CN103839641B - The admixture plates the film equipment of a kind of neodymium iron boron rare earth permanent magnet device and manufacture method - Google Patents

Abstract

The invention discloses a mixed coating equipment and a manufacturing method of a NdFeB rare earth permanent magnet device. The coating equipment is equipped with a vacuum chamber, a cylindrical rotating cathode magnetron target, a planar cathode magnetron target, a multi-arc ion target, a turntable and a material. basket. When working, the turntable revolves in the vacuum chamber, and the rotating shafts at both ends of the mesh basket are installed on the turntable, that is, it revolves and rotates with the turntable. The cylindrical rotating magnetron target is installed inside the turntable in the vacuum chamber. The planar magnetron target, multi-arc ion target, anode layer linear ion source and heating device are installed around the turntable in the vacuum chamber. The vacuum coating is divided into three layers. The first layer It is a magnetron sputtering coating, the coating thickness is: 0.1-5μm, the second layer is a mixed coating of magnetron sputtering and multi-arc, the coating thickness is: 1-15μm, the third layer is a magnetron sputtering coating, the coating thickness For: 0.1-5μm. Using the mixed coating as the surface treatment process of the rare earth permanent magnet device not only improves the corrosion resistance of the rare earth permanent magnet device, but also improves the magnetic performance of the rare earth permanent magnet device.

Description

Hybrid coating equipment and manufacturing method for NdFeB rare earth permanent magnet device

technical field

The invention belongs to the field of permanent magnet devices, and in particular relates to a mixed coating equipment and a manufacturing method for NdFeB rare earth permanent magnet devices.

Background technique

NdFeB rare earth permanent magnet materials, with their excellent magnetic properties, have been used more and more, and are widely used in medical nuclear magnetic resonance imaging, computer hard drives, audio, mobile phones, etc.; with the requirements of energy saving and low-carbon economy , NdFeB rare earth permanent magnet materials have begun to be used in auto parts, household appliances, energy saving and control motors, hybrid vehicles, wind power generation and other fields.

The surface treatment process of rare earth permanent magnet devices in the prior art mainly includes electroplating Ni-Cu-Ni, electroplating Zn, electrophoresis, spraying and other technologies, and there is also a method of vacuum aluminum plating, such as Chinese patent ZL96192129.3, which discloses vacuum Ti plating and AlN methods; another Chinese patent ZL01111757.5 discloses the method of vacuum evaporation zinc, aluminum, tin, magnesium.

In the prior art, as shown in FIG. 1 , there are two support members 7 arranged side by side in the upper area inside the vacuum processing chamber 1 , which can rotate around a rotating shaft 6 on a horizontal rotation axis. The six cylinders 5 formed by stainless steel wire mesh are loaded into the magnets 14 and supported by the rotating shaft 8 in the outer circumferential direction of the rotating shaft 6 of the supporting member 7 as a ring for rotating around the rotating shaft 6 . A plurality of heating boats 2 serving as evaporation sections of the material aluminum wire 9 for evaporation are arranged on a heating boat support base 4 raised on a support platform 3 in the lower region of the processing chamber 1 . Aluminum wire 9 is fixed and wound on a feed roller 10 under the support platform 3 . The front end of the aluminum wire 9 is guided to the heating boat 2 by a thermal resistance protection tube 11 facing an inner surface of the heating boat 2, a notch 12 is provided in a part of the protection tube 11, and the feed gear 13 corresponds to the notch 12 Installed and directly in contact with the aluminum wire 9, so that the aluminum wire can be constantly fed into the heating boat 2 by feeding the aluminum wire 9, and heated and evaporated to deposit on the magnetic piece 14 in the rotating barrel 5 to complete its surface aluminum plating .

