CN103855049B - A kind of intelligent probe card pin pressure control system and control method - Google Patents

Abstract

An intelligent probe card acupressure control system and control method, the method comprising: before starting the test program execution unit, the data extraction sub-module respectively extracts the needles in the test program setting unit and the acupressure detection setting unit that need to be tested currently. pressure value; the judging sub-module judges whether the acupressure values in the test program setting unit and the acupressure detection setting unit are the same, and if they are the same, notify the test program execution unit to start the test program; if different, the processing submodule will acupressure detection setting unit The acupressure value of the unit is set to be the same as the acupressure value of the test program setting unit. Therefore, the present invention can detect the needle pressure setting parameters of the probe card during the test process of the control machine, and avoid data abnormality caused by human error modification.

Description

An intelligent probe card needle pressure control system and control method

technical field

The invention relates to the technical field of microelectronic testing, and more specifically, to an intelligent probe card needle pressure control system and control method.

Background technique

In recent years, semiconductor process technology has advanced by leaps and bounds, and Moore's Law is several years ahead of the prediction rule. At this stage, it has advanced to below 32 nanometers. At present, products are thin, thin and small. Integrated Circuits (Integrated Circuit referred to as IC) are getting smaller and stronger, and the number of pins is increasing. In order to reduce the area occupied by chip packaging and improve IC performance, at this stage Flip Chip packaging is widely used in graphics chips, chipsets, memories and central processing units (Central Processing Unit referred to as CPU). The unit price of the above-mentioned high-end packaging method is high. If the chip test can be carried out before packaging, if there are defective products, they will be marked immediately, and these marked defective products will be discarded before the subsequent packaging process, which can save unnecessary packaging costs. Therefore, the probe test of the chip on the silicon wafer, that is, the initial test, becomes an important process in the integrated circuit manufacturing process.

During probe testing, its measurement procedure plays an extremely important role. Because the results of the preliminary test serve as a link between the past and the future, the results of the preliminary test and Pulse Code Modulation (PCM) measurement results can give silicon wafer production lines feedback rich information that is extremely valuable for stabilizing and improving product qualification rate and product quality . At the same time, the preliminary test data plays an irreplaceable role in controlling the product qualification rate, product quality control QC level, and controlling the entire production cost of the product at a reasonable level.

The probe card is a test interface, which mainly tests the bare core, that is, the probe on the probe card directly contacts the pad or bump on the chip to lead out the chip signal, and then cooperates with peripheral testing instruments and software control to achieve The purpose of automatic measurement.

Please refer to FIG. 1 . FIG. 1 is a schematic structural diagram of a needle pressure control system for a probe card in the prior art. As shown in the figure, during the routine test process, the internal control module (FWK) of the machine controls the parameter and process condition settings of the test program setting module, needle pressure detection setting module and other program setting modules, etc., as well as the control command. information. Since the Over Driver (OD) parameters set in the proberrecipe and the acupressure parameters set in the testrecipe in the machine are input separately, especially the acupressure prober The set acupressure parameter is a variable and will change with human settings. Therefore, if the acupressure parameters set in the acupressure detection program do not match the acupressure parameters set in the test program, the test data will be abnormal; if the OD is too large, Then the needle sticking range of the probe will exceed the needle sticking range, and if the needle pressure OD is too small, it will cause unstable results of the needle sticking test.

For example, in the test results of sensitive small resistance, if the two OD values are not the same, after a certain period of time, the test data becomes abnormally large. After querying OD (needle pressure), it is found The OD value of the test was changed from 45 microns to 30 microns. Due to the test for a period of time, many batches (lots) of products were not found, which seriously affected the production capacity of the machine and the time spent on testing.

Contents of the invention

The main purpose of the present invention is to provide an intelligent probe card needle pressure control system, which can intelligently control the test process of the machine, and control the change of OD in an unknown situation, that is, ensure the setting of the probe card OD (needle pressure) The correctness of the data will not cause unnecessary abnormal data due to human error modification.

