CN103687265A - Method and device for removing static electricity and dust on surface of substrate - Google Patents
Method and device for removing static electricity and dust on surface of substrate Download PDFInfo
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- CN103687265A CN103687265A CN201310603229.XA CN201310603229A CN103687265A CN 103687265 A CN103687265 A CN 103687265A CN 201310603229 A CN201310603229 A CN 201310603229A CN 103687265 A CN103687265 A CN 103687265A
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Abstract
The invention provides a method and device for removing static electricity and dust on the surface of a substrate. The device comprises a sweeping dust collector, a static electricity remover and a visual inspection camera. The sweeping dust collector comprises a motor, a hairbrush and a vacuum suction sleeve. According to the sweeping dust collector, foreign matter and the dust on the surface of the substrate is brushed away through the hairbrush rotated and driven by the motor and the foreign matter and the dust are collected through the vacuum suction sleeve carried at the top end of the hairbrush. Charged ions are generated by the static electricity remover, ionic wind is generated through air pressure by the charged ions generated by the static electricity remover, and the charged ions are sprayed on the surface of the substrate, so that the static electricity on the substrate is neutralized. The visual inspection camera is used for taking photos of the foreign matter on the surface of the substrate and making comparisons, when the foreign matter exists on the surface of the substrate, a signal is sent to the sweeping dust collector, so that the sweeping dust collector is made to sweep the substrate again. According to the method and device for removing static electricity and dust on the surface of the substrate, the foreign matter on the surface of the substrate is swept away through the sweeping dust collector, the static electricity is neutralized by the static electricity remover through the ionic wind, and therefore the static electricity on the substrate is removed.
Description
Technical field
The invention belongs to electronic applications, particularly a kind of method and apparatus of removing substrate surface static and dust.
Background technology
Integrated along with the miniaturization of present electronic product and substrate, the quality of product also requires more and more higher, for this respect, product quality will be traced back to source, should before producing, will get rid of bad, to prevent that bad product stream from falling market, this can affect the image of enterprise product and the market efficiency of enterprise.The production of circuit board at present adopts a complete set of mode of production automatically, and the production of raw material sometimes also adopts automated production mode.In addition, because the rising of human cost, a lot of enterprises all adopt automation equipment, to save human cost.But the equipment that so also requires automated production must reach the quality of the equipment of artificial production.
, along with the universalness of electronic product, electronic product has been had to higher quality requirements now, this also just produces and has higher requirement electronic product.But at present in electron trade, what mostly face is the flaw of the electronic product that produces in production process.For example: many factors can affect the communication function of substrate, and factor comprises: the foreign matter on static, substrate and quality of tin cream etc.Wherein electrostatic hazard is maximum, static is not only harmful, and huge to electronic product harm, human body institute static electrification can reach volts up to ten thousand sometimes, is easy to breakdown potential sub-element, so must destatic when producing, the element that the quality influence that also has the very difficult foreign matter of finding of substrate surface naked eyes can affect Printing Paste mounts, while crossing stove, produce rosin joint, affect the normal communication of product, increased the fraction defective of product.
Summary of the invention
Above-mentioned technical problem based on existing in prior art.The object of the invention is to propose to remove the method and apparatus of substrate surface static and dust, remove static and the dust of substrate surface, solve the problems of the technologies described above.
The invention provides a kind of device of removing substrate surface static and dust, comprise: cleaning dust remover, static remover and vision-based detection camera, wherein, described cleaning dust remover has comprised motor, hairbrush and pull of vacuum sleeve, described cleaning dust remover is for drive rotating brushes to brush off the foreign matter dust existing at substrate surface by motor, and the pull of vacuum sleeve carrying by hairbrush top, and foreign matter dust is collected; Described static remover produces charged ion, and makes the charged ion of its generation form ion wind by air pressure, and charged ion is sprayed onto to substrate surface, with in and static on substrate; Vision-based detection camera is for contrast that substrate surface foreign matter is taken pictures, while confirming that substrate exists foreign matter, to described cleaning dust remover transmitted signal, so that cleaning dust remover cleans processing to substrate again.
