CN103901284B - Mode of resonance driving type piezoelectric actuator ground electric field sensor - Google Patents
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- 230000005684 electric field Effects 0.000 title claims abstract description 47
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- 229910052802 copper Inorganic materials 0.000 claims description 13
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- 229910052709 silver Inorganic materials 0.000 claims description 5
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005459 micromachining Methods 0.000 description 3
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Abstract
本发明是一种谐振型压电驱动式地面电场传感器，包括：在压电驱动片上设有多个孔；在每个金属感应电极上设有多个固接孔；在金属固定板上对称布设有多个连接孔；每个绝缘柱的底端固接于金属固定板上的一个连接孔内；每个绝缘柱的上端部分别固接于每个金属感应电极上的一个固接孔内；每个金属柱的下端固接于金属固定板上的一个连接孔内；每个金属柱的顶端固接于压电驱动片的一个孔内；多个金属柱位于每对绝缘柱之间；压电驱动片位于由多个绝缘柱、金属固定板和多个金属感应电极组成的空间中，且压电驱动片、金属固定板和多个金属感应电极相互平行，压电驱动片通过多个金属柱与金属固定板连接，多个金属感应电极分别通过每个绝缘柱与金属固定板连接。
The invention is a resonant piezoelectric-driven ground electric field sensor, comprising: a plurality of holes are arranged on the piezoelectric driving plate; a plurality of fixing holes are arranged on each metal induction electrode; symmetrically arranged on the metal fixing plate There are multiple connecting holes; the bottom end of each insulating column is fixed in a connecting hole on the metal fixing plate; the upper end of each insulating column is respectively fixed in a fixing hole on each metal induction electrode; The lower end of each metal column is fixed in a connecting hole on the metal fixing plate; the top end of each metal column is fixed in a hole of the piezoelectric driving piece; multiple metal columns are located between each pair of insulating columns; The electric driving piece is located in a space composed of multiple insulating columns, metal fixing plates and multiple metal sensing electrodes, and the piezoelectric driving piece, metal fixing plate and multiple metal sensing electrodes are parallel to each other, and the piezoelectric driving piece passes through multiple metal sensing electrodes. The column is connected with the metal fixed plate, and a plurality of metal induction electrodes are respectively connected with the metal fixed plate through each insulating column.
Description
技术领域technical field
本发明涉及传感器，特别涉及谐振型压电驱动式地面电场传感器。The invention relates to a sensor, in particular to a resonant piezoelectric driven ground electric field sensor.
背景技术Background technique
地面电场传感器是地面电场探测的重要设备，地面电场探测对于雷电天气预警具有重要意义。晴朗天气里和雷暴天气的大气电场差别很大，通过地面电场探测及时发现大气电场的这种变化，并加以研究分析，就可以起到雷电预警作用。现有的地面电场传感器主要是场磨式电场传感器和基于硅微加工技术的电场传感器，其中场磨式电场传感器出现得时间早，技术相对成熟，在地面电场探测中应用广泛。基于硅微加工技术的电场传感器是近些年出现的一种微型电场传感器，这种微型电场传感器通常以硅片为主要材料，由普通集成电路工艺技术对硅材料加工而成，具有尺寸小(一般小于1厘米)、重量轻、功耗低、易于批量化的优点。但这种微型电场传感器由于体积微小，对空气中的水滴、灰尘都较敏感，容易损坏，因此需要进行封装，而封装微型电场传感器是一个较难的问题，而且会增加传感器的研制周期和成本，因此这种微型电场传感器还处于研究探索阶段，距离实用化还有一些距离。The ground electric field sensor is an important device for ground electric field detection, and the ground electric field detection is of great significance for lightning weather warning. The atmospheric electric field in sunny weather and thunderstorm weather is very different. The change of atmospheric electric field can be found in time through ground electric field detection, and research and analysis can play a role in lightning warning. The existing ground electric field sensors are mainly field mill electric field sensors and electric field sensors based on silicon micromachining technology. Among them, the field mill electric field sensor appeared earlier, the technology is relatively mature, and it is widely used in ground electric field detection. The electric field sensor based on silicon micromachining technology is a kind of miniature electric field sensor that has appeared in recent years. This kind of miniature electric field sensor usually uses silicon wafers as the main material, and is processed by ordinary integrated circuit technology on silicon materials. It has a small size ( Generally less than 1 cm), light weight, low power consumption, and easy to batch. However, due to the small size of this kind of miniature electric field sensor, it is sensitive to water droplets and dust in the air, and is easy to be damaged, so it needs to be packaged, and packaging the miniature electric field sensor is a difficult problem, and it will increase the development cycle and cost of the sensor. , so this miniature electric field sensor is still in the research and exploration stage, and there is still some distance from practical application.