The existing technology uses evaporation coating, the bonding force between the film layer and the substrate is poor, and there are deficiencies in improving the corrosion resistance of rare earth permanent magnet devices; there are also existing technologies that use magnetron sputtering coating, due to the low efficiency of magnetron sputtering, It is not suitable for low-cost mass production, and some have not solved the card installation technology, which is not easy to install, and the production is troublesome; some existing technologies use multi-arc ion coating, because there are large particles in the multi-arc ion coating, it cannot reach rare earth permanent magnet devices Corrosion resistance requirements; In order to solve the shortcomings of multi-arc ion plating, some people in the prior art thought of using multi-arc ion plating and magnetron sputtering mixed coating, but none of them solved the problem of high efficiency, low cost, mass production technology , there are deficiencies in the equipment structure; especially the electroplating chemical treatment process of the rare earth permanent magnet device in the prior art, the energy consumption is high and there is pollution, requiring expensive water treatment equipment, improper treatment has a serious impact on the ecological environment, because the production process of the present invention The process is carried out in a vacuum, without the use of environmental pollutants, and will not cause pollution to the ecological environment. At the same time, it also eliminates the influence of the "battery" effect on the reduction of magnetic properties during the electroplating process. For this reason, the present invention provides a kind of vacuum hybrid coating equipment of novel rare earth permanent magnet device to make up for the deficiencies in the prior art; In addition, the NdFeB rare earth permanent magnet device produced by the equipment of the present invention not only improves the resistance of the rare earth permanent magnet device The corrosion ability also improves the magnetic properties of rare earth permanent magnet devices, significantly improves the magnetic energy product and coercive force of rare earth permanent magnet devices, saves scarce rare earth resources, especially saves the amount of more scarce heavy rare earths.

Contents of the invention

The present invention provides a mixed coating equipment and manufacturing method for NdFeB rare earth permanent magnet devices, and improves the magnetic properties and corrosion resistance of rare earth permanent magnet devices through the following technical solutions:

A hybrid coating equipment for NdFeB rare earth permanent magnet devices, the hybrid coating equipment includes a vacuum coating chamber, a cylindrical cathode magnetron target, a planar cathode magnetron target, a cathode multi-arc ion target, a turntable and a material basket; The vacuum coating chamber is composed of a horizontal vacuum shell, a front door and a back cover. The front door and the vacuum shell are sealed by a rubber sealing ring. The back cover is either welded on the vacuum shell or connected by a connecting piece. In the room, it is supported on the frame by the rotating shaft, and the frame is installed on the vacuum shell; the axis of the large turntable is parallel to the axis of the vacuum shell, and three small turntables are installed on the large turntable, and the axis of the small turntable is parallel to the axis of the large turntable. The axes of the frame are parallel, and the rotating shafts at both ends of the multiple mesh baskets are installed on the small rotating frame. The axis of the rotating shaft is parallel to the axis of the small rotating frame. The large rotating frame revolves around the axis of the vacuum shell. The axis of the turret revolves and rotates, and the mesh basket revolves with the large turret and also revolves and rotates with the small turret; the cylindrical cathode magnetron target is installed on the back cover of the vacuum coating chamber, and the cylindrical cathode magnetron The control target is located inside the turret, and the axis is parallel to the axis of the turret. There is more than one cylindrical cathode magnetron target; the planar cathode magnetron target is installed on the vacuum shell and distributed on the periphery of the turret.

The cylindrical cathode magnetron target is installed on the back cover of the vacuum coating chamber, and the power supply, cooling water and transmission device are introduced from the outside. The cylindrical cathode magnetron target is located inside the large turret, and the axis is parallel to the axis of the turret.

There is one cylindrical cathode magnetron target.

The cylindrical cathode magnetron target is equipped with a plurality of axially magnetized magnetic rings, and there are magnetic conduction rings between the magnetic rings, and the magnetic rings move back and forth axially relative to the cylindrical cathode magnetron target.

The cylindrical cathode magnetron target may be equipped with a plurality of radially magnetized magnetic strips, the magnetic strips are distributed along the circumference in the cylindrical cathode magnetron target, there are intervals between the magnetic strips, and the number of magnetic strips is 3 or More than 3, the magnetic strips rotate coaxially with respect to the cylindrical cathode magnetron target.

The magnetic ring or magnetic strip is made of NdFeB rare earth permanent magnets.

The planar cathode magnetron target is installed on the vacuum shell and distributed on the periphery of the large turntable. The planar cathode magnetron target is provided with a racetrack-shaped annular magnetic strip, which is made of NdFeB rare earth permanent magnet. Cool with cooling water, the number is one or more.

The cathode multi-arc ion target is installed on the vacuum shell and distributed on the periphery of the large turntable. The cathode multi-arc ion target is rectangular or circular, and a magnet is arranged inside. The magnet is made of NdFeB rare earth permanent magnet. Cooling water cooling, the number is more than one.

The anode layer linear ion source is installed on the vacuum shell and distributed on the periphery of the turntable.

The vacuum coating chamber is provided with a heater, and the heating temperature range is 100-600°C.

The coating target material is more than one of Al, Dy-Al, Tb-Al, Dy-Fe, Tb-Fe, Ni-Cr, Ti, Mo, Si, Al ₂ O ₃ , ZrO ₂ , and AZO.

