CN103926233A - Laser differential confocal Brillouin-Raman spectroscopy measuring method and device thereof - Google Patents

Abstract

The invention belongs to the technical field of microscopic imaging and spectral measurement, and relates to a laser differential confocal Brillouin-Raman spectral measurement method and device, which can be used for comprehensive testing and high-resolution imaging of micro-area morphological parameters of samples. The method and device integrate differential confocal technology into spectral detection, use differential confocal technology to detect sample position, use spectral detection system to perform spectral detection, and use Brillouin scattered light discarded by traditional confocal Raman spectral detection technology The properties of materials such as elasticity and piezoelectricity are tested, so as to realize the measurement of high-dimensional morphological parameters of sample micro-regions. The invention has the advantages of accurate positioning, high spatial resolution, high spectral detection sensitivity and controllable measurement focus spot size, etc., and has wide application in the fields of biomedicine, forensics, micro-nano manufacturing, material engineering, engineering physics, precision measurement, physical chemistry, etc. application prospects.

Description

Laser differential confocal Brillouin-Raman spectroscopy measurement method and device

technical field

The invention belongs to the technical field of micro-spectral imaging, combines differential confocal microscopic technology and spectral detection technology, relates to a high-resolution spectral imaging and detection method and device of "map-spectrum integration", in particular to a laser differential confocal The Jobrillouin-Raman spectroscopy measurement method and device can be used for comprehensive testing and high-resolution imaging of micro-region morphological parameters of samples. the

technical background

In 1990, G.J.Puppels et al. reported in the journal Nature that they invented the laser confocal Raman spectroscopy microscopy technology that combined Raman spectroscopy detection technology with laser confocal microscopy technology, which was a revolutionary breakthrough in Raman technology. This technology not only inherits the high-resolution tomographic imaging characteristics of confocal microscopy, but also can perform spectral analysis on the sample, so it can realize high-resolution tomographic detection of the micro-region spectrum of the sample. This remarkable advantage makes laser confocal Raman spectroscopy unique in the field of spectral testing, and it has rapidly developed into an extremely important means of sample structure and component analysis, making it widely used in chemistry, biology, medicine, physics, etc. Frontier basic research in science, geology, forensic forensics, criminal investigation and other disciplines. the

At present, the principle of a typical laser confocal Raman spectrometer is shown in Figure 2. The laser follows the optical path to focus on the condenser lens, pinhole, collimator lens, polarization beam splitter, quarter-wave plate, and objective lens. On the sample to be tested, the Raman scattered light carrying the spectral characteristics of the sample is excited; the sample to be tested is moved, so that the Raman scattered light corresponding to different regions of the sample to be tested passes through the quarter-wave plate again and is reflected by the polarizing beam splitter, Enter the confocal Raman spectroscopy detection system for spectral detection. the

The rapid development of modern science and technology has put forward higher requirements for the detection ability of micro-area spectrum and spatial resolution. To improve the spatial resolution, the system must be precisely focused. In the optical detection system, when the measurement focus spot is at the focal point, its size is the smallest and the excitation light intensity is the strongest. Therefore, in order to obtain high spatial resolution, it is necessary to be able to capture the spectrum at the point where the excitation light intensity is the strongest, so as to obtain its optimal space. resolution and optimal spectral detection capabilities. As shown in Figure 1, the existing confocal microscopy technology can excite the Raman spectrum of the sample in the BB' region near the laser excitation focus O, and can be detected by the spectral detection system behind the pinhole. Therefore, the actual detection position of confocal Raman spectroscopy is often in the defocused BA and A'B' regions of the confocal curve (61), resulting in the actual detected "micro-region" being much larger than the spot at the focal point O of the measurement beam At the same time, the signal-to-noise ratio of Raman spectroscopy for confocal positioning is low, and the energy of Raman spectroscopy will be further reduced due to the shielding effect of the pinhole, while expanding the pinhole size to increase the spectral pass rate will increase the confocal axial The half-height width of the positioning curve reduces its positioning accuracy, and the size of the confocal pinholes in the existing confocal Raman systems is usually between 150 μm and 200 μm, and the size of the pinholes used is relatively large, which cannot be used well. Focus effect. The above reasons limit the ability of the confocal Raman spectroscopy microscope system to detect micro-region spectra, and restrict its application in finer micro-region spectral testing and analysis occasions. Therefore, improving the system's focus accuracy is the key to improving its spatial resolution. The essential. the

In 1996, Kimberley F et al. proposed in "Description and Theory of a Fiber-Optic Confocal and Super-Focal Raman Microspectrometer" the method of replacing the pinhole of a confocal Raman spectroscopy microscope with an optical fiber bundle to achieve a non-destructive measurement of the "pinhole" size. Mechanical adjustment, which does not reduce the spectral resolution of the system when expanding the "pinhole"; in 2007, E Kenwood Blvd et al. proposed in "Very efficient fluorescent background suppression in confocal Raman microscopy Department of Physics" by using 3-4ps The picosecond laser combined with the corresponding instantaneous exposure technology reduces the fluorescence background of the sample measurement by about 3 orders of magnitude, and improves the resolution of confocal Raman spectroscopy; in 2008, N. Everall et al. in "The Influence of Out-of -Focus Sample Regions on the Surface Specificity of Confocal Raman Microscopy" pointed out that the use of large numerical aperture (NA=1.4) oil immersion objective lens can obtain higher axial resolution and signal-to-noise ratio than traditional confocal Raman spectrometers, However, this method requires the sample to be prepared, which cannot achieve non-contact and non-destructive measurement, which limits the application range of the system; in 2009, M.J.Pelletier and Neil J.Everall et al. Microscopy using optical preprocessing" proposes to use the corrected objective lens or structured pupil mask to eliminate the interference of the spectral intensity of Raman scattering at the out-of-focus position, improve the spectral detection efficiency, and greatly reduce the impact of the defocused Raman spectrum on the confocal Raman system. its effective depth resolution. the

The above studies mainly focus on the light source system, spectral detection system, focusing objective lens system, and spectral information processing involved in the confocal Raman spectroscopy microscope system. Although the overall performance of the spectroscopy system has been improved, the confocal Raman spectroscopy system The aspect of spatial resolution has not improved significantly, and improving the spatial resolution of Raman spectroscopy systems is still an open problem. the

In addition, the traditional confocal Raman spectroscopy detection technology abandons Rayleigh scattering spectroscopy and Brillouin scattering spectroscopy, which contain rich sample information, which limits the testing of elastic and piezoelectric properties of materials, and restricts the measurement of mechanical properties and performance parameters. Simultaneously measure demand. the

Brillouin scattering spectrum is a kind of scattering spectrum produced by the interaction between light waves and acoustic phonons in the medium. It is the scattering caused by the elastic vibration (external vibration and rotation) of molecules. Brillouin scattering is based on the light It is an important means for the probe to measure various elementary excitations such as phonons and spin waves in matter. Brillouin scattering has the advantages of high sensing sensitivity, large dynamic range, long sensing distance, short response time, high spatial resolution and high measurement accuracy due to the large number of physical quantities that can be sensed and the high signal strength. the

In the field of multi-energy parameter measurement, Brillouin-Raman spectroscopy technology can simultaneously obtain sample surface structure parameters and molecular mechanical performance parameters according to the difference in molecular information contained in Raman spectroscopy and Brillouin spectroscopy. It can provide a new way for research in the fields of biomedicine, bioengineering, optical fiber sensing technology, ocean monitoring, laser radar, and optical communication. the

In existing confocal Raman spectroscopy detection instruments, the Raman scattered light contained in the sample scattered beam collected by the system is extremely weak, only 10 ^-3 to 10 ^-6 of the Rayleigh beam contained in the sample scattered beam collected by the system Therefore, how to use the Rayleigh beam that is 10 ³ to 10 ⁶ times stronger than Raman scattered light in the existing spectral detection system for auxiliary detection in confocal Raman spectroscopy detection is an important way to improve confocal Raman spectroscopy detection technology A new approach to spatial resolution.

