CN103808748B - Light-path system enabling test light path and imaging light path to be coaxial - Google Patents
Light-path system enabling test light path and imaging light path to be coaxial Download PDFInfo
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- CN103808748B CN103808748B CN201410083519.0A CN201410083519A CN103808748B CN 103808748 B CN103808748 B CN 103808748B CN 201410083519 A CN201410083519 A CN 201410083519A CN 103808748 B CN103808748 B CN 103808748B
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Abstract
The invention discloses a light-path system enabling a test light path and an imaging light path to be coaxial. The light-path system comprises the test light path, the imaging light path and an incidence and reflection part, wherein the test light path and the imaging light path are installed on two sides of the incidence and reflection part to be in reflection mirror symmetry; the test light path comprises a collimating aperture device, and the imaging light path comprises a glued lens group. X rays in the test light path are shielded through the collimating aperture device, and visible light is refracted by the glued lens group, so that black spots formed in a traditional imaging observation process can be reduced and even disappear, and more convenience in observation and adjustment can be realized.
Description
Technical field
The present invention relates to field of non destructive testing, it particularly relates to a kind of light path system that x-ray observation is used.
Background technology
During being analyzed using means such as X-rays to sample, do not need only have and produce penetrating for the rays such as X-ray
Line source is also required to corresponding ray channel, roentgenization could be carried out to sample and produces spectrum to carry out to features such as sample compositions
Analysis, but still need at the same time to allow technical staff to be adjusted the position of sample and the part of detection by visible ray,
In conventional light path system, because there is certain coincidence and due to existing by X-ray etc. in ray light path and Visible optical trains
Ray channel, easily make the considerable influence that paired samples forms the image of visible ray, as shown in figure 1, being shown as conventional in way
Structure in light path system, wherein 1 is detecting system, 2 is reflecting mirror, and 3 is Reflector base, and 301 is X-ray through holes, and 4 is sample
Sample platform.
When the part for when X-ray analyses are carried out to sample, needing operator that analysis is needed to the sample on sample stage 4
Carry out position adjustments；Now due to the presence of X-ray through holes 301, X-ray needs to pass through from X-ray through holes 301, is irradiated to
On sample stage 4, sample is bombarded, due to irradiation position of the X-ray on sample stage 4, is needed by reflecting mirror 2 in detecting system 1
Camera on be imaged, to determine X-ray particular location of the bombardment on sample, due to having X-ray through holes 301, meeting on reflecting mirror 2
Affect image quality of the X-ray at part irradiation to be checked to form black speck, and black speck position often exactly needs the test point observed
Position, due to the presence of black speck, the imaging of test point cannot be realized, as shown in Fig. 2 as X-ray through holes 301 are in visible ray
The black speck caused on image so that operator cannot carry out the regulation of position and detection position to testing sample, it is therefore desirable to
Propose that a kind of structure solves this problem.
The content of the invention
In view of this, need to overcome at least one of drawbacks described above of the prior art.The invention provides a kind of use
In the coaxial light path system of optical system for testing and imaging optical path, including optical system for testing, imaging optical path, incidence and reflection part, it is described
Optical system for testing and the imaging optical path are arranged on the incident and reflection part both sides, into reflection specular；
The incident and reflection part includes reflecting mirror, and the mirror tilt is installed and had and is arranged on the reflecting mirror
The insertion through hole in centre, test light are injected by the insertion through hole and enter the optical system for testing；
The optical system for testing includes that sample stage has the collimation aperture apparatus of through hole, and the collimation aperture apparatus are lead glass dresses
Put, the sample stage is arranged on the side of the optical system for testing, can carry out position movement, the collimation aperture apparatus along mounting axis
Between incident and reflection part and the sample stage；
The imaging optical path includes gluing unit microscope group and CCD target surfaces, and the gluing unit microscope group is arranged on the imaging optical path
Side, the gluing unit microscope group axis is mirrored with regard to the normal direction of the reflecting mirror with the optical system for testing axis reflects right
Claim, the gluing unit microscope group includes quiet gluing unit mirror and dynamic gluing unit mirror, the quiet gluing unit mirror fixed installation, the dynamic gluing
Group mirror dynamic is arranged between the quiet gluing unit mirror and the CCD target surfaces, can carry out position shifting along the imaging optical path axis
It is dynamic；The CCD target surfaces are arranged on the rear side of the gluing unit microscope group.
