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CN104230333B - A kind of high temperature piezoceramics and preparation method thereof - Google Patents

A kind of high temperature piezoceramics and preparation method thereof Download PDF

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CN104230333B
CN104230333B CN201410069700.6A CN201410069700A CN104230333B CN 104230333 B CN104230333 B CN 104230333B CN 201410069700 A CN201410069700 A CN 201410069700A CN 104230333 B CN104230333 B CN 104230333B
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piezoelectric
piezoelectric ceramic
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CN104230333A (en
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郭栋
王云丽
蔡锴
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Institute of Acoustics CAS
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Abstract

本发明公开了一种高居里温度压电陶瓷,该压电陶瓷通式为(BiYb)1‑xPbxTiyZrx‑yO3+zmol%A,其中x=0.91~0.98,y=0.45~0.68,z=0.05~5,A为改性元素。本发明还提供了一种制备该压电陶瓷的方法,利用该方法制备的压电陶瓷具有较高的居里温度、较高的压电常数、较低介电损耗、较高机电耦合系数和较宽范围可变的机械品质因数等,并克服了现有压电材料难于同时具有较高居里温度和较高压电性能,且综合电学参数无法满足特定压电器件使用要求的问题。本发明具有工艺简单稳定、无需特殊设备、成本较低和便于规模化工业生产等特点,可用于相应各种高温压电器件。The invention discloses a piezoelectric ceramic with a high Curie temperature. The general formula of the piezoelectric ceramic is (BiYb) 1-x Pb x Ti y Zr x-y O 3 +zmol%A, where x=0.91-0.98, y= 0.45~0.68, z=0.05~5, A is a modifying element. The present invention also provides a method for preparing the piezoelectric ceramic, the piezoelectric ceramic prepared by the method has a higher Curie temperature, a higher piezoelectric constant, a lower dielectric loss, a higher electromechanical coupling coefficient and A wide range of variable mechanical quality factors, etc., and overcome the problems that existing piezoelectric materials are difficult to have high Curie temperature and high piezoelectric performance at the same time, and the comprehensive electrical parameters cannot meet the requirements of specific piezoelectric devices. The invention has the characteristics of simple and stable process, no need of special equipment, low cost, convenient large-scale industrial production, etc., and can be used for corresponding various high-temperature piezoelectric devices.

Description

一种高温压电陶瓷材料及其制备方法A kind of high temperature piezoelectric ceramic material and preparation method thereof

技术领域technical field

本发明涉及电子陶瓷和压电器件领域,具体涉及一种具有高居里温度的压电陶瓷及其制备方法。The invention relates to the field of electronic ceramics and piezoelectric devices, in particular to a piezoelectric ceramic with a high Curie temperature and a preparation method thereof.

背景技术Background technique

现代工业的发展对各类声学换能器及振动传感器等的高温环境作业提出了更高的要求,这就要求这些器件所使用的压电材料具有较高的居里温度(Tc)。例如,在油井下使用的声波测井换能器、航天器上使用的压电驱动器及传感器、燃料注射喷嘴驱动器以及其他极端环境下使用的各类传感器等,都需要使用Tc在380℃以上甚至更高的压电陶瓷。目前最常用的压电陶瓷锆钛酸铅(PZT)的Tc一般远低于360℃。因为材料随温度升高的逐渐退极化而导致的压电性能退化问题,其工作温度上限一般是在其居里温度的1/2处,因而PZT的使用温度一般远低于180℃。因此,研究制备具有高居里温度的压电陶瓷对高温压电器件的制备具有重要意义。The development of modern industry has put forward higher requirements for the high-temperature environment operation of various acoustic transducers and vibration sensors, which requires the piezoelectric materials used in these devices to have a higher Curie temperature (T c ). For example, acoustic logging transducers used in oil wells, piezoelectric actuators and sensors used in spacecraft, fuel injection nozzle drivers, and various sensors used in other extreme environments all require Tc above 380°C and even higher piezoelectric ceramics. The T c of the most commonly used piezoelectric ceramic lead zirconate titanate (PZT) is generally much lower than 360°C. Because of the degradation of piezoelectric properties caused by the gradual depolarization of the material with increasing temperature, the upper limit of its working temperature is generally at 1/2 of its Curie temperature, so the service temperature of PZT is generally much lower than 180°C. Therefore, it is of great significance to study the preparation of piezoelectric ceramics with high Curie temperature for the preparation of high temperature piezoelectric devices.

