CN104081217B - Magnetic measuring device - Google Patents
Magnetic measuring device Download PDFInfo
- Publication number
- CN104081217B CN104081217B CN201280068264.XA CN201280068264A CN104081217B CN 104081217 B CN104081217 B CN 104081217B CN 201280068264 A CN201280068264 A CN 201280068264A CN 104081217 B CN104081217 B CN 104081217B
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- magnetic
- sample
- magnetic field
- generation section
- measuring device
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/10—Plotting field distribution ; Measuring field distribution
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
- G01R33/1215—Measuring magnetisation; Particular magnetometers therefor
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Measuring Magnetic Variables (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
The invention reside in the magnetic field measuring device for the magnetic characteristic for providing the tiny area that can measure laminal magnetic sample.Wherein, magnetic field is being applied to magnetic sample (5) and is being allowed to after magnetization, by being scanned by measurement portion (2) so as to detect the leakage magnetic flux of magnetic sample (5).In directions opposite each other magnetize it by the 1st region and the 2nd region to magnetic sample (5) and reduce demagnetizing field (Hd) so that flux leakage to outside.Specifically, by magnetic with a pair of magnetic field generation sections (6) with upper magnetic pole to carry out multipole, either magnetic is carried out by magnetic field generation section (6) applies damped oscillation magnetic field or by applying AC magnetic field while the local magnetic field generating unit (3) on scanned sample surface carries out magnetic.
Description
Technical field
It is used to measure laminal magnetic via the measurement of the leakage magnetic flux due to remanent magnetism the present invention relates to a kind of
The magnetic field measuring device of the magnetic characteristic of the magnetic characteristic of sample particularly tiny area.
Background technology
In recent years, the physical film deposition methods, the film magnet (thickness of microsize such as sputtering or laser deposition are passed through：Several μm~
Hundreds of μm of degree) made, and used (patent document 1) in micromachine or sensor field.It make use of this
In application in the micromachine or sensor field of the film magnet of sample, in order to make expected device, it is necessary to cause
Magnetic circuit is designed based on the leakage magnetic flux of the remanent magnetism of film magnet and is critically measured with the resolution ratio below submillimeter
The distribution of the remanent magnetism of film magnet is that the way of the remanent magnetism of tiny area is pursued.
In the past, in the magnetic characteristic measurement of magnetic sample, using BH curve tracer (B-H curve tracer) or
Vibrating specimen magnetometer (VSM：Vibrating Sample Magneto-meter).However, in these measurement apparatus, only not
It is the average magnetic characteristic for measuring the magnetic as measurement object to cross, and can not measure the i.e. tiny area of distribution of magnetic characteristic
Magnetic characteristic.
By being partitioned into the magnetic of measurement object by cutting processing etc. and being measured with VSM etc. so as to measure
The method of the magnetic characteristic of tiny area is also considered.However, the damage to magnetic surface layer caused by processing and
The situation that can not measure the essential magnetic characteristic of magnetic sample is caused still to be worried.
The magnetic characteristic for the tiny area for measuring magnetic sample to not attend by the processing of magnetic sample, has used magnetic
Force microscope (MFM：Magnetic Force Microscopy) or scanning hall probe microscope (SHPM：Scanning
Hall Probe Microscopy) etc..
MFM is using the measurement head being made up of magnetic come scanned sample surface, it is thus possible to critically measure tiny area
Magnetic characteristic.However, MFM is necessary to make measurement head close to specimen surface, it is impossible to make sample as BH curve tracer
For a part for closed magnetic circuit, thus have to by the demagnetizing field Hd due to the magnetic pole occurred on the surface of magnetic sample
Influence.
Demagnetizing field Hd influence largely depends on the shape of sample, as the film magnet after equally magnetizing
The spontaneous manetization J of demagnetizing field Hd and sample is roughly equal in laminal magnetic sample, thus can not take out magnetic flux to examination
The outside of sample.That is, it is difficult to evaluate the magnetic characteristic of the laminal magnetic sample after equally magnetization using MFM.