Based on a kind of device of removing substrate surface static and dust, said brush is for regulating height up and down, has the substrate of mount components to realize upwards lift on corresponding surface, as passing a bridge, uses.
A kind of method of removing substrate surface static and dust provided by the invention, comprise: the device of removing substrate surface static and dust receives signal, and signal is sent to cleaning dust remover, described cleaning dust remover is according to signal removal substrate surface foreign matter, and carry out collection and treatment, then static remover produces electron ion, and makes the charged ion of its generation form ion wind by air pressure, and charged ion is sprayed onto to substrate surface, with in and substrate on static; Vision-based detection camera, to the contrast of taking pictures of substrate surface foreign matter, carries out foreign matter investigation, if having foreign matter to exist not remove clean, to described cleaning dust remover transmitted signal, so that cleaning dust remover cleans processing to substrate again.
The invention has the beneficial effects as follows: the method and apparatus of this present invention is cleared away the foreign matter of substrate surface by cleaning dust remover, and static remover neutralizes static by ion wind, thereby remove the static existing on substrate.
Accompanying drawing explanation
Fig. 1 is a kind of structural representation of removing the device of substrate surface static and dust of the present invention.
In figure, 1, cleaning dust remover, 2 static removers, 3, vision-based detection camera, 4, substrate reciprocating motion platform.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described, is to be noted that described embodiment is only intended to be convenient to the understanding of the present invention, and it is not played to any restriction effect.
Below in conjunction with the drawings and specific embodiments, the present invention is further detailed explanation.
As shown in Figure 1, the invention provides a kind of device of removing substrate surface static and dust, comprising: cleaning dust remover 1, static remover 2, vision-based detection camera 3 and substrate reciprocating motion platform 4.Wherein, cleaning dust remover has comprised motor, banister brush and pull of vacuum sleeve, cleaning dust remover drives rotation banister brush to brush off the foreign matter dust existing at substrate surface by motor, and the pull of vacuum sleeve carrying by hairbrush top, foreign matter dust is collected, so just, reached the object of dedusting, using pull of vacuum sleeve is in order to prevent that dust foreign matter that hairbrush is swept is again transferred to substrate surface and produces secondary pollution, to produce bad.Hairbrush height can be realized up-down adjustment, has the substrate of mount components to realize upwards lift on corresponding surface, as passing a bridge, uses.
When there is static in the face of substrate surface, this device of removing substrate surface static and dust adopts the static remover carrying below, static remover comprises ion wind generator, ion generator produces electrostatic ionic, by air pressure, make the charged ion of its generation form ion wind again, and ion is sprayed onto to the object that substrate surface reaches static neutralization, realize static and remove.
The vision-based detection camera finally carrying once checks the foreign matter of substrate surface again; prevent foreign matter to flow into next process; produce the bad of product; if there is foreign matter not to be eliminated totally; the signal that vision-based detection phase chance sends through cleaning dust remover, cleaning dust remover receives after signal, and motor just stays in back and forth operation again on substrate; again clean processing, to guarantee the clean foreign of substrate surface.
The invention provides a kind of method of removing substrate surface static and dust, its process comprises: the device of this removal substrate surface static and dust is after receiving the signal of host computer transmission, by transducer, signal is sent to cleaning dust remover, cleaning dust remover is started working according to signal, remove substrate surface foreign matter, and carry out collection and treatment.Then static remover utilization ion wind generator generation electron ion is closed during static is carried out, to reach the object of removing static.Finally by vision-based detection camera to the contrast of taking pictures of substrate surface foreign matter, carry out foreign matter investigation, if having foreign matter to exist not remove clean, the motor substrate back and forth operation again of staying, realizes the thorough cleaning to foreign matter.
The method and apparatus of the present invention is cleared away the foreign matter of substrate surface by cleaning dust remover, and static remover neutralizes static by ion wind, thereby removes the static existing on substrate.
Describing is above only a specific embodiment of the present invention, and obviously anyone modification of doing of this area or local replacement under technical scheme of the present invention instructs, all belong to the scope that the claims in the present invention book limits.
