CN104197923B - A kind of micro- capacitance top signal detecting method based on carrier wave detection - Google Patents

Abstract

The invention provides a microcapacitance gyro signal detection method based on carrier detection. The method is superimposed on the electrode pair by multi-frequency carrier. At this time, the differential between the control electrode pair or the detection electrode pair and the gyro resonator The capacitance will change correspondingly according to the vibration state of the gyroscope, and the signal detection of the gyroscope can be completed by detecting the change of the differential capacitance; or the signal can be detected by frequency division multiplexing signal transmission method. The present invention adopts the differential capacitance detection method, and does not need metal patterned electrode leads on the resonator; adopts the signal detection mode of frequency division multiplexing to ensure the identification of the detection signal of the gyroscope; processes the electrodes on the base without the resonator lead wires, It greatly simplifies the processing technology and reduces the difficulty of gyroscope design and processing.

Description

A Micro-Capacitance Gyro Signal Detection Method Based on Carrier Detection

technical field

The invention relates to the technical field of micro-electromechanical (MEMS) systems, in particular to a method for detecting signals of a microcapacitance gyroscope based on carrier detection.

Background technique

As a carrier angular velocity sensitive inertial sensor, gyroscope plays a very important role in attitude control, navigation and positioning in traditional industrial fields such as aviation, aerospace, and shipbuilding. MEMS micro-gyroscopes have the advantages of small size and mass, low power consumption, low cost, good environmental adaptability, and high integration.

With the development of my country's economy, the demand for MEMS micro-gyroscopes with high performance, small size and high reliability in the fields of military, industry and consumer electronics is becoming increasingly urgent.

Patent Publication No. CN102305627B provides an all-solid-state dual-axis gyroscope with a disc-shaped piezoelectric vibrator. In the technology of this solution, the lower surface of the disc-shaped piezoelectric vibrator is connected to the support cylinder, and the other end of the support cylinder is fixed on the base Above, the drive electrodes, signal detection electrodes and mode detection electrodes are located on the upper surface of the disc-shaped piezoelectric vibrator, and the potential reference electrode is located on the lower surface of the disc-shaped piezoelectric vibrator.

In the above technology, no specific signal detection method is given, and the electrodes are located on the disc-shaped piezoelectric vibrator, which has certain instability and low reliability when the piezoelectric vibrator vibrates at high frequency; at the same time, Because the electrode leads need to be made on the piezoelectric vibrator, the processing technology is relatively complicated, the processing cost is high, and it is difficult to realize, so it is not suitable for mass production.

Contents of the invention

In view of the defects in the prior art, the purpose of the present invention is to provide a micro-capacitance gyro signal detection method based on carrier detection, which uses differential capacitance to detect the state of the gyro, thereby configuring electrodes on the gyroscope base without the need for resonator leads. Therefore, the processing technology is simplified, and the design difficulty of the hemispherical resonant gyroscope is reduced.

To achieve the above object, the present invention adopts the following technical solutions:

According to one aspect of the present invention, a kind of microcapacitance gyroscope signal detection method based on carrier wave detection is provided, and described method is superimposed on each electrode pair by multi-frequency carrier wave, at this moment, each electrode pair (comprising at least drive electrode pair, detection electrode pair) The electrode pair can further include a monitoring electrode pair and a balance electrode pair; these electrode pairs are the structure of a general gyroscope) and the differential capacitance between the gyroscope resonator will change accordingly according to the vibration state of the gyroscope. This differential capacitance change can complete the signal detection of the gyroscope.

