CN103953574B - The shaft seal structure of a kind of cryopump and axle are sealed gas control system - Google Patents
The shaft seal structure of a kind of cryopump and axle are sealed gas control system Download PDFInfo
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- CN103953574B CN103953574B CN201410062603.4A CN201410062603A CN103953574B CN 103953574 B CN103953574 B CN 103953574B CN 201410062603 A CN201410062603 A CN 201410062603A CN 103953574 B CN103953574 B CN 103953574B
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- seal
- labyrinth
- gas
- shaft
- seal receptacle
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- 238000007789 sealing Methods 0.000 claims abstract description 17
- 238000011144 upstream manufacturing Methods 0.000 claims description 28
- 239000000203 mixture Substances 0.000 claims description 10
- 239000008246 gaseous mixture Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 4
- 230000008569 process Effects 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 210000004907 gland Anatomy 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
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- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The shaft seal structure of a kind of cryopump and axle are sealed gas control system, the shaft seal structure of described cryopump, it includes a seal receptacle, being provided with a labyrinth bush and between described seal receptacle and pump shaft be positioned at outside labyrinth bush and served as a contrast in the first sealing of seal receptacle axis hole by interlocking, the seal groove that the comb structure that described labyrinth bush is arranged and the first sealing lining are run out of because mutually rotating running-in by comb structure has cooperatively formed labyrinth seal pair；The outer end of described seal receptacle is provided with a band second and seals the axle sleeve type back-up ring of lining；Described seal receptacle is respectively arranged with the gas source interface that labyrinth seal described in three UNICOMs is secondary；The present invention can make cryopump for meeting in the flow process running without interruption continuously and not affecting medium purity, and the fluctuation of the inlet pressure of cryopump does not interferes with the reliability service of cryopump yet.
Description
Technical field
The shaft seal structure and the axle that the present invention relates to a kind of cryopump are sealed gas control system, belong to cryogenic mechanical equipment.
Background technology
In existing cryogenic media circulation technology flow process, it is desirable to cryopump runs without interruption continuously, require that pumped (conveying) medium purity is not affected simultaneously；The generally type of shaft sealing of cryopump is: mechanical seal and packing seal can only discontinuity use at low temperature (-196 ° of C), long-term requirement continuously cannot be met, and mechanical seal and gland sealed non-metallic material experience wear can enter in the medium of cryopump conveying, thus affect the purity of pumped (conveying) medium, owing to cryogenic media easily gasifies, molecular weight is little, easily leak outside, the most common labyrinth seal without Puffer-type also cannot reliably seal, in the case of the inlet pressure existence fluctuation of cryopump, more cannot realize sealing reliably.
Summary of the invention
It is an object of the invention to the deficiency overcoming prior art to exist, and provide a kind of in all kinds of cryogenic media circulation technology flow processs, can run without interruption continuously, and can guarantee that the shaft seal structure of the impregnable cryopump of pumped (conveying) medium purity and axle are sealed gas control system simultaneously.
It is an object of the invention to complete by following technical solution, the shaft seal structure of described cryopump, it includes that one is nested with at pump shaft the seal receptacle be close on the pump housing by axis hole, being provided with a labyrinth bush and between described seal receptacle and pump shaft be positioned at outside labyrinth bush and served as a contrast in the first sealing of seal receptacle axis hole by interlocking, the seal groove that the comb structure that described labyrinth bush is arranged and the first sealing lining are run out of because mutually rotating running-in by comb structure has cooperatively formed labyrinth seal pair；The outer end of described seal receptacle is provided with a band second and seals the axle sleeve type back-up ring of lining；Described seal receptacle is respectively arranged with the gas source interface that labyrinth seal described in three UNICOMs is secondary, and connects mixture pipe joint, labyrinth upstream pressure gas-tpe fitting on described three gas source interfaces respectively and enter blanket gas pipe joint.
Described first seals lining and second seals lining and is made by babbit material, and described second seals lining is embedded in axle sleeve type shield ring sleeve and is connected on the axle sleeve on seal receptacle Nei and connects with seal receptacle；Seal with second on described seal receptacle and be also equipped with comb structure on the axle sleeve that lining contacts, this comb structure and second seals lining 7 and has run out of seal groove because mutually rotating running-in, and cooperatively form axle can be stoped to be honored as a queen second labyrinth seal that end blanket gas leaks outside is secondary；Described connection has labyrinth upstream pressure gas-tpe fitting and connects two gas source interfaces of mixture pipe joint and be opened on the seal receptacle of the pump housing, and another connects on the seal receptacle in the outside that the gas source interface into blanket gas pipe joint is positioned at above-mentioned two gas source interface.
