CN104111352A - Servo-type acceleration sensor - Google Patents

Abstract

A servo-type acceleration sensor comprises an oscillator portion (6) moving based on the acceleration, a frame portion (7) supporting the oscillator portion (6), displacement detection portions (16a, 16b) detecting the displacement of the oscillator portion (6) through changes of electrostatic capacitance, and a servo circuit portion that supplies current to a coil (13a) disposed on the oscillator portion (6) on the basis of the changes, detected by the displacement detection portions (16a, 16b), of the electrostatic capacitance, the current being used for controlling displacement of the oscillator portion (6). The current supplied by the servo circuit portion serves as the acceleration and is output. A metal thin sheet part (11) is sandwiched between a pair of printed substrates (12a, 12b) for the oscillator portion so that the oscillator portion (6) is formed, and the metal thin sheet part (11) is also sandwiched between a pair of printed substrates (17a, 17b) for the frame portion so that the frame portion (7) is formed.

Description

Servo accelerometer

technical field

The invention relates to a servo type acceleration sensor used in seismographs and the like.

Background technique

In the capacitive servo type acceleration sensor, when acceleration is applied, the vibrator part will be displaced relative to the frame part, but this displacement is detected by the change in electrostatic capacitance, and a current corresponding to the change in electrostatic capacitance flows through the coil equipped in the vibrator part. The electromagnetic force is generated, and the vibrator part appears to be in a static state. Since the current is proportional to the acceleration, the acceleration can be known only by measuring the current.

In Patent Document 1 (Japanese Patent No. 2861694), a servo-type vibration sensor is described in which an oscillator (vibrator part) is constituted by a plurality of substrates on which coil patterns are formed, as a support for the oscillator (vibrator part). body, a flexible spring is provided on one end side of the oscillator (vibrator unit), and this spring also functions as a wiring material of the coil pattern.

In addition, in Patent Document 2 (Japanese Patent No. 2913525), an inclinometer is described. The structure of the inclinometer is that the movable plate (vibrator part) and the hinge are arranged as separate bodies, and the flexible plate (Metal spring material) forms a hinge that supports the movable plate (vibrator part), and the flexible plate is fixed to the movable plate (vibrator part) with clip parts in the shape of a U in English ("コ" in Japanese) and fixing plate (frame part).

In the technique described in Patent Document 1, the oscillator (vibrator unit) is controlled and driven by magnetic force, but this driving force is proportional to the number of turns of the coil, the gap magnetic field, and the current flowing through the coil. Such a component structure is difficult to secure a gap magnetic field (for example, 5000 Gauss), difficult to secure the number of turns of a coil pattern (for example, 600 turns), and requires a large amount of current to flow, so it is difficult to put into practical use.

In addition, in the technology described in Patent Document 2, the flexible plate is respectively fixed to the fixed plate and the movable plate by using “U”-shaped clip parts, so the number of parts increases, and the assembly operation is not easy, and it is not oriented to Downsizing also increases assembly man-hours.

Contents of the invention

The present invention was made in view of the above-mentioned problems of the prior art, and an object of the present invention is to provide a servo-type acceleration sensor that can be configured with inexpensive components and that is easy to assemble and adjust.

A servo-type acceleration sensor that solves the above-mentioned problems includes: a vibrator part that displaces according to acceleration; a frame part that supports the vibrator part; a displacement detection part that detects the displacement of the vibrator part through a change in electrostatic capacitance; and a servo The circuit unit supplies a current to control the displacement of the vibrator unit to a coil provided on the vibrator unit based on the amount of change in capacitance detected by the displacement detection unit, and the servo-type acceleration sensor supplies the electric current supplied by the servo circuit unit. The electric current is output as an acceleration, wherein the vibrator part and the frame part are formed by sandwiching a thin metal plate member between a pair of printed circuit boards for the vibrator part and a pair of printed circuit boards for the frame part, and the surface of the vibrator part is in contact with the The surface of the frame part is arranged on the same plane, the vibrator part is supported by the frame part through the thin metal plate part, and a flexible part is formed on the thin metal plate part, and the flexible part also serves as the displacement detection The electrode wiring part of the part and the wiring part of the coil can be bent and flexed.

