CN103885132A

CN103885132A - Manufacturing method for optical coupling device

Info

Publication number: CN103885132A
Application number: CN201210554082.5A
Authority: CN
Inventors: 黄新舜
Original assignee: Hongfujin Precision Industry Shenzhen Co Ltd; Hon Hai Precision Industry Co Ltd
Current assignee: Hongfujin Precision Industry Shenzhen Co Ltd; Hon Hai Precision Industry Co Ltd
Priority date: 2012-12-19
Filing date: 2012-12-19
Publication date: 2014-06-25

Abstract

The invention provides a manufacturing method for an optical coupling device. The manufacturing method comprises the following steps that: a flat optical waveguide is provided, wherein the flat optical waveguide includes a top surface and a side surface vertically connected with the top surface, and the side surface is used for being abutted with a laser light source and the laser beam emitted by the laser light source vertically enters the side surface; a dielectric grating film is plated on the top surface by using a high-refraction index material, wherein the dielectric grating film contains a plurality of bar-shaped portions perpendicular to the side surface; and a pair of bar-shaped electrodes are formed at the top surface, wherein the electrodes are respectively arranged at the two sides of the dielectric grating film and are parallel to the plurality of bar-shaped portions. With the optical coupling device that is manufactured by the manufacturing method, the laser beam can be effectively converged into an optical element.

Description

For the manufacture of the manufacture method of optically coupled device

Technical field

The present invention relates to integrated optical device, particularly a kind of manufacture method for the manufacture of optically coupled device.

Background technology

In integrated optics, the problem that the coupling of light source and optical element need to be considered has: although integrated optics generally adopt directivity preferably laser as light source, but the light beam that laser sends still has certain angle of divergence, if directly allow light source dock with optical element, divergent rays in light beam cannot enter optical element, and light utilization efficiency is low.Therefore, how light source is coupled to optical element so that the light beam of dispersing assemble into optical element with improve light utilization efficiency be an important topic.

Summary of the invention

In view of this, be necessary to provide a kind of manufacture method of optically coupled device for the manufacture of improving light utilization efficiency.

For the manufacture of a manufacture method for optically coupled device, it comprises:

A planar light waveguide is provided, and this planar light waveguide comprises an end face and one and this end face side connected vertically, vertical this side of injecting of laser beam that this side is used for a LASER Light Source is docked and this LASER Light Source is sent;

Utilize high-index material to plate one deck dielectric grating film at this end face, this dielectric grating film comprises many strip parts perpendicular to this side; And

Form a pair of strip shaped electric poles at this end face, this lays respectively at this dielectric grating film both sides to electrode, and is parallel to the plurality of strip part.

So, according to integrated optics theory, this dielectric grating film and this planar light waveguide form loaded type optical waveguide (strip/grating loaded waveguide), and the equivalent refractive index that this planar light waveguide loads the part of this dielectric grating film becomes large.So, by the structure of this dielectric grating film is rationally set, for example, be arranged to chirp grating (chirped grating) and just can form the diffraction type optical waveguide lens of a chirp grating type.Thereby and this can change the refractive index of this planar light waveguide by load-modulate electric field to electrode by electrooptical effect, thereby change the focal length of this diffraction type optical waveguide lens, effectively this laser beam is assembled into optical element.

Brief description of the drawings

Fig. 1 is the working state schematic representation of the optically coupled device of the manufacture method manufacture of preferred embodiments of the present invention.

Fig. 2 is the diagrammatic cross-section of the optically coupled device II-II along the line of Fig. 1.

Fig. 3 to Fig. 8 is the schematic diagram of each step of the manufacture method of preferred embodiments of the present invention.

Main element symbol description

Optically coupled device	10
		Planar light waveguide	110
End face	111
		Side	112
Dielectric grating film	120
		High-index material film	120a
Strip part
		121
Electrode			130
	Substrate	140
LASER Light Source			20
	Laser beam	21
Optical element			30

Following embodiment further illustrates the present invention in connection with above-mentioned accompanying drawing.

