CN103941106B - Electromagnetic field near-field scanning device and scanning method - Google Patents
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Abstract
Description
技术领域technical field
本发明涉及电磁场检测技术领域，特别是涉及电磁场近场扫描装置与扫描方法。The invention relates to the technical field of electromagnetic field detection, in particular to an electromagnetic field near-field scanning device and a scanning method.
背景技术Background technique
随着集成技术的日益先进，电子产品逐渐出现了精小简约的趋势，越来越多的产品采用多个电路芯片安放在一个小电路板上，甚至是多个芯片安放在同一个集成的模块中。鉴于这种集成趋势以及电子产品EMI控制要求的逐渐提高，元件级以及小范围的PCB的电磁兼容问题成为人们关注的热点之一，如一个手机板的EMC设计，一个混合集成电路的EMC设计等等。为了支撑这种小尺寸高集成的电子产品的EMC设计，需要对各种重要元件(如集成电路、芯片)以及PCB的局部区域进行电磁场近场扫描，以便获得局域的电磁场分布情况，为下一步的电磁兼容设计提供验证和测试。With the increasingly advanced integration technology, electronic products gradually show a trend of compactness and simplicity. More and more products use multiple circuit chips to be placed on a small circuit board, or even multiple chips are placed on the same integrated module. middle. In view of this integration trend and the gradual increase in the EMI control requirements of electronic products, the electromagnetic compatibility of component level and small-scale PCB has become one of the hot spots of people's attention, such as the EMC design of a mobile phone board, the EMC design of a hybrid integrated circuit, etc. Wait. In order to support the EMC design of such small-sized and highly integrated electronic products, it is necessary to perform near-field scanning of electromagnetic fields on various important components (such as integrated circuits, chips) and local areas of PCB in order to obtain the local electromagnetic field distribution. One-step EMC design provides verification and testing.
目前，电磁场近场扫描的技术主要针对大尺寸的检测对象，如无线局域网、蜂窝通讯等等空间通讯信号。总的来说，主要技术大致可以分为两种，一种采用尺寸较大的天线，另一种采用天线阵列。上述两种技术针对的检测对象尺寸在几十厘米，甚至更大的尺寸。这两种技术都意味着其空间分辨率将受到限制，同时其位移的精度和步长也必然较为粗糙，若需实现小尺寸检测对象内部较高精度的空间定位，则其空间位置控制平台必须要求很高，其实现复杂，且实现成本高昂。At present, the technology of electromagnetic field near-field scanning is mainly aimed at large-sized detection objects, such as space communication signals such as wireless local area network and cellular communication. Generally speaking, the main technologies can be roughly divided into two types, one uses larger antennas, and the other uses antenna arrays. The above two technologies are aimed at detecting objects whose size is tens of centimeters or even larger. Both of these technologies mean that their spatial resolution will be limited, and their displacement accuracy and step size will inevitably be relatively rough. If it is necessary to achieve high-precision spatial positioning inside a small-sized detection object, its spatial position control platform must It is demanding and its implementation complex and expensive to implement.
发明内容Contents of the invention
基于此，有必要针对现有电磁场近场扫描装置实现小型电磁场近场扫描结构复杂、成本高昂的问题，提供一种结构简单、扫描精度高且成本低廉的电磁场近场扫描装置与扫描方法。Based on this, it is necessary to provide an electromagnetic near-field scanning device and scanning method with a simple structure, high scanning accuracy and low cost for the existing electromagnetic near-field scanning device to realize the problem of complex structure and high cost of small-scale electromagnetic near-field scanning.
