CN104142695A - Converging type air flow control device - Google Patents
Converging type air flow control device Download PDFInfo
- Publication number
- CN104142695A CN104142695A CN201410311402.3A CN201410311402A CN104142695A CN 104142695 A CN104142695 A CN 104142695A CN 201410311402 A CN201410311402 A CN 201410311402A CN 104142695 A CN104142695 A CN 104142695A
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- China
- Prior art keywords
- flow
- solenoid valve
- valve module
- circuit board
- control circuit
- Prior art date
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Abstract
The invention discloses a converging type air flow control device which comprises a control circuit board, a flow detector and a solenoid valve module. The flow controller is connected with a first air inlet of the solenoid valve module through an air pipe, the control circuit board is connected with the flow detector and the solenoid valve module through leads, airflow to be detected enters an air inlet of the flow detector which transmits a flow signal to the control circuit board, the control circuit board sends a control signal to the solenoid valve module, and the solenoid valve module regulates angles of a valve under action of the control signal to control airflow flowing through the flow detector. By means of matching use of the control circuit board, the flow detector and the solenoid valve module, product cost is reduced, the processing technology is simplified, load on a vacuum pump caused by decrease of flow is reduced, and the service life of the vacuum pump is prolonged. The converging type air flow control device can be used for mixing gases at the same time.
Description
Technical field
The present invention relates to accurate opertaing device technical field, relate in particular to a kind of interflow formula gas flow control device.
Background technology
In Fig. 1, this device comprises flow detection and control module 8, flowrate control valve 9, air flue 7; Described flow detection is connected with air flue 7 with control module 8, detects present flow rate, and contrasts with setting flow; Described flowrate control valve 9 is connected with air flue 7, in flow detection and control module 8, makes after calculating, by it, is controlled flow is adjusted; Described flowrate control valve 9 inside, by the coil winding post that dams, form electromagnet, under the effect of controlling electric current, produce magnetic field, by producing different adhesive degree with magnet, control air-flow; This device is expensive, and technique is loaded down with trivial details, is not suitable for the cost of lowering apparatus, can increase the load of vacuum pump when gas flow reduces simultaneously, reduces the serviceable life of vacuum pump, is unfavorable for the long-time stability of product.
Summary of the invention
Technical matters for above-mentioned existence, the object of the invention is: proposed a kind of flow that reduces and diminished to vacuum pump generation load, extended the serviceable life of vacuum pump; Reduce the interflow formula high-precision gas volume control device of cost of products.
Technical solution of the present invention is achieved in that a kind of interflow formula gas flow control device, comprises control circuit board, flow detector, solenoid valve module; Described solenoid valve module be provided with the first air intake opening and for access interflow gas the second air intake opening; Described flow controller is connected with the first air intake opening of solenoid valve module by tracheae; Described control circuit board is connected with solenoid valve module with flow detector by wire; The air intake opening of described flow detector enters air-flow to be measured, and flow detector is passed to control circuit board by flow signal; Described control circuit board is by present flow rate value and set flow value comparison, reacts and sends control signal to solenoid valve module; Described solenoid valve module is adjusted the valve angle of solenoid valve under the effect of control signal, the first air intake opening air-flow of electromagnetic valve for adjusting module, and the second air intake opening air-flow of while electromagnetic valve for adjusting module, thus control the air-flow that flows through flow detector.
Due to the utilization of technique scheme, the present invention compared with prior art has following advantages:
A kind of interflow of the present invention formula gas flow control device, by being used in conjunction with of control circuit board, flow detector, solenoid valve module, can reduce cost of products, simplified processing process, reduce flow and diminish to vacuum pump generation load, extend the serviceable life of vacuum pump; For gas, mix simultaneously.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, technical solution of the present invention is described further:
Accompanying drawing 1 is existing a kind of gas flow control device structural representation;
Accompanying drawing 2 is a kind of structural representation that collaborates formula gas flow control device of the present invention;
Wherein: 1, control circuit board; 2, flow detector; 3, solenoid valve module; 4, the first air intake opening; 5, the second air intake opening; 6, tracheae; 7, air flue; 8, flow detection and control module; 9, flowrate control valve.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described.
