CN103743336B - Based on diagonal angle incident light laser heterodyne interference measurement method and the device of right-angle prism - Google Patents
Based on diagonal angle incident light laser heterodyne interference measurement method and the device of right-angle prism Download PDFInfo
- Publication number
- CN103743336B CN103743336B CN201310745960.6A CN201310745960A CN103743336B CN 103743336 B CN103743336 B CN 103743336B CN 201310745960 A CN201310745960 A CN 201310745960A CN 103743336 B CN103743336 B CN 103743336B
- Authority
- CN
- China
- Prior art keywords
- prism
- incident
- beams
- angle prism
- polarizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000691 measurement method Methods 0.000 title description 3
- 238000005259 measurement Methods 0.000 claims abstract description 28
- 238000005305 interferometry Methods 0.000 claims abstract description 23
- 238000000034 method Methods 0.000 claims abstract description 18
- 230000003287 optical effect Effects 0.000 claims description 10
- 230000010287 polarization Effects 0.000 claims description 9
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 238000003754 machining Methods 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- MKXKFYHWDHIYRV-UHFFFAOYSA-N flutamide Chemical compound CC(C)C(=O)NC1=CC=C([N+]([O-])=O)C(C(F)(F)F)=C1 MKXKFYHWDHIYRV-UHFFFAOYSA-N 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
基于直角棱镜的对角入射光激光外差干涉测量方法与装置属于激光应用技术领域；发明方法采用了两束具有不同频率的空间分离平行光，两平行光束在非偏振分光棱镜上的入射点位于入射面的对角线上，并关于入射面的中心点对称，并采用直角棱镜作为参考棱镜和测量棱镜；该方法最终产生了两个具有相反多普勒频移的干涉测量信号来进行干涉测量；本发明方法及装置消除了干涉仪中的频率混叠现象，提高了外差干涉测量的测量精度，同时将外差干涉测量的分辨率提高了一倍。
The laser heterodyne interferometry method and device for diagonally incident light based on a rectangular prism belong to the field of laser application technology; the inventive method uses two beams of space-separated parallel light beams with different frequencies, and the incident points of the two parallel beam beams on the non-polarizing beam splitter prism are located at On the diagonal of the incident surface, and symmetrical about the center point of the incident surface, and using rectangular prisms as the reference prism and the measurement prism; this method finally produces two interferometric signals with opposite Doppler frequency shifts for interferometry The method and device of the present invention eliminate the frequency aliasing phenomenon in the interferometer, improve the measurement accuracy of heterodyne interferometry, and double the resolution of heterodyne interferometry at the same time.
Description
技术领域technical field
本发明属于激光应用技术领域，主要涉及一种基于直角棱镜的对角入射光激光外差干涉测量方法与装置。The invention belongs to the technical field of laser applications, and mainly relates to a laser heterodyne interferometry method and device for diagonally incident light based on a rectangular prism.
背景技术Background technique
激光外差干涉测量因其具有抗干扰能力强、测量范围大、信噪比高和易于实现高精度等特点而被广泛应用于超精密加工、光刻机以及三坐标测量机等领域。随着超精密工程的不断发展，对加工精度提出越来越高的要求；同时也对外差干涉测量的测量精度和分辨率都提出了新的挑战。Laser heterodyne interferometry is widely used in ultra-precision machining, lithography machines, and three-coordinate measuring machines because of its strong anti-interference ability, large measurement range, high signal-to-noise ratio, and easy realization of high precision. With the continuous development of ultra-precision engineering, higher and higher requirements are put forward for machining accuracy; at the same time, new challenges are raised for the measurement accuracy and resolution of heterodyne interferometry.
在激光外差干涉测量中，非线性误差严重限制了测量精度和分辨率的进一步提高，国内外学者对激光外差干涉非线性误差进行了大量的研究。非线性误差源于干涉光路中的光学混叠，传统的干涉测量系统无法避免干涉测量中的光学混叠，限制了其测量精度和分辨率的提高。In laser heterodyne interferometry, the nonlinear error severely limits the further improvement of measurement accuracy and resolution. Scholars at home and abroad have done a lot of research on the nonlinear error of laser heterodyne interferometry. The nonlinear error originates from the optical aliasing in the interferometric light path, and the traditional interferometry system cannot avoid the optical aliasing in the interferometry, which limits the improvement of its measurement accuracy and resolution.