发明内容Contents of the invention
为了解决现有技术方案存在的技术问题，本发明的目的是提供一种谐振型压电驱动式地面电场传感器。In order to solve the technical problems existing in the prior art solutions, the object of the present invention is to provide a resonant piezoelectric driven ground electric field sensor.
为实现上述目的，本发明提供的谐振型压电驱动式地面电场传感器的技术方案包括：一压电驱动片、多个金属感应电极、一金属固定板，多个绝缘柱和多个金属柱，其中：In order to achieve the above object, the technical solution of the resonant piezoelectric driven ground electric field sensor provided by the present invention includes: a piezoelectric driving plate, a plurality of metal induction electrodes, a metal fixing plate, a plurality of insulating posts and a plurality of metal posts, in:
在压电驱动片上设有多个孔；A plurality of holes are arranged on the piezoelectric driving piece;
在每个金属感应电极上设有多个固接孔；A plurality of fixing holes are provided on each metal sensing electrode;
在金属固定板上对称布设有多个连接孔；A plurality of connecting holes are arranged symmetrically on the metal fixing plate;
每个绝缘柱的底端固接于金属固定板上的一个连接孔内；The bottom end of each insulating column is fixedly connected in a connecting hole on the metal fixing plate;
每个绝缘柱的上端部分别固接于每个金属感应电极上的一个固接孔内；The upper end of each insulating column is respectively fixed in a fixing hole on each metal induction electrode;
每个金属柱的下端固接于金属固定板上的一个连接孔内；The lower end of each metal column is fixedly connected in a connecting hole on the metal fixing plate;
每个金属柱的顶端固接于压电驱动片的一个孔内；The top of each metal column is fixed in a hole of the piezoelectric driving piece;
多个金属柱位于每对绝缘柱之间；压电驱动片位于由多个绝缘柱、金属固定板和多个金属感应电极组成的空间中，且压电驱动片、金属固定板和多个金属感应电极相互平行，压电驱动片通过多个金属柱与金属固定板连接，多个金属感应电极分别通过每个绝缘柱与金属固定板连接。A plurality of metal posts are located between each pair of insulating posts; the piezoelectric driving piece is located in a space composed of a plurality of insulating posts, a metal fixing plate and a plurality of metal sensing electrodes, and the piezoelectric driving piece, the metal fixing plate and a plurality of metal The sensing electrodes are parallel to each other, the piezoelectric driving piece is connected to the metal fixing plate through a plurality of metal columns, and the plurality of metal sensing electrodes are respectively connected to the metal fixing plate through each insulating column.
优选实施例，所述压电驱动片含有铜片和压电陶瓷，所述铜片和压电陶瓷呈方形或圆形，铜片的上表面与压电陶瓷下表面粘结成一体，压电陶瓷的上表面有一层银电极。In a preferred embodiment, the piezoelectric driving piece contains a copper sheet and a piezoelectric ceramic, the copper sheet and the piezoelectric ceramic are square or circular, the upper surface of the copper sheet is bonded to the lower surface of the piezoelectric ceramic, and the piezoelectric ceramic The upper surface of the ceramic has a layer of silver electrodes.