Based on the above situation, the present invention proposes that the differential confocal detection system utilizes the discarded Rayleigh beam that is 10 ³ to 10 ⁶ times stronger than the Raman scattered light of the sample collected by the existing confocal Raman spectrum detection system High-precision detection, using Brillouin scattering spectroscopy to detect the mechanical properties of materials, so that it can be integrated with the Raman spectroscopy detection system to simultaneously detect spatial position information and spectral information, in order to achieve high spatial resolution and measure focused spots Differential confocal spectral imaging and detection of size-controllable "map-spectrum-in-one".

Contents of the invention

The purpose of the present invention is to overcome the deficiency that the spatial resolution of the existing confocal Raman spectroscopy detection technology is difficult to improve, and at the same time use the Brillouin scattered light abandoned by the existing confocal Raman detection system to detect the mechanical properties of the material, and propose A laser differential confocal Brillouin-Raman spectrum measurement method and device. the

The purpose of the present invention is achieved through the following technical solutions. the

The specific steps of the laser differential confocal Brillouin-Raman spectroscopy measurement method provided by the present invention are as follows:

a) The excitation light is generated by the excitation beam generation system, and after passing through the first spectroscopic system and the objective lens, it is focused on the sample to be measured, and the Rayleigh light, Raman scattered light and Brillouin scattered light carrying the spectral characteristics of the sample to be measured are excited , Rayleigh light, Brillouin scattered light and Raman scattered light are collected back into the optical path by the system, and after passing through the objective lens, they are reflected by the first spectroscopic system to the dichroic spectroscopic system. After being split by the dichroic spectroscopic system, the Raman scattered light Separated from other spectra, the Rayleigh light and Brillouin scattered light are reflected into the second spectroscopic system, the Rayleigh light and Brillouin scattered light transmitted through the second spectroscopic system enter the differential confocal detection system, and the reflected light from the second spectroscopic system The Rayleigh light and Brillouin scattered light enter the Brillouin spectrum detection system, and the Raman scattered light transmitted by the dichroic spectroscopic system enters the Raman spectrum detection system, using the characteristic that the zero-crossing point of the differential confocal curve precisely corresponds to the focus position , to accurately capture the spectral information of the focal position of the excitation spot through zero-point triggering, to achieve high spatial resolution spectral detection;

b) When only differential subtraction processing is performed on the differential signals obtained by the first detector and the second detector receiving Rayleigh light and Brillouin scattered light, the system can perform three-dimensional scale tomography with high spatial resolution; only for When the Raman spectrum signal obtained by the third detector receiving Raman scattered light is processed, the system can perform Raman spectrum detection; only the Brillouin spectrum signal obtained by the fourth detector receiving Rayleigh light and Brillouin incident light is processed. During processing, the system can perform Brillouin spectrum detection; at the same time, the differential signal obtained by the first detector and the second detector receiving Rayleigh light and Brillouin scattered light, and the fourth detector receiving Rayleigh light and Brillouin scattered light When the Brillouin spectrum signal obtained by the detector and the Raman spectrum signal obtained by the three detectors receiving Raman scattered light are processed, the system can perform micro-area tomography with high spatial resolution, that is, the geometric position of the measured sample The high spatial resolution "map integration" of information and spectral information can carry out high-resolution reconstruction of three-dimensional morphology and measurement of micro-area morphology and performance parameters of samples;

c) The zero-crossing point of the differential confocal curve accurately corresponds to the focal point O of the objective lens. During the measurement process, the measured sample can be accurately tracked and fixed in real time to ensure that the measured sample is always at the focal point during the entire measurement process, and the ambient temperature is suppressed. The impact of factors such as vibration and vibration on spectral measurement, thereby improving measurement accuracy;

d) The zero-crossing point of the differential confocal curve corresponds to the focal point O of the objective lens, where the focus spot size is the smallest, and the detection area is the smallest. The other positions of the linear area BB' correspond to the defocus area of the objective lens, in the pre-focus or post-focus BB' area The size of the focused spot increases with the increase of the defocus amount. Using this feature, the size of the sample detection area can be controlled by adjusting the z-direction defocus amount of the sample and controlling the size of the focused spot according to the actual measurement accuracy requirements. . the

In the detection method of the present invention, the excitation light beam can be a polarized light beam: linearly polarized light, circularly polarized light, radially polarized light, etc.; it can also be a structured light beam generated by pupil filtering technology, which can be used in combination with pupil filtering technology to compress the measurement Focus the spot size to improve the lateral resolution of the system. In addition, different Raman spectral information can be obtained according to the polarization state of the excitation beam, so as to obtain more material structure information. the

In the detection method of the present invention, the system can also detect scattering spectra including fluorescence, Compton scattered light and the like. the

The invention provides a laser differential confocal Brillouin-Raman spectrum measurement device, including an excitation beam generation system, a first spectroscopic system, an objective lens, a three-dimensional scanning table, a dichroic spectroscopic system, a Raman spectroscopic detection system, and a second Two beam splitting system, Brillouin spectrum detection system, differential confocal detection system and data processing module; Among them, the first beam splitting system, objective lens, and three-dimensional scanning table are placed in the exit direction of the excitation beam generation system in sequence along the optical path, and the dichroic The spectroscopic system is located in the reflection direction of the first spectroscopic system, the Raman spectrum detection system is located in the transmission direction of the dichroic spectroscopic system, the second spectroscopic system is located in the reflective direction of the dichroic spectroscopic system, and the Brillouin spectrum detection is believed to be located in the second spectroscopic direction. The reflection direction of the system, the differential confocal detection system is located in the transmission direction of the second spectroscopic system, and the data processing module is connected with the Raman spectrum detection system, the Brillouin spectrum detection system and the differential confocal detection system for fusion and processing Data collected by Raman spectroscopy detection system, Brillouin spectroscopy detection system and differential confocal detection system. the

In the device of the present invention, the Raman spectrum detection system and the Brillouin spectrum detection system can be ordinary spectrum detection systems, including the fourth condenser lens placed sequentially along the transmission path of the dichroic spectroscopic system, and the Raman spectrometer positioned at the focal position of the fourth condenser lens And the third detector located behind the Raman spectrometer, the fifth condenser lens placed in sequence along the reflected light path of the second spectroscopic system, the Brillouin spectrometer located at the focal position of the fifth condenser lens, and the fourth detector located behind the Brillouin spectrometer, It is used for the surface spectrum detection of the sample to be tested; it can also be a confocal spectrum detection system, including the fourth condenser lens placed sequentially along the transmitted light path of the dichroic spectroscopic device, the fourth pinhole located at the focal point of the fourth condenser lens, and the fourth pinhole located at the The sixth condenser behind the four pinholes, the Raman spectrometer behind the sixth condenser, the detection focal plane of the Raman spectrometer is conjugate with the fourth pinhole relative to the sixth condenser, the third detector behind the Raman spectrometer, And the fifth condenser placed sequentially along the reflected light path of the second beam splitting system, the fifth pinhole located at the focal point of the fifth condenser, the seventh condenser located behind the fifth pinhole, and the Brillouin spectrometer located behind the seventh condenser, the arrangement The detection focal plane of the Brillouin spectrometer is conjugated with the fifth pinhole relative to the seventh condenser, and the fourth detector is located behind the Brillouin spectrometer, which improves the signal-to-noise ratio and spatial resolution of the system, as well as the layer of the measured sample. Analytical Spectral Detection. the