Prior art literature
Patent document
Patent document 1：Japanese table patent WO2005/091315 publications public again
The content of the invention
The technical problems to be solved by the invention
The present invention in view of recognizing such situation, its object is to provide it is a kind of can not by demagnetizing field Hd shadow
Ring and utilize the leakage magnetic flux due to remanent magnetism come the tiny area of laminal magnetic sample as evaluating film magnet
Remanent magnetism and remanent magnetism distribution measurement apparatus.
Solve the means of technical problem
The present invention is a kind of magnetic field measuring device, it is characterised in that：It is the remanent magnetism for measuring laminal magnetic sample
Magnetic field measuring device, possesses：Apply magnetic field to make the 1st region and the 2nd region of the magnetic sample in reciprocal side
Upwards magnetic magnetic field generation section and measurement magnetic field and the work of the magnetic sample after magnetic by the magnetic field generation section
The measurement portion exported for the remanent magnetism of the magnetic sample.The present invention the magnetic after magnetic by obtaining such structure measurement
Sample, thus as in the measurements apply external magnetic field situation do not consider that measurement portion can be by the external magnetic field applied or not
Influence just can make measurement portion close to specimen surface.Further, since making the 1st and the 2nd region in directions opposite each other
Magnetic, therefore, it is possible to not influenceed ground correct measurement due to the leakage magnetic flux of the remanent magnetism of magnetic sample by demagnetizing field.
In addition, in the present invention, alternatively, the magnetic field generation section has the different magnetic pole of at least one pair of symbol, and leads to
Crossing the magnetic pole makes the magnetic sample magnetic.
In addition, in the present invention, alternatively, the magnetic field generation section, which is produced, to be carried out the magnetic field of damped oscillation to make the magnetic
Property body sample magnetic.
In addition, in the present invention, alternatively, the magnetic field generation section scan the surface of the magnetic sample while
Produce AC magnetic field to make the magnetic sample magnetic in regional area.
Further, after the showing and converted between method or system etc. of being combined of inscape, the present invention by more than
Form, as the present invention form be effective.
The effect of invention
According to the present invention, possess by providing one kind to laminal magnetic sample (such as magnet film) application magnetic field
And make the 1st region and the 2nd region of the magnetic sample in directions opposite each other magnetic magnetic field generation section and survey
Amount the magnetic field of the measurement portion of the leakage magnetic flux due to remanent magnetism of the magnetic sample after magnetic by the magnetic field generation section
Measurement apparatus, can evaluate the magnetic characteristic i.e. distribution of magnetic characteristic on the tiny area of laminal magnetic sample.
Brief description of the drawings
Fig. 1 is the approximate three-dimensional map for representing magnetic field measuring device involved in the present invention.
Fig. 2 be the present invention magnetic field measuring device in possess have a pair of magnetic field generation sections with upper magnetic pole it is general
Omit stereogram.
Fig. 3 (a) be represent aforementioned magnetic field generating unit the Distribution of Magnetic Field figure of magnetic example, Fig. 3 (b) is by after the same magnetic
The Distribution of Magnetic Field figure of foregoing magnetic sample.
Fig. 4 (a), (b) are the explanation figures for the process for representing to make foregoing magnetic sample magnetic by damped oscillation magnetic field.
Fig. 5 is the Distribution of Magnetic Field figure for being damped the foregoing magnetic sample that oscillating magnetic field magnetic.
Fig. 6 (a), (b) are represented by applying AC magnetic field while scanning makes the foregoing magnetic sample magnetic
The explanation figure of process.
Fig. 7 is by applying AC magnetic field while scanning and by the Distribution of Magnetic Field figure of the foregoing magnetic sample of magnetic.