优选实施例，在所述铜片上布设有两个对称的孔。In a preferred embodiment, two symmetrical holes are arranged on the copper sheet.
优选实施例，所述金属感应电极是使用一对金属感应电极，每个金属感应电极呈方形。In a preferred embodiment, the metal sensing electrodes use a pair of metal sensing electrodes, and each metal sensing electrode is square.
优选实施例，所述金属固定板呈方形，在金属固定板的四角各设有一个连接孔，四个连接孔分别用于固定四个绝缘柱。In a preferred embodiment, the metal fixing plate is in a square shape, and a connecting hole is provided at each of the four corners of the metal fixing plate, and the four connecting holes are respectively used for fixing four insulating columns.
优选实施例，在金属固定板两边缘的中间位置分别布设两个对称的连接孔以及两个对称的用于连接的金属柱。In a preferred embodiment, two symmetrical connection holes and two symmetrical metal posts for connection are arranged in the middle of the two edges of the metal fixing plate.
本发明的有益效果：Beneficial effects of the present invention:
本专利发明的这种谐振型压电驱动式地面电场传感器采用传统的机械加工技术制作，但体积较场磨式电场传感器小，功耗也更低一些。与基于硅微加工技术的微型电场传感器相比，这种新传感器虽然体积更大，但其结构相对简单，缩短了传感器的研制周期，且这种新传感器可以直接暴露于空气之中，避免了考虑传感器敏感结构的封装问题，适用于恶劣天气下地面电场的探测。另外，这种电场传感器利用压电驱动片在一定的谐振频率下的振动模态，实现了差分电流输出，有利于提高传感器灵敏度和抑制环境干扰。The resonant piezoelectric-driven ground electric field sensor invented by this patent is manufactured by traditional machining technology, but its volume is smaller than that of the field mill electric field sensor, and its power consumption is also lower. Compared with the miniature electric field sensor based on silicon micromachining technology, although this new sensor is larger in size, its structure is relatively simple, which shortens the development cycle of the sensor, and this new sensor can be directly exposed to the air, avoiding the Considering the packaging problem of the sensitive structure of the sensor, it is suitable for the detection of the ground electric field in bad weather. In addition, this electric field sensor utilizes the vibration mode of the piezoelectric drive plate at a certain resonant frequency to realize a differential current output, which is beneficial to improving the sensitivity of the sensor and suppressing environmental interference.
附图说明Description of drawings
图1a是本发明采用方形压电驱动片的电场传感器结构示意图；Fig. 1a is a structural schematic diagram of an electric field sensor using a square piezoelectric drive sheet in the present invention;
图1b是图1a的方形压电驱动片正面示意图；Fig. 1b is a schematic front view of the square piezoelectric driving chip of Fig. 1a;
图2a是本发明谐振型、圆形压电驱动片地面电场传感器的结构示意图；Fig. 2 a is the structure schematic diagram of the ground electric field sensor of the resonant type of the present invention, circular piezoelectric drive piece;
图2b是图2a的圆形压电驱动片正面示意图；Fig. 2b is a schematic front view of the circular piezoelectric driving piece in Fig. 2a;
图3是本发明的本发明谐振型压电驱动式地面电场传感器基本工作原理示意图。Fig. 3 is a schematic diagram of the basic working principle of the resonant piezoelectric driven ground electric field sensor of the present invention.