To achieve the above object, the technical scheme of the present invention is as follows:

An intelligent probe card acupressure control system, comprising a machine internal control unit, a test program setting unit, a test program execution unit, an acupressure detection setting unit, and an acupressure detection execution unit; the internal control unit of the machine also includes a program An inter-parameter adaptation module, the adaptation module includes a data extraction sub-module, a judgment sub-module and a processing sub-module; the data extraction sub-module is used to respectively extract the test program setting unit and the acupressure detection setting of the current test program that need to be performed OD value in the unit; the judging submodule is used to judge whether the OD values in the test program setting unit and the acupressure detection setting unit are the same to obtain the judgment result; the processing submodule detects the acupressure according to the judgment result The OD value of the setting unit is set to be the same as the OD value of the test program setting unit.

Preferably, the control system further includes an alarm unit, and the internal control unit of the machine controls the alarm unit to alarm according to different results obtained by the judging sub-module.

Preferably, the internal control unit of the machine and the test program setting unit are composed of an upper computer + a lower computer; wherein, the lower computer is a programmable controller.

In order to achieve the above object, the present invention also includes another technical solution as follows:

A control method using the above-mentioned intelligent probe card needle pressure control system, which includes the following steps:

Step S1: Before starting the test program execution unit, the data extraction submodule respectively extracts the OD values in the test program setting unit and the acupressure detection setting unit that need to be tested currently;

Step S2: The judging sub-module judges whether the OD values in the test program setting unit and the acupressure detection setting unit are the same, if they are the same, notify the test program execution unit that the test program can be started; if not, execute step S3;

Step S3: The processing sub-module sets the OD value of the acupressure detection setting unit to be the same as the OD value of the test program setting unit.

Preferably, the step S3 specifically includes the following steps:

Step S31: the processing submodule starts an alarm program;

Step S32: setting the OD value of the acupressure detection setting unit to be the same as the OD value of the test program setting unit;

Step S33: Notifying the test program execution unit that the test program can be started.

It can be seen from the above technical solution that the present invention realizes the accuracy of the result data obtained by the machine test execution unit by adding an inter-program parameter adaptation module (ODconstrain function).

Description of drawings

Fig. 1 is a schematic structural diagram of a probe card needle pressure control system in the prior art

Figure 2 is a schematic structural view of the smart probe card needle pressure control system in the embodiment of the present invention

Fig. 3 is a schematic flow chart of the needle pressure control method of the smart probe card in the embodiment of the present invention

detailed description

The specific embodiment of the present invention will be further described in detail below in conjunction with the accompanying drawings.

Please refer to FIG. 2 . FIG. 2 is a schematic structural diagram of a needle pressure control system for an intelligent probe card in an embodiment of the present invention. As shown in the figure, in the embodiment of the present invention, the same as the prior art, the intelligent probe card acupressure control system includes a machine internal control unit, a test program setting unit, a test program execution unit, and acupressure detection Setting unit and acupressure detection execution unit.

Different from the prior art, the internal control unit of the machine can also include an inter-program parameter adaptation module, the adaptation module includes a data extraction sub-module, a judgment sub-module and a processing sub-module; the data extraction sub-module is used to extract The OD value in the test program setting unit and the acupressure detection setting unit of the test program currently needs to be performed; the judging sub-module is used to judge whether the OD values in the test program setting unit and the acupressure detection setting unit are the same, and obtain the judgment result; the processing The sub-module can set the OD value of the acupressure detection setting unit to be the same as the OD value of the test program setting unit according to the judgment result. In other embodiments, the internal control unit of the machine can control the alarm unit to alarm according to the different results obtained by the judging sub-module, that is, notify the engineer that the machine cannot be tested normally, and the engineer needs to confirm; the engineer checks the acupressure detection setting unit Whether the OD value of the test program setting unit is the same as the OD value of the test program setting unit; if it is indeed different, the internal control unit of the machine will set the OD value of the acupressure detection setting unit to be the same as the OD value of the test program setting unit.

After confirming that the OD value of the acupressure detection setting unit is the same as that of the test program setting unit, the test program execution unit can be notified to start the next test program, which can ensure the accuracy of the test results.

It should be noted that the probe card needle pressure control system proposed by the present invention can be based on some control systems currently used in machine tools as the development basis. For example, the internal control unit and test program setting unit of the machine can be composed of a host computer + a lower computer; wherein, the lower computer is a programmable controller.

