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CN104201230A - Three-sub-node compound photovoltaic cell - Google Patents

Three-sub-node compound photovoltaic cell Download PDF

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CN104201230A
CN104201230A CN201410456657.9A CN201410456657A CN104201230A CN 104201230 A CN104201230 A CN 104201230A CN 201410456657 A CN201410456657 A CN 201410456657A CN 104201230 A CN104201230 A CN 104201230A
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司红康
马梅
谢发忠
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LU'AN DAYU HIGH POLYMER MATERIAL Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/16Photovoltaic cells having only PN heterojunction potential barriers
    • H10F10/161Photovoltaic cells having only PN heterojunction potential barriers comprising multiple PN heterojunctions, e.g. tandem cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02E10/50Photovoltaic [PV] energy

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Abstract

本发明涉及一种三子结化合物光伏电池,具体为InAlAsP/InGaAs/Ge三子结化合物光伏电池,具有优化的1.90ev/1.40ev/0.66ev能带结构;本三子结化合物光伏电池具有二阶凸起结构,以及为配置上述光伏电池结构而设计的n++InGaP/p++InGaAsP异质结隧穿二极管和基区厚度关系,本三子结Ⅲ-Ⅴ族化合物光伏电池具有高光电转换效率和收集效率,特别的对自然光线具有有效的限域作用。

The invention relates to a triple junction compound photovoltaic cell, specifically an InAlAsP/InGaAs/Ge triple junction compound photovoltaic cell, which has an optimized 1.90ev/1.40ev/0.66ev energy band structure; the triple junction compound photovoltaic cell has two step convex structure, and the relationship between the n++InGaP/p++InGaAsP heterojunction tunneling diode and the thickness of the base region designed to configure the above-mentioned photovoltaic cell structure, the three-subjunction III-V compound photovoltaic cell has high photoelectricity Conversion efficiency and collection efficiency, especially effective confinement for natural light.

Description

一种三子结化合物光伏电池A triple junction compound photovoltaic cell

技术领域 technical field

本发明涉及一种化合物光伏电池,优其涉及一种多子结化合物光伏电池。  The invention relates to a compound photovoltaic cell, especially a multi-subjunction compound photovoltaic cell. the

背景技术 Background technique

Ⅲ-Ⅴ族化合物光伏电池最先使用于太空领域,但随着技朮的进步,Ⅲ-Ⅴ族化合物光伏电池也越来越多的运用到非太空领域。与硅光伏电池相比, Ⅲ-Ⅴ族化合物光伏电池具有更大的能量转换效率,通过先进工艺制造出的Ⅲ-Ⅴ族化合物光伏电池其光电转换成效率可超过25%,而硅光伏电池不会超过20%。相比于硅光伏电池,Ⅲ-Ⅴ族化合物光伏电池可通过使用多个具有不同带隙能的子电池来实现多太阳辐射的最大化转换; III-V compound photovoltaic cells were first used in the space field, but with the advancement of technology, III-V compound photovoltaic cells are also increasingly used in non-space fields. Compared with silicon photovoltaic cells, III-V compound photovoltaic cells have greater energy conversion efficiency. The photoelectric conversion efficiency of III-V compound photovoltaic cells manufactured by advanced technology can exceed 25%, while silicon photovoltaic cells do not will exceed 20%. Compared with silicon photovoltaic cells, III-V compound photovoltaic cells can achieve maximum conversion of multiple solar radiation by using multiple sub-cells with different band gap energies;

    对于Ⅲ-Ⅴ族化合物光伏电池而言,GaInP/GaAs/Ge是一种最典型最成熟的Ⅲ-Ⅴ族化合物光伏电池,其光电流密度已经能够达到25mA/cm2,然而现有的Ⅲ-Ⅴ族化合物光伏电池对自然太阳光的光谱吸收还不充分,并且多是以垂直、多结的形成逐层外延到半导体衬底上的,往往不能像硅光伏电池那样形成对光线具有限域作用的植绒表面,现有的Ⅲ-Ⅴ族化合物光伏电池有待得到进一步的提升。  For III-V compound photovoltaic cells, GaInP/GaAs/Ge is the most typical and mature III-V compound photovoltaic cell, and its photocurrent density can reach 25mA/cm2. However, the existing III-V The spectral absorption of natural sunlight by the group compound photovoltaic cells is not sufficient, and most of them are epitaxial to the semiconductor substrate layer by layer in the form of vertical and multi-junctions, and often cannot form confinement effects on light like silicon photovoltaic cells. Flocking surface, the existing III-V compound photovoltaic cells need to be further improved. the

发明内容 Contents of the invention

为了弥补现有Ⅲ-Ⅴ族化合物光伏电池的不足,进一步提高对光线的利用率,本发明提供一种InAlAsP/IGaAs/Ge三结化合物光伏电池,该InAlAsP/InGaAs/Ge三结结构能够有效地提高光伏电池的转换效率,同时该InAlAsP/IGaAs/Ge三子结化合物光伏电池还具有对光线具有限域作用的二阶凸起结构,该二阶的凸起结构能够有效地提高光接触面积,并且能够对光线产生高效地限域作用; In order to make up for the shortcomings of the existing III-V compound photovoltaic cells and further improve the utilization rate of light, the present invention provides an InAlAsP/IGaAs/Ge triple-junction compound photovoltaic cell. The InAlAsP/InGaAs/Ge triple-junction structure can effectively Improve the conversion efficiency of photovoltaic cells. At the same time, the InAlAsP/IGaAs/Ge triple junction compound photovoltaic cell also has a second-order raised structure that confines light. The second-order raised structure can effectively increase the light contact area. And it can effectively confine the light;

本发明提供的三子结Ⅲ-Ⅴ族化合物光伏电池,包括Ge衬底;Ge子电池,位于Ge衬底上;InGaAs子电池,位于Ge子电池上;InAlAsP子电池,位于InGaAs子电池上;在所述Ge衬底与Ge子电池之间包括n++ Ge接触层以及n++ Ge接触层之上的背场层;在InAlAsP子电池上为窗口层,窗口层上为p++接触层;Ge子电池与InGaAs子电池,InGaAs子电池与InAlAsP子电池之前具有晶格匹配的n++/p++遂穿二极管; The three-junction III-V compound photovoltaic cell provided by the present invention comprises a Ge substrate; a Ge sub-cell is located on the Ge substrate; an InGaAs sub-cell is located on the Ge sub-cell; an InAlAsP sub-cell is located on the InGaAs sub-cell; Between the Ge substrate and the Ge sub-cell, include the back field layer on the n++ Ge contact layer and the n++ Ge contact layer; on the InAlAsP sub-cell, it is a window layer, and on the window layer is a p++ contact layer; the Ge sub-cell and InGaAs sub-cells, InGaAs sub-cells and InAlAsP sub-cells have lattice-matched n++/p++ tunneling diodes;

进一步地,Ge子电池在远离衬底的方向上依次包括n Ge基区,p+ Ge发射区,并具有0.66ev左右的带隙;所述InGaAs子电池在远离衬底方向上依次包括n InGaAs基区,p+ InGaAs发射区,并具有1.40ev左右的带隙;所诉InAlAsP子电池在远离衬底方向上依次包括n InAlAsP基区,p+ InAlAsP发射区,并具有1.90ev左右的带隙; Further, the Ge sub-cell sequentially includes an n Ge base region, a p+ Ge emitter region in the direction away from the substrate, and has a band gap of about 0.66ev; the InGaAs sub-cell sequentially includes an n InGaAs base region in the direction away from the substrate region, p+ InGaAs emitter region, and has a bandgap of about 1.40ev; the InAlAsP subcell includes n InAlAsP base region, p+ InAlAsP emitter region, and has a bandgap of about 1.90ev in the direction away from the substrate;

进一步地,在该光伏电池上部光照面形状为连续的二阶凸起结构,每一个二阶凸起结构具有第一阶凸起和第二阶凸起,其中第二阶凸起从第一阶凸起的上表面向上凸起; Further, the shape of the illuminated surface on the upper part of the photovoltaic cell is a continuous two-stage convex structure, each of which has a first-stage convex structure and a second-stage convex structure, wherein the second-stage convex structure is formed from the first-stage convex structure. The raised upper surface is raised upwards;

进一步地,从第二阶凸起的顶面到Ge衬底的底面厚度为300~400um,第一阶凸起的顶部到第一阶凸起底面的厚度为50~80um;并且第二阶凸起的顶部到第一阶凸起的顶部的厚度至少大于第一阶凸起的顶部到第一阶凸起底面的厚度的两倍;每两个二阶凸起结构之间的间隔小于第一阶凸起的顶部到第一阶凸起底面的厚度; Further, the thickness from the top surface of the second-stage protrusion to the bottom surface of the Ge substrate is 300-400um, and the thickness from the top of the first-stage protrusion to the bottom surface of the first-stage protrusion is 50-80um; and the second-stage protrusion The thickness from the top of the first-stage protrusion to the top of the first-level protrusion is at least twice the thickness from the top of the first-level protrusion to the bottom of the first-level protrusion; the interval between every two second-level protrusion structures is less than the first The thickness from the top of the step protrusion to the bottom surface of the first step protrusion;

进一步地,所述n Ge基区的厚度大于n InGaAs基区的厚度,n InGaAs基区的厚度大于n InAlAsP基区的厚度,n Ge基区的厚度为约2.5微米、n InGaAs基区的厚度为约2.2微米、n InAlAsP基区的厚度为约1.8-2.0微米;p+ Ge发射区、p+ InGaAs发射区、p+ InAlAsP发射区的厚度均为80-100纳米; Further, the thickness of the n Ge base region is greater than the thickness of the n InGaAs base region, the thickness of the n InGaAs base region is greater than the thickness of the n InAlAsP base region, the thickness of the n Ge base region is about 2.5 microns, and the thickness of the n InGaAs base region The thickness of the n InAlAsP base region is about 2.2 microns, and the thickness is about 1.8-2.0 microns; the thickness of the p+ Ge emitter region, p+ InGaAs emitter region, and p+ InAlAsP emitter region is 80-100 nanometers;

进一步地,所述晶格匹配的n++/p++隧穿二极管为异质结隧穿二极管; Further, the lattice-matched n++/p++ tunneling diode is a heterojunction tunneling diode;

进一步地,所述晶格匹配的n++/p++隧穿二极管为n++ InGaP/p++ InGaAsP异质结隧穿二极管;其总厚度为30-45纳米; Further, the lattice-matched n++/p++ tunneling diode is an n++ InGaP/p++ InGaAsP heterojunction tunneling diode; its total thickness is 30-45 nanometers;

附图说明 Description of drawings

图1为根据本发明的三子结化合物光伏电池的结构示意图; Fig. 1 is according to the structure schematic diagram of triple junction compound photovoltaic cell of the present invention;

图2为图1中A区域的放大图,即本发明光伏电池各子结材料层示意图。  FIG. 2 is an enlarged view of area A in FIG. 1 , that is, a schematic diagram of each sub-junction material layer of the photovoltaic cell of the present invention. the

具体实施方式 Detailed ways

以下将结合最佳实施方式对本发明做进一步的说明,本发明的有益效果将在详细地描述中变得清晰; The present invention will be further described below in conjunction with the best embodiment, and the beneficial effects of the present invention will become clear in the detailed description;

参见图1-2,图1为本发明三子结光伏电池的结构示意图,图2为图1中A区域的放大图,其显示了本发明光伏电池的细节;本发明的一个方面,参见图2本发明的化合物光伏电池具有多子结的InAlAsP/InGaAs/Ge结构,其中InAlAsP子电池(300)的带隙在1.9ev左右,InGaAs子电池(200)的带隙在1.40ev左右,Ge子电池(100)的带隙为0.66ev左右,本发明的三结光伏电池具有的带隙的优化结构能够匹配自然太阳光谱的波长结构,充分利用光伏的各波长段的光子能量,从整体上优化对太阳光谱的吸收,提高电池效率。并且,参见图1,本发明的化合物光伏电池上部光照面形状为连续的二阶凸起结构(a,b),每一个二阶凸起结构(a,b)具有第一阶凸起(b)和第二阶凸起(a),其中第二阶凸起(a)从第一阶凸起(b)的上表面向上凸起; Referring to Figs. 1-2, Fig. 1 is a schematic structural view of a three-subjunction photovoltaic cell of the present invention, and Fig. 2 is an enlarged view of area A in Fig. 1, which shows details of a photovoltaic cell of the present invention; for an aspect of the present invention, see Fig. 2 The compound photovoltaic cell of the present invention has a multi-junction InAlAsP/InGaAs/Ge structure, wherein the band gap of the InAlAsP sub-cell (300) is about 1.9 eV, the band gap of the InGaAs sub-cell (200) is about 1.40 eV, and the Ge sub-cell The bandgap of the cell (100) is about 0.66ev. The optimized structure of the bandgap of the triple-junction photovoltaic cell of the present invention can match the wavelength structure of the natural solar spectrum, make full use of the photon energy of each wavelength band of photovoltaics, and optimize overall Absorption of the solar spectrum improves cell efficiency. And, referring to Fig. 1, the shape of the upper illuminated surface of the compound photovoltaic cell of the present invention is a continuous second-order convex structure (a, b), and each second-order convex structure (a, b) has a first-order protrusion (b ) and a second-stage protrusion (a), wherein the second-stage protrusion (a) protrudes upward from the upper surface of the first-stage protrusion (b);

具体来说,本发明的化合物光伏电池包括具有连续的二阶凸起结构(a,b)的Ge衬底(001),其中每一个二阶凸起结构(a,b)包括第一阶凸起(b)和第二阶凸起(a),其中第二阶凸起(a)从第一阶凸起(b)的上表面向上凸起。位于Ge衬底(001)上依次为Ge子电池(100)、InGaAs子电池(200)、InAlAsP子电池(300)以形成1.90ev/1.40ev/0.66ev能带结构的三结电池。其中各子电池的带隙在远离衬底的方向上逐步增大,这十分有利于光电流密度的提高,其中Ge子电池(100)具有0.66ev左右的带隙并在远离衬底的方向上依次为n Ge基区(101)、p+ Ge发射区(102),n Ge基区(101)厚度优选为2.5微米,p+ Ge发射区(102)厚度优选为80-100纳米;InGaAs子电池(200)具有1.40ev左右的带隙,并在远离衬底的方向上依次为n InGaAs基区(201)、p+ InGaAs发射区(202),n InGaAs基区(201)的厚度优选为2.2微米,p+ InGaAs发射区(202)的厚度优选为80-100纳米;InAlAsP子电池(300)具有1.90ev左右的带隙,并在远离衬底的方向上依次为n InAlAsP基区(301)、p+ InAlAsp发射区(302),n InAlAsP基区(301)的厚度优选为1.8-2.0微米,p+ InAlAsp发射区(302)的厚度优选为80-100纳米。在Ge衬底(001)与n Ge基区(101)之间还包括n++ Ge接触层(002)和背场层(003);在InAlAsP子电池(300)上为窗口层(006),窗口层(006)上为p++接触层(007),本发明中对于各子电池基区厚度的优化为能隙大的靠近光照面的子电池小于能隙小的远离光照面的子电池;具体而言,就是n InAlAsP基区(301)的厚度小于n InGaAs基区(201)的厚度、n InGaAs基区(201)的厚度小于n Ge基区(101)的厚度,这样有利于对自然光伏光谱的最大化利用; Specifically, the compound photovoltaic cell of the present invention includes a Ge substrate (001) with continuous second-order raised structures (a, b), wherein each second-order raised structure (a, b) includes a first-order raised The protrusion (b) and the second-level protrusion (a), wherein the second-level protrusion (a) protrudes upward from the upper surface of the first-level protrusion (b). Ge sub-cells (100), InGaAs sub-cells (200), and InAlAsP sub-cells (300) are located on the Ge substrate (001) in order to form a triple-junction cell with a band structure of 1.90ev/1.40ev/0.66ev. The bandgap of each subcell gradually increases in the direction away from the substrate, which is very conducive to the improvement of the photocurrent density, and the Ge subcell (100) has a bandgap of about 0.66ev and in the direction away from the substrate The n Ge base region (101) and the p+ Ge emitter region (102) are sequentially, the thickness of the n Ge base region (101) is preferably 2.5 microns, the thickness of the p+ Ge emitter region (102) is preferably 80-100 nanometers; the InGaAs sub-cell ( 200) has a bandgap of about 1.40ev, and in the direction away from the substrate, there are n InGaAs base region (201) and p+ InGaAs emitter region (202) sequentially, and the thickness of n InGaAs base region (201) is preferably 2.2 microns, The thickness of the p+ InGaAs emitter region (202) is preferably 80-100 nanometers; the InAlAsP sub-cell (300) has a band gap of about 1.90ev, and in the direction away from the substrate, there are n InAlAsP base region (301), p+ InAlAsp In the emitting region (302), the thickness of the n InAlAsP base region (301) is preferably 1.8-2.0 microns, and the thickness of the p+ InAlAsp emitting region (302) is preferably 80-100 nanometers. Between the Ge substrate (001) and the n Ge base region (101) also includes an n++ Ge contact layer (002) and a back field layer (003); on the InAlAsP subcell (300) is a window layer (006), the window Layer (006) is a p++ contact layer (007). In the present invention, the optimization of the base thickness of each sub-cell is that the sub-cell with a large energy gap close to the illuminated surface is smaller than the sub-cell with a small energy gap far away from the illuminated surface; specifically In other words, the thickness of the n InAlAsP base region (301) is smaller than the thickness of the n InGaAs base region (201), and the thickness of the n InGaAs base region (201) is smaller than the thickness of the n Ge base region (101), which is beneficial to the natural photovoltaic spectrum maximize the use of

在各子电池层之间具有晶格匹配的n++/p++隧穿二极管(004,005);在本InAlAsP/InGaAs/Ge能带体系的多结光伏电池中,晶格匹配的n++/p++隧穿二极管需要选用异质结结构,这有利于提供高的结间势垒,特别是InAlAsP与InGaAs子电池之间的隧穿二极管(005),在我们的实验中观察到这对光线通过上层的InAlAsP子电池(300)以及减少结间少子扩散起到有利的作用,在实验中我们使用了n++ InGaP/p++ InGaAsP异质结隧穿二极管,这在最大程度上提高了电池的光电流效率,当然至于外延生长的多结Ⅲ-Ⅴ族光伏电池,隧穿二极管的厚度是十分重要和敏感的,当选择n++ InGaP/p++ InGaAsP异质结隧穿二极管作为本体系多结光伏电池InAlAsP与InGaAs子电池之间的隧穿二极管(005)时,实验优化的n++ InGaP/p++ InGaAsP异质结隧穿二极管(005)的总厚度为30-45纳米; Lattice-matched n++/p++ tunneling diodes (004, 005) between each sub-cell layer; in this InAlAsP/InGaAs/Ge band system multi-junction photovoltaic cell, lattice-matched n++/p++ tunneling The diode needs to use a heterojunction structure, which is beneficial to provide a high interjunction barrier, especially the tunneling diode (005) between the InAlAsP and InGaAs subcells. In our experiments, it was observed that this pair of light passes through the upper InAlAsP The sub-cell (300) and the reduction of minority carrier diffusion between junctions play a favorable role. In the experiment, we used n++ InGaP/p++ InGaAsP heterojunction tunneling diodes, which improved the photocurrent efficiency of the cell to the greatest extent. Of course, as for For epitaxially grown multi-junction III-V photovoltaic cells, the thickness of the tunneling diode is very important and sensitive. When selecting n++ InGaP/p++ InGaAsP heterojunction tunneling diode as the sub-cell of the multi-junction photovoltaic cell InAlAsP and InGaAs When the tunneling diode (005) in between, the total thickness of the experimentally optimized n++ InGaP/p++ InGaAsP heterojunction tunneling diode (005) is 30-45 nanometers;

