CN103557991A - Method and device for calibrating vacuum gauge for measuring pressure - Google Patents
Method and device for calibrating vacuum gauge for measuring pressure Download PDFInfo
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Abstract
The invention discloses a method and device for calibrating a vacuum gauge for measuring pressure. The method mainly comprises data inputting, self-calibrating for data generating and field calibrating and amending. The calibrating device mainly comprises a thermal conductance type gauge tube, a gauge tube working and detecting circuit, a multi-channel analog-digital conversion circuit and a data inputting and processing circuit. An electrical signal of the thermal conductance type gauge tube is output by a gauge tube heating measuring circuit in the gauge tube working and detecting circuit, then is matched through an amplifying circuit in a data inputting and processing circuit and an analog multi-way switch to be transmitted to the analog-digital conversion circuit to be converted into a digital signal, and the digital signal is processed by a microprocessor to be transmitted to a displayer to be displayed or to a memorizer to be stored. According to the method and device, the data are input and automatically amended with simple operation, the method for amending the data is visual, selectable and wide in application range, and the indicating value is amended fast.
Description
Technical field
The present invention relates to vacuum measurement technical field, be specifically related to a kind of for tonometric vacuum gauge calibration method and device thereof.
Background technology
Vacuum meter (Vacuum Gauge), claims again vacuum meter, is the instrument of measurement of vacuum or air pressure.Generally to utilize the variation of certain physical influence of gas under different air pressure to carry out the measurement of air pressure.In scientific research and commercial production, be widely used.
Vacuum gauge calibration is common work in vacuum meter manufacture and use, and vacuum meter forms by regulating with equipment circuit conventionally.Dissimilar regulating is applicable to different vacuum tightness, and as ionization gauge, cold rule are applicable to high vacuum, heat-conducted rule are for low vacuum, two or more compoundly can realize the measurement of vacuum range from low to high.Vacuum gauge major part is the relative vacuum rule relevant with gaseous species, and the calibration curve of regulating is difficult to determine by calculating, and conventionally only makes Qualitative calculate, even if use the curve calculating, and accurately quantitatively finally will be by experimental verification.Vacuum gauge has scattered property, as the Pirani gauge of heat-conducted class can reach 25%, thermocouple rule reach 20～30 %, with permissible error 20～50% after the integral body of the electric circuit constitute instrument, therefore in instrument production run, often takes by platform debugging and calibration.Thermal conductance rule are within the cycle in serviceable life, and sensitivity and zero point can change, and therefore curve can be subjected to displacement, and need regularly calibrate.Calibration is the necessary links of guaranteeing instrument production quality and result of use.
Accurately whether judging according to vertification regulation or calibrating standard (as JJF1050-1996) conduct of vacuum meter, is aligned in several situations and carries out: 1, production debugging and the quality restriction in the manufacture of vacuum meter; 2, regulate supporting with instrument or change and regulate; 3, instrument periodic verification; 4, user is in use for the detection of instrument accuracy grade.
When calibration data shows to be exceeded allowed band by the school vacuum meter error of indication, during vacuum meter misalignment, existing disposal route is as follows respectively: 1, adjust mimic channel running parameter, as adjustable elements such as potentiometers; 2, change and regulate or circuit component; 3, to the regulating of compensating circuit, adjust running parameter; 4, each only corrected parameter of regulating, deposits in chip and to support the use with regulating.
