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CN103779438A - Method for preparing CuInxGaySez prefabricated layer by electrochemical deposition - Google Patents

Method for preparing CuInxGaySez prefabricated layer by electrochemical deposition Download PDF

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CN103779438A
CN103779438A CN201210405257.6A CN201210405257A CN103779438A CN 103779438 A CN103779438 A CN 103779438A CN 201210405257 A CN201210405257 A CN 201210405257A CN 103779438 A CN103779438 A CN 103779438A
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prefabricated layer
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electrochemical deposition
indium gallium
copper indium
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CN103779438B (en
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郭伟民
黄迎春
曾波明
廖成
刘焕明
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Chengdu Science and Technology Development Center of CAEP
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/12Active materials
    • H10F77/126Active materials comprising only Group I-III-VI chalcopyrite materials, e.g. CuInSe2, CuGaSe2 or CuInGaSe2 [CIGS]
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/12Semiconductors
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/541CuInSe2 material PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

The invention belongs to the technical field of solar cells and particularly relates to a method for preparing a CuInxGaySez prefabricated layer by electrochemical deposition. The method comprises steps: in an electrical deposition solution, current pulse or voltage pulse is adopted to obtain a CuInxGaySez prefabricated layer on a cathode substrate through electrical deposition, and the current pulse or the voltage pulse comprises a positive pulse period when the current and the voltage are negative values on the deposition surface and a reverse pulse period when the current and the voltage are positive values on the deposition surface. According to the method, a reverse pulse method is used during the electrical deposition process, part of selenium is stripped back in an electroplating solution while the CuInxGaySez prefabricated layer is formed, generation of selenium balls is avoided, and thus the CuInxGaySez prefabricated layer which is uniform in compositions and stable in phase is formed.

Description

一种电化学沉积制备铜铟镓硒预制层的方法A kind of method for preparing copper indium gallium selenide prefabricated layer by electrochemical deposition

技术领域technical field

本发明属于太阳能电池领域,具体的说,涉及一种电化学沉积制备铜铟镓硒预制层的方法。The invention belongs to the field of solar cells, and in particular relates to a method for preparing a copper indium gallium selenide prefabricated layer by electrochemical deposition.

背景技术Background technique

随着人类能源消耗的不断增加,不可再生的能源如化石燃料的耗尽已是亟待解决的问题。化石能源消耗总量将于约2030年出现拐点,可再生能源的比重将不断上升,其中,太阳能在未来能源结构中的比重将越来越大,保守估计这比重于2100年会超过60%。太阳能是众多可再生能源中最为丰富的能源,全球太阳光一小时的能量就相当于地球一年的能耗,远远高于风能、地热、水电、海洋能、生物能等能源。With the continuous increase of human energy consumption, the depletion of non-renewable energy sources such as fossil fuels has become an urgent problem to be solved. The total consumption of fossil energy will reach an inflection point around 2030, and the proportion of renewable energy will continue to rise. Among them, the proportion of solar energy in the future energy structure will increase. It is conservatively estimated that this proportion will exceed 60% in 2100. Solar energy is the most abundant energy among many renewable energy sources. The energy of global sunlight for one hour is equivalent to the energy consumption of the earth for a year, which is much higher than wind energy, geothermal energy, hydropower, ocean energy, biomass energy and other energy sources.

制约太阳能大规模发电的瓶颈主要是光伏器件的低转化效率及高生产成本,其中最核心的要素是光伏发电系统的成本,包括光伏板和其它系统组件如逆变器、电开关器、电缆和支架等。发电要实现“平价上网”,发电成本要达到每度人民币0.6元,光伏板成本要降至每瓦人民币3-4元,售价每瓦人民币5-7元。由于目前市场多晶硅光伏板价格已接近企业的成本价,多晶硅光伏板制造技术也已相对成熟,下调空间有限,以多晶硅光伏板实现“平价上网”并不容易。The bottleneck restricting large-scale solar power generation is mainly the low conversion efficiency and high production cost of photovoltaic devices, the core element of which is the cost of photovoltaic power generation systems, including photovoltaic panels and other system components such as inverters, electrical switches, cables and bracket etc. To achieve “grid parity” for power generation, the cost of power generation must reach RMB 0.6 per kilowatt-hour, the cost of photovoltaic panels must be reduced to RMB 3-4 per watt, and the selling price should be RMB 5-7 per watt. Since the current market price of polysilicon photovoltaic panels is close to the cost price of enterprises, and the manufacturing technology of polysilicon photovoltaic panels is relatively mature, there is limited room for downward adjustment. It is not easy to achieve "grid parity" with polysilicon photovoltaic panels.

铜铟镓硒(CuInxGaySez,也可包括硫,简写为CIGS)薄膜光伏板以其转换效率高、长期稳定性好、抗辐射能力强等优点成为光伏界的研究热点,有望成为下一代的廉价光伏板。它有以下优势:Copper indium gallium selenide (CuInxGaySez, can also include sulfur, abbreviated as CIGS) thin-film photovoltaic panels have become a research hotspot in the photovoltaic industry due to their high conversion efficiency, good long-term stability, and strong radiation resistance, and are expected to become the next generation of cheap photovoltaics. plate. It has the following advantages:

1)高的光电转换效率,目前玻璃衬底CIGS薄膜光伏板实验室效率已经超过20%,接近传统晶硅光伏板的世界纪录。大面积CIGS薄膜光伏板组件的转换效率也有超过14%的产品,是所有薄膜光伏板中最高的;1) High photoelectric conversion efficiency. At present, the laboratory efficiency of CIGS thin-film photovoltaic panels on glass substrates has exceeded 20%, which is close to the world record of traditional crystalline silicon photovoltaic panels. The conversion efficiency of large-area CIGS thin-film photovoltaic panel modules also exceeds 14%, which is the highest among all thin-film photovoltaic panels;

2)弱光性能好,在非太阳直照时也可产生电,从光伏发电场实际运行的经验,阴天及早上黄昏可提拱更多的电能;2) Low light performance is good, and electricity can be generated even when the sun is not directly shining. From the actual operation experience of photovoltaic power plants, more electricity can be generated on cloudy days and in the morning and evening;

3)温度系数低,在温度高时包括当地温度高或因阳光照射而温度高,CIGS光伏板可保持较高的转换效率。因此在相同的效率下,CIGS光伏板比传统晶硅光伏板产电更多;3) The temperature coefficient is low. When the temperature is high, including the local temperature is high or the temperature is high due to sunlight, CIGS photovoltaic panels can maintain a high conversion efficiency. Therefore, at the same efficiency, CIGS photovoltaic panels produce more electricity than traditional crystalline silicon photovoltaic panels;

4)成本低、材料消耗少;4) Low cost and low material consumption;

5)长期稳定性好,室外使用不衰减;5) Good long-term stability, no attenuation in outdoor use;

6)能量偿还周期短;6) The energy repayment period is short;

7)适合发展多用途的柔性光伏组件。7) Suitable for the development of multi-purpose flexible photovoltaic modules.

