CN103557781B - Dual monopole capacitor differential displacement sensor - Google Patents
Dual monopole capacitor differential displacement sensor Download PDFInfo
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- CN103557781B CN103557781B CN201310409915.3A CN201310409915A CN103557781B CN 103557781 B CN103557781 B CN 103557781B CN 201310409915 A CN201310409915 A CN 201310409915A CN 103557781 B CN103557781 B CN 103557781B
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- induction pieces
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Abstract
The present invention provides a kind of dual monopole capacitor differential displacement sensing, with signal processing electronic equipment, successively comprising upper induction pieces, target part and lower induction pieces；Upper and lower induction pieces are connected with signal processing electronic equipment, and target part is connected with the ground wire of signal processing electronic equipment；Upper and lower induction pieces include capacitance shield body and capacitive sensing body, and the sensitive surface of capacitive sensing body is relative with target part surface, and corresponding surface shape matches, and displacement is measured by capacitance variations.The present invention also provides one kind and forms compound dual monopole capacitor differential displacement sensor by multiple double single-stage capacitance difference displacement component sensor combinations.
Description
Technical field
The present invention relates to measure the displacement transducer for using, more particularly to a kind of dual monopole capacitor differential displacement sensor,
Further relate to a kind of compound dual monopole capacitor differential displacement sensor.
Background technology
The capacitance displacement sensor of the high measurement sensitivity for commercially arriving at present has two classes.One class is such as Germany
The bipolar capacitance displacement sensor of Physik Instrumente (PI) productions.Another kind of is such as Britain Queensgate and Germany
The monopole capacitance displacement sensor of Micro-Epsilon productions." monopole electric capacity " means one of two electrodes of electric capacity and ground
Line is connected, without particular lead.The measurement of electric capacity comes from that non-ground wire pole.And " bipolar electric capacity ", the measurement of electric capacity
From in two non-ground wire poles.The two electrodes all need the particular lead of oneself.This two classes displacement transducer all needs point-device
Location and installation is reached between sensitive face and sensitive face (bipolar electric capacity), or between sensitive face and measuring surface (monopole electric capacity)
, the depth of parallelism very high can just obtain specified measurement function.Although these displacement transducers are in itself by using costliness
Material and processing can reach it is less be acted upon by temperature changes, but after accurate location and installation, because positioner is also by temperature
The influence of change is spent, whole measurement system is extremely difficult to Expected Results, unless material of the huge expense of input in positioner
In processing.Bipolar capacitance displacement sensor is higher than monopole capacitance displacement sensor measurement sensitivity.Both high-accuracy adding is needed
Work is made.Therefore production cost is all higher.In addition to induction electrode, also supplementary electrode plays shielding extraneous noise to capacitance sensor
It is lost in electric capacity is reduced.The side effect of these supplementary electrodes is increased constant electric capacity, therefore increases integral capacitor, causes letter
Time growth number is changed into, signal sampling rate is reduced.Additionally, two parts of bipolar capacitance displacement sensor be all connected with wire and
Weight is larger, causes and uses limitation and bad dynamic performance.Monopole capacitance displacement sensor sensitivity is poor.Higher sensitivity
Need stimulation voltage and the bodily form more long higher.
The content of the invention
Therefore, the technical problems to be solved by the invention there are provided a kind of dual monopole capacitor differential displacement sensor.
Reduce not power transformation by the particular design to parts (induction pieces and target part) structure and to integrally-built particular design
Appearance reaches raising sample rate, offsets common noise and reaches increase measurement sensitivity, and manufacturing simplification reaches reduction and is produced into
This, the weight for reducing movement parts reaches the dynamic property of enhancing sensing device, and formation symmetrically reaches the overall sensing device of reduction
Influence to temperature change.Dual monopole capacitor differential displacement sensing of the invention passes the measuring surface that device ensure that in sensor
High-precision positioning between sensitive face, causes easy to use and use cost low.Above mentioned problem is by following technical solution
Realize：
Present invention firstly provides a kind of dual monopole capacitor differential displacement sensor, with signal processing electronic equipment, it changes
Enter and be a little, successively comprising upper induction pieces, target part and lower induction pieces；The upper induction pieces and lower induction pieces and signal transacting electricity
Sub- equipment is connected, and the target part is connected with the ground wire of signal processing electronic equipment；The upper induction pieces and lower induction pieces are wrapped
Body containing capacitance shield and capacitive sensing body, the sensitive surface of the capacitive sensing body are relative with target part surface, the sensitive surface shape
Shape matches with target part surface configuration.
Using the technical program, the gap between upper capacitive sensing body and objective body is d1, and they collectively form one can
Become single-stage electric capacity C1.Gap between lower capacitive sensing body and objective body is d2, and they collectively form another variable single-stage electricity
Hold C2.When target part is to the translation of inductor direction, gap d 1 and d2 mono- increase one and change with subtracting.Thus electric capacity C1 and C2
One increases one changes with subtracting.Capacitance difference (C1-C2) is measured by electronic equipment, thus measures displacement, is a kind of new sensor.
Wherein upper and lower induction pieces have following three kinds of implementations.
One：The capacitive sensing body and capacitance shield body are the metallic conductor part of surface insulation；
There is storage tank, the capacitive sensing body is slim lamellar body and is connected by a thin-walled hollow in the capacitance shield body
Fitting is arranged in the storage tank of capacitance shield body.
Secondly：The capacitive sensing body is metallic conductor part, and the capacitance shield body is surface by the exhausted of conductor
Edge body component；There is storage tank, the capacitive sensing body is slim lamellar body and passes through a thin-walled hollow in the capacitance shield body
Connector is arranged in the storage tank of capacitance shield body.
Using above two mode, in terms of existing technologies, pole is passed through between capacitive sensing body and capacitance shield body
Small contact surface come realize bonding, can effectively reduce the constant electric capacity in induction pieces.Improve signal sampling rate and larger measurement
Sensitivity.
Thirdly：The upper induction pieces and lower induction pieces include insulating body, and the capacitive sensing body is provided in insulation master
First metal conductor layer of body upper surface, the first metal conductor layer periphery has insulation that is exposed by insulating body and being formed
Circle, the capacitance shield body is the second metallic conductor for being coated in main body the outer portion except the first metal conductor layer and insulated ring
Layer.Wherein, the induction pieces are to use photoetching corrosion method to form insulated ring, double-layer printing circuit on double-layer printing circuit board
Plate two sides are coated with metal conductor layer.
This mode is another important improvement of the invention, and it can use bilayer in the way of use printed circuit board (PCB)
Plate makes upper and lower induction pieces.Based on the structure that it is stated, it is only necessary to made above-mentioned insulated ring using the mode of photoetching corrosion
Out, the both sides of doubling plate are coated using same metal conductor layer, just can realize the making of induction pieces.Certainly based on above-mentioned
The statement of structure, it to its surface can also enter column conductor to make upper and lower induction pieces, table using materials such as ceramics, glass
Metal vacuum evaporation coating, surface metal-layer are pasted and the mode such as plastic electronic conductor printing again for the processing method of face conductor,
The mode of use printed circuit board (PCB) is more easy to make capacitive sensing part.
