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CN103895376B - Method for manufacturing microfluidic dielectrophoresis chips through screen printing technology - Google Patents

Method for manufacturing microfluidic dielectrophoresis chips through screen printing technology Download PDF

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CN103895376B
CN103895376B CN201410109289.0A CN201410109289A CN103895376B CN 103895376 B CN103895376 B CN 103895376B CN 201410109289 A CN201410109289 A CN 201410109289A CN 103895376 B CN103895376 B CN 103895376B
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microchannel
screen printing
microelectrode
ink
screen
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CN103895376A (en
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董华
朱洪武
林晓光
苏勇
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South China University of Technology SCUT
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Abstract

本发明公开了一种利用丝网印刷技术制备微流控介电泳芯片的方法,包括以下步骤:(1)绘制微电极图案与微通道图案,制作微电极网版与微通道网版;(2)利用微电极网版,在承印物上印刷导电油墨,制备微电极;(3)利用微通道网版,用靶标对位的方法在步骤(2)得到的印有微电极的承印物上印刷可固化的绝缘油墨,制作微通道;(4)微通道上方覆盖封接盖片,并固化,使封接盖片与微通道封接。本发明有效解决了传统微流控介电泳芯片制作周期长、效率低、不适合于大规模工业化生产的难题。

The invention discloses a method for preparing a microfluidic dielectrophoresis chip by using screen printing technology, comprising the following steps: (1) drawing a microelectrode pattern and a microchannel pattern, and making a microelectrode screen and a microchannel screen; (2) ) Using a micro-electrode screen to print conductive ink on the substrate to prepare a micro-electrode; (3) Using a micro-channel screen to print on the substrate printed with micro-electrodes obtained in step (2) by using the method of target alignment The curable insulating ink is used to make the microchannel; (4) the microchannel is covered with a sealing cover and cured to seal the sealing cover with the microchannel. The invention effectively solves the problems of long production cycle, low efficiency and unsuitability for large-scale industrial production of traditional microfluidic dielectrophoresis chips.

Description

一种利用丝网印刷技术制备微流控介电泳芯片的方法A method for preparing a microfluidic dielectrophoretic chip using screen printing technology

技术领域technical field

本发明涉及微流控介电泳芯片,特别涉及一种利用丝网印刷技术制备微流控介电泳芯片的方法。The invention relates to a microfluidic dielectrophoresis chip, in particular to a method for preparing a microfluidic dielectrophoresis chip by using screen printing technology.

背景技术Background technique

微流控芯片是一个多学科交叉的新领域,它借助微机电加工、生物、化学和物理等相关原理和技术,将样品制备、反应、分离和检测等基本操作单元集成在一块几平方厘米的芯片上,由微通道形成网络,以可控流体贯穿整个系统,用以实现常规化学或生物实验室的各种功能。微流控芯片具有试剂消耗少、检测限高、分析时间短、易功能集成、携带方便等优点,目前已在生物化学、医药卫生、临床诊断、食品安全和环境监测等方面得到了广泛的应用。Microfluidic chip is a new interdisciplinary field, which integrates basic operation units such as sample preparation, reaction, separation and detection in a few square centimeters with the help of relevant principles and technologies such as micro-electromechanical processing, biology, chemistry and physics. On the chip, a network of microchannels is formed to run through the entire system with controllable fluids to achieve various functions in conventional chemical or biological laboratories. Microfluidic chips have the advantages of low reagent consumption, high detection limit, short analysis time, easy function integration, and convenient portability. They have been widely used in biochemistry, medicine and health, clinical diagnosis, food safety, and environmental monitoring. .