T.L.Schmitz和J.F.Beckwith提出了一种干涉仪改造的方法(Ascousto-opticdisplacement-measureinginterferometer：anewheterodyneinterferometerwithAnstromlevelperiodicerror.JournalofModernOptics49，pages2105-2114)。相较于传统的测量方法，该方法将声光移频器作为分光镜，将测量光束和参考光束进行分离。该方法可以减小参考光和测量光的频率混叠，有利于减小测量的非线性误差，从而提高测量精度和分辨率。但是，该装置结构复杂且特殊，无法广泛应用于超精密加工与测量中。T.L.Schmitz and J.F.Beckwith proposed a method of interferometer transformation (Ascousto-optic displacement-measurement interferometer: a new whether odyne interferometer with Anstrom level periodic error. Journal of Modern Optics 49, pages 2105-2114). Compared with traditional measurement methods, this method uses an acousto-optic frequency shifter as a beam splitter to separate the measurement beam from the reference beam. The method can reduce the frequency aliasing of the reference light and the measurement light, and is beneficial to reduce the non-linear error of the measurement, thereby improving the measurement accuracy and resolution. However, the device has a complex and special structure, and cannot be widely used in ultra-precision machining and measurement.
Ki-NamJoo等研制了一种新型激光干涉测量结构(Simpleheterodynelaserinterferometerwithsubnanometerperiodicerrors.OpticsLetters/Vol.34，No.3/February1，2009)。该结构是参考光束与测量光束在空间上分离，消除了干涉测量中的频率混叠，完全消除非线性误差，从而提高测量精度以及测量分辨率。此外，该装置结构简单，成本低，相较于前一种测量方法，更有利于在超精密测量领域的应用。但是该方法光学结构不对称，易受环境温度的影响。Ki-NamJoo et al. developed a new laser interferometer structure (Simpleheterodynelaserinterferometerwithsubnanometerperiodicerrors.OpticsLetters/Vol.34, No.3/February1, 2009). The structure separates the reference beam and the measurement beam in space, eliminates frequency aliasing in interferometry, and completely eliminates nonlinear errors, thereby improving measurement accuracy and measurement resolution. In addition, the device has a simple structure and low cost, and is more conducive to the application in the field of ultra-precision measurement compared with the previous measurement method. However, the optical structure of this method is asymmetric and is easily affected by the ambient temperature.
综上所述，现有激光外差干涉测量方法均无法满足超精密加工测量对干涉仪的高精度和分辨率的要求，严重限制了超精密加工测量领域的发展。To sum up, none of the existing laser heterodyne interferometry methods can meet the high precision and resolution requirements of the interferometer for ultra-precision machining measurement, which severely limits the development of ultra-precision machining measurement.
发明内容Contents of the invention
本发明的目的就是针对上述的不足，提出了一种基于直角棱镜的对角入射光激光外差干涉测量方法与装置，达到提高激光外差干涉的测量精度和测量分辨率的目的。The purpose of the present invention is to address the above-mentioned deficiencies, and propose a method and device for measuring diagonally incident light laser heterodyne interferometry based on a rectangular prism, so as to achieve the purpose of improving the measurement accuracy and measurement resolution of laser heterodyne interferometry.