Being shaped as any one scheme in such scheme, the capacitive sensing body sensitive surface and target part surface be circular,
Square, rectangle or ellipse.And the shape of capacitance shield body is not limited, it equally can be circular, square, rectangular
Shape or ellipse.The change of shape so that inventive sensor can have stronger applicability.
The invention allows for a kind of dual monopole capacitor differential displacement sensor with through hole, its this enter and be a little：Institute
State and be provided with through hole on induction pieces and lower induction pieces；The target part is fixedly installed on upper and lower induction pieces by elastomeric element
Between；The both sides of the target part are provided with impeller, and impeller is through upper induction pieces and the through hole of lower induction pieces.
Wherein, the elastomeric element and target part integrally connected, its main body is the spring parallel to target part neighboring
Lamellar body.The number of the spring lamellar body is at least three, is evenly arranged in the outer rim of target part.The one side of the target part or two
Face is bonded with reinforced sheet, and the reinforced sheet is identical with target part shape.The other end of the spring lamellar body is connected with flexible fastening
Body.
Can also use, comprising target part described at least two, each target part connects the elastic strip body, the flexure strip
Body is connected with flexible fastening body, is separated by intermediate support and perimeter support body between each target part, the intermediate support
Shape with target part is identical, and the perimeter support body matches with the shape of flexible fastening body.
Can also use, the elastomeric element is paired parallel longitudinal setting cantilever spring.
In above-mentioned all technical schemes, the target part is with upper and lower induction pieces connect setting or independently of upper and lower induction pieces
And be individually fixedly installed.
In such scheme, through hole is generally located on the center of upper and lower induction pieces, to ensure that impeller can be arranged on entirely
The center of sensor.Target part in the present invention is located at same using more than at least three parallel to target part edge and with target part
The mode of the spring lamellar body of one horizontal plane, can effectively avoid the influence due to temperature change to target part, work as temperature change
When, spring lamellar body can occur the rotation of small horizontal direction along target part neighboring, without causing longitudinal unusual fluctuation.It is logical
The mode that reinforced sheet is set is crossed, the deformation occurred due to external force during target part is translated can be further avoided.This
Outward, the present invention has still used the design of double cantilever beam, its mode that double cantilever beam can be set on single target part, it is also possible to
It is the mode of the double cantilever beam that two target parts are set up in parallel and automatically form up and down.The mode of double cantilever beam can be protected effectively
Barrier target part is parallel with upper and lower induction pieces all the time in moving process.And, target part can be by spacer and upper and lower induction pieces
It is wholely set, it is also possible to be arranged in other the peripheral fixed components independently of upper and lower induction pieces.
The invention allows for the dual monopole capacitor differential displacement sensor that a kind of impeller is separately provided, its this enter a little to exist
In：Also include the second impeller set independently of upper and lower induction pieces and target part；The target part is solid by elastomeric element
Surely it is arranged between upper and lower induction pieces, the second impeller forces in target part and is allowed to towards upper induction pieces or lower induction pieces direction
Move horizontally.
Wherein, the elastomeric element and target part integrally connected, it is spring of the main body parallel to target part neighboring
Lamellar body.The number of the spring lamellar body is at least three, is evenly arranged in the outer rim of target part.The one side of the target part or two
Face is bonded with reinforced sheet, and the reinforced sheet is identical with target part shape.The other end of the spring lamellar body is connected with flexible fastening
Body.
Can also use, comprising target part described at least two, each target part connects the elastic strip body, the flexure strip
Body is connected with flexible fastening body, is separated by intermediate support and perimeter support body between each target part, the intermediate support
Shape with target part is identical, and the perimeter support body matches with the shape of flexible fastening body.
Can also use, the elastomeric element is paired parallel longitudinal setting cantilever spring.
In any of the above-described scheme, the target part is individually fixedly installed independently of upper and lower induction pieces.
A kind of mode of upper and lower induction pieces without through hole is disclosed in such scheme, impeller is independently arranged at certain of outside
On individual position, it can be arranged in certain fixing device of periphery, and drives target part towards upper induction pieces or lower induction pieces
Move in parallel.This programme also has the advantages that above-mentioned the first scheme, and statement is not repeated again.
Moved and the motionless dual monopole capacitor differential displacement sensor of target part the invention allows for a kind of induction pieces, it should
Enter and be a little：Also include the 3rd impeller set independently of upper and lower induction pieces and target part；The upper and lower induction pieces one
Side is fixedly installed on the both sides of target part, the upper and lower induction pieces opposite side by upper end elastic component and lower end elastic component respectively
It is connected by connecting rod；3rd impeller forces in induction pieces or lower induction pieces are moved in parallel relative to target part.
A kind of target part is disclosed in such scheme to fix, and upper and lower induction pieces are promoted by way of elastic component is set
Part is independently arranged at certain position in outside, and drives upper and lower induction pieces to be moved in parallel relative to target part.
It is similar, the invention allows for a kind of dual monopole capacitor differential displacement sensor, its this enter and be a little：Also include
There is the 4th impeller set independently of upper and lower induction pieces and target part；
The upper and lower induction pieces both sides are fixedly installed on the both sides of target part by upper elastic component and lower elastic component respectively,
4th impeller forces in induction pieces or lower induction pieces are moved in parallel relative to target part.
The characteristics of this sensor is that upper and lower induction pieces are moved and the different another way of target part.No matter using above-mentioned
That mode, is for obtaining the change in displacement between target part and induction pieces, and obtains the change of electric capacity.
The invention allows for a kind of compound dual monopole capacitor differential displacement sensor, comprising double single described at least two
Electrode capacitance difference displacement transducer；Each dual monopole capacitor differential displacement sensor is spaced apart or by intershield device point
Every；Wherein, each dual monopole capacitor differential displacement sensor includes upper induction pieces, target part and lower induction pieces successively；It is described it is each on
Induction pieces are in parallel, and each lower induction pieces are in parallel, and are finally connected with signal processing electronic equipment, each target part parallel connection, and most
It is connected with the ground wire of signal processing electronic equipment eventually；The upper induction pieces and lower induction pieces include capacitance shield body and electric capacity sense
Ying Ti, the sensitive surface of the capacitive sensing body is relative with target part surface, the sensitive surface shape and target part surface configuration phase
Matching.
Wherein, the upper induction pieces and lower induction pieces include insulating body, and the capacitive sensing body is provided in insulation master
First metal conductor layer of body upper surface, the first metal conductor layer periphery has insulation that is exposed by insulating body and being formed
Circle, the capacitance shield body is the second metallic conductor for being coated in main body the outer portion except the first metal conductor layer and insulated ring
Layer；The intershield device is the dielectric member for being coated with metal conductor layer.
Wherein, each upper induction pieces, each lower induction pieces and intershield device are provided with through hole；Described each target
Part series connection is integrated, and the target part at two ends is connected with impeller respectively；Each target part is fixedly installed on by elastomeric element
Between each upper and lower induction pieces.
Wherein, the elastomeric element and target part integrally connected, it is to be located at parallel to target part edge and with target part
The spring lamellar body of same level.The number of the spring lamellar body is at least three, is uniformly arranged in the outer rim of target part.
The one or both sides of the target part are bonded with reinforced sheet, and the reinforced sheet is identical with target part shape.The spring lamellar body
The other end is provided with the flexible fastening body of fixed target part, and the flexible fastening body is provided with spacer up and down.