The coating film of the NdFeB rare earth permanent magnet device is more than one of Al, Dy-Al, Tb-Al, Dy-Fe and Tb-Fe.

The coating film of the NdFeB rare earth permanent magnet device is more than one of Al, Ni-Cr, Ti, Mo, Si, Al ₂ O ₃ , ZrO ₂ and AZO.

The coating film system of the NdFeB rare earth permanent magnet device is Al.

The inflation system is either filled with one type of gas or filled with more than one type of gas.

The gas charged into the inflation system is more than one of argon, nitrogen, oxygen and hydrogen.

The gas charged into the inflation system is argon.

The vacuum pump is more than one of mechanical vacuum pump, Roots vacuum pump, oil diffusion vacuum pump and molecular pump.

The magnetron sputtering coating conditions are: temperature 30-600°C, deposition pressure 0.1-1Pa under argon gas, power density 1-20w/cm ² ; linear ion source discharge voltage 100-3000V, ion energy 100~2000eV, the working pressure is 0.01~1Pa under the condition of argon. In the coating process, magnetron sputtering coating and multi-arc ion coating are adopted, and magnetron sputtering coating and multi-arc ion coating work independently, alternately or simultaneously.

A method for manufacturing NdFeB rare earth permanent magnet devices. First, the alloy is smelted, and the alloy is cast in a molten state on a rotating copper roller with water cooling to cool to form an alloy sheet, and then the alloy sheet is subjected to hydrogen crushing, material mixing and Jet mill, after the jet mill, mix the materials with a mixer under the protection of nitrogen, and then send them to a nitrogen-protected magnetic field orientation press for molding. After forming, they are packaged in a protective box and then subjected to isostatic pressing, and then sent to sintering equipment for sintering and aging. NdFeB rare earth permanent magnets are then machined to make NdFeB rare earth permanent magnet devices, and then the NdFeB rare earth permanent magnet devices are coated. The coating is divided into 3 layers. The first layer is magnetron sputtering coating, Coating thickness: 0.02-5μm, the second layer is a mixed coating of magnetron sputtering and multi-arc ion plating, the coating thickness is: 1-10μm, the third layer is magnetron sputtering coating, the coating thickness is: 0.1-5μm .

In the mixed coating process, the coating is divided into 3 layers, the first layer is a magnetron sputtering coating, and the coating is one of Al, Dy-Al, Tb-Al, Dy-Fe, Tb-Fe, and the second layer It is a mixed coating of magnetron sputtering and multi-arc ion plating, and the coating is more than one of Al, Ni-Cr, Ti, Mo, Si, Al ₂ O ₃ , ZrO ₂ , AZO, and the third layer is magnetron sputtering Spray coating, the coating is more than one of Al, Ni-Cr, Ti, Mo, Si, Al ₂ O ₃ , ZrO ₂ and AZO.

In the mixed coating process, the coating is divided into 3 layers, the first layer is a magnetron sputtering coating, the coating is one of Dy-Al, Tb-Al, Dy-Fe, Tb-Fe, and the second layer is a magnetron sputtering coating. The hybrid coating of controlled sputtering and multi-arc ion plating, the coating is more than one of Al, Ni-Cr, Al ₂ O ₃ , ZrO ₂ , AZO, the third layer is magnetron sputtering coating, and the coating is Al, Ni - one or more of Cr, Al ₂ O ₃ , ZrO ₂ , and AZO.

In the mixed coating process, the coating is divided into 3 layers. The first layer is magnetron sputtering coating, and the coating is more than one of Al and Ni-Cr. The second layer is magnetron sputtering and multi-arc ion plating. Mixed coating, the coating is more than one of Al and Ni-Cr, and the third layer is magnetron sputtering coating, and the coating is more than one of Al and Ni-Cr.

Before the coating process, the rare earth permanent magnet device needs to undergo a sandblasting process. The materials used for sandblasting are more than one of quartz, glass beads, aluminum oxide, cerium oxide, lanthanum oxide, a mixture of cerium oxide and lanthanum oxide, and zirconia.

Before the coating process or there is a spraying process, the spraying material is one of aluminum or aluminum-containing compounds and electrophoretic paint.

In the coating process or there is a device heating process to control the coating process, the temperature range is 100-600 ° C.

After the coating process or there is a heat treatment process.

The heat treatment temperature in the heat treatment process is 110-890°C.

The heat treatment in the heat treatment process is carried out under vacuum or protective atmosphere.