In the device of the present invention, the excitation beam generation system may further include a radially polarized light generator and a pupil filter for generating polarized light and structured light beams. the

In the device of the present invention, the pupil filter for compressing the excitation spot can be located between the radially polarized light generator and the first beam splitting system, or between the first beam splitting system and the objective lens. the

In the device of the present invention, the Brillouin spectrum detection system can also be placed in the transmission direction of the second spectroscopic system, and the differential confocal detection system is located in the reflection direction of the second spectroscopic system. the

In the device of the present invention, the excitation beam generation system can also be placed in the reflection direction of the first spectroscopic system, the dichroic spectroscopic system is placed in the transmission direction of the first spectroscopic system along the optical path, and the Raman spectrum detection system is located in the dichroic spectroscopic system. The transmission direction of the system, the second spectroscopic system is located in the reflection direction of the dichroic spectroscopic system, the Brillouin spectrum detection system is located in the reflection direction of the second spectroscopic system, the differential confocal detection system is located in the transmission direction of the second spectroscopic system, the data The processing module is connected with the differential confocal detection system, the Raman spectroscopy detection system and the Brillouin spectroscopy detection system. the

In the device of the present invention, it may also include a fourth spectroscopic system and a microscopic observation system located in the reflection direction of the fourth spectroscopic system for rough aiming of the measured sample; wherein, the fourth spectroscopic system may be located between the excitation beam generating system and the first spectroscopic system. Between the systems, it may also be located between the first spectroscopic system and the objective lens. the

In the device of the present invention, the data processing module includes a differential subtraction module for processing position information; a data fusion module for fusing position information and spectral information to complete three-dimensional reconstruction of samples and fusion of spectral information. the

Beneficial effect:

Compared with the prior art, the present invention has the following innovations:

1) The present invention can simultaneously detect Raman scattering spectra and Brillouin scattering spectra containing different information through rational design, forming complementary advantages, realizing high-resolution detection of material composition and basic physical properties, and facilitating the synthesis of multiple performance parameters test;

2) Utilizing the characteristic that the zero-crossing point of the axial response curve of the differential confocal system corresponds to the focal position precisely, the spectral information of the focal position of the excitation spot is accurately captured through zero-point triggering to achieve spectral detection with high spatial resolution;

3) Use the dichroic spectroscopic device to split the Rayleigh light collected by the system and the Raman scattered light carrying the measured sample information, and the Rayleigh light and Brillouin scattered light enter the differential confocal detection system and the Brillouin spectral detection system , the Raman scattered light enters the Raman spectrum detection system to realize the full utilization of light energy, so that the weak Raman scattered light can enter the Raman spectrum detection system without damage, improve the system spectrum detection sensitivity, and realize the geometric position information and spectral information of the sample High spatial resolution "map-spectrum integration";

4) Using the characteristic that the linear area of the differential confocal response curve corresponds to different focal spot sizes, the position of the focal spot is precisely regulated, and then the size of the focal spot is controlled and measured, which facilitates the testing and analysis of samples with different test requirements, that is, the measurement The focus spot size is adjustable;

5) Integrating the differential confocal microscopy system and the spectral imaging system in terms of structure and function can not only realize the tomographic imaging of the geometric parameters of the micro-area of the sample, but also realize the spectral detection of the micro-area of the sample, that is, realize the micro-scale tomography at the same time Multiple imaging modes such as imaging, spectral tomography and spectral testing, and significantly improve the anti-interference ability, linearity and defocus characteristics of the imaging testing system;

Compared with the prior art, the present invention has the following significant advantages:

1) Combining differential confocal technology and spectral detection technology, using the precise positioning of the focal point of the differential confocal system, the spatial resolution of spectral detection is greatly improved;

2) Use the defocus area of the differential confocal response curve to adjust the focus spot size, which can meet different test requirements and make the system universal;

3) Differential confocal focal point trigger detection technology can significantly suppress the influence of system nonlinearity, sample reflectivity and surface tilt on the measurement results, so as to facilitate the realization of high resolution of fine structures, high anti-interference ability, high precision and high Measurement of chromatographic capacity, etc.;

4) It is possible to maximize the use of light intensity by selecting an appropriate transmittance ratio for the spectroscopic system before the differential confocal detection system and the Brillouin spectroscopy detection system. the

Description of drawings

Figure 1 is a schematic diagram of the axial response of differential confocal and confocal microscopy;

Figure 2 is a schematic diagram of the confocal Raman spectroscopy imaging method;

Figure 3 is a schematic diagram of laser differential confocal Brillouin-Raman spectroscopy measurement method;

Figure 4 is a schematic diagram of a laser differential confocal Brillouin-Raman spectroscopy measurement device;

Figure 5 is a schematic diagram of a laser differential confocal Brillouin-Raman spectroscopy measurement device with a confocal spectrum detection function;

Figure 6 is a schematic diagram of a laser differential confocal Brillouin-Raman spectroscopy measurement device for Brillouin spectroscopy transmission detection;

Fig. 7 is a schematic diagram of the excitation light source reflective laser differential confocal Brillouin-Raman spectroscopy measurement device;

Figure 8 is a schematic diagram of a laser differential confocal Brillouin-Raman spectroscopy measurement device with a microscopic function;

Fig. 9 is a laser differential confocal Brillouin-Raman spectrum measurement embodiment figure with microscopic function;

Among them, 1-excitation beam generation system, 2-first spectroscopic system, 3-objective lens, 4-measured sample, 5-three-dimensional scanning system, 6-dichroic spectroscopic system, 7-Raman spectrum detection system, 8- The second spectroscopic system, 9-Brillouin spectral detection system, 10-differential confocal detection system, 11-data processing module, 12-differential confocal response curve, 13-Raman spectral response curve, 14-Brilliant Deep spectral response curve, 15-third spectroscopic system, 16-first condenser, 17-first pinhole, 18-first detector, 19-second condenser, 20-second pinhole, 21-second detection Device, 22-laser, 23-third condenser, 24-third pinhole, 25-first collimating lens, 26-radial polarized light generator, 27-pupil filter, 28-fourth condenser, 29 -Raman spectrometer, 30-third detector, 31-fifth condenser, 32-Brillouin spectrometer, 33-fourth detector, 34-differential subtraction module, 35-data fusion module, 36-fourth Pinhole, 37-sixth condenser, 38-fifth pinhole, 39-seventh condenser, 40-fourth beam splitting system, 41-microscopic observation system, 42-fifth beam splitting system, 43-Kehler illumination system, 44-eighth condenser, 45-fifth detector, 46-entrance slit, 47-plane mirror, 48-first concave reflective condenser, 49-spectral grating, 50-second concave reflective condenser, 51-exit slit Slit, 52-the sixth pinhole, 53-the second collimating lens, 54-the first even-angle prism, 55-the second even-angle prism, 56-the first multi-pass F-P, 57-the second multi-pass F-P, 58 - ninth condenser, 59 - seventh pinhole, 60 - quarter wave plate, 61 - confocal response curve. the

Detailed ways

The present invention will be further described below in conjunction with drawings and embodiments. the

The basic idea of the present invention is to use the combination of differential confocal detection and confocal Raman detection to realize the spectral detection of "map-spectrum integration", and to use the abandoned Brillouin scattered light in the traditional confocal Raman spectral detection system to affect the material The performance of the sample is detected, and the sample is comprehensively measured for morphological parameters and imaged with high spatial resolution. the

Laser differential confocal Brillouin-Raman spectroscopy measurement method, the test steps are as follows:

Firstly, the Koehler illumination system 43 produces uniform white light, which passes through the fifth spectroscopic system 42, is reflected by the fourth spectroscopic system 40, and is focused on the sample 4 to be tested through the objective lens 3, and the white light is reflected back to the original optical path, passes through the objective lens 4 After being respectively reflected by the fourth spectroscopic system 40 and the fifth spectroscopic system 42, it passes through the eighth condenser lens 44 and enters the fifth detector 45. By observing the image in the fifth detector 45, the test sample 4 is roughly aimed to determine The area where the sample needs to be observed is used for rough positioning of the sample. the

Then, the light beam emitted by the laser 22 enters the third pinhole 24 after being converged by the third condenser lens 23 to become a point light source. Become radially polarized light, the beam of radially polarized light is modulated after passing through the pupil filter 27, and after passing through the first beam splitting system 2, the compressed spot is formed by the objective lens 3 and focused on the measured sample 4, and the Rayleigh light and The Raman scattered light and Brillouin scattered light carrying the spectral characteristics of the tested sample 4 can be processed by Raman-enhancing technologies such as Raman-enhanced spectrum nanoparticles to increase the intensity of the Raman scattered light. the

Move the measured sample 4 so that the Rayleigh light and the Raman scattered light and Brillouin scattered light corresponding to different regions of the measured sample 4 are collected back to the original optical path by the system, and after passing through the objective lens 3 and passing through the fourth spectroscopic system 40, the first spectroscopic System 2 is reflected and reaches the dichroic spectroscopic system 6, wherein the Raman scattered light enters the Raman spectrum detection system 7 through the dichroic spectroscopic system 6, and the Raman scattered light enters the Raman spectrometer 29 after being converged by the fourth condenser lens 28, The Raman spectrum of the measured sample 4 can be obtained by monitoring the response value of the third detector 30 positioned behind the Raman spectrometer 29; Rayleigh light and Brillouin scattered light are reflected by the dichroic spectroscopic system 6 and enter the second spectroscopic system 8, The Rayleigh light and Brillouin scattered light reflected by the second spectroscopic system 8 enter the Brillouin spectrum detection system 9, and the Rayleigh light and Brillouin scattered light are collected by the fifth condenser lens 31 and then enter the Brillouin spectrometer 32. The response value of the fourth detector 33 after the spectrometer 32 can obtain the Brillouin spectrum of the measured sample 4; the Rayleigh light and Brillouin scattered light transmitted through the second spectroscopic system 8 enter the differential confocal detection system 10, and pass through the first The three beam splitting system 15 is divided into two beams, and the Rayleigh light reflected by the third beam splitting system 15 is focused by the first condenser lens 16, and enters the first pinhole 17 at a distance M from the focal point of the first condenser mirror 16, and is first detected Receiver 18; the Rayleigh light transmitted through the third spectroscopic system 15 is focused by the second condenser lens 19, enters the second pinhole 20 with a distance of M behind the focal point of the second condenser lens 19, and is then passed by the second pinhole 20 behind the second pinhole 20 Received by the detector 21, M is the axial offset of the pinhole. the

During the measurement process, when the sample 4 under test is scanned axially and laterally, the first detector 18 and the second detector 21 in the differential confocal detection system 10 respectively measure the intensity response reflecting the unevenness of the sample 4 under test. For I ₁ (ν,u,+u _M ) and I ₂ (ν,u,-u _M ), the resulting intensities respond to I ₁ (ν,u,+u _M ) and I ₂ (ν,u,-u _M ) is sent to the differential subtraction module 34 for differential subtraction processing to obtain the differential confocal intensity response I(ν,u,u _M ):

I(ν,u,u _M )=I ₁ (ν,u,+u _M )-I ₂ (ν,u,-u _M ) (1)

In this way, the microtomography imaging of the geometric position of the measured sample 4 is realized. In the formula (1), v is the horizontal normalized optical coordinate, u is the axial normalized optical coordinate, u _M is the pinhole normalized polarization Shift, I ₁ is the response of the front intensity after the focus, and I ₂ is the response of the front intensity of the focus;

The Raman scattered light spectrum signal carrying the spectral information of the measured sample 4 detected by the third detector 30 in the confocal Raman spectral detection system 7 is I(λ _r ), where λ _r is the excited light of the measured sample 4 The wavelength of the Raman scattered light emitted by the excitation. .

The Brillouin scattering spectrum signal carrying the spectral information of the measured sample 4 detected by the fourth detector 33 in the confocal Brillouin spectral detection system 9 is I(λ _B ), where λ _B is the excited state of the measured sample 4 The wavelength of the Brillouin scattered light emitted by photoexcitation. .

Send I(λ _r ), I(λ _B ), I(ν,u,u _M ) to the data fusion module 35 for data processing, and obtain the position information I(ν,u,u _M ) and Measurement information I(ν,u,λ _r ,λ _B ) of spectral information I(λ _r ,λ _B ).

The measured sample 4 is scanned along the x and y directions, the objective lens 3 is scanned along the z direction, and the above steps are repeated to measure a group of i samples containing position information I(ν,u,u _M ) and spectral information near the focal position of the corresponding objective lens. The sequence measurement information of I(λ _r ,λ _B ) {I _i (λ _r ,λ _B ), I _i (ν,u)};

Use the position information I _i (ν,u,u _M ) corresponding to the distinguishable area δ _i to find out the value of the spectral information I _i (λ _r , λ _B ) corresponding to the area δ _i , and then according to v and the lateral position coordinates (x , y) and the relationship between u and the axial position coordinate z, to reconstruct the information _{I i (} x _i , y _i , z _i , λ _ri , λ _Bi );

The three-dimensional scale and spectral characteristics corresponding to the minimum resolvable area δ _min can be determined by formula (2):

${\mathrm{<span\; class="notranslate">\; I</span>}}_{{\mathrm{<span\; class="notranslate">\; \&sigma;</span>}}_{\mathrm{<span\; class="notranslate">\; min</span>}}}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; x</span>}<span\; class="notranslate">\; ,</span>\mathrm{<span\; class="notranslate">\; the\; y</span>}<span\; class="notranslate">\; ,</span>\mathrm{<span\; class="notranslate">\; z</span>}<span\; class="notranslate">\; ,</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; =</span>{\mathrm{<span\; class="notranslate">\; I</span>}}_{\mathrm{<span\; class="notranslate">\; i</span>}}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; x</span>}<span\; class="notranslate">\; ,</span>\mathrm{<span\; class="notranslate">\; the\; y</span>}<span\; class="notranslate">\; ,</span>\mathrm{<span\; class="notranslate">\; z</span>}<span\; class="notranslate">\; ,</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span>{<span\; class="notranslate">\; |</span>}_{{\mathrm{<span\; class="notranslate">\; I</span>}}_{\mathrm{<span\; class="notranslate">\; i</span>}}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; v</span>}<span\; class="notranslate">\; ,</span>\mathrm{<span\; class="notranslate">\; u</span>}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; 0</span>}<span\; class="notranslate">\; ,</span>{\mathrm{<span\; class="notranslate">\; I</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; v</span>}<span\; class="notranslate">\; ,</span>\mathrm{<span\; class="notranslate">\; u</span>}<span\; class="notranslate">\; +</span>{\mathrm{<span\; class="notranslate">\; u</span>}}_{\mathrm{<span\; class="notranslate">\; m</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; \&NotEqual;</span>\mathrm{<span\; class="notranslate">\; 0</span>}<span\; class="notranslate">\; ,</span>{\mathrm{<span\; class="notranslate">\; I</span>}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; v</span>}<span\; class="notranslate">\; ,</span>\mathrm{<span\; class="notranslate">\; u</span>}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; u</span>}}_{\mathrm{<span\; class="notranslate">\; m</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; \&NotEqual;</span>\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 2</span>}<span\; class="notranslate">\; )</span>$

In this way, laser differential confocal atlas microscopic imaging of nanoscale micro-regions can be realized. the

At the same time, different measured values {z _i } of the BB′ section of the differential confocal axial response curve can be used to determine the spectral characteristics corresponding to different measured value positions The spectral characteristic test of the controllable micro-region near the excitation focus can be realized.