Owing to regulating the impact of the factors such as the discreteness of manufacturing tolerance, material, aging, temperature, make every accuracy of regulating after supporting from instrument all different; Regulating because of structural principle of different types is different, and influence factor separately, modification method and parameter are also different.At present usual method is each only corrected parameter of regulating according to factory calibrated, and deposits in chip and to support the use with regulating, and as patent CN101084422A, CN202403867 U, to regulating, does personalization modification.In fact, through regulating of revising one by one, the whole result after supporting with instrument, the method also still being provided by calibrating standard is as final inspection.Above method the 1,2, the 3rd, conventional analog circuits method, relies on scope and the effect of hardware adjustment limited.Above method 4 is existing methods that generally adopt, by correction parameter deposit in regulate with instrument in memory chip, to improve the accuracy of vacuum meter, its feature is: for regulating, make personalized corrected parameter, being created in outside instrument of corrected parameter, after completing, parameter deposits instrument in, during for instrument work, calls.The method must be by professional through using the reading of standard vacuum gauge as standard, with by the reading of school vacuum meter, compared, record, analyze, calculate and again input a series of activities such as instrument, conventionally each by carrying out by hand, data are knocked in, software is called in and opened, the operation of computing and input and output, the main artificial treatment that relies on, time-consuming and loaded down with trivial details.
Summary of the invention
For above-mentioned prior art, order of the present invention is to provide a kind of and takes into account vacuum meter method for self-calibrating for tonometric vacuum, its scope and effect that is intended to solve existing current dependence hardware adjustment is limited, and existing method mainly relies on artificial treatment, time-consuming and loaded down with trivial details technical matters.
In order to solve the problems of the technologies described above, the present invention adopts following technical scheme:
A tonometric vacuum gauge calibration method, is characterized in that, the method mainly comprises the steps: data input, the generation of self calibration data, field calibration and data correction;
The input of described data: the standard value of some serial calibration points and the input of measured value, standard value determined in advance and inputted, measured value triggers input in real time; Measured value, in real time calibration, waits for that pressure reaches a certain standard value again to triggering input action, and this standard value is corresponding is worth corresponding input by school;
Described self calibration data generate: in calibrating and measuring process, directly input after data, form raw data, according to method of interpolation tabulation and curve for the raw data of input;
Described field calibration: determine and trigger according to standard value, and record and preserve to come from this moment and regulate measurement voltage signal, using standard value as functional value, voltage is as interpolation knot value; Multiple spot repetitive operation thus, obtains a series of functional value and nodal value, then applies method of interpolation and construct the function table of whole measurement range (Pa ~ V), asks if desired fitting formula P=f (v);
Described data correction: under measuring state,, and be converted to vacuum values and show through tabling look-up or formula calculates and makes calibration correction according to the real time data of regulating.
Self-calibrating device provided by the invention, it is characterized in that, comprise and heat-conductedly regulate, ionization gauge, regulate work and testing circuit, hyperchannel analog to digital conversion circuit, data input and treatment circuit, the regulate heating metering circuit of described heat-conducted electric signal of regulating in the work of regulating and testing circuit exported, by data, inputted again and treatment circuit in amplifying circuit and analog multichannel switch coupling transfer to analog to digital converter (ADC) and convert digital signal to, this digital signal reaches display and shows or reach storer and preserve after microcontroller is processed.
In described storer, deposit normal pressure data, measured data, form and the fitting formula of predetermined calibration point.
Described regulate heating and metering circuit comprise bridge diagram, differential amplifier and adjustment pipe.
Self-calibrating device in the present invention also comprises the hardware combinations key of data input operation while realizing calibration return to zero key, options button, enter key.
Self-calibrating device in the present invention also comprises for showing the screen of the intelligent display with membrane keyboard of multiple spot calibration value.
In conjunction with above-mentioned self-calibrating apparatus, described method for self-calibrating, is characterized in that, comprises the steps:
digital zero setting, gets zero point level and is kept at chip internal;
select calibration point N to show;
In conjunction with above-mentioned self-calibrating apparatus, described method for self-calibrating, is characterized in that, comprises the steps:
judge whether calibration point N input triggers;
Compared with prior art, the present invention has following beneficial effect:
One, the present invention makes data input also automatically realize the correction of data with simple operations, it is a kind of method of parameter generating, be applicable to process and regulate that characteristic is known, good stability, but the not good measuring error causing of consistance is also applicable to the calibration of regulating relevant with gaseous species.