Described axle sleeve type back-up ring is pressed on the shaft shoulder of pump shaft by top, and described seal receptacle is bolted on pump housing shell, and makes pump shaft, axle sleeve type back-up ring labyrinth bush can make relative rotation by opposing seal seat under the drive of motor.
The axle of a kind of shaft seal structure for above-mentioned cryopump is sealed gas control system, this system specifically includes that a precise pressure-reducing valve, needle valve, three three interfaces of system the most corresponding with in shaft seal structure three gas source interfaces respectively and seals source of the gas, described sealing source of the gas is connected with described precise pressure-reducing valve by an air relief valve and filter, and enters blanket gas pipe joint by setting of described precise pressure-reducing valve from what the output of system first interface was connected to shaft seal structure；Described precise pressure-reducing valve is connected by system the second interface with the labyrinth upstream pressure gas-tpe fitting in shaft seal structure and obtains labyrinth upstream pressure；Described needle valve is connected with the mixture pipe joint in shaft seal structure by system the 3rd interface, and the pressure gone out by described needle valve control gaseous mixture discharges less than after one setting value of labyrinth upstream pressure.
The described blanket gas pressure from the output of system first interface is more than labyrinth upstream pressure 0.1 ~ 0.4bar；The pressure that described gaseous mixture goes out is less than labyrinth upstream pressure 0.1 ~ 0.2bar.
The present invention has rational in infrastructure, easy to use, reliable, can be used in all kinds of cryogenic media circulation technology flow process, can run without interruption continuously, and can guarantee the features such as pumped (conveying) medium purity is unaffected simultaneously.
Accompanying drawing explanation
Fig. 1 is shaft seal structure schematic diagram of the present invention.
Fig. 2 is the control system attachment structure figure of axle of the present invention envelope blanket gas.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention will be described in detail: shown in Fig. 1, the shaft seal structure of cryopump of the present invention, it includes that one is nested with at pump shaft 1 seal receptacle 3 be close on the pump housing 2 by axis hole, being provided with a labyrinth bush 4 and between described seal receptacle 3 and pump shaft 1 be positioned at outside labyrinth bush 4 and sealed lining 5 by rabbeting at the first of seal receptacle axis hole, the comb structure that described labyrinth bush 4 is arranged and the first sealing serve as a contrast the seal groove run out of because of mutual rotation running-in by comb structure on 5 and have cooperatively formed labyrinth seal pair 6；The outer end of described seal receptacle 3 is provided with a band second and seals the axle sleeve type back-up ring 8 of lining 7；Described seal receptacle 3 is respectively arranged with on the gas source interface of labyrinth seal pair 6 described in three UNICOMs, and described three gas source interfaces and connects mixture pipe joint 9, labyrinth upstream pressure gas-tpe fitting 10 respectively and enter blanket gas pipe joint 11.
Described first seals lining 5 and second seals lining and 7 is made by babbit material, and described second seals lining 7 is embedded in axle sleeve type back-up ring 8 and is socketed in the axle sleeve on seal receptacle 3 Nei and connects with seal receptacle 3；Seal with second on described seal receptacle 3 and be also equipped with comb structure on the axle sleeve that lining 7 contacts, this comb structure and second seals lining 7 and has run out of seal groove because mutually rotating running-in, and cooperatively forms axle can be stoped to be honored as a queen second labyrinth seal pair 21 that end blanket gas leaks outside；Described connection has labyrinth upstream pressure gas-tpe fitting 10 and connects two gas source interfaces of mixture pipe joint 9 and be opened on the seal receptacle 3 of the pump housing, and another connects on the seal receptacle 3 in the outside that the gas source interface into blanket gas pipe joint 11 is positioned at above-mentioned two gas source interface.
Axle sleeve type back-up ring 8 of the present invention is pressed on the shaft shoulder of pump shaft 1 by top by a gasket seal 20, described seal receptacle 3 is bolted on pump housing shell 2, and makes pump shaft 1, axle sleeve type back-up ring 8, labyrinth bush 4 can make relative rotation by opposing seal seat 3 under the drive of motor.