本发明的目的通过以下技术方案实现：The object of the present invention is achieved through the following technical solutions:
基于直角棱镜的对角入射光激光外差干涉测量方法，该方法是：A laser heterodyne interferometry method for diagonal incident light based on a rectangular prism, the method is:
(1)频率分别为f1、f2且空间分离的两束平行光束入射到非偏振分光棱镜；(1) Two parallel light beams with frequencies f 1 and f 2 and separated in space are incident on a non-polarizing beam splitter;
(2)所述两束平行光入射到非偏振分光棱镜上的入射点位于入射面的对角位置；(2) The incident point of the two beams of parallel light incident on the non-polarizing beamsplitter prism is located at the diagonal position of the incident surface;
(3)频率为f1的光束被非偏振分光棱镜分为参考光束和测量光束两部分，同时频率为f2的光束也被非偏振分光棱镜分为参考光束和测量光束两部分；(3) The light beam with frequency f1 is divided into two parts, the reference beam and the measuring beam, by the non - polarizing beam splitter, and the light beam with frequency f2 is also divided into two parts, the reference beam and the measuring beam, by the non-polarizing beam splitting prism;
(4)频率分别为f1、f2的两束参考光束入射到参考直角棱镜，并被反射回非偏振分光棱镜；同时频率分别为f1、f2的两束测量光束入射到目标端直角棱镜，并被反射回非偏振分光棱镜；(4) Two reference beams with frequencies f 1 and f 2 are incident on the reference rectangular prism and are reflected back to the non-polarizing beam splitter; at the same time two measuring beams with frequencies f 1 and f 2 are incident on the target end at right angles prism, and is reflected back to the non-polarizing beamsplitter prism;
(5)调节参考直角棱镜和目标端直角棱镜，使频率为f1的参考光束与频率为f2的测量光束重合并产生干涉信号Im1；使频率为f2的参考光束与频率为f1的测量光束重合并产生干涉信号Im2；根据两干涉信号Im1、Im2计算出目标端直角棱镜的位移量。(5) Adjust the reference right - angle prism and the target end right - angle prism so that the reference beam whose frequency is f1 coincides with the measuring beam whose frequency is f2 to generate an interference signal Im1 ; The measurement beams overlap and generate interference signal I m2 ; calculate the displacement of the right-angle prism at the target end according to the two interference signals I m1 and I m2 .
基于直角棱镜的对角入射光激光外差干涉测量装置，包括非偏振分光棱镜、参考直角棱镜、光电探测器A、光电探测器B，所述参考直角棱镜位于非偏振分光棱镜反射光输出端；两束平行光入射到非偏振分光棱镜上的入射点位于入射面的对角位置，非偏振分光棱镜输出两路干涉测量光束，在其中一路干涉测量光束光路上配置光电探测器A，在另一路干涉测量光束光路上配置光电探测器B；该装置还包括目标端直角棱镜，所述目标端直角棱镜位于非偏振分光棱镜的透射光输出端。A laser heterodyne interferometry device for diagonal incident light based on a rectangular prism, comprising a non-polarizing beamsplitter, a reference rectangular prism, a photodetector A, and a photodetector B, and the reference rectangular prism is located at the output end of the reflected light of the nonpolarizing beamsplitter; The incident points of the two beams of parallel light incident on the non-polarizing beamsplitter prism are located at the diagonal positions of the incident surface, and the non-polarizing beamsplitting prism outputs two interferometric beams, and a photodetector A is arranged on one of the interferometric beam optical paths, and a photodetector A is placed on the other A photodetector B is arranged on the optical path of the interferometric beam; the device also includes a right-angle prism at the target end, and the right-angle prism at the target end is located at the transmitted light output end of the non-polarizing beam splitter prism.
本发明具有以下特点及有益效果：The present invention has following characteristics and beneficial effect:
(1)本发明中，参考光束与测量光束在空间上是分离的，在到达探测器之前没出现过重叠，消除了干涉仪的非线性误差产生的根源。(1) In the present invention, the reference beam and the measurement beam are separated in space, and there is no overlap before reaching the detector, which eliminates the root cause of the non-linear error of the interferometer.
(2)传统干涉仪中采用偏振分光棱镜进行光束分离，干涉镜组调节难度及加工成本高；本发明中改用普通非偏振分光棱镜代替偏振分光棱镜，因其对激光光源的偏振态变化不敏感，从而大大降低了干涉镜组的调节难度，同时，使用非偏振分光棱镜能够降低干涉仪成本。(2) In traditional interferometers, polarization beamsplitter prisms are used to separate beams, and the adjustment of the interference mirror group is difficult and the processing cost is high; in the present invention, ordinary non-polarization beamsplitters are used instead of polarization beamsplitters, because the polarization state of the laser light source does not change. Sensitive, which greatly reduces the difficulty of adjusting the interferometer group, and at the same time, the use of non-polarizing beam splitters can reduce the cost of the interferometer.