介电泳现象早在20世纪50年代就被Pohl等人发现,并在1978年将其引入化学分析与生物研究领域。但直到90年代,随着微电子技术(MEMS)的发展,人们对介电泳的研究才进入了崭新的阶段。利用微加工技术在基底材料表面制作出微纳米级别的电极(或电极阵列),使得原本需施加上千伏电压才能得到的高电场强度如今只需要几伏或几十伏就能达到,大大减小了对被分离物质特别是生物分子(如细胞,蛋白等)的不利影响,使介电泳成为驱动、分离、浓缩样品的有力工具。当前,介电泳技术的发展趋势是将其融入到微流控芯片中,使整个物质分离过程自动化和集成化,或将介电泳技术与其他单元技术相结合以实现更多的功能。例如,Petig、Morgan、Green等人通过制造金属微电极成功地分离了多种细胞。微流控技术的发展使得人们可以制造出结构更合理的装置来控制流体,也进一步加深了对介电力与流动力相互作用的理解。2000年以后,随着人们对介电泳现象认识的不断深化,又陆续涌现出了多种新的介电泳技术,例如,绝缘体介电泳(Insulator-based DEP)、光诱导介电泳(light-induced DEP)、碳电极介电泳(Carbon DEP)、非接触式介电泳(contactlessDEP)等。介电泳不仅在操纵细胞和生物分子等方面有着重要的应用,而且在其它领域也显示出巨大潜力,例如,控制砷化铟纳米线的排布;制作碳纳米管AFM探针;从半导体单壁碳纳米管中分离出金属单壁碳纳米管;操纵纳米粒子调节光波导等等。The phenomenon of dielectrophoresis was discovered by Pohl et al. in the 1950s, and it was introduced into the field of chemical analysis and biological research in 1978. But until the 1990s, with the development of microelectronics technology (MEMS), people's research on dielectrophoresis entered a new stage. Micro-nanometer electrodes (or electrode arrays) are produced on the surface of the substrate material by using micro-machining technology, so that the high electric field strength that can be obtained by applying a voltage of thousands of volts can now be achieved with only a few volts or tens of volts, greatly reducing the The adverse effects on the separated substances, especially biomolecules (such as cells, proteins, etc.), are minimized, making dielectrophoresis a powerful tool for driving, separating and concentrating samples. At present, the development trend of dielectrophoresis technology is to integrate it into microfluidic chips to automate and integrate the entire material separation process, or to combine dielectrophoresis technology with other unit technologies to achieve more functions. For example, Petig, Morgan, Green et al. successfully isolated a variety of cells by fabricating metal microelectrodes. The development of microfluidic technology has enabled people to manufacture devices with more reasonable structures to control fluids, and has further deepened the understanding of the interaction between dielectric force and flow force. After 2000, with the deepening of people's understanding of the phenomenon of dielectrophoresis, a variety of new dielectrophoresis technologies have emerged, such as insulator-based DEP, light-induced DEP, and light-induced DEP. ), carbon electrode dielectrophoresis (Carbon DEP), non-contact dielectrophoresis (contactless DEP), etc. Dielectrophoresis not only has important applications in manipulating cells and biomolecules, but also shows great potential in other fields, such as controlling the arrangement of indium arsenide nanowires; making carbon nanotube AFM probes; Separation of metallic single-walled carbon nanotubes from carbon nanotubes; manipulation of nanoparticles to tune optical waveguides, and more.

目前,介电泳芯片大多是采用传统的基于光刻的微加工方法制作而成。该技术具有工艺复杂、制作成本高、加工周期长等不足,并不适合大规模工业化生产,严重限制了介电泳芯片的实际应用。Currently, dielectrophoretic chips are mostly fabricated using traditional photolithography-based microfabrication methods. This technology has disadvantages such as complex process, high production cost, and long processing cycle, and is not suitable for large-scale industrial production, which severely limits the practical application of dielectrophoretic chips.