Embodiment

Refer to Fig. 1 and Fig. 2, the manufacture method of preferred embodiments of the present invention is for the manufacture of an optically coupled device 10, and this manufacture method comprises:

Step S01 a: planar light waveguide 110 is provided, this planar light waveguide 110 comprises an end face 111 and one and this end face 111 side 112 connected vertically, this side 112 for a LASER Light Source 20 is docked and this LASER Light Source 20 is sent vertical this side 112 of injecting of laser beam 21.

Step S02: utilize high-index material to plate one deck dielectric grating film 120 at this end face, this dielectric grating film 120 comprises many strip parts 121 perpendicular to this side.

Step S03: form a pair of strip shaped electric poles 130 at this end face 111, this lays respectively at this dielectric grating film 120 both sides to electrode 130, and is parallel to the plurality of strip part 121.

So, according to integrated optics theory, this dielectric grating film 120 forms loaded type optical waveguide with this planar light waveguide 110, and the equivalent refractive index that this planar light waveguide 110 loads the part of this dielectric grating film 120 becomes large.So, by the structure of this dielectric grating film 120 is rationally set, for example, be arranged to chirp grating and just can form the diffraction type optical waveguide lens of a chirp grating type.Thereby and this can change the refractive index of this planar light waveguide 110 by load-modulate electric field to electrode 130 by electrooptical effect, thereby change the focal length of this diffraction type optical waveguide lens, effectively this laser beam 21 is assembled into an optical element 30.

Refer to Fig. 3 to Fig. 4, particularly, comprise following sub-step at step S01:

Step S011 a: substrate 140 is provided, and this substrate comprises this end face 111 and this side 112.

Step S012: form this planar light waveguide 110 to these substrate 140 internal divergence on this end face 111.

More concrete, due to lithium niobate (LiNbO ₃) crystal (LN) has higher reaction velocity, and consider that lithium niobate diffuse metal titanium (simple substance) can form the loaded lightguide of gradually changed refractive index type, therefore, the material of this substrate 140 adopts lithium columbate crystal.This planar light waveguide 110 diffuses into this substrate 140 by Titanium and forms by plate after Titanium high temperature to this end face 111.So, loading after this dielectric grating film 120, the refractive index generation gradual change of this planar light waveguide 110, is the advantage that produces the diffraction type optical waveguide lens of chirp grating type.

Refer to Fig. 5 to Fig. 6, particularly, step S02 comprises following sub-step:

Step S021: plate one deck high-index material film 120a on this end face 111; And

Step S022: adopt this high-index material film of gold-tinted etch process etching 120a to form this dielectric grating film 120.

This dielectric grating film 120 can be a chirp grating.Concrete, this dielectric grating film 120 comprises strip part 121 multiple rectangles, that be arranged in parallel, the plurality of strip part 121 arranges perpendicular to this side 112, and highly basic identical.The number of the plurality of strip part 121 is odd number, and symmetrical about an axis of symmetry O, and along this axis of symmetry O to the direction away from this axis of symmetry O, the width of this strip part 121 is more and more less, and the gap of adjacent two these strip parts 121 is also more and more less.

Refer to Fig. 7, in present embodiment, taking the Width of this dielectric grating film 120 as

axle, this axis of symmetry O with

the joining of axle is initial point, along this axis of symmetry O to away from the direction of this axis of symmetry O being axle forward, exists with this laser beam 21

place with the phase differential at initial point place is

axle, can obtain according to planar light waveguide wave theory:

Figure 2012105540825100002DEST_PATH_IMAGE003

, wherein

Figure 2012105540825100002DEST_PATH_IMAGE004

.Of this strip part 121

individual border

Figure 2012105540825100002DEST_PATH_IMAGE006

meet following condition: , wherein,

for positive integer,

Figure 2012105540825100002DEST_PATH_IMAGE008

(for forming this diffraction type optical waveguide lens),

and

for constant relevant to the focal length of this diffraction type optical waveguide lens.So, can be derived from:

.And

Figure 2012105540825100002DEST_PATH_IMAGE012

situation, the border of this strip part 121 on this axis of symmetry O left side can obtain by symmetry.

