CN104005968B - The towed molecular pump of rotor surface temperature can be surveyed - Google Patents
The towed molecular pump of rotor surface temperature can be surveyed Download PDFInfo
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- CN104005968B CN104005968B CN201410246183.5A CN201410246183A CN104005968B CN 104005968 B CN104005968 B CN 104005968B CN 201410246183 A CN201410246183 A CN 201410246183A CN 104005968 B CN104005968 B CN 104005968B
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- molecular pump
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- temperature measuring
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Abstract
The invention discloses a kind of towed molecular pump surveying rotor surface temperature, comprise shell, portion is provided with rotor in the enclosure, portion is provided with first order molecular pump in the enclosure, the third level molecular pump be connected with the interference of first order molecular pump, third level molecular pump is connected with end flanges, and second level molecular pump is arranged in the fitting recess of third level molecular pump.The temperature measuring wire of infrared probe is connected with end face temperature measuring equipment by third level molecular pump wire casing, end flanges wire casing successively.The measuring end of radial temperature measuring equipment passes the outer wall of shell, close first order molecular pump.The dismantled and assembled structure of the second level of the present invention molecular pump and third level molecular pump, can ensure when molecular pump normally runs, and debugging and installation end face temperature measuring equipment, radial temperature measuring equipment has axially selects space on a large scale.During thermometric, rotor both can remain static, also can be in rotary state, easy to operate.
Description
Technical field
The invention belongs to a kind of towed molecular pump, be specifically related to a kind of towed molecular pump surveying rotor surface temperature.
Background technique
Molecular drag pump relies on the rotor of gas molecule and high-speed motion collide and obtain momentum, thus driven by gas molecule and deliver to delivery side of pump.The situation of change of towed molecular pump rotor surface temperature can reflect the instantaneous operating conditions of this device and relevant performance intuitively, and therefore the real-time monitoring of temperature tool in the development process of this device is of great significance.When with high rotating speed, especially ultrahigh rotating speed rotates rotor, can deformation be there is in rotor self, but the temperature real-time measurement of rotor surface is very difficult, and the structure of molecular pump self is also comparatively compact arbitrarily cannot install temperature measuring equipment additional, therefore, how the temperature on Real-Time Monitoring molecular pump rotor surface is a difficult problem in this field.
Summary of the invention
The present invention is that the temperature solving towed molecular pump rotor surface cannot this problem of Real-Time Monitoring propose, and its objective is and provides a kind of towed molecular pump surveying rotor surface temperature.
Technological scheme of the present invention is: a kind of towed molecular pump surveying rotor surface temperature, comprise cylindrical housing, portion is provided with cylindrical rotor in the enclosure, in described enclosure, rotor periphery, and rotor coaxial is provided with first order molecular pump, the third level molecular pump be connected with the interference of first order molecular pump, third level molecular pump is connected with end flanges, second level molecular pump is fixed in the fitting recess of third level molecular pump, first order molecular pump is cylindrical shape, spiral air-conducting groove is formed at circular inner wall, second level molecular pump is disc, form multiple second level cell wall B section of being uniformly distributed along the circumference and the second level to bleed groove B section in its lower end surface, and distribute alternately, third level molecular pump is thick walled cylinder shape, the fitting recess forming ring in its underpart, form central through bore therebetween, the inwall of central through bore forms spiral air-conducting groove, forms multiple second level be uniformly distributed along the circumference to bleed groove A section and second level cell wall A section distribute alternately in its lower end surface, infrared probe is arranged in third level infrared probe hole, its temperature measuring wire is connected by third level molecular pump wire casing, end flanges wire casing and the end face temperature measuring equipment be fixed in end flanges successively, end face temperature measuring equipment is fixed in temperature measuring equipment mounting hole, and the measuring end of radial temperature measuring equipment passes the outer wall of shell, close first order molecular pump.
Described second level groove A section and second level groove B section of bleeding of bleeding is the radial camber line of continuous print and aligned with each other, and second level cell wall A section and second level cell wall B section are the radial camber line of continuous print and aligned with each other.
Described spiral air-conducting slot cross-section is in " U " type and in dextrorotation state, and the described second level the bleed grooved of groove B section of groove A section, the second level of bleeding is the rectangle of Trapezoidal and aligned with each other.
The dismantled and assembled structure of the second level of the present invention molecular pump and third level molecular pump, can ensure when molecular pump normally runs, and debugging and installation end face temperature measuring equipment, radial temperature measuring equipment has axially selects space on a large scale.During thermometric, rotor both can remain static, also can be in rotary state, easy to operate.
Accompanying drawing explanation
Fig. 1 is plan view of the present invention;
Fig. 2 is plan view of the present invention;
Fig. 3 is end flanges of the present invention and molecular pump mounting points at different levels schematic diagram;
Fig. 4 is A direction view when not installing rotor, second level molecular pump and shell in Fig. 1;
Fig. 5 be when rotor is not installed in Fig. 1 along B-B line view;
Fig. 6 is the plan view of third level molecular pump of the present invention;
Fig. 7 is third level molecular pump worm's eye view of the present invention;
Fig. 8 is third level molecular pump plan view of the present invention;
Fig. 9 is the worm's eye view of the second level of the present invention molecular pump;
Figure 10 is the plan view of the second level of the present invention molecular pump;
Figure 11 is along C-C line view in Fig. 3,6;
Figure 12 is along D-D line view in Fig. 7,9.