Two, the present invention need not commonly input data by turn, also must not add the hardware devices such as microcomputer and serial ports on line, and the input of every group of long numeric data only has several keys, and operating process action is terse; Processing after data acquisition completes by the chip one-time continuous in module, has replaced loaded down with trivial details manual operations, at vacuum meter manufacturing process alignment, demarcates and once completes; Make module, when regulating after range of signal mates with ADC, just can Fast Calibration, revise pressure data and show, can alleviate calibration operation amount, improving production efficiency in a word.
Three, the present invention is fast and convenient, and the method for revising data is intuitively optional, wide accommodation, and range choosing is quick.
Accompanying drawing explanation
Fig. 1 is self calibration vacuum meter system diagram;
Fig. 2, Fig. 3 are calibration process flow diagram;
Fig. 4 is for measuring flow for displaying figure;
Fig. 5 is memory module alignment point data, comprises the standard value and the real-time measured value that prestore.
Embodiment
Below in conjunction with the drawings and the specific embodiments, the invention will be further described.
Calibration process is used the standard vacuum device that meets standard, and the base measuring pressure Pa data that need are provided in regulating working pressure range, and the corresponding output electrical signals of regulating metering circuit is measured data.The dynamic direct comparison method of calibration, its ultimate principle is to be connected in same calibration chamber by school vacuum meter and standard vacuum gauge to be measured, the required pressure in this chamber is obtained by mobile equilibrium adjusting, with fine setting needle-valve, regulates calibration chamber pressure, uses standard vacuum gauge as monitoring.
Self calibration vacuum meter system and device as shown in Figure 1 forms, and comprises and regulates, regulates work and testing circuit, data input and treatment circuit.Pirani gauge 141, through regulating 280 outputs of heating metering circuit, by amplifying circuit 270, analog multichannel switch 290 coupling input analog-to-digital converters 260, then reaches microcontroller (MCU) 210.During measurement, microcontroller will be regulated data and be sent nixie display 220, band membrane keyboard display screen 240; During calibration, microcontroller is inputted data in internal memory or external memorizer 250, for tabulation and correction measurement result.LED nixie display 220 and the hardware combinations key 230 being formed by zeroing key, options button, enter key, data input operation while realizing calibration.Intelligent display screen band membrane keyboard 240, with multiple spot calibration value, manifest, with page turning or pull up and down screen window roll, mobile, make wanted calibration value appear at visual screen scope, also can complete data demonstration and touching action, identical with the effect of hardware combinations key combination with nixie display, but operation is more convenient.Above-mentioned memory device, deposits predetermined calibration, measured data, form and fitting formula, and predetermined standard value inputs to wherein in manufacture process.I/O interface provides calibration data table and parameters of formula output.
Regulate heating metering circuit and comprise bridge diagram, differential amplifier and adjustment pipe, thereby control, regulate heated filament heating, temperature and resistance that regulation voltage makes resistance regulate heated filament keep constant; Regulate the signal voltage of output, with pressure change.
Amplifying circuit 270, analog multichannel switch 290 are connected to resistance and regulate between the output terminal and analog to digital converter of heating and metering circuit, gamut output voltage range coupling analog to digital converter 260,260 output digit signals of regulating are connected to microcontroller chip 210.Heat-conducted metering circuit output voltage of regulating and ADC device voltage usable range match, and guarantee that the resolution of regulating signal voltage obtaining or precision still meet the error requirements of pressure measuring value by after the step 550 deduction zero-point voltage of Fig. 4.
Shown in Fig. 1, regulate all and be connected to vacuum system calibration chamber 120 by vacuum seal.Ionization gauge, cold rule, β radiation ion gauge collector electric current are inputted as ion-current amplifier, by I-V change-over circuit, formed, input end is connected to the collector of regulating, and output terminal is connected to analog multichannel switch, and the output of analog multichannel switch is connected to again the input end of analog to digital converter.Ion-current amplifier meets and covers the ion current of regulating gamut and is converted to voltage, and this voltage should meet the sampled signal requirement of ADC device.