一般而言,压电材料的居里温度越高,其压电性能会越差。例如公开号为CN1295046的中国专利公开了一种铋层状压电陶瓷,其居里温度为865℃,但其压电性能很差,压电常数d33只有约20pC/N。2001年一种组成为(1-x)BiScO3-xPbTiO3(BSPT)的钙钛矿结构压电陶瓷被报道(Japanse Journal ofApplied Physics,Vol40,pp5999-6002),该材料同时具有较好的压电性能和较高居里温度(在x=0.64时,其d33约为460pC/N,Tc约为450℃)。然而,原材料Sc2O3价格极其昂贵。另外,该压电材料还有综合电学性能差(如机械品质因数Qm过低,导致其能耗高、使用过程中发热严重),性能不稳定等问题。这都严重制约了其实际应用。因此,具有高居里温度(Tc>400℃)、高压电常数(d33>460pC/N)及优良综合电学性能(如高Qm和低损耗)的压电陶瓷的制备及相关稳定工艺的开发,一直是该领域亟待解决的一个难题。In general, the higher the Curie temperature of a piezoelectric material, the worse its piezoelectric performance. For example, Chinese Patent Publication No. CN1295046 discloses a bismuth layered piezoelectric ceramic with a Curie temperature of 865° C., but its piezoelectric performance is very poor, and its piezoelectric constant d 33 is only about 20 pC/N. In 2001, a perovskite structure piezoelectric ceramic composed of (1-x)BiScO 3 -xPbTiO 3 (BSPT) was reported (Japan Journal of Applied Physics, Vol40, pp5999-6002). Electrical properties and higher Curie temperature (at x=0.64, its d 33 is about 460pC/N, and T c is about 450°C). However, the raw material Sc 2 O 3 is extremely expensive. In addition, the piezoelectric material has poor comprehensive electrical properties (for example, the mechanical quality factor Q m is too low, resulting in high energy consumption and severe heat generation during use), and unstable performance. This seriously restricts its practical application. Therefore, the preparation of piezoelectric ceramics with high Curie temperature (T c >400℃), piezoelectric constant (d 33 >460pC/N) and excellent comprehensive electrical properties (such as high Q m and low loss) and related stable processes The development of it has always been a difficult problem to be solved in this field.

发明内容Contents of the invention

针对现有压电陶瓷材料难于同时获得高居里温度和高压电性能,综合电性能无法同时满足器件使用要求,或价格昂贵等问题,本发明提供了一种具有高居里温度、较高压电系数、机械品质因数得到很大提高且在一定范围内可调和介电损耗低的新型掺杂低成本高温压电陶瓷材料。Aiming at the problems that existing piezoelectric ceramic materials are difficult to obtain high Curie temperature and high-voltage electrical properties at the same time, the comprehensive electrical properties cannot meet the requirements of device use at the same time, or the price is expensive, etc., the present invention provides a high Curie temperature, relatively high piezoelectric ceramic material. Coefficient, mechanical quality factor has been greatly improved and can be adjusted within a certain range, and a new type of doped low-cost high-temperature piezoelectric ceramic material with low dielectric loss.

本发明提出的高居里温度压电陶瓷材料,其具有如下的化学结构通式:(BiYb)1-xPbxTiyZrx-yO3+zmol%A,其中x取值范围为0.91~0.98,y取值范围为0.45~0.68,z取值范围为0.05~5,A为改性元素,可以为单一的金属元素,也可以为多种金属元素。当该改性元素的离子半径小于Yb和Ti的金属元素的离子半径,且是多价元素时,才具有较好改性作用,但此改性元素不包括Fe。The high Curie temperature piezoelectric ceramic material proposed by the present invention has the following general chemical structure formula: (BiYb) 1-x Pb x Ti y Zr xy O 3 +zmol%A, where x ranges from 0.91 to 0.98, The value range of y is 0.45-0.68, the value range of z is 0.05-5, and A is a modifying element, which can be a single metal element or multiple metal elements. When the ionic radius of the modifying element is smaller than the ionic radius of Yb and Ti metal elements, and it is a multivalent element, it has a better modifying effect, but the modifying element does not include Fe.

特别的,当所述改性元素是Mn、Nb和Cr元素中的一种或多种时,该压电陶瓷才具有更好的综合性能。In particular, when the modifying element is one or more of Mn, Nb and Cr, the piezoelectric ceramic has better comprehensive properties.