The explanation of symbol：
1 base station
2 measurement portions
3 local magnetic field generating units
4 support arms
5 magnetic samples
6 magnetic field generation sections
7 magnetic poles
10 XYZ workbench
11 X workbench
12 Y workbench
13 Z workbench
20 XYZ arms
21 X arms
22 Y arms
23 Z arms
30 Zm axle drive systems
40 control units
Embodiment
Hereinafter, while describing the preferred embodiment of the present invention in detail referring to the drawings one side.Further, to each shown in the drawings
Identical or equal inscape, component, processing etc. assign identical symbol, and suitably the repetitive description thereof will be omitted.In addition, implementing
Mode is not to limit the embodiment of invention but illustrate, and described all features or its combination may not be limited in embodiment
In the substantial content of the present invention.
Fig. 1 is to represent the integrally-built approximate three-dimensional map of magnetic field measuring device involved in the present invention.In Fig. 1, have
The X workbench 11 that is slid freely on Xt direction of principal axis (X-axis among orthogonal 3 axles of XYZ parallel to diagram), configure in X work
The Y workbench 12 and configuration slid freely on platform 11 and on Yt axles (Y-axis parallel to XYZ among orthogonal 3 axle) direction exists
The XYZ of the Z workbench 13 slid freely on Y workbench 12 and on Zt axles (Z axis parallel to XYZ among orthogonal 3 axle) direction
Workbench 10 is arranged on base station 1, and the magnetic sample 5 with laminal form is positioned and fixed on Z workbench 13.
In addition, magnetic field measuring device involved in the present invention comprising control and measure device various pieces and using measured leakage magnetic flux as
Basis calculates the control unit 40 of magnetic characteristic and its distribution.
The magnetic sample as measurement object of the present invention refers to include：Terres rares magnetic as R-T-B systems, R-T systems
Body；Oxide magnetic compact as Ba ferrites, Sr ferrites；Also magnet is such does not have high coercitive soft magnetism
Body.In addition, magnetic sample the direction of magnetization relative to laminal sample be shaped as normal direction in the case of, this hair
It is bright to be realized using easy structure, but be that in face in the case of (in-plane), the present invention also can in the direction of magnetization
Effectively function.
Allow magnetic sample 5 magnetic field generation section of magnetic be the magnetic field production with the different magnetic pole of at least one pair of symbol
Life portion 6 or be arranged on together with measurement portion 2 support arm 4 front end bottom surface local magnetic field generating unit 3.By with
The magnetic field generation section 6 of the different magnetic pole of at least one pair of symbol, can make the 1st region and the 2nd region of magnetic sample 5 each other
On opposite direction magnetic.In addition, by the local magnetic field generating unit 3 of the front end bottom surface by being arranged on support arm 4 while producing
The surface of AC magnetic field one side magnetic scanning body sample 5, can also make the 1st region and the 2nd region of magnetic sample 5 each other
Magnetic is carried out on opposite direction.
The type of drive of XYZ workbench 10 can be driven by motor-driven mode or by piezo-activator
Mode.As long as the shift motion on XY directions of XYZ workbench 10 is set i.e. in the way of the measured zone for covering sample
Can.Thus, it is possible to measure all measured zones of sample.The shift motion on XY directions of XYZ workbench 10 is, for example, 10
×10mm.Must be more sufficiently large than the thickness of sample as long as the shift motion in z-direction of XYZ workbench 10 is set.Thus,
Magnetic sample 5 can be made to provide easy access in measurement portion 2, local magnetic field generating unit 3, magnetic field generation section 6.XYZ workbench 10
As long as the positioning resolution on XY directions is set to more sufficiently small than the size of the magnetic domain of magnetic sample 5.Thus, it is small
The measurement in region becomes possibility.Positioning resolution on XY directions is, for example, 10nm.XYZ workbench 10 in z-direction
As long as positioning resolution is set to more sufficiently small than the surface roughness of magnetic sample 5.Thus, not by the shadow of configuration of surface
Ring and become possibility due to the measurement of the leakage magnetic flux of the remanent magnetism of sample.