In the detection method of the present invention, the excitation light beam can be a polarized light beam: linearly polarized light, circularly polarized light, radially polarized light, etc.; it can also be a structured light beam generated by pupil filtering technology, which can be used in combination with pupil filtering technology to compress the measurement Focus the spot size to improve the lateral resolution of the system. In addition, different Raman spectral information can be obtained according to the polarization state of the excitation beam, so as to obtain more material structure information. the

In the detection method of the present invention, the system can also detect scattering spectra including fluorescence, Compton scattered light, etc.

The laser differential confocal Brillouin-Raman spectroscopy measurement device includes an excitation beam generation system 1 placed sequentially along the optical path, a first spectroscopic system 2 located in the exit direction of the excitation beam generation system 1, an objective lens 3, a sample to be measured 4, and a three-dimensional The scanning system 5 and the dichroic spectroscopic system 6 located in the reflection direction of the first spectroscopic system 2, the Raman spectrum detection system 7 located in the transmission direction of the dichroic spectroscopic system 6, and the second spectroscopic system located in the reflective direction of the dichroic spectroscopic system 6 System 8, the Brillouin spectrum detection system 9 located in the reflection direction of the second spectroscopic system 8, the differential confocal detection system 10 located in the transmission direction of the second spectroscopic system 8, and the differential confocal detection system 10, Raman spectrum detection A data processing module 11 connected to the system 7 and the Brillouin spectrum detection system 9; wherein the excitation beam generation system 1 is used to generate the excitation beam, including placing a laser 22, a third condenser lens 23 in sequence along the optical path, and being located at the focus position of the third condenser lens 23 The third pinhole 24, the first collimator lens 25, the radially polarized light generator 26 and the pupil filter 27; The Raman spectrometer 29 at the position, and the third detector 30 positioned behind the Raman spectrometer, wherein the Raman spectrometer 29 includes an incident slit 46, a plane reflector 47, a first concave reflective condenser mirror 48, and a spectral reflector placed in sequence along the optical path. Grating 49, second concave reflective condenser 50 and exit slit 51; The fourth detector 33 behind the deep spectrometer; the differential confocal detection system includes the third spectroscopic system 15, the second condenser lens 19 positioned at the transmission direction of the fourth spectroscopic system 15, the second pinhole 20, the second detector 21, The first condenser lens 16, the first pinhole 17, and the first detector 18 in the transmission direction of the third spectroscopic system 15, wherein the second pinhole 20 is located at the back-focus distance M of the second condenser lens 19, and the first pinhole 17 is located at the second focal distance M. A condenser lens 16 at a distance M in front of the focus; the data processing module 11 includes a differential subtraction module 34 and a data fusion module 35 for fusion processing the collected data. the

In the device of the present invention, the Raman spectrum detection system 7 and the Brillouin spectrum detection system 9 can be ordinary spectrum detection systems, including the fourth condenser lens 28 placed in sequence along the transmission light path of the dichroic spectroscopic system 6, and the focal point of the fourth condenser lens 28. The Raman spectrometer 29 at the position and the third detector 30 behind the Raman spectrometer 29, the fifth concentrator 31 placed in sequence along the reflected light path of the second spectroscopic system 8, the Brillouin spectrometer 32 at the focal position of the fifth concentrator 31, and The fourth detector 33 located behind the Brillouin spectrometer 32 is used for surface spectrum detection of the sample to be measured; it can also be a confocal spectrum detection system, including a fourth condenser lens 28 placed sequentially along the transmission path of the dichroic spectroscopic system 6 , the fourth pinhole 36 positioned at the focal point of the fourth condenser 28, the sixth condenser 37 behind the fourth pinhole 36, the Raman spectrometer 29 behind the sixth condenser 37, the detection focal plane of the Raman spectrometer and the fourth The pinhole 36 is conjugated with respect to the sixth condenser lens 37, the third detector 30 behind the Raman spectrometer 29, the fifth condenser lens 31 placed in turn in the reflected light path of the second spectroscopic system 8, and the fifth condenser lens 31 located at the focal point of the fifth condenser lens 31. Five pinholes 38, the seventh condenser lens 39 behind the fifth pinhole 38, the Brillouin spectrometer 32 behind the seventh condenser lens 39, the detection focal plane of the Brillouin spectrometer and the fifth pinhole 38 are relative to the seventh condenser lens 39 conjugates, and the fourth detector 33 located behind the Brillouin spectrometer 32 to improve the signal-to-noise ratio and spatial resolution of the system, as well as tomographic spectrum detection of the measured sample. the

In the device of the present invention, the excitation beam generating system 1 may further include a radially polarized light generator 26 and a pupil filter 27 for generating polarized light and structured light beams. the

In the device of the present invention, the pupil filter 27 for compressing the excitation spot can be located between the pupil filter 26 and the first spectroscopic system 2 , or between the first spectroscopic system 2 and the objective lens 3 . the

In the device of the present invention, the Brillouin spectrum detection system 9 can also be placed in the transmission direction of the second spectroscopic system 8 , and the differential confocal detection system 10 is located in the reflection direction of the second spectroscopic system 8 . the

In the device of the present invention, the excitation beam generation system 1 can also be placed in the reflection direction of the first spectroscopic system 2, the dichroic spectroscopic system 6 is placed in the transmission direction of the first spectroscopic system 2 along the optical path, and the Raman spectrum detection system 7 Located in the transmission direction of the dichroic spectroscopic system 6, the second spectroscopic system 8 is located in the reflection direction of the dichroic spectroscopic system 6, the Brillouin spectrum detection system 9 is located in the reflection direction of the second spectroscopic system 8, and the differential confocal detection system 10 is located in the transmission direction of the second system 8 , and the data processing module 11 is connected to the differential confocal detection system 10 , the Raman spectroscopy detection system 7 and the Brillouin spectroscopy detection system 9 . the

In the device of the present invention, a fourth spectroscopic system 40 and a microscopic observation system 41 located in the reflection direction of the fourth spectroscopic system 40 may also be included for rough aiming at the measured sample; Between the system 1 and the first spectroscopic system 2 , it can also be located between the first spectroscopic system 2 and the objective lens 3 . the

In the device of the present invention, the data processing module 11 includes a differential subtraction module 34 for processing position information; a data fusion module 35 for fusing position information and spectral information to complete three-dimensional reconstruction of samples and fusion of spectral information. the

Example

In the present embodiment, the first spectroscopic system 2 is a polarizing spectroscopic prism, the three-dimensional scanning system 5 is a three-dimensional scanning workbench, the dichroic spectroscopic system 6 is a Notch Filter, the second spectroscopic system 8 is a spectroscope, and the third spectroscopic system 15 and The fourth beam splitting system 40 is a polarization maintaining beam splitting prism, the Brillouin spectrometer 32 is a Fabry-Perot interferometer (F-P interferometer), the fifth beam splitting system 42 is a broadband beam splitting prism, and the fifth detector 45 is a CCD. the

As shown in Figure 9, the laser differential confocal Brillouin-Raman spectroscopy measurement method, the test steps are as follows:

Firstly, the Kohler illumination system 43 produces uniform white light. After the white light passes through the broadband dichroic prism 42, it is reflected by the polarization-maintaining dichroic prism 40. After passing through the objective lens 3, it is focused on the sample 4 to be tested. The white light is reflected back to the original optical path and passes through the objective lens 4. After being respectively reflected by the polarization-maintaining beam-splitting prism 40 and the broadband beam-splitting prism 42, it passes through the eighth condenser 44 and then enters the CCD 45. By observing the image in the CCD 45, the test sample 4 is roughly aimed to determine the area of the sample that needs to be observed, and the sample is roughly positioned. . the

Then, the light beam sent by the laser 22 enters the third pinhole 24 after being converged by the third condenser lens 23 to become a point light source. After being collimated and expanded by the first collimator lens 25, the light beam exits in parallel, and passes through the radially polarized light generator (26 ) becomes radially polarized light, the radially polarized light beam is modulated after passing through the pupil filter 27, and after passing through the polarization beam splitter prism 2, the compressed spot is formed by the objective lens 3 and focused on the sample 4 to be measured, and the Rayleigh light is excited As well as the Raman scattered light and Brillouin scattered light carrying the spectral characteristics of the tested sample 4, the tested sample 4 can be processed by Raman enhancement techniques such as enhanced Raman spectrum nanoparticles to increase the intensity of the Raman scattered light. the

Move the measured sample 4 so that the Rayleigh light and the Raman scattered light and Brillouin scattered light corresponding to different regions of the measured sample 4 are collected back to the original optical path by the system. The system 2 reflects and reaches the Notch filter6, wherein the Raman scattered light enters the Raman spectrum detection system 7 through the Notch filter6, and the Raman spectrum detection system 7 is a confocal Raman spectrum detection system, and the Raman scattered light is converged by the fourth condenser lens 28 Go to the fourth pinhole 36, converge into the Raman spectrometer 29 through the sixth condenser lens 37, the Raman scattered light reaches the spectral grating 49 after being reflected by the incident slit 46, the plane reflector 47 and the first concave reflective condenser mirror 48, and the light beam passes through the spectrum After diffracted by the grating 49 , it is reflected and focused by the second concave reflective condenser 50 onto the exit slit 51 , and finally enters the third detector 30 . Due to the diffraction effect of the grating, the light of different wavelengths in the Raman spectrum is separated from each other, and the light coming out from the exit slit 51 is monochromatic light. The Raman spectrum of the sample 4 to be tested can be obtained by the response value of the third detector 30 and the angle of grating rotation, and the Raman spectrum of the sample 4 to be tested can be obtained by monitoring the response value of the third detector 30 positioned behind the Raman spectrometer 29. Raman spectrum: Rayleigh light and Brillouin scattered light are reflected by Notch filter 6 and enter the spectroscope 8, and the Rayleigh light and Brillouin scattered light reflected by the spectroscope 8 enter the Brillouin spectrum detection system 9, and the Brillouin detection system 9 is In the confocal Brillouin detection system, the Rayleigh light and the Brillouin scattered light are converged by the fifth condenser lens 31 to the fifth pinhole 38, converged by the seventh condenser lens 39 and enter the F-P interferometer 32, and monitor the first pinhole 32 after the F-P interferometer 32 The response values of the four detectors 33 can obtain the Brillouin spectrum of the measured sample 4; the Rayleigh light and Brillouin scattered light transmitted by the first beam splitter 8 enter the differential confocal detection system 10, and are separated by the polarization-maintaining beam splitter prism 15. Be two beams, the Rayleigh light reflected by the polarization-maintaining beam-splitting prism 15 is focused by the first condenser lens 16, and is received by the first detector 18 after entering the first pinhole 17 whose distance from the focal point of the first condenser lens 16 is M. The Rayleigh light transmitted by the dichroic prism 15 is focused by the second condenser lens 19, enters the second pinhole 20 with a distance M behind the focal point of the second condenser lens 19, and is then received by the second detector 21 behind the second pinhole 20. the

During the measurement process, when the sample 4 under test is scanned axially and laterally, the two first detectors 18 and the second detector 21 in the differential confocal detection system 10 respectively measure the The intensity responses are I ₁ (ν,u,+u _M ) and I ₂ (ν,u,-u _M ), and the resulting intensity responses I ₁ (ν,u,+u _M ) and I ₂ (ν,u, -u _M ) is sent to the differential subtraction module 34 for differential subtraction processing to obtain the differential confocal intensity response I(ν,u,u _M ):

I(ν,u,u _M )=I ₁ (ν,u,+u _M )-I ₂ (ν,u,-u _M ) (1)

In this way, the microtomography imaging of the geometric position of the measured sample 4 is realized. In the formula (1), v is the horizontal normalized optical coordinate, u is the axial normalized optical coordinate, u _M is the pinhole normalized polarization Shift, I ₁ is the response of the front intensity after the focus, and I ₂ is the response of the front intensity of the focus;

The Raman scattered light spectrum signal carrying the Raman spectrum information of the measured sample 4 detected by the third detector 30 in the confocal Raman spectrum detection system 7 is I(λ _r ), where λ _B is the measured sample 4 Excitation light is the wavelength of Raman scattered light emitted by excitation.

The Brillouin scattering spectrum signal carrying the Brillouin spectrum information of the measured sample 4 detected by the fourth detector 33 in the confocal Brillouin spectrum detection system 9 is I(λ _B ), where λ _B is the measured sample 4 The wavelength of the Brillouin scattered light emitted by the excited light.

Send I(λ _r ), I(λ _B ), I(ν,u,u _M ) to the data fusion module 35 for data processing, and obtain the position information I(ν,u,u _M ) and Measurement information I(ν,u,λ _r ,λ _B ) of spectral information I(λ _r ,λ _B ).

The measured sample 4 is scanned along the x and y directions, the objective lens 3 is scanned along the z direction, and the above steps are repeated to measure a group of i samples containing position information I(ν,u,u _M ) and spectral information near the focal position of the corresponding objective lens. The sequence measurement information I _i (x _{i ,} y _i , z _i , λ _ri , λ _Bi ) of I(λ r , λ _B );

Use the position information I _i (ν,u,u _M ) corresponding to the distinguishable area δ _i to find out the value of the spectral information I _i (λ _r , λ _B ) corresponding to the area δ _i , and then according to v and the lateral position coordinates (x , y) and the relationship between u and the axial position coordinate z, reconstruct the information I(ν, u, λ _r , λ _B ) reflecting the three-dimensional scale and spectral characteristics of the micro-area δ _i of the measured object;

The three-dimensional scale and spectral characteristics corresponding to the minimum resolvable area δ _min can be determined by formula (2):

${\mathrm{<span\; class="notranslate">\; I</span>}}_{{\mathrm{<span\; class="notranslate">\; \&sigma;</span>}}_{\mathrm{<span\; class="notranslate">\; min</span>}}}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; x</span>}<span\; class="notranslate">\; ,</span>\mathrm{<span\; class="notranslate">\; the\; y</span>}<span\; class="notranslate">\; ,</span>\mathrm{<span\; class="notranslate">\; z</span>}<span\; class="notranslate">\; ,</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; =</span>{\mathrm{<span\; class="notranslate">\; I</span>}}_{\mathrm{<span\; class="notranslate">\; i</span>}}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; x</span>}<span\; class="notranslate">\; ,</span>\mathrm{<span\; class="notranslate">\; the\; y</span>}<span\; class="notranslate">\; ,</span>\mathrm{<span\; class="notranslate">\; z</span>}<span\; class="notranslate">\; ,</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span>{<span\; class="notranslate">\; |</span>}_{{\mathrm{<span\; class="notranslate">\; I</span>}}_{\mathrm{<span\; class="notranslate">\; i</span>}}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; v</span>}<span\; class="notranslate">\; ,</span>\mathrm{<span\; class="notranslate">\; u</span>}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; 0</span>}<span\; class="notranslate">\; ,</span>{\mathrm{<span\; class="notranslate">\; I</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; v</span>}<span\; class="notranslate">\; ,</span>\mathrm{<span\; class="notranslate">\; u</span>}<span\; class="notranslate">\; +</span>{\mathrm{<span\; class="notranslate">\; u</span>}}_{\mathrm{<span\; class="notranslate">\; m</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; \&NotEqual;</span>\mathrm{<span\; class="notranslate">\; 0</span>}<span\; class="notranslate">\; ,</span>{\mathrm{<span\; class="notranslate">\; I</span>}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; v</span>}<span\; class="notranslate">\; ,</span>\mathrm{<span\; class="notranslate">\; u</span>}<span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; u</span>}}_{\mathrm{<span\; class="notranslate">\; m</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; \&NotEqual;</span>\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 2</span>}<span\; class="notranslate">\; )</span>$