具体实施方式Detailed ways
为使本发明的目的、技术方案和优点更加清楚明白，以下结合具体实施例，并参照附图，对本发明进一步详细说明。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
本发明的谐振型压电驱动式地面电场传感器，压电驱动片1和多个金属感应电极，金属固定板4，多个绝缘柱5和多个金属柱6，其中：在压电驱动片1上设有多个孔；在每个金属感应电极上设有多个固接孔；在金属固定板4上对称布设有多个连接孔；每个绝缘柱5的底端固接于金属固定板4上的一个连接孔内；每个绝缘柱5的上端部分别固接于每个金属感应电极上的一个固接孔内；每个金属柱6的下端固接于金属固定板4上的一个连接孔内；每个金属柱6的顶端固接于压电驱动片1的一个孔内；多个金属柱6位于每对绝缘柱5之间；压电驱动片1位于由多个绝缘柱5、金属固定板4和多个金属感应电极组成的空间中，且压电驱动片1、金属固定板4和多个金属感应电极相互平行，压电驱动片1通过多个金属柱6与金属固定板4连接，多个金属感应电极2和3分别通过每个绝缘柱5与金属固定板4连接。In the resonant piezoelectric driven ground electric field sensor of the present invention, a piezoelectric driving piece 1 and a plurality of metal induction electrodes, a metal fixing plate 4, a plurality of insulating columns 5 and a plurality of metal columns 6, wherein: in the piezoelectric driving piece 1 There are a plurality of holes on the top; each metal induction electrode is provided with a plurality of fixing holes; a plurality of connection holes are arranged symmetrically on the metal fixing plate 4; the bottom end of each insulating column 5 is fixed on the metal fixing plate 4; the upper end of each insulating column 5 is respectively affixed to a fixed hole on each metal induction electrode; the lower end of each metal column 6 is affixed to a metal fixed plate 4 In the connection hole; the top of each metal column 6 is fixed in a hole of the piezoelectric driving piece 1; a plurality of metal columns 6 are located between each pair of insulating columns 5; , a metal fixed plate 4 and a plurality of metal induction electrodes, and the piezoelectric driving piece 1, the metal fixing plate 4 and a plurality of metal induction electrodes are parallel to each other, and the piezoelectric driving piece 1 is fixed to the metal through a plurality of metal columns 6 The plate 4 is connected, and a plurality of metal induction electrodes 2 and 3 are respectively connected to the metal fixed plate 4 through each insulating column 5 .
如图1a和图1b示出采用方形压电驱动片的电场传感器结构的实施例1，使用一个压电驱动片1、一对完全相同的金属感应电极、一块金属固定板4、四个绝缘柱5和两个金属柱6组成。一对完全相同的金属感应电极是左感应电极2和右感应电极3。Figure 1a and Figure 1b show the embodiment 1 of the electric field sensor structure using a square piezoelectric driving piece, using a piezoelectric driving piece 1, a pair of identical metal sensing electrodes, a metal fixed plate 4, and four insulating posts 5 and two metal pillars 6. A pair of identical metal sensing electrodes are left sensing electrode 2 and right sensing electrode 3 .
所述多个金属感应电极是使用一对金属感应电极2和3且呈方形，并带有多个固接孔，通过绝缘柱5与金属固定板4连接固定，每个金属感应电极与一对绝缘柱5连接。The plurality of metal induction electrodes use a pair of metal induction electrodes 2 and 3 and are square, and have a plurality of fixing holes, which are connected and fixed with the metal fixing plate 4 through insulating columns 5, and each metal induction electrode is connected to a pair of metal induction electrodes. The insulating column 5 is connected.
如图1a和图1b示出压电驱动片1呈方形，或如图2a和图2b示出压电驱动片1呈圆形，铜片12的上表面与压电陶瓷11下表面粘结成一体，压电陶瓷11的上表面有一层银电极13。由面积较大的铜片12与面积较小的压电陶瓷11粘结而成，压电陶瓷11的外侧有一层银电极13，在谐振型压电驱动式地面电场传感器工作时可施加交流驱动电压。As shown in Figure 1a and Figure 1b, the piezoelectric driving piece 1 is square, or as shown in Figure 2a and Figure 2b, the piezoelectric driving piece 1 is circular, and the upper surface of the copper sheet 12 is bonded to the lower surface of the piezoelectric ceramic 11 to form In one piece, there is a layer of silver electrode 13 on the upper surface of the piezoelectric ceramic 11 . It is formed by bonding a copper sheet 12 with a larger area and a piezoelectric ceramic 11 with a smaller area. There is a layer of silver electrode 13 on the outside of the piezoelectric ceramic 11, and an AC drive can be applied when the resonant piezoelectric-driven ground electric field sensor is working. Voltage.