The displacement detection unit may be constituted by electrodes respectively formed on the pair of printed circuit boards for vibrator units, and respective cases facing the electrodes.

At least one of the respective housings can constitute a magnetic circuit.

A spacer is interposed between the frame portion and each case, and the gap between the electrodes of the displacement detection unit can be set by the thickness of the spacer.

A convex portion is formed on the front end side of the vibrator portion, and a notch portion is formed at a position facing the convex portion of the frame portion, and the thin metal plate member constituting the convex portion and the notch portion can be removed from The printed circuit board for the vibrator part and the printed circuit board for the frame part protrude.

The electrode wiring portion may be formed by bending at least a part thereof. In addition, "formed by bending" includes forming by bending after adding a fold line, and forming by bending without adding a fold line.

A plurality of holes may be formed on a surface of the thin metal plate member sandwiched between the vibrator portion printed circuit board and the frame portion printed circuit board.

According to the above aspect, since the vibrator part and the frame part are constituted by sandwiching the thin metal plate member between the pair of printed circuit boards for the vibrator part and the pair of printed circuit boards for the frame part, the assembly operation of the vibrator part and the frame part becomes easy, and Can be constituted by inexpensive components.

By arranging the electrodes respectively formed on the pair of vibrator portion printed circuit boards to face the respective housings, it is possible to form a small displacement detection portion.

Since at least one of the housings constitutes a magnetic circuit, a magnetic field can be formed by the housings.

In addition, if the gap between the electrodes of the displacement detection unit is set according to the thickness of the spacer, the gap adjustment between the electrodes becomes easy.

If a convex portion is formed on the tip side of the vibrator portion and a notch portion facing (facing) the convex portion is formed in the frame portion, the positional displacement of the vibrator portion relative to the frame portion can be easily confirmed.

If at least a part of the electrode wiring portion is bent, the vibrator portion can be prevented from shifting by relieving stress generated during assembling, stretching, or the like.

In addition, if a plurality of holes are formed on the surface of the thin metal plate member sandwiched between the printed circuit board for the vibrator part and the printed circuit board for the frame part, when the adhesive is applied, the pair of printed circuit boards for the vibrator part When a pair of printed circuit boards for frame parts are adhered to each other and closely attached, since the adhesive enters the hole and hardens in the hole, sufficient adhesive force (anchor effect) can be obtained.

Description of drawings

FIG. 1 is a schematic cross-sectional view of a servo-type acceleration sensor according to the present invention.

Fig. 2 is a schematic cross-sectional view of the sensor.

Fig. 3 is a plan view of the sheet metal part.

4 is a plan view of a printed circuit board for a vibrator unit.

Fig. 5 is a plan view of a printed circuit board for a frame.

6 is a plan view of a printed circuit board for a vibrator portion and a printed circuit board for a frame portion on which an adhesive is applied.

Fig. 7 is an explanatory diagram of a first assembly jig. (a) is a plan view of the first assembly jig, (b) is a side view of the first assembly jig, and (c) is a plan view of a state where the vibrator portion printed circuit board and the frame portion printed circuit board are placed on the first assembly jig.

8 is a plan view of a state in which a thin metal plate member is placed on a printed circuit board for a vibrator part and a printed circuit board for a frame part.

9 is a plan view of a state in which a printed circuit board for a vibrator part and a printed circuit board for a frame part are placed on a thin metal plate member.

Fig. 10 is an explanatory diagram of a second assembly jig. (a) is a top view of the second assembly jig, (b) is a side view of the second assembly jig, (c) is a top view of a state where the second assembly jig is fixed to the first assembly jig, and (d) is a state where the second assembly jig is fixed. A side view of a state where the assembly jig is fixed to the first assembly jig.