这些优势令铜铟镓硒薄膜光伏板在民用领域以及军用领域具有广阔的应用前景,如光伏建筑一体化、大规模低成本发电站、太阳能照明光源、空间及邻近空间系统等。These advantages make copper indium gallium selenide thin film photovoltaic panels have broad application prospects in civilian and military fields, such as photovoltaic building integration, large-scale low-cost power stations, solar lighting sources, space and adjacent space systems, etc.

铜铟镓硒薄膜光伏板是多层膜结构,通常包括:衬底、背电极、CIGS吸收层、缓冲层、透明导电层等,其中CIGS吸收层是太阳能光伏板最关键的组成部分,其制备方法决定了光伏板的质量和成本。Copper indium gallium selenide thin film photovoltaic panel is a multilayer film structure, usually including: substrate, back electrode, CIGS absorber layer, buffer layer, transparent conductive layer, etc., among which CIGS absorber layer is the most critical component of solar photovoltaic panel, its preparation The method determines the quality and cost of photovoltaic panels.

目前在市场上普遍应用于光电器件的化合物半导体的生产工艺几乎都是使用高真空技术比如蒸镀或者溅射,特别是在CIGS领域。但是上述真空技术在前期投入和运行过程中均需耗费大量的成本。此外,仪器设备的真空室尺寸也会限制薄膜的产量,进一步影响生产效率。非真空法的发展有利于CIGS大规模化生产。At present, the production process of compound semiconductors widely used in optoelectronic devices in the market is almost always using high vacuum technology such as evaporation or sputtering, especially in the field of CIGS. However, the above-mentioned vacuum technology needs to consume a lot of cost in the initial investment and operation process. In addition, the size of the vacuum chamber of the instrument will also limit the output of the film, further affecting the production efficiency. The development of non-vacuum method is beneficial to the large-scale production of CIGS.

Nanosolar公司率先采用了墨水打印制备CIGS薄膜的技术(参见K.Pichler,美国专利号7,122,398及引用文献)。其制备流程是:先通过化学方法制备得到CIGS纳米颗粒,然后把这些纳米颗粒分散形成胶体溶液(通常叫做CIGS纳米墨水),加入合适的表面活性剂以防止纳米颗粒团聚,除此之外还加入打印过程所需的其他化学添加剂。CIGS纳米墨水在打印形成薄膜后,需要热处理去掉先前加入的溶剂,表面活性剂以及其他化学添加剂,然后才能烧结形成均一薄膜。Nanosolar company took the lead in using ink printing to prepare CIGS thin film technology (see K. Pichler, US Patent No. 7,122,398 and references). The preparation process is: firstly prepare CIGS nanoparticles by chemical methods, then disperse these nanoparticles to form a colloidal solution (usually called CIGS nano-ink), add suitable surfactants to prevent the aggregation of nanoparticles, in addition to adding Other chemical additives required for the printing process. After the CIGS nano-ink is printed to form a thin film, it needs heat treatment to remove the previously added solvent, surfactant and other chemical additives, and then it can be sintered to form a uniform thin film.

许多导电材料都可以通过低成本的电化学方法大规模制备得到,用电沉积法制备CIGS薄膜成为降低成本、获得大面积CIGS薄膜的主要研究方向之一。而目前通过电化学制备化学计量比合适的CIGS存在一些问题,CIGS薄膜中各元素的摩尔比为:Cu:(In+Ga):Se≈1:1:2时,转换效率较高,Ga的含量为0.3时转换效率最高。例如:电沉积CIGS需要严格控制溶液中Cu、In、Ga、Se各元素的量,以及准确控制电化学还原电位,并控制溶液在电化学沉积过程中不产生其他副反应。虽然如此,有几个研究小组的相关文献声称已经在水相中电镀出CIGS薄膜。例如:Y.P.Fu et al.(Journal of the Electrochemical Socie ty,2009,156,9–E133-E138)报道以LiCl为导电盐在水溶液中制备得到CIGS薄膜。水基电解液由于In和Ga的沉积电位低,采用较负的沉积电位,阴极容易放出氢气,使薄膜呈多孔状(析氢反应)。此外,他们并没有制备得到化学计量比合适的薄膜,薄膜中Ga的含量偏低。添加更多Ga的化合物在水溶液中并不能增加CIGS薄膜中的Ga含量。Fu等人指出在水溶液中添加Ga的化合物导致Ga的还原电位更负,Ga3+很难在阴极被还原出来。Many conductive materials can be prepared on a large scale by low-cost electrochemical methods, and the preparation of CIGS thin films by electrodeposition has become one of the main research directions to reduce costs and obtain large-area CIGS thin films. At present, there are some problems in the electrochemical preparation of CIGS with a suitable stoichiometric ratio. The molar ratio of each element in the CIGS film is: Cu: (In+Ga): Se≈1:1:2, the conversion efficiency is high, and the Ga The conversion efficiency is the highest when the content is 0.3. For example, electrodeposition of CIGS requires strict control of the amount of Cu, In, Ga, and Se elements in the solution, accurate control of the electrochemical reduction potential, and control of the solution to prevent other side reactions during the electrochemical deposition process. Nonetheless, several research groups have reported that CIGS thin films have been electroplated in aqueous phase. For example: YPFu et al. (Journal of the Electrochemical Society, 2009, 156, 9–E133-E138) reported that CIGS thin films were prepared in aqueous solution using LiCl as the conductive salt. Due to the low deposition potential of In and Ga in the water-based electrolyte, a relatively negative deposition potential is used, and the cathode is easy to release hydrogen gas, making the film porous (hydrogen evolution reaction). In addition, they did not prepare films with proper stoichiometry, and the Ga content in the films was low. Addition of more Ga compounds in aqueous solutions does not increase the Ga content in CIGS films. Fu et al. pointed out that the addition of Ga compounds in aqueous solution leads to a more negative Ga reduction potential, and Ga 3+ is difficult to be reduced at the cathode.

