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CN103647215A - Narrow-line-width high-power external cavity laser - Google Patents

Narrow-line-width high-power external cavity laser Download PDF

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CN103647215A
CN103647215A CN201310751231.1A CN201310751231A CN103647215A CN 103647215 A CN103647215 A CN 103647215A CN 201310751231 A CN201310751231 A CN 201310751231A CN 103647215 A CN103647215 A CN 103647215A
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mirror
convex
box
collimating mirror
laser
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陈江
张辉
阮军
王心亮
刘丹丹
余凤翔
张首刚
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National Time Service Center of CAS
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Abstract

一种窄线宽大功率外腔激光器,在箱体两侧壁加工有出光孔,箱体底部中间设光放大芯片,箱体底部光放大芯片左侧光出射方向设第二准直镜,箱体的底部第二准直镜左侧光出射方向设衍射光栅,箱体底部左端设压电换能器,压电换能器右端面上设全反射镜,箱体底部光放大芯片右侧光出射方向设第一准直镜,箱体底部第一准直镜右侧光出射方向设柱透镜,箱体的顶部设顶盖。由于本发明采用了光放大芯片产生激光并进行放大,将激光放大系统和激光器系统相组合,大大缩小了产生大功率激光所用系统的体积,提高了激光器的可靠性和稳定性,降低了激光器的产品成本。本发明可在原子冷却、远距离光信息传输等技术领域中应用。

A narrow-linewidth high-power external cavity laser, with light holes processed on both side walls of the box, an optical amplification chip in the middle of the bottom of the box, and a second collimating mirror on the left side of the light amplification chip at the bottom of the box. Diffraction grating is set on the left side of the second collimating mirror at the bottom of the box, and a piezoelectric transducer is set on the left end of the bottom of the box. A first collimating mirror is set in the direction, a cylindrical lens is set in the light exit direction on the right side of the first collimating mirror at the bottom of the box, and a top cover is set on the top of the box. Since the present invention adopts an optical amplifier chip to generate and amplify the laser, and combines the laser amplifier system and the laser system, the volume of the system used to generate high-power laser is greatly reduced, the reliability and stability of the laser are improved, and the laser power is reduced. Product Cost. The invention can be applied in technical fields such as atom cooling and long-distance optical information transmission.

Description

窄线宽大功率外腔激光器Narrow linewidth high power external cavity laser

技术领域technical field

本发明属于激光器技术领域,具体涉及到一种光放大芯片激光器装置。The invention belongs to the technical field of lasers, and in particular relates to an optical amplifier chip laser device.

背景技术Background technique

激光器在量子频标、原子物理、基础物理及生物医学等领域均具有广泛应用。特别就在远距离光纤通讯及原子的激光冷却与陷俘及喷泉钟等领域的研究中均要求激光器能输出功率大且中心频率稳定的激光,这就要求激光器不仅能产生大功率激光并且有较好的稳定性和可靠性。Lasers are widely used in the fields of quantum frequency standards, atomic physics, fundamental physics, and biomedicine. Especially in the fields of long-distance optical fiber communication, laser cooling and trapping of atoms, and fountain clocks, it is required that the laser can output laser with high power and stable center frequency, which requires that the laser can not only generate high-power laser but also have a relatively high frequency. Good stability and reliability.

传统激光器,输出的激光功率低,只能先通过激光器,产生小功率的激光,再通过光放大器系统实现激光功率的放大,这就要求将激光器系统与光放大系统配合使用,这在无形中就增加光学元器件的使用数量,不仅提高了系统成本,而且增加了系统的复杂性以及操作人员的工作量,在一定程度上降低了系统可靠性及稳定性。The output laser power of the traditional laser is low, so it can only generate low-power laser through the laser first, and then realize the amplification of the laser power through the optical amplifier system, which requires the laser system to be used in conjunction with the optical amplifier system, which is virtually Increasing the number of optical components used not only increases the system cost, but also increases the complexity of the system and the workload of operators, which reduces the reliability and stability of the system to a certain extent.

发明内容Contents of the invention

本发明所要解决的技术问题在于克服上述激光器的缺点,提供一种小型化、成本低、可靠性好的窄线宽大功率外腔激光器。The technical problem to be solved by the present invention is to overcome the shortcomings of the above-mentioned lasers, and provide a narrow linewidth and high-power external cavity laser with miniaturization, low cost and good reliability.

解决上述技术问题所采用的技术方案是:在箱体左右两侧壁上加工有出光孔,箱体底部中间设置有光放大芯片,箱体底部光放大芯片左侧光出射方向设置有第二准直镜,箱体的底部第二准直镜左侧光出射方向设置有衍射光栅,箱体底部左端设置有压电换能器,压电换能器右端面上设置有全反射镜,箱体底部光放大芯片右侧光出射方向设置有第一准直镜,箱体底部第一准直镜右侧光出射方向设置有柱透镜,箱体的顶部设置有顶盖。The technical solution adopted to solve the above technical problems is as follows: light holes are processed on the left and right side walls of the box body, an optical amplification chip is arranged in the middle of the bottom of the box body, and a second standard is set on the left side of the light amplification chip at the bottom of the box body in the direction of light emission. Straight mirror, the second collimating mirror at the bottom of the cabinet is provided with a diffraction grating in the light exit direction on the left side, a piezoelectric transducer is provided at the left end of the bottom of the cabinet, and a total reflection mirror is provided on the right end of the piezoelectric transducer. A first collimating mirror is arranged on the right side of the light amplification chip at the bottom in the light emitting direction, a cylindrical lens is arranged on the right side of the first collimating mirror at the bottom of the cabinet, and a top cover is arranged on the top of the cabinet.

本发明的第一准直镜和第二准直镜为双凸透镜,双凸透镜的左凸面和右凸面的曲率半径为3~6mm,双凸透镜的镜面上真空蒸镀12~18层二氧化锆或二氧化硅增透膜。本发明的衍射光栅是:带宽为100GHz、刻线密度为400~600l/mm或透过率为85%~95%。本发明的压电换能器的相对介电常数为1600,机械品质因数为80,机电耦合系数0.35,压电应变常数300。本发明的全反射镜为平面镜,全反射镜的镜面上真空交替蒸镀有2~8层三氧化二铝和二氧化硅全反膜。本发明的柱透镜为平凸镜,平凸镜的左端面为平面、右端面为凸面,凸面的曲率半径为14~18mm,柱透镜的镜面上真空蒸镀10~16层二氧化锆或二氧化硅增透膜。The first collimating mirror and the second collimating mirror of the present invention are double-convex lenses, and the curvature radius of the left convex surface and the right convex surface of the double-convex lens is 3-6 mm, and 12-18 layers of zirconium dioxide or zirconium dioxide are vacuum-deposited on the mirror surface of the double-convex lens. Silica AR coating. The diffraction grating of the present invention has a bandwidth of 100 GHz, a groove density of 400-600 l/mm or a transmittance of 85%-95%. The relative permittivity of the piezoelectric transducer of the present invention is 1600, the mechanical quality factor is 80, the electromechanical coupling coefficient is 0.35, and the piezoelectric strain constant is 300. The total reflection mirror of the present invention is a plane mirror, and 2 to 8 layers of aluminum oxide and silicon dioxide total reflection films are alternately evaporated in vacuum on the mirror surface of the total reflection mirror. The cylindrical lens of the present invention is a plano-convex mirror, the left end face of the plano-convex mirror is a plane, the right end face is a convex surface, the radius of curvature of the convex surface is 14-18 mm, and 10-16 layers of zirconium dioxide or dioxane are vacuum deposited on the mirror surface of the cylindrical lens. Silicon oxide AR coating.

本发明的第一准直镜和第二准直镜为双凸透镜,双凸透镜的左凸面和右凸面的曲率半径最佳为4.5mm,双凸透镜的镜面上真空蒸镀最佳14层二氧化锆或二氧化硅增透膜。本发明的衍射光栅是:带宽为100GHz、刻线密度最佳为500l/mm或透过率为90%,本发明的压电换能器的相对介电常数为1600,机械品质因数为80,机电耦合系数0.35,压电应变常数300。本发明的全反射镜为平面镜,全反射镜的镜面上真空交替蒸镀最佳有4层三氧化二铝和二氧化硅全反膜。本发明的柱透镜为平凸镜,平凸镜的左端面为平面、右端面为凸面,凸面的曲率半径最佳为15mm,柱透镜的镜面上最佳真空蒸镀14层二氧化锆或二氧化硅增透膜。The first collimating mirror and the second collimating mirror of the present invention are double-convex lenses, and the curvature radius of the left convex surface and the right convex surface of the double-convex lens is optimally 4.5 mm, and vacuum evaporation of 14 layers of zirconium dioxide is optimal on the mirror surface of the double-convex lens or silica AR coating. Diffraction grating of the present invention is: bandwidth is 100GHz, groove line density is the best 500l/mm or transmittance is 90%, the relative permittivity of piezoelectric transducer of the present invention is 1600, and mechanical quality factor is 80, The electromechanical coupling coefficient is 0.35, and the piezoelectric strain constant is 300. The total reflection mirror of the present invention is a plane mirror, and the vacuum alternate evaporation on the mirror surface of the total reflection mirror preferably has 4 layers of aluminum oxide and silicon dioxide total reflection films. The cylindrical lens of the present invention is a plano-convex mirror, the left end face of the plano-convex mirror is a plane, and the right end face is a convex surface. Silicon oxide AR coating.

本发明的第一准直镜和第二准直镜为双凸透镜,双凸透镜的左凸面和右凸面的曲率半径相同,双凸透镜的镜面上真空蒸镀12~18层二氧化锆或二氧化硅增透膜。The first collimating mirror and the second collimating mirror of the present invention are double-convex lenses, and the curvature radius of the left convex surface and the right convex surface of the double-convex lens is the same, and 12 to 18 layers of zirconium dioxide or silicon dioxide are vacuum-deposited on the mirror surface of the double-convex lens. AR coating.

本发明的第一准直镜和第二准直镜为双凸透镜,第二准直镜的左凸面和右凸面的曲率半径以及所镀增透膜的材料和层数与第一准直镜相同。The first collimating mirror and the second collimating mirror of the present invention are double-convex lenses, and the radius of curvature of the left convex surface and the right convex surface of the second collimating mirror and the material and number of layers of the anti-reflection coating are the same as those of the first collimating mirror .

由于本发明采用了光放大芯片产生激光并进行放大,将激光放大系统和激光器系统相组合,大大缩小了产生大功率激光所用系统的体积,提高了激光器的可靠性和稳定性,降低了激光器的产品成本。本发明具有结构简单、体积小,产品成本低、可靠性和稳定性好等优点,可在原子冷却、远距离光信息传输等技术领域中应用。Since the present invention adopts an optical amplifier chip to generate and amplify laser light, and combines the laser amplifier system with the laser system, the volume of the system used to generate high-power laser is greatly reduced, the reliability and stability of the laser are improved, and the laser power is reduced. Product Cost. The invention has the advantages of simple structure, small volume, low product cost, good reliability and stability, etc., and can be applied in technical fields such as atom cooling and long-distance optical information transmission.

附图说明Description of drawings

图1是本发明一个实施例的结构示意图。Fig. 1 is a structural schematic diagram of an embodiment of the present invention.

具体实施方式Detailed ways

下面结合附图和实施例对本发明进一步详细说明,但本发明不限于这些实施例。The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments, but the present invention is not limited to these embodiments.

实施例1Example 1

在图1中,本实施例的窄线宽大功率外腔激光器由柱透镜1、第一准直镜2、光放大芯片3、第二准直镜4、衍射光栅5、全反射镜6、压电换能器7、顶盖8、箱体9联接构成。In Fig. 1, the narrow-linewidth high-power external-cavity laser of this embodiment consists of a cylindrical lens 1, a first collimating mirror 2, an optical amplification chip 3, a second collimating mirror 4, a diffraction grating 5, a total reflection mirror 6, a compression The electric transducer 7, the top cover 8, and the box body 9 are connected to form.

在箱体9的左右两侧壁上加工有出光孔,箱体9的底部中心位置用螺纹紧固联接件固定联接安装有光放大芯片3,光放大芯片3为市场上销售的商品,型号为EYP-TPA-0850-00500-3006-cmt03-000,由德国EAGLEYARD公司生产,光放大芯片3产生中心波长为850nm的激光作为种子光,在箱体9的底部光放大芯片3的左侧光出射方向上用螺纹紧固连接件固定联接安装有第二准直镜4,第二准直镜4为双凸透镜,双凸透镜的左凸面和右凸面的曲率半径为4.5mm,第二准直镜4的镜面上真空蒸镀14层二氧化锆增透膜。在箱体9的底部第二准直镜4的左侧光出射方向上用螺纹紧固连接件固定联接安装有衍射光栅5,衍射光栅5带宽为100GHz、刻线密度为500l/mm或透过率为90%。在箱体9的底部左端用螺纹紧固连接件固定安装有压电换能器7,压电换能器7的相对介电常数为1600,机械品质因数为80,机电耦合系数0.35,压电应变常数300。压电换能器7用于产生轴向形变,压电换能器7的右端面上用胶粘接有全反射镜6,全反射镜6为平面镜,全反射镜6的镜面上真空交替蒸镀有4层三氧化二铝和二氧化硅全反膜。光放大芯片3与电源接通产生激光,做为种子光,种子光由光放大芯片3左端出射,经第二准直镜4整形成截面为椭圆形的光束,入射到衍射光栅5,通过改变衍射光栅5的角度来对种子光进行选模。选模后的种子光入射到全反射镜6,全反射镜6与光放大芯片3左侧激光出射端面构成激光谐振外腔,得到窄线宽的激光。种子光经全反射镜6按原光路反射进入光放大芯片3进行放大。The left and right side walls of the box body 9 are processed with light holes, and the bottom center of the box body 9 is fixedly connected with a threaded fastening connector to install an optical amplifier chip 3. The optical amplifier chip 3 is a commodity sold on the market, and the model is EYP-TPA-0850-00500-3006-cmt03-000, produced by German EAGLEYARD company, the optical amplifier chip 3 generates laser light with a center wavelength of 850nm as the seed light, and the left side of the optical amplifier chip 3 at the bottom of the box 9 emits light In the direction, a second collimating mirror 4 is fixedly connected with a threaded fastening connector, and the second collimating mirror 4 is a double-convex lens. 14 layers of zirconium dioxide anti-reflection coatings are vacuum-deposited on the mirror surface. On the left side of the second collimating mirror 4 at the bottom of the box 9 in the direction of light emission, a diffraction grating 5 is fixedly connected with a threaded fastening connector. The rate is 90%. A piezoelectric transducer 7 is fixedly installed on the left end of the bottom of the box body 9 with a threaded fastening connector. The relative dielectric constant of the piezoelectric transducer 7 is 1600, the mechanical quality factor is 80, and the electromechanical coupling coefficient is 0.35. Strain constant 300. The piezoelectric transducer 7 is used to generate axial deformation. The right end surface of the piezoelectric transducer 7 is bonded with a total reflection mirror 6. The total reflection mirror 6 is a plane mirror. The vacuum on the mirror surface of the total reflection mirror 6 is alternately evaporated. Coated with 4 layers of aluminum oxide and silicon dioxide full reflection film. The optical amplifier chip 3 is connected to the power supply to generate laser light, which is used as seed light. The seed light is emitted from the left end of the optical amplifier chip 3, and is shaped into an elliptical beam through the second collimating mirror 4, and is incident on the diffraction grating 5. By changing The angle of the diffraction grating 5 is used to select the mode of the seed light. The seed light after mode selection is incident on the total reflection mirror 6, and the total reflection mirror 6 and the left laser emission end surface of the optical amplifier chip 3 form a laser resonant external cavity to obtain laser light with a narrow linewidth. The seed light is reflected by the total reflection mirror 6 according to the original optical path and enters the optical amplification chip 3 for amplification.

在箱体9的底部光放大芯片3的右侧光出射方向上用螺纹紧固连接件固定联接安装有第一准直镜2,第一准直镜2为双凸透镜,双凸透镜的左凸面和右凸面的曲率半径为4.5mm,第一准直镜2的镜面上真空蒸镀14层二氧化锆增透膜。在箱体9的底部第一准直镜2的右侧光出射方向上用螺纹紧固连接件固定联接安装有柱透镜1,柱透镜1为平凸透镜,平凸透镜的左端面为平面、右端面为凸面,凸面的曲率半径为15mm,柱透镜1的镜面上真空蒸镀14层二氧化锆,制作柱透镜1的材料为N-BK7,箱体9的顶部用螺纹紧固联接件固定联接有顶盖8,顶盖8用硬铝加工而成。The first collimator mirror 2 is fixedly connected with the threaded fastening connector on the right side light exit direction of the light amplification chip 3 at the bottom of the casing 9, and the first collimator mirror 2 is a double-convex lens, and the left convex surface of the double-convex lens and The radius of curvature of the right convex surface is 4.5 mm, and 14 layers of zirconium dioxide anti-reflection coatings are vacuum-evaporated on the mirror surface of the first collimating mirror 2 . On the right side light exit direction of the first collimating mirror 2 at the bottom of the casing 9, a cylindrical lens 1 is fixedly connected with a threaded fastening connector, and the cylindrical lens 1 is a plano-convex lens. It is a convex surface, and the radius of curvature of the convex surface is 15 mm. On the mirror surface of the cylindrical lens 1, 14 layers of zirconia are vacuum-deposited. The material for making the cylindrical lens 1 is N-BK7. The top of the box body 9 is fixedly connected with a screw fastening connector Top cover 8, top cover 8 is processed with duralumin.

实施例2Example 2

在箱体9的底部光放大芯片3的左侧光出射方向上用螺纹紧固连接件固定联接安装有第二准直镜4,第二准直镜4为双凸透镜,双凸透镜的左凸面和右凸面的曲率半径为3mm,第二准直镜4的镜面上真空蒸镀12层二氧化锆增透膜。在箱体9的底部第二准直镜4的左侧光出射方向上用螺纹紧固连接件固定联接安装有衍射光栅5,衍射光栅5带宽为100GHz、刻线密度为400l/mm或透过率为85%。在压电换能器7的右端面上用胶粘接有全反射镜6,全反射镜6为平面镜,全反射镜6的镜面上真空交替蒸镀有2层三氧化二铝和二氧化硅全反膜。On the left side light exit direction of the light amplification chip 3 at the bottom of the casing 9, a second collimating mirror 4 is fixedly connected with a threaded fastening connector, and the second collimating mirror 4 is a double-convex lens, and the left convex surface of the double-convex lens and The radius of curvature of the right convex surface is 3 mm, and 12 layers of zirconium dioxide anti-reflection coatings are vacuum-evaporated on the mirror surface of the second collimating mirror 4 . On the left side of the second collimating mirror 4 at the bottom of the box 9 in the direction of light emission, a diffraction grating 5 is fixedly connected with a threaded fastening connector. The rate is 85%. A total reflection mirror 6 is glued on the right end surface of the piezoelectric transducer 7. The total reflection mirror 6 is a plane mirror. Two layers of aluminum oxide and silicon dioxide are alternately vacuum-evaporated on the mirror surface of the total reflection mirror 6. Full reflection film.

在箱体9的底部光放大芯片3的右侧光出射方向上用螺纹紧固连接件固定联接安装有第一准直镜2,第一准直镜2为双凸透镜,双凸透镜的左凸面和右凸面的曲率半径为4mm,第一准直镜2的镜面上真空蒸镀12层二氧化锆增透膜。在箱体9的底部第一准直镜2的右侧光出射方向上用螺纹紧固连接件固定联接安装有柱透镜1,柱透镜1为平凸透镜,平凸透镜的左端面为平面、右端面为凸面,凸面的曲率半径为14,柱透镜1的镜面上真空蒸镀10层二氧化锆增透膜,The first collimator mirror 2 is fixedly connected with the threaded fastening connector on the right side light exit direction of the light amplification chip 3 at the bottom of the casing 9, and the first collimator mirror 2 is a double-convex lens, and the left convex surface of the double-convex lens and The radius of curvature of the right convex surface is 4 mm, and 12 layers of zirconium dioxide anti-reflection coatings are vacuum-evaporated on the mirror surface of the first collimating mirror 2 . On the right side light exit direction of the first collimating mirror 2 at the bottom of the casing 9, a cylindrical lens 1 is fixedly connected with a threaded fastening connector, and the cylindrical lens 1 is a plano-convex lens. It is a convex surface, and the radius of curvature of the convex surface is 14. The mirror surface of the cylindrical lens 1 is vacuum-evaporated with 10 layers of zirconium dioxide anti-reflection coating.

其它零部件以及零部件的联接关系与实施例1相同。Other components and the coupling relationship of the components are the same as in Embodiment 1.

实施例3Example 3

在箱体9的底部光放大芯片3的左侧光出射方向上用螺纹紧固连接件固定联接安装有第二准直镜4,第二准直镜4为双凸透镜,双凸透镜的左凸面和右凸面的曲率半径为6mm,第二准直镜4的镜面上真空蒸镀18层二氧化锆增透膜。在箱体9的底部第二准直镜4的左侧光出射方向上用螺纹紧固连接件固定联接安装有衍射光栅5,衍射光栅5带宽为100GHz、刻线密度为600l/mm或透过率为95%。在压电换能器7的右端面上用胶粘接有全反射镜6,全反射镜6为平面镜,全反射镜6的镜面上真空交替蒸镀有8层三氧化二铝和二氧化硅全反膜。On the left side light exit direction of the light amplification chip 3 at the bottom of the casing 9, a second collimating mirror 4 is fixedly connected with a threaded fastening connector, and the second collimating mirror 4 is a double-convex lens, and the left convex surface of the double-convex lens and The radius of curvature of the right convex surface is 6 mm, and 18 layers of zirconium dioxide anti-reflection coatings are vacuum-evaporated on the mirror surface of the second collimating mirror 4 . On the left side of the second collimating mirror 4 at the bottom of the box 9 in the direction of light emission, a diffraction grating 5 is fixedly connected with a screw fastening connector. The rate is 95%. A total reflection mirror 6 is glued on the right end surface of the piezoelectric transducer 7, the total reflection mirror 6 is a plane mirror, and 8 layers of aluminum oxide and silicon dioxide are alternately vacuum-evaporated on the mirror surface of the total reflection mirror 6 Full reflection film.

在箱体9的底部光放大芯片3的右侧光出射方向上用螺纹紧固连接件固定联接安装有第一准直镜2,第一准直镜2为双凸透镜,双凸透镜的左凸面和右凸面的曲率半径为6mm,第一准直镜2的镜面上真空蒸镀18层二氧化锆增透膜。在箱体9的底部第一准直镜2的右侧光出射方向上用螺纹紧固连接件固定联接安装有柱透镜1,柱透镜1为平凸透镜,平凸透镜的左端面为平面、右端面为凸面,凸面的曲率半径为18mm,柱透镜1的镜面上真空蒸镀16层二氧化锆增透膜,The first collimator mirror 2 is fixedly connected with the threaded fastening connector on the right side light exit direction of the light amplification chip 3 at the bottom of the casing 9, and the first collimator mirror 2 is a double-convex lens, and the left convex surface of the double-convex lens and The radius of curvature of the right convex surface is 6 mm, and 18 layers of zirconium dioxide anti-reflection coatings are vacuum-evaporated on the mirror surface of the first collimating mirror 2 . On the right side light exit direction of the first collimating mirror 2 at the bottom of the casing 9, a cylindrical lens 1 is fixedly connected with a threaded fastening connector, and the cylindrical lens 1 is a plano-convex lens. It is a convex surface, and the radius of curvature of the convex surface is 18mm. The mirror surface of the cylindrical lens 1 is vacuum-evaporated with 16 layers of zirconium dioxide anti-reflection coating.

其它零部件以及零部件的联接关系与实施例1相同。Other components and the coupling relationship of the components are the same as in Embodiment 1.

实施例4Example 4

在以上的实施例1~3中,在第一准直镜2和第二准直镜4的镜面上真空蒸镀的增透膜为二氧化硅,增透膜的层数与相应的实施例相同。在柱透镜1的镜面上真空蒸镀的增透膜为二氧化硅增透膜,真空蒸镀的层数与相应的实施例相同。其它零部件以及零部件的联接关系与实施例1相同。In the above embodiments 1-3, the anti-reflection film vacuum-evaporated on the mirror surfaces of the first collimator mirror 2 and the second collimator mirror 4 is silicon dioxide, and the number of layers of the anti-reflection film is the same as that of the corresponding embodiment same. The anti-reflection film vacuum-evaporated on the mirror surface of the cylindrical lens 1 is a silicon dioxide anti-reflection film, and the number of vacuum-evaporated layers is the same as that in the corresponding embodiment. Other components and the coupling relationship of the components are the same as in Embodiment 1.

本发明的工作原理如下:The working principle of the present invention is as follows:

光放大芯片3与电源接通产生激光,做为种子光,种子光由光放大芯片3左端出射,经第二准直镜4整形成截面为椭圆形的光束,入射到衍射光栅5,通过改变衍射光栅5的角度来对种子光进行选模。选模后的种子光入射到全反射镜6,全反射镜6与光放大芯片3左侧激光出射端面构成激光谐振外腔,得到窄线宽的激光。种子光经全反射镜6按原光路反射进入光放大芯片3中进行放大。放大后的激光从光放大芯片3的右端出射,经第一准直镜2整形成截面为椭圆形的激光束,再经柱透镜1整形成截面为圆形的激光束,激光束从箱体9侧面的出射孔射出。The optical amplifier chip 3 is connected to the power supply to generate laser light, which is used as seed light. The seed light is emitted from the left end of the optical amplifier chip 3, and is shaped into an elliptical beam through the second collimating mirror 4, and is incident on the diffraction grating 5. By changing The angle of the diffraction grating 5 is used to select the mode of the seed light. The seed light after mode selection is incident on the total reflection mirror 6, and the total reflection mirror 6 and the left laser emission end surface of the optical amplifier chip 3 form a laser resonant external cavity to obtain laser light with a narrow linewidth. The seed light is reflected by the total reflection mirror 6 according to the original optical path and enters the optical amplification chip 3 for amplification. The amplified laser light exits from the right end of the optical amplification chip 3, and is shaped into a laser beam with an elliptical cross-section by the first collimating mirror 2, and then shaped into a circular laser beam with a circular cross-section by the cylindrical lens 1. 9 side exit holes shoot out.

Claims (5)