丝网印刷法是一种非常成熟的材料加工技术,广泛应用于工业生产中。它利用制板图文部分的网孔能透过油墨,而非图文部分的网孔不透油墨的工作原理在基底材料表面进行印刷,制作出具有特定图案的材料薄层。印刷时,在丝网印版一端倒入油墨,用刮印刮板对丝网印版上的油墨部位施加一定压力,同时向丝网印版另一端移动。油墨在移动中被刮板从图文部分的网孔中挤压到承印物上。由于丝网印版与承印物之间保持了一定的间隙,印刷时丝网印版会通过自身的张力而产生对刮板的回弹力,使得丝网印版与承印物之间呈移动式线接触,接触线随刮板移动而移动,而印版其它部分与承印物呈脱离状态。从而保证了印刷精度,避免蹭脏承印物。当刮板刮过整个版面后抬起,丝网印版也同时升起,并将油墨轻刮回初始位置,完成一次印刷全过程。Screen printing is a very mature material processing technology widely used in industrial production. It uses the working principle that the mesh of the graphic part of the board can pass through the ink, while the mesh of the non-graphic part is impervious to ink to print on the surface of the base material to produce a thin layer of material with a specific pattern. When printing, pour ink into one end of the screen printing plate, apply a certain amount of pressure on the ink part of the screen printing plate with the scraper, and at the same time, move towards the other end of the screen printing plate. The ink is squeezed by the scraper from the mesh of the graphic part to the substrate during the movement. Since there is a certain gap between the screen printing plate and the substrate, the screen printing plate will generate resilience against the scraper through its own tension during printing, so that there is a moving line between the screen printing plate and the substrate. Contact, the contact line moves with the movement of the scraper, while other parts of the printing plate are separated from the substrate. In this way, the printing accuracy is guaranteed and the substrate is avoided from being dirty. When the scraper scrapes across the entire page and lifts up, the screen printing plate also rises up at the same time, scraping the ink back to the original position lightly, and completing a whole printing process.

发明内容Contents of the invention

为了克服现有介电泳芯片加工制备技术的缺点与不足,本发明提供了一种利用丝网印刷技术制备微流控介电泳芯片的方法,以期解决微流控介电泳芯片制作周期长、效率低的难题。In order to overcome the shortcomings and deficiencies of the existing dielectrophoretic chip processing and preparation technology, the present invention provides a method for preparing a microfluidic dielectrophoretic chip using screen printing technology, in order to solve the long production cycle and low efficiency of the microfluidic dielectrophoretic chip. problem.

本发明涉及的微流控介电泳芯片的制备方法通过以下技术方案实现:The preparation method of the microfluidic dielectrophoresis chip involved in the present invention is realized by the following technical solutions:

一种利用丝网印刷技术制备微流控介电泳芯片的方法,包括以下步骤:A method for preparing a microfluidic dielectrophoresis chip by screen printing technology, comprising the following steps:

(1)绘制微电极图案与微通道图案,制作微电极网版与微通道网版;(1) Draw microelectrode patterns and microchannel patterns, and make microelectrode screens and microchannel screens;

(2)利用微电极网版,在承印物上印刷导电油墨,制备单个微电极或微电极阵列;(2) Use the microelectrode screen to print conductive ink on the substrate to prepare a single microelectrode or microelectrode array;

(3)利用微通道网版,用靶标对位的方式在步骤(2)所得印有微电极的承印物上印刷可固化的绝缘油墨,制作微通道;(3) Using the micro-channel screen to print curable insulating ink on the substrate printed with micro-electrodes obtained in step (2) by means of target alignment to make micro-channels;

(4)微通道上方覆盖封接盖片,并通过热固化或紫外固化的方式使封接盖片与微通道封接。(4) The microchannel is covered with a sealing cover sheet, and the sealing cover sheet is sealed with the microchannel by heat curing or ultraviolet curing.

所述导电油墨为导电金属浆料、导电半导体浆料、导电碳浆料中的至少一种。The conductive ink is at least one of conductive metal paste, conductive semiconductor paste, and conductive carbon paste.

所述可固化的绝缘油墨为UV固化油墨或热固化油墨。The curable insulating ink is UV curable ink or heat curable ink.