一种电磁场近场扫描装置，包括探头、空间移动平台、显微摄像装置、信号分析装置和计算机；An electromagnetic field near-field scanning device, including a probe, a space mobile platform, a microscopic camera device, a signal analysis device and a computer;
所述探头和所述计算机分别与所述信号分析装置连接，所述空间移动平台和所述显微摄像装置分别与所述计算机连接，所述探头固定于所述空间移动平台；The probe and the computer are respectively connected to the signal analysis device, the space mobile platform and the microscopic imaging device are respectively connected to the computer, and the probe is fixed to the space mobile platform;
所述计算机发送指令，控制所述空间移动平台空间移动，固定于所述空间移动平台的探头移动，逐点扫描待测物品的电磁场近场，实时采集待测物品电磁场近场的电信号数据，并将采集到的电信号数据发送至所述信号分析装置，所述信号分析装置分析所述电信号数据，获取信号测量数据，并将所述信号测量数据发送至所述计算机，所述显微摄像装置监测所述探头与所述待测物品之间的距离，并将监测获得的距离数据发送至所述计算机，所述计算机根据所述信号测量数据和所述距离数据，处理获得待测物品的电磁场近场扫描结果。The computer sends instructions to control the spatial movement of the space mobile platform, the probe fixed on the space mobile platform moves, scans the near field of the electromagnetic field of the item to be tested point by point, and collects the electrical signal data of the near field of the electromagnetic field of the item to be tested in real time, and send the collected electrical signal data to the signal analysis device, the signal analysis device analyzes the electrical signal data, acquires signal measurement data, and sends the signal measurement data to the computer, the microscope The camera device monitors the distance between the probe and the object to be tested, and sends the distance data obtained by monitoring to the computer, and the computer processes and obtains the object to be tested according to the signal measurement data and the distance data Electromagnetic field near-field scanning results.
一种如权利要求上述的电磁场近场扫描装置的扫描方法，包括步骤：A scanning method of the electromagnetic field near-field scanning device as claimed in the above claims, comprising the steps of:
接收计算机位移控制指令，并根据所述位移控制指令控制空间移动平台移动；receiving computer displacement control instructions, and controlling the movement of the space mobile platform according to the displacement control instructions;
逐点扫描待测物品的电磁场近场，并实时采集待测物品电磁场近场的电信号数据；Scan the near field of the electromagnetic field of the item to be tested point by point, and collect the electrical signal data of the near field of the electromagnetic field of the item to be tested in real time;
将所述待测物品电磁场近场的电信号数据发送至所述信号分析装置，获得获取信号测量数据；Sending the electrical signal data of the near-field electromagnetic field of the item to be tested to the signal analysis device to obtain signal measurement data;
监测所述探头与所述待测物品之间的距离，获得距离数据；monitoring the distance between the probe and the item to be tested to obtain distance data;
将所述信号测量数据和所述距离数据实时发送至所述计算机，处理获得待测物品的电磁场近场扫描结果。The signal measurement data and the distance data are sent to the computer in real time, and the electromagnetic field near-field scanning results of the object to be tested are obtained through processing.
本发明电磁场近场扫描装置包括探头、空间移动平台、显微摄像装置、信号分析装置和计算机，探头固定于空间移动平台，空间移动平台根据计算机的指令移动，以使探头移动，探头逐点扫描待测物品的电磁场近场，获得电信号数据(例如电压数据、电流数据等)，信号分析装置分析电信号数据获得测量数据，同时显微摄像装置精准监测探头在移动过程中与待测物品之间的距离，获得距离数据，计算机根据测量数据和距离数据处理获得待测物品的电磁场近场扫描结果。另外本发明还提供上述电磁场近场扫描装置的扫描方法。本发明电磁场近场扫描装置结构简单，通过探头实现对待测物品的电磁场近场数据的准确采集，通过空间移动平台和计算机协调工作实现对探头位置的精准控制，通过显微摄像装置精准监测探头与待测物品之间的距离，从而能够精准获得待测物品的电磁场近场扫描结果，另外，探头在扫描待测物品电磁场近场时，采用逐点扫描，实时采集传输，即每一次探头移动，均采集一次数据并及时将采集到的数据发送至信号分析装置，避免扫描过程中，扫描装置自身对待测物品电磁场近场的影响，以及数据采集延时对信号准确度的影响，从而更进一步提高了扫描的精度和扫描结果的准确度。The electromagnetic field near-field scanning device of the present invention includes a probe, a space mobile platform, a microscopic camera device, a signal analysis device and a computer, the probe is fixed on the space mobile platform, and the space mobile platform moves according to the instructions of the computer, so that the probe moves, and the probe scans point by point The near field of the electromagnetic field of the item to be tested is used to obtain electrical signal data (such as voltage data, current data, etc.), the signal analysis device analyzes the electrical signal data to obtain measurement data, and the microscopic camera device accurately monitors the distance between the probe and the item to be tested during the movement process. The distance between them is obtained, and the distance data is obtained, and the computer obtains the electromagnetic field near-field scanning result of the object to be tested according to the measurement data and the distance data processing. In addition, the present invention also provides a scanning method of the above-mentioned electromagnetic field near-field scanning device. The electromagnetic field near-field scanning device of the present invention has a simple structure, and the accurate collection of the electromagnetic field near-field data of the object to be tested is realized through the probe, the precise control of the position of the probe is realized through the coordinated work of the space mobile platform and the computer, and the precise monitoring of the probe and the probe is carried out through the microscopic camera device. The distance between the items to be tested can accurately obtain the near-field scanning results of the electromagnetic field of the item to be tested. In addition, when the probe scans the near-field electromagnetic field of the item to be tested, it uses point-by-point scanning to collect and transmit in real time, that is, every time the probe moves, Collect data once and send the collected data to the signal analysis device in time to avoid the influence of the scanning device itself on the near field of the electromagnetic field of the object to be tested during the scanning process and the influence of data acquisition delay on the signal accuracy, thereby further improving The precision of the scan and the accuracy of the scan results.
