CN103703410A - Pulse width expansion device - Google Patents
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- CN103703410A CN103703410A CN201280032194.2A CN201280032194A CN103703410A CN 103703410 A CN103703410 A CN 103703410A CN 201280032194 A CN201280032194 A CN 201280032194A CN 103703410 A CN103703410 A CN 103703410A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0136—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0057—Temporal shaping, e.g. pulse compression, frequency chirping
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Abstract
本发明公开了一种脉冲宽度扩展装置，其构成为具备：将入射的脉冲激光进行分光的偏振分光镜（1）；根据所施加的电压而将入射的脉冲激光进行偏振的电光元件（2a、2b）；通过向所述电光元件施加电压并对该电压进行控制，从而对入射到所述电光元件上的脉冲激光的偏振进行控制的偏振控制装置（3）；以及具有将通过了所述电光元件的脉冲激光反射并使其入射到所述偏振分光镜的多个反光镜（4a、4b、4c），并形成使脉冲激光再一次入射到所述电光元件的光路的光路形成装置（4），通过使由所述偏振分光镜分光的脉冲激光围绕所述光路旋转从而使相位错开，并将该相位错开的脉冲激光进行重合从而扩展其脉冲宽度。
The invention discloses a pulse width expansion device, which comprises: a polarization beam splitter (1) for splitting incident pulsed laser light; an electro-optic element (2a, 2a) for polarizing the incident pulsed laser light according to an applied voltage 2b); a polarization control device (3) for controlling the polarization of the pulsed laser light incident on the electro-optic element by applying a voltage to the electro-optic element and controlling the voltage; The pulsed laser light of the element reflects and makes it incident on multiple mirrors (4a, 4b, 4c) of the polarization beam splitter, and forms an optical path forming device (4) that makes the pulsed laser light incident on the optical path of the electro-optical element again The pulsed laser light split by the polarizing beam splitter is rotated around the optical path to shift the phases, and the pulse width of the pulsed laser light is extended by overlapping the phase shifted pulsed laser light.
Description
Technical field
The present invention relates to a kind of pulse width expanding unit of expanding the pulse width of pulse laser, particularly, relate to a kind of by utilizing polarized controller to control the voltage that applies of electrooptic cell, make to produce phase shifting between the pulse laser by polarization spectroscope light splitting, thereby can suppress the increase of number of components and can form to miniaturization pulse width expanding unit.
Background technology
As existing pulse width expanding unit, have and possess: by the pulse laser of incident be divided into two bundle of pulsed laser the first spectroscope, make by the delay photosystem of a pulse laser incident of this first spectroscope branch and will pass through a pulse laser of this delay photosystem and second spectroscopical structure (for example, with reference to patent documentation 1) that another pulse laser merges.
Above-mentioned pulse width expanding unit, that pulse laser and another pulse laser that inciding in the pulse laser by the first spectroscope branch is postponed to photosystem and extended optical path length merges by the second spectroscope, thereby the pulse laser of phase shifting is overlapped, to expand the structure of the pulse width of pulse laser.
In addition, as existing other pulse width expanding units, also have as shown in Figure 8, possess: the pulse laser coming from laser oscillator 10 incidents is reflected and form light path, and the structure of a plurality of part transmission reflective mirrors 22 of a plurality of total reflection reflectors 21 of configuration relatively and the light path intermediate configurations between each total reflection reflector 21 of configuration relatively.
Incide the pulse laser of above-mentioned pulse width expanding unit 20, at a plurality of part transmission reflective mirror 22 places, be divided into transmission and cross the pulse laser of part transmission reflective mirror 22 and the pulse laser being reflected.The light splitting of pulse laser as above, can produce in each of a plurality of part transmission reflective mirrors 22.As above by a plurality of pulse lasers of light splitting, different according to different its optical path lengths in the position of the part transmission reflective mirror 22 of generation light splitting, therefore, the phase place of these pulse lasers is also different.Thereby the pulse laser of exporting from pulse width expanding unit 20 as above, is the structure that the pulse laser of phase shifting coincides, the pulse width of pulse laser is expanded rear output.