X-ray passes through from the insertion through hole, through the collimation aperture apparatus, is irradiated on the sample stage, bombards sample
Product, and visible ray, by being reflected by collimation reflecting mirror described in aperture apparatus Jing on testing sample, X-ray cannot then pass through
The collimation aperture apparatus, carry out the bending of light behavior such as reflecting to visible ray through gluing unit microscope group, enterprising in the CCD target surfaces
Row imaging, can avoid the insertion through hole in conventional optical system（As shown in Figure 1）The masking testing sample image of middle appearance
Black speck, the situation that such as Fig. 2,3,4 occur can cause that operator are easier to be observed to testing sample and adjusted.
According in background of invention to described in prior art, principle of reflection of the conventional optical system just with light
The observation to testing sample is carried out, the impact to testing sample visible image caused due to the presence of insertion through hole, such as
Shown in Fig. 1-4 so that operator are difficult to testing sample position adjustments, therefore often occur that analysis is inaccurate existing
As；And provided by the present invention for optical system for testing（X-fluorescence）With imaging optical path（Visible ray）Coaxial light path system by using
Gluing unit microscope group causes light to be curved so that the image of testing sample can avoid the black speck that the insertion through hole is formed,
So that operator be more prone to carry out position adjustments.
In addition, according to disclosed by the invention for optical system for testing（X-fluorescence）With imaging optical path（Visible ray）Coaxial light path
System also has following additional technical feature：
Further, the optical system for testing is X ray test light path, and the imaging optical path is visual light imaging light path.
Further, the reflecting mirror is arranged on erecting device, is had and the insertion through hole phase on the erecting device
Logical incident through hole, the reflecting mirror need fixed installation, and the erecting device plays a part of position fixation, while described
Incident through hole is then consistent with the insertion through hole, it is ensured that the accurate and complete incidence of incident X-rays.
Further, the sample stage and the reflecting mirror reflection kernel distance and the dynamic gluing unit mirror and the reflection
Relation between mirror reflection kernel distance is non-linear relation in the same direction.
The gluing unit mirror is combined by meniscuss, and the dynamic gluing unit mirror and the sample stage are in each autokinesis rail
The law of refraction of light is followed on mark, and is corresponded according to above-mentioned relation on respective position.
Further, collimation aperture apparatus upper surface and the reflecting mirror reflection kernel vertical dimension be more than or equal to
10mm is less than in equal to 30mm.
Preferably, this vertical dimension be 10,15,20,25,30mm.
Further, the through hole is less than or equal to 2mm.
Further, the collimation aperture apparatus are lead glass devices, and the lead glass device can be fixedly mounted, it is also possible to
Carry out position movement.
Preferably, the lead glass device is lead glass plate, and the effect of lead glass is gear X-fluorescence, does not keep off visible ray.Lead glass
In the middle of glass is the collimating aperture of X-fluorescence, i.e., described through hole, and the X-fluorescence beyond the through hole can not be through lead glass out, and X is glimmering
Light can only pass through the standard-sized small X-fluorescence hot spot of the collimated formation of aperture of lead glass, be incident upon on sample, Jing samples
Reflect to form the Secondary radiation with feature and enter detector, Jing software algorithms draw test result.Imaging optical path is due to being visible
Light, measurement position can be through the reflected mirror of lead glass and glued microscope groups into CCD imagings, because being coaxial light path, imaging center
It is test point.
Further, the lead glass thickness in the lead glass device is less than or equal to 20mm.
Preferably, the lead glass thickness is to be less than or equal to 15mm more than or equal to 5mm.
It is highly preferred that the lead glass thickness is 5mm, 10mm, 15mm.
Further, the through hole of the lead glass is not more than 2mm.
Further, the insertion through-hole diameter is less than or equal to 8mm and is more than or equal to 1mm.
Further, the insertion through-hole diameter is not more than 3mm.
The additional aspect of the present invention and advantage will be set forth in part in the description, and partly will become from the following description
Obtain substantially, or recognized by the practice of the present invention.
Description of the drawings
The above-mentioned and/or additional aspect and advantage of the present invention will become from the following description of the accompanying drawings of embodiments
It is substantially and easy to understand, wherein：
Fig. 1 is conventional light path system schematic diagram.
Fig. 2 is the schematic diagram impacted to testing sample visible image that conventional light path system occurs（Detecting system
For 6280SE+12mmLens, 5,000,000 pixel 2/3'' target surface cameras）.
Fig. 3 is the schematic diagram impacted to testing sample visible image that conventional light path system occurs（Detecting system
For UI1240+35mmLens, 1,300,000 pixel 1/1.8'' target surface cameras）.
Fig. 4 is the schematic diagram impacted to testing sample visible image that conventional light path system occurs（Detecting system
For UI1540+35mmLens, 1,300,000 pixel 1/2'' target surface cameras）.
