CN103531423A - Needle-shaped charged particle beam emitter and manufacturing method thereof - Google Patents
Needle-shaped charged particle beam emitter and manufacturing method thereof Download PDFInfo
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- 239000002245 particle Substances 0.000 title abstract description 33
- 238000004519 manufacturing process Methods 0.000 title description 8
- 239000000463 material Substances 0.000 claims description 42
- 229910052751 metal Inorganic materials 0.000 claims description 36
- 239000002184 metal Substances 0.000 claims description 32
- 239000000835 fiber Substances 0.000 claims description 31
- 238000010884 ion-beam technique Methods 0.000 claims description 25
- 238000010894 electron beam technology Methods 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 16
- 238000001467 acupuncture Methods 0.000 claims description 14
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 14
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 10
- 229910052721 tungsten Inorganic materials 0.000 claims description 10
- 239000010937 tungsten Substances 0.000 claims description 10
- 239000002131 composite material Substances 0.000 claims description 8
- 229910052697 platinum Inorganic materials 0.000 claims description 7
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 6
- 238000004626 scanning electron microscopy Methods 0.000 claims description 6
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 239000010936 titanium Substances 0.000 claims description 6
- 239000002657 fibrous material Substances 0.000 claims description 5
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 claims description 4
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052776 Thorium Inorganic materials 0.000 claims description 4
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 4
- 229910052788 barium Inorganic materials 0.000 claims description 4
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052791 calcium Inorganic materials 0.000 claims description 4
- 239000011575 calcium Substances 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 238000000609 electron-beam lithography Methods 0.000 claims description 4
- 229910052735 hafnium Inorganic materials 0.000 claims description 4
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052747 lanthanoid Inorganic materials 0.000 claims description 4
- 150000002602 lanthanoids Chemical class 0.000 claims description 4
- 150000001247 metal acetylides Chemical class 0.000 claims description 4
- 229910044991 metal oxide Inorganic materials 0.000 claims description 4
- 150000004706 metal oxides Chemical class 0.000 claims description 4
- 150000004767 nitrides Chemical class 0.000 claims description 4
- 238000002360 preparation method Methods 0.000 claims description 4
- 229910052706 scandium Inorganic materials 0.000 claims description 4
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 claims description 4
- 229910052712 strontium Inorganic materials 0.000 claims description 4
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims description 4
- 229910052727 yttrium Inorganic materials 0.000 claims description 4
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 238000005430 electron energy loss spectroscopy Methods 0.000 claims description 3
- 230000005284 excitation Effects 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 229910052702 rhenium Inorganic materials 0.000 claims description 3
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 239000011651 chromium Substances 0.000 claims description 2
- 229910052732 germanium Inorganic materials 0.000 claims description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 2
- 229910052741 iridium Inorganic materials 0.000 claims description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052762 osmium Inorganic materials 0.000 claims description 2
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 101000623895 Bos taurus Mucin-15 Proteins 0.000 abstract 2
- 230000005684 electric field Effects 0.000 description 22
- 239000007787 solid Substances 0.000 description 19
- 230000000694 effects Effects 0.000 description 17
- 239000007788 liquid Substances 0.000 description 17
- 239000000523 sample Substances 0.000 description 14
- 239000006185 dispersion Substances 0.000 description 10
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 9
- 238000010276 construction Methods 0.000 description 7
- 238000009826 distribution Methods 0.000 description 7
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 6
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 6
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- 239000013078 crystal Substances 0.000 description 6
- 238000000605 extraction Methods 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000005194 fractionation Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000004904 shortening Methods 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000006056 electrooxidation reaction Methods 0.000 description 3
- 229920000049 Carbon (fiber) Polymers 0.000 description 2
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000004917 carbon fiber Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 239000000686 essence Substances 0.000 description 2
- 230000001815 facial effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000004408 titanium dioxide Substances 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
- H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
- H01J1/3044—Point emitters
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/063—Geometrical arrangement of electrodes for beam-forming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electron Sources, Ion Sources (AREA)
- Cold Cathode And The Manufacture (AREA)
Abstract
The invention aims at providing a needle-shaped charged particle beam emitter. The emitter is needle-shaped. The top end of the needle-shaped emitter at least comprises two components, wherein a component I is a hole-shaped component with an opening towards the pointing direction of the top and a component II is a tip component which is arranged in the hole of the component I. Electrons are emitted at least from the vertex of the tip of the component II. The emitter has the characteristics that the applied voltage required for emission is low, the emitting area for emitting charged particle beams is small and the angle of divergence is small.