Wherein:
1 first order molecular pump 2 third level molecular pump
3 end flanges 4 end face temperature measuring equipments
5 radial temperature measuring equipment 6 locating flanges
7 second level molecular pump 8 rotors
9 shell 10 end flanges screws
11 locating flange screw 12 second level molecular pump screws
13 second molecular pump tapped hole 14 locating flange tapped holes
15 third level infrared probe hole 16 third level molecular pump fixed holes
Bleed groove A section in 17 cell wall A section 18 second level, the second level
19 third level molecular pump wire casing 20 second level molecular pump fixed holes
Bleed groove B section in 21 cell wall B section 22 second level, the second level
23 second level, infrared probe hole 24, second level molecular pump base for supporting
25 end flanges wire casing 26 end flanges tapped holes
27 temperature measuring equipment mounting hole 28 fitting recess
29 infrared probe 30 spiral air-conducting grooves
31 center hole 32 upper annular flange
33 times annular flange flange 34 temperature measuring wires.
Embodiment
Below, with reference to drawings and Examples, the present invention is described in detail:
As shown in Fig. 1 ~ 12, a kind of towed molecular pump surveying rotor surface temperature, comprise cylindrical housing 9, shell 9 inside is provided with cylindrical rotor 8, inner at shell 9, rotor 8 peripheral and be coaxially arranged with first order molecular pump 1 with rotor 8, the third level molecular pump 2 be connected with first order molecular pump 1 interference, third level molecular pump 2 is connected with end flanges 3 by end flanges screw 10, and second level molecular pump 7 is fixed in the fitting recess 28 of third level molecular pump 2 by second level molecular pump screw 12.
First order molecular pump 1 is cylindrical shape, forms spiral air-conducting groove 30 at circular inner wall, and spiral air-conducting groove 30 cross section is in " U " type and in dextrorotation state.Second level molecular pump 3 is disc, in its infrared probe hole, formation second level, side 23, form multiple second level cell wall B section 21 of being uniformly distributed along the circumference and the second level to bleed groove B section 22 distributing alternately in its lower end surface, be circumferentially formed three uniform second level molecular pumps in its lower end surface and support 24.Third level molecular pump 2 is thick walled cylinder shape, third level infrared probe hole 15 is formed in its side, the fitting recess 28 of ring is formed in the bottom of third level molecular pump 2, central through bore 31 is formed in the middle of third level molecular pump 2, the inwall of central through bore 31 forms spiral air-conducting groove 30, spiral air-conducting groove 30 cross section is in " U " type, upper annular flange 32 is formed in the upper-end surface of third level molecular pump 2, lower annular flange flange 33 is formed at its outer wall bottom, its lower end surface forms bleed groove A section 18 and second level cell wall A section 17 of multiple second level be uniformly distributed along the circumference and distributes alternately, the second level the bleed grooved of groove B section 22 of groove A section 18 and the second level of bleeding is the rectangle of Trapezoidal.
Bleed groove A section 18 in the second level, bleed groove B section 22 and second level cell wall A section 17, second level cell wall B section 21 of the second level is aligned with each other in the radial camber line of continuous print, and the second level of the present invention groove A section 18, second level groove B section 22 of bleeding of bleeding is eight.
Described second level molecular pump fixed hole 20 is evenly equipped with 3 along second level molecular pump 3 circumference, is counter sink.
End flanges screw 10 passes third level molecular pump fixed hole 16, is screwed in the end flanges tapped hole 26 of end flanges 3, third level molecule pumping section 2 is fixed on the lower end of end flanges 3.
Second level molecular pump screw 12 passes second level molecular pump fixed hole 20, is screwed in the second molecular pump tapped hole 13, is fixed in the fitting recess 28 of third level molecular pump 2 by second level molecular pump 7.
Infrared probe 29 is inserted in the shoulder hole of locating flange 6, locating flange screw 11 is screwed in locating flange tapped hole 14 by positioning flange hole, infrared probe 29 to be arranged in third level infrared probe hole 15 and through infrared probe hole, the second level 23, temperature measuring wire 34 is connected by third level molecular pump wire casing 19, end flanges wire casing 25 and the end face temperature measuring equipment 4 be fixed in end flanges 3 successively, and end face temperature measuring equipment 4 is fixed in temperature measuring equipment mounting hole 27.
The measuring end of radial temperature measuring equipment 5 passes the outer wall of shell 9, close first order molecular pump 1.
Described end face temperature measuring equipment 4 and radial temperature measuring equipment 5 are same structure temperature measuring set.
