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CN103901064A - Ray emission device, imaging system and inspection method - Google Patents

Ray emission device, imaging system and inspection method Download PDF

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Publication number
CN103901064A
CN103901064A CN201210581453.9A CN201210581453A CN103901064A CN 103901064 A CN103901064 A CN 103901064A CN 201210581453 A CN201210581453 A CN 201210581453A CN 103901064 A CN103901064 A CN 103901064A
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ray
fan
inspection area
inspection
rotating mechanism
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CN103901064B (en
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赵自然
吴万龙
胡斌
洪明志
阮明
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Tsinghua University
Nuctech Co Ltd
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Nuctech Co Ltd
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Abstract

一种射线发射装置包括:发出射线的射线源;以及旋转机构,该旋转机构能够围绕旋转轴线转动,该旋转机构的部分可围绕射线源转动,并且该旋转机构的部分具有能够使射线通过的开口,该旋转机构的所述开口包括狭缝。同现有技术相比,本发明使一次扫描同时形成透射图像和背散射图像,将背散射和透射成像技术集成一体,既能有效鉴别低原子序数的物质,又能很好的对深层物品进行鉴别,既提高了扫描速度又提高了物品的鉴别能力。

A radiation emitting device includes: a radiation source emitting radiation; and a rotating mechanism that can rotate around a rotation axis, a part of the rotating mechanism that can rotate around the radiation source, and a part of the rotating mechanism that has an opening through which the radiation can pass. , the opening of the rotating mechanism includes a slit. Compared with the prior art, the present invention enables one scan to simultaneously form a transmission image and a backscattering image, and integrates backscattering and transmission imaging technologies, which can not only effectively identify substances with low atomic numbers, but also perform well on deep objects. Identification, which not only improves the scanning speed but also improves the identification ability of items.

Description

射线发射装置、成像系统及检查方法Radiation emission device, imaging system and inspection method

技术领域technical field

本发明涉及一种射线发射装置、成像系统及检查方法。The invention relates to a ray emitting device, an imaging system and an inspection method.

背景技术Background technique

透射成像技术适合于要求高穿透性、高空间分辨等要求的监测,它对高密度和高原子序数材料更加灵敏,对低密度、低原子序数物质灵敏度稍差。Transmission imaging technology is suitable for monitoring that requires high penetration and high spatial resolution. It is more sensitive to materials with high density and high atomic number, and less sensitive to materials with low density and low atomic number.

通过背散射技术成像,可以探测被检物的结构,使低密度、低原子序数物质,如炸药、雷管等,在图像背景中突显出来。尤其适合表面有一定遮挡物的危险品监测。Imaging through backscattering technology can detect the structure of the object to be inspected, so that low-density, low-atomic-number substances, such as explosives and detonators, stand out in the image background. It is especially suitable for the monitoring of dangerous goods with certain occluders on the surface.

背散射和透射成像作为单独扫描系统已经广泛应用,但是需要同时进行背散射和透射成像系统和方法。Backscatter and transmission imaging have been widely used as separate scanning systems, but there is a need for simultaneous backscatter and transmission imaging systems and methods.

发明内容Contents of the invention

本发明的目的是提供射线发射装置、成像系统和检查方法,由此同时进行背散射和透射成像。It is an object of the present invention to provide a radiation emitting device, an imaging system and an inspection method whereby backscatter and transmission imaging are performed simultaneously.

根据本发明的一方面,本发明提供了一种射线发射装置,该射线发射装置包括:发出射线的射线源;以及旋转机构,该旋转机构能够围绕旋转轴线转动,该旋转机构的部分可围绕射线源转动,并且该旋转机构的部分具有能够使射线通过的开口,该旋转机构的所述开口包括狭缝。According to one aspect of the present invention, the present invention provides a radiation emitting device, the radiation emitting device includes: a radiation source emitting radiation; The source rotates and part of the rotating mechanism has an opening through which the radiation can pass, said opening of the rotating mechanism comprising a slit.

根据本发明的一方面,所述旋转机构的所述部分是环状部分。According to an aspect of the invention, said part of said rotating mechanism is an annular part.

根据本发明的一方面,所述狭缝大致在同一平面上。According to an aspect of the present invention, the slits are substantially on the same plane.

根据本发明的一方面,所述平面与旋转机构的旋转轴线大致垂直。According to an aspect of the invention, said plane is substantially perpendicular to the axis of rotation of the rotary mechanism.

根据本发明的一方面,所述射线发射装置还包括与射线源连接的射线导引装置,该射线导引装置具有与射线源连接的射线进口,以及使射线从该射线导引装置射出的射线出口,所述旋转机构的所述部分能够在该射线导引装置的射线出口上相对于所述射线导引装置的所述射线出口转动。According to one aspect of the present invention, the ray emitting device further includes a ray guiding device connected to the ray source, the ray guiding device has a ray inlet connected to the ray source, and a ray that causes the ray to be emitted from the ray guiding device The part of the rotating mechanism can rotate on the radiation outlet of the radiation guiding device relative to the radiation outlet of the radiation guiding device.

根据本发明的一方面,所述开口包括两个在圆周方向上间隔开的所述狭缝。According to an aspect of the present invention, said opening comprises two said slits spaced apart in the circumferential direction.

根据本发明的一方面,所述开口还包括在旋转机构的所述部分中与所述狭缝在圆周方向上间隔开的笔形射线束孔。According to an aspect of the present invention, the opening further includes a pencil-shaped beam hole spaced apart from the slit in the circumferential direction in the portion of the rotation mechanism.

根据本发明的一方面,通过射线导引装置将射线源发出的射线束形成为扇形射线束。According to one aspect of the present invention, the radiation beam emitted by the radiation source is formed into a fan-shaped radiation beam by the radiation guiding device.

根据本发明的一方面,所述射线导引装置设置在所述射线源与所述旋转机构的所述部分之间。According to an aspect of the present invention, the radiation guiding device is arranged between the radiation source and the part of the rotating mechanism.

根据本发明的一方面,本发明提供了一种成像系统,所述成像系统包括:上述射线发射装置;以及用于检测射线发射装置发出的射线的探测器。According to one aspect of the present invention, the present invention provides an imaging system, the imaging system comprising: the above-mentioned radiation emitting device; and a detector for detecting the radiation emitted by the radiation emitting device.