Description
Technical field
This patent belongs to vacuum electron beam emitter field.
Background technology
Use the instrument of focused beam to comprise Image-forming instrument, such as scanning electron microscopy (SEM) and transmission electron microscope (TEM); Manufacture instrument such as electron beam lithography machine (EBL) and chemical analysis instrument are such as electron excitation X-ray energy spectrometer, electron energy loss spectroscopy instrument (EELS), and Auger electron spectrometer.In order to realize higher performance, these appliance requires are equipped with an electron emitter that brightness is higher.The brightness of electron emitter is defined as in unit and applies the size of current within unit solid angle degree that is limited in that voltage Xia Cong unit emitter surface area launches.The electron emitter that present stage is widely used in focused beam instrument comprises three types: heat emission body, Schottkey Injection body and awkward silence at a meeting electron emission emitter.Wherein Schottky electron emitter and awkward silence at a meeting electron emission emitter have and surpass 1000 times of above more high brightness with respect to heat emission body, are therefore more suitable as the electron emitter of high-resolution focused electron bundle device.
The common trait of these two kinds of electron emitters is: they take mcl metal needle point as basic composition form.The microscopic appearance of metal needle point can be counted as being approximately hemisphere face.This hemisphere face consists of the crystal face of the different orientation linking together again.In electron emitter use procedure, with respect to a near reference electrode, a certain size reverse voltage is applied on metal needle, thereby on metal needle top, produces the electric field of some strength.Under the effect of this electric field, electron beam sends from being arranged at the crystal face of needle point front end face.In the situation that temperature is certain, electric field is stronger, and the electric current of launching is also larger.It is the tungsten tip of (100) crystal face foremost that Schottky electron emitter is often made; And awkward silence at a meeting electron emission emitter is often made and be take (310) crystal face as tungsten tip foremost.Although Schottky electron emitter also needs to add the diffusion layer that contains zirconia material, its early stage is substantially similar to awkward silence at a meeting emitter for the making treatment process of tungsten needle material: get a mcl tungsten filament, front end becomes prong shape by electrochemical corrosion, thereby heating is melted needle point foremost, goes out level and smooth nearly hemisphere face.In general, heating-up temperature is higher, and the time is longer, and this hemispherical radius of curvature is just larger, and needle point is baldr.From Electric Field Distribution in shape, hemispherical radius of curvature is larger, and it is axial that the electrical field shape of needle point front end is more parallel to needle point, and the electronic three-dimensional angle stragging of launching is also less, and electron beam more shrinks the central shaft to tungsten pin in other words; Otherwise less electron beam solid angle is larger, electron beam is loose all the more.In conjunction with the definition of electron emitter brightness, in this sense, radius of curvature is conducive to greatly the realization of high brightness, because disperse solid angle, diminishes., from emitter area, the hemispherical radius of curvature of needle point is larger, and the surface of emission also becomes larger foremost.For onesize emission current, the definition based on electron emitter brightness is known, becomes large surface of emission area, can reduce brightness on the contrary.The more important thing is, applying under the prerequisite that voltage is constant, strengthen needle point radius of curvature, can reduce needle point top electric field strength, thereby reduce emission current.This effect also makes electron emitter brightness reduce.
In actual applications, Schottky electron emitter has adopted compared with larger radius of curvature (approximately 500 nanometer) and has pursued the little solid angle of dispersing.Its brightness is limited by large emission area accordingly; And awkward silence at a meeting electron emission emitter has adopted less radius of curvature (being less than 100 nanometers) to pursue little emission area.Its brightness is limited by the large solid angle of dispersing accordingly.Specifically, present stage, the use voltage of best Schottky electron emitter and awkward silence at a meeting electron emission emitter is all approximately 4 to 5 kilovolts.Schottky electron emitter has higher unit solid angle current density, i.e. the every solid angle radian of 100 micromicroampere.Awkward silence at a meeting electron emission emitter is the every solid angle radian of 10 micromicroampere.And awkward silence at a meeting electron emission emitter has higher unit are current density, 17000 amperes every square centimeter.Schottky electron emitter is 5300 amperes every square centimeter.In general final electron emitter brightness, awkward silence at a meeting electron emission emitter has higher brightness, i.e. 2E7 ampere per unit square centimeter unit solid angle Rad kilovolt.And the brightness of Schottky electron emitter is 1E7 ampere per unit square centimeter unit solid angle Rad kilovolt.