对于优选体系,所述x的取值范围为0.91~0.98,y取值范围为0.45~0.68,z取值范围为0.05~5。此范围内的压电陶瓷具有更加优异的性能。更优选的,所述z的取值范围为0.1~2。For the preferred system, the value range of x is 0.91-0.98, the value range of y is 0.45-0.68, and the value range of z is 0.05-5. Piezoelectric ceramics within this range have more excellent performance. More preferably, the value range of z is 0.1-2.

所述高居里温度压电陶瓷的制备方法包括以下步骤:The preparation method of the high Curie temperature piezoelectric ceramics comprises the following steps:

(1)将Bi2O3、Yb2O3、Pb3O4、TiO2、ZrO2和改性元素的氧化物或盐按摩尔比称量,然后混合研磨得到原料粉体;(1) Weigh Bi 2 O 3 , Yb 2 O 3 , Pb 3 O 4 , TiO 2 , ZrO 2 and oxides or salts of modifying elements in molar ratio, and then mix and grind to obtain raw material powder;

(2)将步骤(1)得到的粉体烘干、过筛后预烧,并将预烧得到的块体再充分研磨;(2) pre-calcining the powder obtained in step (1) after drying, sieving, and fully grinding the block obtained by pre-calcining;

(3)将步骤(2)研磨得到的粉体烘干、造粒、陈化、过筛后压制成陶瓷坯体;(3) drying, granulating, aging, and sieving the powder obtained by grinding in step (2) to form a ceramic green body;

(4)经排胶后,将陶瓷坯体于在密封坩埚中在常压下高温烧结,制得压电陶瓷体;(4) After debinding, the ceramic green body is sintered in a sealed crucible at a high temperature under normal pressure to obtain a piezoelectric ceramic body;

(5)将烧成的压电陶瓷体打磨、抛光、被银电极后,在100℃~180℃和3~5kV/mm电场下进行极化。(5) After the fired piezoelectric ceramic body is ground, polished, and covered with silver electrodes, it is polarized at 100° C. to 180° C. and an electric field of 3 to 5 kV/mm.

优选的,所述改性元素的相应氧化物或盐包括MnCO3、Nb2O5和Cr2O3Preferably, the corresponding oxides or salts of the modifying elements include MnCO 3 , Nb 2 O 5 and Cr 2 O 3 .

步骤(1)和步骤(2)所用研磨方式为球磨。也可以采用其他混合磨料方式,如机械振动磨;球磨时,料:磨球:液体球磨介质比例范围约为1:1~2:0.5~2,球磨时间约为6~24小时。The grinding method used in step (1) and step (2) is ball milling. Other mixed abrasive methods can also be used, such as mechanical vibration mill; during ball milling, the ratio of material: balls: liquid ball milling medium is about 1:1~2:0.5~2, and the ball milling time is about 6~24 hours.

步骤(2)的预烧温度为700~900℃,预烧时间约为1.5~3小时。The pre-burning temperature in step (2) is 700-900°C, and the pre-burning time is about 1.5-3 hours.

步骤(3)所用粘接剂为质量分数不大于6%PVA的水溶液,而陈化时间不超过12小时。The adhesive used in step (3) is an aqueous solution with a mass fraction not greater than 6% PVA, and the aging time is not more than 12 hours.

步骤(4)中的烧结温度为1050~1280℃,烧结时间为2~5小时。优选的,烧结温度为1100~1250℃,烧结时间为2~3小时The sintering temperature in step (4) is 1050-1280° C., and the sintering time is 2-5 hours. Preferably, the sintering temperature is 1100-1250°C, and the sintering time is 2-3 hours

步骤(5)中极化温度为100℃~180℃,极化电场约为3~5kV/mm,时间为20分钟。在此极化条件下,制备获得的压电陶瓷材料具有更好性能。In step (5), the polarization temperature is 100°C-180°C, the polarization electric field is about 3-5kV/mm, and the time is 20 minutes. Under this polarization condition, the prepared piezoelectric ceramic material has better performance.