FIG. 11 is a plan view of a vibrator portion and a frame portion.

FIG. 12 is an enlarged view of a convex portion at the tip of the vibrator portion and a cutout portion of the frame portion.

Fig. 13 is a cross-sectional view of a vibrator unit on which a coil is mounted.

Fig. 14 is an explanatory diagram of the first housing. (a) is a plan view, (b) is a cross-sectional view.

Fig. 15 is an explanatory diagram of a second housing. (a) is a plan view, (b) is a cross-sectional view.

Figure 16 is a top view of the spacer.

Fig. 17 is an explanatory diagram of a base member. (a) is a plan view, (b) is a cross-sectional view.

Detailed ways

The implementation of the present invention will be described below with reference to the accompanying drawings. A servo-type acceleration sensor 1 according to the embodiment includes a sensor unit 2 , a servo circuit unit 3 , a case 4 , and a base member 5 as shown in FIG. 1 . The sensor unit 2 is attached to the base member 5 , and the servo circuit unit 3 is attached to the sensor unit 2 .

As shown in FIG. 2 , the sensor unit 2 includes a vibrator unit 6 , a frame unit 7 , a first case 8 , a second case 9 , two spacers 10 a , 10 b , and the like. The shape of the sensor unit 2 is substantially cylindrical, with a height of about 15 mm and an outer diameter of about 23 mm.

The vibrator part 6 and the frame part 7 sandwich and bond the thin metal plate member 11 via a pair of vibrator part printed circuit boards 12a, 12b and frame part printed circuit boards 17a, 17b, respectively. Coils 13 a , 13 b are mounted on vibrator portion printed circuit boards 12 a , 12 b forming both surfaces of vibrator portion 6 .

Here, the printed circuit board refers to a substrate on which a circuit is wired using copper foil or the like on the surface and back of an insulator, or inside the insulator. The vibrator unit printed circuit boards 12 a and 12 b are printed circuit boards used for the vibrator unit 6 . The frame portion printed circuit boards 17 a and 17 b are printed circuit boards used for the frame portion 7 .

Electrodes 14 a , 14 b provided on vibrator printed circuit boards 12 a , 12 b are arranged on both surfaces of vibrator 6 near the end opposite to the side supported by frame 7 via metal thin plate member 11 . The surface 15a of the first casing 8 and the surface 15b of the second casing 9 that face these electrodes 14a, 14b form displacement detection portions 16a, 16b that detect capacitance.

Moreover, the frame part 7 is sandwiched between the 1st case 8 and the 2nd case 9 via spacer 10a, 10b.

As shown in FIG. 3 , the thin metal plate member 11 is formed with a vibrator portion side portion 11 a to be the vibrator portion 6 and a frame portion side portion 11 b to be the frame portion 7 . Two flexible portions 11c, 11d serving as wiring of the coils 13a, 13b, and electrode wiring portions 11e, 11f serving as wiring of the electrodes 14a, 14b of the displacement detecting portions 16a, 16b are formed on the thin metal plate member 11. The flexible parts 11c and 11d can bend and bend.

The flexible parts 11c and 11d serving as wiring and the electrode wiring parts 11e and 11f are wired to the servo circuit part 3 . Two (total four) guide holes 11 g are formed in each of the vibrator portion side portion 11 a and the frame portion side portion 11 b of the thin metal plate member 11 . Furthermore, in the case of the shape of FIG. 3, unnecessary portions 11h and 11i of the sheet metal member 11 are cut off in the assembling operation.

Adjustment of the flexibility of the flexible parts 11c and 11d is facilitated by adjusting the thickness of the thin metal plate member 11 and the width of the flexible parts 11c and 11d, thereby reducing variations in quality. In addition, the electrode wiring parts 11e and 11f of the electrodes 14a and 14b of the displacement detection parts 16a and 16b, for example, are bent in a substantially "U" shape to release the pressure applied during assembly, thereby preventing the vibrator part 6 from twisting. wait.