Specifically, the method of the present invention includes the following steps:

The method comprises the steps of:

Step 1: The controller generates a carrier excitation drive signal with a certain frequency and amplitude, and acts on the drive electrode pair through A/D conversion to excite the gyroscope;

Step 2: At this time, the gyro is in the excited state, and the differential capacitive coupling signal on the detection electrode pair or monitoring electrode pair is input to the controller after C/V conversion, amplification, and D/A conversion to control the work of the gyro at this time. status feedback;

Step 3: The controller adjusts the frequency and amplitude of the driving signal in step 1 in real time according to the signal feedback in step 2, so as to keep the gyroscope at the natural frequency of the working mode;

Step 4: Detect the differential capacitive coupling signal on the electrode pair, or detect the differential capacitive coupling signal on the electrode pair and the balanced electrode pair, perform C/V conversion and subsequent amplification, and perform phase-sensitive demodulation with the monitoring electrode signal. After low-pass filtering, a DC signal corresponding to the input signal of the angular velocity of the gyroscope is obtained;

Step 5: After subsequent testing and calibration, the gyro angular velocity input value corresponding to the DC signal is obtained.

Further, the present invention can also use the frequency division multiplexing signal transmission method to detect the signal. At this time, the method is specifically: apply carrier signals of different frequencies to each electrode pair of the gyroscope, and these carrier signals of different frequencies pass through the capacitance gap. , can reflect the vibration state of the gyroscope in real time at this time, detect the mixed multi-frequency carrier signal on the common electrode, and demodulate it, and then obtain the vibration of the corresponding vibration point of the gyroscope according to the signal representation of different frequency carriers information, so as to complete the detection of the vibration state of the gyro.

Specifically, the signal is detected by using a frequency division multiplexing signal transmission method, and the method includes the following steps:

Step 1: The controller generates an excitation drive signal with a certain frequency and amplitude, and acts on the drive electrode pair through A/D conversion to excite the gyroscope;

Step 2: At this time, the gyroscope is in the excited state, and different frequency is applied to each electrode pair, and the amplitude of the driving signal described in step 1 is at least 2 orders of magnitude smaller than the carrier modulation signal;

Step 3: A common signal containing multiple carrier signals can be detected on the common electrode of the gyroscope. For this common electrode signal, the carrier signals of different frequency bands are respectively demodulated to obtain the signals of each electrode pair of the gyroscope. It can be known that each The vibration state of the position where the electrode pair is located;

Step 4: The controller adjusts the frequency and amplitude of the driving signal in step 1 in real time according to the signal feedback of the monitoring electrode pair demodulated in step 3, so as to keep the gyroscope at the natural frequency of the working mode;

Step 5: Demodulate according to the common signal carrier obtained in step 3, and obtain a DC signal reflecting the gyroscope vibration state at this time after being processed by the controller;

Step 6: After subsequent testing and calibration, the gyroscope angular velocity input value corresponding to the DC signal is obtained.

Preferably, the capacitance between the electrode pair and the resonator is a differential capacitance, and a differential capacitance detection signal is output through capacitive coupling.

Preferably, the differential capacitance detection signal changes with the input of the angular velocity of the gyroscope, and the change of the detected differential capacitance is on the order of hundreds of fF.

Preferably, the signals on each pair of the electrode pairs are reverse signals with the same frequency and the same amplitude; the signals on the two pairs of electrodes at opposite positions are reverse signals with the same frequency and the same amplitude.

More preferably, during driving, carrier voltages of different frequencies are applied to the pair of driving electrodes.

More preferably, under the driving of the AC carrier voltage, when the resonant oscillator is affected by the angular velocity input of the gyro, the AC detection signal on the detection electrode pair will change, and the change can reflect the angular velocity information of the gyro.

For most gyroscopes, the drive end and detection end are essential. In the present invention, the monitoring electrodes and balance electrodes mainly provide system feedback and demodulation reference, which can effectively improve system performance, but are not necessary. Therefore, this The method involved in the invention is applicable to most gyroscopes. In particular, the gyroscope involved in the frequency division multiplexing method needs to be detected by a common electrode signal, and its single-point signal detection characteristic also provides certain convenience for the design of the gyroscope system.