本发明提供了一种具有高居里温度且综合压电性能优异的复合钙钛矿(BiYb)1-xPbxTiyZrx-yO3+zmol%A新型高温压电陶瓷,解决了现有压电材料居里温度和综合压电性能无法同时满足特定指标的要求的问题。该压电陶瓷同时具有较高的高居里温度(365~430℃)、较高压电常数(170~330pC/N),较宽范围可变的机械品质因数(50~500)和较低的介电损耗低(0.001~0.05),可用于各种工作温度在210℃以上的换能器、传感器等相关压电器件。与其它高温压电陶瓷相比,该新压电陶瓷制备成本低得多,是一种很有应用前景的高温压电材料。The present invention provides a new type of high-temperature piezoelectric ceramics with high Curie temperature and excellent comprehensive piezoelectric performance composite perovskite (BiYb) 1-x Pb x Ti y Zr xy O 3 +zmol%A, which solves the problem of existing piezoelectric The Curie temperature and comprehensive piezoelectric properties of electric materials cannot meet the requirements of specific indicators at the same time. The piezoelectric ceramic also has a high Curie temperature (365-430°C), a high piezoelectric constant (170-330pC/N), a wide range of variable mechanical quality factors (50-500) and a low The dielectric loss is low (0.001-0.05), and it can be used in various piezoelectric devices such as transducers and sensors whose working temperature is above 210°C. Compared with other high-temperature piezoelectric ceramics, the preparation cost of the new piezoelectric ceramic is much lower, and it is a promising high-temperature piezoelectric material.

附图说明Description of drawings

图1、(BiYb)0.065Pb0.935Ti0.51Zr0.425O3+1.2mol%Mn在1100℃下烧结,保温2.5h所得样品的扫描电镜图像。Figure 1. Scanning electron microscope image of the sample obtained by (BiYb) 0.065 Pb 0.935 Ti 0.51 Zr 0.425 O 3 +1.2mol%Mn sintered at 1100°C and kept for 2.5h.

图2、(BiYb)0.07Pb0.93Ti0.47Zr0.46O3+0.1mol%Mn在1100℃下烧结,保温2.5h所得样品的介温图谱。Figure 2. The medium temperature spectrum of the sample obtained by sintering (BiYb) 0.07 Pb 0.93 Ti 0.47 Zr 0.46 O 3 +0.1mol%Mn at 1100°C and holding for 2.5 hours.

具体实施方式detailed description

以下列出本发明的优选的实施例,其仅用作对本发明的解释而不是限制。The preferred embodiments of the present invention are listed below, which are only used to explain the present invention rather than limit it.

实施例1:Example 1:

将Bi2O3、Yb2O3、Pb3O4、TiO2、ZrO2和MnCO3按(BiYb)0.07Pb0.93Ti0.49Zr0.44O3++1mol%Mn摩尔比称量,加入无水乙醇介质混合球磨,烘干过筛后于750℃预烧2h。将预烧后块体再球磨、烘干并加入5%PVA造粒,陈化6小时,过筛后压制成直径为15mm,厚度为1.5mm左右的坯体,于1120℃下烧结2.5h,所得样品经过打磨、抛光、被银后,在160℃硅油中以4kV/mm电场极化20min,降温后制得所需陶瓷样品,测试所得综合电性能为:d33=213pC/N,Tc=395℃,Qm=356,tanδ=0.002。Weigh Bi 2 O 3 , Yb 2 O 3 , Pb 3 O 4 , TiO 2 , ZrO 2 and MnCO 3 according to the molar ratio of (BiYb) 0.07 Pb 0.93 Ti 0.49 Zr 0.44 O 3 ++1mol%Mn, add anhydrous The ethanol medium is mixed with ball mill, dried and sieved, and pre-fired at 750°C for 2 hours. The pre-fired block is then ball milled, dried and granulated with 5% PVA, aged for 6 hours, sieved and pressed into a green body with a diameter of 15mm and a thickness of about 1.5mm, and sintered at 1120°C for 2.5h. The obtained samples were ground, polished, silvered, and polarized in 160°C silicone oil with an electric field of 4kV/mm for 20min. After cooling down, the required ceramic samples were obtained. The comprehensive electrical properties obtained from the test were: d 33 =213pC/N, T c =395°C, Q m =356, tanδ=0.002.

实施例2:Example 2:

将Bi2O3、Yb2O3、Pb3O4、TiO2、ZrO2和Nb2O5按(BiYb)0.06Pb0.94Ti0.5Zr0.44O3++0.2mol%Nb摩尔比称量,加入水介质混合球磨,烘干过筛后于750℃预烧2h。将预烧后块体再球磨、烘干并加入6%PVA造粒,陈化6小时,过筛后压制成直径为15mm,厚度为1.5mm左右的坯体,于1150℃下烧结3h,所得样品经过打磨、抛光、被银后,在160℃硅油中以4kV/mm电场极化10min,降温至110℃再极化10min制得陶瓷样品,测试所得综合电性能为:d33=213pC/N,Tc=390℃,Qm=156,tanδ=0.011。Bi 2 O 3 , Yb 2 O 3 , Pb 3 O 4 , TiO 2 , ZrO 2 and Nb 2 O 5 were weighed according to the molar ratio of (BiYb) 0.06 Pb 0.94 Ti 0.5 Zr 0.44 O 3 ++0.2mol%Nb, Add water medium to mix ball mill, dry and sieve, pre-fire at 750°C for 2h. Ball mill the pre-fired block, dry it, add 6% PVA to granulate, age for 6 hours, press it into a green body with a diameter of 15mm and a thickness of about 1.5mm after sieving, and sinter at 1150°C for 3 hours to obtain After the sample is ground, polished, and silvered, it is polarized in 160°C silicone oil with an electric field of 4kV/mm for 10 minutes, cooled to 110°C and then polarized for 10 minutes to make a ceramic sample. The comprehensive electrical properties obtained from the test are: d 33 =213pC/N , Tc =390°C, Qm =156, tanδ=0.011.

实施例3:Example 3:

将Bi2O3、Yb2O3、Pb3O4、TiO2、ZrO2和Cr2O3按(BiYb)0.05Pb0.95Ti0.5Zr0.45O3++0.2mol%Cr摩尔比称量,加入水介质混合球磨,烘干过筛后于800℃预烧2h。将预烧后块体再球磨、烘干并加入5%PVA造粒,陈化6小时,过筛后压制成直径为15mm,厚度为1.5mm左右的坯体,于1150℃下烧结3h,所得样品经过打磨、抛光、被银后,在160℃硅油中以4kV/mm电场极化10min,制得陶瓷样品,测试所得综合电性能为:d33=220pC/N,Tc=401℃,Qm=180,tanδ=0.001。Bi 2 O 3 , Yb 2 O 3 , Pb 3 O 4 , TiO 2 , ZrO 2 and Cr 2 O 3 were weighed according to the molar ratio of (BiYb) 0.05 Pb 0.95 Ti 0.5 Zr 0.45 O 3 ++0.2mol%Cr, Add water medium to mix ball mill, dry and sieve, pre-fire at 800°C for 2h. Ball mill the pre-fired block, dry it, add 5% PVA to granulate, age for 6 hours, press it into a green body with a diameter of 15mm and a thickness of about 1.5mm after sieving, and sinter at 1150°C for 3 hours to obtain After the sample is ground, polished, and silvered, it is polarized in 160°C silicone oil with an electric field of 4kV/mm for 10min to prepare a ceramic sample. The comprehensive electrical properties obtained from the test are: d 33 =220pC/N, T c =401°C, Q m =180, tanδ=0.001.

实施例4:Example 4:

将Bi2O3、Yb2O3、Pb3O4、TiO2、ZrO2和Fe2O3按(BiYb)0.055Pb0.945Ti0.48Zr0.465O3++0.2mol%Fe化学计量比称量,并加入无水乙醇介质混合球磨,以使所有粉体混合均匀,烘干过筛后于900℃预烧2h。将预烧后块体再进行充分球磨,烘干并加入5%PVA造粒,陈化10小时,过筛后压制成直径为12mm,厚度为1.2mm左右的坯体,于1180℃下烧结2.5h,制得所需压电陶瓷。烧成后样品经过打磨、抛光、被银后,在120℃硅油中以4kV/mm电场极化20min,所得陶瓷样品综合电性能为:d33=143pc/N,Tc=370,Qm=90,tanδ=0.02。由该实施例可见加入Fe的样品各种性能明显较差,已不适用于实际高温应用。Weigh Bi 2 O 3 , Yb 2 O 3 , Pb 3 O 4 , TiO 2 , ZrO 2 and Fe 2 O 3 according to the stoichiometric ratio of (BiYb) 0.055 Pb 0.945 Ti 0.48 Zr 0.465 O 3 ++0.2mol%Fe , and add anhydrous ethanol medium to mix and ball mill, so that all the powders are mixed evenly, dry and sieve, and pre-fire at 900°C for 2h. The pre-fired block is fully ball milled, dried and granulated with 5% PVA, aged for 10 hours, sieved and pressed into a green body with a diameter of 12mm and a thickness of about 1.2mm, and sintered at 1180°C for 2.5 h, the required piezoelectric ceramics were prepared. After firing, the samples were ground, polished, silvered, and polarized in 120°C silicone oil with an electric field of 4kV/mm for 20min. The comprehensive electrical properties of the obtained ceramic samples were: d 33 =143pc/N, T c =370, Q m = 90, tanδ=0.02. From this example, it can be seen that the various properties of the sample added with Fe are obviously poor, and it is no longer suitable for practical high-temperature applications.

