CN103575446A - Medium-measurement-range three-dimensional force sensor - Google Patents
Medium-measurement-range three-dimensional force sensor Download PDFInfo
- Publication number
- CN103575446A CN103575446A CN201310472529.9A CN201310472529A CN103575446A CN 103575446 A CN103575446 A CN 103575446A CN 201310472529 A CN201310472529 A CN 201310472529A CN 103575446 A CN103575446 A CN 103575446A
- Authority
- CN
- China
- Prior art keywords
- rectangular beam
- strain gauges
- boss
- terminal
- range
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims abstract description 19
- 230000035945 sensitivity Effects 0.000 abstract description 4
- 238000011160 research Methods 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011089 mechanical engineering Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- OFLYIWITHZJFLS-UHFFFAOYSA-N [Si].[Au] Chemical compound [Si].[Au] OFLYIWITHZJFLS-UHFFFAOYSA-N 0.000 description 1
- 230000009193 crawling Effects 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005021 gait Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011664 nicotinic acid Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000012549 training Methods 0.000 description 1
Images
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
本发明涉及一种中等量程三维力传感器,包括加载凸台,加载凸台外侧水平设有呈十字分布的前矩形梁、后矩形梁、左矩形梁和右矩形梁,左矩形梁和右矩形梁上、下两侧靠近加载凸台的部位分别设有应变片,左矩形梁和右矩形梁左、右两侧偏上靠近加载凸台的部位分别设有应变片,前矩形梁和后矩形梁左、右两侧偏上靠近加载凸台的部位分别设有应变片;前矩形梁、后矩形梁、左矩形梁和右矩形梁的外端均连接有固定凸台。本发明的有益效果为:体积小,结构简单,自重影响小,灵敏度高;能够消除载荷偏心影响,精度高;可以精确地测试体型较大生物(如人)运动过程中X、Y、Z三个方向上的接触力,可用于学术研究,亦可用于工业测量。
The invention relates to a medium-range three-dimensional force sensor, which includes a loading boss, and a front rectangular beam, a rear rectangular beam, a left rectangular beam and a right rectangular beam, and a left rectangular beam and a right rectangular beam are horizontally arranged on the outer side of the loading boss. Strain gauges are respectively provided on the upper and lower sides close to the loading boss, strain gauges are respectively arranged on the left and right sides of the left and right rectangular beams near the loading boss, and the front rectangular beam and the rear rectangular beam Strain gauges are provided on the upper parts of the left and right sides close to the loading boss; the outer ends of the front rectangular beam, the rear rectangular beam, the left rectangular beam and the right rectangular beam are all connected with fixed bosses. The beneficial effects of the present invention are: small volume, simple structure, small influence of self-weight, high sensitivity; can eliminate the influence of load eccentricity, high precision; The contact force in one direction can be used for academic research as well as for industrial measurement.
Description
技术领域 technical field
本发明涉及测力技术领域,特别是涉及一种中等量程三维力传感器。 The invention relates to the technical field of force measurement, in particular to a medium-range three-dimensional force sensor.
背景技术 Background technique
通过研究动物运动,动物脚掌与爬行表面之间的接触力,可以揭示动物在复杂环境下运动的规律,为设计出能适应各种工况的机器人,提供运动机构、步态等方面的仿生力学资料。 By studying the animal movement, the contact force between the animal's sole and the crawling surface, the law of animal movement in a complex environment can be revealed, and the bionic mechanics of the motion mechanism and gait can be provided for the design of robots that can adapt to various working conditions. material.
1994年,清华大学张国华等研制双杠三维测力系统。该系统由安装在双杠四根支脚上的4个三维测力传感器、动态应变仪、7T17S数字信号处理机组成,可提供各种实时处理的测量数据及图形。经运动员实际测试,取得了比较满意的结果,可用于双杠运动员的实际训练中。传感器采用径向受压圆环结合圆柱受弯形式来测定三维力。应变片组全桥。竖直方向(z 方向)量程2000N,水平方向(x、y方向)量程1000N,测力误差在5%以内。 In 1994, Zhang Guohua of Tsinghua University and others developed a three-dimensional force measurement system for parallel bars. The system is composed of 4 three-dimensional load cells installed on the four feet of the parallel bars, dynamic strain gauges, and 7T17S digital signal processor, which can provide various real-time processed measurement data and graphics. Through the actual test of the athletes, relatively satisfactory results have been obtained, which can be used in the actual training of parallel bars athletes. The sensor adopts the radial compression ring combined with the cylindrical bending form to measure the three-dimensional force. Strain gauge group full bridge. The vertical direction (z direction) range is 2000N, the horizontal direction (x, y direction) range is 1000N, and the force measurement error is within 5%.
2002年,合肥智能机械所孙怡宁等设计出了一种新型的三维力传感器。考虑了传统力学量传感器的动力学性能和静态标定指标等特性,对其各维灵敏度及维间耦合系数等指标予以充分考虑。结构设计时做到了对所测维的力有较好的灵敏度,而对于非所测维力尽可能不灵敏,这样使维间耦合小,同时保证整个结构有足够的刚度。三个方向的力量程均为0~3000N。 In 2002, Sun Yining of Hefei Institute of Intelligent Machinery and others designed a new type of three-dimensional force sensor. Considering the characteristics of dynamic performance and static calibration index of the traditional mechanical quantity sensor, the sensitivity of each dimension and the coupling coefficient between dimensions are fully considered. The structural design achieves good sensitivity to the force of the measured dimension, and is as insensitive as possible to the force of the non-measured dimension, so that the coupling between dimensions is small, and at the same time, the entire structure has sufficient stiffness. The force range of the three directions is 0~3000N.
新加坡南洋科技大学机械工程学院和美国加州大学伯克利分校机械工程系的WL.Jin在1998年共同研发的三维力传感器,采用硅微制造技术将传感器的敏感元件与弹性元件通过硅衬底制作工艺和硅-金共价键技术集成在一起,传感器的元件四个膜片的每一片都与两个惠斯通电桥集成,外力作用于承载层通过敏感层的硅十字传感器传给弹性层,弹性层的位移又以剪切力和轴向力形式传递给敏感层的膜片,利用惠斯通电桥来检测。 In 1998, the three-dimensional force sensor was jointly developed by the School of Mechanical Engineering of Nanyang Technological University in Singapore and WL.Jin of the Department of Mechanical Engineering of the University of California, Berkeley. Silicon-gold covalent bond technology is integrated together. Each of the four diaphragms of the sensor element is integrated with two Wheatstone bridges. The external force acts on the bearing layer and transmits it to the elastic layer through the silicon cross sensor of the sensitive layer. The elastic layer The displacement is transmitted to the diaphragm of the sensitive layer in the form of shear force and axial force, and is detected by a Wheatstone bridge.
市场上现有的中等量程的三维力传感器要么尺寸偏大,精度不高,要么价格昂贵,并不能完全的适合于科学研究和市场应用需求。因此必须研制出精度高,尺寸小,易于安装且相对便宜的三维力传感器。 The existing medium-range three-dimensional force sensors on the market are either large in size, low in accuracy, or expensive, and are not completely suitable for scientific research and market application requirements. Therefore, it is necessary to develop a three-dimensional force sensor with high precision, small size, easy installation and relatively cheap.
发明内容 Contents of the invention
本发明的目的是提供一种中等量程三维力传感器,以克服现有技术存在的上述不足。 The object of the present invention is to provide a medium-range three-dimensional force sensor to overcome the above-mentioned shortcomings in the prior art.
本发明的目的是通过以下技术方案来实现: The purpose of the present invention is to realize through the following technical solutions:
一种中等量程三维力传感器,包括加载凸台,所述加载凸台的中心设有中心螺纹孔;所述加载凸台外侧水平设有呈十字分布的前矩形梁、后矩形梁、左矩形梁和右矩形梁,所述左矩形梁和右矩形梁上、下两侧靠近加载凸台的部位分别设有应变片R1和R2、应变片R4和R3,所述左矩形梁和右矩形梁左、右两侧偏上靠近加载凸台的部位分别设有应变片R5和R8、应变片R6和R7,所述前矩形梁和后矩形梁左、右两侧偏上靠近加载凸台的部位分别设有应变片R9和R12、应变片R10和R11;所述前矩形梁、后矩形梁、左矩形梁和右矩形梁的外端均连接有固定凸台,所述固定凸台的中心均设有固定孔;所述固定凸台上设有接线端子一、接线端子二和接线端子三。 A medium-range three-dimensional force sensor, including a loading boss, the center of the loading boss is provided with a central threaded hole; the outer side of the loading boss is horizontally provided with a front rectangular beam, a rear rectangular beam, and a left rectangular beam distributed in a cross and the right rectangular beam, the upper and lower sides of the left rectangular beam and the right rectangular beam are respectively provided with strain gauges R1 and R2, strain gauges R4 and R3 near the loading boss, and the left rectangular beam and the right rectangular beam are left , The parts on the upper right sides close to the loading boss are provided with strain gauges R5 and R8, strain gauges R6 and R7 respectively, and the parts on the left and right sides of the front rectangular beam and the rear rectangular beam near the loading boss are respectively Strain gauges R9 and R12, strain gauges R10 and R11 are provided; the outer ends of the front rectangular beam, the rear rectangular beam, the left rectangular beam and the right rectangular beam are all connected with fixed bosses, and the centers of the fixed bosses are all provided with There are fixing holes; the first connecting terminal, the second connecting terminal and the third connecting terminal are arranged on the fixing boss.
进一步的,所述应变片R1、R2、R3和R4组成惠斯通全桥,并将电压测量端接至接线端子一。 Further, the strain gauges R1, R2, R3 and R4 form a Wheatstone full bridge, and the voltage measurement terminal is connected to terminal one.
进一步的,所述应变片R5、R6、R7和R8组成惠斯通全桥,并将电压测量端接至接线端子二。 Further, the strain gauges R5, R6, R7 and R8 form a Wheatstone full bridge, and connect the voltage measurement terminal to the terminal two.
进一步的,所述应变片R9、R10、R11和R12组成惠斯通全桥,并将电压测量端接至接线端子三。 Further, the strain gauges R9, R10, R11 and R12 form a Wheatstone full bridge, and connect the voltage measurement terminal to terminal three.
进一步的,所述前矩形梁和后矩形梁同轴,所述左矩形梁和右矩形梁同轴,所述前矩形梁和左矩形梁相互垂直,所述前矩形梁、后矩形梁、左矩形梁和右矩形梁的中心线交点与加载凸台的中心重合。 Further, the front rectangular beam and the rear rectangular beam are coaxial, the left rectangular beam and the right rectangular beam are coaxial, the front rectangular beam and the left rectangular beam are perpendicular to each other, and the front rectangular beam, rear rectangular beam, left The intersection of the centerlines of the rectangular beam and the right rectangular beam coincides with the center of the loading boss.
进一步的,所述加载凸台的高度大于固定凸台的高度。 Further, the height of the loading boss is greater than that of the fixing boss.
本发明的有益效果为:体积小,结构简单,自重影响小,灵敏度高;能够消除载荷偏心影响,精度高; 可以精确地测试体型较大生物(如人)运动过程中X、Y、Z三个方向上的接触力,可用于学术研究,亦可用于工业测量。 The beneficial effects of the present invention are: small size, simple structure, small influence of self-weight, high sensitivity; can eliminate the influence of load eccentricity, high precision; can accurately test the X, Y, Z three dimensions of a larger creature (such as a person) during movement. The contact force in one direction can be used for academic research as well as for industrial measurement.
附图说明 Description of drawings
下面根据附图对本发明作进一步详细说明。 The present invention will be described in further detail below according to the accompanying drawings.
图1是本发明实施例所述中等量程三维力传感器的结构示意图; Fig. 1 is a schematic structural view of a medium-range three-dimensional force sensor according to an embodiment of the present invention;
图2是图1的仰视图的剖面图; Figure 2 is a sectional view of the bottom view of Figure 1;
图3是本发明实施例所述应变片R1、R2、R3、R4组成的惠斯通全桥电路图; Fig. 3 is a Wheatstone full-bridge circuit diagram composed of strain gauges R1, R2, R3 and R4 according to the embodiment of the present invention;
图4是本发明实施例所述应变片R5、R6、R7、R8组成的惠斯通全桥电路图; Fig. 4 is a Wheatstone full-bridge circuit diagram composed of strain gauges R5, R6, R7, R8 according to the embodiment of the present invention;
图5是本发明实施例所述应变片R9、R10、R11、R12组成的惠斯通全桥电路图; Fig. 5 is a Wheatstone full-bridge circuit diagram composed of strain gauges R9, R10, R11 and R12 according to the embodiment of the present invention;
图6是本发明实施例所述中等量程三维力传感器的数据采集设备的结构框图。 Fig. 6 is a structural block diagram of a data acquisition device for a medium-range three-dimensional force sensor according to an embodiment of the present invention.
图中: In the picture:
R1、R2、R3、R4、R5、R6、R7、R8、R9、R10、R11、R12:应变片; R1, R2, R3, R4, R5, R6, R7, R8, R9, R10, R11, R12: strain gauges;
1、固定凸台;2、前矩形梁;3、后矩形梁;4、左矩形梁;5、右矩形梁;6、加载凸台;7、固定孔;8、中心螺纹孔;U、直流电源;Ui、电压测量端;Ⅰ、接线端子一;Ⅱ、接线端子二;Ⅲ、接线端子三。
1. Fixed boss; 2. Front rectangular beam; 3. Rear rectangular beam; 4. Left rectangular beam; 5. Right rectangular beam; 6. Loading boss; 7. Fixing hole; 8. Central threaded hole; U, DC Power supply; Ui, voltage measuring terminal; Ⅰ,
具体实施方式 Detailed ways
如图1-6所示,本发明实施例所述的一种中等量程三维力传感器,包括加载凸台6,所述加载凸台6的中心设有中心螺纹孔8;所述加载凸台6外侧水平设有呈十字分布的前矩形梁2、后矩形梁3、左矩形梁4和右矩形梁5,所述左矩形梁4和右矩形梁5上、下两侧靠近加载凸台6的部位分别设有应变片R1和R2、应变片R4和R3,所述左矩形梁4和右矩形梁5左、右两侧偏上靠近加载凸台6的部位分别设有应变片R5和R8、应变片R6和R7,所述前矩形梁2和后矩形梁3左、右两侧偏上靠近加载凸台6的部位分别设有应变片R9和R12、应变片R10和R11;所述前矩形梁2、后矩形梁3、左矩形梁4和右矩形梁5的外端均连接有固定凸台1,所述固定凸台1的中心均设有固定孔7;所述固定凸台1上设有接线端子一Ⅰ、接线端子二Ⅱ和接线端子三Ⅲ。
As shown in Figures 1-6, a medium-range three-dimensional force sensor described in the embodiment of the present invention includes a
所述前矩形梁2和后矩形梁3同轴,所述左矩形梁4和右矩形梁5同轴,所述前矩形梁2和左矩形梁4相互垂直,所述前矩形梁2、后矩形梁3、左矩形梁4和右矩形梁5的中心线交点与加载凸台6的中心重合。
The front
所述加载凸台6的高度大于固定凸台1的高度。加载凸台6底面与固定凸台1底面有0.5mm的间隙用于实现机械保护,加载凸台6上表面比固定凸台1高2mm左右以便于加载。
The height of the
前矩形梁2、后矩形梁3、左矩形梁4和右矩形梁5均为较薄的矩形截面梁。
The front
如图3,所述应变片R1、R2、R3和R4组成惠斯通全桥,并将电压测量端Ui接至接线端子一Ⅰ;应变片R1、R2、R4和R3顺序串联组成惠斯通全桥,电压测量端Ui一端接至R1和R2之间,另一端接至R3和R4之间;直流电源U一端接至R1和R3之间,另一端接至R2和R4之间。该惠斯通全桥用于测量附图1或2所示的Z方向力Fz的大小。
As shown in Figure 3, the strain gauges R1, R2, R3 and R4 form a Wheatstone full bridge, and the voltage measurement terminal Ui is connected to
如图4,所述应变片R5、R6、R7和R8组成惠斯通全桥,并将电压测量端Ui接至接线端子二Ⅱ;应变片R5、R6、R8和R7顺序串联组成惠斯通全桥,电压测量端Ui一端接至R5和R6之间,另一端接至R7和R8之间;直流电源U一端接至R5和R7之间,另一端接至R6和R8之间。该惠斯通全桥用于测量附图1或2所示的Y方向力Fy的大小。 As shown in Figure 4, the strain gauges R5, R6, R7 and R8 form a Wheatstone full bridge, and the voltage measurement terminal Ui is connected to terminal II II; the strain gauges R5, R6, R8 and R7 are sequentially connected in series to form a Wheatstone bridge For a full bridge, one end of the voltage measurement terminal Ui is connected between R5 and R6, and the other end is connected between R7 and R8; one end of the DC power supply U is connected between R5 and R7, and the other end is connected between R6 and R8. The Wheatstone full bridge is used to measure the magnitude of the Y-direction force Fy shown in Fig. 1 or Fig. 2 .
如图5,所述应变片R9、R10、R11和R12组成惠斯通全桥,并将电压测量端Ui接至接线端子三Ⅲ;应变片R9、R10、R12和R11顺序串联组成惠斯通全桥,电压测量端Ui一端接至R9和R10之间,另一端接至R11和R12之间;直流电源U一端接至R9和R11之间,另一端接至R10和R12之间。该惠斯通全桥用于测量附图1或2所示的X方向力Fx的大小。 As shown in Figure 5, the strain gauges R9, R10, R11 and R12 form a Wheatstone full bridge, and the voltage measurement terminal Ui is connected to terminal III III; the strain gauges R9, R10, R12 and R11 are sequentially connected in series to form a Wheatstone bridge For a full bridge, one end of the voltage measurement terminal Ui is connected between R9 and R10, and the other end is connected between R11 and R12; one end of the DC power supply U is connected between R9 and R11, and the other end is connected between R10 and R12. The Wheatstone full bridge is used to measure the magnitude of the X-direction force Fx shown in Fig. 1 or Fig. 2 .
通过图3、图4、图5所示的应变片桥式电路,将中等量程三维力传感器上的应变片的阻值变化变成电压变化并输出。 Through the strain gauge bridge circuit shown in Fig. 3, Fig. 4 and Fig. 5, the resistance value change of the strain gauge on the medium-range three-dimensional force sensor is converted into a voltage change and output.
使用时,将四个固定凸台1分别用螺栓固定在基础上,将加载凸台6与承力板相连接,将接线端子一Ⅰ、接线端子二Ⅱ和接线端子三Ⅲ引出的三个电压测量端Ui测量到的电压经放大电路放大后进行数据采集,并将采集到的数据导入PC终端(图6)。
When in use, fix the four
当在加载凸台6顶部受到Z方向力时,水平梁受弯,两端将产生较大应变。通过第一组电桥的应变片R1、R2、R3、R4可测量水平梁上下表面应变值,即可换算得到Z方向力Fz的大小;当在加载凸台6顶部受到X方向力时,前矩形梁2和后矩形梁3同时受轴向拉压和弯曲作用,左矩形梁4和右矩形梁5同时受弯曲和扭转作用。考虑到前矩形梁2和后矩形梁3是该方向上的主要支撑,选择应变片R9、R10、R11、R12组桥可以测出X方向力Fx的大小,并能够得到较大的应变;同理,选择应变片R5、R6、R7、R8组桥可以测出Y方向力Fy的大小,并能够得到较大的应变。
When a force in the Z direction is applied to the top of the
传感器的整体尺寸优选在75mm×75mm×15mm范围内,矩形截面梁的尺寸优选13mm×8mm×4mm。测力量程优选Fz为2000N、Fx和Fy为1000N。 The overall size of the sensor is preferably in the range of 75mm×75mm×15mm, and the size of the rectangular cross-section beam is preferably 13mm×8mm×4mm. The measurement range is preferably 2000N for Fz, and 1000N for Fx and Fy.
本发明不局限于上述最佳实施方式,任何人在本发明的启示下都可得出其他各种形式的产品,但不论在其形状或结构上作任何变化,凡是具有与本申请相同或相近似的技术方案,均落在本发明的保护范围之内。 The present invention is not limited to the above-mentioned best implementation mode, anyone can draw other various forms of products under the inspiration of the present invention, but no matter make any changes in its shape or structure, all those with the same or similar features as the present application Approximate technical solutions all fall within the protection scope of the present invention.