And under ideal situation, the pursuit that electron emitter need to be realized following three aspects: further improves brightness simultaneously: i.e. the less solid angle of dispersing, less emitter area, stronger surface field intensity under given voltage.The known technology of present stage, cannot realize desirable like this high brightness electron emitter.Essence, this is that what to adopt due to the shape of existing electron emitter is simple hemispherical needle point, and unique parameter that can change is exactly hemisphere radius of curvature.And radius of curvature is pursued for the index of three aspects:, there is conflicting impact.Thereby cause realizing the more electron emitter of high brightness.
Summary of the invention
The present invention is intended to propose a kind of new electron emitter structure and respective material and forms, thus increased can independent regulation electron emitter parameter, realized the brightness of the existing electron emitter of further raising.
This electron emitter is characterised in that: described emitter is needle-like, and pin head portion at least comprises two components, component one is the hole shape component having at least towards pin top pointing direction opening, component two is the needle point components that are arranged in component one cavity, and electronics is at least launched from the needle point summit of component two.
Although this projectile configuration can be used as high brightness electron source and uses, it equally can be used as the emission source of other charged particle beams.Such as metal ion emission source or gas ion emission source.This kind of emission of ions source can be used on above focused ion beam instrument.The advantage that possesses equally high brightness.
The implication that component two is arranged in the cavity of component one refers to: in certain observed direction, component two can be regarded as among component one.The example of observed direction has: top view, side-looking, overlooks.Component two allows some in certain observed direction, to be arranged at outside component one.For example, component two surpasses the cavity of component one in length, so or front end, or rear end is exposed to outside cavity.Again for example, when cavity is divided into many parts cavity of a more than part, the middle part of component two also can be exposed to outside cavity.
Again for example, component one is tended to component two but axisymmetric shape in must not using, as cylindrical cavities and cone tip.In the situation that using symmetric shape, the symmetry axis of component one tends to overlap with the symmetry axis of component two.In some cases, when electron emission characteristic can be received, the two symmetry axis can not overlap yet.
Transmitting body acupuncture of the present invention summit can also comprise other components except component one and component two.For example, can comprise the connection component that connects component one and component two, or other are used for fixing the component of component one and component two positions.In some cases, component one and component two are electrically insulated from each other, and apply different voltage in use.For example, in these cases, also should comprise component one and component two are carried out to the component of electric insulation and the component of conducting respectively voltage to them.
Furthermore, electron emitter of the present invention, one is preferably characterised in that: its component one and component two are electric conducting state, and its voltage is identical.
Thereby two components both can be directly connected and naturally have identical voltage with electric conductor, also can separate and in use apply respectively identical voltage with electrical insulator.
Further, electron emitter of the present invention, another is preferably characterised in that: its component one, in the direction of pointing on transmitting body acupuncture top, it is face size foremost, if as plane, be defined as effective overall diameter, if as spherical calotte, be defined as minimum effectively curvature diameter, should be less than 100 microns.
Because component one is along pin top pointing direction opening, thus emitter foremost face can comprise a cavity.Face foremost described herein should be considered as imagination and ignore this cavity and the shape of formation.If face plane foremost, tends to but must not be Central Symmetry face, can be arbitrary polygon.Here effective overall diameter one word of using in describing, be construed as can comprise this foremost face at the diameter of interior smallest circular.Here effective curvature diameter one word of minimum of using in describing, be construed as can comprise this foremost face at the diameter of interior smallest sphere.In principle, face is less foremost, identical, applies under voltage, and the electric field strength that pin top produces is just larger.Therefore, in some cases, front end face size tends to be less than 50 microns.In other situation, tend to be less than 10 microns.In other situation, tend to be less than 5 microns.In other situation, tend to be less than 2 microns.In other situation, tend to be less than 500 nanometers.In other situation, tend to be less than 100 nanometers.
Further, electron emitter of the present invention, another is preferably characterised in that: its component one is on the pointing direction of pin top, towards front and back, to distinguish the hollow round table body structure of opening.