以上实施例在本发明技术方案为前提下进行实施,给出了详细的实施方式和具体的操作过程,但本发明的保护范围不限于上述的实施例。The above embodiments are implemented on the premise of the technical solutions of the present invention, and detailed implementation methods and specific operation processes are given, but the protection scope of the present invention is not limited to the above embodiments.

表1给出了更多实施例所得样品的组成、制备条件、制备获得的压电陶瓷材料的结构和性能。Table 1 shows the composition, preparation conditions, structure and properties of the prepared piezoelectric ceramic materials obtained in more examples.

表1不同陶瓷样品的组成、结构和性能列表Table 1 The composition, structure and performance list of different ceramic samples

(均为直径约12mm、厚度约1mm的陶瓷圆片)(Both are ceramic discs with a diameter of about 12mm and a thickness of about 1mm)

Claims (10)

1. a high temperature piezoceramics, it is characterised in that the chemical structure of general formula of described piezoceramic material is (BiYb)1-xPbxTiyZrx-yO3+ zmol%A, wherein A is modifying element, is the ionic radius multivalent metal element that is less than Yb and Ti ionic radius, but does not include ferro element;In described piezoceramic material general structure, x span is 0.91~0.98, and y span is 0.45~0.68, and z span is 0.05~5.
Piezoceramic material the most according to claim 1, it is characterised in that modifying element used includes one or more in Mn, Nb and Cr.
Piezoceramic material the most according to claim 1 and 2, it is characterised in that in described piezoceramic material, z span is 0.08~2.
4. a preparation method for the arbitrary described piezoelectric ceramics of claims 1 to 3, the method comprises the following steps:
(1) by Bi2O3、Yb2O3、Pb3O4、TiO2、ZrO2Weighing in molar ratio with oxide or the salt of modifying element, then mixed grinding obtains powder;
(2) powder that step (1) obtained dries, sieve after pre-burning, and block pre-burning obtained is fully ground again;
(3) by step (2) grind obtain powder drying, granulation, be aged, sieve after be pressed into ceramic body;
(4) after binder removal, by ceramic body high temperature sintering in sealed crucible, piezoelectric ceramic body is prepared;
(5) by the piezoelectric ceramic body polishing burnt till, polishing, by after silver electrode, polarization under 100 DEG C~180 DEG C and 3~5kV/mm electric fields.
Method the most according to claim 4, it is characterised in that the oxide of described modifying element includes MnCO3、Nb2O5And Cr2O3In one or more.
6. according to the method described in claim 4 or 5, it is characterised in that lapping mode used by step (1) and step (2) is ball milling.
Method the most according to claim 6, it is characterised in that during ball milling, material: abrading-ball: the proportion of liquid spheres grinding media is 1:1~2:0.5~2.
Method the most according to claim 4, it is characterised in that the calcined temperature of step (2) is 700~900 DEG C, burn-in time is 1.5-3 hour.
Method the most according to claim 4, it is characterised in that during step (3) granulation, bonding agent used is the aqueous solution that mass fraction is not more than 6%PVA;Digestion time is not more than 12 hours.
10., according to the method described in claim 4 or 5, it is characterised in that step (4) described sintering temperature is 1050~1280 DEG C, sintering time is 2~5 hours.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102276248A (en) * 2011-04-22 2011-12-14 同济大学 Oxide up-conversion luminescence piezoelectric material of bismuth lamellar perovskite structure and preparation method thereof
CN102299253A (en) * 2010-06-25 2011-12-28 富士胶片株式会社 Piezoelectric film, piezoelectric device and liquid ejection apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201012637D0 (en) * 2010-07-28 2010-09-15 Univ Leeds Ceramic

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102299253A (en) * 2010-06-25 2011-12-28 富士胶片株式会社 Piezoelectric film, piezoelectric device and liquid ejection apparatus
CN102276248A (en) * 2011-04-22 2011-12-14 同济大学 Oxide up-conversion luminescence piezoelectric material of bismuth lamellar perovskite structure and preparation method thereof

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
烧结温度对BiYbO3-PbTiO3-PbZrO3三元系压电陶瓷结构和性能的影响;时亮等;《硅酸盐学报》;20131231;第41卷(第12期);摘要和第1.1节 *

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