As shown in FIG. 4 , two guide holes 12 c and a through hole 12 d are formed in the vibrator portion printed circuit boards 12 a and 12 b. In addition, arcuate electrodes 14a, 14b and three copper foil patterns 14c for coil positioning are formed on the printed circuit boards 12a, 12b for vibrator parts. Electrodes 14a, 14b and copper foil pattern 14c are not present on the bonding surfaces (rear surfaces) of printed circuit boards 12a, 12b for vibrator parts 12a, 12b bonded to vibrator part side part 11a of thin metal plate member 11.

As shown in FIG. 5, two guide holes 17c are formed in the printed circuit boards 17a and 17b for frame parts. In addition, the surfaces (surfaces) of the printed circuit boards 17a and 17b for frame parts that are in contact with the pads 10a and 10b are formed to cover almost the entire surface with the same thickness as the electrodes 14a and 14b of the printed circuit boards 12a and 12b for vibrator parts. There is a copper foil pattern 17d. In addition, there is no copper foil pattern 17d on the bonding surface (rear surface) of the printed circuit boards 17a and 17b for a frame portion bonded to the frame portion side portion 11b of the thin metal plate member 11 .

Next, the procedure for assembling the servo-type acceleration sensor 1 according to the embodiment will be described. First, in order to assemble vibrator unit 6 and frame unit 7 constituting sensor unit 2 , as shown in FIG. 6 , adhesive 18 is applied to predetermined positions on the back surfaces of vibrator unit printed circuit boards 12 a , 12 b . Similarly, the adhesive 18 is applied to predetermined positions on the rear surface of the printed circuit boards 17a and 17b for frame portions. A heat-curable epoxy resin adhesive is suitable as the adhesive 18 .

Next, as shown in FIG.7(a), (b), the 1st assembly jig 20 provided with the screw hole 20a and the four guide pins 20b is prepared. Then, as shown in FIG. 7( c ), on the first assembly jig 20 , with the surface (rear surface) coated with the adhesive 18 facing up, the guide hole 12 c of the printed circuit board 12 a for the vibrator part and the guide hole 12 c for the frame part are placed. The guide holes 17c of the printed circuit board 17a respectively pass through the guide pins 20b, and one printed circuit board 12a for the vibrator part and one printed circuit board 17a for the frame part are placed.

Next, as shown in FIG. 8 , the thin metal plate member 11 is placed on the printed circuit board 12 a for the vibrator part and the printed circuit board 17 a for the frame part placed on the first assembly jig 20 with the adhesive coated surface facing up. At this time, unnecessary portions 11i of the sheet metal member 11 are cut off, two guide holes 11g are respectively passed through the guide pins 20b of the first assembly jig 20 and the sheet metal member 11 is placed. In addition, the thin metal plate member 11 shown in FIG. 8 is a state before unnecessary part 11h is cut off.

Next, as shown in FIG. 9 , with the adhesive-applied surface (rear surface) of the other printed circuit board 12 b for the vibrator part and the printed circuit board 17 b for the other frame part facing down, the guide holes 12 c of the printed circuit boards 12 b and 17 b are respectively connected to each other. , 17c pass through the guide pin 20b of the first assembly jig 20 and are placed on the sheet metal part 11.

Next, as shown in FIGS. 10( a ) and ( b ), the second assembly jig 21 provided with the through hole 21 a and the four holes 21 b and the fastening bolts 22 are prepared. In addition, the hole 21b functions as a guide pin 20b for keeping the second assembling jig 21 from hitting the first assembling jig 20 when the second assembling jig 21 is placed. Then, the positions of the screw holes 20 a and the through holes 21 a and the guide pins 20 b and the holes 21 b of the first assembly jig 20 are aligned, and the second assembly jig 21 is placed on the vibrator part printed circuit board 12 b and the frame part printed circuit board 17 b. . In addition, the hole 21b is a hole that can be inserted in a state having a gap, and the insert and the object to be inserted can move mutually.