所述承印物为PVC、PP、PS、PEI、ABS、PC、PTFE、PE、PCB、PMMA、玻璃、尼龙、橡胶制作成的薄膜或块状材料。The substrate is a film or bulk material made of PVC, PP, PS, PEI, ABS, PC, PTFE, PE, PCB, PMMA, glass, nylon, or rubber.

所述封接盖片由玻璃、PMMA、PDMS、PP、PET、PC、PCB、PVC、尼龙、橡胶等制备而成。The sealing cover is made of glass, PMMA, PDMS, PP, PET, PC, PCB, PVC, nylon, rubber and the like.

与现有技术相比,本发明具有以下优点和有益效果:Compared with the prior art, the present invention has the following advantages and beneficial effects:

本发明解决了现有微加工技术制作微流控介电泳芯片存在的成本高、周期长、不适合大规模工业化生产的缺点。本发明采用丝网印刷技术,省去了繁琐的加工制作步骤,根据网版的大小,一次印刷可得到几十甚至成百上千片微电极或者微通道,无论是生产设备、耗材、加工成本或是对生产环境的要求,均远低于传统的微电子技术,且丝网印刷法制作芯片的速度快、产量高、适合大规模工业化生产,具有广阔的产业化前景。The invention solves the disadvantages of high cost, long period and unsuitability for large-scale industrialized production of the microfluidic dielectrophoresis chip produced by the existing microprocessing technology. The present invention adopts screen printing technology, which saves cumbersome processing and manufacturing steps. According to the size of the screen, dozens or even hundreds of micro-electrodes or micro-channels can be obtained in one printing, regardless of production equipment, consumables, and processing costs. Or the requirements for the production environment are far lower than traditional microelectronics technology, and the screen printing method has fast speed and high output, is suitable for large-scale industrial production, and has broad industrialization prospects.

附图说明Description of drawings

图1为本发明的实施例的利用丝网印刷技术制备微流控介电泳芯片的方法步骤示意图。FIG. 1 is a schematic diagram of the steps of the method for preparing a microfluidic dielectrophoretic chip using screen printing technology according to an embodiment of the present invention.

图2为本发明的实施例1的微电极阵列图案。FIG. 2 is the microelectrode array pattern of Embodiment 1 of the present invention.

图3为本发明的实施例1的微通道图案。Fig. 3 is the microchannel pattern of embodiment 1 of the present invention.

图4为本发明的实施例1制备的微流控介电泳芯片示意图。Fig. 4 is a schematic diagram of the microfluidic dielectrophoresis chip prepared in Example 1 of the present invention.

图5为将含有聚苯乙烯微球的溶液注入实施例1制备的微流控介电泳芯片后,施加电信号前的效果图。Fig. 5 is an effect diagram before applying an electric signal after injecting a solution containing polystyrene microspheres into the microfluidic dielectrophoresis chip prepared in Example 1.

图6为将含有聚苯乙烯微球的溶液注入实施例1制备的微流控介电泳芯片后,施加电信号后的效果图。FIG. 6 is an effect diagram after injecting a solution containing polystyrene microspheres into the microfluidic dielectrophoresis chip prepared in Example 1 and applying an electric signal.

图7为将含有酵母细胞的溶液注入实施例1制备的微流控介电泳芯片后,施加电信号后的效果图。FIG. 7 is an effect diagram after injecting a solution containing yeast cells into the microfluidic dielectrophoresis chip prepared in Example 1 and applying an electrical signal.

图8为本发明的实施例2的微电极阵列图案。FIG. 8 is a microelectrode array pattern of Embodiment 2 of the present invention.

图9为将含有聚苯乙烯微球的溶液注入实施例2制备的微流控介电泳芯片后,施加电信号前的效果图。Fig. 9 is an effect diagram before applying an electric signal after injecting a solution containing polystyrene microspheres into the microfluidic dielectrophoresis chip prepared in Example 2.