For example, when to pulse width expanding unit 20 incidents as above during the pulse laser as shown in Fig. 9 (a), the pulse laser exported, as shown in Figure 9 (b), is to have added the structure that the different pulse laser of a plurality of phase places of time delay coincides.
Prior art document
Patent documentation
Patent documentation 1: Japanese kokai publication hei 1-142524 communique
But, in pulse width expanding unit 20 as shown in Figure 8, as shown in Figure 9 (b), quantity (quantity of the pulse laser being overlapped), the time delay (staggering of phase place) between these pulse lasers and the peak energy of each pulse laser of the pulse width of pulse laser, pulse laser that a plurality of phase place is different, capital is according to the distance between the total reflection reflector 21 of relatively configuration, and the number of configuration total reflection reflector 21 and part transmission reflective mirror 22 is different and change.Therefore,, in order to further expand the pulse width of pulse laser, exist and must increase the number of configuration total reflection reflector 21 and part transmission reflective mirror 22, thereby make the physical dimension of pulse width expanding unit 20 become large problem.
Summary of the invention
Therefore, for the problems referred to above, the pulse width expanding unit that problem to be solved by this invention is to provide a kind of increase that can suppress number of components and Miniaturizable and forms.
In order to solve above-mentioned problem, pulse width expanding unit of the present invention, possess following parts and form: polarization spectroscope, it is by reflecting the polarized light component vertical with respect to the plane of incidence in the polarized light component of pulse laser of incident, and parallel polarized light component is passed through, thereby pulse laser is carried out to light splitting; Electrooptic cell, it is according to applied voltage, and to having passed through described polarization spectroscope, the pulse laser of incident carries out polarization; Polarized controller, it is by applying voltage to described electrooptic cell and this voltage being controlled, thereby controls inciding the polarization of the pulse laser of described electrooptic cell; And, light path forms device, it possesses and the pulse laser that has passed through described electrooptic cell is reflected and make it incide a plurality of reflective mirrors of described polarization spectroscope, and form the light path that the pulse laser being reflected by polarization spectroscope in the pulse laser make to incide this polarization spectroscope incides described electrooptic cell again, thereby by making to make phase shifting by the pulse laser of described polarization spectroscope light splitting around described light path rotation, and the pulse laser of this phase shifting is overlapped, thereby expand its pulse width.
Invention effect
According to pulse width expanding unit of the present invention, by making to make phase shifting by the pulse laser of polarization spectroscope light splitting around formed the formed light path rotation of device by light path, output after again the pulse laser of this phase shifting being overlapped, thus the pulse width of pulse laser can be expanded.
Now, owing to being by polarized controller, the voltage that applies of electrooptic cell to be controlled and produced staggering of the phase place of the pulse laser overlapping, therefore without the pulse width for expansion pulse laser, increase number of components.Therefore, can form to miniaturization the physical dimension of pulse width expanding unit.
Accompanying drawing explanation
Fig. 1 means the schematic drawing of the embodiment of pulse width expanding unit of the present invention.
Fig. 2 means the block diagram of the control of laser oscillator and above-mentioned pulse width expanding unit.
Fig. 3 means the time diagram of the control signal of Fig. 2.
Fig. 4 means the curve map that time that voltage and pulse laser incide Pockers cell produces relation that applies of the Pockers cell to described pulse width expanding unit, (a) represents to represent to represent to the alive curve map of executing of the second Pockers cell, (c) to the alive curve map of executing of the first Pockers cell, (b) curve map of their total voltage.
Fig. 5 means the curve map of the total voltage applying to described Pockers cell.
Fig. 6 means when having applied the total voltage shown in Fig. 5 to described Pockers cell, from the curve map of the output pulse of described pulse width expanding unit, (a) represent the curve map of actual output pulse, the curve map that (b) represents the output pulse meter of (a) to be shown the pulse that phase place is different.
Fig. 7 means the schematic drawing of another embodiment of pulse width expanding unit of the present invention.
Fig. 8 means the schematic drawing of an example of existing pulse width expanding unit.
Fig. 9 means the curve map of the pulse shape of pulse laser, (a) means that curve map, (b) to the input pulse of described existing pulse width expanding unit represents the curve map from the output pulse of described existing pulse width expanding unit.