Erect to set and be fixed with base station 1 and slided certainly on Zs direction of principal axis (Z axis parallel to XYZ among orthogonal 3 axle)
Z arms 23 such as, are provided with before Z arms 23 and are slid freely on Xs direction of principal axis (X-axis parallel to XYZ among orthogonal 3 axle)
X arms 21 and the Y arms 22 that are slid freely on Ys direction of principal axis (Y-axis parallel to XYZ among orthogonal 3 axle), in Y arms 22
Bottom surface is provided with support arm 4, and measurement portion 2 and local magnetic field generation section 3 are provided with the front end bottom surface of support arm 4.
The type of drive of XYZ arms 20 can be the side driven by motor-driven mode or by piezo-activator
Formula.As long as the shift motion on XY directions of XYZ arms 20 is set in the way of the measured zone for covering sample.Thus,
All measured zones of sample can be measured.The shift motion on XY directions of XYZ arms 20 is, for example, 100 × 100mm.XYZ
As long as the shift motion in z-direction of arm 20 is set to more sufficiently large than the thickness of sample.Thus, it is possible to try magnetic
Sample 5 is provided easy access in measurement portion 2 and local magnetic field generation section 3.As long as the setting of the positioning resolution on XY directions of XYZ arms 20
Must be more sufficiently small than the size of the magnetic domain of magnetic sample 5.Thus, the measurement of the Distribution of Magnetic Field of tiny area becomes possibility.
Positioning resolution on XY directions is, for example, 10nm.As long as the positioning resolution in z-direction of XYZ arms 20 is set to compare magnetic
The surface roughness of property body sample 5 is sufficiently small.Thus, the measurement for the Distribution of Magnetic Field not influenceed by configuration of surface becomes can
Energy.
XYZ workbench 10 and XYZ Bei20Liang Ge mechanisms are in magnetic sample 5 and measurement portion 2 and local magnetic field generation section 3
Between relative position relationship on do the mechanism of same action, but by selecting the different driving mode of each mechanism, from
And the measurement for measuring large area sample from tiny area can be carried out with a table apparatus.For example, XYZ workbench can be made
10 type of drive is that the coarse motion realized by motor is acted, the type of drive for making XYZ arms 20 be by piezo-activator realize it is micro-
Action.Thus, it is possible to the high-speed mobile carried out toward any part in sample is acted from coarse motion, and by micromotion is Lai in detail
Measure the remanent magnetism of tiny area.
Erect to set and be fixed with base station 1 and slided certainly on Zm direction of principal axis (Z axis parallel to XYZ among orthogonal 3 axle)
Zm axles drive system 30 such as, magnetic field generation section 6 is provided with before Zm axles drive system 30.In the present embodiment, lead to
Cross the magnetic field generation section 6 and make the 1st region and the 2nd region of magnetic sample in directions opposite each other magnetic.In order to logical
Cross magnetic field generation section 6 make magnetic sample 5 magnetic, and to the magnetic pole 7 and magnetic from magnetic field generation section 6 to outside radiation field
The surface of sample 5 it is relative the mobile XYZ workbench 10 of magnetic potential (Fig. 1 dotted line position), and pass through Zm axles drive system 30
Magnetic pole 7 is set to be sufficiently close to the surface of magnetic sample 5.Thus, it is possible to equally or such as the institute of magnetic pole 7 of magnetic field generation section 6
The pattern having make like that magnetic sample 5 magnetic.
Fig. 2 represents the skeleton diagram of aforementioned magnetic field generating unit 6.In fig. 2, magnetic sample 5 is deposited by XYZ workbench 10
It is magnetic potential (Fig. 1 dotted line position), releasing field pole 7 is present in the close simultaneously phase in surface with magnetic sample 5
To position.In the embodiment shown in figure 2, different a pair of symbol of the magnetic pole 7 by the magnetic field released are constituted, but this hair
Magnetic field generation section in bright is not limited to this.It can be the matrix of the different small magnetic pole of the mutual symbol of adjacent magnetic pole
(Matrix), be also can be produce as magnetic field matrix.