The steady radiating circuit of filament heating, anode mu balanced circuit provide the required working current of ionization gauge and voltage.The anode of cold rule connects DC high voltage circuit.The anode of β radiation ion gauge connects direct-current working volts circuit.
Microcontroller chip, signal from analog to digital converter is made to digital zero setting by step shown in Fig. 2, Fig. 3, under measuring state, become current pressure to show voltage transitions again according to voltage with the relation of pressure, the relation of voltage and pressure derives from regulates calibration characteristics, curve.When vacuum correction state, between the bound of gaging pressure scope, phase selection is answered some calibration points, obtains measured data, by generation or the curve of microcontroller executing data table, obtains the relation of voltage and pressure.Described microcontroller can adopt ATmega128 family chip.
Nixie display, with zeroing key, options button, enter key combination, extracts storer Plays data by options button and is presented on successively in digital indicator, status indicator lamp sync response, and enter key triggers measured data input.With the display screen of membrane keyboard, membrane keyboard comprises selection mode key, page key, aligning key, and aligning key is the calibration point value that prestores, and aligning key N is presented in form simultaneously, and directly the calibration point value on touch-screen, triggers aligning key.Calibration point value is shown as the normal pressure value prestoring, and can be also the numbering of calibration point.
The calibration flow process of this device as shown in Figure 2 and Figure 3.Microcontroller in Fig. 1 is carried out instruction implementation method 300 and is entered align mode, and from step 310, step 320 will be regulated magnitude of voltage and be read and deposit among instrument storage chip by ADC.In step 330, when standard vacuum device pressure drop triggers zeroing during to zero point.Step 340 is digital zero settings, gets zero point level and is kept at chip internal.The value that step 350 is extracted n calibration point in Fig. 5 from storer is used as prompting to be calibrated, with increasing progressively and the key that successively decreases selects LED charactron 220 to be shown as predetermined value.Step 360 is along with the force value of standard set-up 120 arrives n point hours, whether enter key 230 triggers confirmation, if trigger and have a response, in step 370, read the corresponding voltage numerical value that is this moment identified standard point, instrument is stored this collected voltage value, is stored in the storeies such as EEPROM, FLASH.Step 380, according to standard value and corresponding measured value, is revised the form of calibration, computing formula parameter storage.Step 390 is selected next standard point, gets back to step 350 and carries out circulation.In this process Plays value or prompt, appear at display 220 and 240, while waiting for the standard meter force value arrival of standard set-up, just can trigger the input of measured value.Whether step 395, exit align mode, gets back to measurement show state.
In step 330, for the condition of heat-conducted (as resistance, thermocouple) vacuum meter zeroing be system reach apparatus measures low pressure limit 2%.
Step 340 for heat-conducted regulating (as Pirani gauge, thermocouple rule) effectively, along with the reduction of pressure, reaches the lower voltage limit (lower limit of measuring corresponding to vacuum gauge) of regulating signal, and it is non-vanishing that it regulates numerical value, is called zero-point voltage.
Heat-conducted zero-point voltage input method of regulating: conventionally set by mimic channel and in the omnidistance deduction of measuring process, deduct from measuring-signal.Step 340 is software deduction method at zero point: be that zero-point voltage is sampled after value by digital circuit, deposit in memory cell.In measuring process, as Fig. 4 step 550, whole process is deducted zero-point voltage by microcontroller from the sampled voltage signal of amplifying circuit.
Step 360 is chosen Shi Youyi response, and described response comprises song, flicker, and variable color, character prompting has had input.
Step 370, the tested real time data of regulating of form shown in formation Fig. 5.
According to the data in this form, as raw data table, by method of interpolation, fill up the data between adjacent calibration point, obtain pressure and voltage (P-V) form; Use matched curve method, the calibration characteristics, formula that can obtain regulating again, is completed by step 380.Step 396 is that Fig. 2 flow process finishes and turns back to the measuring state shown in Fig. 4.
