CN104022679B - Clipping vertical curved composite ultrasonic motor oscillator - Google Patents
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Abstract
Description
技术领域technical field
本发明属于压电超声电机技术领域，具体涉及一种夹持式纵弯复合超声电机振子。The invention belongs to the technical field of piezoelectric ultrasonic motors, and in particular relates to a clip-type longitudinal-bending composite ultrasonic motor vibrator.
背景技术Background technique
压电超声电机是一种利用压电陶瓷的逆压电效应，在弹性体中激励出超声频段内的振动，在弹性体表面特定点或特定区域形成具有特定轨迹的质点运动，进而通过定子、转子之间的摩擦耦合将质点的微观运动转换成转子的宏观运动，具有低速大转矩、无需变速机构、无电磁干扰、响应速度快和断电自锁等优点，作为一种压电驱动器有着十分广泛的应用。Piezoelectric ultrasonic motor is a kind of piezoelectric ultrasonic motor that uses the inverse piezoelectric effect of piezoelectric ceramics to excite vibration in the ultrasonic frequency range in the elastic body, and forms a particle motion with a specific trajectory at a specific point or area on the surface of the elastic body, and then passes through the stator, The frictional coupling between the rotors converts the microscopic motion of the particle into the macroscopic motion of the rotor. It has the advantages of low speed and high torque, no need for a transmission mechanism, no electromagnetic interference, fast response, and self-locking when power is off. As a piezoelectric driver, it has Very wide range of applications.
出于激励原理的简单性和理论分析方法的简便性，目前压电超声电机大多采用金属弹性体粘贴压电陶瓷薄片的方式进行激励，由于受压电陶瓷材料的抗拉强度低，以及胶层的强度和疲劳寿命等的限制，这样的激励方式使得超声电机的机械输出能力受到严重制约。Due to the simplicity of the excitation principle and the simplicity of the theoretical analysis method, most of the current piezoelectric ultrasonic motors are excited by the method of pasting piezoelectric ceramic sheets with metal elastomers. Due to the low tensile strength of piezoelectric ceramic materials and the adhesive layer The strength and fatigue life of the ultrasonic motor are limited by such an excitation method, which severely restricts the mechanical output capability of the ultrasonic motor.
发明内容Contents of the invention
本发明是为了解决现有贴片式超声电机振子中存在的陶瓷材料抗拉强度低、胶层的强度和疲劳寿命以及振子振幅提高受限的问题，提供了一种夹持式纵弯复合超声电机振子。The present invention aims to solve the problems of low tensile strength of ceramic materials, the strength and fatigue life of the adhesive layer, and the limited improvement of the amplitude of the vibrator existing in the vibrator of the chip type ultrasonic motor, and provides a clamping type longitudinal bending composite ultrasonic vibrator. Motor vibrator.
本发明所述夹持式纵弯复合超声电机振子，它包括四片压电陶瓷基片、两块硬板和五片电极片；The clip-type longitudinal bending composite ultrasonic motor vibrator of the present invention includes four piezoelectric ceramic substrates, two hard plates and five electrode sheets;
四片压电陶瓷基片平行设置，且均夹在两块硬板中间，第一片压电陶瓷基片和第二片压电陶瓷基片的极化方向相反，第三片压电陶瓷基片和第四片压电陶瓷基片的极化方向相反，五片电极片分别夹持在第一块硬板与其相邻的压电陶瓷基片之间、相邻两片压电陶瓷基片之间和第二块硬板与其相邻的压电陶瓷基片之间。Four piezoelectric ceramic substrates are arranged in parallel and are sandwiched between two hard plates. The polarization directions of the first piezoelectric ceramic substrate and the second piezoelectric ceramic substrate are opposite, and the third piezoelectric ceramic substrate The polarization directions of the first and fourth piezoelectric ceramic substrates are opposite, and the five electrode sheets are respectively clamped between the first hard plate and its adjacent piezoelectric ceramic substrate, and two adjacent piezoelectric ceramic substrates between the second hard plate and its adjacent piezoelectric ceramic substrate.