Fig. 3 (a) be made using aforementioned magnetic field generating unit 6 magnetic sample 5 scanned using measurement portion 2 after magnetic
Near the different border of the symbol in the magnetic field that magnetic pole 7 is released obtained from region due to sample remanent magnetism leakage magnetic flux
The illustration of distribution.The different border of the symbol in magnetic field of the magnetic pole 7 to be released is located at the substantial middle of measured zone, and border
Right side in positive direction (face relative with measurement portion 2 be N poles) by magnetic the 1st region and border left side as with
Magnetic is carried out by the mode in the 2nd region of magnetic on the opposite direction in 1st region (face relative with measurement portion 2 is S poles).
The signal intensity maximum detected in the region near the border in the 1st region and the 2nd region by foregoing measurement portion 2,
It is small in the zone signal intensities away from border.This can consider near the different boundary members being due under magnetic state
The big result of leakage magnetic flux from magnetic sample.
Fig. 3 (b) be made using the magnetic field generation section of the same external magnetic field can be produced magnetic sample 5 magnetic it
The illustration being distributed afterwards as obtained from being scanned measurement portion 2 due to the leakage magnetic flux of the remanent magnetism of sample.Magnetic sample 5 is in losing side
Magnetic is saturated on to (face relative with measurement portion 2 is S poles).
Although magnetic sample is saturated magnetic, the signal detected by measurement portion 2 is small.This be considered as due to
The magnetic sample 5 of laminal form by equally in the state of magnetic its demagnetizing factor N be about 1, thus magnetic sample 5
The magnetic polarization J being had is eliminated by demagnetizing field Hd and magnetic flux does not leak to the outside of magnetic sample 5.
Fig. 4 (a) be represent to make by damped oscillation magnetic field foregoing magnetic sample 5 the explanation figure of the process of magnetic.
In the figure, magnetic sample 5 is present in magnetic potential (Fig. 1 dotted line position) by XYZ workbench 10, in present embodiment
The magnetic field generation section in middle releasing magnetic field is that magnetic pole 7 is present in the position close and relative with the surface of magnetic sample 5.Magnetic pole 7
As long as the magnetic field released is with elapsed time, one side amplitude reduces the positive and negative of one side symbol and inverted in the opposite direction
Magnetic field (damped oscillation magnetic field).
Then, illustrate that magnetic sample 5 is damped the process that oscillating magnetic field magnetic by Fig. 4 (b).For the purpose of simplifying the description and
Order there are in magnetic sample 5 with high-coercive force, middle coercivity, the coercivity composition of 3 species of low-coercivity area
Domain, and inverted 3 times from the magnetic field that magnetic pole 7 is released is positive and negative in the opposite direction on one side as elapsed time one side amplitude reduces.
First, by the magnetic field for the intensity big in the positive direction released from magnetic pole 7, the entirety of magnetic sample 5 is in pros
Upwards by magnetic.Then, by the middle coercive in the magnetic field, only magnetic sample 5 of the intensity middle in a negative direction that are released from magnetic pole 7
Power and its direction of magnetization of low-coercivity part are reversed to bear.Now, because the magnetic field for the middle intensity released from magnetic pole 7 can not make position
High-coercive force part magnetization inversion in magnetic sample 5, therefore high-coercive force part maintains the magnetized state of positive direction.This
Outside, by the magnetic field for the small intensity in the positive direction released from magnetic pole 7, only its magnetization of the low-coercivity part of magnetic sample 5
Direction is reversed to just.Now, rectified in can not making to be located in magnetic sample 5 due to the magnetic field for the small intensity released from magnetic pole 7
Stupid power part magnetization inversion, therefore middle coercivity part maintains the magnetized state of positive direction.
By more than process, in magnetic sample 5 in positive negative direction different the 1st region and the 2nd of magnetized state
Region can mix.The magnetic sample 5 that the different part of magnetized state mixes, even if its shape is lamellar,
Its demagnetizing field Hd also can be small, and the magnetic flux to External leakage can be detected from measurement portion 2.
Fig. 5 be made using magnetic field generation section 6 damped oscillation magnetic field produce and the magnetic field point of magnetic sample 5 after magnetic
The illustration of Butut.Produced damped oscillation magnetic field is 6400kA/m to the maximum.