图10为将含有聚苯乙烯微球的溶液注入实施例2制备的微流控介电泳芯片后,施加电信号后的效果图。FIG. 10 is an effect diagram after injecting the solution containing polystyrene microspheres into the microfluidic dielectrophoresis chip prepared in Example 2 and applying an electric signal.

图11为将含有酵母细胞的溶液注入实施例2制备的微流控介电泳芯片后,施加电信号后的效果图。Fig. 11 is an effect diagram after injecting the solution containing yeast cells into the microfluidic dielectrophoresis chip prepared in Example 2 and applying an electric signal.

图12为本发明的实施例3的微电极阵列图案。FIG. 12 is the microelectrode array pattern of Embodiment 3 of the present invention.

具体实施方式detailed description

下面结合实施例,对本发明作进一步地详细说明,但本发明的实施方式不限于此。The present invention will be described in further detail below in conjunction with the examples, but the embodiments of the present invention are not limited thereto.

实施例1Example 1

如图1所示,本实施例的利用丝网印刷技术制备微流控介电泳芯片的方法,包括以下步骤:As shown in Figure 1, the method for preparing a microfluidic dielectrophoretic chip using screen printing technology in this embodiment includes the following steps:

绘制微电极阵列图案(如图2)与微通道图案(图3),制作300目微电极网版与微通道网版;利用微电极网版,在玻璃表面印刷导电碳油墨,制备微电极阵列;利用微通道网版,用靶标对位的方式在得到的印有微电极的承印物上印刷可固化的绝缘油墨,制作微通道(该步骤可多次重复进行以获得具有不同厚度的微通道);在微通道上方覆盖聚二甲基硅氧烷(PDMS)封接盖片,并热固化使封接盖片与微通道封接。Draw the microelectrode array pattern (as shown in Figure 2) and the microchannel pattern (as shown in Figure 3), and make a 300-mesh microelectrode screen and microchannel screen; use the microelectrode screen to print conductive carbon ink on the glass surface to prepare the microelectrode array ; Utilize the micro-channel screen, print curable insulating ink on the substrate printed with micro-electrodes obtained in the way of target alignment, and make micro-channels (this step can be repeated many times to obtain micro-channels with different thicknesses) ); cover the polydimethylsiloxane (PDMS) sealing cover slip above the microchannel, and heat-cure to seal the sealing cover slip with the microchannel.

本实施例制备的微流控介电泳芯片如图4所示。The microfluidic dielectrophoresis chip prepared in this example is shown in FIG. 4 .

将含有聚苯乙烯微球(PS)的溶液注入本实施例制备的微流控介电泳芯片,施加合适频率和振幅的交流电信号。图5为施加电信号前的效果图,图6为施加电信号后的效果图。有图5~6可知,PS微球只受到负介电力集中在电极中间。这说明丝网印刷法制作的微流控介电泳芯片能产生介电力进而分离纯化物质。A solution containing polystyrene microspheres (PS) was injected into the microfluidic dielectrophoresis chip prepared in this example, and an alternating current signal of a suitable frequency and amplitude was applied. Fig. 5 is an effect diagram before an electric signal is applied, and Fig. 6 is an effect diagram after an electric signal is applied. From Figures 5 to 6, it can be seen that PS microspheres are only subjected to negative dielectric force and concentrated in the middle of the electrode. This shows that the microfluidic dielectrophoresis chip fabricated by the screen printing method can generate dielectric force to separate and purify substances.

将含有酵母细胞的溶液注入本实施例制备的微流控介电泳芯片,施加合适频率和振幅的交流电信号,图7为施加电信号后的效果图,由图7可知,发现酵母细胞在峰峰电压为10V,频率为100kHz的条件下收到正介电力的作用。这说明丝网印刷法制作的微流控介电泳芯片能产生介电力进而分离纯化生物分子。The solution containing yeast cells was injected into the microfluidic dielectrophoresis chip prepared in this example, and an alternating current signal of appropriate frequency and amplitude was applied. Figure 7 is the effect diagram after applying the electric signal. Under the conditions of peak voltage of 10V and frequency of 100kHz, positive dielectric power is received. This shows that the microfluidic dielectrophoresis chip fabricated by screen printing can generate dielectric force to separate and purify biomolecules.