Compared with the prior art, the present invention has the following beneficial effects:

The present invention adopts the differential capacitance detection method, which does not need metal patterned electrode leads on the resonator; further, it adopts the signal detection method of frequency division multiplexing to ensure the identification of the detection signal of the gyroscope; The processing technology is simplified to a certain extent, and the design and processing difficulty of the hemispherical resonant gyroscope are reduced.

Description of drawings

Other characteristics, objects and advantages of the present invention will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings:

Fig. 1 is a top view of an embodiment of the present invention;

Fig. 2 is a side view screenshot of an embodiment of the present invention;

FIG. 3 is an equivalent capacitance diagram of a resonator and a base electrode according to an embodiment of the present invention;

Fig. 4 is a method signal flow diagram of an embodiment of the present invention;

FIG. 5 is an equivalent capacitance diagram of a resonator and a base electrode in an embodiment of the present invention;

FIG. 6 is a signal flow diagram of an embodiment of the present invention.

detailed description

The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

As shown in Figure 1, it is a top view of the system involved in an embodiment of the present invention, wherein:

100 is a micro-gyroscope base;

101 is the capacitive gap between the micro-gyroscope and the base, wherein the distance change of the gap during detection can be reflected as the differential capacitance change between the micro-gyroscope resonator and the electrode pair;

102 is a hemispherical harmonic oscillator;

103 is a support column for fixing the hemispherical resonator on the base;

104(AB), 108(AB) are driving electrode pairs, 105(AB), 109(AB) are detecting electrode pairs, 106(AB), 110(AB) are monitoring electrode pairs, 107(AB), 111(AB) ) is a balanced electrode pair.

In the above structure, the differential capacitance change between the base electrode pair and the corresponding gyro resonator can correspond to the vibration state change of the gyro resonator. Taking the driving electrode pair 104 as an example, the 104(A) electrode and 104(B) When the system is started, the electrodes will be applied with a pair of sinusoidal signals with opposite phases, which acts on the gyro through the capacitive gap between the electrode 104 and the resonator to make the gyro vibrate, and the driving electrode 108 is the same.

In the system described in Figure 1, the signal detection process is as follows:

Step 1: The controller generates a carrier excitation driving signal with a certain frequency and amplitude, and acts on the driving electrode pairs 104 (AB) and 108 (AB) respectively through A/D conversion to excite the gyroscope;

Step 2: At this time, the gyroscope is in the excited state, and the differential capacitive coupling signals on the monitoring electrode pairs 106 (AB) and 110 (AB) are input to the controller after C/V conversion, amplification, and D/A conversion to control At this time, the working state of the gyro is fed back;

Step 3: The controller adjusts the frequency and amplitude of the driving signal in step 1 in real time according to the signal feedback in step 2, so as to keep the gyroscope at the natural frequency of the working mode;

Step 4: After C/V conversion and subsequent amplification of the differential capacitive coupling signals on the detection electrode pairs 105 (AB), 109 (AB) and the balance electrode pairs 107 (AB), 111 (AB), cooperate with the monitoring electrode pair 106 (AB), 110 (AB) signals are subjected to phase-sensitive demodulation, and a DC signal corresponding to the gyroscope angular velocity input signal is obtained after low-pass filtering;

Step 5: After subsequent testing and calibration, the gyro angular velocity input value corresponding to the DC signal is obtained.

In the gyroscope structures shown in Figures 2, 3, and 4 below, the above-mentioned signal detection method can be similarly used for signal detection. Based on this embodiment, several deformations and improvements can be made for different gyroscopes.

As shown in Figure 2, it is a side view screenshot of the hemispherical resonant gyro system involved in an embodiment of the present invention, wherein:

200 is a micro-gyroscope base;

201 is the capacitance gap between the micro-gyroscope and the base;

202 is a hemispherical harmonic oscillator;

203 is a support column for fixing the hemispherical resonator on the base;

Optionally, 204 is symmetrically distributed drive electrode pairs, detection electrode pairs, monitoring electrode pairs, and balance electrode pairs.