本发明的夹持式纵弯复合超声电机振子采用五个电极片时第一片压电陶瓷片与第二片压电陶瓷片之间电极片和第三片压电陶瓷片与第四片压电陶瓷片之间的电极片分别连接两相交流电压信号，第二片压电陶瓷片与第三片压电陶瓷片之间的电极片、第一片压电陶瓷片与硬板之间的电极片和第四片压电陶瓷片与硬板之间的电极片均与激励电源公共端相连，实现振子奇数阶纵振和奇数阶弯振模态的复合激励。When the clip-type longitudinal bending composite ultrasonic motor vibrator of the present invention adopts five electrode sheets, the electrode sheet between the first piezoelectric ceramic sheet and the second piezoelectric ceramic sheet and the third piezoelectric ceramic sheet and the fourth piezoelectric ceramic sheet are pressed together. The electrode sheets between the electric ceramic sheets are respectively connected to two-phase AC voltage signals, the electrode sheets between the second piezoelectric ceramic sheet and the third piezoelectric ceramic sheet, and the electrode sheets between the first piezoelectric ceramic sheet and the hard plate The electrode sheet and the electrode sheet between the fourth piezoelectric ceramic sheet and the hard plate are connected to the common terminal of the excitation power supply to realize the composite excitation of the odd-order longitudinal vibration and odd-order bending vibration modes of the vibrator.
本发明的夹持式纵弯复合超声电机振子采用七个电极片时，第一片压电陶瓷基片与第二片压电陶瓷基片之间的电极片和第三压电陶瓷基片与第四压电陶瓷基片之间电极片分别连接驱动电源的两相交流电压信号端，第二片压电陶瓷片与第三片压电陶瓷片之间的电极片、第一片压电陶瓷片与硬板之间的电极片和第四片压电陶瓷片与硬板之间的电极片均与激励电源的公共端相连，实现了振子偶数阶振动模态纵振或弯振的激励。更进一步，若所述振子中第二片压电陶瓷片和第三片压电陶瓷片的极化方向相同时，可实现振子偶数阶纵振和奇数阶弯振模态的复合激励。此时，应用压电陶瓷的D31工作模态在振子中激励出相应的纵弯复合振动，进而在硬板末端驱动足区域生成椭圆轨迹振动，通过采用适当的纵弯振型阶数组合可以实现直线或旋转致动输出。倘若两相交流电压信号相位差为+90°时，振子正向驱动，则当调整两相激励信号的相位差为-90°时，可以实现反向驱动。When the clip-type longitudinal bending composite ultrasonic motor vibrator of the present invention adopts seven electrode sheets, the electrode sheets between the first piezoelectric ceramic substrate and the second piezoelectric ceramic substrate and the third piezoelectric ceramic substrate The electrode sheets between the fourth piezoelectric ceramic substrates are respectively connected to the two-phase AC voltage signal terminals of the drive power supply, the electrode sheets between the second piezoelectric ceramic sheet and the third piezoelectric ceramic sheet, the first piezoelectric ceramic sheet The electrode sheet between the piezoelectric ceramic sheet and the hard plate and the electrode sheet between the fourth piezoelectric ceramic sheet and the hard plate are connected to the common terminal of the excitation power supply to realize the excitation of the vibrator's even-order vibration mode longitudinal vibration or bending vibration. Furthermore, if the polarization directions of the second piezoelectric ceramic sheet and the third piezoelectric ceramic sheet in the vibrator are the same, the composite excitation of the vibrator's even-order longitudinal vibration and odd-order bending vibration modes can be realized. At this time, the D31 working mode of the piezoelectric ceramic is used to excite the corresponding longitudinal-bending compound vibration in the vibrator, and then the elliptical trajectory vibration is generated in the driving foot area at the end of the hard plate. Linear or rotary actuation output. If the phase difference of the two-phase AC voltage signals is +90°, the vibrator is driven forward, and when the phase difference of the two-phase excitation signals is adjusted to -90°, the vibrator can be driven backward.