Pump shaft 1 is under the rotation of motor, labyrinth bush 4, axle sleeve type back-up ring 8 and gasket seal 20 is driven to rotate in the seal receptacle 3 being embedded with the first sealing lining 5, comb is had on labyrinth bush 4, on the first sealing lining 5 of seal receptacle 3, seal groove is run out of after rotating running-in, form labyrinth seal pair with the comb of labyrinth bush 4, stop impeller side high-pressure medium to leak outside.
Shown in Fig. 2, the axle of the shaft seal structure for above-mentioned cryopump of the present invention is sealed gas control system, this system specifically includes that a precise pressure-reducing valve 12, needle valve 13, three are distinguished the most corresponding three interfaces of system 14,15,16 respectively and seal source of the gas 17 with in shaft seal structure three gas source interfaces, described sealing source of the gas 17 is connected with described precise pressure-reducing valve 12 by an air relief valve 18 and filter 19, and enters blanket gas pipe joint 11 by setting of described precise pressure-reducing valve 12 from what system first interface 14 output was connected to shaft seal structure；Described precise pressure-reducing valve 12 is connected by system the second interface 15 with the labyrinth upstream pressure gas-tpe fitting 10 in shaft seal structure and obtains labyrinth upstream pressure；Described needle valve 13 is connected with the mixture pipe joint 9 in shaft seal structure by system the 3rd interface 16, and is controlled pressure that gaseous mixture goes out less than discharge after one setting value of labyrinth upstream pressure by described needle valve 13；Fig. 2 also have labyrinth upstream pressure table 22, blanket gas enter Pressure gauge 23, mixture pressure table 24.
The described blanket gas pressure from system first interface 14 output is more than labyrinth upstream pressure 0.1 ~ 0.4bar；The pressure that described gaseous mixture goes out is less than labyrinth upstream pressure 0.1 ~ 0.2bar.
Labyrinth of the present invention upstream pressure is the pressure drawn by wheel backface, and representative is impeller side pressure medium, and it is as signal source；Sealing source of the gas and first pass around air relief valve 18 and filter 19, the pressure that the setting output blanket gas through precise pressure-reducing valve 12 enters is more than labyrinth upstream pressure.And, precise pressure-reducing valve 12 is under the effect in upstream pressure signal source, labyrinth, and the blanket gas entrance pressure power of output keeps a steady state value all the time with labyrinth upstream pressure, namely the pressure that blanket gas enters fluctuates along with labyrinth upstream pressure fluctuations.Blanket gas enter enter axle envelope seat 3 in do sealing use, impeller side leakage high-pressure medium through labyrinth reduce pressure after with blanket gas enter gaseous mixture go out this pipe joint draw axle envelope position reach balance, the mixed gas of generation by mixed gas go out discharge., it is sealed in gas control system at axle meanwhile, controls mixed gas by needle valve 13 and go out pressure less than one setting value of labyrinth upstream pressure.Sealed by reliable axle achieved above, and pressure reduction may insure that in range of set value blanket gas does not enter impeller working side, does not interferes with purity.Higher for purity requirement, sealing source of the gas can reach high-purity requirement quoted from the medium of cryopump conveying own.
Claims (4)
1. the shaft seal structure of a cryopump, it includes that one is nested with at pump shaft the seal receptacle be close on the pump housing by axis hole, it is characterized in that being provided with a labyrinth bush and between described seal receptacle and pump shaft is positioned at outside labyrinth bush and is served as a contrast in the first sealing of seal receptacle axis hole by interlocking, the seal groove that the comb structure that described labyrinth bush is arranged and the first sealing lining are run out of because mutually rotating running-in by comb structure has cooperatively formed labyrinth seal pair；The outer end of described seal receptacle is provided with a band second and seals the axle sleeve type back-up ring of lining；Described seal receptacle is respectively arranged with the gas source interface that labyrinth seal described in three UNICOMs is secondary, and connects mixture pipe joint, labyrinth upstream pressure gas-tpe fitting on described three gas source interfaces respectively and enter blanket gas pipe joint；
Described first seals lining and second seals lining (7) and is made by babbit material, and described second seals lining is embedded in axle sleeve type shield ring sleeve and is connected on the axle sleeve on seal receptacle Nei and connects with seal receptacle (3)；Seal with second on described seal receptacle and be also equipped with comb structure on the axle sleeve that lining contacts, this comb structure and second seals lining and has run out of seal groove because mutually rotating running-in, and cooperatively form axle can be stoped to be honored as a queen second labyrinth seal that end blanket gas leaks outside is secondary；Described connection has labyrinth upstream pressure gas-tpe fitting and connects two gas source interfaces of mixture pipe joint and be opened on the seal receptacle of the pump housing, and another connects on the seal receptacle in the outside that the gas source interface into blanket gas pipe joint is positioned at above-mentioned two gas source interface.