(3)本发明中，干涉仪产生的两个测量信号具有大小相同、符号相反的多普勒频移，通过对两测量信号进行差值处理可将干涉仪的分辨率提高一倍。(3) In the present invention, the two measurement signals generated by the interferometer have Doppler frequency shifts with the same magnitude and opposite signs, and the resolution of the interferometer can be doubled by performing difference processing on the two measurement signals.
(4)本发明中，激光干涉仪的结构在参考光路和测量光路上完全对称，消除环境温度变化引入的温度漂移，提高了激光干涉仪的测量精度。(4) In the present invention, the structure of the laser interferometer is completely symmetrical on the reference optical path and the measurement optical path, which eliminates the temperature drift caused by ambient temperature changes and improves the measurement accuracy of the laser interferometer.
附图说明Description of drawings
图1是基于直角棱镜的对角入射光激光外差干涉测量装置的结构立体示意图Figure 1 is a three-dimensional schematic diagram of the structure of a laser heterodyne interferometry device with diagonally incident light based on a right-angle prism
图2是基于直角棱镜的对角入射光激光外差干涉测量装置结构示意图Figure 2 is a schematic diagram of the structure of a laser heterodyne interferometry device with diagonally incident light based on a rectangular prism
图3是图2的左视图Figure 3 is the left side view of Figure 2
图中件号说明：1非偏振分光棱镜、2参考直角棱镜、3目标端直角棱镜、4光电探测器A、5光电探测器B、6频率为f1的入射光束、7频率为f2的入射光束。Part number description in the figure: 1 non-polarizing beam splitter, 2 reference right-angle prism, 3 target end right-angle prism, 4 photodetector A, 5 photodetector B, 6 incident beam with frequency f1, 7 frequency f2 incident beam.
具体实施方式detailed description
以下结合附图对本发明实例进行详细的描述。The examples of the present invention will be described in detail below in conjunction with the accompanying drawings.
一种基于直角棱镜的对角入射光激光外差干涉测量装置，该装置包括非偏振分光棱镜1、参考直角棱镜2、光电探测器A4、光电探测器B5，所述参考直角棱镜2位于非偏振分光棱镜1反射光输出端；两束平行光入射到非偏振分光棱镜1上的入射点位于入射面的对角位置，非偏振分光棱镜1输出两路干涉测量光束，在其中一路干涉测量光束光路上配置光电探测器A4，在另一路干涉测量光束光路上配置光电探测器B5；该装置还包括目标端直角棱镜3，所述目标端直角棱镜3位于非偏振分光棱镜1的透射光输出端。A kind of diagonal incident light laser heterodyne interferometry device based on right-angle prism, this device comprises non-polarization beam-splitting prism 1, reference right-angle prism 2, photodetector A4, photodetector B5, and described reference right-angle prism 2 is positioned at non-polarization Reflected light output end of beam splitting prism 1; the incident point of two beams of parallel light incident on non-polarizing beam splitting prism 1 is located at the diagonal position of the incident surface, non-polarizing beam splitting prism 1 outputs two interferometric beams, one of which is interferometric beam light A photodetector A4 is arranged on the road, and a photodetector B5 is arranged on another interferometric beam optical path; the device also includes a right-angle prism 3 at the target end, and the right-angle prism 3 at the target end is located at the transmitted light output end of the non-polarizing beam splitter prism 1 .