Symbol description
1, cubic type polarization spectroscope
1a, 1b, plate polarization spectroscope
2a, the first Pockers cell
2b, the second Pockers cell
3, polarized controller
3a, the first voltage applying circuit
3b, second voltage apply circuit
3c, pulse producer
4, light path forms device
4a, 4b, 4c, total reflection reflector
5, control panel
6, laser oscillator
The arrow of the working direction of A, indicating impulse laser
L, optical axis
T, time delay
θ, to the incident angle of plate polarization spectroscope
φ, to the incident angle of total reflection reflector
Embodiment
Below, based on accompanying drawing, embodiments of the present invention are described in detail.
Fig. 1 means the schematic diagram of the embodiment of pulse width expanding unit of the present invention.This pulse width expanding unit, by the pulse laser of incident being carried out to light splitting and making its phase shifting, thereby the device of the expansion pulse width that again pulse laser of this phase shifting overlapped, it forms device 4 by polarization spectroscope 1, the first Pockers cell 2a, the second Pockers cell 2b, polarized controller 3 and light path and forms.
Described polarization spectroscope 1, that the polarized light component vertical with respect to the plane of incidence in the polarized light component of the pulse laser of incident (hereinafter referred to as " s polarized light ") reflected, and the device that parallel polarized light component (hereinafter referred to as " p polarized light ") is passed through, it is arranged in the optical axis L of the pulse laser that incides pulse width expanding unit.As this polarization spectroscope 1, as shown in Figure 1, used two right-angle prisms bondingly, and at its binding face, implemented the polarization spectroscope 1 of cubic type of the coating of dielectric multilayer film and metallic film.
As shown in Figure 1, the pulse laser at polarization spectroscope 1 passes through, in the optical axis L of a side, to be provided with to arranged in series the first Pockers cell 2a and the second Pockers cell 2b.This first Pockers cell 2a and the second Pockers cell 2b make pulse laser produce the electrooptic cell of polarization according to applied voltage, from the left side of Fig. 1, according to the order of the first Pockers cell 2a, the second Pockers cell 2b, are configured.The first Pockers cell 2a and the second Pockers cell 2b can not make pulse laser produce polarization not executing under alive state, and when apply voltage, can make according to applied voltage pulse laser generation polarization.By apply the voltage of regulation to this first Pockers cell 2a and the second Pockers cell 2b, can make pulse laser produce for example polarization of 180 ° (π).
On this first Pockers cell 2a and the second Pockers cell 2b, be electrically connected with polarized controller 3.This polarized controller 3, to control by applying voltage and this is applied to voltage to the first Pockers cell 2a and the second Pockers cell 2b, thereby the device of controlling inciding the polarization of the pulse laser of the first Pockers cell 2a and the second Pockers cell 2b, as shown in Figure 1, by the first voltage applying circuit 3a, second voltage, apply circuit 3b and pulse producer 3c forms.
Described the first voltage applying circuit 3a executes alive element to the first Pockers cell 2a, is electrically connected to the first Pockers cell 2a.In addition, described second voltage applies circuit 3b and executes alive element to the second Pockers cell 2b, is electrically connected to the second Pockers cell 2b.
In addition, described pulse producer 3c, be to described the first voltage applying circuit 3a and second voltage, to apply that circuit 3b sends to each the first Pockers cell 2a and the second Pockers cell 2b starts or the device of the signal that end voltage applies, apply circuit 3b with the first voltage applying circuit 3a and second voltage and be electrically connected to.This pulse producer 3c can be respectively applies circuit 3b to the first voltage applying circuit 3a and second voltage individually and sends described signal, for example, can stagger the time and apply to the first voltage applying circuit 3a and second voltage the signal that circuit 3b transmission beginning voltage applies.
In addition, this pulse producer 3c, as shown in Figure 2, with the laser oscillator 6 that the pulse laser that incides pulse width expanding unit is exported and for controlling laser oscillator 6, from the control panel 5 of external input signal, be electrically connected to, can, according to the signal of inputting from control panel 5, make the oscillation action of laser oscillator 6 and execute alive time synchronized to the first Pockers cell 2a and the second Pockers cell 2b.