Can also use, comprising target part described at least two, each target part connects the elastic strip body, the flexure strip
Body is connected with flexible fastening body, is separated by intermediate support and perimeter support body between each target part, the intermediate support
Shape with target part is identical, and the perimeter support body matches with the shape of flexible fastening body.
Can also use, the elastomeric element is paired parallel longitudinal setting cantilever spring.
Can also use, the target part is set or the list independently of upper and lower induction pieces with upper and lower induction pieces integrally connected
Solely set.
In above-mentioned technical proposal, the intershield device and connected lower induction pieces and upper induction pieces are to pass through
Insulated ring is formed by photoetching corrosion method to four layer printed circuit boards, the four layer printed circuit boards two sides are coated with metal
Conductor layer；Remaining upper and lower induction pieces is to use photoetching corrosion method to form insulated ring, Double-layered printing on double-layer printing circuit board
Circuit board two sides are coated with metal conductor layer.
Above-mentioned compound dual monopole capacitor differential displacement sensor is by multiple double single-stage capacitance difference displacement component sensor combinations
Form, be most easily accomplished that by the way of printed circuit board (PCB), dual platen can make upper and lower induction pieces, four panels can make
The assembly of intershield body and the upper and lower induction pieces being attached thereto.This composite construction can be realized in longitudinally extending design,
I.e.：The size in the horizontal direction of target part and induction pieces is reduced, and increases whole sensing by increasing compound quantity
The measurement range of device.
Above-mentioned technical proposal of the invention compared to existing technology have advantages below, by the structure design to induction pieces come
Reduce the constant electric capacity of global displacement sensing device, so that improving sample rate and increase measurement sensitivity.By to induction pieces
Structure design manufactures easy and low production cost to reach.Strengthen global displacement sensing dress by the structure design to target part
The dynamic property put reduces influence of the global displacement sensing device to temperature change, and easy and be produced into reach manufacture
This is low.By to induction pieces, the structure design of the entire combination of target part and other parts of periphery further reduces overall position
Move influence of the sensing device to temperature change and easy to reach manufacture.Because the present invention is by two induction pieces and a target
Part is connected, and is reached without any additional point-device location and installation very high flat between sensitive face and measuring surface
Row degree, which improves the manufacture repeatability and product quality of producer, while reducing the cost of use of user.This
Outward, the present invention reaches differential effect using two induction pieces and a target part, so that common noise is offseted reaches survey
Measure the raising of sensitivity.For example：When sample rate is 10,000 times per second, high resolution is up to ten a ten thousandths.
The present invention can be as the sensor for measuring displacement, it is also possible to apply in measurement weight, pressure etc. and electric capacity
In the measurement purposes of relevant physical quantity.
Brief description of the drawings
In order that present disclosure is more likely to be clearly understood, below according to specific embodiment of the invention and combine
Accompanying drawing, the present invention is further detailed explanation.
Fig. 1 is dual monopole capacitor differential displacement sensor overall structure diagram of the present invention.；
Fig. 2A is the structural representation of the induction pieces that surface insulation conductor part is formed, and is provided with through hole.
Fig. 2 B are generalized sections of the Fig. 2A along C-C.
Fig. 3 A are the structural representation of the induction pieces that surface insulation conductor part is formed, and through hole is not provided with thereon.
Fig. 3 B are generalized sections of Fig. 3 A along C-C.
Fig. 4 is a kind of induction pieces structural representation of existing bipolar capacitance displacement sensor.
Fig. 5 A are the sensing that capacitance shield body is formed for the insulator of surface conductor for metallic conductor of capacitive sensing body
The structural representation of part, is provided with through hole, and capacitance shield body is circle.
Fig. 5 B are generalized sections of Fig. 5 A along C-C.
Fig. 6 A are the sensing that capacitance shield body is formed for the insulator of surface conductor for metallic conductor of capacitive sensing body
The structural representation of part, is not provided with through hole thereon, and capacitance shield body is square.
Fig. 6 B are generalized sections of Fig. 6 A along C-C.
Fig. 7 A are that the main body being made using printed circuit preparation method is insulator, and upper surface has the first metallic conductor
Layer, periphery has insulated ring, and the induction pieces that remainder is the second metal conductor layer and is formed are provided with through hole, electricity
It is circle to hold inductor, and main body is circle.
Fig. 7 B are generalized sections of Fig. 7 A along C-C.
Fig. 8 A are that the main body being made using printed circuit preparation method is insulator, and upper surface has the first metallic conductor
Layer, periphery has insulated ring, and the induction pieces that remainder is the second metal conductor layer and is formed are provided with through hole, electricity
It is ellipse to hold inductor, and main body is rectangle.
Fig. 8 B are generalized sections of Fig. 8 A along C-C.
Fig. 9 A are that the main body being made using printed circuit preparation method is insulator, and upper surface has the first metallic conductor
Layer, periphery has insulated ring, and the induction pieces that remainder is the second metal conductor layer and is formed are provided with through hole, electricity
It is square to hold inductor, and main body is square.
Fig. 9 B are generalized sections of Fig. 9 A along C-C.
Figure 10 A are that the main body being made using printed circuit preparation method is insulator, and upper surface has the first metallic conductor
Layer, periphery has insulated ring, and the induction pieces that remainder is the second metal conductor layer and is formed are provided with through hole, electricity
Appearance inductor is rectangle, and main body is rectangle.
Figure 10 B are generalized sections of Figure 10 A along C-C.
Figure 11 A be made using printed circuit preparation method it is compound.
Figure 11 B are generalized sections of Figure 11 A along C-C.
Figure 12 is a kind of compound dual monopole capacitor differential displacement sensor overall structure diagram in the present invention.
Figure 13 is a schematic diagram for dual monopole capacitor differential displacement sensing entire combination in the present invention.
Figure 14 is the structural representation of target part in the present invention.
Figure 15 is a structural representation for composite object part in the present invention.
Figure 16 is another structural representation that upper and lower induction pieces are combined with target part in the present invention.
Figure 17 is another structural representation that upper and lower induction pieces are combined with target part in the present invention.
Figure 18 is the schematic diagram of both arms beam in the present invention.
Specific embodiment
The invention discloses a kind of structure design of dual monopole capacitor differential displacement sensing device.That includes upper sensing
The structure design of part, target part and lower induction pieces, and disclose upper and lower induction pieces and the various of target part implement shape
Formula.These structures are combined with other signal processing electronic equipments, ultimately form a dual monopole capacitor differential displacement sensing dress
Put.
Fig. 1 is the principle schematic of dual monopole capacitor differential displacement sensor of the invention, a double monopole electric capacity difference
Displacement transducer includes upper induction pieces, target part, lower induction pieces, and other auxiliary sandwich structures composition successively.The present invention
Emphasis improve be that upper induction pieces have capacitance shield body 5 and capacitive sensing body 3, lower induction pieces have the He of capacitance shield body 8
The mesh of displacement sensing is provided between the capacitive sensing body of capacitive sensing body 2, the capacitive sensing body of upper induction pieces and lower induction pieces
Tender 1A.Gap between upper capacitive sensing body and target part surface is d1, and they collectively form a variable single-stage electric capacity C1.
Gap between lower capacitive sensing body and target surface is d2, and they collectively form another variable single-stage electric capacity C2.Work as mesh
When tender is to the translation of inductor direction, gap d 1 and d2 mono- increase one and change with subtracting.Thus also an increasing one subtracts for electric capacity C1 and C2
Ground change.Electric capacity difference (C1-C2) is measured by electronic equipment, thus measures displacement.The capacitive sensing body 3 of upper and lower induction pieces,
2 are connected with external insulation shielded conductor with signal processing electronic equipment respectively.The capacitance shield body 5,8 of upper and lower induction pieces with it is outer absolutely
Edge shielded conductor is connected with the ground wire of signal processing electronic equipment.Target part wire or other conductor parts, at signal
Manage the ground wire connection of electronic equipment.
Figure 13 illustrates a specific embodiment of dual monopole capacitor differential displacement sensor of the invention, each parts
Launch to show in vertical direction.As illustrated, this sandwich sensing arrangement comprising upper induction pieces capacitance shield body 5, under
The capacitance shield body 8 of induction pieces.There is the capacitive sensing body 3 of upper induction pieces in the capacitance shield body 5 of upper induction pieces, lower induction pieces
There is the capacitive sensing body 2 of lower induction pieces in capacitance shield body 8.The electric capacity sense of the capacitive sensing body 3 of upper induction pieces and lower induction pieces
Answer the target part 1A for having displacement sensing between body 2.Target part 1A is arranged between upper and lower induction pieces by elastomeric element.Should
Elastomeric element is the spring lamellar body 1B extended out from target part outer rim, spring lamellar body 1B horizontal parallel (spring lamellar body and target
Body is located at same level) in the edge of target part, the other end of spring lamellar body 1B is provided with spring fixed body 1C.The mesh
Tender 1A, spring lamellar body 1B and spring fixed body 1C can be integrally formed metal sheets.In the present embodiment, target part has
4 spring lamellar bodies being uniformly arranged along its circumferential edges.
In order to realize the connection of induction pieces and target part, the capacitance shield body edge of upper and lower induction pieces respectively sets four peaces
Dress hole, mounting hole is offered on spring fixed body 1C, additionally, in order that target part and upper and lower induction pieces have distance, upper
Be provided between the capacitance shield body edge of induction pieces and the spring fixed body of target part four spacers 9 with mounting hole,
46、10、44.With mounting hole four are provided between the capacitance shield body edge of lower induction pieces and the spring fixed body of target part
Individual spacer 13,47,14,45.Additionally by screw, nut, upper induction pieces, lower induction pieces, a target are completed
Part and eight connections of spacer, so as to form a sensing arrangement body.This structure is that target part is connected with upper and lower induction pieces
In the structure design of one.Target part can also be individually fixed on other detent mechanisms, can equally form target part
Structure in the middle of upper and lower induction pieces, as shown in following Figure 16 and Figure 17.
In the present embodiment, the capacitance shield body 5 of upper induction pieces, the capacitance shield body 8 of lower induction pieces, the electric capacity of upper induction pieces
There is through hole the centre of the capacitive sensing body 2 of inductor 3 and lower induction pieces respectively, and this four through holes are on the same axis.Target part
1A upper and lower surfaces respectively have target part impeller 7,6, and upper and lower two impellers are each passed through the capacitance shield body of induction pieces, lower sense
Answer the through hole of the centre of the capacitive sensing body of the capacitance shield body of part, the capacitive sensing body of upper induction pieces and lower induction pieces.It is outside
Inductor is set to produce translation and capacitance variations by impeller, so that measuring displacement.
The various designs and combination respectively to induction pieces and target part are further described below.First it is target
The function of part, wherein target part is to form electric capacity with the inductor of induction pieces, and is an electrode of this electric capacity.It is all this
A little surfaces for requiring the surface of target part and the induction pieces inductor of formed electric capacity be always maintained at it is certain parallel, even if mesh
There is relative motion in tender, relative distance changes between them with induction pieces.Keep target part surface and induction pieces sense
This characteristic for answering body surface face parallel is that the design of the geometry and other parts of periphery by target part reaches.
So, an important improvement for target part is to be evenly arranged with described at least three in target part outer rim
Spring lamellar body.Advantage of this design is that can guarantee that being parallel to each other for target surface and induction pieces inductor surface.Target
Another improvement of part is characterised by the trend of spring lamellar body, and spring lamellar body is from objective body to circumferencial direction or nearly circumferencial direction exhibition
Open, as shown in figure 13, when target part is for circle, spring lamellar body 1B along the circumferential direction launches, and is parallel to the circular arc of the circumference
Arm.When target part is square, its needs be arranged in parallel with square rim, and this shape and structure has whole displacement sensing apparatus
Small volume and by temperature change influenceed it is small etc. multiple advantage.When target part is due to temperature change thermal expansion or shrinkage, its change
Direction be direction change circumferentially, the injustice without causing target part surface so that target part all the time with induction pieces
Sensitive surface keeping parallelism.Strengthen the dynamic property of global displacement sensing device by the structure design to target part to subtract
Influence of the small global displacement sensing device to temperature change, and to reach easy manufacture and reduce production cost.
Translated when target part during increasing or reduce the distance between inductor and target part, the sensing table of target part
Face 1A can produce some to be reluctant to be deformed, because it is the transfer body of power.Although can be right by the selection to target part thickness
The selection of spring lamellar body 1B length and widths reduces the deformation of target part sensitive surface 1A.The present invention proposes another effective
The embodiment of reduction target part sensitive surface deformation be, it is as shown in figure 14, viscous in the one or both sides of objective body plus strengthen
Piece 65,66.Under normal circumstances, using monolithic target part, the thickness of monolithic target part is between 0.025mm to 10mm.
Refer to shown in Figure 15, sometimes, external driving force is not acted on the axis of movement direction of objective body, or even
Also carry moment of torsion.In this case, in order to prevent the lateral movement and swing of objective body, then combined type target part is needed.This hair
Bright to propose a kind of combined type target part, its improvement is, comprising at least two above-mentioned monolithic target parts 1-1,1-2, they
Between have an intermediate support 29, and multiple perimeter support bodies 22,23,33,35.Wherein, the shape of intermediate support 29 and
Size is identical with target part, and is constituted using lightweight material, can be that metal (lightweight aluminium) can also be nonmetallic, can also adopt
Use hollow out supporting structure.Wherein, perimeter support body is separate part, and its quantity, shapes and sizes are identical with spring fixed body, and
Thickness is identical with the thickness of intermediate support.Each target part is mutually bonded to form one by intermediate support and perimeter support body
Structure with multipair twin beams cantilever beam so that each target part has certain spacing, by the supporting role of supporter,
The target part of interconnection can be made to keep smooth, be conducive to the realization of effect of the present invention.Additionally, multiple target parts are connected to one
Body, the spring lamellar body of upper and lower target part can form the effect of both arms beam, when target part is acted towards induction pieces, it is ensured that
Target part remains parallel relative to induction pieces, as shown in figure 18..
Various structures below for induction pieces are introduced.