根据本发明的一方面,所述探测器是用于检测所述射线发射装置发射的射线在被检查物体上散射的背散射射线的背散射探测器;以及用于检测所述射线发射装置发射的、透过被检查物体后的射线的透射探测器中的至少一种。According to an aspect of the present invention, the detector is a backscatter detector for detecting the backscattered rays scattered by the rays emitted by the ray emitting device on the inspected object; and for detecting the backscattered rays emitted by the ray emitting device 1. At least one of the transmission detectors for rays passing through the object to be inspected.

根据本发明的一方面,本发明提供了一种检查方法,所述检查方法包括:形成扇形射线束,该扇形射线束逐渐从零度扇形角增加到预定扇形角。According to an aspect of the present invention, the present invention provides an inspection method, the inspection method comprising: forming a fan-shaped ray beam, the fan-shaped ray beam gradually increases from a fan angle of zero degrees to a predetermined fan angle.

根据本发明的一方面,在该扇形射线束达到预定扇形角时,利用透射探测器接收透过被检查物体后的所述扇形射线束以获得透过数据。According to an aspect of the present invention, when the fan-shaped ray beam reaches a predetermined fan-shaped angle, a transmission detector is used to receive the fan-shaped ray beam after passing through the inspected object to obtain transmission data.

根据本发明的一方面,所述检查方法还包括:在该扇形射线束逐渐从零度扇形角增加到预定扇形角的过程中,利用背散射探测器接收扇形射线束在被检查物体上散射的背散射射线以获得背散射数据或背散射信号。According to an aspect of the present invention, the inspection method further includes: during the process of the fan-shaped ray beam gradually increasing from a zero-degree fan angle to a predetermined fan-shaped angle, using a backscatter detector to receive the backscattering of the fan-shaped ray beam on the object to be inspected Scatter rays to obtain backscatter data or backscatter signals.

根据本发明的一方面,所述预定扇形角是最大扇形角。According to an aspect of the present invention, the predetermined sector angle is a maximum sector angle.

根据本发明的一方面,所述检查方法还包括:使扇形射线束逐渐从预定扇形角减小到零度扇形角,以及利用背散射探测器接收扇形射线束在被检查物体上散射的背散射射线以获得背散射数据或背散射信号。According to an aspect of the present invention, the inspection method further includes: gradually reducing the fan-shaped ray beam from a predetermined fan angle to zero-degree fan angle, and using a backscatter detector to receive backscattered rays scattered by the fan-shaped ray beam on the inspected object to obtain backscatter data or backscatter signals.

根据本发明的一方面,所述检查方法还包括:在形成扇形射线束之前,形成笔形射线束;以及利用背散射探测器接收笔形射线束在被检查物体上散射的背散射射线以获得背散射数据或背散射信号。According to an aspect of the present invention, the inspection method further includes: forming a pencil beam before forming a fan beam; and using a backscatter detector to receive the backscattered rays scattered by the pencil beam on the object to be inspected to obtain the backscatter data or backscattered signal.

根据本发明的一方面,所述检查方法还包括:形成笔形射线束;以及利用背散射探测器接收笔形射线束在被检查物体上散射的背散射射线以获得背散射数据或背散射信号。According to an aspect of the present invention, the inspection method further includes: forming a pencil beam; and using a backscatter detector to receive backscattered rays scattered by the pencil beam on the inspected object to obtain backscatter data or backscatter signals.

根据本发明的一方面,被检查物体的一列被检查区域中的一个区域的物质信息,通过从一列被检查区域中的、包含所述一个区域的多个区域获得的背散射信号减去从该多个区域除去所述一个区域剩余的区域所获得的背散射信号而获得。According to an aspect of the present invention, the substance information of a region in a column of inspected regions of the inspected object is subtracted from the backscattered signals obtained from a plurality of regions including the one region in a row of inspected regions The multiple regions are obtained by subtracting the backscattered signals obtained in the remaining regions of the one region.

根据本发明的一方面,在该扇形射线束逐渐从零度扇形角增加到预定扇形角时,在被检查物体上产生N个检查区域,扇形射线束的照射范围从第一检查区域延伸至第N检查区域,所述检查方法包括:在扇形射线束的照射范围处于第一检查区域时,利用背散射探测器获得表示第一检查区域的物质信息的背散射信号S1;在扇形射线束的照射范围处于第一检查区域至第i-1检查区域时,利用背散射探测器接收从第一检查区域至第i-1检查区域散射的背散射射线以产生背散射信号Si-1;在扇形射线束的照射范围处于第一检查区域至第i检查区域时,利用背散射探测器接收从第一检查区域至第i检查区域散射的背散射射线以产生背散射信号Si;以及将背散射信号Si减去背散射信号Si-1获得表示第i检查区域的物质信息,其中i为等于2至N的自然数。According to one aspect of the present invention, when the fan-shaped ray beam gradually increases from a zero-degree fan angle to a predetermined fan-shape angle, N inspection areas are generated on the object to be inspected, and the irradiation range of the fan-shaped ray beam extends from the first inspection area to the Nth inspection area. In the inspection area, the inspection method includes: when the irradiation range of the fan-shaped ray beam is in the first inspection area, using a backscatter detector to obtain a backscatter signal S 1 representing material information in the first inspection area; When the range is from the first inspection area to the i-1th inspection area, the backscattered detector is used to receive the backscattered rays scattered from the first inspection area to the i-1th inspection area to generate a backscattered signal S i-1 ; When the irradiation range of the ray beam is in the first inspection area to the i-th inspection area, a backscattered detector is used to receive the backscattered rays scattered from the first inspection area to the i-th inspection area to generate a backscattered signal S i ; and the backscattered Subtract the backscatter signal S i-1 from the signal S i to obtain material information representing the i-th inspection region, where i is a natural number equal to 2 to N.