In this is described, part or major part that Rotary-table is interpreted as component two comprise a shape that is approximated to Rotary-table.The upper and lower end face of this Rotary-table both can vary in size also can be big or small identical.Component two can also comprise other part, for example, connect the part of component two and pin emitter main body, or connects the part of component two and component one, or owing to limit by processing method, must retain, or the part that is not easy to remove.The length of this Rotary-table intermediate void, in some cases, tends to be shorter than 20 microns.In other situation, tend to be shorter than 10 microns.In other situation, tend to be shorter than 5 microns.In other situation, tend to be shorter than 2 microns.In other situation, tend to be shorter than 500 nanometers.In other situation, tend to be longer than 1 micron.In other situation, tend to be longer than 2 microns.
Further, electron emitter of the present invention, another is preferably characterised in that: its component one, on the pointing direction of pin top, its foremost face higher than the needle point summit of component two.
Further, electron emitter of the present invention, when component one is that in the situation of open circles stage body, another is preferably characterised in that: its open circles stage body component one, on the pointing direction of pin top, end face is lower than the needle point summit of component two thereafter.Its front end face is higher than the needle point summit of component two, and needle point summit is positioned at inside, cavity in side cutaway view.In other cases, its front end face is also lower than the needle point summit of component two.
Further, electron emitter of the present invention, another is preferably characterised in that: its needle point component two consists of effective single fiber shape material.
Fibrous material described herein is interpreted as club-shaped material, and its overall diameter is consistent in the longitudinal direction substantially.This had both comprised solid fibrous material, also comprise hollow, porous.In some cases, fibrous material tends to straight in the longitudinal direction.In other cases, can be also crooked or curl.Described single fiber is interpreted as: in electron source use procedure, some moment the actual electronics using from single fiber.In this electron emitter, can also comprise other plurality of fibers, but a certain moment in use, only having the electronics of a fiber transmitting is the actual electronics that uses, this fiber should be understood to effective single fiber.Other fibers should be used as this electron source annexing ingredient.For example, at effective single fiber, no longer electron emission or electronics are no longer utilized the standby fiber in situation.
On this basis, another is preferably characterised in that this electron source: its fibrous component two, on the pointing direction of pin top, in side cutaway view, its part is positioned at outside component one cavity.
Further, electron emitter of the present invention, when component one is open circles stage body, component two is in the situation of effective single fiber shape material, another is preferably characterised in that: at least a portion of this fibrous material, in the direction of pointing on pin top, lower than the Rotary-table rear end face of component one.
Further, electron emitter of the present invention, another is preferably characterised in that: its main composition material comprises: tungsten, molybdenum, tantalum, rhenium, titanium, chromium, platinum, osmium, iridium and the alloy that these elements are main component of take, main component is carbon, silicon, the material of germanium, metal oxide, metal boride, metal nitride, metal carbides, and metallic element is wherein calcium, strontium, barium, scandium, yttrium, all lanthanide series, thorium, titanium, the combination of one or more in zirconium and hafnium.
Further, electron emitter of the present invention, another is preferably characterised in that: the main composition material of its component one is for being comparatively difficult for the high work function electric conducting material of electron emission, and the main composition material of component two is the low work function electric conducting material of comparatively easy electron emission.
Here for the definition of component material work function and electron emission complexity, should be understood to the situation of electron emission in the actual use of material therefor.The situation of actual transmission electronics, except depending on the characteristic of material itself, also comprises surface treatment, the impact of the impact of the techniques such as plated film and vacuum residual gas of living in.
Further, electron emitter of the present invention, another is preferably characterised in that: the main composition material of its component two is metal oxide, metal boride, metal nitride, metal carbides, and metallic element is wherein calcium, strontium, barium, scandium, yttrium, all lanthanide series, thorium, titanium, the combination of one or more in zirconium and hafnium.
Owing to the present invention proposes a kind of new structure about emitter, so all electron emitter materials in the past can be taked this structure accordingly.In some cases, our preferred fusing point is higher, and hardness is larger, and electronics is easy to the material of transmitting.Material category given here, is interpreted as the example that this emitter can use material.The present invention only only limits to these materials or combination of materials.
Another object of the present invention is exactly to propose a kind of method of using the electron emitter of this invention, the method of its electron emission at least comprises that following step: a. arranges a reference electrode near emitter, and it is negative voltage on needle point component two at least with respect to this reference electrode that b. applies one.