Pulse laser at described the second Pockers cell 2b passes through in the optical axis L of a side, is provided with light path and forms device 4.This light path forms device 4, to form the pulse laser that has passed through the second Pockers cell 2b is reflected and it is incided on described polarization spectroscope 1, then make to incide the device that the pulse laser that is polarized spectroscope 1 reflection in the pulse laser on this polarization spectroscope 1 incides the light path on described the first Pockers cell 2a again, as shown in Figure 1, by three total reflection reflector 4a, 4b, 4c and described polarization spectroscope 1, formed.
Described three total reflection reflector 4a, 4b, 4c, all make the incident angle φ of pulse laser be 45 ° of ground and be configured obliquely with respect to optical axis L, and be configured in to form and take the position of the rectangle light path that these three total reflection reflector 4a, 4b, 4c and described polarization spectroscope 1 be summit.; three total reflection reflector 4a, 4b, 4c are configured to form the rectangle light path that the optical path length from polarization spectroscope 1 to total reflection reflector 4a equates with the optical path length from total reflection reflector 4b to total reflection reflector 4c, the optical path length from total reflection reflector 4a to total reflection reflector 4b equates with optical path length from total reflection reflector 4c to polarization spectroscope 1.
But, light path forms device 4 and is not limited to the structure consisting of three total reflection reflector 4a, 4b, 4c and polarization spectroscope 1, so long as can form, the pulse laser that has passed through the second Pockers cell 2b is reflected and it is incided on described polarization spectroscope 1, making to incide the device that the pulse laser that is polarized spectroscope 1 reflection in the pulse laser on this polarization spectroscope 1 incides the light path on described the first Pockers cell 2a again, for example, can be also for forming polygonal light path, to possess the structure of a plurality of total reflection reflectors again.
Then, with reference to Fig. 1～Fig. 6, the use state of pulse width expanding unit is as constructed as above described.
When using pulse width expanding unit, first, the pulse laser that input is exported by pulse oscillator 6 from the control panel 5 shown in Fig. 2 to pulse producer 3c and the parameter of being expanded the pulse laser of output by pulse width expanding unit.The input of parameter can be carried out in advance, in addition, while not needing to input when pre-determined the value of regulation according to the performance of laser oscillator 6 etc., also can not carry out parameter input.
Then, the signal S of input for making laser oscillator 6 start laser generation from control panel 5 to pulse producer 3c
1.When having inputted signal S
1time, pulse producer 3c will the parameter based on inputting by control panel 5 export to laser oscillator 6 the signal S that starts laser generations
2, so that laser oscillator 6 carries out laser generation.
When having inputted signal S
2time, laser oscillator 6 will start laser generation, thus output has corresponding to described parameter and the pulse width of laser oscillator 6 self performance and the pulse laser of peak energy.
When having started the output of pulse laser from laser oscillator 6, as shown in Figure 1 and Figure 2, the pulse laser of exporting advances towards the direction of arrow A, and incide the polarization spectroscope 1 of pulse width expanding unit, the s polarized light of the polarized light component vertical with respect to the plane of incidence is reflected, only make the p polarized light of the polarized light component parallel with respect to the plane of incidence by this polarization spectroscope 1, and incide the first Pockers cell 2a and the second Pockers cell 2b.
In order to make the pulse laser that incides the first Pockers cell 2a and the second Pockers cell 2b produce polarization, pulse producer 3c is exporting signal S to laser oscillator 6
2afterwards, respectively to the first voltage applying circuit 3a output signal S
3, to second voltage, apply circuit 3b output signal S
4.Signal S
3be to the first voltage applying circuit 3a, send to the first Pockers cell 2a, start to execute alive signal, signal S
4be to second voltage, apply that circuit 3b sends to the second Pockers cell 2b, start to execute alive signal.When applying circuit 3b, the first voltage applying circuit 3a and second voltage inputted respectively signal S
3and signal S
4time, start to apply voltage to the first Pockers cell 2a and the second Pockers cell 2b.