根据本发明的一方面,在该扇形射线束逐渐从预定扇形角减小到零度扇形角时,在被检查物体上产生N个检查区域,扇形射线束的照射范围从第一检查区域至第N检查区域逐渐减小到第一检查区域,所述检查方法包括:在扇形射线束的照射范围处于第一检查区域至第i检查区域时,利用背散射探测器接收从第一检查区域至第i检查区域散射的背散射射线以产生背散射信号Si;在扇形射线束的照射范围处于第一检查区域至第i-1检查区域时,利用背散射探测器接收从第一检查区域至第i-1检查区域散射的背散射射线以产生背散射信号Si-1;将背散射信号Si减去背散射信号Si-1获得表示第i检查区域的物质信息;以及在扇形射线束的照射范围处于第一检查区域时,利用背散射探测器获得表示第一检查区域的物质信息的背散射信号S1,其中i为等于2至N的自然数。According to one aspect of the present invention, when the fan-shaped ray beam gradually decreases from a predetermined fan angle to zero-degree fan angle, N inspection areas are generated on the object to be inspected, and the irradiation range of the fan-shaped ray beam is from the first inspection area to the Nth inspection area. The inspection area is gradually reduced to the first inspection area, and the inspection method includes: when the irradiation range of the fan-shaped ray beam is in the first inspection area to the i-th inspection area, using a backscatter detector to receive data from the first inspection area to the i-th inspection area Backscattered rays scattered by the inspection area to generate backscattered signals S i ; when the irradiation range of the fan-shaped ray beam is from the first inspection area to the i-1th inspection area, the backscatter detector is used to receive signals from the first inspection area to the i-th inspection area -1 The backscattered rays scattered by the inspection area to generate the backscattered signal S i-1 ; the backscattered signal S i is subtracted from the backscattered signal S i-1 to obtain the material information representing the i-th inspection area; and in the fan-shaped ray beam When the irradiation range is in the first inspection area, a backscatter signal S 1 representing material information in the first inspection area is obtained by using a backscatter detector, wherein i is a natural number equal to 2 to N.

根据本发明的一方面,所述检查方法还包括:对背散射数据进行处理,其中通过对背散射数据进行处理,根据处理结果判断被检查物体上是否有违禁物品。通过对透射数据进行处理,根据处理结果判断被检查物体中是否有违禁物品。According to an aspect of the present invention, the inspection method further includes: processing the backscatter data, wherein by processing the backscatter data, it is judged whether there are prohibited items on the inspected object according to the processing result. By processing the transmission data, it is judged whether there are prohibited items in the inspected object according to the processing result.

本发明通过间隔的形成飞点和扇形束,使扫描系统一次扫描同时形成透射图像和背散射图像,既能有效解决低原子序数物质的灵敏度,又能很好地解决深层物品的监测。The present invention forms flying spots and fan beams at intervals, so that the scanning system simultaneously forms transmission images and backscatter images in one scan, which can not only effectively solve the sensitivity of low atomic number substances, but also well solve the monitoring of deep objects.

附图说明Description of drawings

图1是根据本发明的成像系统的示意立体图,其中扇形射线束经过狭缝发射。Fig. 1 is a schematic perspective view of an imaging system according to the present invention, wherein a fan-shaped beam of rays is emitted through a slit.

图2是根据本发明的成像系统的示意立体图,其中笔形射线束经过笔形射线束孔发射。Fig. 2 is a schematic perspective view of an imaging system according to the present invention, wherein a pencil beam is emitted through a pencil beam aperture.

图3是根据本发明的成像系统的旋转机构的狭缝和笔形射线束孔的位置关系的示意图。FIG. 3 is a schematic diagram of the positional relationship between the slit and the pencil beam hole of the rotation mechanism of the imaging system according to the present invention.

图4是根据本发明的成像系统的旋转机构的两个狭缝的位置关系的示意图。FIG. 4 is a schematic diagram of the positional relationship of two slits of the rotation mechanism of the imaging system according to the present invention.

图5(a)和图5(b)分别是本发明的背散射信号幅值P在背散射减影处理前后的示意图,其中横坐标表示时间,纵坐标表示信号幅值P。Figure 5(a) and Figure 5(b) are schematic diagrams of backscatter signal amplitude P before and after backscatter subtraction processing according to the present invention, wherein the abscissa represents time, and the ordinate represents signal amplitude P.

图6是根据本发明的成像系统的射线发射装置的示意图。Fig. 6 is a schematic diagram of the radiation emitting device of the imaging system according to the present invention.

图7a至图7d示出了根据本发明的实施例的背散射信号的减影处理的示意图。7a to 7d show schematic diagrams of subtraction processing of backscattered signals according to an embodiment of the present invention.

具体实施方式Detailed ways

下面结合附图及具体实施方式对本发明做进一步说明。The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

如图1-2所示,根据本发明的成像系统100包括:射线发射装置102;用于接收所述射线发射装置102发射的射线在被检查物体上散射的背散射射线的背散射探测器4;以及用于接收所述射线发射装置102发射的、透过被检查物体后的射线的透射探测器5。背散射探测器4可以是平板探测器,透射探测器5可以是阵列探测器。成像系统100能够同时进行背散射和透射成像。As shown in Figures 1-2, the imaging system 100 according to the present invention includes: a ray emitting device 102; a backscatter detector 4 for receiving the backscattered rays scattered by the rays emitted by the ray emitting device 102 on the inspected object ; and the transmission detector 5 for receiving the radiation emitted by the radiation emitting device 102 and passing through the object to be inspected. The backscatter detector 4 may be a flat panel detector, and the transmission detector 5 may be an array detector. Imaging system 100 is capable of simultaneous backscatter and transmission imaging.

如图1-4、6所示,根据本发明的射线发射装置102包括:发出射线的诸如X光机的射线源3;与射线源3连接的射线导引装置2,该射线导引装置2具有与射线源3连接的射线进口,以及使射线从该射线导引装置射出的射线出口;以及旋转机构1,该旋转机构1具有能够转动的环状部分11,该环状部分11的内表面覆盖该射线导引装置2的射线出口,并且该环状部分11具有能够使射线通过的开口。射线导引装置2由射线屏蔽材料形成并且可以是准直器。如果射线源3发出的射线已经经过准直,可以省去射线导引装置2。旋转机构可以不包括环状部分,作为选择,旋转机构也可以包括其它形状的部分,例如仅仅包括环状部分的一部分。As shown in Figures 1-4 and 6, the radiation emitting device 102 according to the present invention includes: a radiation source 3 such as an X-ray machine emitting radiation; a radiation guiding device 2 connected to the radiation source 3, the radiation guiding device 2 There is a ray inlet connected to the ray source 3, and a ray outlet for the ray to be emitted from the ray guiding device; and a rotating mechanism 1, the rotating mechanism 1 has a rotatable ring part 11, the inner surface of the ring part 11 The radiation outlet of the radiation guiding device 2 is covered, and the annular portion 11 has an opening through which the radiation can pass. The radiation guide 2 is formed of a radiation shielding material and may be a collimator. If the radiation emitted by the radiation source 3 has been collimated, the radiation guiding device 2 can be omitted. The swivel mechanism may not include the ring portion, alternatively the swivel mechanism may include other shaped portions, for example only a part of the ring portion.

