Summary of the invention
The object of the invention is to overcome the shortcoming that ITO electrode cannot be applied to flexible substrate, provide a kind of based on MoO
3the preparation method of the organic solar batteries of/Ag anode can also effectively be applicable to volume to volume large-scale production process when greatly reducing battery cost.
Realize the object of the invention key problem in technology as follows:
A kind of based on MoO
3the organic solar batteries of/Ag anode, comprises that thickness is the glass substrate of 1mm from bottom to top, the MoO that thickness is 2-10nm successively
3intermediate layer and thickness are the Ag layer of 7-13nm, the MoO that thickness is 10nm
3hole transmission layer, the effective layer of the P3HT that thickness is 80-100nm: PCBM, the Al cathode layer that thickness is 100nm; The pliability of Ag itself and high conductivity have guaranteed this MoO
3/ Ag anode can substitute the preparation that ITO is applicable to the organic solar batteries based on flexible substrate; MoO
3the introducing in intermediate layer can effectively reduce required Ag layer thickness, further reduces cost.
A kind of based on MoO
3the preparation method of the organic solar batteries of/Ag anode, comprises the steps:
(1) glass substrate is cleaned;
(2) sample is put into the metallic room of integrated multi-source multicell coating system, with the mode MoO that evaporation thickness is 2-10nm in described glass substrate of thermal evaporation
3intermediate layer, the vacuum degree of metallic room is 5 * 10
-4pa;
(3) use the mode of thermal evaporation at described MoO
3the Ag layer that on intermediate layer, evaporation thickness is 7-13nm, the vacuum degree of metallic room is 5 * 10
-4pa;
(4) with the mode MoO that evaporation thickness is 10nm on described Ag layer of thermal evaporation
3hole transmission layer, the vacuum degree of metallic room is 5 * 10
-4pa;
(5) derivative (PCBM) of the polymer of 3-hexyl thiophene (P3HT) and fullerene is dissolved in respectively and in 1,2-chlorobenzene, forms the solution that concentration is 18mg/ml, then within 1: 0.8 by volume, be configured to mixed liquor;
(6) sample is moved on the whirl coating platform in glove box, by the above-mentioned P3HT of whirl coating spin coating: the mode of PCBM mixed liquor is at described MoO
3on hole transmission layer, obtain the effective layer of the P3HT that thickness is 80-100nm: PCBM, the rotating speed of whirl coating platform is 1200rpms, and the time is 60s;
(7) sample is retracted from glove box in the metallic room of integrated multi-source multicell coating system, the mode of deposited by electron beam evaporation is at described P3HT: the PCBM Al cathode layer that effectively the upper evaporation thickness of layer is 100nm, and the vacuum degree of metallic room is 5 * 10
-4pa;
(8) sample is moved to glove box (nitrogen atmosphere) from metallic room, carry out annealing operation.Annealing temperature is 140-150 ℃, and the time is 10-15min.
Tool of the present invention has the following advantages:
1. due to MoO
3all adopt thermal evaporation technique with the preparation of Ag layer, integrated artistic temperature is not high, so on being deposited to flexible substrate time, can not produce damage to substrate.
2. due to pliability and the high conductivity of Ag itself, make this MoO
3/ Ag anode has good conductivity and can be applicable to flexible substrate.
3. due to MoO
3the introducing in intermediate layer, greatly reduces required Ag layer thickness, has further reduced the cost of electrode.
Embodiment
Embodiment 1:
As shown in Figure 1, a kind of based on MoO
3the organic solar batteries of/Ag anode, it is that thickness is the glass substrate of 1mm from bottom to top successively, the MoO that thickness is 2nm
3intermediate layer and thickness are the Ag layer (being the anode of battery) of 9nm, the MoO that thickness is 10nm
3hole transmission layer, the effective layer of the P3HT that thickness is 80nm: PCBM, the Al cathode layer that thickness is 100nm.
As shown in Figure 2, performing step of the present invention is as follows:
Step 1, cleans substrate.
Glass is put into detergent, deionized water, acetone and ethanol successively and carry out ultrasonic cleaning, each ultrasonic 15min.
Step 2, prepares the MoO that thickness is 2nm
3intermediate layer.
Above-mentioned glass is dried up by nitrogen gun, put into the metallic room of integrated multi-source multicell coating system, with the mode MoO that evaporation thickness is 2nm in described glass substrate of thermal evaporation
3intermediate layer, the vacuum degree of metallic room is 5 * 10
-4pa.
Step 3, preparing thickness is the Ag layer of 9nm.
By the mode of thermal evaporation at described MoO
3the Ag layer that on intermediate layer, evaporation thickness is 9nm, the vacuum degree of metallic room is 5 * 10
-4pa.
Step 4, prepares the MoO that thickness is 10nm
3hole transmission layer.
The mode MoO that evaporation thickness is 10nm on described Ag layer with thermal evaporation
3hole transmission layer, the vacuum degree of metallic room is 5 * 10
-4pa
Step 5, configuration P3HT: PCBM mixed liquor.
P3HT and PCBM are dissolved in respectively and in 1,2-chlorobenzene, form the solution that concentration is 18mg/ml, then within 1: 0.8 by volume, be configured to mixed liquor.
Step 6, prepares the effective layer of the P3HT that thickness is 80nm: PCBM.
Sample is moved on the whirl coating platform in glove box, by the above-mentioned P3HT of whirl coating spin coating: the mode of PCBM mixed liquor is at described MoO
3on hole transmission layer, obtain the effective layer of the P3HT that thickness is 80nm: PCBM, the rotating speed of whirl coating platform is 1200rpms, and the time is 60s.
Step 7, preparing thickness is the Al cathode layer of 100nm.
Sample is moved to from glove box in the metallic room of integrated multi-source multicell coating system, the mode of deposited by electron beam evaporation is at described P3HT: the PCBM A1 cathode layer that effectively the upper evaporation thickness of layer is 100nm, and the vacuum degree of metallic room is 5 * 10
-4pa.
Step 8, carries out annealing in process to sample.
Sample is moved to glove box (nitrogen atmosphere) from metallic room, carry out annealing operation.Annealing temperature is 140 ℃, and the time is 10min.
Embodiment 2:
As shown in Figure 1, a kind of based on MoO
3the organic solar batteries of/Ag anode, it is that thickness is the glass substrate of 1mm from bottom to top successively, the MoO that thickness is 10nm
3intermediate layer and thickness are the Ag layer (being the anode of battery) of 9nm, the MoO that thickness is 10nm
3hole transmission layer, the effective layer of the P3HT that thickness is 100nm: PCBM, the Al cathode layer that thickness is 100nm.
As shown in Figure 2, performing step of the present invention is as follows:
Step 1, cleans substrate.
Glass is put into detergent, deionized water, acetone and ethanol successively and carry out ultrasonic cleaning, each ultrasonic 15min.
Step 2, prepares the MoO that thickness is 10nm
3intermediate layer.
Above-mentioned glass is dried up by nitrogen gun, put into the metallic room of integrated multi-source multicell coating system, with the mode MoO that evaporation thickness is 10nm in described glass substrate of thermal evaporation
3intermediate layer, the vacuum degree of metallic room is 5 * 10
-4pa.
Step 3, preparing thickness is the Ag layer of 9nm.
By the mode of thermal evaporation at described MoO
3the Ag layer that on intermediate layer, evaporation thickness is 9nm, the vacuum degree of metallic room is 5 * 10
-4pa.
Step 4, prepares the MoO that thickness is 10nm
3hole transmission layer.
The mode MoO that evaporation thickness is 10nm on described Ag layer with thermal evaporation
3hole transmission layer, the vacuum degree of metallic room is 5 * 10
-4pa
Step 5, configuration P3HT: PCBM mixed liquor.
P3HT and PCBM are dissolved in respectively and in 1,2-chlorobenzene, form the solution that concentration is 18mg/ml, then within 1: 0.8 by volume, be configured to mixed liquor.
Step 6, prepares the effective layer of the P3HT that thickness is 100nm: PCBM.
Sample is moved on the whirl coating platform in glove box, by the above-mentioned P3HT of whirl coating spin coating: the mode of PCBM mixed liquor is at described MoO
3on hole transmission layer, obtain the effective layer of the P3HT that thickness is 100nm: PCBM, the rotating speed of whirl coating platform is 1200rpms, and the time is 60s.
Step 7, preparing thickness is the Al cathode layer of 100nT.
Sample is moved to from glove box in the metallic room of integrated multi-source multicell coating system, the mode of deposited by electron beam evaporation is at described P3HT: the PCBM Al cathode layer that effectively the upper evaporation thickness of layer is 100nm, and the vacuum degree of metallic room is 5 * 10
-4pa.
Step 8, carries out annealing in process to sample.
Sample is moved to glove box (nitrogen atmosphere) from metallic room, carry out annealing operation.Annealing temperature is 150 ℃, and the time is 15min.
Embodiment 3:
As shown in Figure 1, a kind of based on MoO
3the organic solar batteries of/Ag anode, it is that thickness is the glass substrate of 1mm from bottom to top successively, the MoO that thickness is 5nm
3intermediate layer and thickness are the Ag layer (being the anode of battery) of 11nm, the MoO that thickness is 10nm
3hole transmission layer, the effective layer of the P3HT that thickness is 80nm: PCBM, the Al cathode layer that thickness is 100nm.
As shown in Figure 2, performing step of the present invention is as follows:
Step 1, cleans substrate.
Glass is put into detergent, deionized water, acetone and ethanol successively and carry out ultrasonic cleaning, each ultrasonic 15min.
Step 2, prepares the MoO that thickness is 5nm
3intermediate layer.
Above-mentioned glass is dried up by nitrogen gun, put into the metallic room of integrated multi-source multicell coating system, with the mode MoO that evaporation thickness is 5nm in described glass substrate of thermal evaporation
3intermediate layer, the vacuum degree of metallic room is 5 * 10
-4pa.
Step 3, preparing thickness is the Ag layer of 11nm.
By the mode of thermal evaporation at described MoO
3the Ag layer that on intermediate layer, evaporation thickness is 11nm, the vacuum degree of metallic room is 5 * 10
-4pa.
Step 4, prepares the MoO that thickness is 10nm
3hole transmission layer.
The mode MoO that evaporation thickness is 10nm on described Ag layer with thermal evaporation
3hole transmission layer, the vacuum degree of metallic room is 5 * 10
-4pa
Step 5, configuration P3HT: PCBM mixed liquor.
P3HT and PCBM are dissolved in respectively and in 1,2-chlorobenzene, form the solution that concentration is 18mg/ml, then within 1: 0.8 by volume, be configured to mixed liquor.
Step 6, prepares the effective layer of the P3HT that thickness is 80nm: PCBM.
Sample is moved on the whirl coating platform in glove box, by the above-mentioned P3HT of whirl coating spin coating: the mode of PCBM mixed liquor is at described MoO
3on hole transmission layer, obtain the effective layer of the P3HT that thickness is 80nm: PCBM, the rotating speed of whirl coating platform is 1200rpms, and the time is 60s.
Step 7, preparing thickness is the Al cathode layer of 100nm.
Sample is moved to from glove box in the metallic room of integrated multi-source multicell coating system, the mode of deposited by electron beam evaporation is at described P3HT: the PCBM A1 cathode layer that effectively the upper evaporation thickness of layer is 100nm, and the vacuum degree of metallic room is 5 * 10
-4pa.
Step 8, carries out annealing in process to sample.
Sample is moved to glove box (nitrogen atmosphere) from metallic room, carry out annealing operation.Annealing temperature is 150 ℃, and the time is 10min.
For those skilled in the art; after understanding content of the present invention and principle; can be in the situation that not deviating from the principle and scope of the present invention; the method according to this invention is carried out various corrections and the change in form and details, but these are based on correction of the present invention with change still within claim protection range of the present invention.