Here, signal S
3with signal S
4, as shown in Figure 3, T and be imported into respectively the first voltage applying circuit 3a and second voltage applies circuit 3b time delay only staggers.This time delay, T, determined around formed the one week needed time of light path that device 4 forms by described light path according to the pulse laser that incides pulse width expanding unit.For example, form the formed light path of device 4 longer by described light path, time delay, T was just longer.
As shown in Figure 4 (a), the voltage that is applied to the first Pockers cell 2a is set to, the pulse laser that makes to incide pulse width expanding unit makes the pulse laser of incident produce the voltage of 180 ° of (π) polarizations while inciding for the first time the first Pockers cell 2a,, make the first Pockers cell 2a as the voltage (hereinafter referred to as " λ/2 voltage ") of λ/2 wavelength plate performance function, then with λ/2 voltage, keep constant.Or, also can before laser oscillator 6 input next pulse laser, temporarily stop applying voltage, and then again apply λ/2 voltage.
As shown in Figure 4 (b), by than signal S
3t time delay ground input signal S only staggers
4thereby, make to be applied to the voltage on the second Pockers cell 2b, than the voltage that is applied to the first Pockers cell 2a, only stagger T time delay and start to apply.
Therefore, the voltage being applied on the second Pockers cell 2b is set as, when inciding on the second Pockers cell 2b for the first time, the pulse laser that incides pulse width expanding unit do not apply, and at pulse laser further when being formed light path that device 4 forms by light path and incide for the second time on the second Pockers cell 2b after one week, it is made as the voltage from 0kV to the setting between the voltage of described λ/2, afterwards, applying voltage diminishes gradually.Then, when from laser oscillator 6 input next pulse laser, then carry out same Control of Voltage.
Now, to the first Pockers cell 2a and the second Pockers cell 2b, apply reverse voltage mutually respectively.Therefore, being applied to the total voltage of the first Pockers cell 2a and the second Pockers cell 2b, as shown in Figure 4 (c), is to deduct from being applied to the voltage of the first Pockers cell 2a the voltage that is applied to the voltage of the second Pockers cell 2b and obtains., described total voltage, when the pulse laser that incides pulse width expanding unit incides the first Pockers cell 2a and the second Pockers cell 2b for the first time, be λ/2 voltage, and at pulse laser further around being formed by light path while inciding for the second time the first Pockers cell 2a and the second Pockers cell 2b after the formed light path of device 4 rotates a circle, to deduct from λ/2 voltage the magnitude of voltage that is applied to the voltage from the setting between the voltage of 0kV to λ/2 of the second Pockers cell 2b and obtains, afterwards, follow the magnitude of voltage being applied on the second Pockers cell 2b to diminish, add up to voltage also to decline gradually, and move closer to λ/2 voltage.
As mentioned above, be applied to the voltage on the first Pockers cell 2a and the second Pockers cell 2b, along with pulse laser, to incide the first Pockers cell 2a and the second Pockers cell 2b upper and change, the polarization degree of the pulse laser of incident correspondingly, also along with laser incides the first Pockers cell 2a and the second Pockers cell 2b and changes.
From the pulse laser of pulse oscillator 6 outputs, passed through polarization spectroscope 1 and incided for the first time the pulse laser (p polarized light) of the first Pockers cell 2a and the second Pockers cell 2b, as shown in Figure 4, owing to being applied to the total voltage of the first Pockers cell 2a and the second Pockers cell 2b, be λ/2 voltage, therefore produce 180 ° of (π) polarizations.Now, most p polarized light is all polarized the polarized light into s, but according to the performance of Pockers cell, a part for p polarized light can not be polarized into s polarized light residual.That is, pulse laser, after having passed through the first Pockers cell 2a and the second Pockers cell 2b, becomes the state that p polarized light and s polarized light mix.
This pulse laser is after having passed through the second Pockers cell 2b, as shown in Figure 1, by three total reflection reflector 4a, 4b, 4c, reflected, and incide again polarization spectroscope 1 by formed the formed light path of device by light path, wherein p polarized light is exported by polarization spectroscope 1, and s polarized light incides the first Pockers cell 2a and the second Pockers cell 2b after being polarized spectroscope 1 reflection again.