In the system described in Figure 2, its signal detection process is as follows:

Step 1: The controller generates a carrier excitation drive signal with a certain frequency and amplitude, and acts on the drive electrode pair through A/D conversion to excite the gyroscope;

Step 2: At this time, the gyro is in the excited state, and the differential capacitive coupling signal on the monitoring electrode pair is input to the controller after C/V conversion, amplification, and D/A conversion to give feedback on the working state of the gyro at this time;

Step 3: The controller adjusts the frequency and amplitude of the driving signal in step 1 in real time according to the signal feedback in step 2, so as to keep the gyroscope at the natural frequency of the working mode;

Step 4: After C/V conversion and subsequent amplification of the differential capacitive coupling signals on the detection electrode pair and the balance electrode pair, the signal is phase-sensitive demodulated with the monitoring electrode, and the input signal corresponding to the angular velocity of the gyro is obtained after low-pass filtering DC signal;

Step 5: After subsequent testing and calibration, the gyro angular velocity input value corresponding to the DC signal is obtained.

As shown in Fig. 3, it is a top view of a rocking mass enhanced solid undulating micro-gyroscope related to an embodiment of the present invention, wherein:

301 is a micro-gyroscope base;

302 is the capacitance gap between the micro-gyroscope and the base;

303 is a rocking mass enhanced solid wave micro-gyro resonator;

304(AB), 306(AB) are driving electrode pairs;

305 (AB), 307 (AB) are detection electrode pairs;

In the system described in Figure 3, its signal detection process is as follows:

Step 1: The controller generates a carrier excitation drive signal with a certain frequency and amplitude, and acts on the drive electrode pairs 304 (AB) and 306 (AB) respectively through A/D conversion to excite the gyroscope;

Step 2: At this time, the gyro is in the excited state, and the differential capacitive coupling signals on the detection electrode pairs 305 (AB) and 307 (AB) are input to the controller after C/V conversion, amplification, and D/A conversion. Can confirm the working status of the gyro at this time;

Step 3: Adjust the driving signal described in Step 1 so that the gyroscope is at the natural frequency of the working mode;

Step 4: After C/V conversion and subsequent amplification of the differential capacitive coupling signals on the detection electrode pairs 305 (AB) and 307 (AB), demodulate with the drive signal described in the previous step, and obtain the corresponding DC signal based on gyroscope angular velocity input signal;

Step 5: After subsequent testing and calibration, the gyro angular velocity input value corresponding to the DC signal is obtained.

As shown in Figure 4, it is a screenshot of the side view of the bulk acoustic wave solid wave micro-gyroscope designed for an embodiment of the present invention, wherein

400 is the micro-gyroscope base;

401 is the capacitance gap between the micro-gyroscope and the base;

402 is a hemispherical harmonic oscillator;

403 is a support column for fixing the hemispherical resonator on the base;

404 is optional, symmetrically distributed drive electrode pairs, detection electrode pairs, monitoring electrode pairs, and balance electrode pairs

In the system described in Figure 4, its signal detection process is as follows:

Step 1: The controller generates a carrier excitation drive signal with a certain frequency and amplitude, and acts on the drive electrode pair through A/D conversion to excite the gyroscope;

Step 2: At this time, the gyro is in the excited state, and the differential capacitive coupling signal on the monitoring electrode pair is input to the controller after C/V conversion, amplification, and D/A conversion to give feedback on the working state of the gyro at this time;

Step 3: The controller adjusts the frequency and amplitude of the driving signal in step 1 in real time according to the signal feedback in step 2, so as to keep the gyroscope at the natural frequency of the working mode;

Step 4: After C/V conversion and subsequent amplification of the differential capacitive coupling signals on the detection electrode pair and the balance electrode pair, the signal is phase-sensitive demodulated with the monitoring electrode, and the input signal corresponding to the angular velocity of the gyro is obtained after low-pass filtering DC signal;

Step 5: After subsequent testing and calibration, the gyro angular velocity input value corresponding to the DC signal is obtained.