The hybrid coating equipment for NdFeB rare earth permanent magnet devices may be installed in clean workshops with a cleanliness level above 10,000.

Metallographic analysis shows that the NdFeB rare earth permanent magnet device extends within 1 mm from the surface of the device, and the content of heavy rare earths in the main phase grains is higher than that of the main phase grains of the device, and the content is high. The heavy rare earths are distributed in the periphery of the main phase R ₂ T ₁₄ B, forming a new main phase structure in which RH ₂ T ₁₄ B surrounds R ₂ T ₁₄ B, and there is no grain boundary phase between the RH ₂ T ₁₄ B phase and the R ₂ T ₁₄ B phase ; Wherein, R represents the rare earth in the main phase in the metallographic structure of the NdFeB rare earth permanent magnet, T represents the elements Fe and Co, and RH represents the rare earth whose content of heavy rare earth in the main phase is higher than the average value.

Beneficial effects of the present invention: find a vacuum coating equipment and manufacturing method for mass production of NdFeB rare earth permanent magnet devices, significantly improve the corrosion resistance of NdFeB rare earth permanent magnet devices, and make NdFeB rare earth permanent magnet devices It can be used in fields with high corrosion resistance requirements such as offshore wind power and hybrid vehicles, expanding the use of NdFeB rare earth permanent magnets; generally, the surface coating of NdFeB rare earth permanent magnets will reduce the magnetic properties. It is found that the magnetic properties of the NdFeB rare earth permanent magnet devices produced by the equipment and process of the present invention, especially the magnetic energy product and the coercive force, are significantly improved, and a new method has been found for improving the magnetic properties of the NdFeB rare earth permanent magnets. It is of great significance to reduce the amount of rare earth and protect scarce natural resources.

Description of drawings

Further illustrate the present invention by accompanying drawing below:

Figure 1 is a schematic diagram of vacuum coating in the prior art

Fig. 2 is the vacuum coating schematic diagram of the present invention

In the figure: 1. Vacuum processing chamber; 2. Heating boat; 3. Supporting platform; 4. Heating boat supporting base; Aluminum wire; 10. Roller; 11. Thermal resistance protection tube; 12. Notch; 13. Feed gear; 14. Magnetic parts; 15. Vacuum housing; 16. Anode layer linear ion source; ;18. Vacuum pump; 19. Plane magnetron target; 20. Heating device; 21. Level I automatic gear; 22. Level I driven gear; 23. Level II driving gear; 24. Level II driven gear; 25. Large 26. Material basket; 27. Permanent magnet device; 28. Cylindrical magnetron target; 29. Level III driving gear; 30. Level III driven gear; 31. Vacuumizing pipeline; 32. Small turntable; 33. Revolving shaft I; 34, revolving shaft II.

As shown in Fig. 2, the present invention is a hybrid coating device that combines magnetron sputtering coating and multi-arc ion coating. A cylindrical magnetron target 28 is arranged on the center line of a horizontal vacuum housing 15 connected with a vacuum pump 18, and a plurality of (three in the figure) small turntables 32 are arranged on the circumference of the large turntable 25 , the circumference of each small turret 32 is arranged with a plurality of (6 in the figure) material baskets 26 made of stainless steel mesh, and permanent magnet devices 27 are housed in the material baskets 26 . The driving motor (not shown) outside the vacuum chamber is connected to the first-stage driving gear 21 through a dynamic seal transmission shaft, and drives the first-stage driven gear 22 fixed on the large turntable 25 to complete the revolution of the large turntable 25 around the cylindrical magnetron target 28. The second-stage driving gear 23 fixed on the large turntable 25 drives the second-stage driven gear 24 fixed on the small turntable 32 to rotate around the rotation axis I33 through the revolution of the large turntable 25; the third-stage driven gear fixed on the small turntable 32 The driving gear 29 drives the third-stage driven gear 30 to rotate around the rotating shaft II34, and the two ends of the material basket 26 are provided with a rotating shaft to connect the rotating shaft II34 and the third-stage driven gear 30, so the material basket 26 can achieve the purpose of revolution and rotation of the sun planetary gear system , so that the permanent magnet device 27 is stirred in the material basket 26 to evenly deposit the target material. An anode layer linear ion source 16 , more than one multi-arc ion source 17 , more than one planar magnetron target 19 , and a vacuuming pipeline 31 connected to a vacuum pump 18 and a heating device 20 are arranged outside the circular vacuum shell 15 .