附图说明Description of drawings
图1为本发明电磁场近场扫描装置第一个实施例的结构示意图；Fig. 1 is the schematic structural diagram of the first embodiment of the electromagnetic field near-field scanning device of the present invention;
图2为本发明电磁场近场扫描装置第二个实施例的结构示意图；Fig. 2 is a schematic structural diagram of a second embodiment of the electromagnetic field near-field scanning device of the present invention;
图3为本发明电磁场近场扫描装置的扫描方法第一个实施例的流程示意图；3 is a schematic flow chart of the first embodiment of the scanning method of the electromagnetic field near-field scanning device of the present invention;
图4为本发明电磁场近场扫描装置的扫描方法第二个实施例的流程示意图。FIG. 4 is a schematic flowchart of a second embodiment of the scanning method of the electromagnetic near-field scanning device of the present invention.
具体实施方式detailed description
为了使本发明的目的、技术方案及优点更加清楚明白，以下根据附图及实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施仅仅用以解释本发明，并不限定本发明。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below according to the drawings and embodiments. It should be understood that the specific implementations described here are only used to explain the present invention, not to limit the present invention.
如图1所示，一种电磁场近场扫描装置，包括探头100、空间移动平台200、显微摄像装置300、信号分析装置400和计算机500；As shown in Figure 1, an electromagnetic field near-field scanning device includes a probe 100, a space mobile platform 200, a microscopic imaging device 300, a signal analysis device 400 and a computer 500;
所述探头100和所述计算机500分别与所述信号分析装置400连接，所述空间移动平台200和所述显微摄像装置300分别与所述计算机500连接，所述探头100固定于所述空间移动平台200；The probe 100 and the computer 500 are respectively connected to the signal analysis device 400, the space mobile platform 200 and the microscopic imaging device 300 are respectively connected to the computer 500, and the probe 100 is fixed in the space mobile platform 200;
所述计算机500发送指令，控制所述空间移动平台200空间移动，固定于所述空间移动平台200的探头100移动，逐点扫描待测物品的电磁场近场，实时采集待测物品电磁场近场的电信号数据，并将采集到的电信号数据发送至所述信号分析装置400，所述信号分析装置400分析所述电信号数据，获取信号测量数据，并将所述信号测量数据发送至所述计算机500，所述显微摄像装置300监测所述探头100与所述待测物品之间的距离，并将监测获得的距离数据发送至所述计算机500，所述计算机500根据所述信号测量数据和所述距离数据，处理获得待测物品的电磁场近场扫描结果。The computer 500 sends instructions to control the spatial movement of the space mobile platform 200, the probe 100 fixed on the space mobile platform 200 moves, scans the near field of the electromagnetic field of the item to be tested point by point, and collects the near field of the electromagnetic field of the item to be tested in real time. electrical signal data, and send the collected electrical signal data to the signal analysis device 400, the signal analysis device 400 analyzes the electrical signal data, acquires signal measurement data, and sends the signal measurement data to the computer 500, the micro camera device 300 monitors the distance between the probe 100 and the object to be tested, and sends the distance data obtained by monitoring to the computer 500, and the computer 500 measures the data according to the signal and the distance data are processed to obtain an electromagnetic field near-field scanning result of the object to be tested.