Fig. 4 A and Fig. 4 B are referred to, it is the induction pieces structure of the existing bipolar capacitance displacement sensor of in the market.Entirely
Induction pieces are made up of three parts, a capacitive sensing body 22, a capacitance shield body 28, and an intermediate isolating body 23.Three parts are all
It is made up of metallic conductor, and is processed through surface insulation.Corresponding wire is drawn from capacitive sensing body and shield.Inductor
The electric capacity and intermediate isolating body that the constant electric capacity formed with shield is formed by inductor with intermediate isolating body are formed with shield
Capacitances in series composition.Due to inductor and intermediate isolating body contact area and intermediate isolating body and shield area all compared with
Greatly, it is again zero distance contact between them, so the variable capacitance to be surveyed of constant capacity ratio formed between them is much larger.This
The ratio very little of variable capacitance and constant electric capacity (variable signal and not varying signal) has been resulted in, thus resolution ratio is relatively low.Meanwhile,
Big overall capacitance needs signal processing time more long, causes that signal output is slow, sample rate is low.
The present invention reduces the constant electric capacity of global displacement sensing device by the structure design to induction pieces, so that improving
Sample rate and increase measurement sensitivity, while obtaining manufacture simplicity and reducing the advantages such as production cost.
The material of main part of induction pieces can be conductor, or insulator (nonconductor).If the material of induction pieces is
Metallic conductor, such as copper or aluminium, the capacitance shield body of induction pieces and capacitive sensing body surface face need to carry out insulating treatment, to prevent
Capacitive sensing body and capacitance shield body directly contact.And the method for surface insulationization treatment includes that anodic oxidation and surface coating are plated
Film.If the material of main part of induction pieces is insulator, such as ceramics, glass and answer printed circuit board (PCB) material, main body local surfaces
Need to form conductor shielding body and conductor inductor into column conductorization treatment.The method of surface conductorization treatment includes metal
Vacuum vapor plating, surface metal-layer are pasted and plastic electronic conductor printing.
Fig. 3 A and Fig. 3 B show first concrete structure design embodiment of induction pieces of the invention.Whole induction pieces
It is made up of two parts, one is capacitive sensing body 12, another is capacitance shield body 18.The shape of capacitive sensing body 12 is by a height
Very low cylinder (the slim lamellar bodies of lamellar body or other shapes) and a thin-walled connector 120 (can be thin-walled hollow cylinder
Shape, or thin metal connecting sheet) composition.The very low cylindrical upper surface of height is sensitive surface.Capacitance shield body 18
Outer shape is square, and its central upper portion digs out a storage tank 180, to coordinate the capacitive sensing body of cylinder, the storage tank
It is cylinder groove, volume is far longer than the volume of capacitive sensing body.Capacitive sensing body and capacitance shield body are all by metallic conductor
It is made, and is processed through surface insulation and draw corresponding wire.Two parts link into an integrated entity by bonded adhesives.It is clear that Fig. 3 A
And induction pieces manufacture simplicity and low production cost of the induction pieces of Fig. 3 B than Fig. 4 A and Fig. 4 B.More importantly Fig. 3 A and Fig. 3 B
The structure of induction pieces causes the constant electric capacity of its constant capacity ratio Fig. 4 A and Fig. 4 B induction pieces much smaller.Therefore, Fig. 3 A and Fig. 3 B
Induction pieces can have much higher signal sampling rate and larger measurement sensitivity.This is one of main efficacy results of the present invention.
Fig. 2A and 2B show second concrete structure design embodiment of induction pieces of the invention.Whole induction pieces by
Two parts are constituted, and one is capacitive sensing body 2, and another is capacitance shield body 8.The shape of capacitive sensing body 2 is very low by a height
Center be made up of the cylinder in hole and thin-walled hollow cylinder 201.The very low cylindrical upper surface of height is sensing
Face.The central upper portion of capacitance shield body 8 is dug a cylinder groove 80, and there is same setting through hole in bottom centre.Two parts are all by metal
Conductor material is made, and is processed through surface insulation and draw corresponding wire.Two parts link into an integrated entity by bonded adhesives.Pie graph
Two induction pieces up and down of 13 difference displacement sensing apparatus come from this induction pieces embodiment.And come from first implementation
The induction pieces of scheme are applied to the overall construction design of Figure 16 and Figure 17.
Fig. 7 A and Fig. 7 B show the 3rd concrete structure design embodiment of capacitive sensing part of the invention.Whole sense
Answer part by an entity structure part 34 (insulating body), a capacitive sensing face 32, the electric capacity are provided with the entity structure part
The periphery of sensitive surface 32 is provided with insulated ring 340, and the periphery of insulated ring 340 is coated with 27,38,39 groups of connected capacitance plate lee-side
Into.Entity structure part 34 is made from a material that be electrically non-conductive.Non-conducting material includes ceramics, glass, and printed circuit (PCB) sheet material.
Capacitive sensing face and capacitance plate lee-side are made up of evaporation of metal film plating process or printed circuit preparation method.That is, this
Induction pieces disclosed in implementation method are that the upper surface of insulator is provided with the first metal conductor layer, and first metal conductor layer
Periphery by the preparation method of printed circuit board (PCB), weed out metal material and expose insulating body, and formed and be looped around the
The insulated ring of one metal conductor layer periphery, and remaining second metal conductor layer forms capacitance shield body.Such method and machine
Tool processing method is compared, and is produced low cost in enormous quantities and is easily produced more complicated sensing surface shape.This embodiment
One circular capacitor inductor being made of simplest double-layer printing circuit board.And, Fig. 8 A and Fig. 8 B are an oval electricity
Hold inductor.
Depending on the capacitive sensing body of induction pieces and the shape of displacement sensing objective body are according to concrete application situation.If sensing
The material of part is metallic conductor, and the sensing shape for being easiest to realize is circular and annular (Fig. 2A, 3A, 7A, 13).Induction pieces
The shape of capacitance shield body to surround around capacitive sensing body.If the material of main part of induction pieces is insulator, due to making
It is various to be all not difficult to realize compared with complex plane geometry with evaporation of metal or the processing method of printed circuit.May use
Sensing shape also has square, rectangle in addition to conventional circular and annular, and oval (Fig. 8 A, 9A, 10A).
Fig. 5 A, Fig. 5 B and Fig. 6 A, 6B show the 4th concrete structure design embodiment of induction pieces of the invention.Sense
Answer the capacitive sensing body 4 (Fig. 5 B) that part is made up of a metallic conductor or the electricity that 25 (Fig. 6 B) and another insulating material are made
Hold shield 21 (Fig. 5 B) or 26 Fig. 6 B compositions.The shape of inductor is by the very low cylinder of a height and a thin-walled hollow
Cylinder composition.Shield material of main part is insulator, and surface has carried out conductorization treatment to form screen layer.Surface conductor
The method for the treatment of includes that metal vacuum evaporation coating, surface metal-layer are pasted and plastic electronic conductor printing.In shield top
The heart digs a cylinder groove.Metal inductor is crouched in the cylinder groove of shield, and shield is surrounded around inductor.Inductor and
The part of shield two links into an integrated entity by bonded adhesives.According to service condition, inductor center and shield bottom centre can have
Hole (Fig. 5 B), it is also possible to non-porous (Fig. 6 B).
Figure 11 A and Figure 11 B disclose a kind of composite component, and the compound annex is successively comprising sensing under for being wholely set
The upper induction pieces of part, an intershield body and one.Lower induction pieces include insulating body 54, the capacitive sensing that its upper surface is set
Body 52 and insulated ring 540, the periphery of insulated ring 540 have capacitance plate lee-side 58.Upper induction pieces include insulating body 55, its lower surface
The capacitive sensing body 53 and insulated ring 550 of setting, the periphery of insulated ring 550 have capacitance plate lee-side 56.Screen in the middle of the composite members
Cover body and include insulating body 59.There is metal screen lee-side 57, insulating body 59 and upper sense between lower induction pieces and insulating body 59
Answering has metal screen lee-side 50 between part, and lower induction pieces, intershield body and upper induction pieces both sides have capacitance shield body 60.Institute
State the integrally connected of capacitance plate lee-side 58,57,50,56,60.This induction pieces can be made of four common layer printed circuit boards, its
Only need to weed out a part of metal and form insulated ring the upper and lower surface of four layer printed circuit boards, it is possible to complete whole
The making of composite members.The superiority that complicated capacitive sensing part is made of printed circuit preparation method is apparent.Complex capacitance
The application of induction pieces will specifically give below.
The concept that electric capacity propagated sensation sensor is made of printed circuit preparation method was once suggested in the document of early stage.But
Never had such as specific (Fig. 7 A, 7B, Fig. 8 A, 8B, Fig. 9 A, 9B, Figure 10 A, 10B, Figure 11 A, 11B) implementation case of the invention
Example.The sensing surface shape and structure scheme also side of the invention of the electric capacity propagated sensation sensor constituted with printed circuit preparation method
Face.Present invention further teaches a kind of compound dual monopole capacitor differential displacement sensor, it includes double monopoles described at least two
Capacitance difference displacement component sensor；Each dual monopole capacitor differential displacement sensor be spaced apart or separated by intershield device.
Wherein, each dual monopole capacitor differential displacement sensor includes upper induction pieces, target part and lower induction pieces successively, and each upper induction pieces are simultaneously
Connection connection, each lower induction pieces are connected in parallel, and each upper and lower induction pieces are finally connected with signal processing electronic equipment, and each target part is simultaneously
Connection, and be finally connected with the ground wire of signal processing electronic equipment.Wherein described upper induction pieces and lower induction pieces include capacitance plate
Body and capacitive sensing body are covered, the sensitive surface of the capacitive sensing body is relative with target part surface, the sensitive surface shape and target
Part surface configuration matches.Upper and lower induction pieces therein can use a kind of any of the above-described induction pieces, and target part is as the same.
Refer to shown in Figure 12, it is the compound dual monopole capacitor differential displacement formed using printed circuit preparation method
Sensor.It includes dual monopole capacitor differential displacement sensor 6S and lower dual monopole capacitor differential displacement sensor 7S, both
Between be provided with intershield body 8S.The present embodiment is formed using the mode of printed circuit board (PCB), and it includes two by two-sided
Plate shape into upper induction pieces 62 and lower induction pieces 72, and the composite component 70 formed by four laminates, also two target parts
61、71.Two pieces induction pieces are made (Fig. 7 A and Fig. 7 B) of double-layer printing circuit board.Four layer printed circuits of complex capacitance induction pieces
Plate is made (Figure 11 A and Figure 11 B).The shape of this two pieces target part is as the target part shown in Figure 13, including a sensing
Body 1A, four spring lamellar body 1B, and four spring fixed body 1C.Two target parts are connected together by a connector 68, up and down
Each one 67,69 of impeller is connected with again.Additionally, this entire combination also includes 16 spacers, wherein 63-66,73-76 shows
Eight therein are shown.Positioning plate shape is as the spacer shown in Figure 13.They are by two induction pieces, complex capacitance sense
Part, and two target parts is answered to link together.In addition to part more than, this entire combination also includes a lateral shield
60.It links together all other shield, and connects with the ground wire of signal processing electronic equipment.Whole displacement sensing dress
Put to form four monopole electric capacity.Inductor above two target parts links together, and the inductor below two target parts connects
It is connected together.The purpose of this structure of the invention is the intensity for increasing signal, improves resolution ratio.This combined method can be further expanded
To the multiple complex capacitance induction pieces of use.Six monopole electric capacity such as are formed with two complex capacitance induction pieces and three target parts,
Eight monopole electric capacity etc. are formed with three complex capacitance induction pieces and four target parts.
It is an object of the invention to by induction pieces, the structure design of the entire combination of target part and other parts of periphery
Further 1) to ensure moving in parallel between objective body and inductor, 2) reduce it is non-linear, 3) improve certainty of measurement, 4) reduce
The influence of temperature change, 5) manufacture simplicity.Figure 13 illustrates a tool of dual monopole capacitor differential displacement sensor of the invention
Body whole implementation scheme.The schematic diagram corresponding with Figure 13 is Fig. 1.Impeller act in target part produce with inductor it
Between relative parallel displacement, and then gap (d1, d2) between them produces change.The capacitive sensing body and target of upper induction pieces
The upper surface of body forms a variable capacitance C1.The capacitive sensing body of lower induction pieces forms another with the lower surface of objective body can
Become electric capacity C2.Due to the two monopole electric capacity respectively positioned at target part the upper side and lower side, when target part it is relative with induction pieces to
When any one direction moves in parallel, monopole electric capacity one increases then another reduction, and the difference (C1-C2) of electric capacity forms differential effect,
Identical noise is mutually eliminated, and different variables is applied and measures displacement.
Figure 16 illustrates another operating type of induction pieces and target part, i.e.,：Target part is independently of upper and lower induction pieces
Individually it is fixedly installed.The target part has used the fixed form of peripheral assembly structure.Specifically, the border of target part 11
A pair of length and equiform twin beams beam type spring 16,17 are connected, twin beams beam type spring is affixed directly to periphery
Respectively there is a capacitive sensing part on supporter 20, above and below target part.The detailed structure of induction pieces is referring to Fig. 3 A and 3B.
The capacitive sensing body 15 of upper induction pieces forms a variable capacitance C1 with the upper surface of target part 11.The capacitive sensing of lower induction pieces
Body 12 forms another variable capacitance C2 with the lower surface of objective body.Because the two monopole electric capacity are respectively positioned at the upper of target part
Side and downside, also comprising second impeller (not indicated in figure) being independently arranged, feel relatively when target part is promoted by it
When answering part to be moved in parallel to any one direction, two monopole electric capacity one increase then another reduction, and the difference (C1-C2) of electric capacity is formed
Differential effect measures displacement.This technical scheme is different from the scheme that Figure 13 is disclosed, and target part is not set in this scheme
On lower induction pieces, independently it is fixedly installed on peripheral support body.This target part is realized being fixedly installed again by elastomeric element, but
This elastomeric element is not have multiple spring lamellar bodies, but a pair cantilever springs of parallel longitudinal setting, form such as Figure 18
Shown both arms girder construction, ensure that target part moving in parallel relative to induction pieces.The characteristics of this structure is cantilever
Beam spring is not fixed together directly by the shield of induction pieces with peripheral components.