如图1、2、3、4所示,所述射线源3大致在所述旋转机构的旋转中心C。例如,射线源3的靶点大致在旋转中心C。射线源3设置在机架6上。可以根据需要控制射线源3发出射线以及停止发射射线。As shown in Figures 1, 2, 3 and 4, the radiation source 3 is approximately at the rotation center C of the rotation mechanism. For example, the target point of the ray source 3 is approximately at the rotation center C. The radiation source 3 is arranged on the frame 6 . The radiation source 3 can be controlled to emit radiation and stop emitting radiation as required.

诸如电机和减速器的驱动装置12与旋转机构1连接,并驱动旋转机构1转动。旋转机构1的环状部分11或其它部分上安装有位置感应开关,当旋转机构1绕着射线源3旋转时,实时反馈环状部分11或其它部分的位置信息。如图6所示,旋转机构1通过轴承座17固定在机架6上,同时,旋转机构1通过联轴器18与电机12连接。旋转机构1由射线屏蔽材料形成。旋转机构1可以在正反两个方向上旋转。A driving device 12 such as a motor and a reducer is connected to the rotating mechanism 1 and drives the rotating mechanism 1 to rotate. The annular part 11 or other parts of the rotating mechanism 1 are equipped with a position sensing switch, and when the rotating mechanism 1 rotates around the radiation source 3, the position information of the annular part 11 or other parts is fed back in real time. As shown in FIG. 6 , the rotating mechanism 1 is fixed on the frame 6 through the bearing seat 17 , and at the same time, the rotating mechanism 1 is connected with the motor 12 through the coupling 18 . The rotating mechanism 1 is formed of a radiation shielding material. The rotating mechanism 1 can rotate in both forward and reverse directions.

如图1、2所示,所述开口包括沿所述环状部分11的圆周方向设置的狭缝13和与狭缝13在圆周方向上间隔开的笔形射线束孔14。狭缝可以是扇形射线束缝。狭缝13可以大致在一个平面上。如图3所示,笔形射线束孔14具有中心线,所述中心线通过所述环状部分的旋转中心C,并且所述狭缝14相对于所述中心线对称。As shown in FIGS. 1 and 2 , the opening includes a slit 13 disposed along the circumferential direction of the annular portion 11 and a pencil beam hole 14 spaced apart from the slit 13 in the circumferential direction. The slit may be a fan beam slit. The slits 13 may be substantially on one plane. As shown in FIG. 3 , the pencil beam hole 14 has a center line passing through the rotation center C of the annular portion, and the slit 14 is symmetrical with respect to the center line.

如图4所示,作为选择,所述开口包括两个沿所述环状部分11的圆周方向设置并且在所述环状部分11的圆周方向上间隔开的狭缝13。两个狭缝13的扇形角可以不大于90度。两个狭缝13中的每一个都大致相对于通过所述环状部分11的旋转中心C的直线对称。As shown in FIG. 4 , as an option, the opening includes two slits 13 arranged along the circumferential direction of the annular portion 11 and spaced apart in the circumferential direction of the annular portion 11 . The fan angle of the two slits 13 may not be greater than 90 degrees. Each of the two slits 13 is approximately symmetrical with respect to a line passing through the center of rotation C of the annular portion 11 .

如图1-2所示,所述射线导引装置2可以具有大致扇形形状。通过射线导引装置2将射线束形为一扇形射线束。所述射线导引装置2设置在所述射线源3与所述旋转机构1的环形部分11之间。所述射线导引装置2与所述旋转机构1之间形成迷宫结构,以防止射线从所述射线导引装置2与所述旋转机构1之间泄露。例如,所述射线导引装置2的扇形屏蔽体与所述旋转机构1的旋转屏蔽体采用非接触的迷宫屏蔽设计,确保射线不泄露。射线导引装置2的扇形屏蔽体上的扇形缝和旋转机构1的环形部分11的狭缝在同一平面内。As shown in Figures 1-2, the radiation guiding device 2 may have a substantially fan-shaped shape. The radiation beam is shaped into a fan-shaped radiation beam by the radiation guiding device 2 . The radiation guiding device 2 is arranged between the radiation source 3 and the annular portion 11 of the rotating mechanism 1 . A labyrinth structure is formed between the ray guiding device 2 and the rotating mechanism 1 to prevent rays from leaking from between the ray guiding device 2 and the rotating mechanism 1 . For example, the fan-shaped shielding body of the radiation guiding device 2 and the rotating shielding body of the rotating mechanism 1 adopt a non-contact labyrinth shielding design to ensure that the radiation does not leak. The fan-shaped slots on the fan-shaped shielding body of the ray guiding device 2 and the slots of the annular portion 11 of the rotating mechanism 1 are in the same plane.

当成像系统100运行时,电机12带动旋转机构的环形部分11旋转,扫描过程中,射线源3释放出一定能量的射线,通过扇形射线导引装置2将射线束形成为扇形射线束,当旋转机构的环形部分11转到如图1所示的位置时,向通道释放扇形射线束15,通过位置感应开关反馈的位置信息,阵列探测器5采集透射信息。When the imaging system 100 is running, the motor 12 drives the ring part 11 of the rotating mechanism to rotate. During the scanning process, the radiation source 3 releases radiation with a certain energy, and the radiation beam is formed into a fan-shaped radiation beam by the fan-shaped radiation guide device 2. When rotating When the annular part 11 of the mechanism turns to the position shown in Figure 1, the fan-shaped ray beam 15 is released to the channel, and the array detector 5 collects the transmission information through the position information fed back by the position sensing switch.

环形部分11与扇形射线导引装置2的相对运动,扇形射线束15由最初的单点逐渐扩大成整个扇面,随后扇面逐渐变小,到最后没有射线,而通道15中受照物体也是按序从一个方向逐渐扩展到整体受照射,并从另一个方向逐渐消失。平板探测器4每一时刻采集到的信号,是反映当前形状扇形射线束照射物体后背散射信息,如果信号采集时间足够快或者通道中物体移动较慢时,前后采集到的信号有大部分是重叠信息,即后者有前者的影子,两者相差的信息即反映扇形射线束扩展后受照物体的信息。With the relative movement of the annular part 11 and the fan-shaped ray guiding device 2, the fan-shaped ray beam 15 gradually expands from the initial single point to the entire fan, and then the fan gradually becomes smaller until there is no ray at the end, and the illuminated objects in the channel 15 are also sequentially From one direction it gradually expands to the whole being illuminated, and from the other direction it gradually fades away. The signal collected by the flat panel detector 4 at each moment reflects the backscattering information of the object irradiated by the fan-shaped ray beam in the current shape. If the signal collection time is fast enough or the object in the channel moves slowly, most of the signals collected before and after are The overlapping information means that the latter has the shadow of the former, and the information of the difference between the two reflects the information of the illuminated object after the expansion of the fan-shaped ray beam.