本发明电磁场近场扫描装置包括探头、空间移动平台、显微摄像装置、信号分析装置和计算机，探头固定于空间移动平台，空间移动平台根据计算机的指令移动，以使探头移动，探头逐点扫描待测物品的电磁场近场，获得电信号数据(例如电压数据、电流数据等)，信号分析装置分析电信号数据获得测量数据，同时显微摄像装置精准监测探头在移动过程中与待测物品之间的距离，获得距离数据，计算机根据测量数据和距离数据处理获得待测物品的电磁场近场扫描结果。本发明电磁场近场扫描装置结构简单，通过探头实现对待测物品的电磁场近场数据的准确采集，通过空间移动平台和计算机协调工作实现对探头位置的精准控制，通过显微摄像装置精准监测探头与待测物品之间的距离，从而能够精准获得待测物品的电磁场近场扫描结果，另外，探头在扫描待测物品电磁场近场时，采用逐点扫描，实时采集传输，即每一次探头移动，均采集一次数据并及时将采集到的数据发送至信号分析装置，避免扫描过程中，扫描装置自身对待测物品电磁场近场的影响，以及数据采集延时对信号准确度的影响，从而更进一步提高了扫描的精度和扫描结果的准确度。The electromagnetic field near-field scanning device of the present invention includes a probe, a space mobile platform, a microscopic camera device, a signal analysis device and a computer, the probe is fixed on the space mobile platform, and the space mobile platform moves according to the instructions of the computer, so that the probe moves, and the probe scans point by point The near field of the electromagnetic field of the item to be tested is used to obtain electrical signal data (such as voltage data, current data, etc.), the signal analysis device analyzes the electrical signal data to obtain measurement data, and the microscopic camera device accurately monitors the distance between the probe and the item to be tested during the movement process. The distance between them is obtained, and the distance data is obtained, and the computer obtains the electromagnetic field near-field scanning result of the object to be tested according to the measurement data and the distance data processing. The electromagnetic field near-field scanning device of the present invention has a simple structure, and the accurate collection of the electromagnetic field near-field data of the object to be tested is realized through the probe, the precise control of the position of the probe is realized through the coordinated work of the space mobile platform and the computer, and the precise monitoring of the probe and the probe is carried out through the microscopic camera device. The distance between the items to be tested can accurately obtain the near-field scanning results of the electromagnetic field of the item to be tested. In addition, when the probe scans the near-field electromagnetic field of the item to be tested, it uses point-by-point scanning to collect and transmit in real time, that is, every time the probe moves, Collect data once and send the collected data to the signal analysis device in time to avoid the influence of the scanning device itself on the near field of the electromagnetic field of the object to be tested during the scanning process and the influence of data acquisition delay on the signal accuracy, thereby further improving The precision of the scan and the accuracy of the scan results.
如图2所示，在其中一个实施例中，所述空间移动平台200包括控制器210、多个空间轴线步进电机220和固定平台230，所述控制器310分别与所述计算机500、以及所述多个空间轴线步进电机220连接，所述多个空间轴线步进电机220分别固定于所述固定平台230；As shown in Figure 2, in one of the embodiments, the space mobile platform 200 includes a controller 210, a plurality of space axis stepping motors 220 and a fixed platform 230, the controller 310 is connected to the computer 500, and The multiple spatial axis stepping motors 220 are connected, and the multiple spatial axis stepping motors 220 are respectively fixed on the fixed platform 230;
所述控制器210用于接收所述计算机500的控制指令，并根据所述计算机500的控制指令控制所述多个步进电机220转动，以使所述固定平台230移动，所述固定平台230用于固定所述探头100。The controller 210 is used to receive the control instructions of the computer 500, and control the rotation of the multiple stepping motors 220 according to the control instructions of the computer 500, so that the fixed platform 230 moves, and the fixed platform 230 Used to fix the probe 100.
在本实施例中，空间移动平台包括有控制器、多个空间轴线步进电机和固定平台，控制器接收计算机的控制指令，控制多个空间轴线步进电机转动，以控制整个固定平台移动，而固定平台上固定有探头，从而实现探头移动的控制。另外多个空间轴线步进电机来控制整个移动，能够全方位，多角度的位移控制，确保位移的精准。具体来说，多个空间轴线步进电机包括X轴线步进电机、Y轴线步进电机和Z轴线步进电机以及倾斜角度R步进电机，实现探头在三维甚至四维空间的精准位移。In this embodiment, the space mobile platform includes a controller, multiple space axis stepping motors and a fixed platform, and the controller receives control instructions from the computer to control the rotation of multiple space axis stepping motors to control the movement of the entire fixed platform. And the probe is fixed on the fixed platform, so as to realize the control of the movement of the probe. In addition, multiple spatial axis stepping motors control the entire movement, which can control the displacement in all directions and at multiple angles to ensure the accuracy of displacement. Specifically, multiple spatial axis stepper motors include X-axis stepper motors, Y-axis stepper motors, Z-axis stepper motors and tilt angle R stepper motors to achieve precise displacement of the probe in three-dimensional or even four-dimensional space.