本发明的夹持式纵弯复合超声电机振子具有结构简单、设计灵活、可实现高电压激励、性能稳定、易于控制、可系列化生产的优点。同时夹持在两块硬板中间解决了陶瓷材料抗拉强度低、胶层的强度低的问题，增加了夹持式纵弯复合超声电机振子的疲劳寿命以及提高了振子振幅。The clip-type longitudinal bending composite ultrasonic motor vibrator of the present invention has the advantages of simple structure, flexible design, high-voltage excitation, stable performance, easy control, and serial production. At the same time, clamping between two hard plates solves the problems of low tensile strength of ceramic materials and low strength of the adhesive layer, increases the fatigue life of the vibrator of the clamping longitudinal bending composite ultrasonic motor and improves the amplitude of the vibrator.
附图说明Description of drawings
图1本发明所述的夹持式纵弯复合超声电机振子采用五片电极片时的结构示意图；Fig. 1 is a structural schematic diagram when five electrode sheets are used for the clip-type longitudinal bending composite ultrasonic motor vibrator according to the present invention;
图2为发明所述的夹持式纵弯复合超声电机振子采用七片电极片时的结构示意图；Fig. 2 is a structural schematic diagram of the clip-type longitudinal bending composite ultrasonic motor vibrator according to the invention when seven electrode pieces are used;
图3是本发明所述夹持式纵弯复合超声电机振子一阶纵振模态振型示意图；Fig. 3 is a schematic diagram of the vibration shape of the first-order longitudinal vibration mode of the clip-type longitudinal-bending composite ultrasonic motor vibrator according to the present invention;
图4是本发明所述夹持式纵弯复合超声电机振子二阶纵振模态振型示意图；Fig. 4 is a schematic diagram of the mode shape of the second-order longitudinal vibration mode of the clip-type longitudinal-bending composite ultrasonic motor vibrator according to the present invention;
图5是本发明所述夹持式纵弯复合超声电机振子一阶弯振模态振型示意图；Fig. 5 is a schematic diagram of the mode shape of the first-order bending vibration mode of the clip-type longitudinal-bending composite ultrasonic motor vibrator according to the present invention;
图6是本发明所述夹持式纵弯复合超声电机振子二阶弯振模态振型示意图。Fig. 6 is a schematic diagram of the mode shape of the second-order bending vibration mode of the clip-type longitudinal-bending composite ultrasonic motor vibrator according to the present invention.
具体实施方式detailed description
具体实施方式一、结合图1说明本实施方式，本实施方式所述夹持式纵弯复合超声电机振子，它包括四片压电陶瓷基片1、两块硬板2和五片电极片3；Specific Embodiments 1. This embodiment is described in conjunction with FIG. 1. The clip-type longitudinal bending composite ultrasonic motor vibrator described in this embodiment includes four piezoelectric ceramic substrates 1, two hard plates 2 and five electrode sheets 3. ;
四片压电陶瓷基片1平行设置，且均夹在两块硬板2中间，第一片压电陶瓷基片1和第二片压电陶瓷基片1的极化方向相反，第三片压电陶瓷基片1和第四片压电陶瓷基片1的极化方向相反，五片电极片3分别夹持在第一块硬板2与其相邻的压电陶瓷基片1之间、相邻两片压电陶瓷基片1之间和第二块硬板2与其相邻的压电陶瓷基片1之间。Four piezoelectric ceramic substrates 1 are arranged in parallel, and are sandwiched between two hard plates 2. The polarization directions of the first piezoelectric ceramic substrate 1 and the second piezoelectric ceramic substrate 1 are opposite, and the third piezoelectric ceramic substrate 1 The polarization directions of the piezoelectric ceramic substrate 1 and the fourth piezoelectric ceramic substrate 1 are opposite, and the five electrode sheets 3 are respectively clamped between the first hard plate 2 and the adjacent piezoelectric ceramic substrate 1, Between two adjacent piezoelectric ceramic substrates 1 and between the second hard plate 2 and its adjacent piezoelectric ceramic substrate 1 .