Lai等人(Electrochimica Acta 2009,54,3004-3010)报道了在水-二甲基甲酰胺体系中一步电沉积CIGS薄膜。即使在这种体系中,由于Cu、In、Ga、Se四元素的还原电位相差很大,还是很难一步共沉积。为了解决这个问题,Lai等在水-二甲基甲酰胺体系中加入了络合剂,在这篇文献中,他们同样也详细分析了前面涉及到的析氢反应,但络合剂柠檬酸钠的加入并没有与In3+,Ga3+离子产生明显的络合效应来改变In及Ga的还原电位,其在-0.3V,-0.4V,-0.5V,-0.6V,-0.7V,-0.8V,-0.9V,-1.0V的电位下制备出相对应的CuIn0.21Ga0.10Se1.75,CuIn0.40Ga0.14Se1.41,CuIn0.35Ga0.12Se1.21,CuIn0.42Ga0.17Se1.24,CuIn0.43Ga0.18Se1.32,CuIn0.47Ga0.22Se1.22,CuIn0.62Ga0.22Se1.20,CuIn0.57Ga0.16Se1.52。这些都不是化学计量比合适的CIGS,全都富Cu贫In、Ga。Lai et al. (Electrochimica Acta 2009, 54, 3004-3010) reported one-step electrodeposition of CIGS thin films in a water-dimethylformamide system. Even in this system, it is difficult to co-deposit in one step due to the large difference in the reduction potentials of the four elements Cu, In, Ga, and Se. In order to solve this problem, Lai et al. added a complexing agent to the water-dimethylformamide system. In this document, they also analyzed the hydrogen evolution reaction mentioned above in detail, but the complexing agent sodium citrate Adding does not produce obvious complexation effect with In 3+ , Ga 3+ ions to change the reduction potential of In and Ga, which is at -0.3V, -0.4V, -0.5V, -0.6V, -0.7V, - The corresponding CuIn 0.21 Ga 0.10 Se 1.75 , CuIn 0.40 Ga 0.14 Se 1.41 , CuIn 0.35 Ga 0.12 Se 1.21 , CuIn 0.42 Ga 0.17 Se 1.24 , CuIn 0.43 Ga were prepared at the potentials of 0.8V, -0.9V, and -1.0V Se 1.32 , CuIn 0.47 Ga 0.22 Se 1.22 , CuIn 0.62 Ga 0.22 Se 1.20 , CuIn 0.57 Ga 0.16 Se 1.52 . These are not CIGS with proper stoichiometric ratio, all of which are rich in Cu and poor in In and Ga.

在另一方法中,Kois等人(Thin Solid Films 2008,516,5948-5952)报道了使用硫氰酸盐复合电解液制备CIGS薄膜。他们再次强调了电镀后硒化热处理的必要性。而他们的报道也同样显示在电镀获得的CIGS薄膜中Ga含量不足。In another method, Kois et al. (Thin Solid Films 2008, 516, 5948-5952) reported the preparation of CIGS films using thiocyanate composite electrolytes. They again emphasized the necessity of selenization heat treatment after electroplating. And their report also showed that the Ga content in the CIGS film obtained by electroplating was insufficient.

在又一个方法中,Long和他的合作者(Journal of Physics:Conference Series2009,152,012074)报道了在乙醇溶液中一步电沉积CIGS薄膜。同样,电镀后得到的CIGS薄膜需要在550℃中烧结30分钟,且其获得的CIGS薄膜中Cu含量不足。In yet another approach, Long and co-workers (Journal of Physics: Conference Series 2009, 152, 012074) reported the one-step electrodeposition of CIGS thin films in ethanol solutions. Similarly, the CIGS film obtained after electroplating needs to be sintered at 550° C. for 30 minutes, and the Cu content in the obtained CIGS film is insufficient.

Peter等报道在非水相中电沉积制备CIGS(“Electrochemical Deposition ofCIGS by means of Room Temperature Ionic Liquids”,Thin solid Films,2007,515,5899-5903)。这篇文献描述了在离子液体中制备Cu-In-Ga和Cu-In-Ga-Se薄膜,该薄膜电镀后在500℃硒化30分钟分别制备得到化学计量比合适的CIS和CIGS薄膜。Peter et al reported the preparation of CIGS by electrodeposition in a non-aqueous phase ("Electrochemical Deposition of CIGS by means of Room Temperature Ionic Liquids", Thin solid Films, 2007, 515, 5899-5903). This document describes the preparation of Cu-In-Ga and Cu-In-Ga-Se thin films in ionic liquids. After electroplating, the thin films were selenized at 500°C for 30 minutes to prepare CIS and CIGS thin films with appropriate stoichiometric ratios, respectively.

上述研究电沉积的文献,主要关注于电沉积液体对电沉积过程的影响。CN101079454A公开了一种脉冲电沉积铜铟镓硒半导体薄膜材料的方法,该方法采用阴极脉冲电位沉积法在基底上沉积含铜铟镓硒的预制层,所述脉冲电位波形为方波、三角波或正弦波。CN101570871A公开了一种利用特殊脉冲电源沉积铜铟镓硒或铜铟镓硒半导体薄膜材料的方法,该专利采用钟形波调节的方波脉冲,在阴极基底上电沉积制得预制层。上述两种方法采用脉冲波,虽然一定程度上缓解了恒电位电沉积可控参数少,析氢反应严重,薄膜空隙率高的问题;但是,该方法仍未从根本上解决因铜铟镓硒的电位差距而导致四元素不能同步共沉积,特别是Se的沉积速度较快,不能得到化学计量比合适的CIGS薄膜,在电沉积过程中生成一些纯的硒球(如附图1中的球体)。这些硒球会影响铜铟镓硒晶体形成,也会导致在退火后铜铟镓硒层内有小空洞。The above literatures on electrodeposition mainly focus on the influence of electrodeposition liquid on the electrodeposition process. CN101079454A discloses a method for pulse electrodepositing copper indium gallium selenide semiconductor thin film material. The method adopts cathode pulse potential deposition method to deposit a prefabricated layer containing copper indium gallium selenide on the substrate. The pulse potential waveform is square wave, triangular wave or sine wave. CN101570871A discloses a method for depositing copper indium gallium selenide or copper indium gallium selenide semiconductor thin film material by using a special pulse power supply. The patent uses a square wave pulse adjusted by a bell wave to electrodeposit a prefabricated layer on the cathode substrate. The above two methods use pulse waves, although to some extent alleviate the problems of few controllable parameters of constant potential electrodeposition, severe hydrogen evolution reaction, and high film porosity; Due to the potential difference, the four elements cannot be co-deposited synchronously, especially the deposition rate of Se is fast, and a CIGS film with a suitable stoichiometric ratio cannot be obtained, and some pure selenium spheres (such as the spheres in Figure 1) are generated during the electrodeposition process. . These selenium balls will affect the formation of CIGS crystals, and will also cause small voids in the CIGS layer after annealing.