Fig. 5 is the schematic diagram of the present invention.
Wherein in figure：1 part workbench to be checked, 2 reflecting prisms, 21X beam orifices, 3 detecting systems；4CCD target surfaces, 5 dynamic glue
Close microscope group, 51 dynamic gluing microscope group, 1,52 dynamic gluing microscope group, 2,6 static gluing microscope group, 61 static gluing microscope group, 1,62 static glue
Close 2,7 reflecting mirror of microscope group, 71X beam orifices, 8 lead glass devices, 9 sample stages
Specific embodiment
Embodiments of the invention are described below in detail, the example of the embodiment is shown in the drawings, wherein from start to finish
Same or similar label represents same or similar element or the element with same or like function.Below with reference to attached
The embodiment of figure description is exemplary, is only used for explaining the present invention, and is not construed as limiting the claims.
In describing the invention, it is to be understood that term " on ", D score, " bottom ", " top ", "front", "rear",
The orientation or position relationship of the instruction such as " interior ", " outward ", "left", "right" is, based on orientation shown in the drawings or position relationship, to be only
For the ease of the description present invention and simplified description, rather than indicate or imply that the device or element of indication there must be specifically side
Position, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.
In describing the invention, it should be noted that unless otherwise clearly defined and limited, term " connection ", " company
It is logical ", should be interpreted broadly " being connected ", " connection ", for example, it may be being fixedly connected, be integrally connected, or detachably connect
Connect；It can be the connection of two element internals；Can be joined directly together, it is also possible to be indirectly connected to by intermediary, for this
For the those of ordinary skill in field, above-mentioned term concrete meaning in the present invention can be understood with concrete condition.
The inventive concept of the present invention is as follows, and as described in technical background, conventional optical system is former just with the reflection of light
Reason carries out the observation to testing sample, the impact to testing sample visible image caused due to the presence of insertion through hole,
So that operator are difficult to testing sample position adjustments, therefore the inaccurate phenomenon of analysis often occurs；And it is of the invention
The light path system coaxial for optical system for testing and imaging optical path for providing causes light to be curved by using gluing unit microscope group,
The image of testing sample is allowd to avoid the black speck that the insertion through hole is formed so that what operator were more prone to enters line position
Put regulation.
Below with reference to accompanying drawings come describe the present invention the light path system coaxial for optical system for testing and imaging optical path, wherein
Fig. 1 is conventional light path system schematic diagram；Fig. 2-4 is impacting to testing sample visible image for conventional light path system appearance
Schematic diagram；Fig. 5 is the schematic diagram of the present invention.
Embodiments in accordance with the present invention, as shown in figure 5, coaxial with imaging optical path provided by the present invention for optical system for testing
Light path system, including optical system for testing, imaging optical path, incidence and reflection part 7, the optical system for testing and the imaging optical path are installed
In the incident and reflection part both sides, into reflection specular；
The incident and reflection part 7 includes reflecting mirror, and the mirror tilt is installed and had and is arranged on the reflection
The insertion through hole 71 in 7 centre of mirror, test light are injected by the insertion through hole 71 and enter the optical system for testing；
The optical system for testing includes sample stage 9 and the collimation aperture apparatus 8 with through hole, and the collimation aperture apparatus 8 are lead glass
Glass device, the sample stage 9 are arranged on the side of the optical system for testing, can carry out position movement, the collimation along mounting axis
Aperture apparatus 8 are arranged between incident and reflection part 7 and the sample stage 9；
The imaging optical path includes gluing unit microscope group（5,6 parts in Fig. 5）With CCD target surfaces 4, the gluing unit microscope group
（5,6 parts in Fig. 5）Installed in the imaging optical path side, the gluing unit microscope group（5,6 parts in Fig. 5）Axis with
The optical system for testing axis is mirrored reflective symmetry, the gluing unit microscope group with regard to the normal direction of the reflecting mirror（In Fig. 55,
6 parts）Including quiet gluing unit mirror 6 and dynamic gluing unit mirror 5, the quiet gluing unit mirror 6 is fixedly mounted, and the dynamic gluing unit mirror 5 is moved
State is arranged between 6 mirror of quiet gluing unit and the CCD target surfaces 4, can carry out position movement along the imaging optical path axis；Institute
CCD target surfaces 4 are stated installed in the gluing unit microscope group（5,6 parts in Fig. 5）Rear side.