Then, as shown in FIG. 10(c) and (d), the fastening bolt 22 is passed through the through hole 21a of the second assembly jig 21, the through hole 12d of the printed circuit board 12b for the vibrator part, and the central part of the thin metal plate member 11. The through hole 12d of the vibrator printed circuit board 12a is screwed into the screw hole 20a of the first assembly jig 20 and fastened with a predetermined torque. Here, although the fastening bolts 22 are used, it is also possible to apply a constant load using the second assembly jig 21 as a weight without fastening the fastening bolts 22 .

In this way, using the first assembling jig 20 and the second assembling jig 21, the thin metal plate member 11 and the pair of printed circuit boards 12a and 12b for the vibrator part and the pair of printed circuit boards for the frame part 17a and 17b coated with the adhesive 18 are assembled. It is heated and cured under predetermined conditions in a state sandwiched by a predetermined pressure.

In addition, if a plurality of micro holes (for example, a square hole with a side of 0.2mm) are formed on the entire bonding surface of the metal thin plate member 11, when the printed circuit board 12a for the vibrator portion coated with the adhesive 18, 12b and the printed circuit boards 17a and 17b for frame parts are bonded to the thin metal plate member 11 by fastening with the first assembly jig 20, the second assembly jig 21, and the fastening bolts 22, since the adhesive 18 enters the tiny holes and Since it is cured by heating in the hole, it is possible to obtain sufficient adhesive force (anchor effect) while preventing overflow of the adhesive 18 and warping due to bonding.

In addition, if the printed circuit boards 12a and 12b for the vibrator part and the printed circuit boards 17a and 17b for the frame part are glass epoxy substrates, the adhesive 18 may not be used, and the printed circuit boards 12a and 12b for the vibrator part and the printed circuit boards for the frame part may be made of glass epoxy substrates. The printed circuit boards 17a and 17b are thermally welded to the thin metal plate member 11 .

By assembling as described above, even if the printed circuit boards 12a and 12b for the vibrator part and the printed circuit boards 17a and 17b for the frame part are slightly warped, the flatness of the vibrator part 6 and the frame part 7 is improved by heating during curing, and it is possible to get essentially the same plane. In addition, the vibrator portion 6 is supported by the frame portion 7 via the flexible portions 11 c and 11 d of the thin metal plate member 11 , and forms an integral structure with good symmetry with respect to the thin metal plate member 11 .

Next, as shown in FIG. 11 , after adhesive 18 is cured, vibrator portion 6 and frame portion 7 are removed from mounting jigs 20 and 21 , and unnecessary portion 11h of thin metal plate member 11 is cut off.

Through the assembly operation using the steps described above, the vibrator portion 6 and the frame portion 7 form an integral structure. Then, as shown in FIG. 12, a convex portion 6a is formed on the front end side of the vibrator portion 6, and a notch portion 7a is formed on the frame portion 7 facing the convex portion 6a (at a position where the front end of the convex portion 6a faces), so that Vibrator portion side portion 11a and frame portion side portion 11b of thin metal plate member 11 constituting convex portion 6a and notch portion 7a protrude from vibrator portion printed circuit boards 12a, 12b and frame portion printed circuit boards 17a, 17b, respectively. , so it is easy to confirm the positional displacement of the vibrator part 6 and the frame part 7 in the displacement direction.

Next, as shown in FIG. 13 , the coils 13a, 13b are aligned with the coil positioning copper foil patterns 14c of the vibrator portion printed circuit boards 12a, 12b on both surfaces of the vibrator portion 6, placed, and bonded with an adhesive. In order to maintain balance, coils 13 a and 13 b are mounted on both surfaces of vibrator unit 6 . Then, only one coil 13a is electrically connected to the flexible parts 11c and 11d serving as wiring. In addition, the coils 13a and 13b on both sides may be connected to the flexible parts 11c and 11d.