Before the coating process, the vacuum chamber is evacuated to the level of E-4Pa, backfilled with argon, the working pressure is 0.01~1Pa, the basket rotates 26 revolutions plus rotation, the linear ion source of the anode layer is started, the discharge voltage is 100~3000V, and the ion bombards the permanent magnet device 27. Stop the bombardment after 5-10 minutes. The material basket 26 is insulated, and can also be connected to a negative voltage of -50~-200V. The purpose of the ion bombardment cleaning in the early stage is to clean the oxides and hydrocarbons on the surface of the permanent magnet device 27, so as to roughen the surface and increase the surface energy and ion-assisted deposition. The heating device 20 heats the material basket 26 and the permanent magnet device 27 in the material basket 26 to 120-600°C to remove water vapor and improve the film adhesion. The coating process is when heating to 200°C, the basket rotates at 26 revolutions and rotates, and after high-pressure ion cleaning, the vacuum chamber 15 is evacuated again to reach the level of E-4Pa, and then refilled with argon, with a working pressure of 0.1-1Pa, respectively or at the same time Start the planar magnetron target 19, the cylindrical magnetron sputtering target 28 and the multi-arc ion source 17 to make them work individually or alternately or simultaneously, and deposit the target material on the permanent magnet device 27 to form a simple film and medium film coating.

detailed description

The remarkable effect of the present invention is further illustrated below by comparison of the examples.

Example 1

Manufactured as follows:

1. Select 600Kg of alloys according to the composition of A1, A2, A3, and A4 in Table 1 for smelting. In the molten state, cast the alloy on a rotating copper roller with water cooling to cool to form alloy flakes, then carry out hydrogen crushing, and then carry out mixing after hydrogen crushing. After mixing the materials, jet milling is carried out, and then the materials are mixed with a mixer under the protection of nitrogen, and then sent to the nitrogen protection magnetic field orientation press for molding. The oxygen content in the protection box is 150ppm, the orientation magnetic field strength is 1.8T, and the temperature in the mold cavity is 2 ℃, the size of the magnetic block is 62×52×42mm, and the orientation direction is the 42-dimensional direction. After forming, it is packaged in a protective box, and then taken out for isostatic pressing. The isostatic pressing pressure is 200MPa, and then sent to the sintering equipment for sintering and aging.

2. After aging, mechanical processing is carried out, and it is processed into a square piece with a size of 30×20×10 mm. The workpiece is selectively chamfered, sandblasted, aluminum sprayed, electrophoresis, sprayed, and then vacuum coated. The first layer is magnetron sputtering Sputtering coating, the second layer is a mixed coating of magnetron sputtering and multi-arc ion plating, the third layer is magnetron sputtering coating, the coating thickness is: 0.02-5μm, 0.1-15μm, 1-5μm; some experiments The fourth layer was also plated. The fourth layer is a magnetron sputtering coating with a thickness of 0.1-5μm. The fourth layer is not marked with element symbols because there are only three layers of coatings. The materials, magnetic properties and corrosion resistance of each layer are selected. The measurement results are listed in Table 2.

The composition of the rare earth permanent magnet alloy of table one, embodiment and comparative example

Numbering Element A1 Nd ₃₀ Dy ₁ Fe _67.9 B _0.9 A _l0.2 A2 Nd ₃₀ Dy ₁ Fe _67.5 Co _1.2 Cu _0.1 B _0.9 Al _0.1 A3 (Pr _0.2 Nd _0.8 ) ₂₅ Dy ₅ Fe _67.4 Co _1.2 Cu _0.3 B _0.9 Al _0.2 A4 (Pr _0.2 Nd _0.8 ) ₂₅ Dy ₅ Tb ₁ Fe ₆₅ Co _2.4 Cu _0.3 B _0.9 Al _0.2 Ga _0.1 Zr _0.1

Table two, the measurement result of coating material of the present invention, magnetic property and corrosion resistance

Comparative example 1

According to the A1, A2, A3, and A4 components in Table 1, select 600Kg of the alloy for melting, and cast the alloy in the molten state onto a rotating cooling roll with water cooling to form alloy flakes, and then use a vacuum hydrogen crushing furnace to crush the alloy flakes. Coarse crushing, hydrogen crushing, jet milling, mixing with a mixer under nitrogen protection, and then sending to a nitrogen protection magnetic field orientation press for molding, the orientation magnetic field strength is 1.8T, the size of the magnetic block is 62×52×42mm, and the orientation direction is 42 Dimensional direction, sealed in a protective box after forming, and then taken out for isostatic pressing, the isostatic pressing pressure is 200MPa, and then sent to a vacuum sintering furnace for sintering and aging, and then mechanically processed into a square piece with a size of 30×20×10 mm , the workpiece is selectively chamfered or sandblasted, and then Ni-Cu-Ni is electroplated. The measurement results of magnetic properties and corrosion resistance are listed in Table 3.