图5(a)和图5(b)分别是本发明的背散射信号幅值P在背散射减影处理前后的示意图,其中横坐标表示时间,纵坐标表示信号幅值P。如图5(a)和图5(b)所示,通过减影算法处理形成带有位置信号的背散射信息。具体而言,图5(a)是没有进行减影算法处理的信号幅值P的示意图,图5(b)是通过对相邻信号幅值P进行相减处理而获得的减影算法处理后的信号的示意图。Figure 5(a) and Figure 5(b) are schematic diagrams of backscatter signal amplitude P before and after backscatter subtraction processing according to the present invention, wherein the abscissa represents time, and the ordinate represents signal amplitude P. As shown in Fig. 5(a) and Fig. 5(b), the backscattering information with the position signal is formed through the subtraction algorithm. Specifically, Figure 5(a) is a schematic diagram of the signal amplitude P without subtraction algorithm processing, and Figure 5(b) is the subtraction algorithm obtained by subtracting adjacent signal amplitudes P A schematic diagram of the signal.

在扇形射线束由0角度的扇形角逐渐扩大时,平板探测器4采集扇形射线束的背散射信息,通过减影算法处理形成带有位置信号的背散射信息。旋转机构的环形部分11继续旋转,在扇形射线束由最大扇形角逐渐缩小到0度扇形角后,旋转机构1的笔形射线束孔14释放出笔形射线束16,如图2所示,平板探测器4采集笔形射线束的背散射信息,通过旋转机构的位置反馈附加位置信号。这样旋转机构的环形部分旋转一周,阵列探测器5和平板探测器4分别获取透射信息和背散射信息,分别生成透射图像和背散射图像。When the fan-shaped ray beam gradually expands from the fan-shaped angle of 0 angle, the flat panel detector 4 collects the backscatter information of the fan-shaped ray beam, and processes the backscatter information with the position signal through subtraction algorithm. The annular part 11 of the rotating mechanism continues to rotate. After the fan-shaped beam is gradually reduced from the maximum fan angle to 0 degree fan angle, the pencil-shaped beam hole 14 of the rotating mechanism 1 releases the pencil-shaped beam 16, as shown in FIG. 2 , the flat-panel detection The device 4 collects the backscattering information of the pencil beam, and feeds back an additional position signal through the position of the rotating mechanism. In this way, the annular part of the rotating mechanism rotates once, and the array detector 5 and the flat panel detector 4 acquire transmission information and backscatter information respectively, and generate a transmission image and a backscatter image respectively.

如图4所示,采用狭缝13时,采用狭缝13和“减影处理”可以获得背散射图像。可以根据实际要求,采用一个狭缝13,或多个狭缝13,或者采用一个狭缝13和一个笔形射线束孔14。As shown in FIG. 4, when the slit 13 is used, a backscattered image can be obtained by using the slit 13 and "subtraction processing". One slit 13, or multiple slits 13, or one slit 13 and one pencil beam hole 14 can be used according to actual requirements.

本发明中,扇形射线导引装置2与射线源3连接,形成一定宽度的扇形射线束,扇形射线束的扇形张角由需被监测物的高度决定;旋转机构大致以射线源为圆心进行旋转,旋转机构的一侧开有狭缝,狭缝的扇形张角可以不大于扇形射线导引装置的扇形张角,另一侧开有透射小孔,旋转机构和扇形射线导引装置之间形成迷宫结构,既不妨碍旋转机构的旋转,又能保证射线只从旋转机构的狭缝或者透射小孔射出,旋转机构每旋转一周,就可以形成一次完整的扇形射线束和一串连续的飞点光斑;旋转机构位置感应开关随时向上位机反馈旋转机构的旋转位置;平板探测器采集背散射射线信号,可以布置若干块平板探测器,平板探测器通过时序信息转化成位置信息;线阵列探测器处于束流的正前方,由纵向排布的笔形探测器组成,采集透过被监测物后透射信号,形成透射图像。旋转机构每旋转一周,线阵列探测器就采集一列透射信号,平板探测器采集一列飞点背散射信号,形成透射和背散射图像。同时在狭缝出束时,通过时序控制,可以采集一系列背散射信号,并通过减影处理得到更多背散射图像。In the present invention, the fan-shaped ray guiding device 2 is connected with the ray source 3 to form a fan-shaped ray beam with a certain width, and the fan-shaped opening angle of the fan-shaped ray beam is determined by the height of the object to be monitored; the rotating mechanism roughly rotates with the ray source as the center of the circle , there is a slit on one side of the rotating mechanism, the fan-shaped opening angle of the slit may not be larger than that of the fan-shaped ray guiding device, and a small transmission hole is opened on the other side, forming a gap between the rotating mechanism and the fan-shaped ray guiding device The labyrinth structure does not hinder the rotation of the rotating mechanism, but also ensures that the rays are only emitted from the slits or small transmission holes of the rotating mechanism. Every time the rotating mechanism rotates once, a complete fan-shaped ray beam and a series of continuous flying spots can be formed. Light spot; the position sensing switch of the rotating mechanism feeds back the rotation position of the rotating mechanism to the upper computer at any time; the flat panel detector collects the backscattered ray signal, and several flat panel detectors can be arranged, and the flat panel detector is converted into position information through timing information; the line array detector Located directly in front of the beam, it is composed of vertically arranged pencil-shaped detectors, which collect transmission signals after passing through the monitored object to form a transmission image. Every time the rotating mechanism rotates once, the line array detector collects a column of transmission signals, and the flat panel detector collects a column of flying-spot backscatter signals to form transmission and backscatter images. At the same time, when the beam exits from the slit, a series of backscattering signals can be collected through timing control, and more backscattering images can be obtained through subtraction processing.

下面描述根据本发明的检查方法。The inspection method according to the present invention is described below.

在步骤11,形成扇形射线束,该扇形射线束逐渐从零度扇形角增加到预定扇形角,在该扇形射线束逐渐从零度扇形角增加到预定扇形角的过程中,可以利用背散射探测器接收扇形射线束在被检查物体上散射的背散射射线以获得背散射信号。所述预定扇形角可以是最大扇形角。显然,可以在预定扇形角时使射线源停止发出射线。In step 11, a fan-shaped ray beam is formed, and the fan-shaped ray beam gradually increases from a zero-degree fan angle to a predetermined fan-shaped angle. The fan beam scatters the backscattered rays on the object under inspection to obtain a backscattered signal. The predetermined sector angle may be a maximum sector angle. Obviously, the radiation source can be stopped to emit radiation at a predetermined fan angle.