如图2所示，在其中一个实施例中，所述电磁场近场扫描装置还包括固定底座600，所述空间移动平台200固定于所述固定底座600。As shown in FIG. 2 , in one embodiment, the electromagnetic near-field scanning device further includes a fixed base 600 , and the space mobile platform 200 is fixed to the fixed base 600 .
在本实施例中，本发明电磁场近场扫描装置增设有固定底座，空间移动平台固定于固定底座上，固定底座是用于支撑固定整个空间移动平台的，便于空间移动平台平稳放置，避免在扫描过程空间移动平台自身的移动带来扫描误差，确保扫描结果的精准。In this embodiment, the electromagnetic field near-field scanning device of the present invention is additionally equipped with a fixed base, and the space mobile platform is fixed on the fixed base. The movement of the process space mobile platform itself brings scanning errors, ensuring the accuracy of scanning results.
如图2所示，在其中一个实施例中，电磁场近场扫描装置还包括样品台700，所述样品台700固定于所述固定底座600，且所述样品台700与所述探头100相对间隔设置，所述样品台700用于承载所述待测物品。As shown in Figure 2, in one of the embodiments, the electromagnetic field near-field scanning device also includes a sample stage 700, the sample stage 700 is fixed on the fixed base 600, and the sample stage 700 is relatively spaced from the probe 100 Setting, the sample stage 700 is used to carry the object to be tested.
在本实施例中，本发明电磁场近场扫描装置增设有样品台，样品台用于承载所述待测物品，避免在扫描过程，意外导致待测物品的移动导致扫描误差，确保扫描结果的精准。In this embodiment, the electromagnetic field near-field scanning device of the present invention is additionally provided with a sample stage, which is used to carry the item to be tested, so as to avoid scanning errors caused by accidental movement of the item to be tested during the scanning process, and ensure the accuracy of the scanning result .
如图2所示，在其中一个实施例中，还包括显微摄像装置固定架800，所述显微摄像装置固定架800固定于所述固定底座600，所述显微摄像装置固定架800用于固定所述显微摄像装置300。As shown in Figure 2, in one of the embodiments, it also includes a microscopic imaging device fixing frame 800, and the microscopic imaging device fixing frame 800 is fixed on the fixed base 600, and the microscopic imaging device fixing frame 800 is used to fix the microscopic imaging device 300 .
正如之前所述，显微摄像装置是用于监测探头与待测物品之间的距离，并将监测获得的距离数据发送至计算机。为了确保监测结果的准确，在本实施例中，本发明电磁场近场扫描装置增设显微摄像装置固定架，用于固定所述显微摄像装置。另外，可以理解，可以根据实际应用的需要，将显微摄像装置在显微摄像装置固定架移动到所需要的位置后再将其固定。As mentioned before, the micro camera device is used to monitor the distance between the probe and the object to be tested, and send the distance data obtained by monitoring to the computer. In order to ensure the accuracy of the monitoring results, in this embodiment, the electromagnetic field near-field scanning device of the present invention is provided with a microscopic imaging device fixing frame for fixing the microscopic imaging device. In addition, it can be understood that the microscopic imaging device can be fixed after the microscopic imaging device fixing frame moves to a required position according to the needs of practical applications.
在其中一个实施例中，所述信号分析装置为频谱分析仪、网络分析仪或示波器。In one of the embodiments, the signal analysis device is a spectrum analyzer, a network analyzer or an oscilloscope.
在其中一个实施例中，所述显微摄像装置为CCD显微摄像头。In one of the embodiments, the micro camera device is a CCD micro camera.
在其中一个实施例中，所述多个空间轴线步进电机包括X轴线步进电机、Y轴线步进电机和Z轴线步进电机，其中，X轴线、Y轴线和Z轴线分别为三维空间坐标轴的三个基准方向轴线。In one of the embodiments, the plurality of spatial axis stepper motors include X-axis stepper motors, Y-axis stepper motors and Z-axis stepper motors, wherein the X-axis, Y-axis and Z-axis are three-dimensional space coordinates The axis of the three reference orientations of the axis.