In this way, laser differential confocal atlas microscopic imaging of nanoscale micro-regions can be realized. the

At the same time, different measured values {z _i } of the BB′ section of the differential confocal axial response curve can be used to determine the spectral characteristics I _δi (z _i , λ _i ) corresponding to different measured value positions, and the excitation focus can be achieved. Spectral characteristic test of micro-controlled area.

It can be seen from Fig. 9 that through the absolute zero point O of the differential confocal detection system 10, the focus position of the excitation spot can be accurately captured, and from the measurement sequence data I _i (xi _, y _i , _zi , λ _ri , λ In _Bi ), the excitation spectrum corresponding to the focus position O is extracted, which realizes the spectral detection and three-dimensional geometric position detection of the micro-area δ _min .

Through the fusion processing of measurement information I _i (xi _, y _i , zi _, λ _ri , λ _Bi ), various measurement modes shown in formula (3) can be realized, namely: micro-area tomography test, Micro-area Raman spectral tomography, micro-area Brillouin spectral tomography, three-dimensional scale tomography, Raman spectral detection, Brillouin spectral detection, etc.

As shown in Figure 9, the laser differential confocal atlas microscopic imaging device includes an excitation beam generating system 1 placed sequentially along the optical path, a first beam splitting system 2 located in the exit direction of the excitation beam generating system 1, a polarization maintaining beam splitting prism 40, an objective lens 3. The sample to be tested 4, the three-dimensional scanning workbench 5 and the microscopic observation system 41 located in the reflection direction of the polarization maintaining beam splitter 40, the Notch filter6 located in the reflection direction of the first spectroscopic system 2, and the Raman spectrum detection located in the transmission direction of the Notch filter6 System 7, the first spectroscope 8 located in the Notch filter 6 reflection direction, the Brillouin spectrum detection system 9 located in the reflection direction of the spectroscope 8, the differential confocal detection system 10 located in the transmission direction of the spectroscope 8, and the differential confocal The data processing module 11 at the connection between the detection system 10 and the Raman spectrum detection system 7 and the Brillouin spectrum detection system 9; wherein the excitation beam generation system 1 is used to generate the excitation beam, including sequentially placing a laser 22 and a third condenser lens along the optical path 23. The third pinhole 24 positioned at the focal point of the third condenser lens 23, the first collimating lens 25, the radially polarized light generator 26, and the pupil filter 27; The broadband dichroic prism 42 of direction, the Koehler illumination system 43 that is positioned at broadband dichroic prism 42 transmission direction, the 8th condenser lens 44 that is positioned at broadband dichroic prism 42 reflection direction, and the CCD45 that detection focal plane is positioned at the 8th condenser mirror 44 focus places; Raman The spectral detection system 7 includes a fourth condenser lens 28 placed in sequence along the optical path, a fourth pinhole 36 positioned at the focal point of the fourth condenser lens 28, a sixth condenser lens 37 behind the fourth pinhole 36, a pulley behind the sixth condenser lens 37, Man spectrometer 29, the detection surface of Raman spectrometer and the fourth pinhole 36 are conjugated with respect to the sixth concentrator 37, and the third detector 30 behind the spectrometer, wherein the Raman spectrometer 29 includes incident narrows placed in sequence along the optical path Slit 46, plane mirror 47, first concave reflective condenser 48, spectral grating 49, second concave reflective condenser 50 and exit slit 51; The fifth pinhole 38 at the focal point of the fifth condenser 31, the seventh condenser 39 behind the fifth pinhole 38, the F-P interferometer 32 behind the seventh condenser 39, the detection surface of the F-P interferometer 32 and the fifth pin The hole 38 is conjugate with respect to the seventh condenser lens 39, and the fourth detector 33 behind the F-P interferometer 32, wherein the F-P interferometer 32 includes a sixth pinhole 52, a second collimating lens 53, a first dipole prism 54. The second even-angle prism 55, the first multi-pass F-P56, the second multi-pass F-P57, the ninth condenser lens 58 and the seventh pinhole 59; the differential confocal detection system includes a polarization-maintaining beam-splitting prism 15, The second condenser lens 19 located in the transmission direction of the polarization maintaining beam-splitting prism 15, the second pinhole 20, the second detector 21, the first condenser lens 16 located in the transmission direction of the polarization maintaining beam-splitting prism 15, The first pinhole 17, the first detector 18, wherein the second pinhole 20 is located at the distance M after the focus of the second condenser 19, and the first pinhole 17 is located at the distance M before the focus of the first condenser 16; the data processing module 11 It includes a differential subtraction module 34 and a data fusion module 35 for fusing and processing the collected data. the

The specific embodiment of the present invention has been described above in conjunction with the accompanying drawings, but these descriptions can not be interpreted as limiting the scope of the present invention, the protection scope of the present invention is defined by the appended claims, any claims on the basis of the present invention The changes made are within the protection scope of the present invention. the

Claims (10)