发明内容Contents of the invention

本发明的目的在于克服上述电沉积制备铜铟镓硒薄膜技术中所存在的CIGS薄膜中化学计量比不合适、镀层内形成几乎是纯硒的硒球的不足,提供一种改进的电化学沉积制备铜铟镓硒预制层的方法。本发明利用反向脉冲电化学沉积制备铜铟镓硒预制层的方法,在形成铜铟镓硒预制层的同时,把部分硒元素退镀回到到电镀液中,可以避免镀层内形成硒球,从而形成成分均匀、物相稳定的铜铟镓硒预制层。The object of the present invention is to overcome the shortcomings of the improper stoichiometric ratio in the CIGS film and the formation of almost pure selenium selenium balls in the coating that exist in the above-mentioned electrodeposition preparation of copper indium gallium selenium thin film technology, and provide an improved electrochemical deposition A method for preparing a copper indium gallium selenide prefabricated layer. The present invention utilizes reverse pulse electrochemical deposition to prepare the copper indium gallium selenium prefabricated layer. While forming the copper indium gallium selenium prefabricated layer, part of the selenium element is stripped back into the electroplating solution, which can avoid the formation of selenium balls in the plating layer. , so as to form a CIGS prefabricated layer with uniform composition and stable phase.

为了实现上述发明目的,本发明提供了以下技术方案:In order to realize the above-mentioned purpose of the invention, the present invention provides the following technical solutions:

一种电化学沉积制备铜铟镓硒预制层的方法,包括在电沉积溶液中,采用电流控制脉冲或者电压控制脉冲在阴极衬底上电沉积得到铜铟镓硒预制层,其中,所述电流控制脉冲或者电压控制脉冲包括电流及电压在沉积表面都达到负值的正向脉冲时期和电流及电压在沉积表面都达到正值的反向脉冲时期。所述电沉积溶液为离子液体体系。在电沉积过程中,采用反向脉冲,可以将在相对低电压沉积的硒元素退镀至电沉积溶液中,避免镀层内形成硒球。A method for preparing a copper indium gallium selenide prefabricated layer by electrochemical deposition, comprising: in an electrodeposition solution, using a current control pulse or a voltage control pulse to electrodeposit a copper indium gallium selenide prefabricated layer on a cathode substrate, wherein the current The control pulse or voltage control pulse includes a forward pulse period in which the current and voltage both reach negative values on the deposition surface and a reverse pulse period in which both the current and voltage reach positive values on the deposition surface. The electrodeposition solution is an ionic liquid system. During the electrodeposition process, the selenium element deposited at a relatively low voltage can be deplated into the electrodeposition solution by using the reverse pulse, so as to avoid the formation of selenium balls in the plating layer.

优选的,上述电化学沉积制备铜铟镓硒预制层的方法中,所述电流脉冲的脉冲条件为:正向脉冲时期的工作时间为3毫秒~1秒,电流密度-0.05ASD~-5.0ASD;反向脉冲时期的工作时间为1毫秒~0.5秒,电流密度为0.1ASD~20ASD;所述电压脉冲的脉冲条件为:正向脉冲时期的工作时间为3毫秒~1秒,电压-0.5V~-8.0V;反向脉冲时期的工作时间为1毫秒~0.5秒,电压0.1V~5.0V。在上述脉冲条件下,在电沉积形成铜铟镓硒预制层的同时,有利于把偏析硒元素退镀至电沉积溶液中,而且这个退镀具有选择性,几乎不退镀其他元素,可以得到化学计量比合适的CIGS薄膜,避免在镀层内形成硒球。Preferably, in the method for preparing the copper indium gallium selenide prefabricated layer by electrochemical deposition, the pulse conditions of the current pulse are: the working time of the forward pulse period is 3 milliseconds to 1 second, and the current density is -0.05ASD to -5.0ASD ; The working time of the reverse pulse period is 1 millisecond to 0.5 seconds, and the current density is 0.1ASD to 20ASD; the pulse conditions of the voltage pulse are: the working time of the forward pulse period is 3 milliseconds to 1 second, and the voltage is -0.5V ~-8.0V; the working time in the reverse pulse period is 1 millisecond to 0.5 seconds, and the voltage is 0.1V to 5.0V. Under the above-mentioned pulse conditions, while the electrodeposition forms the prefabricated layer of copper indium gallium selenide, it is beneficial to deplating the segregated selenium element into the electrodeposition solution, and this deplating is selective, and almost no deplating of other elements can be obtained. CIGS film with proper stoichiometry avoids the formation of selenium balls in the coating.

上述电化学沉积制备铜铟镓硒预制层的方法中,电沉积溶液中铜、铟、镓、硒离子的浓度分别为0.1mM-50mM、0.1mM-60mM、0.1mM-80mM、0.1mM-50mM。In the method for preparing the copper indium gallium selenide prefabricated layer by electrochemical deposition, the concentrations of copper, indium, gallium, and selenium ions in the electrodeposition solution are respectively 0.1mM-50mM, 0.1mM-60mM, 0.1mM-80mM, and 0.1mM-50mM .

所述离子液体体系是由尿素和氯化胆碱组成,氯化胆碱与尿素的重量比为1:0.5-5,优选为1:2。The ionic liquid system is composed of urea and choline chloride, and the weight ratio of choline chloride to urea is 1:0.5-5, preferably 1:2.