实施例2Example 2

绘制微电极图案(如图8所示)与微通道图案,制作400目微电极网版与微通道网版。使用微电极印刷网版,在玻璃表面印刷导电铜油墨制备微电极,待热固化后,利用微通道网版,用靶标对位的方式在印刷有微电极的玻璃上印刷可紫外固化的绝缘油墨,制作微通道;在微通道上方覆盖聚甲基丙烯酸甲酯(PMMA)封接盖片,并紫外固化使封接盖片与微通道封接;Draw microelectrode patterns (as shown in Figure 8) and microchannel patterns, and make 400-mesh microelectrode screens and microchannel screens. Use the micro-electrode printing screen to print conductive copper ink on the glass surface to prepare the micro-electrode. After heat curing, use the micro-channel screen to print the UV-curable insulating ink on the glass with the micro-electrode in the way of target alignment. , make the microchannel; cover the polymethyl methacrylate (PMMA) sealing cover sheet above the microchannel, and ultraviolet curing makes the sealing cover sheet and the microchannel seal;

将含有聚苯乙烯微球(PS)的溶液注入本实施例制备的微流控介电泳芯片,施加合适频率和振幅的交流电信号。图9为施加电信号前的效果图,图10为施加电信号后的效果图。有图9~10可知,PS微球只受到负介电力集中在电极中间。这说明丝网印刷法制作的微流控介电泳芯片能产生介电力进而分离纯化物质。A solution containing polystyrene microspheres (PS) was injected into the microfluidic dielectrophoresis chip prepared in this example, and an alternating current signal of a suitable frequency and amplitude was applied. Fig. 9 is an effect diagram before applying an electric signal, and Fig. 10 is an effect diagram after applying an electric signal. From Figures 9 to 10, it can be seen that the PS microspheres are concentrated in the middle of the electrodes only by the negative dielectric force. This shows that the microfluidic dielectrophoresis chip fabricated by the screen printing method can generate dielectric force to separate and purify substances.

将含有酵母细胞的溶液注入本实施例制备的微流控介电泳芯片,施加合适频率和振幅的交流电信号,图11为施加电信号后的效果图。由图可知,发现酵母细胞在峰峰电压为10V,频率为100kHz的条件下收到正介电力的作用。这说明丝网印刷法制作的微流控介电泳芯片能产生介电力进而分离纯化生物分子。The solution containing yeast cells was injected into the microfluidic dielectrophoresis chip prepared in this example, and an alternating current signal of appropriate frequency and amplitude was applied. Figure 11 is the effect diagram after applying the electric signal. It can be seen from the figure that the yeast cells were found to receive positive dielectric power under the conditions of a peak-to-peak voltage of 10V and a frequency of 100kHz. This shows that the microfluidic dielectrophoresis chip fabricated by screen printing can generate dielectric force to separate and purify biomolecules.

实施例3Example 3

本实施例除采用如图12所示的微电极图案,其余特征均与实施例1同,测试结果与实施例1类似,在此不再赘述。Except for adopting the microelectrode pattern shown in FIG. 12 , other features of this embodiment are the same as those of embodiment 1, and the test results are similar to those of embodiment 1, which will not be repeated here.

上述实施例中的承印物除可为玻璃外,还可为PVC、PP、PS、PEI、ABS、PC、PTFE、PE、PCB、PMMA、玻璃、尼龙或橡胶制作成的薄膜或块状材料;导电油墨还可采用导电半导体浆料,或是导电金属浆料、导电半导体浆料、导电碳浆料中两种以上的混合物;封接盖片还可由玻璃PP、PET、PC、PCB、PVC、尼龙或橡胶制备而成。In addition to glass, the substrate in the above embodiments can also be a film or block material made of PVC, PP, PS, PEI, ABS, PC, PTFE, PE, PCB, PMMA, glass, nylon or rubber; The conductive ink can also use conductive semiconductor paste, or a mixture of two or more of conductive metal paste, conductive semiconductor paste, and conductive carbon paste; the sealing cover can also be made of glass PP, PET, PC, PCB, PVC, Prepared from nylon or rubber.