在步骤13,在该扇形射线束达到预定扇形角时,利用透射探测器接收透过被检查物体后的所述扇形射线束以获得透过数据。In step 13, when the fan-shaped beam reaches a predetermined fan angle, a transmission detector is used to receive the fan-shaped beam after passing through the inspected object to obtain transmission data.

在步骤15,使扇形射线束逐渐从预定扇形角减小到零度扇形角,以及利用背散射探测器接收扇形射线束在被检查物体上散射的背散射射线以获得背散射数据或背散射信号。例如,可以使旋转机构倒转,使扇形射线束逐渐从预定扇形角减小到零度扇形角。In step 15, the fan beam is gradually reduced from a predetermined fan angle to zero fan angle, and a backscatter detector is used to receive backscattered rays scattered by the fan beam on the inspected object to obtain backscatter data or backscatter signals. For example, the rotation mechanism may be reversed to gradually reduce the fan beam from a predetermined fan angle to a zero degree fan angle.

在步骤17,形成笔形射线束;以及利用背散射探测器接收笔形射线束在被检查物体上散射的背散射射线以获得背散射数据或背散射信号。作为选择,可以在形成扇形射线束之前,形成笔形射线束;以及利用背散射探测器接收笔形射线束在被检查物体上散射的背散射射线以获得背散射数据或背散射信号。In step 17, forming a pencil beam; and receiving backscattered rays scattered by the pencil beam on the inspected object by a backscatter detector to obtain backscatter data or backscatter signals. Alternatively, before forming the fan beam, a pencil beam can be formed; and a backscatter detector is used to receive the backscattered rays scattered by the pencil beam on the inspected object to obtain backscatter data or backscatter signals.

在步骤19,对背散射数据进行处理,根据处理结果判断被检查物体上是否有违禁物品,并且对透射数据进行处理,根据处理结果判断被检查物体中是否有违禁物品。In step 19, the backscatter data is processed, and whether there are prohibited items on the inspected object is judged according to the processing result, and the transmission data is processed, and whether there are prohibited articles in the inspected object is judged according to the processing result.

如图7a、7b、7c、7d所示并参照图1、3,在扇形射线束15逐渐从零度扇形角增加到预定扇形角时,在被检查物体25上产生N个检查区域P1至Pn,扇形射线束15的照射范围从第一检查区域P1延伸至第N检查区域Pn,所述检查方法还包括:在扇形射线束15的照射范围处于第一检查区域P1时,利用背散射探测器4获得表示第一检查区域P1的物质信息的背散射信号S1;在扇形射线束15的照射范围处于第一检查区域P1至第i-1检查区域Pi-1时,利用背散射探测器4接收从第一检查区域P1至第i-1检查区域Pi-1散射的背散射射线21以产生背散射信号Si-1;在扇形射线束15的照射范围处于第一检查区域P1至第i检查区域Pi-1时,利用背散射探测器4接收从第一检查区域P1至第i检查区域Pi散射的背散射射线21以产生背散射信号Si;以及将背散射信号Si减去背散射信号Si-1获得表示第i检查区域Pi的物质信息,其中i为等于2至N的自然数。As shown in Figures 7a, 7b, 7c, 7d and with reference to Figures 1 and 3, when the fan-shaped ray beam 15 gradually increases from zero fan angle to a predetermined fan angle, N inspection regions P1 to P are generated on the object 25 to be inspected n , the irradiation range of the fan-shaped ray beam 15 extends from the first inspection area P 1 to the Nth inspection area P n , and the inspection method further includes: when the irradiation range of the fan-shaped ray beam 15 is in the first inspection area P 1 , using The backscatter detector 4 obtains the backscatter signal S1 representing the material information of the first inspection region P1 ; when the irradiation range of the fan-shaped ray beam 15 is in the first inspection region P1 to the i-1th inspection region P i-1 , using the backscatter detector 4 to receive backscattered rays 21 scattered from the first inspection region P 1 to the i-1th inspection region P i-1 to generate backscattered signals S i-1 ; in the irradiation range of the fan-shaped ray beam 15 When in the first inspection area P 1 to the i-th inspection area P i-1 , the backscattered ray 21 scattered from the first inspection area P 1 to the i-th inspection area P i is received by the backscatter detector 4 to generate a backscatter signal S i ; and subtracting the back-scatter signal S i -1 from the back-scatter signal S i to obtain material information representing the i-th inspection region Pi , wherein i is a natural number equal to 2 to N.

如图7a、7b、7c、7d所示并参照图1、3,在该扇形射线束15逐渐从预定扇形角减小到零度扇形角时,在被检查物体25上产生N个检查区域P1至Pn,扇形射线束15的照射范围从第一检查区域P1至第N检查区域Pn逐渐减小到第一检查区域P1,所述检查方法还包括:在扇形射线束15的照射范围处于第一检查区域P1至第i检查区域Pi时,利用背散射探测器4接收从第一检查区域P1至第i检查区域Pi散射的背散射射线21以产生背散射信号Si;在扇形射线束15的照射范围处于第一检查区域P1至第i-1检查区域Pi-1时,利用背散射探测器4接收从第一检查区域P1至第i-1检查区域散射Pi-1散射的背散射射线以产生背散射信号Si-1;将背散射信号Si减去背散射信号Si-1获得表示第i检查区域Pi的物质信息;以及在扇形射线束15的照射范围处于第一检查区域P1时,利用背散射探测器4获得表示第一检查区域P1的物质信息的背散射信号S1,其中i为等于2至N的自然数。As shown in Figures 7a, 7b, 7c, 7d and with reference to Figures 1 and 3, when the fan-shaped beam 15 gradually decreases from a predetermined fan angle to a zero-degree fan angle, N inspection regions P1 are generated on the inspected object 25 From the first inspection area P 1 to the Nth inspection area P n , the irradiation range of the fan-shaped ray beam 15 gradually decreases to the first inspection area P 1 , and the inspection method also includes: When the range is from the first inspection area P1 to the i-th inspection area P i , use the backscatter detector 4 to receive the backscattered rays 21 scattered from the first inspection area P1 to the i-th inspection area P i to generate a backscatter signal S i ; when the irradiation range of the fan-shaped ray beam 15 is in the first inspection area P 1 to the i-1th inspection area P i-1 , use the backscatter detector 4 to receive inspections from the first inspection area P 1 to the i-1th inspection area Scattering the backscattered rays scattered by P i-1 in the region to generate backscattered signal S i-1 ; subtracting the backscattered signal S i -1 from the backscattered signal S i to obtain material information representing the i-th inspection region P i ; and in When the irradiation range of the fan beam 15 is in the first inspection area P1 , the backscatter signal S1 representing the material information of the first inspection area P1 is obtained by using the backscatter detector 4, where i is a natural number equal to 2 to N.