It is 0.5~1.0 μm or so the magnetization shape constituted that the magnetic sample 5 for magnetic by damped oscillation magnetic field, which turns into by size,
The state that the different region of state (magnetic domain) mixes.The size of the magnetic domain may be considered the crystallization with magnetic sample 5
Grain is substantially equal to the magnitudes, and reflects the remnant magnetism state of the crystalline particle with coercivity profile feelings different in positive negative direction
Result after the distribution of the leakage magnetic flux of shape is measured.
Fig. 6 (a) is represented by producing AC magnetic field by local magnetic field generating unit 3 while scanning and making magnetic sample
5 uneven the processes of magnetic.In the figure, magnetic sample 5 and local magnetic field generation section 3 be present in XYZ workbench 10 and
The relative position of XYZ arms 20, the bottom surface of local magnetic field generating unit 3 above magnetic sample 5 with approaching.As shown in Fig. 6 (b),
As long as magnetic field (the AC magnetism of the positive and negative reversion of the magnetic field that local magnetic field generating unit 3 is released symbol with elapsed time
).
Fig. 7 is by producing AC magnetic field by local magnetic field generating unit 3 while scanning and being tried by the magnetic of magnetic
The illustration of the Distribution of Magnetic Field figure of sample 5.By magnetic field generation section 6, equally saturation magnetic to magnetic sample 5 (with Fig. 3 B same modalities)
Afterwards, by only producing AC magnetic field while scanning magnetic by local magnetic field generating unit 3 to the central portion of measured zone.
Although magnetic sample 5 by the same the part of magnetic (above and below measured zone) is saturated magnetic, it is due to
Demagnetizing field and magnetic flux does not leak to outside, and the signal intensity detected by measurement portion 2 is small.On the other hand, by by local magnetic field
Generating unit 3 produce AC magnetic field while scan and by the part (center of measured zone) of magnetic may be considered by by
The signal intensity that measurement portion 2 is detected is big and magnetic sample 5 in positive negative direction by alternating magnetization so as to as caused by demagnetizing field
Influence small and flux leakage to outside part.
Even if as shown in fig. 7, by the AC magnetic field with defined magnetic field intensity, also can by magnetic sample with
Part below the corresponding coercivity of the magnetic field intensity unevenly magnetizes, and change magnetic field intensity is same to carry out successively
Measurement, thus, it is possible to obtain magnetic sample magnetic characteristic be distributed.
Claims (4)
1. a kind of magnetic field measuring device, it is characterised in that：
It is to measure the magnetic sample that is shaped as normal direction of the direction of magnetization relative to laminal magnetic sample
The magnetic field measuring device of remanent magnetism,
Possess：
Magnetic field generation section, it applies magnetic field and makes the 1st region and the 2nd region of adjoining via border of the magnetic sample
Each other in normal direction and opposite direction magnetic；And
Measurement portion, its measurement the magnetic field of the magnetic sample after magnetic by the magnetic field generation section and as the magnetic
The remanent magnetism output of sample.
2. magnetic field measuring device as claimed in claim 1, it is characterised in that：
The magnetic field generation section has the different magnetic pole of the symbol of at least one pair of adjoining, and makes the magnetic by the magnetic pole
Sample magnetic.
3. magnetic field measuring device as claimed in claim 1, it is characterised in that：
The magnetic field generation section, which is produced, to be carried out the magnetic field of damped oscillation to make the magnetic sample magnetic.