压电驱动片1的铜片12部分有两个对称的孔，通过两个金属柱6连接固定压电驱动片1。所述金属固定板4呈方形，在金属固定板4的四角各设有一个连接孔，四个连接孔分别用于固定四个绝缘柱5。在金属固定板4两边缘的中间位置分别布设两个对称的连接孔以及两个对称的用于连接的金属柱6。The copper sheet 12 of the piezoelectric driving piece 1 has two symmetrical holes, and the piezoelectric driving piece 1 is connected and fixed through two metal posts 6 . The metal fixing plate 4 is in a square shape, and each of the four corners of the metal fixing plate 4 is provided with a connecting hole, and the four connecting holes are respectively used for fixing four insulating posts 5 . Two symmetrical connection holes and two symmetrical metal posts 6 for connection are respectively arranged in the middle of the two edges of the metal fixing plate 4 .
如图3示出在外电场E中，谐振型压电驱动式地面电场传感器工作时，需在压电陶瓷11的银电极13的一侧加交流驱动电压，而压电陶瓷11的铜片12部分通过金属柱6与金属固定板4共同接地，压电驱动片1则产生周期振动，其中铜片12可以起到调制外电场E的作用，使得感应电极2和3上产生周期变化的感应电荷。当交流驱动电压处于一定的频率时，压电驱动片1会处于谐振状态，形成类似“跷跷板”式的振动模态，即压电驱动片1的一端远离感应电极、一端靠近感应电极，这样，在这种振动模态下，左感应电极2和右感应电极3上感应电荷量的变化趋势相反，从而形成了一对差分电流信号i+和i－，利用后续的差分信号检测系统检测出这对差分电流信号，并通过对谐振型压电驱动式地面电场传感器进行标定，便可以实现对外电场的检测。这种差分检测的优点在于可以提高传感器的灵敏度并抑制环境干扰。As shown in Figure 3, in the external electric field E, when the resonant piezoelectric-driven ground electric field sensor is working, it is necessary to add an AC driving voltage on one side of the silver electrode 13 of the piezoelectric ceramic 11, and the copper sheet 12 part of the piezoelectric ceramic 11 Through the common grounding of the metal pillar 6 and the metal fixed plate 4 , the piezoelectric driving piece 1 generates periodic vibration, and the copper piece 12 can play the role of modulating the external electric field E, so that the induction electrodes 2 and 3 generate periodically changing induced charges. When the AC driving voltage is at a certain frequency, the piezoelectric driving piece 1 will be in a resonant state, forming a vibration mode similar to a "seesaw", that is, one end of the piezoelectric driving piece 1 is far away from the sensing electrode, and the other end is close to the sensing electrode. In this way, In this vibration mode, the change trend of the induced charge on the left sensing electrode 2 and the right sensing electrode 3 is opposite, thus forming a pair of differential current signals i+ and i-, which are detected by the subsequent differential signal detection system Differential current signals, and by calibrating the resonant piezoelectric-driven ground electric field sensor, the detection of the external electric field can be realized. The advantage of this differential detection is that it can improve the sensitivity of the sensor and suppress environmental disturbances.
需要说明的是，选择“跷跷板”振动模态，是因为这种振动模态比较简单，其实在压电驱动片的其它某些谐振频率的轴对称振动模态，只要能保证左感应电极2、右感应电极3上形成变化趋势相反的感应电荷，均可以实现谐振型压电驱动式地面电场传感器的差分信号输出，也就是说，谐振型压电驱动式地面电场传感器在实际工作中，可能有更多的谐振频率工作点可以选择，但相比较而言，“跷跷板”模态最简单，最容易实现。It should be noted that the "seesaw" vibration mode is chosen because this vibration mode is relatively simple. In fact, in the axially symmetrical vibration modes of some other resonant frequencies of the piezoelectric drive piece, as long as the left sensing electrode 2, The induced charges with opposite changing trends formed on the right sensing electrode 3 can realize the differential signal output of the resonant piezoelectric-driven ground electric field sensor, that is to say, in actual work, the resonant piezoelectric-driven ground electric field sensor may have More resonant frequency operating points can be selected, but in comparison, the "seesaw" mode is the simplest and easiest to implement.