上述实施例为本发明较佳的实施方式,但本发明的实施方式并不受所述实施例的限制,其他的任何未背离本发明的精神实质与原理下所作的改变、修饰、替代、组合、简化,均应为等效的置换方式,都包含在本发明的保护范围之内。The above-mentioned embodiment is a preferred embodiment of the present invention, but the embodiment of the present invention is not limited by the embodiment, and any other changes, modifications, substitutions and combinations made without departing from the spirit and principle of the present invention , simplification, all should be equivalent replacement methods, and are all included in the protection scope of the present invention.

Claims (3)

1.一种利用丝网印刷技术制备微流控介电泳芯片的方法,其特征在于,包括以下步骤:1. A method utilizing screen printing technology to prepare microfluidic dielectrophoresis chip, is characterized in that, comprises the following steps: (1)绘制微电极图案与微通道图案,制作微电极网版与微通道网版;(1) Draw microelectrode patterns and microchannel patterns, and make microelectrode screens and microchannel screens; (2)利用微电极网版,在承印物上印刷导电油墨,制备单个微电极或微电极阵列;所述导电油墨为导电金属浆料、导电半导体浆料、导电碳浆料中的至少一种;(2) Utilize the microelectrode screen to print conductive ink on the substrate to prepare a single microelectrode or microelectrode array; the conductive ink is at least one of conductive metal paste, conductive semiconductor paste, and conductive carbon paste ; (3)利用微通道网版,用靶标对位的方式在步骤(2)所得印有微电极的承印物上印刷可固化的绝缘油墨,制作微通道;所述可固化的绝缘油墨为可紫外固化油墨或可热固化油墨;(3) Utilize the microchannel screen plate to print curable insulating ink on the substrate printed with microelectrodes obtained in step (2) by means of target alignment to make microchannels; the curable insulating ink is ultraviolet curing ink or heat curable ink; (4)微通道上方覆盖封接盖片,通过热固化或紫外固化,使封接盖片与微通道封接;(4) Cover the sealing cover sheet above the microchannel, and make the sealing cover sheet and the microchannel seal by heat curing or ultraviolet curing; 步骤(3)可多次重复进行以获得具有不同厚度的微通道;Step (3) can be repeated many times to obtain microchannels with different thicknesses; 利用丝网印刷技术制备的微流控介电泳芯片通过产生介电力分离纯化物质。The microfluidic dielectrophoresis chip prepared by screen printing technology separates and purifies substances by generating dielectric force. 2.根据权利要求1所述的利用丝网印刷技术制备微流控介电泳芯片的方法,其特征在于,所述承印物为PVC、PP、PS、PEI、ABS、PC、PTFE、PE、PCB、PMMA、玻璃、尼龙或橡胶制作成的薄膜或块状材料。2. utilize screen printing technology to prepare the method for microfluidic dielectrophoresis chip according to claim 1, it is characterized in that, described substrate is PVC, PP, PS, PEI, ABS, PC, PTFE, PE, PCB , PMMA, glass, nylon or rubber made of film or block material. 3.根据权利要求1所述的利用丝网印刷技术制备微流控介电泳芯片的方法,其特征在于,所述封接盖片由玻璃、PMMA、PDMS、PP、PET、PC、PCB、PVC、尼龙或橡胶制备而成。3. utilize screen printing technology to prepare the method for microfluidic dielectrophoresis chip according to claim 1, it is characterized in that, described sealing cover sheet is made of glass, PMMA, PDMS, PP, PET, PC, PCB, PVC , nylon or rubber.
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