Step 380 adopts basic fundamental---method of interpolation and the curve-fitting method of data processing.
Generate the applicable thermal conductance rule of tableaux method: for heat-conducted, regulate, regulating voltage and pressure has non-linear feature, therefore according to precision or franchise requirement, takes the intensive force value of choosing calibration point, and inputs in real time corresponding measured value; And point between adjacent calibration point is directly tried to achieve by method of interpolation.As Pirani gauge, with two potential coefficients, represent, as 5.1 * 10
-1pa, form so pressure and the voltage relationship form of 0.5 ~ 2500Pa, to there be 300 to 400 groups of data, need occupy 300 to 400 byte storage units, form spread pattern is voltage digital signal indicating member address, in unit, deposit the Pa value of calibration and the Pa value of interpolation calculation, during for Fig. 4 measuring state, table look-up, will regulate original value and be converted to pressure demonstration.
For ionization gauge, cold rule and β rule etc., their ion current and pressure have good linear relationship in main range ability, therefore adopt linear function y=ax+b to do matched curve, the segmentation of the pressing force order of magnitude, calibration point is scheduled to choose several interpolation points at each order of magnitude, by real-time input, obtain corresponding measured value, with least square method, try to achieve regression equation, at each order of magnitude, obtain a formula.570 steps in Fig. 4, are used formula that measured value is converted to pressure indicating value.
After calibration steps completes, standard value and corresponding measured value as raw data table, calculate the correction card that generates and curve data etc. and deposited among instrument, for as Fig. 4 step 570.
Flow process as shown in Figure 3, microcontroller is carried out instruction implementation method 400 and is carried out with 240 touch screen by Fig. 1 device: the symbol of key is with calibrating point value, and each indicating value is exactly the position of key, and calibration value just represents a key.Step 450, is from storer, to extract pressure criteria data value to appear on display screen 240, and institute occurs that mode is that multiple spot pressure criteria value manifests; With page turning or pull up and down screen content roll, movement, make wanted standard value appear at visual screen scope.Step 460, when the pressure of standard set-up reach on screen shown in certain standard value, directly trigger the membrane keyboard of this indicating value, confirm input; After triggering, have response, response comprises song, flicker, variable color, character prompting.Other step of Fig. 3 is identical with Fig. 2.
According to Fig. 1, connect, the course of work of its calibration is by comprising following steps:
1, will regulate and be connected in calibrating installation vacuum system, then be connected with self calibration instrument, operating instrument enters align mode.
2, the first calibration point that makes to be scheduled to is revealed on this self calibration instrument display screen.
3, with reference instrument, observe vacuum system pressure, when regulating pressure reach the standard value of first point in range and stablize touching on this self calibration instrument immediately.
4, the second calibration point that makes to be scheduled to is revealed on self calibration instrument display screen.
5, regulate pressure to reach second point and stable in range, touching on self calibration instrument immediately.
6, the 3rd calibration point that makes to be scheduled to is revealed on self calibration instrument display screen.
7, regulate pressure to reach the 3rd point and stable in range, touching on self calibration instrument immediately.
8, by that analogy, regulate pressure to reach n point and stable in range, touching immediately.
Calibration can finish at any time, and when operating instrument return measurement state, instrument display is the pressure value after calibration.
Operating process based on Fig. 2, Fig. 3 is distinguished to some extent, as shown in Figure 2, realizes the calibration flow process of this method:
1, as Fig. 1, standard vacuum gauge, testedly regulate, tested self calibration vacuum meter is connected to vacuum calibration system.
2, trigger tested vacuum meter and enter align mode, show that indicating value is with being calibration point value and prompting, align mode pilot lamp is bright and keep; For the digital display window of LED, there is certain the normal pressure value in Fig. 5; When after this triggering enter key, in the corresponding form of Fig. 5, Vn is substituted by new input value immediately, forms original real time data table.