因此,显然除了第一检查区域P1之外,被检查物体的一列被检查区域中的一个区域的物质信息,通过从一列被检查区域中的、包含所述一个区域的多个区域获得的背散射信号减去从该多个区域除去所述一个区域剩余的区域所获得的背散射信号而获得。Therefore, it is obvious that, except for the first inspection region P1 , the material information of an area in a column of inspected areas of the inspected object is obtained from a plurality of areas in a column of inspected areas that include the one area. The scatter signal is obtained by subtracting a backscatter signal obtained from a region remaining except the one region from the plurality of regions.

下面结合图7a、7b、7c、7d详细地描述背散射减影处理。The backscatter subtraction processing will be described in detail below in conjunction with FIGS. 7a, 7b, 7c, and 7d.

如图7a所示并参照图1、3,当环形部分11以角速度ω旋转时,射线源3发出的射线通过环状部分11的狭缝13形成射线束15,射线束15照射在物体25的位置或区域P1上,此时,从物体25的位置或区域P1散射的背散射射线25被背散射探测器4接收,由此产生背散射信号S1,此时可以不从透射探测器5获得信号。背散射信号S1代表物体的位置或区域P1的物质信息。As shown in Figure 7a and with reference to Figures 1 and 3, when the annular portion 11 rotates at an angular velocity ω, the rays emitted by the radiation source 3 pass through the slit 13 of the annular portion 11 to form a beam of radiation 15, and the beam of radiation 15 is irradiated on the object 25. position or area P 1 , at this time, the backscattered ray 25 scattered from the position or area P 1 of the object 25 is received by the backscatter detector 4, thereby generating a backscatter signal S 1 , which may not be transmitted from the transmission detector 5 Get a signal. The backscattered signal S1 represents the position of the object or material information of the area P1 .

如图7b所示并参照图1、3,当环形部分11以角速度ω继续旋转时,射线源3发出的射线通过环状部分11的狭缝13形成射线束15,此时狭缝13与射线导引装置2的重叠部分增加,因此射线束15变宽,射线束15照射在物体25的位置或区域P1和P2上,此时,从物体25的位置或区域P1和P2散射的背散射射线25被背散射探测器4接收,由此产生背散射信号S2,此时可以不从透射探测器5获得信号。背散射信号S2减去背散射信号S1获得的信号S2-S1代表物体的位置或区域P2的物质信息。As shown in Figure 7b and with reference to Figures 1 and 3, when the annular portion 11 continued to rotate at an angular velocity ω, the rays emitted by the radiation source 3 formed a beam 15 through the slit 13 of the annular portion 11, and the slit 13 and the ray The overlapping portion of the guide 2 is increased, so that the beam 15 is broadened, the beam 15 impinges on the positions or areas P1 and P2 of the object 25, and is now scattered from the positions or areas P1 and P2 of the object 25 The backscattered rays 25 are received by the backscatter detector 4 , thereby generating a backscatter signal S 2 , and no signal can be obtained from the transmission detector 5 at this time. The signal S 2 -S 1 obtained by subtracting the back-scatter signal S 1 from the back-scatter signal S 2 represents the position of the object or the material information of the area P 2 .

如图7c所示并参照图1、3,当环形部分11以角速度ω继续旋转时,射线源3发出的射线通过环状部分11的狭缝13形成射线束15,此时狭缝13与射线导引装置2的重叠部分进一步增加,因此射线束15进一步变宽,射线束15照射在物体25的位置或区域P1、P2和P3上,此时,从物体25的位置或区域P1、P2和P3散射的背散射射线25被背散射探测器4接收,由此产生背散射信号S3,此时可以不从透射探测器5获得信号。背散射信号S3减去背散射信号S2获得的信号S3-S2代表物体的位置或区域P3的物质信息。As shown in Figure 7c and with reference to Figures 1 and 3, when the annular portion 11 continued to rotate at an angular velocity ω, the rays emitted by the radiation source 3 formed a beam 15 through the slit 13 of the annular portion 11, and the slit 13 and the ray The overlapping portion of the guiding device 2 is further increased, so that the beam 15 is further widened, and the beam 15 is irradiated on the positions or areas P 1 , P 2 and P 3 of the object 25, at this time, from the position or area P of the object 25 The backscattered rays 25 scattered by 1 , P 2 and P 3 are received by the backscatter detector 4 , thereby generating a backscatter signal S 3 , which may not be obtained from the transmission detector 5 at this time. The signals S 3 -S 2 obtained by subtracting the back-scatter signal S 2 from the back-scatter signal S 3 represent the position of the object or the material information of the area P 3 .

重复上述过程直到例如狭缝13与射线导引装置2的重叠部分达到预定值,例如达到最大值或最大值的一部分,如图7d所示并参照图1、3,射线束15照射在物体25的位置或区域P1、P2、P3…Pn上,此时,从物体25的位置或区域P1、P2、P3…Pn散射的背散射射线25被背散射探测器4接收,由此产生背散射信号Sn,此时透射探测器5可以接收通过物体的透射射线23,由此产生透视信号TS1。背散射信号Sn减去背散射信号Sn-1获得的信号Sn-Sn-1代表物体的位置或区域Pn的物质信息。Repeat the above-mentioned process until, for example, the overlapping portion of the slit 13 and the ray guiding device 2 reaches a predetermined value, such as reaching a maximum value or a part of the maximum value, as shown in FIG. 7d and with reference to FIGS. On the position or area P 1 , P 2 , P 3 ... P n , at this time, the backscattered ray 25 scattered from the position or area P 1 , P 2 , P 3 ... P n of the object 25 is detected by the backscatter detector 4 receiving, thus generating a backscatter signal S n , and at this time the transmission detector 5 can receive the transmitted ray 23 passing through the object, thereby generating a transmission signal TS 1 . The signal Sn- Sn-1 obtained by subtracting the backscatter signal Sn- 1 from the backscatter signal Sn represents the position of the object or the material information of the region Pn .