Incide again the s polarized light of the first Pockers cell 2a and the second Pockers cell 2b, be applied to the total voltage on the first Pockers cell 2a and the second Pockers cell 2b when inciding for the second time the first Pockers cell 2a and the second Pockers cell 2b shown in Fig. 4, a part at least is wherein polarized into p polarized light.Therefore, pulse laser, after having passed through the first Pockers cell 2a and the second Pockers cell 2b, becomes the state that p polarized light and s polarized light mix.
This pulse laser, after having passed through the second Pockers cell 2b, carries out the process same with said process, as wherein a part of p polarized light, from polarization spectroscope 1, exports.Pulse laser carries out same process below, from polarization spectroscope 1 output.
At the optical path length to formed the light path that device 4 forms by light path, be 4m, and used Pockers cell that described λ/2 voltage is-6.4kV as this pulse width expanding unit of the first Pockers cell 2a and the second Pockers cell 2b, incident pulse energy is 100mJ, pulse width (FWHM: full width at half maximum) be the pulse laser of 20ns, and while carrying out control as shown in Figure 5 by the total voltage that 3 pairs of polarized controllers are applied to the first Pockers cell 2a and the second Pockers cell 2b, the pulse width of the pulse laser exported (full width at half maximum), be extended to as shown in Figure 6 (a) about 450ns.
This exports pulse, as shown in Figure 6 (b), a plurality of pulse lasers that are phase shifting overlap and the structure of formation, each pulse laser of phase shifting, in the situation that the optical path length that forms device 4 formed light paths by light path is 4m, phase place about 13ns that respectively staggers, it rotates the required time with pulse laser around described light path and equates.
Fig. 7 means the schematic drawing of another embodiment of pulse width expanding unit of the present invention.This embodiment, as described polarization spectroscope 1, is used glass system or plastic plate (plane) polarization spectroscope to substitute the polarization spectroscope 1 of above-mentioned cubic type.In this situation, as shown in Figure 7, by two plate polarization spectroscope 1a, be configured in the optical axis L of pulse laser, and preferred disposition becomes the incidence angle θ of each pulse laser to become to make the Brewster angle (polarization angle) that the reflectivity of p polarized light is 0 the mutual reversal dip of 1b.By the plate polarization reflective mirror of such configuration 1a, 1b, by pulse laser, incide plate polarization spectroscope 1a and produce refraction, can make the optical axis L staggering in the front and back of plate polarization spectroscope 1a turn back to original position at plate polarization spectroscope 1b place, thereby can prevent from occurring the problem staggering in the position of optical axis L when using plate polarization spectroscope.Therefore, can make the location of the component parts of pulse width expanding unit become easily, can easily carry out the maintenance of pulse width expanding unit.
As mentioned above, according to pulse width expanding unit of the present invention, because the phase shifting of the pulse laser overlapping can produce the alive control of executing of Pockers cell by polarized controller, therefore, without the pulse width for expansion pulse laser, increase number of components.Therefore, can form to miniaturization the physical dimension of pulse width expanding unit.In addition, because number of components is few, thereby the adjustment of the parts that carry out when making in use and safeguarding, the polarization spectroscope 1, the first Pockers cell 2a, the second Pockers cell 2b and total reflection reflector 4a, 4b, the position of 4c and the adjustment of angle that are especially configured in the light path of pulse laser become easy.
In addition, even in the situation that incide the wavelength of pulse laser of pulse width expanding unit and the specification of the laser oscillator 6 of oscillating impulse laser changes, just can be corresponding by polarization spectroscope 1 and the first Pockers cell 2a and the second Pockers cell 2b being transformed to the structure of suitable specification.
Further, by to being formed the optical path length of device 4 formed light paths by light path and producing polarization by the alive control of executing of 3 couples of the first Pockers cell 2a of polarized controller and the second Pockers cell 2b, thereby the pulse shape of exported pulse laser can be converted arbitrarily.