X-ray passes through from the insertion through hole 71, through the collimation aperture apparatus 8, is irradiated on the sample stage 9, Hong
Hit sample, and visible ray be by being reflected by collimation reflecting mirror described in 8 Jing of aperture apparatus on testing sample, X-ray then without
Method collimates aperture apparatus 8 by described, through gluing unit microscope group（5,6 parts in Fig. 5）Visible ray is carried out the light such as reflecting curved
Qu Hangwei, is imaged on the CCD target surfaces 4, can avoid the insertion through hole 71 in conventional optical system（Such as Fig. 1 institutes
Show）The black speck of the masking testing sample image of middle appearance, the situation that such as Fig. 2,3,4 occur can cause operator to be easier
Testing sample observed and adjusted.
According in background of invention to described in prior art, principle of reflection of the conventional optical system just with light
The observation to testing sample is carried out, the impact to testing sample visible image caused due to the presence of insertion through hole 71,
As Figure 1-4 so that operator are difficult to testing sample position adjustments, therefore often occur that analysis is inaccurate existing
As；And provided by the present invention for optical system for testing（X-fluorescence）With imaging optical path（Visible ray）Coaxial light path system by using
Gluing unit microscope group causes light to be curved so that the image of testing sample can avoid the black speck that the insertion through hole is formed,
So that operator be more prone to carry out position adjustments.
Embodiments in accordance with the present invention, the optical system for testing be X ray test light path, the imaging optical path be visible ray into
As light path.
Some embodiments of the invention, the reflecting mirror are arranged on the erecting device, on the erecting device
There is the incident through hole communicated with the insertion through hole 71, the reflecting mirror needs fixed installation, and the erecting device rises in place
Put fixed effect, while the incident through hole is then consistent with the insertion through hole 71, it is ensured that incident X-rays accurate and
It is completely incident.
Embodiments in accordance with the present invention, the sample stage 9 and the reflecting mirror reflection kernel distance and the dynamic gluing unit
Relation between mirror 5 and reflecting mirror reflection kernel distance is non-linear relation in the same direction.
Gluing unit mirror is combined by meniscuss, and the dynamic gluing unit mirror 5 and the sample stage 9 are in respective movement locus
On follow the law of refraction of light, and corresponded according to above-mentioned relation on respective position, as shown in figure 5, dotted line is represented
Sample stage 9 and the dynamic gluing unit mirror 5 that represents of dotted line then can carry out illustrating for position movement to represent which.
Embodiments in accordance with the present invention, 8 upper surface of collimation aperture apparatus and the reflecting mirror reflection kernel vertical dimension
It is less than in equal to 30mm more than or equal to 10mm.
Preferably, this vertical dimension be 10,15,20,25,30mm.
Embodiments in accordance with the present invention, the through hole are less than or equal to 2mm, collimate on aperture apparatus 8 as described in Fig. 5
Hole.
Embodiments in accordance with the present invention, the collimation aperture apparatus 8 are lead glass devices, and the lead glass device can be fixed
Install, it is also possible to carry out position movement.
Preferably, the lead glass device is lead glass plate, and the effect of lead glass is gear X-fluorescence, does not keep off visible ray.Lead glass
In the middle of glass is the collimating aperture of X-fluorescence, i.e., described through hole, and the X-fluorescence beyond the through hole can not be through lead glass out, and X is glimmering
Light can only pass through the standard-sized small X-fluorescence hot spot of the collimated formation of aperture of lead glass, be incident upon on sample, Jing samples
Reflect to form the Secondary radiation with feature and enter detector, Jing software algorithms draw test result.Imaging optical path is due to being visible
Light, measurement position can be through the reflected mirror of lead glass and glued microscope groups into CCD imagings, because being coaxial light path, imaging center
It is test point.
Further, the lead glass thickness in the lead glass device is less than or equal to 20mm.
Preferably, the lead glass thickness is to be less than or equal to 15mm more than or equal to 5mm.
It is highly preferred that the lead glass thickness is 5mm, 10mm, 15mm.
Further, the through hole of the lead glass is not more than 2mm.
Some embodiments of the invention, 71 diameter of insertion through hole are less than or equal to 8mm and are more than or equal to 1mm.
Further, 71 diameter of insertion through hole is not more than 3mm.
Although detailed retouch has been carried out to the specific embodiment of the present invention with reference to multiple illustrative examples of the present invention
State, it must be understood that those skilled in the art can be designed that various other improvement and embodiment, these improve and implement
Example will fall within spirit and scope.Specifically, in the scope of aforementioned disclosure, accompanying drawing and claim
Within, rational modification and improvement can be made in terms of the arrangement of parts and/or sub-combination layout, without departing from
The spirit of the present invention.Modification and improvement in terms of except parts and/or layout, its scope is by claims and its equivalent
Thing is limited.