The dismantled and assembled structure of the second level of the present invention molecular pump and third level molecular pump, can ensure when molecular pump normally runs, and debugging and installation end face temperature measuring equipment, radial temperature measuring equipment has axially selects space on a large scale.During thermometric, rotor both can remain static, also can be in rotary state, easy to operate.
Claims (3)
1. can survey the towed molecular pump of rotor surface temperature for one kind, comprise cylindrical housing (9), shell (9) inside is provided with cylindrical rotor (8), it is characterized in that: inner at described shell (9), rotor (8) is peripheral, and be coaxially arranged with first order molecular pump (1) with rotor (8), the third level molecular pump (2) be connected with first order molecular pump (1) interference, third level molecular pump (2) is connected with end flanges (3), second level molecular pump (7) is fixed in the fitting recess (28) of third level molecular pump (2), first order molecular pump (1) is cylindrical shape, spiral air-conducting groove (30) is formed at circular inner wall, second level molecular pump (7) is disc, multiple cell wall B section (21) of being uniformly distributed along the circumference and groove B section (22) of bleeding is formed in its lower end surface, and distribute alternately, the fitting recess (28) that third level molecular pump (2) is thick walled cylinder shape, ring is formed at third level molecular pump (2) bottom, central through bore (31) is formed in the middle of third level molecular pump (2), the inwall of central through bore (31) forms spiral air-conducting groove (30), and third level molecular pump (2) lower end surface forms multiple bleed groove A section (18) and the cell wall A section (17) distribute alternately that are uniformly distributed along the circumference, infrared probe (29) is arranged in the infrared probe hole (15) of third level molecular pump, its temperature measuring wire is connected with the end face temperature measuring equipment (4) be fixed in end flanges (3) by third level molecular pump wire casing (19), end flanges wire casing (25) successively, end face temperature measuring equipment (4) is fixed in temperature measuring equipment mounting hole (27), and the measuring end of radial temperature measuring equipment (5) passes the outer wall of shell (9), close first order molecular pump (1).
2. the towed molecular pump surveying rotor surface temperature according to claim 1, it is characterized in that: described bleed groove A section (18) and groove B section (22) of bleeding be radial camber line aligned with each other in continuous print, cell wall A section (17) and cell wall B section (21) be radial camber line aligned with each other in continuous print.
3. the towed molecular pump surveying rotor surface temperature according to claim 1, it is characterized in that: described spiral air-conducting groove (30) cross section is in " U " type and in dextrorotation state, and described groove A section (18) of bleeding, the grooved of groove B section (22) of bleeding are the rectangle of Trapezoidal and aligned with each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410246183.5A CN104005968B (en) | 2014-06-05 | 2014-06-05 | The towed molecular pump of rotor surface temperature can be surveyed |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410246183.5A CN104005968B (en) | 2014-06-05 | 2014-06-05 | The towed molecular pump of rotor surface temperature can be surveyed |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104005968A CN104005968A (en) | 2014-08-27 |
| CN104005968B true CN104005968B (en) | 2016-01-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410246183.5A Expired - Fee Related CN104005968B (en) | 2014-06-05 | 2014-06-05 | The towed molecular pump of rotor surface temperature can be surveyed |
Country Status (1)
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| CN (1) | CN104005968B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112710406B (en) * | 2021-01-19 | 2022-07-08 | 核工业理化工程研究院 | Method for measuring temperature of inner surface of molecular pump |
| CN114837943B (en) * | 2022-04-11 | 2024-01-30 | 北京通嘉宏瑞科技有限公司 | Vacuum pump capable of rapidly measuring shaft temperature and processing and measuring methods thereof |
| CN115076134A (en) * | 2022-06-20 | 2022-09-20 | 核工业理化工程研究院 | A pressure-inducing device and method for detecting the compression ratio of a multi-stage molecular pump in a rotating drum |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3510007B2 (en) * | 1995-06-13 | 2004-03-22 | 日本原子力研究所 | Molecular pump |
| US5709528A (en) * | 1996-12-19 | 1998-01-20 | Varian Associates, Inc. | Turbomolecular vacuum pumps with low susceptiblity to particulate buildup |
| US6220824B1 (en) * | 1999-06-21 | 2001-04-24 | Varian, Inc. | Self-propelled vacuum pump |
| JP2001032790A (en) * | 1999-07-23 | 2001-02-06 | Shimadzu Corp | Turbo-molecular pump |
| JP2004116316A (en) * | 2002-09-24 | 2004-04-15 | Boc Edwards Technologies Ltd | Vacuum pump |
| DE102005041500A1 (en) * | 2005-09-01 | 2007-03-08 | Leybold Vacuum Gmbh | vacuum pump |
| CN204476797U (en) * | 2015-01-26 | 2015-07-15 | 核工业理化工程研究院 | A kind of rotor end-face temperature measuring equipment of towed molecular pump |
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2014
- 2014-06-05 CN CN201410246183.5A patent/CN104005968B/en not_active Expired - Fee Related
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| Publication number | Publication date |
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| CN104005968A (en) | 2014-08-27 |
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