In the embodiment of the present invention, the inter-program parameter adaptation module can add the OD parameter adaptation (OD constrain) function in the machine calling the internal fwk file. During the test process, the machine can directly call the internal fwk file carry out testing. Among them, the test program is divided into the needle pressure detection execution unit and the test program execution unit of the machine. Only when the OD values set in the above two units are the same, the machine will enter the normal test, otherwise there will be an alarm signal and it needs to be stopped. For testing, engineers need to check the specific reasons so that the data will not be abnormal.

Please refer to FIG. 3 . FIG. 3 is a schematic flowchart of a method for controlling needle pressure of a smart probe card in an embodiment of the present invention. As shown in the figure, the method specifically includes the following steps:

Step S1: Before starting the test program execution unit or during the execution of the test program, the data extraction sub-module respectively extracts the OD values in the test program setting unit and the acupressure detection setting unit that need to be tested currently. Usually, the OD values in the test program setting unit and the acupressure detection setting unit are maintained by different engineers, and it is easy to be different.

Step S2: The judging sub-module judges whether the OD values in the test program setting unit and the acupressure detection setting unit are the same, if they are the same, notify the test program execution unit that the test program can be started; if they are different, execute step S3;

Step S3: The processing sub-module sets the OD value of the acupressure detection setting unit to be the same as the OD value of the test program setting unit.

In an embodiment of the present invention, step S3 may specifically include the following steps:

Step S31: the processing submodule starts an alarm program;

Step S32: setting the OD value of the acupressure detection setting unit to be the same as the OD value of the test program setting unit;

Step 33: Notifying the test program execution unit that the test program can be started.

It should be noted that the OD parameter adaptation (ODconstrain) function added to ensure the normal execution of the test program is preferably completed before starting the test program execution unit; or, during the execution of the test program, it is also possible to periodically detect Whether the OD value of the acupressure detection setting unit is the same as the OD value of the test program setting unit, so as to exclude the case that the OD value in the acupressure detection setting unit changes unknowably and the machine cannot be tested normally.

The above are only preferred embodiments of the present invention, and the embodiments are not intended to limit the scope of patent protection of the present invention. Therefore, all equivalent structural changes made by using the description and accompanying drawings of the present invention should be included in the same way. Within the protection scope of the present invention.

Claims (5)

1. An intelligent probe card acupressure control system, comprising: a machine internal control unit, a test program setting unit, a test program execution unit, an acupressure detection setting unit and an acupressure detection execution unit; it is characterized in that the machine The internal control unit of the station also includes an inter-program parameter adaptation module, and the adaptation module includes: The data extraction sub-module is used to respectively extract the OD values in the test program setting unit and the acupressure detection setting unit that need to be tested currently; A judging sub-module, judging whether the OD values in the test program setting unit and the acupressure detection setting unit are the same to obtain a judgment result; The processing sub-module sets the OD value of the acupressure detection setting unit to be the same as the OD value of the test program setting unit according to the judgment result. 2. The intelligent probe card acupressure control system according to claim 1, further comprising an alarm unit, and the internal control unit of the machine controls the different results obtained by the judgment sub-module according to the different results obtained by the judgment sub-module. The alarm unit alarms. 3. The intelligent probe card acupressure control system according to claim 1, wherein the internal control unit of the machine and the test program setting unit are composed of a host computer + a lower computer; wherein, the lower computer is programmable controller. 4. A control method adopting the intelligent probe card acupressure control system according to claim 1, is characterized in that, comprising the steps of: Step S1: Before starting the test program execution unit, the data extraction submodule respectively extracts the OD values in the test program setting unit and the acupressure detection setting unit that need to be tested currently; Step S2: Judging the sub-module, judging whether the OD values in the test program setting unit and the acupressure detection setting unit are the same, if they are the same, notify the test program execution unit that the test program can be started; if not, execute step S3 ; Step S3: The processing sub-module sets the OD value of the acupressure detection setting unit to be the same as the OD value of the test program setting unit. 5. The control method according to claim 4, wherein said step S3 specifically comprises the following steps: Step S31: the processing submodule starts an alarm program; Step S32: setting the OD value of the acupressure detection setting unit to be the same as the OD value of the test program setting unit; Step S33: Notifying the test program execution unit that the test program can be started.