Outside these steps, in some cases, this emitter can be heated or cooled a temperature, thereby contributes to electron emission or contribute to the realization of high current stability.In other cases, certain gas is introduced into around emitter, thereby plays the effect comprising in stable being transmitted in.In an elite example, the gas of introducing is oxygen.
Another object of the present invention is exactly to propose a kind of needle-like electron emitter of usining this invention as the electron beam apparatus of electron emission source, it comprises: scanning electron microscopy, transmission electron microscope, scanning transmission electron microscope, electron beam lithography machine, electron-beam excitation X-ray energy spectrometer, electron energy loss spectroscopy instrument, Auger electron spectrometer.
Another object of the present invention is to provide the preparation method of an electron emitter, it is characterized in that: described emitter is needle-like, and pin head portion at least comprises two components, component one is the hole shape component having at least towards pin top pointing direction opening, component two is the needle point components that are arranged in component one cavity, electronics is at least launched from the needle point summit of component two, and the process of preparing this emitter comprises following steps: a. prepares the element body of needle-like; B. in face of pin top pointing direction, with the Zhen Ding local limited region of this needle-like element body of ion beam bombardment, thereby the material in the region bombarded is removed, form the structure of hole shape.
Wherein ion beam bombardment for example can adopt focused ion beam technology.For the restriction in bombardment region, can use the ion-beam scanning function that for example computer program is controlled.
Furthermore, preparation method of the present invention, one is preferably characterised in that: local limited region described in above-mentioned steps b is ring-type, thereby forms empty time, the central reserve part material in cavity, this reserve part is directly used as or is further processed into described needle point component two.If the tip of central reserve part is enough little, can directly be used as component two so.If size is not little, or shape needs to improve, and can further process.In a preferred example, ion beam is used to continue this central reserve part of bombardment, until it forms an enough little needle point, thereby is used as component two.
The invention has the advantages that, in electron emitter manufacture process, the electron emission region that component two is actual use, thus can obtain high surface current density by changing its size shape; And control and can be used to assist component two to regulate distribution shape and the power of electric field for the size shape of component one.Thereby further realize high solid angle current density and lower operating voltage.Comprehensive, can obtain the electron source brightness of more increasing than single metal needle point structure.Thereby realize the resolution that corresponding electron beam apparatus is higher.
Accompanying drawing explanation:
Fig. 1 is the side view outline of needle-like emitter 100.
Fig. 2 is for dividing 200 side cutaway view in transmitting body acupuncture top.
Fig. 3 is for dividing 2000 vertical view in transmitting body acupuncture top.
Fig. 4 is that in embodiment 2,300 side cutaway view is divided at pin top.
Fig. 5 is that in embodiment 3,400 side cutaway view is divided at pin top.
Fig. 6 is that in embodiment 4,500 side cutaway view is divided at pin top.
Fig. 7 is for dividing 5000 vertical view in transmitting body acupuncture top.
Fig. 8 is that in embodiment 5,600 side cutaway view is divided at pin top.
Fig. 9 is near needle-like emitter 100 distribution map of the electric field in space it while being applied voltage with respect to adjacent electrode.
Figure 10 be a kind of emitter without acicular texture while being applied voltage with respect to adjacent electrode near the distribution map of the electric field in space.
Figure 11 be when in embodiment 2, pin top divides 200 to be applied voltage with respect to adjacent electrode near the distribution map of the electric field in space.
Figure 12 be a kind of needle-like emitter without hole shape component while being applied voltage with respect to adjacent electrode near the distribution map of the electric field in space.
Figure 13 is the structure chart of embodiment 7 electron source that comprises needle-like emitter.
Figure 14 is the structure chart of a scanning electron microscopy that comprises electron source in embodiment 8.
Following content will provide for specific descriptions of the present invention and example.Need to be pointed out that to professionals in this field, the example below providing can directly be used for transforming out other needle point components, the combining structure of hole shape component and their material, extends naturally but all should be identified as this patent that does not depart from this patent core content.
Below in conjunction with specific embodiment, the present invention will be further described in detail, but be not limited to these embodiment.