通过上述方法,可以得到物体25的从上到下的一列物质信息,并且在位置或区域Pn,投射射线覆盖透射探测器5,由此可以获得一列透射信息。Through the above method, a column of material information from top to bottom of the object 25 can be obtained, and at the position or area Pn , the projected ray covers the transmission detector 5, thereby obtaining a column of transmission information.

随着环形部分11以角速度ω旋转,物体25相对于射线面在垂直于射线面的方向上移动,从而获得物体25的全部背散射信号和全部透射信号。As the annular portion 11 rotates at an angular velocity ω, the object 25 moves relative to the ray plane in a direction perpendicular to the ray plane, so that the full backscattered signal and the full transmitted signal of the object 25 are obtained.

Claims (21)

1. a ray emission device, comprising:
Send the radiographic source of ray; And
Rotating mechanism, this rotating mechanism can rotate around rotation, and the part of this rotating mechanism can be rotated around radiographic source, and the part of this rotating mechanism has the opening that can make ray pass through, and the described opening of this rotating mechanism comprises slit.
2. ray emission device according to claim 1, the described part of wherein said rotating mechanism is annulus.
3. ray emission device according to claim 1, wherein said slit roughly at grade.
4. ray emission device according to claim 3, wherein said plane is substantially vertical with the rotation of rotating mechanism.
5. ray emission device according to claim 1, also comprise the ray guidance device being connected with radiographic source, this ray guidance device has the ray import being connected with radiographic source, and the ray outlet that ray is penetrated from this ray guidance device, the described part of described rotating mechanism can be rotated in the ray outlet of this ray guidance device in the described ray outlet with respect to described ray guidance device.
6. ray emission device according to claim 1, wherein said opening comprises two isolated described slits in a circumferential direction.
7. ray emission device according to claim 1, wherein said opening is also included in the described part of rotating mechanism and described slit isolated form of a stroke or a combination of strokes ray beam hole in a circumferential direction.
8. ray emission device according to claim 5, the beam wherein by ray guidance device, radiographic source being sent is formed as fan-ray beam.
9. ray emission device according to claim 5, wherein said ray guidance device is arranged between the described part of described radiographic source and described rotating mechanism.
10. an imaging system, comprising:
Ray emission device according to claim 1; And
For receiving the detector of the ray that ray emission device sends.
11. imaging systems according to claim 10, wherein said detector is the backward scattering detector of the ray backward scattering ray of scattering on inspected object for receiving described ray emission device transmitting; And for receiving at least one of the transmission detectors transmitting of described ray emission device, that see through the ray after inspected object.
12. 1 kinds of inspection methods, comprising:
Form fan-ray beam, this fan-ray beam is increased to predetermined fan angle from zero degree segment angle gradually.
13. inspection methods according to claim 12, wherein
In the time that this fan-ray beam reaches predetermined fan angle, utilize transmission detectors to receive through the described fan-ray beam after inspected object and see through data to obtain.
14. inspection methods according to claim 12, also comprise:
Be increased to the process of predetermined fan angle from zero degree segment angle gradually at this fan-ray beam,
Utilize the backward scattering ray of backward scattering detector reception fan-ray beam scattering on inspected object to obtain backscatter signal.
15. inspection methods according to claim 12, wherein
Described predetermined fan angle is maximum segment angle.
16. according to the inspection method described in claim 12 or 14, also comprises:
Make fan-ray beam be reduced to zero degree segment angle from predetermined fan angle gradually, and
Utilize the backward scattering ray of backward scattering detector reception fan-ray beam scattering on inspected object to obtain backward scattering data.
17. inspection methods according to claim 12, also comprise:
Before forming fan-ray beam, form form of a stroke or a combination of strokes beam; And
Utilize the backward scattering ray of backward scattering detector reception form of a stroke or a combination of strokes beam scattering on inspected object to obtain backscatter signal.
18. according to the inspection method described in claim 12 or 16, also comprises:
Form form of a stroke or a combination of strokes beam; And
Utilize the backward scattering ray of backward scattering detector reception form of a stroke or a combination of strokes beam scattering on inspected object to obtain backscatter signal.
19. according to the inspection method described in claim 14 or 16, wherein:
One row of inspected object are examined the material information in a region in region, deduct and remove the backscatter signal that remaining region, a described region obtains from the plurality of region and obtain by be examined backscatter signal that multiple regions region, that comprise a described region obtain from row.
20. inspection methods according to claim 14, wherein;
In the time that this fan-ray beam is increased to predetermined fan angle from zero degree segment angle gradually, on inspected object, produce N inspection area, the range of exposures of fan-ray beam extends to N inspection area from the first inspection area,
Described inspection method comprises:
During in the first inspection area, utilize backward scattering detector to obtain the backscatter signal S of the material information that represents the first inspection area in the range of exposures of fan-ray beam 1;
During in the first i-1 inspection area, inspection area to the, utilize backward scattering detector to receive from the backward scattering ray of the first inspection area to the i-1 inspection area scattering to produce backscatter signal S in the range of exposures of fan-ray beam i-1;
During in the first i inspection area, inspection area to the, utilize backward scattering detector to receive from the backward scattering ray of the first inspection area to the i inspection area scattering to produce backscatter signal S in the range of exposures of fan-ray beam i; And
By backscatter signal S ideduct backscatter signal S i-1obtain the material information that represents i inspection area,
Wherein i equals 2 to N natural number.
21. inspection methods according to claim 16, wherein;
In the time that this fan-ray beam is reduced to zero degree segment angle from predetermined fan angle gradually, on inspected object, produce N inspection area, the range of exposures of fan-ray beam is reduced to the first inspection area gradually from the first N inspection area, inspection area to the,
Described inspection method comprises:
During in the first i inspection area, inspection area to the, utilize backward scattering detector to receive from the backward scattering ray of the first inspection area to the i inspection area scattering to produce backscatter signal S in the range of exposures of fan-ray beam i;
During in the first i-1 inspection area, inspection area to the, utilize backward scattering detector to receive from the backward scattering ray of the first inspection area to the i-1 inspection area scattering to produce backscatter signal S in the range of exposures of fan-ray beam i-1;
By backscatter signal S ideduct backscatter signal S i-1obtain the material information that represents i inspection area; And
During in the first inspection area, utilize backward scattering detector to obtain the backscatter signal S of the material information that represents the first inspection area in the range of exposures of fan-ray beam 1,
Wherein i equals 2 to N natural number.
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