一种基于直角棱镜的对角入射光激光外差干涉测量方法，该方法是：A laser heterodyne interferometry method for diagonally incident light based on a rectangular prism, the method is:
(1)频率分别为f1、f2且空间分离的两束平行光束入射到非偏振分光棱镜；(1) Two parallel light beams with frequencies f 1 and f 2 and separated in space are incident on a non-polarizing beam splitter;
(2)所述两束平行光入射到非偏振分光棱镜上的入射点位于入射面的对角位置，如图3所示；(2) The incident point of the two beams of parallel light incident on the non-polarizing beam splitter prism is located at the diagonal position of the incident surface, as shown in Figure 3;
(3)频率为f1的光束被非偏振分光棱镜分为参考光束和测量光束两部分，同时频率为f2的光束也被非偏振分光棱镜分为参考光束和测量光束两部分；(3) The light beam with frequency f1 is divided into two parts, the reference beam and the measuring beam, by the non - polarizing beam splitter, and the light beam with frequency f2 is also divided into two parts, the reference beam and the measuring beam, by the non-polarizing beam splitting prism;
(4)频率分别为f1、f2的两束参考光束入射到参考直角棱镜，并被反射回非偏振分光棱镜；同时频率分别为f1、f2的两束测量光束入射到目标端直角棱镜，并被反射回非偏振分光棱镜；(4) Two reference beams with frequencies f 1 and f 2 are incident on the reference rectangular prism and are reflected back to the non-polarizing beam splitter; at the same time two measuring beams with frequencies f 1 and f 2 are incident on the target end at right angles prism, and is reflected back to the non-polarizing beamsplitter prism;
(5)调节参考直角棱镜和目标端直角棱镜，使频率为f1的参考光束与频率为f2的测量光束重合并产生干涉信号Im1；使频率为f2的参考光束与频率为f1的测量光束重合并产生干涉信号Im2；根据两干涉信号Im1、Im2计算出目标端直角棱镜的位移量。(5) Adjust the reference right - angle prism and the target end right - angle prism so that the reference beam whose frequency is f1 coincides with the measuring beam whose frequency is f2 to generate an interference signal Im1 ; The measurement beams overlap and generate interference signal I m2 ; calculate the displacement of the right-angle prism at the target end according to the two interference signals I m1 and I m2 .
Claims (2)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310745960.6A CN103743336B (en) | 2013-12-23 | 2013-12-23 | Based on diagonal angle incident light laser heterodyne interference measurement method and the device of right-angle prism |
| PCT/CN2014/072819 WO2015096279A1 (en) | 2013-12-23 | 2014-03-03 | High resolution heterodyne interferometric method and system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310745960.6A CN103743336B (en) | 2013-12-23 | 2013-12-23 | Based on diagonal angle incident light laser heterodyne interference measurement method and the device of right-angle prism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103743336A CN103743336A (en) | 2014-04-23 |
| CN103743336B true CN103743336B (en) | 2016-04-06 |
Family
ID=50500380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310745960.6A Active CN103743336B (en) | 2013-12-23 | 2013-12-23 | Based on diagonal angle incident light laser heterodyne interference measurement method and the device of right-angle prism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103743336B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104316158A (en) * | 2014-10-21 | 2015-01-28 | 四川大学 | Heterodyne interferometer vibration measurer based on laser doppler effect |
| CN104697443B (en) * | 2015-03-30 | 2017-07-28 | 北方民族大学 | A kind of stepped corner reflector laser interferometer of motion compensation formula cascade and measuring method |
| CN106352985B (en) * | 2016-09-30 | 2018-05-15 | 中国科学院光电技术研究所 | Asymmetric spatial heterodyne spectrometer structure |
| CN108592800B (en) | 2018-05-02 | 2019-08-20 | 中国计量科学研究院 | A laser heterodyne interferometry device and method based on plane mirror reflection |
| CN111061064B (en) * | 2019-12-30 | 2020-12-15 | 浙江大学 | A double-beam optical trap beam-assisted alignment device and method |
| CN111442715B (en) * | 2020-03-02 | 2021-09-07 | 哈尔滨工业大学 | Heterodyne Laser Interferometer Based on Integrated Secondary Spectroscopic Component |
| CN117553676B (en) * | 2023-11-17 | 2024-05-14 | 哈尔滨工业大学 | Heterodyne interferometer and measurement method based on multi-target opposite displacement measurement |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5793487A (en) * | 1994-08-02 | 1998-08-11 | Canon Kabushiki Kaisha | Optical interference system for performing interference measurement using wavelength |
| CN101067546A (en) * | 2006-06-20 | 2007-11-07 | 哈尔滨工业大学 | Method and device for reducing the first harmonic component of heterodyne interference nonlinear error |