3, vacuumize, when standard vacuum gauge reading indicating value indication mechanism pressure drop is to 2% of tested instrument lower limit, trigger tested vacuum meter zeroing key and complete zeroing.
4, press and increase progressively key, select No. 1 calibration indicating value of calibration point to occur.
5, with micrometering valve, regulate, when standard vacuum gauge indication mechanism pressure reaches point value No. 1, press " confirmation " key, realize measured value input.
6, press and increase progressively key, to second calibration point indicating value appearance.
7, standard vacuum gauge indication mechanism pressure reaches point value No. 2, presses " confirmation " key, realizes measured value input.
8, by that analogy, realize a plurality of measured value inputs.
9, calibration finishes, operating instrument return measurement state, and instrument display is the pressure value after having calibrated.
As shown in Figure 3, realize the calibration flow process of this method:
1, standard vacuum gauge, testedly regulate, tested self calibration vacuum meter is connected to vacuum calibration system.
2, trigger tested vacuum meter and enter align mode, screen display is with being calibration point value, and the standard value shown in Fig. 5 is presented in form simultaneously, with multiple spot calibration value, manifests; With page turning or pull up and down screen content roll, movement, make wanted standard value appear at visual screen scope.
3, vacuumize, when standard vacuum gauge reading indicating value indication mechanism pressure drop is to 2% of tested instrument lower limit, press the tested vacuum meter zeroing of triggering key and complete zeroing.
4, with micrometering valve, regulate, when standard vacuum gauge indication mechanism pressure reaches some standard value No. 1, trigger this calibration point value, V in corresponding form in Fig. 5
1by new input value, substituted immediately, realize measured value input, form original real time data table.
5,, when standard vacuum gauge indication mechanism pressure reaches point value No. 2, by showing on screen that No. 2 point values trigger, realize measured value input.
6, by that analogy, realize a plurality of measured value inputs.
7, calibration finishes, operating instrument return measurement state, and instrument display is the pressure value after having calibrated.
Fig. 4 is method 500, and for device moves under the measurement show state of master routine, the measurement data of regulating converts pressure demonstration to according to form or formula.Measurement flow for displaying for Fig. 1 device, in step 540, by status key, determined, select yes, device moves under measurement show state, now regulate the voltage signal obtained after match circuit and ADC Input matching, family curve by microcontroller according to the form in the memory banks such as EEPROM, FLASH and matching, the numerical value that is converted to pressure is presented on screen or LED charactron.If select no, instrument works under align mode, method 400 shown in the method 300 of execution graph 2, Fig. 3.The step 550 of Fig. 4, reduces the level at zero point that Fig. 2, Fig. 3 obtain from analog to digital converter 260 data that obtain.Step 560, prepares for tabling look-up or calculating through the measuring-signal of regulating of button zero.The step 570 of Fig. 4, according to regulating type and measuring permissible error, the conversion regime of determination data, resistance and thermocouple vacuum gage are non-linear, with looking into tableaux method, the original form of enough intensive calibration points that form is obtained in real time by Fig. 2, Fig. 3, the more complete table generating by piecewise linear interpolation.What ionization gauge, cold rule, β rule were selected is the order of magnitude segmentation of pressing force range, the regression formula obtaining with linear function fit.Step 560, delivers to display through the pressure data of revising.
As shown in Figure 5, normal pressure data and the corresponding real-time input value for prestoring in memory module.The number N prestoring is according to regulating and determine precision, heat-conducted regulating as ohmer, for meeting the measuring error requirement of stipulating in JB/T10074-2004, calibration point value spacing and the number of selected each order of magnitude, each order of magnitude can as many as 13, is below a kind of following the example of:
Calibration point: P
1p
2p
3p
4p
5p
6p
7p
8p
9p
10p
11p
12p
13
Pressure: 1.0 1.2 1.5 1.8 2.0 2.5 3.0 4.0 5.0 6.0 7.0 8.0 9.0 (Pa)
Measured value: V
1v
2v
3v
4v
5v
6v
7v
8v
9v
10v
11v
12v
13(V)
For the ionization gauge that has linear feature, choose the calibration point of each order of magnitude more than 3.