1.一种窄线宽大功率外腔激光器,其特征在于:在箱体(9)左右两侧壁上加工有出光孔,箱体(9)底部中间设置有光放大芯片(3),箱体(9)底部光放大芯片(3)左侧光出射方向设置有第二准直镜(4),箱体(9)的底部第二准直镜(4)左侧光出射方向设置有衍射光栅(5),箱体(9)底部左端设置有压电换能器(7),压电换能器(7)右端面上设置有全反射镜(6),箱体(9)底部光放大芯片(3)右侧光出射方向设置有第一准直镜(2),箱体(9)底部第一准直镜(2)右侧光出射方向设置有柱透镜(1),箱体(9)的顶部设置有顶盖(8)。1. A narrow-linewidth high-power external cavity laser, characterized in that: light holes are processed on the left and right side walls of the box (9), and an optical amplifier chip (3) is arranged in the middle of the bottom of the box (9). (9) The bottom light amplifier chip (3) is provided with a second collimator mirror (4) in the left light exit direction, and the second collimator mirror (4) at the bottom of the box (9) is provided with a diffraction grating in the left light exit direction (5), the left end of the bottom of the box (9) is provided with a piezoelectric transducer (7), the right end of the piezoelectric transducer (7) is provided with a total reflection mirror (6), and the light at the bottom of the box (9) is amplified The first collimating mirror (2) is installed on the right side of the chip (3) in the direction of light emission, and the first collimator (2) at the bottom of the box (9) is provided with a cylindrical lens (1) in the direction of light emission on the right side, and the box ( 9) is provided with a top cover (8). 2.根据权利要求1所述的窄线宽大功率外腔激光器,其特征在于:所述的第一准直镜(2)和第二准直镜(4)为双凸透镜,双凸透镜的左凸面和右凸面的曲率半径为3~6mm,双凸透镜的镜面上真空蒸镀12~18层二氧化锆或二氧化硅增透膜;所述的衍射光栅(5)是:带宽为100GHz、刻线密度为400~600l/mm或透过率为85%~95%;所述的压电换能器(7)的相对介电常数为1600,机械品质因数为80,机电耦合系数0.35,压电应变常数300;所述的全反射镜(6)为平面镜,全反射镜(6)的镜面上真空交替蒸镀有2~8层三氧化二铝和二氧化硅全反膜;所述的柱透镜(1)为平凸镜,平凸镜的左端面为平面、右端面为凸面,凸面的曲率半径为14~18mm,柱透镜(1)的镜面上真空蒸镀10~16层二氧化锆或二氧化硅增透膜。2. The narrow-linewidth high-power external cavity laser according to claim 1, characterized in that: the first collimating mirror (2) and the second collimating mirror (4) are double-convex lenses, and the left convex surface of the double-convex lens and the radius of curvature of the right convex surface is 3-6 mm, and 12-18 layers of zirconium dioxide or silicon dioxide anti-reflection coatings are vacuum-deposited on the mirror surface of the biconvex lens; the diffraction grating (5) is: a bandwidth of 100 GHz, a groove The density is 400-600l/mm or the transmittance is 85%-95%; the relative permittivity of the piezoelectric transducer (7) is 1600, the mechanical quality factor is 80, the electromechanical coupling coefficient is 0.35, and the piezoelectric The strain constant is 300; the total reflection mirror (6) is a flat mirror, and 2 to 8 layers of aluminum oxide and silicon dioxide total reflection films are alternately vacuum-evaporated on the mirror surface of the total reflection mirror (6); the column The lens (1) is a plano-convex mirror, the left end face of the plano-convex mirror is flat, the right end face is convex, and the radius of curvature of the convex face is 14-18mm, and 10-16 layers of zirconium dioxide are vacuum-deposited on the mirror surface of the cylindrical lens (1) or silica AR coating. 3.根据权利要求1所述的窄线宽大功率外腔激光器,其特征在于:所述的第一准直镜(2)和第二准直镜(4)为双凸透镜,双凸透镜的左凸面和右凸面的曲率半径为4.5mm,双凸透镜的镜面上真空蒸镀14层二氧化锆或二氧化硅增透膜;所述的衍射光栅(5)是:带宽为100GHz、刻线密度为500l/mm或透过率为90%;所述的压电换能器(7)的相对介电常数为1600,机械品质因数为80,机电耦合系数0.35,压电应变常数300;所述的全反射镜(6)为平面镜,全反射镜(6)的镜面上真空交替蒸镀有4层三氧化二铝和二氧化硅全反膜;所述的柱透镜(1)为平凸镜,平凸镜的左端面为平面、右端面为凸面,凸面的曲率半径为15mm,柱透镜(1)的镜面上真空蒸镀14层二氧化锆或二氧化硅增透膜。3. The narrow-linewidth high-power external cavity laser according to claim 1, characterized in that: the first collimating mirror (2) and the second collimating mirror (4) are double-convex lenses, and the left convex surface of the double-convex lens and the radius of curvature of the right convex surface is 4.5mm, and 14 layers of zirconium dioxide or silicon dioxide anti-reflection coatings are vacuum-evaporated on the mirror surface of the double-convex lens; the diffraction grating (5) described is: the bandwidth is 100GHz, and the groove density is 500l /mm or a transmittance of 90%; the relative permittivity of the piezoelectric transducer (7) is 1600, the mechanical quality factor is 80, the electromechanical coupling coefficient is 0.35, and the piezoelectric strain constant is 300; the full The reflecting mirror (6) is a flat mirror, and 4 layers of aluminum oxide and silicon dioxide total reflection films are alternately vacuum-evaporated on the mirror surface of the total reflecting mirror (6); the cylindrical lens (1) is a plano-convex mirror, flat The left end surface of the convex mirror is flat, the right end surface is convex, and the radius of curvature of the convex surface is 15 mm. On the mirror surface of the cylindrical lens (1), 14 layers of zirconium dioxide or silicon dioxide anti-reflection coatings are vacuum-evaporated. 4.根据权利要求2所述的窄线宽大功率外腔激光器,其特征在于:所述的第一准直镜(2)和第二准直镜(4)为双凸透镜,双凸透镜的左凸面和右凸面的曲率半径相同,双凸透镜的镜面上真空蒸镀12~18层二氧化锆或二氧化硅增透膜。4. The narrow-linewidth high-power external cavity laser according to claim 2, characterized in that: the first collimating mirror (2) and the second collimating mirror (4) are double-convex lenses, and the left convex surface of the double-convex lens The radius of curvature is the same as that of the right convex surface, and 12 to 18 layers of zirconium dioxide or silicon dioxide anti-reflection coatings are vacuum-deposited on the mirror surface of the double-convex lens. 5.根据权利要求2所述的窄线宽大功率外腔激光器,其特征在于:所述的第一准直镜(2)和第二准直镜(4)为双凸透镜,第二准直镜(4)的左凸面和右凸面的曲率半径以及所镀增透膜的材料和层数与第一准直镜(2)相同。5. The narrow-linewidth high-power external cavity laser according to claim 2, characterized in that: the first collimating mirror (2) and the second collimating mirror (4) are biconvex lenses, and the second collimating mirror The radius of curvature of the left convex surface and the right convex surface of (4) and the material and number of layers of the coated anti-reflection coating are the same as those of the first collimating mirror (2).
CN201310751231.1A 2013-12-30 2013-12-30 Narrow-line-width high-power external cavity laser Pending CN103647215A (en)

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Application publication date: 20140319