In another embodiment, the signal detection of the gyroscope can adopt the signal detection method of frequency division multiplexing, that is, carrier signals of different frequencies are respectively applied to the corresponding control electrode pairs and detection electrode pairs of the gyroscope, and these carrier signals of different frequencies across the capacitor gap. It can reflect the vibration state of the gyro in real time at this time, detect the mixed multi-frequency carrier signal on the common electrode, and demodulate it, and then obtain the vibration information of the corresponding vibration point of the gyro according to the signal representation of different frequency carriers , so as to complete the detection of the gyro vibration state.

As shown in Figure 5, it is the equivalent capacitance diagram of the resonator and the base electrode in an embodiment of the present invention, wherein: Cd represents driving, Cs represents detection, Cm represents monitoring, Cb represents balance, and 1-4 represents two pairs. The serial number of the electrode pair. Corresponding to Figure 1, Cd represents the equivalent capacitance between 104 (AB) and 108 (AB) and the resonator; Cs represents the equivalent capacitance between 105 (AB) and 109 (AB) and the resonator; Cm represents The equivalent capacitance between 106 (AB) and 110 (AB) and the resonant oscillator; Cb represents the equivalent capacitance between 107 (AB) and 111 (AB) and the resonant oscillator; the A and B signals of each electrode pair are AC sine wave with equal amplitude and same frequency and opposite phase; uniquely, it is stipulated that A in the electrode pair represents that the electrode signal is 0 degrees, and B represents that the electrode alignment is 180 degrees; taking 104A, 104B, 108A, and 108B as examples, the frequency and The amplitudes are the same, 104(A), 108(A) are 0-degree signals; 104(B), 108(B) are 180-degree signals.

i 104(AB) and 108(AB);

ii 105(AB) and 109(AB);

iii 106(AB) and 110(AB);

iv 107(AB) and 111(AB);

The four groups correspond to carrier signals of different frequencies.

Step 1: The controller generates an excitation drive signal with a certain frequency and amplitude, and acts on the drive electrode pair 104 (AB) and 108 (AB) through A/D conversion to excite the gyroscope;

Step 2: At this point, the gyroscope is in the excited state, in each electrode pair, that is:

i 104(AB) and 108(AB);

ii 105(AB) and 109(AB);

iii 106(AB) and 110(AB);

iv 107(AB) and 111(AB);

Carrier modulation signals with different frequencies and whose amplitude is at least 2 orders of magnitude smaller than that of the driving signal described in step 1.

Step 3: A common signal containing multiple carrier signals can be detected on the common electrodes of the gyroscope. For this common signal, the signals of each electrode pair of the gyroscope can be obtained by demodulating the carrier signals of different frequency bands respectively. It can be known that each electrode Vibration status for the location.

Step 4: The controller adjusts the frequency and amplitude of the driving signal in step 1 in real time according to the signal feedback of the monitoring electrode pair demodulated in step 3, so as to keep the gyroscope at the natural frequency of the working mode;

Step 5: Perform demodulation according to the common signal carrier obtained in Step 3, and obtain a DC signal reflecting the gyroscope vibration state at this time after being processed by the controller.

Step 6: After subsequent testing and calibration, the gyroscope angular velocity input value corresponding to the DC signal is obtained.

If the gyroscope has no monitoring electrode pairs 106 (AB) and 110 (AB) and balanced electrode pairs 107 (AB) and 111 (AB) to detect, the method steps are simplified as follows:

Step 1: The controller generates an excitation drive signal with a certain frequency and amplitude, and acts on the drive electrode pair 104 (AB) and 108 (AB) through A/D conversion to excite the gyroscope;

Step 2: At this time, the gyroscope is in the excited state, and each electrode pair is respectively in:

i 104(AB) and 108(AB);

ii 105(AB) and 109(AB);

Applying carrier modulation signals with different frequencies, which are at least 2 orders of magnitude smaller than the amplitude of the driving signal described in step 1;

Step 3: A common signal containing multiple carrier signals can be detected on the common electrodes of the gyroscope. For this common signal, the signals of each electrode pair of the gyroscope can be obtained by demodulating the carrier signals of different frequency bands respectively. It can be known that each electrode Vibration status for the location.