具体实施方式二、本实施方式是对具体实施方式一所述的夹持式纵弯复合超声电机振子的进一步说明，按从左至右的顺序，第一片压电陶瓷基片1与第二片压电陶瓷基片1之间的电极片3和第三压电陶瓷基片1与第四压电陶瓷基片1之间的电极片3分别连接激励电源的相位差为90度的两相交流电压信号，Specific Embodiment 2. This embodiment is a further description of the clip-type longitudinal bending composite ultrasonic motor vibrator described in Specific Embodiment 1. In order from left to right, the first piezoelectric ceramic substrate 1 and the second The electrode sheet 3 between the piezoelectric ceramic substrates 1 and the electrode sheet 3 between the third piezoelectric ceramic substrate 1 and the fourth piezoelectric ceramic substrate 1 are respectively connected to two phases with a phase difference of 90 degrees of the excitation power supply. AC voltage signal,
第二片压电陶瓷片1与第三片压电陶瓷片1之间的电极片3、第一片压电陶瓷片1与第一块硬板2之间的电极片3和第四片压电陶瓷片1与第二块硬板2之间的电极片3均与激励电源公共端相连。The electrode sheet 3 between the second piezoelectric ceramic sheet 1 and the third piezoelectric ceramic sheet 1, the electrode sheet 3 between the first piezoelectric ceramic sheet 1 and the first hard plate 2, and the fourth sheet pressure The electrode sheets 3 between the electric ceramic sheet 1 and the second hard board 2 are all connected to the common terminal of the excitation power supply.
具体实施方式三、结合图2说明本实施方式所述的夹持式纵弯复合超声电机振子，它包括四片压电陶瓷基片1、两块硬板2和七片电极片3；Specific Embodiment 3. The clip-type longitudinal bending composite ultrasonic motor vibrator described in this embodiment is described in conjunction with FIG. 2 , which includes four piezoelectric ceramic substrates 1 , two hard plates 2 and seven electrode sheets 3 ;
四片压电陶瓷基片1平行设置，且均夹在两块硬板2中间，第一片压电陶瓷基片1和第二片压电陶瓷基片1的极化方向相反，第三片压电陶瓷基片1和第四片压电陶瓷基片1的极化方向相反，Four piezoelectric ceramic substrates 1 are arranged in parallel, and are sandwiched between two hard plates 2. The polarization directions of the first piezoelectric ceramic substrate 1 and the second piezoelectric ceramic substrate 1 are opposite, and the third piezoelectric ceramic substrate 1 The polarization directions of the piezoelectric ceramic substrate 1 and the fourth piezoelectric ceramic substrate 1 are opposite,
第一片压电陶瓷片1和第二片压电陶瓷片1之间设置有两片电极片3，且该两片电极片3平行设置位于同一平面内，所述两片电极片3之间留有间隙，第三片压电陶瓷片1和第四片压电陶瓷片1之间也设置有两片电极片3，且该两片电极片3平行设置位于同一平面内，所述两片电极片3之间留有间隙；其余三片电极片3分别夹在硬板第一片压电陶瓷片1与第一块硬板2之间、第二片压电陶瓷片1与第三片压电陶瓷片1之间和第四片压电陶瓷片1与第二块硬板2之间。Two electrode sheets 3 are arranged between the first piezoelectric ceramic sheet 1 and the second piezoelectric ceramic sheet 1, and the two electrode sheets 3 are arranged in parallel in the same plane, between the two electrode sheets 3 There is a gap, and two electrode sheets 3 are also arranged between the third piezoelectric ceramic sheet 1 and the fourth piezoelectric ceramic sheet 1, and the two electrode sheets 3 are arranged in parallel in the same plane. There is a gap between the electrode sheets 3; the remaining three electrode sheets 3 are sandwiched between the first piezoelectric ceramic sheet 1 and the first hard plate 2, the second piezoelectric ceramic sheet 1 and the third between the piezoelectric ceramic sheets 1 and between the fourth piezoelectric ceramic sheet 1 and the second hard plate 2 .