为了准确定位三维空间中某点的位置，通常会使用三维空间坐标轴，例如某点的位置为(X，Y，Z)利用三个坐标值来实现精准定位。在三维空间坐标轴中，X轴线、Y轴线和Z轴线分别为三个基准方向的轴线。In order to accurately locate the position of a certain point in the three-dimensional space, the coordinate axes of the three-dimensional space are usually used. For example, the position of a certain point is (X, Y, Z) and three coordinate values are used to achieve precise positioning. In the three-dimensional space coordinate axes, the X-axis, the Y-axis and the Z-axis are axes of three reference directions respectively.
为了详细解释本发明电磁场近场扫描装置中各个组成部分的功能，下面将分别引入具体实施例详细介绍各个组成部分的在实际应用中的优选实施例以及其效果。In order to explain in detail the functions of each component in the electromagnetic field near-field scanning device of the present invention, the following will respectively introduce specific embodiments to introduce in detail the preferred embodiment of each component in practical application and its effect.
探头probe
探头用于探测待测样品上方或者空间某一位置的电磁场强度，可以是电场或者磁场某一个分量。探头的设计可以多样化，比如，单方向的探测探头，双方向的探测探头。可以是一个基于容性耦合原理的电场探头，电场的方向可以是Ex，Ey，Ez，探头获取的是电压信号；也可以是一个基于感性耦合原理的磁场探头，比如Hx，Hy，Hz等，探头获取的是电流信号；原则上可以安装各种不同类型的探头，以实现不同的探测，如霍尔元件或者超导元件等等。探头的设计与探头的性能与功能有关，对后续的数据处理也有一定的影响。采用磁性材料感应电磁场的时候需要特别注意磁滞效应。探头与频谱仪进行连接，因此在接口方面必须进行一定的设计，比如，探头的接口采用SMA(Sub-Miniature-A，无线天线接口)头。The probe is used to detect the strength of the electromagnetic field above the sample to be tested or at a certain position in space, which can be a certain component of the electric field or magnetic field. The design of the probe can be diversified, for example, a single-directional detection probe, a double-directional detection probe. It can be an electric field probe based on the principle of capacitive coupling, the direction of the electric field can be Ex, Ey, Ez, and the probe obtains a voltage signal; it can also be a magnetic field probe based on the principle of inductive coupling, such as Hx, Hy, Hz, etc. The probes acquire current signals; in principle, various types of probes can be installed to achieve different detections, such as Hall elements or superconducting elements, etc. The design of the probe is related to the performance and function of the probe, and also has a certain influence on the subsequent data processing. When using magnetic materials to induce electromagnetic fields, special attention should be paid to the hysteresis effect. The probe is connected with the spectrum analyzer, so the interface must be designed to a certain extent. For example, the interface of the probe adopts an SMA (Sub-Miniature-A, wireless antenna interface) head.
空间移动平台space mobile platform
空间移动平台用于控制探头在空间的三维位置甚至角度，按照目前通用型的精小空间移动平台规格，三个维度的控制可以达到至少10微米的控制精度，而角度的控制可以达到0.1度，空间移动平台以及角度控制平台事实上包括移动架、步进电机、控制器等部分。空间移动平台的控制主要通过控制器以及步进电机实现。控制器与计算机连接，步进电机安装在移动平台上，通过丝杆控制台子的移动。移动平台的设计方案需要考虑到样品台的放置，以及与探头的连接。移动平台以及样品台需要固定在一个较为稳定的平台上，移动平台与探头的连接需要用螺丝或者其他方式来固定。The space mobile platform is used to control the three-dimensional position and even the angle of the probe in space. According to the current general-purpose small space mobile platform specifications, the three-dimensional control can achieve a control accuracy of at least 10 microns, and the angle control can reach 0.1 degrees. In fact, the space mobile platform and the angle control platform include mobile frames, stepping motors, controllers and other parts. The control of the space mobile platform is mainly realized by a controller and a stepping motor. The controller is connected with the computer, the stepper motor is installed on the mobile platform, and the movement of the table is controlled by the screw rod. The design of the mobile platform needs to take into account the placement of the sample stage and the connection to the probe. The mobile platform and the sample stage need to be fixed on a relatively stable platform, and the connection between the mobile platform and the probe needs to be fixed by screws or other methods.