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310472529.9A CN103575446B (en) | 2013-10-11 | 2013-10-11 | A kind of Medium-measurement-rthree-dimensional three-dimensional force sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310472529.9A CN103575446B (en) | 2013-10-11 | 2013-10-11 | A kind of Medium-measurement-rthree-dimensional three-dimensional force sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103575446A true CN103575446A (en) | 2014-02-12 |
CN103575446B CN103575446B (en) | 2016-04-27 |
Family
ID=50047714
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310472529.9A Expired - Fee Related CN103575446B (en) | 2013-10-11 | 2013-10-11 | A kind of Medium-measurement-rthree-dimensional three-dimensional force sensor |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN103575446B (en) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105832361A (en) * | 2016-06-03 | 2016-08-10 | 深圳柏斯生物科技有限公司 | Electric booster for X-ray machine and control method thereof |
CN106768523A (en) * | 2017-02-14 | 2017-05-31 | 南京泽荣自动化系统有限责任公司 | A kind of press tonnage measuring method and its device |
CN108225622A (en) * | 2017-12-25 | 2018-06-29 | 广州中国科学院工业技术研究院 | A kind of three-dimensional force sensor |
CN108801503A (en) * | 2017-04-21 | 2018-11-13 | 意法半导体股份有限公司 | Strain gauge for the health status for monitoring fabricated construction |
CN108972601A (en) * | 2018-08-10 | 2018-12-11 | 佛山科学技术学院 | A kind of end effector perceiving three-dimensional force |
CN109060194A (en) * | 2018-10-12 | 2018-12-21 | 苏州科技大学 | Load cell |
CN109702710A (en) * | 2017-10-26 | 2019-05-03 | 深圳市肯綮科技有限公司 | A kind of foot device and its lower limb power assistive device of detectable plantar pressure |
CN109974916A (en) * | 2019-04-03 | 2019-07-05 | 东南大学 | A structure of a variable pole distance capacitive three-dimensional force sensor |
CN110608837A (en) * | 2019-10-30 | 2019-12-24 | 南京神源生智能科技有限公司 | A small-scale three-dimensional sensor and its testing method |
US10737929B2 (en) | 2017-04-26 | 2020-08-11 | Stmicroelectronics S.R.L. | Trench-based microelectromechanical transducer and method for manufacturing the microelectromechanical transducer |
CN111855043A (en) * | 2020-07-31 | 2020-10-30 | 长飞光纤光缆股份有限公司 | Fiber grating soil pressure sensor |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4448083A (en) * | 1981-04-13 | 1984-05-15 | Yamato Scale Company, Ltd. | Device for measuring components of force and moment in plural directions |
DE4012829A1 (en) * | 1990-04-23 | 1991-10-24 | Walter Rieger | Multi-indensional force measurement - has string gauges, piezoelectric sensors on membrane arms with three=dimensional force input hub |
JP2004045044A (en) * | 2002-07-08 | 2004-02-12 | Kansai Tlo Kk | 6-axis inner force sense sensor |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0311695B1 (en) * | 1987-04-24 | 1994-11-30 | Enplas Laboratories, Inc. | Force and moment detector using resistor |
KR100199691B1 (en) * | 1997-05-19 | 1999-06-15 | 김동진 | 6 component load cell |
-
2013
- 2013-10-11 CN CN201310472529.9A patent/CN103575446B/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4448083A (en) * | 1981-04-13 | 1984-05-15 | Yamato Scale Company, Ltd. | Device for measuring components of force and moment in plural directions |
DE4012829A1 (en) * | 1990-04-23 | 1991-10-24 | Walter Rieger | Multi-indensional force measurement - has string gauges, piezoelectric sensors on membrane arms with three=dimensional force input hub |
JP2004045044A (en) * | 2002-07-08 | 2004-02-12 | Kansai Tlo Kk | 6-axis inner force sense sensor |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105832361A (en) * | 2016-06-03 | 2016-08-10 | 深圳柏斯生物科技有限公司 | Electric booster for X-ray machine and control method thereof |
CN106768523A (en) * | 2017-02-14 | 2017-05-31 | 南京泽荣自动化系统有限责任公司 | A kind of press tonnage measuring method and its device |
CN108801503A (en) * | 2017-04-21 | 2018-11-13 | 意法半导体股份有限公司 | Strain gauge for the health status for monitoring fabricated construction |