Claims (8)
1. a kind of light path system coaxial for optical system for testing and imaging optical path, it is characterised in that including optical system for testing, imaging
Road, incidence and reflection part, the optical system for testing and the imaging optical path are arranged on described incident and reflection part both sides, into anti-
Penetrate specular；
The incident and reflection part includes reflecting mirror, and the mirror tilt is installed and had and is arranged on the mirror center
The insertion through hole at position, test light are injected by the insertion through hole and enter the optical system for testing；
The optical system for testing includes sample stage and the collimation aperture apparatus with through hole, and the collimation aperture apparatus are lead glass devices,
The sample stage is arranged on the side of the optical system for testing, can carry out position movement, the collimation aperture apparatus peace along mounting axis
It is mounted between incident and reflection part and the sample stage；
The imaging optical path includes gluing unit microscope group and CCD target surfaces, and the gluing unit microscope group is arranged on the imaging optical path side,
Normal direction of the gluing unit microscope group axis with the optical system for testing axis with regard to the reflecting mirror is mirrored reflective symmetry, institute
Stating gluing unit microscope group includes quiet gluing unit mirror and dynamic gluing unit mirror, the quiet gluing unit mirror fixed installation, the dynamic gluing unit mirror
Dynamic is arranged between the quiet gluing unit mirror and the CCD target surfaces, can carry out position movement along the imaging optical path axis；Institute
State rear side of the CCD target surfaces installed in the gluing unit microscope group.
2. the light path system coaxial for optical system for testing and imaging optical path according to claim 1, it is characterised in that described
Optical system for testing is X ray test light path, and the imaging optical path is visual light imaging light path.
3. the light path system coaxial for optical system for testing and imaging optical path according to claim 1, it is characterised in that described
Reflecting mirror is arranged on erecting device, has the incident through hole communicated with the insertion through hole on the erecting device.
4. the light path system coaxial for optical system for testing and imaging optical path according to claim 1, it is characterised in that described
Between sample stage and reflecting mirror reflection kernel distance and the dynamic gluing unit mirror and reflecting mirror reflection kernel distance
Relation is non-linear relation in the same direction.
5. the light path system coaxial for optical system for testing and imaging optical path according to claim 1, it is characterised in that described
Collimation aperture apparatus upper surface is to be less than or equal to 30mm more than or equal to 10mm with the reflecting mirror reflection kernel position vertical dimension.
6. the light path system coaxial for optical system for testing and imaging optical path according to claim 1, it is characterised in that described
Through hole is less than or equal to 2mm.
7. the light path system coaxial for optical system for testing and imaging optical path according to claim 1, it is characterised in that described
Lead glass thickness in lead glass device is less than or equal to 20mm.
8. the light path system coaxial for optical system for testing and imaging optical path according to claim 1, it is characterised in that described
Insertion through-hole diameter is less than or equal to 8mm and is more than or equal to 1mm.
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| Application Number | Priority Date | Filing Date | Title |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410083519.0A CN103808748B (en) | 2014-03-10 | 2014-03-10 | Light-path system enabling test light path and imaging light path to be coaxial |
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| CN109827976B (en) * | 2019-03-14 | 2024-01-05 | 中国科学院上海应用物理研究所 | Optical system for on-line observation and adjustment of X-ray beam and sample |
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| CN1484776A (en) * | 2001-10-03 | 2004-03-24 | ���ṫ˾ | image pickup device |
| CN1811511A (en) * | 2005-01-28 | 2006-08-02 | 索尼株式会社 | Focus control device and focus control method |
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| CN102621558A (en) * | 2012-01-08 | 2012-08-01 | 杨少辰 | Laser radar visibility meter and transceiving coaxial optical system thereof |
| CN203732475U (en) * | 2014-03-10 | 2014-07-23 | 江苏天瑞仪器股份有限公司 | Light path system for enabling testing light path and imaging light path to be coaxial |
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|---|---|---|---|---|
| CN1484776A (en) * | 2001-10-03 | 2004-03-24 | ���ṫ˾ | image pickup device |
| CN1811511A (en) * | 2005-01-28 | 2006-08-02 | 索尼株式会社 | Focus control device and focus control method |
| CN101324422A (en) * | 2007-06-12 | 2008-12-17 | 西安普瑞光学仪器有限公司 | Method and apparatus of fine distribution of white light interference sample surface shapes |
| CN101339129A (en) * | 2007-09-03 | 2009-01-07 | 深圳大学 | Method and device for variable field of view scanning microscope based on fixed optical path system |
| CN102621558A (en) * | 2012-01-08 | 2012-08-01 | 杨少辰 | Laser radar visibility meter and transceiving coaxial optical system thereof |
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