Be a kind of interflow of the present invention formula gas flow control device as shown in Figure 2, comprise control circuit board 1, flow detector 2, solenoid valve module 3; Described solenoid valve module 3 be provided with the first air intake opening 4 and for access interflow gas the second air intake opening 5; Described flow controller 2 is connected with the first air intake opening 4 of solenoid valve module 3 by tracheae 6; Described control circuit board 1 is connected with solenoid valve module 3 with flow detector 2 by wire; The air intake opening of described flow detector 2 enters air-flow to be measured, and flow detector 2 is passed to control circuit board 1 by flow signal; Described control circuit board 1 is by present flow rate value and set flow value comparison, reacts and sends control signal to solenoid valve module 3; Described solenoid valve module 3 is adjusted the valve angle of solenoid valve under the effect of control signal, reduce the first air intake opening 4 air-flows of solenoid valve module, increase the second air intake opening 5 air-flows of solenoid valve module or the first air intake opening 4 air-flows of increase solenoid valve module simultaneously, reduce the second air intake opening 5 air-flows of solenoid valve module simultaneously, thereby control the air-flow that flows through flow detector 2; In the last Real-time Feedback in whole system and control, realize the accurately effect of control air flow rate; Especially be that described interflow gas must be to use the gas without impact to detecting air-flow.
By being used in conjunction with of control circuit board 1, flow detector 2, solenoid valve module 3, can reduce cost of products, simplified processing process, reduces flow and diminishes vacuum pump is produced to load, extends the serviceable life of vacuum pump; Can for gas, mix simultaneously.
Above-described embodiment is only explanation technical conceive of the present invention and feature; its object is to allow person skilled in the art can understand content of the present invention and be implemented; can not limit the scope of the invention with this; all equivalences that Spirit Essence is done according to the present invention change or modify, and all should be encompassed in protection scope of the present invention.
Claims (1)
1. an interflow formula gas flow control device, is characterized in that: comprise control circuit board, flow detector, solenoid valve module; Described solenoid valve module be provided with the first air intake opening and for access interflow gas the second air intake opening; Described flow controller is connected with the first air intake opening of solenoid valve module by tracheae; Described control circuit board is connected with solenoid valve module with flow detector by wire; The air intake opening of described flow detector enters air-flow to be measured, and flow detector is passed to control circuit board by flow signal; Described control circuit board is by present flow rate value and set flow value comparison, reacts and sends control signal to solenoid valve module; Described solenoid valve module is adjusted the valve angle of solenoid valve under the effect of control signal, the first air intake opening air-flow of electromagnetic valve for adjusting module, and the second air intake opening air-flow of while electromagnetic valve for adjusting module, thus control the air-flow that flows through flow detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410311402.3A CN104142695A (en) | 2014-07-02 | 2014-07-02 | Converging type air flow control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410311402.3A CN104142695A (en) | 2014-07-02 | 2014-07-02 | Converging type air flow control device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104142695A true CN104142695A (en) | 2014-11-12 |
Family
ID=51851898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410311402.3A Pending CN104142695A (en) | 2014-07-02 | 2014-07-02 | Converging type air flow control device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104142695A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1096351A1 (en) * | 1999-04-16 | 2001-05-02 | Fujikin Incorporated | Parallel bypass type fluid feeding device, and method and device for controlling fluid variable type pressure system flow rate used for the device |
| US20030211015A1 (en) * | 2002-05-08 | 2003-11-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Gas flow control system with interlock |
| WO2006132073A1 (en) * | 2005-06-06 | 2006-12-14 | Ckd Corporation | Flow rate control device absolute flow rate check system |
| US20090059717A1 (en) * | 2007-08-31 | 2009-03-05 | Ckd Corporation | Fluid mixing system and fluid mixing apparatus |
| CN203502836U (en) * | 2012-08-03 | 2014-03-26 | 宁波保税区楷世环保科技有限公司 | Flow control system |
| JP2014507700A (en) * | 2010-12-23 | 2014-03-27 | リンカーン グローバル，インコーポレイテッド | Gas flow regulator having a plurality of gas flow paths |
-
2014
- 2014-07-02 CN CN201410311402.3A patent/CN104142695A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1096351A1 (en) * | 1999-04-16 | 2001-05-02 | Fujikin Incorporated | Parallel bypass type fluid feeding device, and method and device for controlling fluid variable type pressure system flow rate used for the device |
| US20030211015A1 (en) * | 2002-05-08 | 2003-11-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Gas flow control system with interlock |
| WO2006132073A1 (en) * | 2005-06-06 | 2006-12-14 | Ckd Corporation | Flow rate control device absolute flow rate check system |
| US20090059717A1 (en) * | 2007-08-31 | 2009-03-05 | Ckd Corporation | Fluid mixing system and fluid mixing apparatus |
| JP2014507700A (en) * | 2010-12-23 | 2014-03-27 | リンカーン グローバル，インコーポレイテッド | Gas flow regulator having a plurality of gas flow paths |
| CN203502836U (en) * | 2012-08-03 | 2014-03-26 | 宁波保税区楷世环保科技有限公司 | Flow control system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20141112 |
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| RJ01 | Rejection of invention patent application after publication |