The shaft seal structure of cryopump the most according to claim 1, it is characterized in that axle sleeve type back-up ring is pressed on the shaft shoulder of pump shaft by top, described seal receptacle is bolted on pump housing shell, and makes pump shaft, axle sleeve type back-up ring, labyrinth bush can make relative rotation by opposing seal seat under the drive of motor.
3. one kind is sealed gas control system for the axle of the shaft seal structure of cryopump described in claim 1, it is characterized in that this system specifically includes that a precise pressure-reducing valve, needle valve, three three interfaces of system the most corresponding with in shaft seal structure three gas source interfaces respectively and seals source of the gas, described sealing source of the gas is connected with described precise pressure-reducing valve by an air relief valve and filter, and enters blanket gas pipe joint by setting of described precise pressure-reducing valve from what the output of system first interface was connected to shaft seal structure；Described precise pressure-reducing valve is connected by system the second interface with the labyrinth upstream pressure gas-tpe fitting in shaft seal structure and obtains labyrinth upstream pressure；Described needle valve is connected with the mixture pipe joint in shaft seal structure by system the 3rd interface, and the pressure gone out by described needle valve control gaseous mixture discharges less than after one setting value of labyrinth upstream pressure.
The most according to claim 3, axle is sealed gas control system, it is characterised in that the described blanket gas pressure from the output of system first interface is more than labyrinth upstream pressure 0.1 ~ 0.4bar；The pressure that described gaseous mixture goes out is less than labyrinth upstream pressure 0.1 ~ 0.2bar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410062603.4A CN103953574B (en) | 2014-02-25 | 2014-02-25 | The shaft seal structure of a kind of cryopump and axle are sealed gas control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410062603.4A CN103953574B (en) | 2014-02-25 | 2014-02-25 | The shaft seal structure of a kind of cryopump and axle are sealed gas control system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103953574A CN103953574A (en) | 2014-07-30 |
| CN103953574B true CN103953574B (en) | 2016-11-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410062603.4A Active CN103953574B (en) | 2014-02-25 | 2014-02-25 | The shaft seal structure of a kind of cryopump and axle are sealed gas control system |
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| CN (1) | CN103953574B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108644120B (en) * | 2018-06-25 | 2024-01-05 | 杭州新亚低温科技有限公司 | Self-balancing multistage cryogenic pump |
| CN108626403A (en) * | 2018-06-25 | 2018-10-09 | 杭州新亚低温科技有限公司 | A kind of twin-stage phase transformation labyrinth seal structure |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201152278Y (en) * | 2007-08-31 | 2008-11-19 | 孙剑琨 | Micropressure labyrinth seal energy saving pump |
| CN202012501U (en) * | 2010-12-15 | 2011-10-19 | 南通大通宝富风机有限公司 | Combined type shaft end seal |
| CN202612193U (en) * | 2012-06-15 | 2012-12-19 | 阳谷祥光铜业有限公司 | Liquid argon pump and hydrogen-free argon generating system |
| CN202811475U (en) * | 2012-10-18 | 2013-03-20 | 武汉钢铁(集团)公司 | Sealing device applied to low temperature centrifugal liquid pump |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11280687A (en) * | 1998-03-25 | 1999-10-15 | Mitsubishi Heavy Ind Ltd | High temperature pump |
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2014
- 2014-02-25 CN CN201410062603.4A patent/CN103953574B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201152278Y (en) * | 2007-08-31 | 2008-11-19 | 孙剑琨 | Micropressure labyrinth seal energy saving pump |
| CN202012501U (en) * | 2010-12-15 | 2011-10-19 | 南通大通宝富风机有限公司 | Combined type shaft end seal |
| CN202612193U (en) * | 2012-06-15 | 2012-12-19 | 阳谷祥光铜业有限公司 | Liquid argon pump and hydrogen-free argon generating system |
| CN202811475U (en) * | 2012-10-18 | 2013-03-20 | 武汉钢铁(集团)公司 | Sealing device applied to low temperature centrifugal liquid pump |
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| CN103953574A (en) | 2014-07-30 |
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