Table 3. Measurement results of magnetic properties and corrosion resistance of comparative examples

Example 2

Select the composition in embodiment 1 to make NdFeB rare earth permanent magnet device, the coating selects the first layer of Dy-Al alloy plating, the second layer of Al+Al plating, and the third layer of Al plating for temperature experiments, and the results are listed in Table 4 , No. 1 is the comparative example without heating or heat treatment during coating. It can be seen from Table 4 that the coating temperature and the heat treatment temperature after coating have an impact on the magnetic properties of the material, which significantly improves the coercive force of the magnet, that is, The use temperature of the magnet is increased, and at the same use temperature, the amount of heavy rare earths can be reduced, saving scarce resources.

Table 4. Effect of coating temperature and heat treatment temperature on magnetic properties and corrosion resistance

Note: 1. Corrosion resistance (PCT test)

Experimental conditions: sample 10X10X10mm, 2 standard atmospheric pressure, 120°C, 100% humidity, 48 hours, weight loss <5mg/cm ² .

2. Salt spray test:

Experimental conditions: 5% NaCl solution, 25 ℃ ≥ 48 hours test, the surface does not change.

In the embodiment, there must be a sandblasting process before the vacuum coating process: because the rare earth permanent magnet device will have a certain amount of grease and dirt on its surface during the processing process, and these dirt will affect the stability of the vacuum coating process and the coating product. Therefore, a reasonable configuration of cleaning equipment and process is the basic guarantee for the quality and performance of rare earth permanent magnet device vacuum coating. Only a reasonable cleaning process can ensure that the coating has good adhesion. The materials used in the blasting process are more than one of quartz, glass beads, aluminum oxide, cerium oxide, lanthanum oxide, a mixture of cerium oxide and lanthanum oxide, and zirconia. Before the vacuum coating process or there is a spraying process, the spraying material is one of aluminum or aluminum-containing compounds and electrophoretic paint.

In the embodiment, in the coating process, the high-voltage ion cleaning process: the vacuum chamber is evacuated to an order of magnitude higher than E-4Pa, filled with argon, the working pressure is 0.01-1Pa, the material basket is revolutionized and rotated, the anode layer linear ion source is started, and the discharge voltage is 100 ~3000V, ions bombard the rare earth permanent magnet device for 5~10 minutes. The material basket is insulated, and it can also be connected to a negative voltage of -50~-200V.

In the embodiment, coating process configuration: reasonable process configurations include single and double magnetron cathode configurations (including planar and cylindrical rotating magnetron cathode configurations), multi-arc cathode configurations, linear ion sources for the anode layer, heating devices, and vacuum pumps. Different coating process configurations lead to changes in production rate, ion energy, etc., which have an important impact on the performance of coating products. The vacuum chamber is evacuated to an order of magnitude higher than E-4Pa, backfilled with argon, the working pressure is 3E-1Pa, the basket rotates and rotates, and the magnetron sputtering deposition and arc evaporation deposition work separately or alternately or simultaneously; magnetron Sputtering deposition and arc evaporation deposition work alone or alternately with ion bombardment, respectively.

In the embodiment, coating process loading: the structure of the material basket has a great influence on the appearance and coating quality of the coating product, and surface scratches and other physical damage should be avoided. The material basket is a cylindrical or polygonal columnar structure made of stainless steel mesh. There are partitions in the middle to form multiple isolated spaces, and one or several permanent magnetic devices are placed in each space.

In the embodiment, after the vacuum coating process or there is a heat treatment process, the heat treatment temperature is 100-900°C.

It is further illustrated by the comparison of the examples and the comparative examples that the magnetic properties and corrosion resistance of the magnets are obviously improved by adopting the technology of the present invention, which is a very developed process and equipment technology.