上述电化学沉积制备铜铟镓硒预制层的方法中,电沉积溶液中的铜离子来自包含铜的硫酸盐、醋酸盐、溴化盐、氟化盐、氯化盐、碘化盐、氢氧化盐、氮化盐、草酸盐、柠檬酸盐、磷酸盐、钨酸盐、水合物或者它们的组合。In the above method for preparing the copper indium gallium selenide prefabricated layer by electrochemical deposition, the copper ions in the electrodeposition solution come from sulfate, acetate, bromide, fluoride, chloride, iodide, hydrogen Oxides, nitrides, oxalates, citrates, phosphates, tungstates, hydrates, or combinations thereof.

上述电化学沉积制备铜铟镓硒预制层的方法中,电沉积溶液中的镓离子来自包含镓的硫酸盐、醋酸盐、溴化盐、氟化盐、氯化盐、碘化盐、氢氧化盐、氮化盐、草酸盐、柠檬酸盐、磷酸盐、钨酸盐、水合物或者它们的组合。In the above method for preparing the copper indium gallium selenide prefabricated layer by electrochemical deposition, the gallium ions in the electrodeposition solution come from sulfate, acetate, bromide, fluoride, chloride, iodide, hydrogen containing gallium Oxides, nitrides, oxalates, citrates, phosphates, tungstates, hydrates, or combinations thereof.

上述电化学沉积制备铜铟镓硒预制层的方法中,电沉积溶液中的铟离子来自包含铟的硫酸盐、醋酸盐、溴化盐、氟化盐、氯化盐、碘化盐、氢氧化盐、氮化盐、草酸盐、柠檬酸盐、磷酸盐、钨酸盐、水合物或者它们的组合。In the above method for preparing the copper indium gallium selenide prefabricated layer by electrochemical deposition, the indium ions in the electrodeposition solution come from sulfate, acetate, bromide, fluoride, chloride, iodide, hydrogen, etc. containing indium. Oxides, nitrides, oxalates, citrates, phosphates, tungstates, hydrates, or combinations thereof.

上述电化学沉积制备铜铟镓硒预制层的方法中,电沉积溶液中的硒离子来自包含硒的硫酸盐、醋酸盐、溴化盐、氟化盐、氯化盐、碘化盐、氢氧化盐、氮化盐、草酸盐、柠檬酸盐、磷酸盐、钨酸盐、水合物或者它们的组合。In the above method for preparing the copper indium gallium selenide prefabricated layer by electrochemical deposition, the selenium ions in the electrodeposition solution come from sulfate, acetate, bromide, fluoride, chloride, iodide, hydrogen containing selenium Oxides, nitrides, oxalates, citrates, phosphates, tungstates, hydrates, or combinations thereof.

上述电化学沉积制备铜铟镓硒预制层的方法中,所述衬底可以是导电聚合物、覆盖金属的聚合物、覆盖透明导电层的聚合物、覆盖ITO的玻璃、覆盖ITO的聚合物、覆盖导电层的陶瓷、金属、非晶半导体材料、晶体半导体材料、多晶半导体材料中的任意一种或者它们的组合。In the method for preparing the copper indium gallium selenide prefabricated layer by electrochemical deposition, the substrate can be a conductive polymer, a polymer covered with a metal, a polymer covered with a transparent conductive layer, a glass covered with ITO, a polymer covered with ITO, Any one or combination of ceramics, metals, amorphous semiconductor materials, crystalline semiconductor materials, and polycrystalline semiconductor materials covering the conductive layer.

上述电化学沉积制备铜铟镓硒预制层的方法中,电沉积溶液中全部或部分铜离子是由阳极氧化后进入电沉积溶液。In the above method for preparing the CIGS prefabricated layer by electrochemical deposition, all or part of the copper ions in the electrodeposition solution enter the electrodeposition solution after being oxidized by the anode.

上述电化学沉积制备铜铟镓硒预制层的方法中,电沉积溶液全部或部分镓离子是由阳极氧化后进入电沉积溶液。In the above method for preparing the CIGS prefabricated layer by electrochemical deposition, all or part of the gallium ions in the electrodeposition solution enter the electrodeposition solution after being oxidized by the anode.

上述电化学沉积制备铜铟镓硒预制层的方法中,电沉积溶液中全部或部分铟离子是由阳极氧化后进入电沉积溶液。In the above method for preparing the CIGS prefabricated layer by electrochemical deposition, all or part of the indium ions in the electrodeposition solution enter the electrodeposition solution after being oxidized by the anode.

上述电化学沉积制备铜铟镓硒预制层的方法中,电沉积溶液中全部或部分硒离子是由阳极氧化后进入电沉积溶液。In the above method for preparing the CIGS prefabricated layer by electrochemical deposition, all or part of the selenium ions in the electrodeposition solution enter the electrodeposition solution after being oxidized by the anode.

采用上述电化学沉积方法制备的铜铟镓硒预制层,所述反向脉冲参与沉积预制层的厚度为整体预制层厚度的20%以上。发明人发现,电化学沉积过程中,采用反向脉冲制备得到的预制层为整体预制层厚度的20%以上时,已可减少在铜铟镓硒层与金属层介面附近形成空洞。For the copper indium gallium selenium prefabricated layer prepared by the above electrochemical deposition method, the thickness of the prefabricated layer deposited by the reverse pulse is more than 20% of the thickness of the whole prefabricated layer. The inventors found that during the electrochemical deposition process, when the prefabricated layer prepared by using the reverse pulse is more than 20% of the thickness of the overall prefabricated layer, the formation of voids near the interface between the CIGS layer and the metal layer can be reduced.

与现有技术相比,本发明的有益效果:Compared with prior art, the beneficial effect of the present invention:

在电化学沉积制备铜铟镓硒的过程中,由于铜铟镓硒四元素存在电位差,各元素电解的难易程度不同,四元素不能同步共沉积,特别是Se在相对较低电压下沉积,因而难以得到化学计量比合适的CIGS薄膜,在电沉积过程中生成一些硒球(如附图1中的球体)。这些硒球影响铜铟镓硒晶体形成,也会导致在退火后铜铟镓硒层内有小空洞。本发明的电化学沉积制备铜铟镓硒预制层方法中,在电化学沉积的过程中,采用了反向脉冲波,在制备得到铜铟镓硒预制层的同时,可以将在相对低电压沉积的部分硒元素退镀至电镀溶液中,避免镀层内形成硒球,从而形成成分均匀、物相稳定的铜铟镓硒预制层。In the process of preparing copper indium gallium selenide by electrochemical deposition, due to the potential difference of the four elements of copper indium gallium selenide, the degree of difficulty of electrolysis of each element is different, and the four elements cannot be co-deposited simultaneously, especially when Se is deposited at a relatively low voltage. , so it is difficult to obtain a CIGS film with a proper stoichiometric ratio, and some selenium spheres (such as the spheres in Figure 1) are generated during the electrodeposition process. These selenium balls affect the formation of CIGS crystals, and also cause small voids in the CIGS layer after annealing. In the method for preparing the copper indium gallium selenide prefabricated layer by electrochemical deposition of the present invention, in the process of electrochemical deposition, the reverse pulse wave is used, and the copper indium gallium selenide prefabricated layer can be deposited at a relatively low voltage while preparing the copper indium gallium selenide prefabricated layer. Part of the selenium element is deplated into the electroplating solution to avoid the formation of selenium balls in the plating layer, thereby forming a copper indium gallium selenide prefabricated layer with uniform composition and stable phase.

发明人发现,电化学沉积过程中,采用反向脉冲制备得到的预制层为整体预制层厚度的20%以上时,已可减少在铜铟镓硒层与金属层介面附近形成空洞。进一步的,发明人优选了反向脉冲的脉冲条件,在电流及电压在沉积表面都是负值的正向脉冲时期进行电沉积,在电流及电压在沉积表面都是正值的反向脉冲时期进行退镀,在上述脉冲条件作用下,在电沉积形成铜铟镓硒预制层的同时,有利于把硒元素部分退镀至电沉积溶液中,几乎不退镀其他元素,可以得到化学计量比合适的CIGS薄膜,避免在镀层内形成硒球。The inventors found that during the electrochemical deposition process, when the prefabricated layer prepared by using the reverse pulse is more than 20% of the thickness of the overall prefabricated layer, the formation of voids near the interface between the CIGS layer and the metal layer can be reduced. Further, the inventors optimized the pulse conditions of the reverse pulse. Electrodeposition was performed during the forward pulse period when the current and voltage were both negative on the deposition surface, and during the reverse pulse period when the current and voltage were both positive on the deposition surface. Deplating, under the action of the above pulse conditions, while forming the prefabricated layer of copper indium gallium selenium by electrodeposition, it is beneficial to partially deplate the selenium element into the electrodeposition solution, almost no other elements are deplated, and the stoichiometric ratio can be obtained. Suitable CIGS thin film to avoid the formation of selenium balls in the coating.

附图说明:Description of drawings:

图1为现有技术中铜铟镓硒预制层的电镜扫描图,图中圆球即为硒球。FIG. 1 is an electron microscope scanning image of a CIGS prefabricated layer in the prior art, and the balls in the figure are selenium balls.

图2为实施例1脉冲电流密度及相应的电压变化图。Fig. 2 is a graph of pulse current density and corresponding voltage change in Example 1.

图3为扫描电子显微镜获得的实施例1的表面形态图。Fig. 3 is a surface morphology diagram of Example 1 obtained by a scanning electron microscope.

图4为实施例2脉冲电压及相应的电流密度变化图。Fig. 4 is a graph showing the pulse voltage and the corresponding current density changes in Example 2.

图5为扫描电子显微镜获得的实施例2的表面形态图。Fig. 5 is a surface morphology diagram of Example 2 obtained by a scanning electron microscope.

图6为对比例1恒电流电流密度及相应的电压变化图。FIG. 6 is a diagram of constant current current density and corresponding voltage change in Comparative Example 1. FIG.

图7为扫描电子显微镜获得的对比例1的表面形态图。FIG. 7 is a surface morphology diagram of Comparative Example 1 obtained by a scanning electron microscope.

图8为对比例2恒电压及相应的电流密度变化图。FIG. 8 is a graph showing constant voltage and corresponding current density changes in Comparative Example 2. FIG.

图9为扫描电子显微镜获得的对比例2的表面形态图。FIG. 9 is a surface morphology diagram of Comparative Example 2 obtained by a scanning electron microscope.

具体实施方式Detailed ways

下面结合试验例及具体实施方式对本发明作进一步的详细描述。但不应将此理解为本发明上述主题的范围仅限于以下的实施例,凡基于本发明内容所实现的技术均属于本发明的范围。The present invention will be further described in detail below in conjunction with test examples and specific embodiments. However, it should not be understood that the scope of the above subject matter of the present invention is limited to the following embodiments, and all technologies realized based on the content of the present invention belong to the scope of the present invention.

实施例1Example 1

本实施例列举的电化学沉积制备铜铟镓硒预制层的方法,包括在电沉积溶液中,采用电流脉冲在阴极衬底上电沉积得到铜铟镓硒预制层。所述阴极衬底为钠钙玻璃,其上覆盖了一层以真空溅镀后形成的导电钼层。其中,所述电流脉冲包括电流及电压在沉积表面都是负值的正向脉冲时期和电流及电压在沉积表面都是正值的反向脉冲时期。脉冲电流密度及相应的电压变化见图2,脉冲的电流密度及工作时间见表1。The method for preparing the copper indium gallium selenide prefabricated layer by electrochemical deposition listed in this embodiment includes electrodepositing the copper indium gallium selenide prefabricated layer on the cathode substrate by using a current pulse in an electrodeposition solution. The cathode substrate is soda-lime glass covered with a conductive molybdenum layer formed by vacuum sputtering. Wherein, the current pulse includes a forward pulse period in which the current and voltage are both negative on the deposition surface and a reverse pulse period in which the current and voltage are both positive on the deposition surface. The pulse current density and corresponding voltage change are shown in Figure 2, and the pulse current density and working time are shown in Table 1.

本实施例中,电沉积溶液为离子液体体系,离子液体体系由尿素和氯化胆碱组成,氯化胆碱与尿素的重量比为1:0.5;离子液体体系中铜、铟、镓、硒离子的含量及来源见表2。电化学沉积设置包括作为阳极的铂片、作为参比电极的铂丝及一台可提供反向脉冲的电源。电化学沉积时以电流控制,同时量测及纪录电流及相应电压的变化。In this embodiment, the electrodeposition solution is an ionic liquid system, the ionic liquid system is composed of urea and choline chloride, and the weight ratio of choline chloride to urea is 1:0.5; copper, indium, gallium, selenium in the ionic liquid system The content and source of ions are shown in Table 2. The electrochemical deposition setup consists of a platinum sheet as the anode, a platinum wire as the reference electrode, and a power supply that provides reverse pulses. Electrochemical deposition is controlled by current, and the change of current and corresponding voltage is measured and recorded at the same time.

按照本实施例的方法制备得到的CIGS预制层表面形态进行电子显微镜扫描,如图3所示,CIGS表面无球状结构,X射线能谱显示了硒的含量在51.7%,整体成份符合铜铟镓硒预制层的要求。The surface morphology of the CIGS prefabricated layer prepared according to the method of this embodiment is scanned by an electron microscope. As shown in Figure 3, there is no spherical structure on the CIGS surface, and the X-ray energy spectrum shows that the content of selenium is 51.7%, and the overall composition conforms to copper indium gallium Selenium prefab layer required.

实施例2Example 2

本实施例列举的电化学沉积制备铜铟镓硒预制层的方法,包括在电沉积溶液中,采用电压脉冲在阴极衬底上电沉积得到铜铟镓硒预制层。所述阴极衬底为镀Mo和Cu的玻璃衬底。其中,所述电压脉冲包括电流及电压在沉积表面都是负值的正向脉冲时期和电流及电压在沉积表面都是正值的反向脉冲时期。脉冲电压及相应的电流密度变化见图4,反向脉冲波的电压及工作时间见表1。The method for preparing the copper indium gallium selenide prefabricated layer by electrochemical deposition in this embodiment includes electrodepositing the copper indium gallium selenide prefabricated layer on the cathode substrate by using voltage pulses in an electrodeposition solution. The cathode substrate is a glass substrate plated with Mo and Cu. Wherein, the voltage pulse includes a forward pulse period in which the current and voltage are both negative on the deposition surface and a reverse pulse period in which the current and voltage are both positive on the deposition surface. The pulse voltage and corresponding current density changes are shown in Figure 4, and the voltage and working time of the reverse pulse wave are shown in Table 1.

本实施例中,电沉积溶液为离子液体体系,所述的离子液体体系由尿素和氯化胆碱组成,氯化胆碱与尿素的重量比为1:1,离子液体体系中铜、铟、镓、硒离子的含量及来源见表2。电化学沉积设置包括作为阳极的铂片、作为参比电极的铂丝及一台可提供反向脉冲的电源。电化学沉积时以电压控制,同时量测及纪录电压及相应电流密度的变化。In this embodiment, the electrodeposition solution is an ionic liquid system. The ionic liquid system is composed of urea and choline chloride. The weight ratio of choline chloride to urea is 1:1. In the ionic liquid system, copper, indium, The contents and sources of gallium and selenium ions are shown in Table 2. The electrochemical deposition setup consists of a platinum sheet as the anode, a platinum wire as the reference electrode, and a power supply that provides reverse pulses. Electrochemical deposition is controlled by voltage, and the voltage and corresponding current density changes are measured and recorded at the same time.

按照本实施例的方法制备得到的CIGS预制层表面形态进行电子显微镜扫描,如图5所示,CIGS表面无球状结构,能量弥散X射线能谱显示了硒的含量在50.8%,整体成份符合铜铟镓硒预制层的要求。The surface morphology of the CIGS prefabricated layer prepared according to the method of this embodiment is scanned by an electron microscope. As shown in Figure 5, there is no spherical structure on the CIGS surface, and the energy dispersive X-ray energy spectrum shows that the content of selenium is 50.8%, and the overall composition conforms to copper InGaSe prefab layer requirements.

对比例comparative example

对比例1Comparative example 1

按照实施例1电化学沉积制备铜铟镓硒预制层的方法。其中和实施例1不一样的是所述电化学沉积为恒电流,恒电流沉积的电流密度及相应的电压变化见图6,恒电流的电流密度见表1,其余条件同实施例1。According to the method for preparing the copper indium gallium selenide prefabricated layer by electrochemical deposition in Example 1. The difference from Example 1 is that the electrochemical deposition is a constant current, the current density of constant current deposition and the corresponding voltage change are shown in Figure 6, the current density of constant current is shown in Table 1, and the rest of the conditions are the same as in Example 1.

按照本对比例制备得到的CIGS预制层表面形态进行电子显微镜扫描,如图7所示,CIGS表面充满了很多球状结构,从球状上获得的X射线能谱显示了硒的含量为98%,球状旁边的结构硒的含量为44%,其它成分包括铜、铟及镓。The surface morphology of the CIGS prefabricated layer prepared according to this comparative example is scanned by an electron microscope, as shown in Figure 7, the CIGS surface is full of many spherical structures, and the X-ray energy spectrum obtained from the spherical shape shows that the content of selenium is 98%. The next structure has a selenium content of 44%, and other components include copper, indium and gallium.

对比例2Comparative example 2

按照实施例2电化学沉积制备铜铟镓硒预制层的方法。其中和实施例2不一样的是所述电化学沉积为恒电压,恒电压的电压及相应的电流密度变化见图8,恒电压沉积的电压见表1,其余条件同实施例2。According to the method for preparing the copper indium gallium selenide prefabricated layer by electrochemical deposition in Example 2. The difference from Example 2 is that the electrochemical deposition is a constant voltage, the voltage of the constant voltage and the corresponding current density change are shown in Figure 8, the voltage of the constant voltage deposition is shown in Table 1, and the rest of the conditions are the same as in Example 2.

按照本对比例制备得到的CIGS预制层表面形态进行电子显微镜扫描,如图9所示,CIGS表面充满了很多球状结构,从球状上获得的X射线能谱显示了硒的含量为86%,球状旁边的结构硒的含量为38%,其它成分包括铜、铟及镓。The surface morphology of the CIGS prefabricated layer prepared according to this comparative example is scanned by an electron microscope. As shown in Figure 9, the CIGS surface is full of many spherical structures, and the X-ray energy spectrum obtained from the spherical shape shows that the content of selenium is 86%. The next structure has a selenium content of 38%, and other components include copper, indium and gallium.