Claims (7)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011175826A JP5803027B2 (en) | 2011-08-11 | 2011-08-11 | Pulse width expansion device |
| JP2011-175826 | 2011-08-11 | ||
| PCT/JP2012/069738 WO2013021917A1 (en) | 2011-08-11 | 2012-08-02 | Pulse width expansion device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103703410A true CN103703410A (en) | 2014-04-02 |
| CN103703410B CN103703410B (en) | 2016-10-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280032194.2A Expired - Fee Related CN103703410B (en) | 2011-08-11 | 2012-08-02 | Pulse width expanding unit |
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|---|---|
| JP (1) | JP5803027B2 (en) |
| KR (1) | KR20140045419A (en) |
| CN (1) | CN103703410B (en) |
| TW (1) | TW201326961A (en) |
| WO (1) | WO2013021917A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108899744A (en) * | 2018-09-03 | 2018-11-27 | 吉林大学 | A kind of polarization type laser pulse stretching system |
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| JPS5691215A (en) * | 1979-12-26 | 1981-07-24 | Nec Corp | Light pulse gate circuit |
| JPH0297919A (en) * | 1988-10-05 | 1990-04-10 | Nippon Telegr & Teleph Corp <Ntt> | Light amplifier |
| JP2000292757A (en) * | 1999-04-05 | 2000-10-20 | Toshiba Corp | Device for expansion of width of light pulse |
| US6549267B1 (en) * | 1996-02-22 | 2003-04-15 | Nikon Corporation | Pulse-width extending optical systems, projection-exposure apparatus comprising same, and manufacturing methods using same |
| CN2890991Y (en) * | 2006-04-12 | 2007-04-18 | 中国科学院上海光学精密机械研究所 | Laser pulse stretching and compressing device |
| CN101840125A (en) * | 2010-04-21 | 2010-09-22 | 北京大学 | Negative dispersion pulse widening optical fiber amplifying device |
| WO2011064059A1 (en) * | 2009-11-25 | 2011-06-03 | Carl Zeiss Smt Gmbh | Optical arrangement for homogenizing a laser pulse |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH09288251A (en) * | 1996-02-22 | 1997-11-04 | Nikon Corp | Pulse width lengthening optical system and exposure device provided therewith |
| JP3715800B2 (en) * | 1998-10-02 | 2005-11-16 | 三菱電機株式会社 | Laser irradiation device |
-
2011
- 2011-08-11 JP JP2011175826A patent/JP5803027B2/en active Active
-
2012
- 2012-08-02 WO PCT/JP2012/069738 patent/WO2013021917A1/en active Application Filing
- 2012-08-02 CN CN201280032194.2A patent/CN103703410B/en not_active Expired - Fee Related
- 2012-08-02 KR KR1020137033605A patent/KR20140045419A/en not_active Withdrawn
- 2012-08-10 TW TW101128883A patent/TW201326961A/en unknown
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5691215A (en) * | 1979-12-26 | 1981-07-24 | Nec Corp | Light pulse gate circuit |
| JPH0297919A (en) * | 1988-10-05 | 1990-04-10 | Nippon Telegr & Teleph Corp <Ntt> | Light amplifier |
| US6549267B1 (en) * | 1996-02-22 | 2003-04-15 | Nikon Corporation | Pulse-width extending optical systems, projection-exposure apparatus comprising same, and manufacturing methods using same |
| JP2000292757A (en) * | 1999-04-05 | 2000-10-20 | Toshiba Corp | Device for expansion of width of light pulse |
| CN2890991Y (en) * | 2006-04-12 | 2007-04-18 | 中国科学院上海光学精密机械研究所 | Laser pulse stretching and compressing device |
| WO2011064059A1 (en) * | 2009-11-25 | 2011-06-03 | Carl Zeiss Smt Gmbh | Optical arrangement for homogenizing a laser pulse |
| CN101840125A (en) * | 2010-04-21 | 2010-09-22 | 北京大学 | Negative dispersion pulse widening optical fiber amplifying device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108899744A (en) * | 2018-09-03 | 2018-11-27 | 吉林大学 | A kind of polarization type laser pulse stretching system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5803027B2 (en) | 2015-11-04 |
| CN103703410B (en) | 2016-10-26 |
| WO2013021917A1 (en) | 2013-02-14 |
| TW201326961A (en) | 2013-07-01 |
| KR20140045419A (en) | 2014-04-16 |
| JP2013040980A (en) | 2013-02-28 |
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