    接下来将重点介绍本发明InAlAsP/InGaAs/Ge三结光伏电池的二阶凸起结构。首先本发明InAlAsP/InGaAs/Ge三结光伏电池的二阶凸起结构(a,b)是建立在二阶凸起结构的Ge衬底上的,各子电池及其他功能层依次覆盖于该Ge衬底上。从第二阶凸起(b)的顶面到Ge衬底的底面厚度d1约为300-400um,第一阶凸起(b)的顶部到第一阶凸起(b)的底面d2优选为50~80um,即第一阶凸起(b)的高度d2为50~80um;第二阶凸起(a)的顶部到第一阶凸起(a)的顶部之间的厚度d3至少大于第一阶凸起(b)的高度d2的两倍,优选为150~200um,即第二阶凸起(a)的高度d3优选为150~200um;每两个二阶凸起结构之间的间隔小于第一阶凸起(b)的高度;每个二阶凸起结构的宽度优选为150~200um。通过上述参数的优化,入射光线以一定角度照射到光伏电池表面时,首先在第二阶凸起结构的表面被电池吸收一部分,未被吸收的照射到第二凸起结构侧面的一部分反射到第一阶凸块的表面并被第一阶凸块吸收,而未被第一阶凸块结构表面吸收的光线一部分又会反射到二阶凸块结构之间的电池表面上。如此这般,使得原本只能对照射到电池上表面的光线进行利用,通过二阶凸起结构不紧能能利用照射到上表面的光线,还能够通过侧面的反射多利用照射到侧边的光线,这部分光线就是增加的额外光线,某种程度上,该结构把光线进行了体系化的利用,因此对太阳入射光线能够达到最大化的利用。更值得注意的是,从二阶凸块结构之间的电池表面反射出来的光线又会射向第一阶凸块结构的表面和/或第二阶凸块结构的表面,如此光伏光线被最大化地限域在具有二阶凸块结构的光伏电池的表面,电池对太阳光线的利用得到极大提高;能够实现上述的限领作用与上述的参数选取是密不可分的,如果第二阶凸起的高度小于第一阶凸起的高度或是二阶凸起结构之间的间隔太大都不会对太阳光线起到限域作用或是会极大消弱限域作用; Next, we will focus on the second-order convex structure of the InAlAsP/InGaAs/Ge triple-junction photovoltaic cell of the present invention. First of all, the second-order raised structure (a, b) of the InAlAsP/InGaAs/Ge triple-junction photovoltaic cell of the present invention is built on the Ge substrate of the second-order raised structure, and each sub-cell and other functional layers are sequentially covered on the Ge substrate. on the substrate. The thickness d1 from the top surface of the second-stage protrusion (b) to the bottom surface of the Ge substrate is about 300-400um, and the thickness d2 from the top of the first-stage protrusion (b) to the bottom surface of the first-stage protrusion (b) is preferably 50~80um, that is, the height d2 of the first-stage protrusion (b) is 50-80um; the thickness d3 between the top of the second-stage protrusion (a) and the top of the first-stage protrusion (a) is at least greater than that of the first-stage protrusion (a) Twice the height d2 of the first-order protrusion (b), preferably 150-200um, that is, the height d3 of the second-order protrusion (a) is preferably 150-200um; the interval between every two second-order protrusion structures less than the height of the first-order protrusion (b); the width of each second-order protrusion structure is preferably 150-200um. Through the optimization of the above parameters, when the incident light hits the surface of the photovoltaic cell at a certain angle, a part of it is firstly absorbed by the battery on the surface of the second-stage raised structure, and a part of the unabsorbed part irradiated on the side of the second raised structure is reflected to the second-order raised structure. The surfaces of the first-order bumps are absorbed by the first-order bumps, and part of the light that is not absorbed by the surface of the first-order bump structures is reflected to the surface of the battery between the second-order bump structures. In this way, only the light irradiated on the upper surface of the battery can be used originally, but the light irradiated on the upper surface can not be used through the second-order convex structure, and the light irradiated to the side can also be used through the reflection of the side. Light, this part of light is the added extra light. To some extent, the structure makes systematic use of light, so the incident light from the sun can be maximized. What is more noteworthy is that the light reflected from the surface of the cell between the second-level bump structures will hit the surface of the first-level bump structure and/or the surface of the second-level bump structure, so that the photovoltaic light is maximized. On the surface of the photovoltaic cell with the second-order bump structure, the use of solar light by the battery is greatly improved; the above-mentioned limiting effect is inseparable from the above-mentioned parameter selection. If the second-order bump structure If the raised height is less than the height of the first-order raised structures or the distance between the second-order raised structures is too large, it will not limit the sunlight or will greatly weaken the limited effect;