Embodiment 1
Fig. 1 has shown the sketch map of a needle-like emitter basic configuration, and this sketch map does not comprise the details that pin top is divided and other parts that connect needle-like emitter.Needle-like emitter 100 described herein consists of three essential parts: pin head portion 102, needle body part 106, and the constriction 104 that connects both.Positive direction is the direction that pin top is pointed to, as arrow 108 marks.In a concrete example, the basic configuration of this needle-like emitter is formed by corroding by single metal wire.For example, an one metal wire, puts into etchant solution by one, and wire enters one of liquid level part placed around to electrode.Apply voltage between to electrode and wire until wire in liquid level corrosion fracture.Now one wiry just forms needle-like.Continuation is corroded formed pin jacking row, pin top deglabration thereupon.For example, be existingly used for processing and scan the basic configuration that the technique of tunnel microscope needle point used can directly be used for processing needle-like emitter.In general, scan tunnel microscope pin used top curvature diameter and be less than 10 nanometers.By control, continue the time length of corrosion, we just can increase the curvature diameter on pin top.In a preferred example, wire is tungsten filament, and corrosive liquid is potassium hydroxide solution, to electrode, is platinum electrode.
Fig. 9 shown when an adjacent electrode is set near it, and this needle-like emitter 100 is expected the effect producing.In a concrete example, this adjacent electrode is one over against pin top pointing direction 708 and be arranged at the plate electrode 702 in emitter 100 dead aheads.Between 702 and 100, with a voltage source 704, apply voltage difference.With respect to electrode 702, emitter 100 voltage above can be both that positive voltage can be also negative voltage.When electron emission is used, can use negative voltage.In the situation that applying voltage difference, the distribution of current potential equipotential lines 710 as shown in FIG..This place sign equipotential lines consists of the equipotential lines of same potential difference.Based on basic physical principle, the more intensive local electric field strength of equipotential lines is larger.As shown in Figure 9, the needle-like basic configuration of emitter 100 is near the electric field in booster injection top effectively, thereby charge particle emission is become, is more prone to.On the contrary, if emitter does not have the basic configuration of needle-like, identical executing in alive situation, the electric field strength on emitter surface will greatly weaken.In example shown in Figure 10, emitter 800 is bar-shaped, and its barred body diameter is identical with needle body diameter in Fig. 9 emitter 100, i.e. 106 section diameters in identical and Fig. 1.Barred body sensing 808 is also identical with pin top sensing 708 in Fig. 9.The distance of adjacent electrode 802 and stick electrode 800 and relative position are all identical with 702 and 100 distance and relative position in Fig. 9.Voltage source 804 also applies and 704 the same voltages in Fig. 9.Can find out under these circumstances, equipotential lines 810 is 710 congregational rates on 100 surfaces in the congregational rate of 800 front end faces will obviously be weaker than Fig. 9,800 front end face electric fields are obviously weaker than 100 surface fields, can not play the effect that weakens charge particle emission difficulty.
Except utilizing the electrochemical corrosion time to control the size of pin top, can also use mechanical lapping, or the method for ion beam processing forms required pin top size.In a preferred example, it is 10 microns that the pin of needle-like emitter 100 pushes up equivalent curvature diameter.In another preferred example, it is 5 microns that the pin of needle-like emitter 100 pushes up equivalent curvature diameter.In another preferred example, it is 2 microns that the pin of needle-like emitter 100 pushes up equivalent curvature diameter.
In a preferred example, charged particle is electronics, and institute's emission band beam of charged particles is electron beam.
Embodiment 2:
Fig. 2 has shown the embodiment of a needle-like transmitting body acupuncture roof construction 200.In this side cutaway view, a needle point component 204 is set on the axis of hole shape component 202.Positive direction is whole needle-like emitter pin top direction, as shown in arrow 208.The front end face plane of hole shape component 202 is labeled as 210.The most front summit that comprises needle point component 204 and be parallel to 210 plane and be labeled as 212.The hole DDI of hole shape component 202 is 214.The front end face DDI of hole shape component 202 is 206.In a preferred embodiment, hole shape component 202 and needle point component 204 are the revolution symmetric body with respect to common center axle.210 end faces are positioned at the front end of 212 planes, and needle point component 204 is positioned at the inside of hole shape component 202.In the example of a needle-like transmitting body acupuncture roof construction 2000, its vertical view as shown in Figure 3.In Zhong， hole, this visual angle shape component 2002, be ring-type, needle point component 2004 is positioned at hole shape component circle centre position.