Step 4: The controller observes the vibration state of the gyro at this time according to the signal of the detection electrode pair demodulated in step 3, and adjusts the frequency and amplitude of the driving signal in step 1 to keep the gyro at the natural frequency of the working mode ;

Step 5: Perform demodulation according to the common signal carrier obtained in Step 3, and obtain a DC signal reflecting the vibration state of the gyroscope after being processed by the controller.

Step 6: After subsequent testing and calibration, the gyroscope angular velocity input value corresponding to the DC signal is obtained.

As shown in Figure 6, it is a signal flow diagram of another embodiment of the present invention. Two sinusoidal carrier signals with the same amplitude and opposite phases are respectively applied to a pair of driving electrode pairs, and the signal reflecting the vibration change of the harmonic oscillator is output through capacitive coupling. AM waves. Afterwards, it first completes the C/V conversion, and then undergoes differential amplification and two-stage AC amplification. After filtering, it performs phase-sensitive demodulation with the monitoring electrode on the phase-processed signal. After the signal is obtained, it undergoes low-pass filtering and A/D conversion. feedback to the controller.

The charge amplifier used in this embodiment is used for the detection of weak signals. It can convert the weak charge signal output by the gyro into an amplified voltage signal, and at the same time convert the high impedance output of the gyro into a low impedance output. There are certain requirements for the accuracy of resistance and capacitance, so if necessary, devices such as impedance analyzers can be used for optimization.

In this embodiment, the differential amplification and the two-stage amplification have an amplification factor of about 10 times at each level, and the gain is adjustable to compensate for the processing error of the gyro system.

The phase-sensitive demodulation scheme of this embodiment adopts analog multiplication demodulation. In another embodiment, switch demodulation can be used, but this scheme will generate more noise than multiplicative demodulation.

In another embodiment, the controller adopts a DSP chip, and the DSP chip supports the "multiply-add" operation of a single clock cycle, which has the advantages of low cost, low power consumption, and high processing capability. The DSP chip is responsible for accepting A/D converted The carrier demodulates the signal to complete the feedback and functions as a general controller.

The present invention adopts the differential capacitance detection method, which does not need metal patterned electrode lead wires on the resonator; adopts the signal detection mode of frequency division multiplexing to ensure the identification of the detection signal of the gyroscope; processes the electrodes on the substrate, which greatly simplifies The processing technology reduces the design and processing difficulty of the hemispherical resonant gyroscope.

A microcapacitance gyro signal detection method based on carrier detection in the present invention is not limited to a specific gyro, and those skilled in the art can make various deformations or modifications for different gyro within the scope of the claims, This does not affect the essence of the present invention. It should be noted that the implementation of the signal detection step adopted in the above method can preferably be realized by using an analog + digital circuit as required, and is not limited to the specific method adopted in each step.

Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the specific embodiments described above, and those skilled in the art may make various changes or modifications within the scope of the claims, which do not affect the essence of the present invention.