By forming the positioning copper foil pattern 14c on the vibrator part printed circuit boards 12a and 12b, the coils 13a and 13b can Easily locate.

Next, as shown in FIG. 14, the first case 8 constituting the magnetic circuit is formed in advance. The material of the first casing 8 is a soft magnetic material with a high saturation magnetic flux density (for example, electromagnetic soft iron). A magnet (for example, a rare earth magnet) 25 is provided in the central portion. The first case 8 is provided so as to surround the coil 13a, and applies a predetermined magnetic field to the gap where the coil 13a is located. The first case 8 has screw holes 8 a for coupling with the second case 9 and guide holes 8 b.

In addition, as shown in FIG. 15 , the second housing 9 is formed in advance. Although the second case 9 does not constitute a magnetic circuit, it can also be configured in the same manner as the first case 8 if the coil 13b is also used. In order to achieve thermal balance, the same material as that of the first housing 8 is used. The second case 9 has a hole 9 a for coupling with the first case 8 and a guide hole 9 b.

Next, using guide pins (not shown) and coupling bolts (not shown), a pair of printed circuit boards for frame parts are sandwiched between the first case 8 and the second case 9 with two spacers 10a and 10b in between. 17a and 17b sandwich and bond the frame portion 7 of the thin metal plate member 11 . For the spacers 10a and 10b, a thin plate and non-magnetic metal material is used. As shown in FIG. 16 , the spacers 10 a and 10 b have substantially the same shape as the printed circuit boards 17 a and 17 b for frame portions, but are formed in shapes without notches. Spacers 10a and 10b have coupling holes 10c and guide holes 10d.

Then, in the displacement detection part 16a constituted by the electrode 14a provided on one surface of the vibrator part 6 and the surface 15a of the first case 8 opposite to the electrode 14a, the electrostatic capacitance is adjusted by using the thickness of the spacer 10a so as to obtain a desired Electrostatic capacitance. Similarly, in the displacement detection part 16b formed by the electrode 14b provided on the other surface of the vibrator part 6 and the surface 15b of the second case 9, the capacitance is adjusted by the thickness of the spacer 10b so that a desired capacitance is obtained. In addition, the spacers 10a and 10b have the same thickness, but different thicknesses may be used as needed.

As described above, by using the spacers 10a and 10b, adjustment to obtain a desired electrostatic capacitance becomes easy. In addition, the surfaces 15a, 15b of the casings 8, 9 are grounded in the displacement detection parts 16a, 16b.

Next, the servo circuit unit 3 is attached to the second housing 9 . In addition, the coil 13 a is connected to the servo circuit unit 3 through the flexible parts 11 c and 11 d which also serve as wiring of the thin metal plate member 11 . The electrodes 14a, 14b of the displacement detection parts 16a, 16b are connected to the servo circuit part 3 through the electrode wiring parts 11e, 11f.

Next, on the base member 5 shown in FIG. 17 , the sensor unit 2 on which the servo circuit unit 3 is mounted is fixed at three points by using the coupling holes 5 a with screws. At this time, using the three angle adjustment screw holes 5b provided on the base member 5, the slight deviation of the sensitive axis generated during assembly can be easily changed by adjusting the advance and retreat of the screw relative to the base member 5. The installation angle of the sensor part 2, so the position correction of the vibrator part 6 becomes possible.

Next, the case 4 is fixed to the base member 5 on which the sensor unit 2 is fixed at four points by using the coupling holes 5 c with screws. The outer shape of the case 4 is substantially a rectangular parallelepiped, but may also be cylindrical. Since aluminum is used as a material, it is possible to reduce the generation of noise and the influence of noise by utilizing the shielding effect, and it is also possible to reduce the weight and be inexpensive. If it is a magnetic material, the influence of magnetic noise can be reduced. Engineering plastics can also be used if there is no deformation under usage conditions and are stable against temperature etc. You can choose according to your needs.

