CN104191092B - The laser-TIG hybrid silk filling seal weld method of L-type aluminium alloy structure - Google Patents
The laser-TIG hybrid silk filling seal weld method of L-type aluminium alloy structure Download PDFInfo
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- CN104191092B CN104191092B CN201410381623.8A CN201410381623A CN104191092B CN 104191092 B CN104191092 B CN 104191092B CN 201410381623 A CN201410381623 A CN 201410381623A CN 104191092 B CN104191092 B CN 104191092B
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- 229910000838 Al alloy Inorganic materials 0.000 title claims abstract description 57
- 238000000034 method Methods 0.000 title claims abstract description 15
- 238000003466 welding Methods 0.000 claims abstract description 84
- 239000010410 layer Substances 0.000 claims abstract description 49
- 239000011229 interlayer Substances 0.000 claims abstract description 20
- 230000036244 malformation Effects 0.000 abstract description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 239000004411 aluminium Substances 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910001094 6061 aluminium alloy Inorganic materials 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000003032 molecular docking Methods 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/346—Working by laser beam, e.g. welding, cutting or boring in combination with welding or cutting covered by groups B23K5/00 - B23K25/00, e.g. in combination with resistance welding
- B23K26/348—Working by laser beam, e.g. welding, cutting or boring in combination with welding or cutting covered by groups B23K5/00 - B23K25/00, e.g. in combination with resistance welding in combination with arc heating, e.g. TIG [tungsten inert gas], MIG [metal inert gas] or plasma welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/08—Non-ferrous metals or alloys
- B23K2103/10—Aluminium or alloys thereof
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Arc Welding In General (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses a kind of laser-TIG hybrid silk filling seal weld method of L-type aluminium alloy structure. Before comprising weldering, aluminium alloy is fixed according to L-type structure gapless, opens double V-groove in fixing rear L-type aluminium alloy structure outside; Promote when welding laser, TIG welding gun and wire feeding mouth simultaneously, first, by horizontal positioned outside L-type aluminium alloy structure, control layers 1 and 2 welding condition identical, controls the 3rd layer identical to last one deck welding condition, carry out 4～5 layers and fill silk and weld; After the welding of outside, by L-type aluminium alloy structure inner side upwards, place at angle at 45 °, carries out 5～6 layers of welding that fills silk. The present invention fills silk, accurately controls interlayer temperature and laser defocusing amount by multilayer, has at utmost avoided the L-type malformation causing due to the input of excessive heat; Interior outside welding sequence, has at utmost suppressed the deformation tendency in welding process, has ensured laser-TIG hybrid silk filling seal welding efficiency.
Description
Technical field
The welding forming technical field that the invention belongs to IC industry aluminium alloy, relates to a kind of L-type aluminium and closesThe laser-TIG hybrid silk filling seal weld method of gold structure. Be applicable to thick aluminum alloy plate material, compound silk fillingThe two-sided seal welding of multilayer is shaped.
Background technology
In recent years along with the develop rapidly of integrated circuit equipment manufacture, during IC equipment and other semiconductor are equippedNumerous large-scale in effect and the status of thick aluminum alloy spare part day by day highlight, in integrated circuit equipment, aluminium closes at presentThe gold cavity body structure overwhelming majority takes the milling of monoblock blank entirety to remove processing, and stock utilization is extremely low, manufacturesCycle is long, and the cavity body structure precision of shaping is low, need following process to improve precision, simultaneously to monoblock blankCasting requires high, directly affects the quality of final cavity body structure. Therefore efficient, energy-conservation, accurate being welded intoShape technology has become one of key technology that in semiconductor equipment, thick aluminum alloy spare part is manufactured, wherein aluminium alloyWelded weld seam size, heat affected area scope, defect probability of occurrence, weld seam compactness and welding essenceStability and the reliability of aluminum alloy spare part in degree direct relation semiconductor equipment. Traditional arc welding at presentConnect with single track individual layer Laser-TIG Hybrid Welding technique in the typical L-type aluminium alloy structure of welding cavity body structureTime, because weld seam is wide, heat affected area is large, ratio of defects is high and welding deformation is large etc., problem seriously restricts weldingThe quality of shaping aluminium alloy cavity structure.
Summary of the invention
Equip L-type aluminium alloy structure process institute for solving current laser-TIG hybrid silk filling seal welding semiconductorThe problem of bringing, the invention provides a kind of L-type aluminium alloy structure laser-TIG hybrid fill silk seal welding sideMethod, it is to adopt laser-TIG hybrid silk filling seal welding to carry out multilayer to 10～15mm thick aluminium alloy to fill outWire bond connects, and utilizes the input of little laser and little TIG electric current linear energy density, realize stable, little heat affected area,The laser-TIG hybrid silk filling seal welding of high compactness and high-precision aluminium alloy L-type structure.