Claims (13)

1. the admixture plates the film equipment of a neodymium iron boron rare earth permanent magnet device, it is characterised in that: described the admixture plates the film equipment includes Vacuum film coating chamber, cylinder negative electrode magnetic control target, planar cathode magnetic control target, cathodic multi arc ion plating target, anode-layer-linear ion source, pivoted frame And charging basket；Described vacuum film coating chamber is made up of horizontal vacuum housing, Qianmen and bonnet, and Qianmen and vaccum case are close by rubber Seal seals, bonnet or be welded on vaccum case or connect by connector, the design of big pivoted frame in vacuum coating indoor, By rotating shaft support on framework, framework is arranged on vaccum case；The axis of big pivoted frame is parallel with the axis of vaccum case, greatly Being provided with 3 little pivoted frames on pivoted frame, the axis of little pivoted frame is parallel with the axis of big pivoted frame, and multiple netted charging basket two ends have rotating shaft to pacify Being contained on little pivoted frame, the axis of rotating shaft is parallel with the axis of little pivoted frame, and big pivoted frame revolves round the sun around the axis of vaccum case, little pivoted frame The i.e. axis around big pivoted frame revolves round the sun and rotation, and netted charging basket i.e. revolves round the sun also with the revolution of little pivoted frame again certainly with big pivoted frame Turn；Described cylinder negative electrode magnetic control target is arranged on the bonnet that vacuum coating is indoor, and cylinder negative electrode magnetic control target is positioned at pivoted frame Portion, axis is parallel with pivoted frame axis, and described cylinder negative electrode magnetic control target arranges more than one;Described planar cathode magnetic control target It is arranged on vaccum case, is distributed in the periphery of pivoted frame；Described cylinder negative electrode magnetic control target and the target of planar cathode magnetic control target It is respectively the one in Dy-Al, Tb-Al, Dy-Fe, Tb-Fe, Al, Ni-Cr, Ti, Mo, Si, Al2O3, ZrO2, AZO, and cylinder In the target of negative electrode magnetic control target or planar cathode magnetic control target, at least a kind of target is selected from Dy-Al, Tb-Al, Dy-Fe, Tb-Fe； Described vacuum coating indoor are provided with heater, and heating temperature range is at 100-600 DEG C.

The admixture plates the film equipment of a kind of neodymium iron boron rare earth permanent magnet device the most according to claim 1, it is characterised in that: described Cylinder negative electrode magnetic control target built with the magnet ring of multiple axial chargings, have magnetic guiding loop between magnet ring, magnet ring is relative to cylinder negative electrode magnetic Control target axial reciprocating moves, and described magnet ring is manufactured by Nd-Fe-B rare-earth permanent magnet.

The admixture plates the film equipment of a kind of neodymium iron boron rare earth permanent magnet device the most according to claim 1, it is characterised in that: described Cylinder negative electrode magnetic control target built with the magnetic stripe of a plurality of radial magnetizing, magnetic stripe is circumferentially distributed in cylinder negative electrode magnetic control target, Having interval between magnetic stripe, the quantity of magnetic stripe is 3 or more than 3, and magnetic stripe coaxially turns relative to cylinder negative electrode magnetic control target sleeve pipe Dynamic, described magnetic stripe is manufactured by Nd-Fe-B rare-earth permanent magnet.

The admixture plates the film equipment of a kind of neodymium iron boron rare earth permanent magnet device the most according to claim 1, it is characterised in that: described Planar cathode magnetic control target in be provided with run-track shaped annular magnetic stripe, magnetic stripe is manufactured by Nd-Fe-B rare-earth permanent magnet, with cooling water Cooling, quantity is more than one.

The admixture plates the film equipment of a kind of neodymium iron boron rare earth permanent magnet device the most according to claim 1, it is characterised in that: described Cathodic multi arc ion plating target be arranged on vaccum case, be distributed in the periphery of pivoted frame, described cathodic multi arc ion plating target is rectangle Or circular, it is internally provided with Magnet, Magnet is manufactured by Nd-Fe-B rare-earth permanent magnet, and by cooling water cooling, quantity is more than one.

The admixture plates the film equipment of a kind of neodymium iron boron rare earth permanent magnet device the most according to claim 1, it is characterised in that: described Anode-layer-linear ion source be arranged on vaccum case, be distributed in the periphery of pivoted frame.

