11-30 | 2017-06-09 | 北京航空航天大学 | A kind of contactless discontinuous plane measurement of planeness system and method |
| CN112066900A (en) * | 2020-09-16 | 2020-12-11 | 江西财经大学 | A distance measuring device |
| CN116499398A (en) * | 2023-06-29 | 2023-07-28 | 天津大学 | Roughness sensor and roughness grade evaluation and three-dimensional evaluation device and method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2463615A2 (en) * | 2010-12-08 | 2012-06-13 | Robert Bosch GmbH | Sensor system for detecting the shape, diameter and/or roughness of a surface |
| CN103217115A (en) * | 2012-01-19 | 2013-07-24 | 昆山思拓机器有限公司 | Measuring device for wafer thickness and wafer planeness |
| CN103389052A (en) * | 2013-08-09 | 2013-11-13 | 昆山允可精密工业技术有限公司 | Vertical shape measuring device capable of compensating shaft system errors of wafer |
| CN203432555U (en) * | 2013-09-04 | 2014-02-12 | 吴江市博众精工科技有限公司 | A measuring mechanism for measuring the flatness of a small component |
| US20140090455A1 (en) * | 2012-09-28 | 2014-04-03 | Ford Global Technologies, Llc | Ding detection system |
| DE102012109298A1 (en) * | 2012-10-01 | 2014-06-12 | Breitmeier Messtechnik Gmbh | Method for cleaning e.g. palpation needle, involves transferring device component, which is to be cleaned to cleaning bag of cleaning apparatus, retaining device component in bag, and cleaning component by blow-off or suction process |
-
2014
- 2014-09-29 CN CN201410514042.7A patent/CN104236487A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2463615A2 (en) * | 2010-12-08 | 2012-06-13 | Robert Bosch GmbH | Sensor system for detecting the shape, diameter and/or roughness of a surface |
| CN103217115A (en) * | 2012-01-19 | 2013-07-24 | 昆山思拓机器有限公司 | Measuring device for wafer thickness and wafer planeness |
| US20140090455A1 (en) * | 2012-09-28 | 2014-04-03 | Ford Global Technologies, Llc | Ding detection system |
| DE102012109298A1 (en) * | 2012-10-01 | 2014-06-12 | Breitmeier Messtechnik Gmbh | Method for cleaning e.g. palpation needle, involves transferring device component, which is to be cleaned to cleaning bag of cleaning apparatus, retaining device component in bag, and cleaning component by blow-off or suction process |
| CN103389052A (en) * | 2013-08-09 | 2013-11-13 | 昆山允可精密工业技术有限公司 | Vertical shape measuring device capable of compensating shaft system errors of wafer |
| CN203432555U (en) * | 2013-09-04 | 2014-02-12 | 吴江市博众精工科技有限公司 | A measuring mechanism for measuring the flatness of a small component |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106813600A (en) * | 2015-11-30 | 2017-06-09 | 北京航空航天大学 | A kind of contactless discontinuous plane measurement of planeness system and method |
| CN106813600B (en) * | 2015-11-30 | 2020-01-03 | 北京航空航天大学 | Non-contact discontinuous plane flatness measuring system |
| CN105651211A (en) * | 2016-03-08 | 2016-06-08 | 哈尔滨工程大学 | Mirror surface out-plane displacement measurement device and method based on geometrical optics |
| CN105651211B (en) * | 2016-03-08 | 2018-05-18 | 哈尔滨工程大学 | A kind of minute surface based on geometric optics goes out planar displacement measurement device and its measuring method |
| CN106596237A (en) * | 2016-11-09 | 2017-04-26 | 石长海 | Detection method of bent sheet generated by cutting wafer |
| CN106524955A (en) * | 2016-12-16 | 2017-03-22 | 甘肃省计量研究院 | Plane equal thickness interference digital display measurement device and method of measuring optical flat flatness |
| CN112066900A (en) * | 2020-09-16 | 2020-12-11 | 江西财经大学 | A distance measuring device |
| CN116499398A (en) * | 2023-06-29 | 2023-07-28 | 天津大学 | Roughness sensor and roughness grade evaluation and three-dimensional evaluation device and method |
| CN116499398B (en) * | 2023-06-29 | 2023-09-05 | 天津大学 | Apparatus and method for roughness sensor, roughness grade evaluation and three-dimensional evaluation |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104236487A (en) | Flatness detection device and method | |
| CN105157606B (en) | Contactless complicated optical surface profile high precision three-dimensional measurement method and measurement apparatus | |
| CN103438824B (en) | A kind of large-scale wallboard class Components Digital quality determining method | |
| CN106679595B (en) | The centre deviation of angle of wedge spherical lens and the measurement method of the angle of wedge | |
| WO2016150005A1 (en) | Automatic detection method and apparatus for digital caliper | |
| CN107796321A (en) | A kind of cylinder bore diameter detection device | |
| CN105698670A (en) | Machine tool guide rail installation plane parallelism quick measurement device and method | |
| CN104344803A (en) | Flatness detecting device with variable detecting position | |
| CN110160464B (en) | Device for measuring cylindricity of inner hole and application method thereof | |
| CN105444673A (en) | Device and method for determining center of optical element according to rotating translation absolute detection method | |
| CN104315985A (en) | Interferometric method for measuring central thickness of lens | |
| CN207501875U (en) | A kind of cylinder bore diameter detection device | |
| CN204188158U (en) | A kind of flatness checking device of variable detection position | |
| CN210242695U (en) | Crankshaft axial dimension detection device | |
| CN102865829A (en) | Vertical wide-range high-precision optical plane testing device | |
| CN103438803A (en) | Method for performing view-field-across accurate measurement on size of rectangular part through computer vision technology | |
| CN102788548A (en) | Steel band planeness test device | |
| CN204666093U (en) | A kind of non-contact measurement mechanical arm | |
| CN106403852A (en) | Plate shape flatness static state measuring device and method | |
| CN103737427B (en) | A kind of lathe is done more physical exercises the checkout gear of the axle depth of parallelism and method | |
| WO2020135891A1 (en) | Laser parallelism detector | |
| CN111121638B (en) | Method for calibrating displacement of material testing machine | |
| CN202002606U (en) | Sheet metal part planeness measuring device | |
| CN104034266A (en) | Surface microstructure based high-accuracy length detection method | |
| CN209371991U (en) | It is a kind of for detecting the device of phone housing deformation quantity |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20141224 |
|
| WD01 | Invention patent application deemed withdrawn after publication |