| WO2010030179A1 (en) * | 2008-09-11 | 2010-03-18 | Technische Universiteit Delft | Laser interferometer |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0793079B1 (en) * | 1996-02-29 | 2003-06-11 | The Boeing Company | Fiber coupled interferometric displacement sensor |
| CN101650166B (en) * | 2008-08-15 | 2012-04-11 | 上海理工大学 | Laser interference system used for measuring micro roll angle |
| CN101598530A (en) * | 2009-06-17 | 2009-12-09 | 上海微电子装备有限公司 | A kind of dual-frequency laser interferometer |
-
2013
- 2013-12-23 CN CN201310745960.6A patent/CN103743336B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5793487A (en) * | 1994-08-02 | 1998-08-11 | Canon Kabushiki Kaisha | Optical interference system for performing interference measurement using wavelength |
| CN101067546A (en) * | 2006-06-20 | 2007-11-07 | 哈尔滨工业大学 | Method and device for reducing the first harmonic component of heterodyne interference nonlinear error |
| WO2010030179A1 (en) * | 2008-09-11 | 2010-03-18 | Technische Universiteit Delft | Laser interferometer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103743336A (en) | 2014-04-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103743336B (en) | Based on diagonal angle incident light laser heterodyne interference measurement method and the device of right-angle prism | |
| CN102853771B (en) | Miniaturized high-speed ultra-precise laser difference interference measuring method and device | |
| CN104034257B (en) | Synchronous phase shift interference measurement device and method of Fizeau quasi-common optical path structure | |
| CN102853770B (en) | Based on laser heterodyne interference measurement method and the device of little frequency difference and beam separation | |
| CN104897270B (en) | Michelson heterodyne laser vialog based on monophone light modulation and polarization spectro | |
| CN101893429B (en) | Super-precision surface measuring system based on polarization phase-shifting microscopy interference technology | |
| CN102853769B (en) | High-speed and high-resolution laser heterodyne interferometry method and high-speed and high-resolution laser heterodyne interferometry device | |
| CN103673891B (en) | A kind of grating difference interference self-collimation measurement device | |
| CN102954842B (en) | Common optical path interference detecting device based on synchronous carrier phase shift and a detecting method of common optical path interference detecting device | |
| CN105785386B (en) | High-precision FM-CW laser ranging system based on F P etalons | |
| CN110319769B (en) | Anti-vibration Fizeau interferometry device and method | |
| CN111442715B (en) | Heterodyne Laser Interferometer Based on Integrated Secondary Spectroscopic Component | |
| CN101324421A (en) | Synchronous Phase Shifting Fizeau Interferometer | |
| CN202350735U (en) | Interference measurement device | |
| CN104913838B (en) | Homodyne Laser Vibrometer with Single-channel Circular Polarization Interferometry and Single Wollaste Prism Spectroscopy | |
| CN104897271B (en) | Homodyne Laser Vibrometer with Single Line Polarization Interferometry and Single Wollaste Prism Spectroscopy | |
| CN104296678B (en) | Heterodyne interferometer based on phase shift of low-frequency-difference acousto-optic frequency shifter | |
| CN104330021B (en) | Optical flat self-calibration interference with common path instrument based on acousto-optic heterodyne phase shift | |
| CN102878938A (en) | Optical reading head based on diffraction grating | |
| CN104931125A (en) | Anti-polarization-mixing double-line polarization interference and single Wollaston prism beam splitting homodyne laser vibrometer | |
| CN102889853A (en) | Spectral synchronous phase-shift common-path interference microscopic-detection device and detection method | |
| CN102914256A (en) | Synchronous phase shifting interference detection device based on orthogonal double grating and detection method | |
| CN102865820B (en) | Light path compensation based laser heterodyne interference measurement method and light path compensation based laser heterodyne interference measurement device | |
| CN102954757A (en) | Microscopic interference detecting device based on synchronous carrier phase shift and detecting method of microscopic interference detecting device | |
| CN104457559B (en) | Synchronous phase shift point diffraction interference detection method based on reflecting grating |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |