CN103769995B - Lower grinding disc structure - Google Patents
Lower grinding disc structure Download PDFInfo
- Publication number
- CN103769995B CN103769995B CN201310752315.7A CN201310752315A CN103769995B CN 103769995 B CN103769995 B CN 103769995B CN 201310752315 A CN201310752315 A CN 201310752315A CN 103769995 B CN103769995 B CN 103769995B
- Authority
- CN
- China
- Prior art keywords
- grinding
- grinding disc
- pod apertures
- lower grinding
- lower wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/12—Lapping plates for working plane surfaces
- B24B37/16—Lapping plates for working plane surfaces characterised by the shape of the lapping plate surface, e.g. grooved
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
The invention discloses a lower grinding disc structure which comprises a lower grinding disc. A plurality of S type blades are evenly distributed on the upper surface of the lower grinding disc in the circumferential direction, a plurality of flow guide holes are formed in the edge of the lower grinding disc along the circumference, sealing pieces are arranged on hole openings of the flow guide holes, an annular check block is arranged on the outer side of the lower grinding disc, and a sealing component is arranged at the connecting position of the annular check block and the lower grinding disc. The S type blades of the lower grinding disc can improve grinding time, and can greatly improve grinding efficiency. Grinding sand liquid and finely-divided wafers are blocked by the surrounding annular check block when splashing, and the surrounding environment is prevented from being polluted. In the cleaning process, a brush is used for sweeping the grinding sand liquid and the finely-divided wafers into the flow guide holes, and convenience and simplicity are achieved.
Description
Technical field
The present invention relates to a kind of grind lower disc, belong to wafer grinding manufacture field.
Background technology
When crystal block is dispatched from the factory, its surface is all relatively rough, needs to be ground by grinder.Grinder for wafer grinding processing, in process, grinding upper disc and grinding lower wall are in grinding wafers, have grinding sand liquid and chip in small, broken bits splashes, cause the pollution of working environment, because lapping liquid belongs to chemicals, wafer debris are again excessively broken little it is difficult to cleaning causes the pollution of surrounding.And developing rapidly with chip industry, the technical requirements more and more higher to wafer grinding at present.
Content of the invention
The technical problem to be solved be for above drawback provide a kind of grind lower disc, while improving grinding precision, it is to avoid the phenomenon that grinding sand liquid and chip in small, broken bits splash in process of lapping, improve working effect, improve work efficiency.
For solving above-mentioned technical problem, the technical scheme is that
A kind of grinding lower disc, including grinding lower wall, wherein, described grinding lower wall upper surface has been uniformly distributed circumferentially a plurality of " s " type blade, and between described " s " type blade, angulation θ is 30 degree；Described grind lower plate edge and be circumferentially provided with multiple pod apertures, described pod apertures are inclined to set in disk under milling, and described pod apertures are 45 degree with grinding lower wall lower surface angulation δ, and in described pod apertures, aperture is provided with sealed piece；It is provided with collar stop outside described grinding lower wall, described collar stop is provided with containment member with grinding lower wall junction, described containment member is made up of with " z " type sealing ring two " n " type sealing rings, and in multi-sealing structure, three sealing interannular gaps constitute labyrinth seal.
A kind of grinding lower disc, wherein, the quantity of described " s " type blade is 12.
A kind of grinding lower disc, wherein, described two " n " type sealing ring is located at " z " type sealing ring upper and lower ends.
Method of work: during use, grinding lower wall is in turn clockwise grindings, is stopped by the collar stop of surrounding when grinding sand liquid and chip in small, broken bits splashing, falls under milling on disk.After grinding terminates, ground chip is taken out, the sealed piece in pod apertures is taken off, place refuse bin under pod apertures, using brush, grinding sand liquid and chip in small, broken bits are swept pod apertures.
Beneficial effect；
1, " s " the type blade structure grinding lower wall can accelerate milling time, greatly improves grinding efficiency.
2, stopped by the collar stop of surrounding when grinding sand liquid and chip in small, broken bits splashing, it is to avoid surrounding environment pollutes.
3, during cleaning, using brush, grinding sand liquid and chip in small, broken bits are swept pod apertures, convenient and simple.
Brief description
Fig. 1 is the front view of the present invention.
Fig. 2 is the top view of the present invention.
Fig. 3 is the pod apertures schematic diagram of the present invention.
Fig. 4 is the seal member schematic diagram of the present invention.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings.
Embodiment
As illustrated, a kind of grind lower disc, including grinding lower wall 1, wherein, described grinding lower wall 1 upper surface has been uniformly distributed circumferentially a plurality of " s " type blade 2, and 2 angulation θ of described " s " type blade are 30 degree；Described grinding lower wall 1 edge is circumferentially provided with multiple pod apertures 3, and described pod apertures 3 are inclined to set in disk under milling, and described pod apertures 3 are 45 degree with grinding lower wall 1 lower surface angulation δ, and in described pod apertures 1, aperture is provided with sealed piece 4；It is provided with collar stop 5 outside described grinding lower wall 1, described collar stop 5 is provided with containment member 6 with grinding lower wall 1 junction, described containment member 6 is made up of with " z " type sealing ring 62 two " n " type sealing rings 61, and in multi-sealing structure, three sealing interannular gaps constitute labyrinth seal.The quantity of described " s " type blade 2 is 12.Described two " n " type sealing ring 61 is located at " z " type sealing ring 62 upper and lower ends.Described pod apertures 3 quantity is 8.
Method of work: during use, grinding lower wall 1 is in turn clockwise grindings, is stopped by the collar stop 5 of surrounding when grinding sand liquid and chip in small, broken bits splashing, falls under milling on disk 1.After grinding terminates, ground chip is taken out, the sealed piece 4 in pod apertures 3 is taken off, in 3 times placement refuse bins of pod apertures, using brush, grinding sand liquid and chip in small, broken bits are swept pod apertures 3.
Beneficial effect；" s " the type blade structure grinding lower wall can accelerate milling time, greatly improves grinding efficiency.Grinding sand liquid and chip in small, broken bits are stopped by the collar stop of surrounding when splashing, it is to avoid surrounding environment pollutes.During cleaning, using brush, grinding sand liquid and chip in small, broken bits are swept pod apertures, convenient and simple.
The above; be only the present invention preferably specific embodiment, but protection scope of the present invention is not limited thereto, any those familiar with the art the invention discloses technical scope in; the change or replacement that can readily occur in, all should cover within the scope of the present invention.Therefore, protection scope of the present invention should be defined by the protection domain of claims.
Claims (1)
1. a kind of grind lower disc, include grinding lower wall it is characterised in that under described grinding
Disk upper surface has been uniformly distributed circumferentially a plurality of " s " type blade, institute between described " s " type blade
Angled θ is 30 degree；Under described grinding, plate edge is circumferentially provided with multiple pod apertures, institute
State pod apertures to be inclined to set in disk under milling, described pod apertures with grind lower wall lower surface institute
Angled δ is 45 degree, and in described pod apertures, aperture is provided with sealed piece；Outside described grinding lower wall
Side is provided with collar stop, and described collar stop is provided with containment member with grinding lower wall junction, institute
State containment member to be made up of with " z " type sealing ring two " n " type sealing rings, in multiple
Sealing structure, three sealing interannular gaps constitute labyrinth seal；The number of described " s " type blade
Measure as 12；Described two " n " type sealing ring is located at " z " type sealing ring upper and lower ends.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310752315.7A CN103769995B (en) | 2013-12-31 | 2013-12-31 | Lower grinding disc structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310752315.7A CN103769995B (en) | 2013-12-31 | 2013-12-31 | Lower grinding disc structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103769995A CN103769995A (en) | 2014-05-07 |
| CN103769995B true CN103769995B (en) | 2017-01-25 |
Family
ID=50563002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310752315.7A Expired - Fee Related CN103769995B (en) | 2013-12-31 | 2013-12-31 | Lower grinding disc structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103769995B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6299516B1 (en) * | 1999-09-28 | 2001-10-09 | Applied Materials, Inc. | Substrate polishing article |
| CN1712187A (en) * | 2004-06-16 | 2005-12-28 | Cmp罗姆和哈斯电子材料控股公司 | Polishing pad with grooved structure that promotes mixing wakes during polishing |
| CN2838473Y (en) * | 2005-09-29 | 2006-11-22 | 张明仕 | grinder for juicer |
| CN101125415A (en) * | 2006-08-14 | 2008-02-20 | 中芯国际集成电路制造(上海)有限公司 | Chemical and mechanical grinding equipment and anti-splash device used for chemical and mechanical grinding equipment |
| CN102107392A (en) * | 2010-12-24 | 2011-06-29 | 江苏大学 | Wafer grinding tray supporting device |
| CN102814831A (en) * | 2012-08-29 | 2012-12-12 | 中国石油大学(北京) | Stripping blade and stripping tool having same |
| CN203696719U (en) * | 2013-12-31 | 2014-07-09 | 镇江市港南电子有限公司 | Novel lower grinding disc structure |
-
2013
- 2013-12-31 CN CN201310752315.7A patent/CN103769995B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6299516B1 (en) * | 1999-09-28 | 2001-10-09 | Applied Materials, Inc. | Substrate polishing article |
| CN1712187A (en) * | 2004-06-16 | 2005-12-28 | Cmp罗姆和哈斯电子材料控股公司 | Polishing pad with grooved structure that promotes mixing wakes during polishing |
| CN2838473Y (en) * | 2005-09-29 | 2006-11-22 | 张明仕 | grinder for juicer |
| CN101125415A (en) * | 2006-08-14 | 2008-02-20 | 中芯国际集成电路制造(上海)有限公司 | Chemical and mechanical grinding equipment and anti-splash device used for chemical and mechanical grinding equipment |
| CN102107392A (en) * | 2010-12-24 | 2011-06-29 | 江苏大学 | Wafer grinding tray supporting device |
| CN102814831A (en) * | 2012-08-29 | 2012-12-12 | 中国石油大学(北京) | Stripping blade and stripping tool having same |
| CN203696719U (en) * | 2013-12-31 | 2014-07-09 | 镇江市港南电子有限公司 | Novel lower grinding disc structure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103769995A (en) | 2014-05-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| CB03 | Change of inventor or designer information |
Inventor after: Yu Jing Inventor before: Nie Jingen |
|
| COR | Change of bibliographic data | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20160918 Address after: 225300 Taizhou medicine high tech Zone, China medicine city, Oriental Town, room 14, No. 705, room Applicant after: Yu Jing Address before: 212132 Dongfang Road, Dagang mechanical and Electrical Industrial Park, Dagang District, Zhenjiang, Jiangsu Applicant before: Zhenjiang Gangnan Electric Co., Ltd. |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170804 Address after: 225700 science and technology center of Xinghua Economic Development Zone, Jiangsu, Taizhou Patentee after: Jiangsu Zhong Yuan new energy Co., Ltd. Address before: 225300 Taizhou medicine high tech Zone, China medicine city, Oriental Town, room 14, No. 705, room Patentee before: Yu Jing |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170125 Termination date: 20181231 |