       通过上述具体实施例的描述,已经很全面地揭示了本发明的构思,本领域技术人员应当能够了解本发明的优点之处;对于本申请的理解不应当限制在上述实施例中,与本发明精神一致的明显变形的实施方式也应当属于本发明的构思。 Through the description of the above specific embodiments, the concept of the present invention has been fully disclosed, and those skilled in the art should be able to understand the advantages of the present invention; the understanding of the application should not be limited to the above embodiments, and the present invention Obviously modified implementations with the same spirit should also belong to the concept of the present invention.

Claims (7)

1. three son knot compound photovoltaic cells, comprise Ge substrate; Ge battery, is positioned on Ge substrate; The sub-battery of InGaAs, is positioned on Ge battery; The sub-battery of InAlAsP, is positioned on the sub-battery of InGaAs; At the back surface field layer comprising between described Ge substrate and Ge battery on n++ Ge contact layer and n++ Ge contact layer; On the sub-battery of InAlAsP, being Window layer, is p++ contact layer in Window layer; The sub-battery of Ge battery and InGaAs, the sub-battery of InGaAs and the sub-battery of InAlAsP have the n++/p++ tunneling diode of Lattice Matching before.
2. photovoltaic cell as claimed in claim 1, described Ge battery comprises successively n Ge base in the direction away from substrate, p+ Ge emitter region, and there is the band gap about 0.66ev; The sub-battery of described InGaAs comprises successively n InGaAs base on away from substrate direction, p+ InGaAs emitter region, and there is the band gap about 1.40ev; The sub-battery of the InAlAsP that tells of institute comprises successively n InAlAsP base on away from substrate direction, p+ InAlAsP emitter region, and there is the band gap about 1.90ev.
3. the photovoltaic cell as described in claim 1-2, be shaped as continuous second order bulge-structure at this photovoltaic cell top plane of illumination, each second order bulge-structure has the first rank projection and second-order projection, and wherein second-order projection raises up from the upper surface of the first rank projection.
4. photovoltaic cell as claimed in claim 3, is 300~400um from the end face of second-order projection to the bottom thickness of Ge substrate, and the top of the first rank projection is 50 ~ 80um to the thickness of the first projection bottom surface, rank; And the top of second-order projection is at least greater than the top of the first rank projection to the twice of the thickness of the first projection bottom surface, rank to the thickness at the top of the first rank projection; Interval between every two second order bulge-structures is less than the top of the first rank projection to the thickness of the first projection bottom surface, rank.
5. the photovoltaic cell as described in claim 1-4, the thickness of described n Ge base is greater than the thickness of n InGaAs base, the thickness of n InGaAs base is greater than the thickness of n InAlAsP base, and the thickness of n Ge base is that approximately 2.5 microns, the thickness of n InGaAs base are that approximately 2.2 microns, the thickness of n InAlAsP base are about 1.8-2.0 micron; The thickness of p+ Ge emitter region, p+ InGaAs emitter region, p+ InAlAsP emitter region is 80-100 nanometer.
6. photovoltaic cell as claimed in claim 5, the n++/p++ tunnel-through diode of described Lattice Matching is heterojunction tunnel-through diode.
7. photovoltaic cell as claimed in claim 6, the n++/p++ tunnel-through diode of described Lattice Matching is n++ InGaP/p++ InGaAsP heterojunction tunnel-through diode; Its gross thickness is 30-45 nanometer.
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