The technical solution adopted in the present invention comprises following content:
A laser-TIG hybrid silk filling seal weld method for L-type aluminium alloy structure, comprises the following steps:
Step 1: before welding, aluminium alloy is fixed according to L-type structure gapless, the fixing rear L-type aluminium forming closesDouble V-groove is opened in gold structure outside;
Step 2: when welding, laser, TIG welding gun and wire feeding mouth promote simultaneously, first by L-type aluminium alloy structureOutside horizontal positioned, controls layers 1 and 2 welding condition identical, controls the 3rd layer to lastLayer welding condition is identical, carry out 4～5 layers of welding that fills silk, and finally realizes L-type aluminium alloy structure outsideLaser-TIG hybrid fills silk and welds;
Step 3: complete after the welding of L-type aluminium alloy structure outside, by aluminium alloy L-type structure inner side upwards,Place at angle at 45 °, and when welding, laser, TIG welding gun and wire feeding mouth promote simultaneously, control the 1st layer and the 2ndLayer welding condition is identical, controls the 3rd layer to finally one deck welding condition is identical, carries out 5～6 layersFill silk and weld, the laser-TIG hybrid of finally realizing aluminium alloy L-type structure inner side fills silk and welds.
Further, described thickness of aluminum alloy is 10～15mm, the L-type aluminium alloy structure outside V that opensType groove depth H is 3～4mm.
Further, described welding condition is that interlayer temperature, laser defocusing amount, laser rays energy are closeDegree, TIG electric current linear energy density.
Further, described layers 1 and 2 interlayer temperature scope is 270～290 DEG C, laser out of focusAmount is that-0.8～-1.0mm, laser rays energy density are 60～70J/mm, TIG electric current linear energy density scopeBe 225～360J/mm.
Further, described the 3rd layer to last layer by layer between temperature range be 300～320 DEG C, laser fromBurnt amount is that-1.2～-1.5mm, laser rays energy density are 50～55J/mm, TIG electric current linear energy density modelEnclosing is 210～325J/mm.
Compared with prior art, the present invention has the following advantages::
1. the present invention fills silk, accurately controls interlayer temperature and laser defocusing amount by multilayer, has greatly reduced laserWith the linear energy density of TIG electric current, at utmost ensure that L-type aluminium alloy structure welding process obtains little heatZone of influence welding point, avoids the L-type malformation that causes due to the input of excessive heat, has realized by fallingLow_input_power amount improves welding precision.
2. the present invention, by the interior outside welding sequence of planning L-type aluminium alloy structure, has at utmost suppressed LThe deformation tendency of type aluminium alloy structure in welding process, has ensured laser-TIG hybrid silk filling seal welding effectRate, is conducive to obtain relatively little weld seam and the nearly Welding Structure without distortion.
3. the present invention has reduced the linear energy density of laser and TIG electric current, can effectively reduce heat affected area modelEnclose, avoid weld defect, improve weld seam compactness, be conducive to control the welding deformation of L-type aluminium alloy structureSize, obtains the nearly Welding Structure without distortion.
Brief description of the drawings
Fig. 1 is the present invention's welding process schematic diagram outside L-type aluminium alloy structure.
Fig. 2 is the present invention's welding process schematic diagram inside L-type aluminium alloy structure.
Fig. 3 is groove schematic diagram outside L-type aluminium alloy structure of the present invention.
1. aluminium alloy 2. welding wire 3. laser 4.TIG welding gun 5. wire feeding mouths in figure
Detailed description of the invention
Below in conjunction with accompanying drawing to the present invention's detailed description that gives an actual example:
Embodiment 1: taking thick 6061 aluminium alloys 1 of 10mm as example, before welding, thick 10mm 6061 aluminium are closedGold 1, according to the docking of L-type structure gapless, is then opened double V-groove, V-type in the L-type structure outside formingGroove depth 3mm, 43 ° of monolateral angles; Adjust laser 3, TIG welding gun 4 and wire feeding mouth 5 relative positions,Realize laser, TIG welding gun and wire feeding mouth promotes simultaneously; Welding wire 2 diameter 1.2mm used.