4. magnetic field measuring device as claimed in claim 1, it is characterised in that：
The magnetic field generation section scans the surface of the magnetic sample while producing AC magnetic field to make the magnetic
Sample magnetic.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012014551 | 2012-01-26 | ||
| JP2012-014551 | 2012-01-26 | ||
| PCT/JP2012/082276 WO2013111467A1 (en) | 2012-01-26 | 2012-12-13 | Magnetic measurement device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104081217A CN104081217A (en) | 2014-10-01 |
| CN104081217B true CN104081217B (en) | 2017-09-01 |
Family
ID=48873208
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280068264.XA Expired - Fee Related CN104081217B (en) | 2012-01-26 | 2012-12-13 | Magnetic measuring device |
| CN201280068265.4A Expired - Fee Related CN104081218B (en) | 2012-01-26 | 2012-12-13 | Magnetic measuring device |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280068265.4A Expired - Fee Related CN104081218B (en) | 2012-01-26 | 2012-12-13 | Magnetic measuring device |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US9702945B2 (en) |
| EP (2) | EP2808691A4 (en) |
| JP (2) | JP5641157B2 (en) |
| CN (2) | CN104081217B (en) |
| WO (2) | WO2013111467A1 (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010016153A1 (en) | 2010-03-26 | 2011-09-29 | Arno Friedrichs | Hydrodynamically guided circular saw blade |
| KR20140035013A (en) * | 2012-09-12 | 2014-03-21 | 삼성전자주식회사 | Magnetic field generation unit and semiconductor testing apparatus comprising the same |
| JP6305860B2 (en) * | 2013-07-23 | 2018-04-04 | 株式会社四国総合研究所 | Nondestructive inspection method and nondestructive inspection device |
| JP6305859B2 (en) * | 2014-07-22 | 2018-04-04 | 株式会社四国総合研究所 | Nondestructive inspection method |
| JP6233722B2 (en) | 2015-06-22 | 2017-11-22 | Tdk株式会社 | Magnetic field generator, magnetic sensor system, and magnetic sensor |
| CN109613457B (en) * | 2018-12-29 | 2020-12-25 | 陕西宝成航空仪表有限责任公司 | Magnetic steel performance detection method |
| KR102281293B1 (en) * | 2019-07-11 | 2021-07-26 | 에코피아 주식회사 | Apparatus for measuring the physical properties of a flexible element |
| JP7297306B2 (en) * | 2019-10-11 | 2023-06-26 | 国立研究開発法人物質・材料研究機構 | Terahertz magneto-optical sensor, high-performance non-destructive inspection device and method using the same, and magneto-optical imaging sensor used therefor |
| CN111999688B (en) * | 2020-08-26 | 2023-01-24 | 河北工业大学 | Single-chip laminated core leakage magnetic flux measuring device |
| CN112729622B (en) * | 2020-12-17 | 2022-07-22 | 上海电气集团股份有限公司 | Stress nondestructive testing method, device and equipment |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3490033A (en) * | 1968-03-11 | 1970-01-13 | Western Electric Co | Methods of and apparatus for measuring the coercive force of piece parts |
| JPS607375A (en) * | 1983-06-27 | 1985-01-16 | Daido Steel Co Ltd | Method and apparatus for measuring coercive force of ferromagnetic substance test piece |
| JPS61210976A (en) * | 1985-03-15 | 1986-09-19 | Kawasaki Steel Corp | Remaining magnetism measuring instrument |
| JPS62294987A (en) * | 1986-06-13 | 1987-12-22 | Sumitomo Metal Ind Ltd | Magnetic property measurement method and device |
| JP3283930B2 (en) | 1992-12-11 | 2002-05-20 | グローリー工業株式会社 | Magnetic material detection method |
| CN1115384A (en) * | 1995-06-02 | 1996-01-24 | 冶金工业部钢铁研究总院 | Microcomputer controlled soft magnetic material measuring method and device |
| JPH097133A (en) * | 1995-06-23 | 1997-01-10 | Toshiba Corp | Leaked magnetic field strength measuring device |