Claims (5)
1. for a tonometric vacuum gauge calibration method, it is characterized in that, the method mainly comprises data input, the generation of self calibration data, field calibration and data correction;
The input of described data: being input as of the standard value of some serial calibration points and measured value, standard value determined in advance and inputted, measured value triggers input in real time; Measured value is in real time calibration, and wait pressure reaches the standard value of a certain calibration point again to triggering input action, the corresponding input of measured value corresponding to this standard value;
Described self calibration data generate: in calibrating and measuring process, directly input after data, form raw data, according to method of interpolation tabulation and curve for the raw data of input;
Described field calibration: determine and trigger according to standard value, and record and preserve to come from this moment and regulate measurement voltage signal, using standard value as functional value, voltage is as interpolation knot value; Multiple spot repetitive operation thus, obtains a series of functional value and nodal value, then applies the function table that method of interpolation is constructed whole measurement range, asks if desired fitting formula P=f (v);
Described data correction: under measuring state,, and be converted to vacuum values and show through tabling look-up or formula calculates and makes calibration correction according to the real time data of regulating.
2. vacuum meter self-calibrating device, it is characterized in that, comprise heat-conducted regulate, regulate work and testing circuit, hyperchannel analog to digital conversion circuit, data input and treatment circuit, the regulate heating metering circuit of described heat-conducted electric signal of regulating in the work of regulating and testing circuit exported, by data, inputted again and treatment circuit in amplifying circuit and analog multichannel switch coupling transfer to analog to digital converter (ADC) and convert digital signal to, this digital signal reaches display and shows or reach storer and preserve after microcontroller is processed.
3. vacuum meter self-calibrating device according to claim 2, is characterized in that, has deposited preassigned pressure data, measured data, form and fitting formula in described storer.
4. vacuum meter self-calibrating device according to claim 2, is characterized in that, described in regulate heating and metering circuit comprise bridge diagram, differential amplifier and adjustment pipe.
5. vacuum meter self-calibrating device according to claim 2, it is characterized in that, also comprise the display of data input operation while realizing calibration and hardware combinations key return to zero key, options button, enter key, and for showing the screen of the intelligent display with membrane keyboard of multiple spot calibration value.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100198545A1 (en) * | 2007-07-23 | 2010-08-05 | Christian Berg | Method for calibrating and operating a measuring cell arrangement |
| CN102564695A (en) * | 2011-12-28 | 2012-07-11 | 大连理工大学 | Semiconductor micro air pressure sensor test system |
| CN202403867U (en) * | 2011-12-22 | 2012-08-29 | 成都兰石低温科技有限公司 | Digital-type vacuometer |
| CN203011621U (en) * | 2012-12-04 | 2013-06-19 | 姚文利 | Resistance vacuum gauge |
| CN203191151U (en) * | 2012-12-21 | 2013-09-11 | 黄鸣 | Vacuum gauge automatic calibrating device |
-
2013
- 2013-11-11 CN CN201310555198.5A patent/CN103557991B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100198545A1 (en) * | 2007-07-23 | 2010-08-05 | Christian Berg | Method for calibrating and operating a measuring cell arrangement |
| CN202403867U (en) * | 2011-12-22 | 2012-08-29 | 成都兰石低温科技有限公司 | Digital-type vacuometer |
| CN102564695A (en) * | 2011-12-28 | 2012-07-11 | 大连理工大学 | Semiconductor micro air pressure sensor test system |
| CN203011621U (en) * | 2012-12-04 | 2013-06-19 | 姚文利 | Resistance vacuum gauge |
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