显微摄装置microscope
显微摄装置优选的为CCD显微摄像头，CCD显微摄像头的设计主要是为了监控样品与探头的距离，因此，为了精确获得所监控的距离，需要一个带刻度或者十字线标示的CCD显微摄像头，摄像头在使用过程中位置固定。为了实现系统级的控制，CCD显微摄像头与计算机通过USB口连接，实时获得监控图像，以便观察探头与样品之间的距离。The preferred microscopic camera device is a CCD microscopic camera. The design of the CCD microscopic camera is mainly to monitor the distance between the sample and the probe. Therefore, in order to accurately obtain the monitored distance, a CCD microscopic camera with a scale or a cross mark Camera, the position of the camera is fixed during use. In order to achieve system-level control, the CCD microscopic camera is connected to the computer through the USB port to obtain monitoring images in real time, so as to observe the distance between the probe and the sample.
信号分析装置Signal analysis device
信号分析装置可以为括频谱分析仪、网络分析仪或示波器。频谱分析仪可以用来直接获取频域信号，网络分析仪可以用来获取相位信号，而示波器可以用来获取时域信号，不同的配置可以实现不同的探测量。为了实现更高精度的测试，可以在信号分析装置前面加装前置放大器。为了实现低噪的信号测试，需要对信号分析装置的带宽等进行设置。为了实现数据的自动化采集，需要通过USB、Lan或者GPIB接口将信号分析装置与计算机进行连接。The signal analysis device may include a spectrum analyzer, a network analyzer or an oscilloscope. Spectrum analyzers can be used to directly obtain frequency domain signals, network analyzers can be used to obtain phase signals, and oscilloscopes can be used to obtain time domain signals. Different configurations can achieve different detection quantities. In order to achieve higher precision testing, a preamplifier can be installed in front of the signal analysis device. In order to realize a low-noise signal test, it is necessary to set the bandwidth of the signal analysis device and the like. In order to realize the automatic collection of data, it is necessary to connect the signal analysis device with the computer through USB, Lan or GPIB interface.
计算机computer
计算机用于对整个系统的控制以及数据的后处理。系统的控制包括对探头位置的控制，以及从信号分析装置(频谱分析仪、网络分析仪、示波器等)获取测量数据。计算机系统对探头位置的控制通过数据线向控制器发送指令，控制器根据指令向步进电机发送脉冲，步进电机再根据脉冲进行转动。计算机系统与控制器的通讯通过一定的协议完成，比GPIB，LAN等等均可以实现。同理，计算机与信号分析装置(频谱分析仪、网络分析仪、示波器等)的连接可以通过GPIB、LAN、或者USB口来实现。与此同时，为了实现系统级的控制，CCD显微摄像头与计算机通过USB口连接，实时获得监控图像，以便观察探头与样品之间的距离。同时，在计算机终端可以通过软件对整个系统实现控制，包括移动平台的移动模式、与信号分析装置的连接、数据采集，以及监控探头与样品之间的距离，甚至包括数据后处理等等。The computer is used for the control of the whole system and post-processing of the data. The control of the system includes the control of the position of the probe and the acquisition of measurement data from the signal analysis device (spectrum analyzer, network analyzer, oscilloscope, etc.). The computer system controls the position of the probe and sends instructions to the controller through the data line. The controller sends pulses to the stepping motor according to the instructions, and the stepping motor rotates according to the pulses. The communication between the computer system and the controller is completed through a certain protocol, such as GPIB, LAN, etc. can be realized. Similarly, the connection between the computer and the signal analysis device (spectrum analyzer, network analyzer, oscilloscope, etc.) can be realized through GPIB, LAN, or USB ports. At the same time, in order to achieve system-level control, the CCD microscopic camera is connected to the computer through the USB port to obtain monitoring images in real time, so as to observe the distance between the probe and the sample. At the same time, the computer terminal can control the entire system through software, including the movement mode of the mobile platform, the connection with the signal analysis device, data collection, and the distance between the monitoring probe and the sample, and even data post-processing, etc.