The effect of structure shown in Fig. 2 is described below by example.When whole needle-like emitter is applied in the situation of voltage as shown in Figure 9, pin top divides near Potential Distributing 200 as shown in figure 11.Arrow 908 is needle-like transmitting body acupuncture top pointing direction.The existence of hole shape component 202 makes equipotential lines 910 to the central interior depression in hole, thereby makes near charged particle axis be subject to the component towards central shaft.When charged particle is when needle point component 204 emits, form the little charged particle beam 912 of dispersing solid angle.As a comparison, constant when other conditions, only remove the situation of hole shape component 202, by Figure 12, shown.In this situation, needle point component 1002 does not have hole shape component around, thus in alive situation, its around equipotential lines 1010 not to shape of concavity.So power line does not have the component of assembling to axis yet.The charged particle beam 1012 that component 1002 is launched presents the larger angle of divergence.Relatively Figure 11 and Figure 12 are known, and the effect of hole shape component reduces institute's emission band beam of charged particles angle of divergence.It is to be noted, although the described charge particle emission performance of Fig. 9 and Figure 11 is based on a concrete emitter shape, but the emitter needle-like form that they show, the effect of hole shape component and needle point component is equally applicable to the emitter that other are formed by similar shape state combination.These effects can partly be summarised as: emitter needle-like form has strengthened the electric field strength that pin top is divided, and hole shape component has been controlled direction and the dispersion angle of the charged particle beam of launching from needle point component.In a concrete example, when hole diameter 214 is 2 microns, end face 210 is 500 nanometers with plane 212 distances, and pin top front end face diameter 206 is that in the situation of 4 microns, the dispersion angle of divergent bundle is 5 degree.When institute's making alive is negative 3000 volts, electron emitter brightness is 4E7 ampere per unit square centimeter unit solid angle Rad kilovolt.
In an example, structure shown in Fig. 2 is processed realization by focused ion beam.First, the basic configuration of needle-like emitter is by electrochemical corrosion conduction club-shaped material gained.Then by focused ion beam, cut out platform-like pin top.Afterwards, with focused ion beam in the form of a ring pattern in face of pin top pointing direction, scan this platform-like pin top, material is removed in the region being scanned.Scanning continues until pin top forms a hole, and in the centre in hole, has columnar material residue.Then ion-beam scanning region narrows down on this residue columnar material, and focused ion beam continues to remove excess stock until columnar material forms needle point component.This step can use the disclosed step of utilizing focused ion beam technology to make atom probe microscope needle point sample to carry out.Now hole shape component one and needle point component two all form.The distance of plane 210 and plane 212 can strengthen by shortening the length of needle point component two.And the method for focused ion beam shortening length of needlepoint is all open in the pertinent literature of making atom probe microscope sample.In a concrete example, conduction club-shaped material is rare-earth boride.In another concrete example, conduction club-shaped material is lanthanum boride.Concrete needle-like element body etching condition is disclosed by pertinent literature.
Embodiment 3:
Fig. 4 has shown another embodiment about needle-like transmitting body acupuncture roof construction 300.Positive direction is defined as pin top pointing direction, shown in arrow 310.In this embodiment, the forward part of hole shape component 302 does not form plane.Accordingly, can be similar to a spherical calotte 306 forward part of hole shape component 302.The radius of this spherical calotte is labeled as 308.Plane 312 is defined as through hole shape component 302 the most front points and perpendicular to the plane of positive direction 310.Plane 314 is defined as through the most front point of needle point component 304 and perpendicular to the plane of positive direction 310.In this embodiment, because hole shape component outer surface is sphere, with respect to the structure that in embodiment 2, front end is plane, be more conducive to execute the stronger electric field of generation in alive situation identical.Thereby under identical emission current, reduce required voltage.In this embodiment, charged particle beam at least sends from needle point component 304, and this charged particle beam is because the existence of hole shape component 302 has the feature of small divergence angle.Although the described charge particle emission performance of Fig. 9 and Figure 11 is based on another concrete emitter shape, but the emitter needle-like form that they show, the effect of hole shape component and needle point component is equally applicable to the emitter being combined by similar portions in this example.These effects can partly be summarised as: emitter needle-like form has strengthened the electric field strength that pin top is divided, and hole shape component 302 has been controlled direction and the dispersion angle of the charged particle beam of launching from needle point component 304.In a specific embodiment, it is 2 microns that pin pushes up anterior radius of curvature 308, end face 312 is 300 nanometers with plane 314 distances, apply voltage in the situation of negative 2000 volts, the dispersion angle of divergent bundle is 5 degree, and emitter brightness is 5E7 ampere per unit square centimeter unit solid angle Rad kilovolt.