Refer to Fig. 8, this also forms by coating technique electrode 130, to form this optically coupled device 10.The interpolar electric field that this produces after load-modulate electric field electrode 130

to cross this planar light waveguide 110, thereby can further change the equivalent refractive index of this planar light waveguide 110, change equivalently the refractive power (being focal length) of the diffraction type optical waveguide lens of chirp grating type, thereby can be coupled this LASER Light Source 10 and this optical element 30 that arrange with various distances.This length to electrode 130 and be highly greater than or equal to the length of this dielectric grating film 120, this length to electrode 130 and highly equal this by the length of this dielectric grating film 120 and height in present embodiment.

This LASER Light Source 20 adopts distributed feedback laser (distributed feedback laser, DFB), it belongs to the semiconductor laser of side-emitted, can after completing, this optically coupled device 10 by chips welding (die bond) mode, luminous side be welded direct on this side 112, so that this laser beam 21 is along this axis of symmetry O incident.Certainly, this LASER Light Source 20 also can adopt other types LASER Light Source, and arranges by other means, as long as ensure that it can be along this laser beam 21 of this axis of symmetry O outgoing.

This optical element 30 can be strip optical waveguide, optical fiber or optical splitter (splitter).In present embodiment, this optical element 30 is strip optical waveguide.This optical element 30 is formed directly on this planar light waveguide 110 after this optically coupled device 10 forms, for example, pass through diffusion way.

In a word; those skilled in the art will be appreciated that; above embodiment is only for the present invention is described; and be not used as limitation of the invention; as long as within connotation scope of the present invention, within the appropriate change that above embodiment is done and variation all drop on the scope of protection of present invention.

Claims

1. for the manufacture of a manufacture method for optically coupled device, it comprises:

Step S01 a: planar light waveguide is provided, and this planar light waveguide comprises an end face and one and this end face side connected vertically, vertical this side of injecting of laser beam that this side is used for a LASER Light Source is docked and this LASER Light Source is sent;

Step S02: utilize high-index material to plate one deck dielectric grating film at this end face, this dielectric grating film comprises many strip parts perpendicular to this side; And

Step S03: form a pair of strip shaped electric poles at this end face, this lays respectively at this dielectric grating film both sides to electrode, and is parallel to the plurality of strip part.

2. manufacture method as claimed in claim 1, is characterized in that, this step S01 comprises following sub-step:

Step S011 a: substrate is provided, and this substrate comprises this end face and this side; And

Step S012: form this planar light waveguide to this substrate internal divergence on this end face.

3. manufacture method as claimed in claim 2, is characterized in that, this substrate adopts lithium columbate crystal, and this planar light waveguide diffuses into this substrate by Titanium and forms by plate after Titanium high temperature to this end face.

4. manufacture method as claimed in claim 1, is characterized in that, this step S02 comprises following sub-step:

Step S021: plate one deck high-index material film on this end face; And

Step S022: adopt this high refractive index film of gold-tinted etch process etching to form this dielectric grating film.

5. manufacture method as claimed in claim 1, is characterized in that, this dielectric grating film is a chirp grating, and the plurality of strip part arranges perpendicular to this side, and highly identical; The number of the plurality of strip part is odd number, and symmetrical about an axis of symmetry, and along this axis of symmetry to the direction away from this axis of symmetry, the width of this strip part is more and more less, and the gap of adjacent two these strip parts is also more and more less.

6. manufacture method as claimed in claim 5, is characterized in that, taking the Width of this dielectric grating as

axle, this axis of symmetry with

the joining of axle is initial point, along this axis of symmetry to the direction away from this axis of symmetry is

axle forward, of this medium part

individual border

Figure 2012105540825100001DEST_PATH_IMAGE003

meet following condition:

Figure 2012105540825100001DEST_PATH_IMAGE004

, wherein,

,

for positive integer,

and

for constant and relevant to the focal length of this diffraction type optical waveguide lens.

7. manufacture method as claimed in claim 1, is characterized in that, this forms by coating technique electrode.

8. manufacture method as claimed in claim 1, is characterized in that, this length to electrode is greater than or equal to the length of this dielectric grating film.

9. manufacture method as claimed in claim 1, is characterized in that, this height to electrode is greater than or equal to the height of this dielectric grating film.