US10935444B2 (en) | 2017-04-21 | 2021-03-02 | Stmicroelectronics S.R.L. | Stress sensor for monitoring the health state of fabricated structures such as constructions, buildings, infrastructures and the like |
US10737929B2 (en) | 2017-04-26 | 2020-08-11 | Stmicroelectronics S.R.L. | Trench-based microelectromechanical transducer and method for manufacturing the microelectromechanical transducer |
CN109702710A (en) * | 2017-10-26 | 2019-05-03 | 深圳市肯綮科技有限公司 | A kind of foot device and its lower limb power assistive device of detectable plantar pressure |
CN108225622A (en) * | 2017-12-25 | 2018-06-29 | 广州中国科学院工业技术研究院 | A kind of three-dimensional force sensor |
CN108972601A (en) * | 2018-08-10 | 2018-12-11 | 佛山科学技术学院 | A kind of end effector perceiving three-dimensional force |
CN108972601B (en) * | 2018-08-10 | 2024-03-26 | 佛山科学技术学院 | End effector capable of sensing three-dimensional force |
CN109060194A (en) * | 2018-10-12 | 2018-12-21 | 苏州科技大学 | Load cell |
CN109060194B (en) * | 2018-10-12 | 2023-11-24 | 苏州科技大学 | Force transducer |
CN109974916A (en) * | 2019-04-03 | 2019-07-05 | 东南大学 | A structure of a variable pole distance capacitive three-dimensional force sensor |
CN109974916B (en) * | 2019-04-03 | 2020-12-29 | 东南大学 | A structure of a variable pole distance capacitive three-dimensional force sensor |
CN110608837A (en) * | 2019-10-30 | 2019-12-24 | 南京神源生智能科技有限公司 | A small-scale three-dimensional sensor and its testing method |
CN110608837B (en) * | 2019-10-30 | 2024-05-31 | 南京神源生智能科技有限公司 | Small-range three-dimensional sensor and testing method thereof |
CN111855043A (en) * | 2020-07-31 | 2020-10-30 | 长飞光纤光缆股份有限公司 | Fiber grating soil pressure sensor |
Also Published As
Publication number | Publication date |
---|---|
CN103575446B (en) | 2016-04-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN103575446A (en) | Medium-measurement-range three-dimensional force sensor | |
CN100412521C (en) | Three-dimensional force sensor with a range of 0-1.5N | |
CN103091026B (en) | Parallel structure six-dimension force sensor | |
CN101419102B (en) | Ultra-thin six-dimensional force sensor and method for measuring three-dimensional force and three-dimensional torque information | |
CN103983383B (en) | A kind of sensitive element of the 3 dimension Micro-force sensors based on compliant mechanism | |
CN206348091U (en) | A kind of cross beam type 3-dimensional force snesor based on compliant mechanism | |
CN103575435B (en) | For the three-dimensional force sensor of automobile axle test macro | |
Tavakolpour-Saleh et al. | A novel multi-component strain-gauge external balance for wind tunnel tests: Simulation and experiment | |
CN102183331B (en) | Six-dimensional force sensor | |
CN104697677B (en) | A kind of piezomagnetic strain gauge | |
CN105841857B (en) | A kind of parallel five-dimensional force sensor | |
CN105841874B (en) | A kind of restructural type parallel connection multi-dimension force sensor | |
CN102175137A (en) | Extensometer for measuring micro-deformation of component | |
CN108931326A (en) | A kind of strain gauge transducer and working method measuring soil pressure | |
CN211234320U (en) | High-precision fiber grating inclinometer with temperature compensation function | |
CN202101810U (en) | Tensile test device used for comparing calibration of stress sensor | |
KR19980068244A (en) | Parallel 6-axis force-moment measuring device | |
CN103995151A (en) | Composite eight-beam high-frequency-response acceleration sensor chip | |
CN103353365A (en) | Point-contact pin-type force sensor | |
CN103323155A (en) | Tension sensor and system for container | |
CN100468018C (en) | An open type anti-eccentric load sensor with three elastic columns | |
CN106092391B (en) | A kind of split type 2 D force sensor | |
CN105424256B (en) | A kind of decoupling type 6 DOF force checking device | |
CN217211068U (en) | Weighing force-measuring sensor adopting star-shaped bridge | |
CN206300744U (en) | Bending Moment Measurement Sensor Based on Bending Effect of Piezoelectric Quartz Wafer |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160427 |
|
CF01 | Termination of patent right due to non-payment of annual fee |