7. the manufacture of the neodymium iron boron rare earth permanent magnet device of the admixture plates the film equipment used as described in any one of claim 1-6 Method, it is characterised in that: first carry out alloy melting, in the molten state by alloy casting to the rotary copper roller of band water cooling It is cooled into alloy sheet, then alloy sheet is carried out hydrogen is broken, batch mixing and airflow milling, after airflow milling, use batch mixing under nitrogen protection Deliver to nitrogen protection magnetic field orientating press-molding after machine batch mixing, in guard box, carry out isostatic pressed after encapsulation after shaping, send afterwards Enter agglomerating plant sintering and timeliness makes Nd-Fe-B rare-earth permanent magnet magnet, carry out machining afterwards and make Nd-Fe-B rare-earth permanent magnet Device, afterwards in the indoor mixing that neodymium iron boron rare earth permanent magnet device carries out magnetron sputtering plating and multi-arc ion coating of vacuum coating Plated film, plated film is divided into 3 layers, and ground floor is magnetron sputtering coating, and coating is the one in Dy-Al, Tb-Al, Dy-Fe, Tb-Fe, Thickness of coating is: 0.02-5 μm, and the second layer is the mixing coating of magnetron sputtering and multi-arc ion coating, and thickness of coating is: 1-10 μm, Third layer is magnetron sputtering coating, and thickness of coating is: 0.1-5 μm；Heat treatment step is also had after described the admixture plates the film operation, Heat treatment temperature 60-900 DEG C.

The manufacture method of a kind of neodymium iron boron rare earth permanent magnet device the most according to claim 7, it is characterised in that: described is mixed Closing plated film and belong to physical vapour deposition (PVD), magnetic control film coating material is Al, Dy-Al, Tb-Al, Dy-Fe, Tb-Fe, Ti, Mo, Si, stainless Steel, Al₂O₃, one in ZrO, AZO, the mixing coating of described magnetron sputtering and arc evaporation, Coating Materials is Al, Ti, Mo, Si, rustless steel, Al₂O₃, more than one in ZrO, ITO, AZO.

The manufacture method of a kind of neodymium iron boron rare earth permanent magnet device the most according to claim 7, it is characterised in that: described is true Being provided with anode-layer-linear ion source in empty coating chamber, described magnetron sputtering plating condition is, temperature 30 ~ 600 DEG C, deposition pressure Strong is 0.1 ~ 1Pa under the conditions of argon, and power density is 1 ~ 20w/cm2, the discharge voltage 100 ~ 3000V of linear ion source, ion Energy 100 ~ 2000eV, operating air pressure 0.01 ~ 1Pa under the conditions of argon, in described filming process use magnetron sputtering plating and Multi-arc ion plating film is individually, be either alternatively or simultaneously operated.

The manufacture method of a kind of neodymium iron boron rare earth permanent magnet device the most according to claim 7, it is characterised in that: described Also having sandblasting operation before filming process, the material that sandblasting uses is quartz, glass microballoon, aluminium oxide, cerium oxide, lanthana, oxygen Change cerium and the mixture of lanthana, zirconic more than one, before filming process or also spraying process, sprayed on material is aluminum Or containing the one in the compound of aluminum, electrophoretic paint.

The manufacture method of 11. a kind of neodymium iron boron rare earth permanent magnet device according to claim 7, it is characterised in that: described Also having the device heating process controlling coating process in filming process, temperature range is at 100-600 DEG C.

The manufacture method of 12. a kind of neodymium iron boron rare earth permanent magnet device according to claim 7, it is characterised in that: described The admixture plates the film operation, plated film is divided into 3 layers, and ground floor is magnetron sputtering coating, and coating is Al, Dy-Al, Tb-Al, Dy-Fe, Tb- One in Fe, the second layer is the mixing coating of magnetron sputtering and multi-arc ion coating, coating is Al, Ni-Cr, Ti, Mo, Si, Al₂O₃、ZrO₂, more than one in AZO, third layer is magnetron sputtering coating, and coating is Al, Ni-Cr, Ti, Mo, Si, Al₂O₃、 ZrO₂, more than one in AZO.

The manufacture method of 13. a kind of neodymium iron boron rare earth permanent magnet device according to claim 7, it is characterised in that: described A kind of neodymium iron boron rare earth permanent magnet device in the range of device surface extends internally 1mm main phase grain the content of heavy rare earth higher than crystalline substance The content of heavy rare earth in grain principal phase, the heavy rare earth that content is high is distributed in principal phase R₂T₁₄The periphery of B, forms RH₂T₁₄B surrounds R₂T₁₄B New principal phase structure, RH₂T₁₄B phase and R₂T₁₄B is alternate without Grain-Boundary Phase；Wherein, R represents at Fe-B rare-earth permanent magnet structure Rare earth in middle principal phase, T representative element Fe and Co, RH represent that in principal phase, the content of heavy rare earth is higher than the rare earth of meansigma methods.