如图3所示，一种如上述的电磁场近场扫描装置的扫描方法，包括步骤：As shown in Figure 3, a scanning method of the above-mentioned electromagnetic field near-field scanning device includes steps:
S100：接收计算机位移控制指令，并根据所述位移控制指令控制空间移动平台移动；S100: Receive a computer displacement control instruction, and control the movement of the space mobile platform according to the displacement control instruction;
S200：逐点扫描待测物品的电磁场近场，并实时采集待测物品电磁场近场的电信号数据；S200: Scan the near-field electromagnetic field of the item to be tested point by point, and collect the electrical signal data of the near-field electromagnetic field of the item to be tested in real time;
S300：将所述待测物品电磁场近场的电信号数据发送至所述信号分析装置，获得获取信号测量数据；S300: Send the electrical signal data of the near-field electromagnetic field of the item to be tested to the signal analysis device to obtain signal measurement data;
S400：监测所述探头与所述待测物品之间的距离，获得距离数据；S400: Monitor the distance between the probe and the item to be tested, and obtain distance data;
S500：将所述信号测量数据和所述距离数据实时发送至所述计算机，处理获得待测物品的电磁场近场扫描结果。S500: Send the signal measurement data and the distance data to the computer in real time, and process to obtain an electromagnetic field near-field scanning result of the object to be tested.
本发明电磁场近场扫描装置的扫描方法，首先接收计算机位移控制指令，并根据所述位移控制指令控制空间移动平台移动，之后逐点扫描待测物品的电磁场近场，并实时采集待测物品电磁场近场的电信号数据，将所述待测物品电磁场近场的电信号数据发送至所述信号分析装置，获得获取信号测量数据，监测所述探头与所述待测物品之间的距离，获得距离数据，将所述信号测量数据和所述距离数据实时发送至所述计算机，处理获得待测物品的电磁场近场扫描结果。利用计算机实现对空间移动平台移动的精准控制、显微摄像装置的精确监测以及采用逐点扫描，实时采集传输，即每一次探头移动，均采集一次数据并及时将采集到的数据发送至信号分析装置，避免扫描过程中，扫描装置自身对待测物品电磁场近场的影响和数据采集延时对信号准确度的影响，能够实现高精度电磁场近场扫描。The scanning method of the electromagnetic field near-field scanning device of the present invention first receives a computer displacement control instruction, and controls the movement of the space mobile platform according to the displacement control instruction, and then scans the electromagnetic field near field of the object to be tested point by point, and collects the electromagnetic field of the object to be measured in real time Near-field electrical signal data, sending the electrical signal data of the near-field electromagnetic field of the item under test to the signal analysis device to obtain signal measurement data, monitor the distance between the probe and the item under test, and obtain For distance data, the signal measurement data and the distance data are sent to the computer in real time, and the electromagnetic field near-field scanning result of the object to be tested is obtained through processing. Use the computer to realize the precise control of the movement of the space mobile platform, the precise monitoring of the microscopic camera device, and the use of point-by-point scanning for real-time collection and transmission, that is, every time the probe moves, data is collected once and the collected data is sent to signal analysis in time The device avoids the influence of the scanning device itself on the near-field electromagnetic field of the item to be tested and the influence of data acquisition delay on the signal accuracy during the scanning process, and can realize high-precision electromagnetic near-field scanning.
如图4所示，在其中一个实施例中，步骤S500之后还有步骤：As shown in Figure 4, in one of the embodiments, there are steps after step S500:
S600：将所述信号测量数据、所述距离数据以及所述待测物品的电磁场近场扫描结果存储于所述计算机。S600: Store the signal measurement data, the distance data, and the electromagnetic near-field scanning result of the object under test in the computer.
将所述信号测量数据、所述距离数据以及所述待测物品的电磁场近场扫描结果存储于所述计算机，便于在后续操作中对历史数据的读取，利用和抽检，避免由于意外导致数据的丢失，确保数据的安全。The signal measurement data, the distance data, and the electromagnetic field near-field scanning results of the item to be tested are stored in the computer to facilitate the reading, utilization and random inspection of historical data in subsequent operations, and avoid accidental data loss. loss, to ensure data security.
以上所述实施例仅表达了本发明的几种实施方式，其描述较为具体和详细，但并不能因此而理解为对本发明专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本发明构思的前提下，还可以做出若干变形和改进，这些都属于本发明的保护范围。因此，本发明专利的保护范围应以所附权利要求为准。The above-mentioned embodiments only express several implementation modes of the present invention, and the description thereof is relatively specific and detailed, but should not be construed as limiting the patent scope of the present invention. It should be pointed out that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent for the present invention should be based on the appended claims.
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