另外，方形压电驱动片和圆形压电驱动片的最大尺寸一般不大于1分米，因此这种谐振型压电驱动式地面电场传感器具有体积较小的优点。In addition, the maximum dimension of the square piezoelectric driving piece and the circular piezoelectric driving piece is generally not greater than 1 decimeter, so this resonant piezoelectric-driven ground electric field sensor has the advantage of smaller volume.
实施例2Example 2
所述多个金属感应电极，不限于一对相同的金属感应电极2和3，还可以使用两对或更多对相同的金属感应电极。The plurality of metal sensing electrodes is not limited to a pair of identical metal sensing electrodes 2 and 3 , and two or more pairs of identical metal sensing electrodes may also be used.
所述多个绝缘柱5，不限于四个绝缘柱5，根据金属固定板4的尺寸大小还可以使用六个、八个绝缘柱5。The plurality of insulating posts 5 are not limited to four insulating posts 5 , and six or eight insulating posts 5 can also be used according to the size of the metal fixing plate 4 .
所述多个金属柱6，不限于两个金属柱6，根据压电驱动片1的尺寸大小还可以使用四个、六个、八个金属柱5。The plurality of metal posts 6 are not limited to two metal posts 6 , and four, six, or eight metal posts 5 can also be used according to the size of the piezoelectric driving piece 1 .
以上所述，仅为本发明中的具体实施方式，但本发明的保护范围并不局限于此，任何熟悉该技术的人在本发明所揭露的技术范围内，可理解想到的变换或替换，都应涵盖在本发明的包含范围之内。The above is only a specific implementation mode in the present invention, but the scope of protection of the present invention is not limited thereto. Anyone familiar with the technology can understand the conceivable transformation or replacement within the technical scope disclosed in the present invention. All should be covered within the scope of the present invention.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1492235A (en) * | 2002-10-23 | 2004-04-28 | 中国科学院电子学研究所 | Vibrating miniature electric field sensor |
| CN1831545A (en) * | 2005-03-07 | 2006-09-13 | 中国科学院电子学研究所 | Electrostatic comb-tooth excitation differential detection miniature electric field sensor |
| CN101368988A (en) * | 2007-08-15 | 2009-02-18 | 中国科学院电子学研究所 | Package-free piezo-driven miniature electric field sensor |
| CN101685119A (en) * | 2008-09-24 | 2010-03-31 | 中国科学院电子学研究所 | Resonance miniature electric field sensor |
| CN102169143A (en) * | 2011-04-20 | 2011-08-31 | 南京信息工程大学 | Vibration shielding type electric field sensor |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1492235A (en) * | 2002-10-23 | 2004-04-28 | 中国科学院电子学研究所 | Vibrating miniature electric field sensor |
| CN1831545A (en) * | 2005-03-07 | 2006-09-13 | 中国科学院电子学研究所 | Electrostatic comb-tooth excitation differential detection miniature electric field sensor |
| CN101368988A (en) * | 2007-08-15 | 2009-02-18 | 中国科学院电子学研究所 | Package-free piezo-driven miniature electric field sensor |
| CN101685119A (en) * | 2008-09-24 | 2010-03-31 | 中国科学院电子学研究所 | Resonance miniature electric field sensor |
| CN102169143A (en) * | 2011-04-20 | 2011-08-31 | 南京信息工程大学 | Vibration shielding type electric field sensor |
Non-Patent Citations (1)
| Title |
|---|
| 新型推挽激励的谐振式微机械静电场传感器;彭春荣 等;《纳米技术与精密工程》;20100731;第8卷(第4期);第341-345页 * |
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