当本发明所述的夹持式纵弯复合超声电机振子中第二片压电陶瓷片和第三片压电陶瓷片的极化方向相反时，实现振子奇数阶纵振和偶数阶弯振模态的复合激励。当持式纵弯复合超声电机振子中第二压电陶瓷片和第三片压电陶瓷片的极化方向相同时，实现振子偶数阶纵振和奇数阶弯振模态的复合激励。When the polarization directions of the second piezoelectric ceramic sheet and the third piezoelectric ceramic sheet in the clip-type longitudinal-bending composite ultrasonic motor vibrator according to the present invention are opposite, the odd-order longitudinal vibration and even-order bending vibration modes of the vibrator can be realized. State compound incentives. When the polarization directions of the second piezoelectric ceramic sheet and the third piezoelectric ceramic sheet in the vibrator of the holding type longitudinal-bending composite ultrasonic motor are the same, the composite excitation of the vibrator's even-order longitudinal vibration and odd-order bending vibration modes is realized.
具体实施方式四、本实施方式是对具体实施方式三所述的夹持式纵弯复合超声电机振子的进一步说明，按从左至右的顺序，第一片压电陶瓷片1和第二片压电陶瓷片1之间的两片电极片3与第三片压电陶瓷片1和第四片压电陶瓷片1之间的两片电极片3交叉连接组合为两组电极，该两组电极分别连接激励电源的相位差为90度的两相交流电压信号，第二片压电陶瓷片1和第三片压电陶瓷片之间的电极片3、第一片压电陶瓷片1与硬板之间的电极片3和第四片压电陶瓷片1与硬板之间的电极片3均与激励电源公共端相连。Specific Embodiment 4. This embodiment is a further description of the clip-type longitudinal bending composite ultrasonic motor vibrator described in Specific Embodiment 3. In order from left to right, the first piezoelectric ceramic sheet 1 and the second piezoelectric ceramic sheet The two electrode sheets 3 between the piezoelectric ceramic sheets 1 and the two electrode sheets 3 between the third piezoelectric ceramic sheet 1 and the fourth piezoelectric ceramic sheet 1 are cross-connected and combined to form two groups of electrodes. The electrodes are respectively connected to the two-phase AC voltage signal with a phase difference of 90 degrees of the excitation power supply, the electrode sheet 3 between the second piezoelectric ceramic sheet 1 and the third piezoelectric ceramic sheet, the first piezoelectric ceramic sheet 1 and the The electrode sheet 3 between the hard plates and the fourth piezoelectric ceramic sheet 1 and the electrode sheet 3 between the hard plates are all connected to the common terminal of the excitation power supply.
具体实施方式五、本实施方式是对具体实施方式一或三所述的夹持式纵弯复合超声电机振子的进一步说明，两块硬板2通过螺栓固定或通过夹持装置进行固定。Embodiment 5. This embodiment is a further description of the clip-type longitudinal bending composite ultrasonic motor vibrator described in Embodiment 1 or 3. The two hard plates 2 are fixed by bolts or by a clamping device.
硬板的长度大于压电陶瓷基片的长度，且两个硬板的四个末端作为驱动足使用。The length of the hard plates is greater than that of the piezoelectric ceramic substrate, and the four ends of the two hard plates are used as driving legs.
具体实施方式六、本实施方式是对具体实施方式一或三所述的夹持式纵弯复合超声电机振子的进一步说明，硬板2的长度大于压电陶瓷基片1的长度。Embodiment 6. This embodiment is a further description of the clip-type longitudinal bending composite ultrasonic motor vibrator described in Embodiment 1 or 3. The length of the hard plate 2 is greater than the length of the piezoelectric ceramic substrate 1 .
具体实施方式七、本实施方式是对具体实施方式一或三所述的夹持式纵弯复合超声电机振子的进一步说明，四片压电陶瓷基片1均沿厚度方向极化。Embodiment 7. This embodiment is a further description of the clip-type longitudinal bending composite ultrasonic motor vibrator described in Embodiment 1 or 3. The four piezoelectric ceramic substrates 1 are all polarized along the thickness direction.