表1实施例和对比例所使用的脉冲波Table 1 embodiment and the pulse wave used by comparative examples

表2电化学沉积液中铜、铟、镓、硒的含量及来源Table 2 The content and source of copper, indium, gallium and selenium in the electrochemical deposition solution

Figure BDA00002287351900121
Figure BDA00002287351900121

Claims (12)

1.一种电化学沉积制备铜铟镓硒预制层的方法,包括在电沉积溶液中,采用电流控制脉冲或者电压控制脉冲在阴极衬底上电沉积得到铜铟镓硒预制层,其特征在于:所述电流控制脉冲或者电压控制脉冲包括电流及电压在沉积表面都达到负值的正向脉冲时期和电流及电压在沉积表面都达到正值的反向脉冲时期。 1. A method for preparing a copper indium gallium selenide prefabricated layer by electrochemical deposition, comprising, in an electrodeposition solution, adopting a current control pulse or a voltage control pulse to obtain a copper indium gallium selenide prefabricated layer by electrodepositing on a cathode substrate, characterized in that : The current control pulse or the voltage control pulse includes a forward pulse period in which the current and voltage both reach negative values on the deposition surface and a reverse pulse period in which the current and voltage both reach positive values on the deposition surface. 2.根据权利要求1所述的电化学沉积制备铜铟镓硒预制层的方法,其特征在于:所述电沉积溶液为离子液体体系。 2. The method for preparing a copper indium gallium selenide prefabricated layer by electrochemical deposition according to claim 1, characterized in that: the electrodeposition solution is an ionic liquid system. 3.根据权利要求1所述的电化学沉积制备铜铟镓硒预制层的方法,其特征在于,所述电流控制脉冲的脉冲条件为:正向脉冲时期的工作时间为3毫秒~1秒,电流密度-0.05ASD~-5ASD;反向脉冲时期的工作时间为1毫秒~0.5秒,电流密度为0.1ASD~20ASD。 3. The method for preparing a copper indium gallium selenide prefabricated layer by electrochemical deposition according to claim 1, wherein the pulse condition of the current control pulse is: the working time of the forward pulse period is 3 milliseconds to 1 second, The current density is -0.05ASD~-5ASD; the working time in the reverse pulse period is 1 millisecond to 0.5 seconds, and the current density is 0.1ASD~20ASD. 4.根据权利要求1所述的电化学沉积制备铜铟镓硒预制层的方法,其特征在于,所述电压控制脉冲的脉冲条件为:正向脉冲时期的工作时间为3毫秒~1秒,电压-0.5V~-8.0V;反向脉冲时期的工作时间为1毫秒~0.5秒,电压0.1V~5.0V。 4. The method for preparing a copper indium gallium selenide prefabricated layer by electrochemical deposition according to claim 1, wherein the pulse condition of the voltage control pulse is: the working time of the forward pulse period is 3 milliseconds to 1 second, The voltage is -0.5V~-8.0V; the working time in the reverse pulse period is 1 millisecond to 0.5 seconds, and the voltage is 0.1V~5.0V. 5.根据权利要求1所述的电化学沉积制备铜铟镓硒预制层的方法,其特征在于,所述电沉积溶液中铜、铟、镓、硒离子的浓度分别为0.1mM-50mM、0.1mM-60mM、0.1mM-80mM、0.1mM-50mM。 5. The method for preparing a copper indium gallium selenide prefabricated layer by electrochemical deposition according to claim 1, wherein the concentrations of copper, indium, gallium, and selenium ions in the electrodeposition solution are respectively 0.1mM-50mM, 0.1mM mM-60mM, 0.1mM-80mM, 0.1mM-50mM. 6.根据权利要求2所述的电化学沉积制备铜铟镓硒预制层的方法,其特征在于,所述离子液体体系的溶剂由氯化胆碱和尿素组成,氯化胆碱与尿素的重量比为1 : 0.5-5。 6. the method for preparing copper indium gallium selenide prefabricated layer by electrochemical deposition according to claim 2, is characterized in that, the solvent of described ionic liquid system is made up of choline chloride and urea, and the weight of choline chloride and urea The ratio is 1 : 0.5-5. 7.根据权利要求6所述的电化学沉积制备铜铟镓硒预制层的方法,其特征在于,氯化胆碱与尿素的重量比为1:2。 7. The method for preparing a copper indium gallium selenide prefabricated layer by electrochemical deposition according to claim 6, wherein the weight ratio of choline chloride to urea is 1:2. 8.根据权利要求5所述的电化学沉积制备铜铟镓硒预制层的方法,其特征在于,电沉积溶液中全部或部分铜离子是由阳极氧化后进入电沉积溶液。 8. The method for preparing a copper indium gallium selenide prefabricated layer by electrochemical deposition according to claim 5, wherein all or part of the copper ions in the electrodeposition solution enter the electrodeposition solution after being oxidized by the anode. 9.根据权利要求5所述的电化学沉积制备铜铟镓硒预制层的方法,其特征在于,电沉积溶液中全部或部分镓离子是由阳极氧化后进入电沉积溶液。 9. The method for preparing a copper indium gallium selenide prefabricated layer by electrochemical deposition according to claim 5, wherein all or part of the gallium ions in the electrodeposition solution enter the electrodeposition solution after being oxidized by the anode. 10.根据权利要求5所述的电化学沉积制备铜铟镓硒预制层的方法,其特征在于,电沉积溶液中全部或部分铟离子是由阳极氧化后进入电沉积溶液。 10. The method for preparing a copper indium gallium selenide prefabricated layer by electrochemical deposition according to claim 5, wherein all or part of the indium ions in the electrodeposition solution enter the electrodeposition solution after being oxidized by the anode. 11.根据权利要求5所述的电化学沉积制备铜铟镓硒预制层的方法,其特征在于,电沉积溶液中全部或部分硒离子是由阳极氧化后进入电沉积溶液。 11. The method for preparing a copper indium gallium selenide prefabricated layer by electrochemical deposition according to claim 5, wherein all or part of the selenium ions in the electrodeposition solution enter the electrodeposition solution after being oxidized by the anode. 12.根据权利要求1~11所述的任一电化学沉积方法制备的铜铟镓硒预制层,其特征在于:采用所述反向脉冲参与沉积预制层的厚度为整体预制层厚度的20%以上。 12. The copper indium gallium selenium prefabricated layer prepared by any electrochemical deposition method according to claims 1 to 11, characterized in that: the thickness of the prefabricated layer deposited by using the reverse pulse is 20% of the thickness of the overall prefabricated layer above.
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