1. Laser differential confocal Brillouin-Raman spectroscopy measurement method, characterized in that: a) The excitation light is generated by the excitation beam generation system (1), and after passing through the first spectroscopic system (2) and the objective lens (3), it is focused on the sample to be tested (4), and the Rayleigh light is excited and loaded with the sample to be tested (4) Raman scattered light and Brillouin scattered light with spectral characteristics, Rayleigh light, Brillouin scattered light and Raman scattered light are collected back into the optical path by the system, and passed through the objective lens (3) by the first spectroscopic system (2) Reflected to the dichroic spectroscopic system (6), after being split by the dichroic spectroscopic system (6), Raman scattered light is separated from other spectra, Rayleigh light and Brillouin scattered light are reflected into the second spectroscopic system (8) , the Rayleigh light and Brillouin scattered light transmitted by the second spectroscopic system (8) enter the differential confocal detection system (10), and the Rayleigh light and Brillouin scattered light reflected by the second spectroscopic system (8) enter the Brillouin In the spectral detection system (9), the Raman scattered light transmitted through the dichroic spectroscopic system (6) enters the Raman spectral detection system (7), and the zero crossing point of the differential confocal curve (12) corresponds to the focus position precisely. Features, through zero-point triggering to accurately capture the spectral information of the focal position of the excitation spot, to achieve high spatial resolution spectral detection; b) When only differential subtraction processing is performed on the differential signals obtained by the first detector (18) and the second detector (21) receiving Rayleigh light and Brillouin scattered light, the system can perform three-dimensional scale with high spatial resolution Tomography; when only processing the Raman spectrum signal obtained by the third detector (30) that receives Raman scattered light, the system can perform Raman spectrum detection; only for the fourth detection that receives Rayleigh light and Brillouin radiation When the Brillouin spectrum signal obtained by the detector (33) is processed, the system can perform Brillouin spectrum detection; at the same time, the first detector (18) and the second detector (21) that receive Rayleigh light and Brillouin scattered light The differential signal obtained, the Brillouin spectrum signal obtained by the fourth detector (33) receiving Rayleigh light and Brillouin scattered light, and the Raman spectrum obtained by the third detector (30) receiving Raman scattered light When the signal is processed, the system can perform high-spatial-resolution micro-area tomography, that is, the high-spatial-resolution "map-spectrum integration" of the measured sample's geometric position information and spectral information, and can perform high-resolution reconstruction of the three-dimensional shape of the sample. Structural and micro-area morphological performance parameter measurement; c) The zero-crossing point of the differential confocal curve (12) accurately corresponds to the focal point O of the objective lens (3). During the measurement process, the measured sample (4) can be accurately tracked and fixed in real time to ensure that the measured sample (4) is in the whole It is always in the focus position during the measurement process, suppressing the influence of factors such as ambient temperature and vibration on the spectrum measurement, thereby improving the measurement accuracy; d) The zero-crossing point of the differential confocal curve (12) corresponds to the focal point O of the measurement objective lens (3), where the focus spot size is the smallest and the detection area is the smallest, and other positions in the linear area BB' correspond to the defocused area of the objective lens (3), The focus spot size in the pre-focus or post-focus BB' area increases with the increase of the defocus amount. Using this feature, the focus spot size can be controlled according to the actual measurement accuracy requirements by adjusting the z-direction defocus amount of the sample. , to control the size of the sample detection area. the 2. the laser differential confocal Brillouin-Raman spectroscopy measurement method according to right 1 is characterized in that: excitation light beam can be polarized light beam: linearly polarized light, circularly polarized light, radially polarized light etc.; Can also be by The structured beam generated by the pupil filtering technology can be used in combination with the pupil filtering technology to compress the measurement focus spot size and improve the lateral resolution of the system. In addition, different Raman spectral information can be obtained according to the polarization state of the excitation beam, thus obtaining More information on the structure of substances. the 3. The laser differential confocal Brillouin-Raman spectroscopy measurement method according to claim 1, characterized in that: the system can also detect internal scattering spectra including fluorescence and Compton scattered light. the 4. Laser differential confocal Brillouin-Raman spectroscopy measurement device, characterized in that it includes an excitation beam generation system (1), a first spectroscopic system (2), an objective lens (3), a three-dimensional scanning system (5), Dichroic spectroscopy system (6), Raman spectroscopy detection system (7), second spectroscopy system (8), Brillouin spectroscopy detection system (9), differential confocal detection system (10) and data processing module ( 11); wherein, the first spectroscopic system (2), the objective lens (3), and the three-dimensional scanning system (5) are sequentially placed in the exit direction of the excitation beam generation system (1) along the optical path, and the dichroic spectroscopic system (6) is located in the first In the reflection direction of the spectroscopic system (2), the Raman spectrum detection system (7) is located in the transmission direction of the dichroic spectroscopic system (6), and the second spectroscopic system (8) is located in the reflective direction of the dichroic spectroscopic system (6), The Brillouin spectrum detection system (9) is located in the reflection direction of the second spectroscopic system (8), the differential confocal detection system (10) is located in the transmission direction of the second spectroscopic system (8), the data processing module (11) and the pull The Mann spectrum detection system (7), the Brillouin spectrum detection system (9) and the differential confocal detection system (10) are connected for fusion and processing of the Raman spectrum detection system (7), the Brillouin spectrum detection system ( 9) and the data collected by the differential confocal detection system (10). the 5. The laser differential confocal Brillouin-Raman spectroscopy measurement device according to claim 4, characterized in that: the Raman spectroscopy detection system (7) and the Brillouin spectroscopy detection system (9) can be ordinary spectrum detection systems , including the fourth condenser lens (28) placed sequentially along the transmitted light path of the dichroic spectroscopic system (6), the Raman spectrometer (29) located at the focal position of the fourth condenser lens (28), and the No. Three detectors (30), the fifth condenser lens (31) placed sequentially along the reflected light path of the second light splitting system (8), the Brillouin spectrometer (32) located at the focal position of the fifth condenser lens (31), and the Brillouin spectrometer located at The fourth detector (33) after (32) is used for the surface spectrum detection of the sample to be tested; it can also be a confocal spectrum detection system, including the fourth condenser lens placed sequentially along the transmission light path of the dichroic spectroscopic system (6) (28), the fourth pinhole (36) at the focus position of the fourth condenser lens (28), the sixth condenser lens (37) behind the fourth pinhole (36), the Raman behind the sixth condenser lens (37) The spectrometer (29), the detection focal plane of the Raman spectrometer (29) is conjugated with the fourth pinhole (36) relative to the sixth condenser mirror (37), and the third detector (30) behind the Raman spectrometer (29) , and the fifth condenser lens (31) placed in sequence in the reflected light path of the second beam splitting system (8), the fifth pinhole (38) located at the focal position of the fifth condenser lens (31), the fifth pinhole (38) located behind the fifth pinhole (38) Seven condenser mirrors (39), the Brillouin spectrometer (32) behind the seventh condenser mirror (39), the detection focal plane of the Brillouin spectrometer (32) and the fifth pinhole (38) relative to the seventh condenser mirror (39) The conjugate, and the fourth detector (33) located behind the Brillouin spectrometer (32), improve the signal-to-noise ratio and spatial resolution of the system, and detect the tomographic spectrum of the measured sample. the 6. The laser differential confocal Brillouin-Raman spectroscopy measurement device according to claim 4, characterized in that: the excitation beam generation system (1) can also include a radially polarized light generator (26) and a pupil filter The device (27) is used to generate polarized light and structured light beams. the 7. The laser differential confocal Brillouin-Raman spectroscopy measurement device according to claim 4, characterized in that: the pupil filter (27) for compressing the excitation spot can be located between the polarization modulator (26) and the second Between the first beam splitting system (2), it can also be located between the first beam splitting system (2) and the objective lens (3). the 8. The laser differential confocal Brillouin-Raman spectroscopy measurement device according to claim 4, characterized in that: the Brillouin spectroscopy detection system (9) can also be placed in the transmission direction of the second spectroscopic system (8) , the differential confocal detection system (10) is located in the reflection direction of the second spectroscopic system (8). the 9. The laser differential confocal Brillouin-Raman spectroscopy measurement device according to claim 4, characterized in that: the excitation beam generation system (1) can also be placed in the reflection direction of the first spectroscopic system (2), and the two The chromatic spectroscopic system (6) is placed sequentially along the optical path in the transmission direction of the first spectroscopic system (2), the Raman spectrum detection system (7) is located in the transmission direction of the dichroic spectroscopic system (6), and the second spectroscopic system (8 ) is located in the reflection direction of the dichroic spectroscopic system (6), the Brillouin spectrum detection system (9) is located in the reflection direction of the second spectroscopic system (8), and the differential confocal detection system (10) is located in the second spectroscopic system ( 8), the data processing module (11) is connected to the differential confocal detection system (10), the Raman spectrum detection system (7) and the Brillouin spectrum detection system (9). the 10. The laser differential confocal Brillouin-Raman spectroscopy measurement device according to claim 4, characterized in that: it can also include a fourth spectroscopic system (40) and a display in the reflection direction of the fourth spectroscopic system (40). The micro observation system (41) is used for rough sighting of the sample under test; wherein, the fourth spectroscopic system (40) can be located between the excitation beam generating system (1) and the first spectroscopic system (2), and can also be located in the first spectroscopic system (2). Between the system (2) and the objective lens (3). the