Claims (5)
- The most clipping vertical curved composite ultrasonic motor oscillator, it is characterised in that it include four piezoelectric ceramics substrates (1), two Block hardboard (2) and seven plate electrode sheets (3)；Four piezoelectric ceramics substrates (1) be arranged in parallel, and are all clipped in the middle of two pieces of hardboards (2), first piezoelectric ceramics The polarised direction of substrate (1) and second piezoelectric ceramics substrate (1) is contrary, the 3rd piezoelectric ceramics substrate (1) and the The polarised direction of four piezoelectric ceramics substrates (1) is contrary,It is provided with two panels electrode slice (3) between first piezoelectric ceramics substrate (1) and second piezoelectric ceramics substrate (1), And this two panels electrode slice (3) be arranged in parallel in being generally aligned in the same plane, between described two panels electrode slice (3), leave gap, It is also equipped with two panels electrode slice (3) between 3rd piezoelectric ceramics substrate (1) and the 4th piezoelectric ceramics substrate (1), And this two panels electrode slice (3) be arranged in parallel in being generally aligned in the same plane, between described two panels electrode slice (3), leave gap； Its excess-three plate electrode sheet (3) is clipped between hardboard first piezoelectric ceramics substrate (1) and first piece of hardboard (2) respectively, Between second piezoelectric ceramics substrate (1) and the 3rd piezoelectric ceramics substrate (1) and the 4th piezoelectric ceramics substrate (1) And between second piece of hardboard (2), the D31 operation mode of piezoelectric ceramics substrate (1) motivates corresponding vertical in oscillator Curved complex vibration.
- Clipping vertical curved composite ultrasonic motor oscillator the most according to claim 1, it is characterised in that by from left to right Order, the two panels electrode slice (3) between first piezoelectric ceramics substrate (1) and second piezoelectric ceramics substrate (1) Intersect even with the two panels electrode slice (3) between the 3rd piezoelectric ceramics substrate (1) and the 4th piezoelectric ceramics substrate (1) Connecing and be combined as two arrays of electrodes, this two arrays of electrodes connects the two-phase alternating current that phase difference the is 90 degree pressure signal of excitation power supply respectively, Electrode slice (3) between second piezoelectric ceramics substrate (1) and the 3rd piezoelectric ceramic piece, first piezoelectric ceramics substrate (1) electrode slice (3) between electrode slice (3) and the 4th piezoelectric ceramics substrate (1) and hardboard and between hardboard All it is connected with excitation power supply common port.
- Clipping vertical curved composite ultrasonic motor oscillator the most according to claim 1, it is characterised in that two pieces of hardboards (2) It is bolted or is fixed by clamping device.
- Clipping vertical curved composite ultrasonic motor oscillator the most according to claim 1, it is characterised in that hardboard (2) Length more than the length of piezoelectric ceramics substrate (1).
- Clipping vertical curved composite ultrasonic motor oscillator the most according to claim 1, it is characterised in that four piezoelectricity potteries Ceramic chip (1) all through-thickness polarization.
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| CN104923469A (en) * | 2015-05-16 | 2015-09-23 | 哈尔滨工业大学 | Two-dimensional vibration device based on different placing directions of piezoelectric ceramic shorn pieces |
| JP6601174B2 (en) * | 2015-11-13 | 2019-11-06 | セイコーエプソン株式会社 | Piezoelectric actuators, stacked actuators, piezoelectric motors, robots, hands and liquid pumps |
| CN107070297B (en) * | 2017-04-14 | 2019-03-29 | 哈尔滨工业大学 | Laminated type flexure type piezoelectric ceramic actuator |
| CN112654920B (en) * | 2018-08-13 | 2022-09-20 | 米尼斯怀斯股份公司 | Lens driving device, camera module, and camera-mounted device |
| CN114900069A (en) * | 2022-06-10 | 2022-08-12 | 山东理工大学 | Ultrasonic motor stator comprehensively applying d31 deformation |
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