First L-type aluminium alloy 1 structure outside is welded, level outside L-type aluminium alloy 1 structure is putPut, the 1st layer of welding condition laser rays energy density 70J/mm of welding that fill silk, TIG electric current heat input is closeDegree 360J/mm, 290 DEG C of interlayer temperatures, laser defocusing amount-0.9mm; The 2nd layer and the 1st layer of welding procedureParameter is identical, laser rays energy density 70J/mm, TIG electric current linear energy density 360J/mm, interlayer temperature290 DEG C, laser defocusing amount-0.9mm; The 3rd layer of laser rays energy density 55J/mm, TIG electric current heat inputDensity 300J/mm, 310 DEG C of interlayer temperatures, laser defocusing amount-1.2mm; The 4th layer and the 3rd layer of WelderSkill parameter is identical, laser rays energy density 55J/mm, TIG electric current linear energy density 300J/mm, interlayer temperatureSpend 310 DEG C, laser defocusing amount-1.2mm, realizes the thick 6061L type of 10mm aluminium and closes by dosing 4 layers of welding wireLittle heat affected area, high compactness and the nearly laser-TIG hybrid without distortion outside gold (1) structure fill silk and sealWelding.
Then L-type aluminium alloy 1 structure inner side is welded, by L-type aluminium alloy 1 structure inner side upwards,Become miter angle to place, the 1st layer of welding condition laser rays energy density 65J/mm of welding that fill silk, TIGElectric current linear energy density 300J/mm, 280 DEG C of interlayer temperatures, laser defocusing amount-1mm; The 2nd layer and the 1stLayer welding condition is identical, laser rays energy density 65J/mm, and TIG electric current linear energy density 300J/mm,280 DEG C of interlayer temperatures, laser defocusing amount-1mm; The 3rd layer of laser rays energy density 50J/mm, TIG electricityStreamline energy density 240J/mm, 320 DEG C of interlayer temperatures, laser defocusing amount-1.5mm; The 4th layer and the 5thLayer is identical with the 3rd layer of welding condition, laser rays energy density 50J/mm, TIG electric current linear energy density240J/mm, 320 DEG C of interlayer temperatures, laser defocusing amount-1.5mm, realizes 10mm by dosing 5 layers of welding wireLittle heat affected area, high compactness and near multiple without the laser-TIG being out of shape inside thick 6061L type aluminium alloy 1 structureClose silk filling seal welding.
Embodiment 2: taking thick 6061 aluminium alloys 1 of 15mm as example, before welding, thick 15mm 6061 aluminium are closedGold 1, according to the docking of L-type structure gapless, is then opened double V-groove in structure outside, double V-groove degree of depth 4mm,45 ° of monolateral angles; Adjust laser 3, TIG welding gun 4 and wire feeding mouth 5 relative positions, realize laser 3, TIGWelding gun 4 and wire feeding mouth 5 promote simultaneously; Welding wire 2 diameter 1.2mm used.
First L-type aluminium alloy 1 structure outside is welded, level outside L-type aluminium alloy 1 structure is putPut, the 1st layer of welding condition laser rays energy density 70J/mm of welding that fill silk, TIG electric current heat input is closeDegree 360J/mm, 290 DEG C of interlayer temperatures, laser defocusing amount-1mm; Join with the 1st layer of welding procedure for the 2nd layerNumber is identical, laser rays energy density 70J/mm, TIG electric current linear energy density 360J/mm, interlayer temperature290 DEG C, laser defocusing amount-1mm; The 3rd layer of laser rays energy density 55J/mm, TIG electric current heat input is closeDegree 325J/mm, 300 DEG C of interlayer temperatures, laser defocusing amount-1.5mm; The the 4th and the 5th layer and the 3rd layer of welderingConnect technological parameter identical, laser rays energy density 55J/mm, TIG electric current linear energy density 325J/mm, layerBetween 300 DEG C of temperature, laser defocusing amount-1.5mm, realizes the thick 6061L type of 15mm by dosing 5 layers of welding wireLittle heat affected area, high compactness and the nearly laser-TIG hybrid without distortion in aluminium alloy 1 structure outside fill silk closeSoldering and sealing connects.
Then L-type aluminium alloy 1 structure inner side is welded, by L-type aluminium alloy 1 structure inner side upwards,Become miter angle to place, the 1st layer of welding condition laser rays energy density 60J/mm of welding that fill silk, TIGElectric current linear energy density 225J/mm, 270 DEG C of interlayer temperatures, laser defocusing amount-1mm; The 2nd layer and the 1stLayer welding condition is identical, laser rays energy density 60J/mm, and TIG electric current linear energy density 225J/mm,270 DEG C of interlayer temperatures, laser defocusing amount-1mm; The 3rd layer of laser rays energy density 50J/mm, TIG electricityStreamline energy density 210J/mm, 320 DEG C of interlayer temperatures, laser defocusing amount-1.5mm; 4th, the 5th andThe 6th layer identical with the 3rd layer of welding condition, laser rays energy density 50J/mm, TIG electric current heat inputDensity 210J/mm, 320 DEG C of interlayer temperatures, laser defocusing amount-1.5mm, realizes by dosing 6 layers of welding wireLittle heat affected area, high compactness and the nearly laser without distortion inside the thick 6061L type of 15mm aluminium alloy 1 structureThe compound silk filling seal welding of-TIG.
The above example is only preferably detailed description of the invention of the present invention, but protection scope of the present invention is notBe confined to this, any be familiar with those skilled in the art the present invention disclose technical scope in, according toTechnical scheme of the present invention and inventive concept thereof are equal to replaces or changes, and all should be encompassed in guarantor of the present inventionWithin protecting scope.
Claims (2)
1. the laser-TIG hybrid of a L-type aluminium alloy structure silk filling seal weld method, is characterized in that:Comprise the following steps:
Step 1: before welding, aluminium alloy (1) is fixed according to L-type structure gapless, the fixing rear L-type formingDouble V-groove is opened in aluminium alloy (1) structure outside;
Step 2: laser when welding (3), TIG welding gun (4) and wire feeding mouth (5) promote simultaneously, first by LHorizontal positioned outside type aluminium alloy (1) structure, controls layers 1 and 2 welding condition identical, controlMake the 3rd layer to finally one deck welding condition is identical, carry out 4～5 layers of welding that fills silk, finally realize L-typeThe laser-TIG hybrid in aluminium alloy (1) structure outside fills silk and welds;
Step 3: complete after the welding of L-type aluminium alloy (1) structure outside, by L-type aluminium alloy (1) structureUpwards, place at angle at 45 ° in inner side, and laser when welding (3), TIG welding gun (4) and wire feeding mouth (5) are sameShi Tisheng, controls layers 1 and 2 welding condition identical, controls the 3rd layer to last one deck weldingTechnological parameter is identical, carry out 5～6 layers of welding that fills silk, and finally realizes L-type aluminium alloy (1) structure inner sideLaser-TIG hybrid fills silk and welds;
Wherein: described layers 1 and 2 interlayer temperature scope is 270～290 DEG C, and laser defocusing amount is-0.8～-1mm, laser rays energy density is 60～70J/mm, TIG electric current linear energy density scope is 225～360J/mm; Described the 3rd layer to last layer by layer between temperature range be 300～320 DEG C, laser defocusing amountFor-1.2～-1.5mm, laser rays energy density is 50～55J/mm, and TIG electric current linear energy density scope is210～325J/mm。
2. the laser-TIG hybrid of L-type aluminium alloy structure according to claim 1 silk filling seal welding sideMethod, is characterized in that: described aluminium alloy (1) thickness is 10～15mm, the L-type aluminium alloy (1) of formationThe structure outside double V-groove depth H of opening is 3～4mm.
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| CN104625411B (en) * | 2014-12-15 | 2016-07-06 | 哈尔滨工业大学 | A method for welding Ti2AlNb-based intermetallic compounds and dissimilar titanium alloys |
| CN104475977A (en) * | 2014-12-16 | 2015-04-01 | 沈阳富创精密设备有限公司 | IC (Integrated Circuit) equipment ultra-large aluminum alloy cavity welding method |
| JP6439734B2 (en) * | 2016-04-04 | 2018-12-19 | トヨタ自動車株式会社 | Laser overlaying method |
| JP2019084559A (en) * | 2017-11-07 | 2019-06-06 | トヨタ自動車株式会社 | Welding method and corner joint part |
| CN108526693A (en) * | 2018-03-20 | 2018-09-14 | 广东省焊接技术研究所（广东省中乌研究院） | A kind of laser welding with filler wire method of power battery module end plate and side plate |
| DE102018210773A1 (en) * | 2018-06-29 | 2020-01-02 | Robert Bosch Gmbh | Manufacturing process of a housing for electronics |
| CN110899980B (en) * | 2019-12-10 | 2021-07-27 | 沈阳富创精密设备股份有限公司 | Plasma arc-laser hybrid welding method for high-sealing aluminum alloy rectangular cavity |
| CN114012263A (en) * | 2021-12-02 | 2022-02-08 | 远景动力技术(江苏)有限公司 | Welding method of lightweight aluminum plate and shell processing method of battery module |
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| JPH01241392A (en) * | 1988-03-22 | 1989-09-26 | Nippon Steel Corp | Combined welding method using TIG and laser |
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| CN1526507A (en) * | 2003-09-20 | 2004-09-08 | 大连理工大学 | Magnesium Alloy Laser-TIG Welding Method |
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Address after: No.18a-1, Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang fuchuang precision equipment Co.,Ltd. Address before: 110168 no.18a-1, Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Fortune Precision Equipment Co.,Ltd. |