As shown in the assembly operation based on the above steps, the vibrator portion 6 and the frame portion 7 are clamped and fastened by the first assembly jig 20 and the second assembly jig 21 or pressed by a certain load, and the adhesive 18 is heated. Therefore, the vibrator part 6 and the frame part 7 are substantially in the same plane, and spacers 10a and 10b of a predetermined thickness are sandwiched between the frame part 7 and the first case 8 and between the frame part 7 and the second case 9, respectively. The desired electrostatic capacitance can be easily set.

In addition, even with the structure using the printed circuit boards 12a, 12b, 17a, and 17b for the vibrator part 6 and the frame part 7, since the heat resistance of -50°C to 100°C can be obtained, it can meet the required specifications of the seismograph. temperature range.

According to this embodiment, it is possible to provide a servo-type acceleration sensor that uses inexpensive components and that is easy to assemble and adjust.

Symbol Description

1 servo acceleration sensor; 2 sensor part; 3 servo circuit part; 4 casing; 5 base part; 6 vibrator part; 6a convex part; 7 frame part; ; 10a, 10b spacers; 11 sheet metal parts; 11a vibrator part side part; 11b frame part side part; 11c, 11d flexible part; 11e, 11f electrode wiring part; Through holes; 12a, 12b printed circuit boards for oscillator parts; 13a, 13b coils; 14a, 14b electrodes; 15a, 15b surfaces; 16a, 16b displacement detection parts; 1 assembly fixture; 20a screw hole; 20b guide pin; 21 second assembly fixture; 21b guide hole; 22 fastening bolt.

Claims (7)

1. a servo-type acceleration transducer, possesses: transducer part, carry out displacement according to acceleration; Frame portion, supports described transducer part; Displacement detecting portion, detects the displacement of described transducer part by the variation of electrostatic capacitance; And servo circuit portion, the variable quantity of the electrostatic capacitance detecting according to described displacement detecting portion, supply with to the coil that is arranged at described transducer part the electric current of displacement of controlling described transducer part, the electric current that described servo-type acceleration transducer is supplied with described servo circuit portion is exported as acceleration

It is characterized in that,

Described transducer part and described frame portion form by sandwiching metal steel unit by a pair of transducer part with printed base plate and a pair of frame portion printed base plate,

The surface configuration of the surface of described transducer part and described frame portion is in same plane,

Described transducer part is supported by described frame portion by described metal steel unit,

On described metal steel unit, be formed with flexible portion, described flexible portion doubles as the electrode wiring portion of described displacement detecting portion and the wiring part of described coil, and can bending deflection.

2. servo-type acceleration transducer according to claim 1, is characterized in that,

Described displacement detecting portion is by forming with each housing relative with these electrodes with the electrode forming respectively on printed base plate in described a pair of transducer part.

3. servo-type acceleration transducer according to claim 2, is characterized in that,

At least one in described each housing forms magnetic circuit.

4. according to the servo-type acceleration transducer described in claim 2 or 3, it is characterized in that,

Between described frame portion and described each housing, sandwich and dispose pad, by the thickness of described pad, set the interelectrode gap of described displacement detecting portion.

5. according to the servo-type acceleration transducer described in any one in claims 1 to 3, it is characterized in that,

Front in described transducer part is formed with protuberance,

Described frame portion, described protuberance towards position be formed with notch,

The described metal steel unit that forms described protuberance and described notch is outstanding with printed base plate and described frame portion printed base plate from described transducer part respectively.

6. according to the servo-type acceleration transducer described in any one in claims 1 to 3, it is characterized in that,

Described electrode wiring portion at least a portion is bending and form.

7. according to the servo-type acceleration transducer described in any one in claims 1 to 3, it is characterized in that,

On the face being clipped with printed base plate with printed base plate and described frame portion by described transducer part of described metal steel unit, be formed with multiple holes.