| JPH1025658A (en) * | 1996-05-10 | 1998-01-27 | Ykk Corp | Method and apparatus for detecting magnetic material in non-magnetic product |
| JP4252150B2 (en) * | 1999-03-24 | 2009-04-08 | 富士通株式会社 | Magnetic recording medium characteristic measuring apparatus and method |
| JP2001141701A (en) * | 1999-11-11 | 2001-05-25 | Nkk Corp | Method for measuring coercive force |
| JP4104923B2 (en) * | 2002-07-04 | 2008-06-18 | 株式会社東芝 | Magnetic body detection device |
| JP2004206316A (en) | 2002-12-25 | 2004-07-22 | Fuji Electric Retail Systems Co Ltd | Magnetic detection device |
| JP4698581B2 (en) | 2004-03-23 | 2011-06-08 | 独立行政法人科学技術振興機構 | R-Fe-B thin film magnet and method for producing the same |
| JP2006017557A (en) | 2004-06-30 | 2006-01-19 | Japan Science & Technology Agency | Coercive force distribution analysis method and analysis apparatus in perpendicular magnetic recording media using magnetic force microscope |
| TWI259285B (en) * | 2005-04-07 | 2006-08-01 | Univ Nat Yunlin Sci & Tech | Method of measuring sub-micrometer hysteresis loops of magnetic films |
| ITTO20050758A1 (en) * | 2005-10-26 | 2007-04-27 | Fiat Ricerche | DEVICE FOR DETECTION OF PHYSICAL QUANTITIES IN PARTICULAR A MAGNETIC FIELD WITH THIN FILM AND RELATIVE DETECTION PROCEDURE |
| EP2131474A4 (en) | 2007-03-27 | 2017-03-29 | Hitachi Metals, Ltd. | Permanent magnet type rotator and process for producing the same |
| US8884617B2 (en) | 2008-06-23 | 2014-11-11 | The Regents Of The University Of California | Magnetic particle imaging devices and methods |
| CN101408596B (en) * | 2008-11-28 | 2010-05-12 | 清华大学 | Method and device for measuring relative permeability of weak magnetic materials and coercive force of electrical pure iron |
| US8432164B2 (en) * | 2009-10-05 | 2013-04-30 | University Of Delaware | Ferromagnetic resonance and memory effect in magnetic composite materials |
| EP2560015B1 (en) * | 2010-03-15 | 2014-04-23 | Toyota Jidosha Kabushiki Kaisha | Method for determining coercivity of coercivity distribution magnet |
-
2012
- 2012-12-13 JP JP2013555149A patent/JP5641157B2/en not_active Expired - Fee Related
- 2012-12-13 WO PCT/JP2012/082276 patent/WO2013111467A1/en active Application Filing
- 2012-12-13 CN CN201280068264.XA patent/CN104081217B/en not_active Expired - Fee Related
- 2012-12-13 JP JP2013555148A patent/JP5713120B2/en not_active Expired - Fee Related
- 2012-12-13 CN CN201280068265.4A patent/CN104081218B/en not_active Expired - Fee Related
- 2012-12-13 US US14/374,640 patent/US9702945B2/en active Active
- 2012-12-13 EP EP12866514.8A patent/EP2808691A4/en not_active Withdrawn
- 2012-12-13 WO PCT/JP2012/082277 patent/WO2013111468A1/en active Application Filing
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Also Published As
| Publication number | Publication date |
|---|---|
| EP2808692A1 (en) | 2014-12-03 |
| CN104081218A (en) | 2014-10-01 |
| JPWO2013111468A1 (en) | 2015-05-11 |
| JP5641157B2 (en) | 2014-12-17 |
| EP2808691A1 (en) | 2014-12-03 |
| EP2808692B1 (en) | 2016-11-16 |
| US20150070005A1 (en) | 2015-03-12 |
| WO2013111467A1 (en) | 2013-08-01 |
| US20140375308A1 (en) | 2014-12-25 |
| US9354285B2 (en) | 2016-05-31 |
| EP2808692A4 (en) | 2015-10-28 |
| US9702945B2 (en) | 2017-07-11 |
| JP5713120B2 (en) | 2015-05-07 |
| WO2013111468A1 (en) | 2013-08-01 |
| CN104081217A (en) | 2014-10-01 |
| EP2808691A4 (en) | 2016-01-27 |
| CN104081218B (en) | 2015-11-25 |
| JPWO2013111467A1 (en) | 2015-05-11 |
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