CN103668122B - Plasma apparatus and support plate retracting device thereof - Google Patents
Plasma apparatus and support plate retracting device thereof Download PDFInfo
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- CN103668122B CN103668122B CN201210325744.1A CN201210325744A CN103668122B CN 103668122 B CN103668122 B CN 103668122B CN 201210325744 A CN201210325744 A CN 201210325744A CN 103668122 B CN103668122 B CN 103668122B
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- conveyer belt
- support plate
- cooling
- retracting device
- support member
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- 238000001816 cooling Methods 0.000 claims abstract description 21
- 239000002826 coolant Substances 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 11
- 239000007769 metal material Substances 0.000 claims description 6
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 4
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 238000010276 construction Methods 0.000 abstract description 8
- 230000005540 biological transmission Effects 0.000 description 10
- 239000000758 substrate Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000000498 cooling water Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 206010053615 Thermal burn Diseases 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention proposes a kind of support plate retracting device for plasma apparatus, including: conveyer belt, described conveyer belt is used for transmitting support plate；Conveyer belt support member, described conveyer belt support member is used for supporting described conveyer belt and contacting with described conveyer belt；And cooling-part, described cooling-part is located in conveyer belt support member, for cooling down described conveyer belt to cool down the support plate on described conveyer belt.Support plate retracting device according to embodiments of the present invention, by being provided with cooling-part in conveyer belt support member, thus cooling conveyer belt, and then the support plate on cooling conveyer belt, make support plate can place on a moving belt without scalding conveyer belt for a long time, and make the support plate can closer to the placement of loading stage on a moving belt when waiting and being transferred to loading stage, and simple in construction, improve production efficiency.The invention allows for a kind of plasma apparatus with above-mentioned support plate retracting device.
Description
Technical field
The present invention relates to plasma reinforced chemical vapor deposition system field, especially relate to a kind of plasma apparatus and
Its support plate retracting device.
Background technology
General plasma reinforced chemical vapor deposition system (PECVD system) including: loading stage；Load chamber；Work
Skill chamber；Unloading chamber；Relieving platform；Retracting device.In plasma apparatus, substrate is loaded onto in loading stage region
On support plate, enter loading chamber and carry out the pre-heat treatment, after substrate reaches technological temperature requirement, be transferred into process cavity carry out
Pecvd process, is then spread out of chamber system by unloading chamber and reaches relieving platform.Relieving platform and loading stage are all to lift
, after support plate is dropped to lower floor by relieving platform, pass back to receiving apparatus, be then communicated to, below loading stage, be raised to loading stage
Upper strata carries out next circulation.In real production, for guaranteed efficiency, it will usually have polylith support plate simultaneously at plasma
Run on body equipment.
In retracting device, the mode of driven by motor belt usually can be used to transmit support plate.Owing to support plate is added when technique
Heat is to the highest temperature, and through a series of cooling measures to retracting device, temperature stills remain in more than 200 degree.
Belt can bear the high temperature of short time, can allow support plate quickly through, but do not allow support plate long-time on belt
Wait, so when there being support plate just at load on loading stage, waiting that the support plate passing to loading stage can only wait at relieving platform,
After loading stage loads, this support plate could be transmitted by retracting device, therefore waste one the transmission time.It addition,
If retracting device be in an emergency need to stop transmission time, support plate will be scalded because of long-time contact belt
Belt.
The mode used at present is that retracting device uses and catches up with the roller transmission that layer is the same, can tolerate high temperature, but the party
Formula on the one hand disadvantageously, be that roller transmission is easily derailed；On the other hand the leveling being roller is relatively difficult.Another
The mode of kind is to increase by one group of cylinder below retracting device, when support plate is transferred to load below chamber at retracting device, and gas
Cylinder rises, and by the gripper shoe of connection by support plate jack-up, departs from belt, can wait as long at this.If it occur that
When emergency needs to stop, can be at stop position rise cylinder to depart from belt, yet with adding on cylinder
The flow process risen and decline, thus add two links in time, cause the deficiency of efficiency.
Summary of the invention
It is contemplated that at least solve one of technical problem present in prior art.
To this end, it is an object of the present invention to propose a kind of support plate can be cooled down and simple in construction for plasma
The support plate retracting device of body equipment.
Further object is that a kind of plasma apparatus with above-mentioned support plate retracting device of proposition.
The support plate retracting device for plasma apparatus of embodiment according to a first aspect of the present invention, including: conveyer belt,
Described conveyer belt is used for transmitting support plate；Conveyer belt support member, described conveyer belt support member is used for supporting described transmission
Carry and contact with described conveyer belt；And cooling-part, described cooling-part is located in conveyer belt support member, for cold
The most described conveyer belt is to cool down the support plate on described conveyer belt.
Support plate retracting device according to embodiments of the present invention, by being provided with cooling-part in conveyer belt support member, from
And the support plate on cooling conveyer belt, and then cooling conveyer belt so that support plate can place for a long time on a moving belt and
Will not scald conveyer belt, and make support plate can be placed on conveyer belt closer to loading stage when waiting and being transferred to loading stage
On, simple in construction, improve production efficiency.
In one embodiment of the invention, described cooling-part for be formed in described conveyer belt support member and have into
Mouth and the coolant guiding channel of outlet.Thus so that cooling-part simple in construction, and good cooling results.
In another embodiment of the present invention, described cooling-part is that the cooling being located in described conveyer belt support member is situated between
Matter pipe.Thus so that cooling-part simple in construction, and good cooling results.
Specifically, described conveyer belt support member is made up of metal material.Thus so that transmission band support member heat conduction is fast,
Good heat conductivity, it is ensured that the cooling effect to support plate.
Preferably, described metal material is aluminium.Thus so that conveyer belt support member is the lightest, and heat conduction is fast.
According to some embodiments of the present invention, described conveyer belt is arranged parallel to each other two, described conveyer belt supporting part
Part be respectively with two conveyer belts, two guide plates one to one.Thus, improve the conveying capacity of support plate, improve life
Produce efficiency.
Further, the two sides of described guide plate are respectively equipped with side guide roller.Thus, it is ensured that the transmission side of conveyer belt
To.
Preferably, described cooling-part is the coolant guiding channel being formed in described conveyer belt support member, and described two
Coolant guiding channel in individual guide plate is connected in parallel to each other.Thus so that the cooling effect of cooling-part is best.
A kind of plasma apparatus of embodiment according to a second aspect of the present invention, including: the loading stage of order layout, loading
Chamber, process cavity, unloading chamber and relieving platform；With support plate retracting device, described support plate retracting device is for by described unloading
Support plate on platform is transported on described loading stage, and described support plate retracting device is according to first aspect present invention embodiment
Support plate retracting device.
Plasma apparatus according to embodiments of the present invention, is provided by support plate retracting device, can be to the load on conveyer belt
Plate cools down, thus can avoid stopping for a long time on a moving belt due to support plate and scalding conveyer belt, and can allow support plate
Place on a moving belt closer to loading stage when wait is transferred to loading stage, improve production efficiency, this plasma
Device structure is simple, and production efficiency is high.
Alternatively, described plasma apparatus is CVD or PECVD device.
The additional aspect of the present invention and advantage will part be given in the following description, and part will become from the following description
Substantially, or by the practice of the present invention recognize.
Accompanying drawing explanation
Above-mentioned and/or the additional aspect of the present invention and advantage will become bright from combining the accompanying drawings below description to embodiment
Aobvious and easy to understand, wherein:
Fig. 1 is the schematic diagram of the support plate retracting device according to the embodiment of the present invention；
Fig. 2 is the top view of the conveyer belt support member with cooling-part of the support plate retracting device shown in Fig. 1；
Fig. 3 is the schematic diagram of the plasma apparatus according to the embodiment of the present invention；With
Fig. 4 is the schematic diagram of the plasma apparatus according to another embodiment of the present invention.
Detailed description of the invention
Embodiments of the invention are described below in detail, and the example of described embodiment is shown in the drawings, the most from start to finish phase
Same or similar label represents same or similar element or has the element of same or like function.Below with reference to
The embodiment that accompanying drawing describes is exemplary, is only used for explaining the present invention, and is not considered as limiting the invention.
In describing the invention, it is to be understood that term " " center ", " longitudinally ", " laterally ", " on ",
D score, "front", "rear", "left", "right", " vertically ", " level ", " top ", " end "
" interior ", " outward " etc. instruction orientation or position relationship be based on orientation shown in the drawings or position relationship, be only for
It is easy to describe the present invention and simplifying describe rather than instruction or the device of hint indication or element must have specifically
Orientation, with specific azimuth configuration and operation, be therefore not considered as limiting the invention.Additionally, term " the
One ", " second " be only used for describe purpose, and it is not intended that instruction or hint relative importance.
In describing the invention, it should be noted that unless otherwise clearly defined and limited, term " install ",
" be connected ", " connection " should be interpreted broadly, and connects for example, it may be fixing, it is also possible to be to removably connect,
Or be integrally connected；Can be to be mechanically connected, it is also possible to be electrical connection；Can be to be joined directly together, it is also possible in by
Between medium be indirectly connected to, can be the connection of two element internals.For the ordinary skill in the art, may be used
Above-mentioned term concrete meaning in the present invention is understood with concrete condition.
Below with reference to the accompanying drawings describe the support plate retracting device 100 for plasma apparatus according to embodiments of the present invention, carry
Plate retracting device 100 may be used for from relieving platform 9, the support plate 1 through processes is transferred to loading stage 5.
The support plate retracting device 100 for plasma apparatus according to embodiments of the present invention, including: conveyer belt 2, biography
Sending band support member 3 and cooling-part 4, wherein, conveyer belt 2 is used for transmitting support plate 1, conveyer belt support member 3 with
Conveyer belt 2 contacts, and is used for supporting conveyer belt 2.Cooling-part 4 is located in conveyer belt support member 3, is used for cooling down biography
Send with 2 thus support plate 1 on cooling conveyer belt 2.
Support plate 1 is when relieving platform 9 is sent to support plate retracting device 100, and conveyer belt 2 is pressed to conveyer belt by support plate 1 and props up
On support part part 3, the temperature of conveyer belt support member 3 is low, and the temperature of support plate 1 is high, and the temperature of conveyer belt 2 can be between
Between the two, in cooling-part 4 is arranged on conveyer belt support member 3 and carried by conveyer belt support member 3 heat conduction
Walk the temperature of conveyer belt 2, thus the support plate 1 on cooling conveyer belt 2.
Support plate retracting device 100 according to embodiments of the present invention, by arranging cooling-part in conveyer belt support member 3
4, thus the support plate 1 on cooling conveyer belt 2, and then cooling conveyer belt 2 so that support plate 1 can be placed for a long time
On conveyor belt 2 without scalding conveyer belt 2, and simple in construction, improve production efficiency.
Specifically, cooling-part 4 can be formed at conveyer belt support member 3 in and there is the cold of entrance 40 and outlet 41
But medium channel.Certainly the invention is not restricted to this, cooling-part 4 can be also to be embedded in conveyer belt support member 3
There is entrance 40 and the cooling medium pipe of outlet 41.In other words, cooling-part 4 is by through conveyer belt support member 3
Conveyer belt 2 is cooled down by interior cooling medium, it is preferable that cooling medium is cooling water, certainly the invention is not restricted to
This, cooling medium can be also N2 etc..Thus, good cooling results, and support plate retracting device 100 simple in construction.
Further, conveyer belt support member 3 can be made up of metal material.Preferably, metal material is aluminium.Thus,
This conveyer belt support member 3 is that is light, has again the effect that heat conduction is fast.
According to some embodiments of the present invention, as depicted in figs. 1 and 2, conveyer belt 2 is parallel to each other and spaced apart
Article two, conveyer belt support member 3 be respectively with two conveyer belts 2, two guide plates 3 one to one, two guide plates 3
Lower surface with the epimere in order to place support plate of two conveyer belts 2 contacts respectively.
In an embodiment of the present invention, conveyer belt support member 3 is wrapped up by conveyer belt 2 and contacts with transmission band 2, here
" wrap up " and refer to that conveyer belt support member 3 is located in conveyer belt 2, i.e. by transmission band 2 cincture.In other words, transmit
Being segmented into placing the hypomere of the upper end of support plate and return with 2, conveyer belt support member 3 is located at epimere and hypomere
Between, and conveyer belt support member 3 contacts with the lower surface (inner surface) of epimere, thus the placement of conveyer belt 2 carries
The epimere of plate contacts with conveyer belt support member 3, to cool down support plate
Alternatively, the two sides of guide plate 3 are respectively equipped with side guide roller (not shown).Thus, it is ensured that conveyer belt
The transmission direction of 2, and improve production efficiency.On Ke Yilixieing, conveyer belt 2 can be driven by suitable driving means,
Such as motor drives the driving pulley of conveyer belt 2 one end by decelerator.
Preferably, cooling-part 4 is the coolant guiding channel being formed in conveyer belt support member 3, and two guide plates 3
Interior coolant guiding channel is connected in parallel to each other.Thus so that the cooling effect of cooling-part 4 is more preferable.Example at Fig. 2
In, it is formed with the first coolant guiding channel 4a in guide plate 3a, in guide plate 3b, is formed with the second coolant guiding channel 4b,
The left end of the first coolant guiding channel 4a and the left end of the second coolant guiding channel 4b are connected by pipeline G, and first is cold
But the right-hand member of medium channel 4a and the right-hand member of the second coolant guiding channel 4b are connected by pipeline G.Such as the arrow in Fig. 2
Shown in head, cooling medium enters in coolant guiding channel 4 from entrance 40, and a part of cooling medium is through whole first
From outlet 41 outflow after coolant guiding channel 4a, another part cooling medium sequentially passes through pipeline G-second and cools down Jie
Matter passage 4b-pipeline G, finally from outlet 41 outflow.So that the cooling effect of cooling-part 4 is best.
Cooling medium can be cooling water, in the figure 2 example, is provided with valve 11 to control cooling water at entrance 40
Flow, outlet 41 at be provided with cooling-water temperature sensor 12 with according to outlet 41 lower water temperature enter the water yield.Preferably,
Water inlet water temperature is less than 35 degree, and hydraulic pressure is more than 0.4Mpa, and less than 0.8Mpa, discharge is more than 8L/min.
The plasma apparatus 200 of embodiment according to a second aspect of the present invention is described below with reference to Fig. 3 and Fig. 4.Alternatively,
Plasma apparatus 200 can be CVD equipment (chemical vapor depsotition equipment) or PECVD device (plasma
Strengthen chemical vapor depsotition equipment).
Plasma apparatus 200 according to embodiments of the present invention, including: loading stage 5, loads chamber 6, process cavity 7, unloads
Carry chamber 8, relieving platform 9 and support plate retracting device 100, wherein, loading stage 5, loading chamber 6, process cavity 7, unloading chamber
8 and relieving platform 9 order arrange.Support plate retracting device 100 is for being transported to loading stage 5 by the support plate 1 on relieving platform 9
On, support plate retracting device 100 is the support plate retracting device 100 according to the above embodiment of the present invention.
Substrate is loaded onto on support plate 1 at loading stage 5, as shown in the arrow A in Fig. 3, equipped with the support plate 1 of substrate
Enter into loading chamber 6 and carry out the pre-heat treatment, after substrate reaches technological temperature requirement, be transferred into process cavity 7 carry out work
Skill processes, and is then sent to relieving platform 9 by unloading chamber 8, is taken out by substrate on relieving platform 9 from support plate 1.Such as figure
Shown in arrow B in 3, the support plate 1 on relieving platform 9 is transported on loading stage 5 by support plate retracting device 100.
In the embodiment shown in fig. 3, plasma apparatus 200 is provided with a support plate retracting device 100, Fig. 4's
In example, plasma apparatus 200 is provided with three support plate retracting devices 100, and support plate 1 reclaims respectively through three support plates
It is transported to after device 100 on loading stage 5.
Plasma apparatus 200 according to embodiments of the present invention, by above-mentioned support plate retracting device 100, can be to conveyer belt
Support plate 1 on 2 cools down, thus can avoid scalding conveyer belt on conveyor belt 2 owing to support plate 1 stops for a long time
2, and improve production efficiency, according to plasma apparatus 200 simple in construction of the present invention, production efficiency is high.
In the description of this specification, reference term " embodiment ", " some embodiments ", " illustrative examples ", " show
Example ", the description of " concrete example " or " some examples " etc. means to combine this embodiment or example describes specific features, knot
Structure, material or feature are contained at least one embodiment or the example of the present invention.In this manual, to above-mentioned term
Schematic representation be not necessarily referring to identical embodiment or example.And, the specific features of description, structure, material or
Person's feature can combine in any one or more embodiments or example in an appropriate manner.
Although an embodiment of the present invention has been shown and described, it will be understood by those skilled in the art that: do not taking off
In the case of the principles and objective of the present invention, these embodiments can be carried out multiple change, revise, replace and modification,
The scope of the present invention is limited by claim and equivalent thereof.
Claims (9)
1. a support plate retracting device, the support plate for plasma apparatus reclaims, it is characterised in that including:
Conveyer belt, described conveyer belt is used for transmitting support plate, and described conveyer belt is arranged parallel to each other two；
Conveyer belt support member, described conveyer belt support member is used for supporting described conveyer belt and contacting with described conveyer belt,
Described conveyer belt support member be two and with described conveyer belt one_to_one corresponding；With
Cooling-part, described cooling-part is located in conveyer belt support member, is used for cooling down described conveyer belt described with cooling
Support plate on conveyer belt, the described cooling-part of two described conveyer belt support members is connected in parallel to each other.
Support plate retracting device the most according to claim 1, it is characterised in that described cooling-part is for being formed at
State in conveyer belt support member and there is the coolant guiding channel of entrance and exit.
Support plate retracting device the most according to claim 1, it is characterised in that described cooling-part is described for being located at
Cooling medium pipe in conveyer belt support member.
4. according to the support plate retracting device according to any one of claim 1-3, it is characterised in that described conveyer belt props up
Support part part is made up of metal material.
Support plate retracting device the most according to claim 4, it is characterised in that described metal material is aluminium.
Support plate retracting device the most according to claim 1, it is characterised in that described conveyer belt support member is for dividing
Not with two conveyer belt two guide plates one to one, described cooling-part is for being formed in described conveyer belt support member
Coolant guiding channel, and the coolant guiding channel in said two guide plate is connected in parallel to each other.
Support plate retracting device the most according to claim 6, it is characterised in that the two sides of described guide plate set respectively
There is side guide roller.
8. a plasma apparatus, it is characterised in that including:
Loading stage, loading chamber, process cavity, unloading chamber and the relieving platform that order is arranged；With
Support plate retracting device, described support plate retracting device is for being transported to described loading stage by the support plate on described relieving platform
On, described support plate retracting device is according to the support plate retracting device according to any one of claim 1-7.
Plasma apparatus the most according to claim 8, it is characterised in that described plasma apparatus is CVD
Or PECVD device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210325744.1A CN103668122B (en) | 2012-09-05 | 2012-09-05 | Plasma apparatus and support plate retracting device thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210325744.1A CN103668122B (en) | 2012-09-05 | 2012-09-05 | Plasma apparatus and support plate retracting device thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103668122A CN103668122A (en) | 2014-03-26 |
| CN103668122B true CN103668122B (en) | 2016-08-31 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210325744.1A Active CN103668122B (en) | 2012-09-05 | 2012-09-05 | Plasma apparatus and support plate retracting device thereof |
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| Country | Link |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0759529A2 (en) * | 1995-08-05 | 1997-02-26 | Dieter Fedder | Thermally conditioned conveyor belt |
| CN1449484A (en) * | 2000-08-25 | 2003-10-15 | 奥托库姆普联合股份公司 | Device for supporting a conveyor belt used in the continuously operated sintering of a material bed |
| CN102220567A (en) * | 2010-04-14 | 2011-10-19 | 中国科学院沈阳科学仪器研制中心有限公司 | Flat PECVD (plasma-enhanced chemical vapor deposition) silicon nitride coating system |
-
2012
- 2012-09-05 CN CN201210325744.1A patent/CN103668122B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0759529A2 (en) * | 1995-08-05 | 1997-02-26 | Dieter Fedder | Thermally conditioned conveyor belt |
| CN1449484A (en) * | 2000-08-25 | 2003-10-15 | 奥托库姆普联合股份公司 | Device for supporting a conveyor belt used in the continuously operated sintering of a material bed |
| CN102220567A (en) * | 2010-04-14 | 2011-10-19 | 中国科学院沈阳科学仪器研制中心有限公司 | Flat PECVD (plasma-enhanced chemical vapor deposition) silicon nitride coating system |
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| Publication number | Publication date |
|---|---|
| CN103668122A (en) | 2014-03-26 |
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Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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