Claims (7)

1. A microcapacitance gyro signal detection method based on carrier wave detection, it is characterized in that, described method is superimposed on each electrode pair by multi-frequency carrier wave, at this moment, the differential capacitance between each electrode pair and gyro resonator It will change according to the vibration state of the gyroscope, and the signal detection of the gyroscope can be completed by detecting the change of the differential capacitance; The method comprises the steps of: Step 1: The controller generates a carrier excitation drive signal with a certain frequency and amplitude, and acts on the drive electrode pair through A/D conversion to excite the gyroscope; Step 2: At this time, the gyro is in the excited state, and the differential capacitive coupling signal on the monitoring electrode pair or detection electrode pair is input to the controller after C/V conversion, amplification, and D/A conversion to control the work of the gyro at this time. status feedback; Step 3: The controller adjusts the frequency and amplitude of the driving signal in step 1 in real time according to the signal feedback in step 2, so as to keep the gyroscope at the natural frequency of the working mode; Step 4: Detect the differential capacitive coupling signal on the electrode pair, or detect the differential capacitive coupling signal on the electrode pair and the balanced electrode pair, perform C/V conversion and subsequent amplification, and then cooperate with the monitoring electrode signal to perform phase-sensitive demodulation. After low-pass filtering, a DC signal corresponding to the input signal of the angular velocity of the gyroscope is obtained; Step 5: After subsequent testing and calibration, the gyro angular velocity input value corresponding to the DC signal is obtained. 2. the micro-capacitance gyro signal detection method based on carrier wave detection according to claim 1, is characterized in that, described method adopts frequency division multiplexing signal transmission method to detect gyro signal, promptly on each electrode pair of gyro respectively Carrier signals of different frequencies are applied. These carrier signals of different frequencies reflect the vibration state of the gyroscope in real time through the capacitance gap. The mixed multi-frequency carrier signal is detected on the common electrode, and the mixed multi-frequency carrier signal is detected. Demodulation is to obtain the vibration information of the corresponding vibration point of the gyro according to the signal representation of different frequency carriers, so as to complete the detection of the vibration state of the gyro. 3. the microcapacitance gyroscope signal detection method based on carrier detection according to claim 2, is characterized in that, described method comprises the steps: Step 1: The controller generates an excitation drive signal with a certain frequency and amplitude, and acts on the drive electrode pair through A/D conversion to excite the gyroscope; Step 2: At this time, the gyroscope is in an excited state, and a carrier modulation signal with different frequencies and at least two orders of magnitude smaller than the amplitude of the driving signal described in step 1 is applied to each electrode pair; Step 3: A common signal containing multiple carrier signals can be detected on the common electrodes of the gyroscope. For this common signal, the signals of each electrode pair of the gyroscope can be obtained by demodulating the carrier signals of different frequency bands respectively. It can be known that each electrode The vibration state of the location; Step 4: The controller adjusts the frequency and amplitude of the driving signal in step 1 in real time according to the feedback of the monitoring signal demodulated in step 3, so as to keep the gyroscope at the natural frequency of the working mode; Step 5: Demodulate the signals of each electrode pair obtained in step 3, and obtain a DC signal reflecting the vibration state of the gyroscope after being processed by the controller; Step 6: After subsequent testing and calibration, the gyroscope angular velocity input value corresponding to the DC signal is obtained. 4. according to the microcapacitance gyroscope signal detection method based on carrier detection according to any one of claim 1-3, it is characterized in that, in step 1, when driving electrode pair, apply the carrier voltage of different frequency on driving electrode pair . 5. according to the microcapacitance gyroscope signal detection method based on carrier detection described in any one of claim 1-3, it is characterized in that, the signal on every pair of described electrode pairs is same frequency same amplitude reverse signal; The signals on the two pairs of electrodes at the position are opposite signals with the same frequency and the same amplitude. 6. The microcapacitance gyro signal detection method based on carrier detection according to any one of claims 1-3, wherein the differential capacitive coupling signal changes with the gyro angular velocity input, and the detected differential capacitance The change is on the order of hundreds of fF. 7. according to the microcapacitance gyro signal detection method based on carrier detection according to any one of claim 1-3, it is characterized in that, under AC carrier voltage drive, when described resonant oscillator is subjected to gyro angular velocity input influence, the The AC detection signal on the detection electrode pair will change, and the change can reflect the angular velocity information of the gyroscope.