Claims (3)
1. a device of removing substrate surface static and dust, it is characterized in that, comprise: cleaning dust remover, static remover and vision-based detection camera, wherein, described cleaning dust remover has comprised motor, hairbrush and pull of vacuum sleeve, and described cleaning dust remover is for driving rotating brushes to brush off the foreign matter dust existing at substrate surface by motor, and the pull of vacuum sleeve carrying by hairbrush top, foreign matter dust is collected; Described static remover produces charged ion, and makes the charged ion of its generation form ion wind by air pressure, and charged ion is sprayed onto to substrate surface, with in and static on substrate; Vision-based detection camera is for contrast that substrate surface foreign matter is taken pictures, while confirming that substrate exists foreign matter, to described cleaning dust remover transmitted signal, so that cleaning dust remover cleans processing to substrate again.
2. the device of removal substrate surface static as claimed in claim 1 and dust, is characterized in that, described hairbrush is for regulating height up and down, has the substrate of mount components to realize upwards lift on corresponding surface, as passing a bridge, uses.
3. a method of removing substrate surface static and dust, it is characterized in that, comprise: the device of removing substrate surface static and dust receives signal, and signal is sent to cleaning dust remover, described cleaning dust remover is according to signal removal substrate surface foreign matter, and carries out collection and treatment, then static remover produces electron ion, and by air pressure, make the charged ion of its generation form ion wind, and charged ion is sprayed onto to substrate surface, with in and static on substrate; Vision-based detection camera, to the contrast of taking pictures of substrate surface foreign matter, carries out foreign matter investigation, if having foreign matter to exist not remove clean, to described cleaning dust remover transmitted signal, so that cleaning dust remover cleans processing to substrate again.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310603229.XA CN103687265B (en) | 2013-11-22 | 2013-11-22 | Method and device for removing static electricity and dust on surface of substrate |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310603229.XA CN103687265B (en) | 2013-11-22 | 2013-11-22 | Method and device for removing static electricity and dust on surface of substrate |
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| CN103687265A true CN103687265A (en) | 2014-03-26 |
| CN103687265B CN103687265B (en) | 2017-01-04 |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106111574A (en) * | 2016-06-22 | 2016-11-16 | 广东瑞捷光电股份有限公司 | A kind of multifunctional plate cleaning roller machine |
| CN106170185A (en) * | 2016-08-30 | 2016-11-30 | 天津市中环通讯技术有限公司 | A kind of device being arranged on on trigger being printed circuit board (PCB) automatic dust removing |
| CN106842654A (en) * | 2017-04-18 | 2017-06-13 | 武汉华星光电技术有限公司 | Adhere to inspection and removal device and its method for foreign matter on a kind of substrate |
| CN108630564A (en) * | 2017-03-23 | 2018-10-09 | 捷进科技有限公司 | The manufacturing method of chip attachment device and semiconductor devices |
| CN110575996A (en) * | 2019-08-08 | 2019-12-17 | 武汉华星光电半导体显示技术有限公司 | Substrate cleaning device |
| CN112312635A (en) * | 2020-11-30 | 2021-02-02 | 四川省民众日化有限公司 | Automatic dust removal device for plastic products |
| US11164758B2 (en) | 2014-04-01 | 2021-11-02 | Ebara Corporation | Washing device and washing method |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US11164758B2 (en) | 2014-04-01 | 2021-11-02 | Ebara Corporation | Washing device and washing method |
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| CN106170185A (en) * | 2016-08-30 | 2016-11-30 | 天津市中环通讯技术有限公司 | A kind of device being arranged on on trigger being printed circuit board (PCB) automatic dust removing |
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| CN108630564B (en) * | 2017-03-23 | 2022-02-18 | 捷进科技有限公司 | Chip mounting apparatus and method for manufacturing semiconductor device |
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| CN112312635A (en) * | 2020-11-30 | 2021-02-02 | 四川省民众日化有限公司 | Automatic dust removal device for plastic products |
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|---|---|
| CN103687265B (en) | 2017-01-04 |
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