Figure 17 illustrates a target part and fixes and the structure design of induction pieces movement.Target part 31 is fixed on peripheral support
Motionless on body 20, two one end of induction pieces are connected together by a connecting rod 30, the other end with can form twin beams cantilever beam
The cantilever spring 36,37 being parallel to each other for a pair links together, and twin beams beam type spring is affixed directly to peripheral support body
On 20, also include the 3rd impeller (not indicated in figure), it is parallel outstanding with equiform to act on this pair of length by it
Arm beam spring 36,37 or up and down induction pieces, two capacitive sensing parts carry out translation relative to fixed target part.Induction pieces it is thin
Section is as shown in structure chart 3A and 3B.The capacitive sensing body 15 of upper induction pieces forms a variable capacitance with the upper surface of target part 31
C1.The capacitive sensing body 12 of lower induction pieces forms another variable capacitance C2 with the lower surface of objective body.Two monopole electric capacity point
Not Wei Yu target part the upper side and lower side, when induction pieces disjunctor by the external world promote and relative induction part is parallel to any one direction
When mobile, two monopole electric capacity one increase then another reduction, and the difference (C1-C2) of electric capacity forms differential effect and measures displacement.This
The characteristics of planting structure is that induction pieces are movable members.
It is, of course, also possible to be fixed on peripheral support body using a pair of cantilever springs respectively using upper and lower induction pieces both sides
Fixed (do not indicated in figure) to constitute a target part, and the similar structures that induction pieces can be same, it passes through one the 4th impeller (figure
In do not indicate) realize upper and lower induction pieces moving in parallel relative to target part.
Claims (36)
1. a kind of dual monopole capacitor differential displacement sensor, with signal processing electronic equipment, it is characterised in that：Successively comprising upper
Induction pieces, target part and lower induction pieces；The upper induction pieces and lower induction pieces are connected with signal processing electronic equipment, the target
Part is connected with the ground wire of signal processing electronic equipment；The upper induction pieces and lower induction pieces include capacitance shield body and electric capacity sense
Ying Ti, the sensitive surface of the capacitive sensing body is relative with target part surface, the sensitive surface shape and target part surface configuration phase
Matching；
Wherein, it is provided with through hole on the upper induction pieces and lower induction pieces；The target part is fixedly installed on by elastomeric element
Between upper and lower induction pieces；The both sides of the target part are provided with impeller, and impeller is logical through upper induction pieces and lower induction pieces
Hole.
2. dual monopole capacitor differential displacement sensor as claimed in claim 1, it is characterised in that：The capacitive sensing body and electricity
Hold the metallic conductor part that shield is surface insulation；There is storage tank, the capacitive sensing in the capacitance shield body
Body is slim lamellar body and is arranged in the storage tank of capacitance shield body by a thin-walled hollow connector.
3. dual monopole capacitor differential displacement sensor as claimed in claim 1, it is characterised in that：The capacitive sensing body is gold
Category conductor part, the capacitance shield body is dielectric member of the surface by conductor；
There is storage tank, the capacitive sensing body is slim lamellar body and passes through a thin-walled hollow connector in the capacitance shield body
It is arranged in the storage tank of capacitance shield body.
4. dual monopole capacitor differential displacement sensor as claimed in claim 1, it is characterised in that：The upper induction pieces and lower sense
Part is answered to include insulating body, the capacitive sensing body is provided in the first metal conductor layer of insulating body upper surface, and this first
Metal conductor layer periphery has insulated ring that is exposed by insulating body and being formed, and the capacitance shield body is to be coated in main body to remove
Second metal conductor layer of the outer portion of the first metal conductor layer and insulated ring.
5. dual monopole capacitor differential displacement sensor as claimed in claim 4, it is characterised in that：The induction pieces are in bilayer
Insulated ring is formed using photoetching corrosion method on printed circuit board (PCB), double-layer printing circuit board two sides are coated with metal conductor layer.
6. the dual monopole capacitor differential displacement sensor as described in any in claim 1 to 5, it is characterised in that：The electric capacity
Being shaped as inductor sensitive surface and target part surface is circular, square, rectangle or ellipse.
7. dual monopole capacitor differential displacement sensor as claimed in claim 1, it is characterised in that：The elastomeric element and target
Part integrally connected, it is spring lamellar body of the main body parallel to target part neighboring.
8. dual monopole capacitor differential displacement sensor as claimed in claim 7, it is characterised in that：The number of the spring lamellar body
At least three, it is evenly arranged in the outer rim of target part.
9. dual monopole capacitor differential displacement sensor as claimed in claim 8, it is characterised in that：The one side of the target part or
Two sides is bonded with reinforced sheet, and the reinforced sheet is identical with target part shape.
10. dual monopole capacitor differential displacement sensor as claimed in claim 9, it is characterised in that：The spring lamellar body it is another
One end is connected with flexible fastening body.
11. dual monopole capacitor differential displacement sensors as claimed in claim 10, it is characterised in that：Comprising described at least two
Target part, each target part connects the elastic strip body, and the elastic strip body is connected with flexible fastening body, passes through between each target part
Intermediate support and perimeter support body separate, and the intermediate support is identical with the shape of target part, the perimeter support body with
The shape of flexible fastening body matches.
12. dual monopole capacitor differential displacement sensors as claimed in claim 1, it is characterised in that：The elastomeric element is into
To the cantilever spring of parallel longitudinal setting.
In 13. such as claim 7 to 12 it is any as described in dual monopole capacitor differential displacement sensor, it is characterised in that：The mesh
Tender is individually fixedly installed with upper and lower induction pieces connect setting or independently of upper and lower induction pieces.
In 14. such as claim 1 to 5 it is any as described in dual monopole capacitor differential displacement sensor, it is characterised in that：Also include
There is the second impeller set independently of upper and lower induction pieces and target part；The target part is fixedly installed on by elastomeric element
Between upper and lower induction pieces, the second impeller forces in target part and is allowed to be moved horizontally towards upper induction pieces or lower induction pieces direction.
15. dual monopole capacitor differential displacement sensors as claimed in claim 14, it is characterised in that：The elastomeric element and mesh
Tender integrally connected, it is spring lamellar body of the main body parallel to target part neighboring.
16. dual monopole capacitor differential displacement sensors as claimed in claim 15, it is characterised in that：The spring lamellar body
Number is at least three, is evenly arranged in the outer rim of target part.
17. dual monopole capacitor differential displacement sensors as claimed in claim 16, it is characterised in that：The one side of the target part
Or two sides is bonded with reinforced sheet, the reinforced sheet is identical with target part shape.
18. dual monopole capacitor differential displacement sensors as claimed in claim 17, it is characterised in that：The spring lamellar body it is another
One end is connected with flexible fastening body.
19. dual monopole capacitor differential displacement sensors as claimed in claim 18, it is characterised in that：Comprising described at least two
Target part, each target part connects the elastic strip body, and the elastic strip body is connected with flexible fastening body, passes through between each target part
Intermediate support and perimeter support body separate, and the intermediate support is identical with the shape of target part, the perimeter support body with
The shape of flexible fastening body matches.
20. dual monopole capacitor differential displacement sensors as claimed in claim 13, it is characterised in that：The elastomeric element is into
To parallel longitudinal setting cantilever spring.
21. dual monopole capacitor differential displacement sensors as claimed in claim 13, it is characterised in that：The target part independently of
Upper and lower induction pieces and be individually fixedly installed.
22. dual monopole capacitor differential displacement sensors as claimed in claim 14, it is characterised in that：The target part independently of
Upper and lower induction pieces and be individually fixedly installed.
In 23. such as claim 15 to 20 it is any as described in dual monopole capacitor differential displacement sensor, it is characterised in that：The mesh
Tender is individually fixedly installed independently of upper and lower induction pieces.
In 24. such as claim 1 to 5 it is any as described in dual monopole capacitor differential displacement sensor, it is characterised in that：Also include
There is the 3rd impeller set independently of upper and lower induction pieces and target part；The upper and lower induction pieces side passes through upper end bullet respectively
Property part and lower end elastic component are fixedly installed on the both sides of target part, and the upper and lower induction pieces opposite side is connected by connecting rod；
3rd impeller forces in induction pieces or lower induction pieces, induction pieces and lower induction pieces is moved in parallel relative to target part.
In 25. such as claim 1 to 5 it is any as described in dual monopole capacitor differential displacement sensor, it is characterised in that：Also include
There is the 4th impeller set independently of upper and lower induction pieces and target part；The upper and lower induction pieces both sides are respectively by upper elasticity
Part and lower elastic component are fixedly installed on the both sides of target part, and the 4th impeller forces in induction pieces or lower induction pieces, makes sense
Part and lower induction pieces are answered to be moved in parallel relative to target part.
A kind of 26. compound dual monopole capacitor differential displacement sensors, it is characterised in that：Comprising double monopole electricity described at least two
Tolerance displacement component sensor；Each dual monopole capacitor differential displacement sensor be spaced apart or separated by intershield device；Its
In, each dual monopole capacitor differential displacement sensor includes upper induction pieces, target part and lower induction pieces successively；Each upper induction pieces
Parallel connection, each lower induction pieces are in parallel, and are finally connected with signal processing electronic equipment, each target part parallel connection, and finally with letter
The ground wire connection of number treatment electronic equipment；The upper induction pieces and lower induction pieces include capacitance shield body and capacitive sensing body,
The sensitive surface of the capacitive sensing body is relative with target part surface, and the sensitive surface shape matches with target part surface configuration；
Wherein, it is provided with through hole on the upper induction pieces and lower induction pieces；The target part is fixedly installed on by elastomeric element
Between upper and lower induction pieces；The both sides of the target part are provided with impeller, and impeller is logical through upper induction pieces and lower induction pieces
Hole.
27. compound dual monopole capacitor differential displacement sensors as claimed in claim 26, it is characterised in that：On wherein described
Induction pieces and lower induction pieces include insulating body, and the first metal that the capacitive sensing body is provided in insulating body upper surface is led
Body layer, the first metal conductor layer periphery has insulated ring that is exposed by insulating body and being formed, and the capacitance shield body is bag
Second metal conductor layer of the outer portion except the first metal conductor layer and insulated ring is overlying in main body；The intershield device is
It is coated with the dielectric member of metal conductor layer.
28. compound dual monopole capacitor differential displacement sensors as claimed in claim 27, it is characterised in that：Each upper sense
Part, each lower induction pieces and intershield device is answered to be provided with through hole；Each target part series connection is integrated, the target at two ends
Part is connected with impeller respectively；Each target part is fixedly installed between each upper and lower induction pieces by elastomeric element.
29. compound dual monopole capacitor differential displacement sensors as claimed in claim 28, it is characterised in that：The elastic portion
Part and target part integrally connected, its main body is the spring lamellar body parallel to target part neighboring.
30. dual monopole capacitor differential displacement sensors as claimed in claim 29, it is characterised in that：The spring lamellar body
Number is at least three, is uniformly arranged in the outer rim of target part.
31. dual monopole capacitor differential displacement sensors as claimed in claim 30, it is characterised in that：The one side of the target part
Or two sides is bonded with reinforced sheet, the reinforced sheet is identical with target part shape.
32. dual monopole capacitor differential displacement sensors as claimed in claim 31, it is characterised in that：The spring lamellar body it is another
One end is provided with the flexible fastening body of fixed target part, and the flexible fastening body is provided with spacer up and down.
33. dual monopole capacitor differential displacement sensors as claimed in claim 32, it is characterised in that：Comprising described at least two
Target part, each target part connects the elastic strip body, and the elastic strip body is connected with flexible fastening body, passes through between each target part
Intermediate support and perimeter support body separate, and the intermediate support is identical with the shape of target part, the perimeter support body with
The shape of flexible fastening body matches.
34. dual monopole capacitor differential displacement sensors as claimed in claim 28, it is characterised in that：The elastomeric element is into
To parallel longitudinal setting cantilever spring.
35. dual monopole capacitor differential displacement sensors as claimed in claim 33, it is characterised in that：The target part with it is upper,
Lower induction pieces integrally connected sets or is individually fixedly installed independently of upper and lower induction pieces.
36. dual monopole capacitor differential displacement sensor as described in claim 27 to 35 is any, it is characterised in that：The centre
Screening arrangement and connected lower induction pieces and upper induction pieces be by four layer printed circuit boards by photoetching corrosion side
Method forms insulated ring, and the four layer printed circuit boards two sides are coated with metal conductor layer；Remaining upper and lower induction pieces is in bilayer
Insulated ring is formed using photoetching corrosion method on printed circuit board (PCB), double-layer printing circuit board two sides are coated with metal conductor layer.
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| CN104713466B (en) * | 2015-03-17 | 2017-10-20 | 华侨大学 | High-precision differential type multi-layer annular capacitance gage |
| CN105865320B (en) * | 2016-03-31 | 2018-09-11 | 青岛艾科瑞尔精密仪器科技有限公司 | Displacement, the generation of power and measuring system and impression, scuffing and surface profiler |
| CN106643823A (en) * | 2016-09-09 | 2017-05-10 | 天津易哲微电子技术有限公司 | Method for eliminating influence of temperature on capacitive encoder and capacitive encoder |
| CN108088477B (en) * | 2016-11-21 | 2020-09-22 | 清华大学 | Wane formula electric capacity difference sensor and sensing system |
| CN109596042A (en) * | 2018-12-26 | 2019-04-09 | 北京铂阳顶荣光伏科技有限公司 | A kind of condenser type bending quantity detection apparatus, detection method and coating system |
| CN109975371B (en) * | 2019-04-23 | 2022-05-24 | 北京佳华储良科技有限公司 | Capacitive sensor |
| CN110260772B (en) * | 2019-06-14 | 2024-06-04 | 上海交通大学 | System and method for measuring dynamic relative sliding time course and path of soil and underground structure |
| CN113029209B (en) * | 2021-04-01 | 2022-04-05 | 山东大学 | A unipolar capacitive sensor and joint device |
| CN115540734B (en) * | 2022-11-02 | 2024-03-15 | 北京工业大学 | A vertical micro-displacement measuring device with 8 reeds arranged orthogonally |
| CN115597474B (en) * | 2022-11-02 | 2024-03-15 | 北京工业大学 | Rotary angle error measuring device of one-dimensional guiding mechanism |
| CN115790355B (en) * | 2023-01-31 | 2023-04-18 | 华新水泥技术管理(武汉)有限公司 | Rotary cement kiln deviation detection device and detection method |
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