In a specific embodiment, the basic configuration of needle-like emitter forms by corroding an one metal wire.For example, an one metal wire, puts into corrosive liquid by one, and wire enters one of liquid level part placed around to electrode.Apply voltage between to electrode and wire until wire in liquid level corrosion fracture.The metal needle forming afterwards continues to be positioned in corrosive liquid, keep voltage, thereby the needle point having formed continues the deglabration that is corroded, until form required top curvature diameter 308.Afterwards, with focused ion beam in the form of a ring pattern in face of pin top pointing direction, scan the planar pin of this hemisphere top, material is removed in the region being scanned.Scanning continues until pin top forms a hole, and in the centre in hole, has columnar material residue.Then ion-beam scanning region narrows down on this residue columnar material, and focused ion beam continues to remove excess stock until columnar material forms needle point component.This step can use the step of disclosed making atom probe microscope sample to carry out.Now hole shape component one and needle point component two all form.The distance of plane 312 and plane 314 can strengthen by shortening the length of needle point component two.And the method for focused ion beam shortening length of needlepoint is all open in the pertinent literature of making atom probe microscope sample.In a preferred example, wire is tantalum wire; Corrosive liquid is phosphoric acid, acetic acid, the mixed liquor of sulfuric acid and hydrofluoric acid; To electrode, it is platinum electrode.
Embodiment 4:
Fig. 5 has shown the embodiment of another needle-like transmitting body acupuncture roof construction 400.In this side cutaway view, a needle point component 404 is set on the axis of hole shape component 402.This needle point component 404 is comprised of single fiber shape material.Positive direction is whole needle-like emitter pin top direction, as shown in arrow 408.The front end face plane of hole shape component 402 is labeled as 412.The most front summit that comprises fibrous needle point component 404 and be parallel to 412 plane and be labeled as 414.In a preferred embodiment, 412 end faces are positioned at the front end of 414 planes, and fibrous needle point component 404 is positioned at the inside of hole shape component 402.In another preferred embodiment, 412 end faces are positioned at the rear portion of 414 planes, and the front summit of fibrous needle point component 404 is positioned at the outside of hole shape component 402.Charged particle beam at least sends from the top of fibrous component 404.Although the described charge particle emission performance of Fig. 9 and Figure 11 is based on another concrete emitter shape, but the emitter needle-like form that they show, the effect of hole shape component and needle point component is equally applicable to the emitter being combined by similar portions in this example.These effects can partly be summarised as: emitter needle-like form has strengthened the electric field strength that pin top is divided, and hole shape component 402 has been controlled direction and the dispersion angle of the charged particle beam of launching from needle point component 404.In a preferred example, charged particle beam is electron beam.
In a specific embodiment, the basic configuration of needle-like emitter forms by corroding an one metal wire.For example, an one metal wire, puts into etchant solution by one, and wire enters one of liquid level part placed around to electrode.Apply voltage between to electrode and wire until wire in liquid level corrosion fracture.Now one wiry just forms needle-like.Then by focused ion beam, cut out platform-like pin top.Afterwards, with the rounded pattern of focused ion beam, in face of pin top pointing direction, scan this platform-like pin top, material is removed in the region being scanned.Scanning continues until pin top forms a hole.Afterwards in an atmosphere that contains deposition of elements, by the fixed point of focused beam cover hole central authorities.Deposition of elements is deposited in this fixed point under the irradiation of electron beam is brought out, and is piled into gradually one along the fiber of beam direction.The relative position of plane 412 and plane 414 and distance are determined by fibre length.And fibre length, in this example, is controlled by sedimentation time.In a preferred example, wire is tungsten filament, and corrosive liquid is potassium hydroxide solution, to electrode, is platinum electrode, and deposition of elements is carbon.
In a concrete example, when hole diameter is 1 micron, end face 412 be positioned at plane 414 before, and distance is 700 nanometers, pin top front end face diameter is 5 microns, and the diameter of fibrous component 404 is in the situation of 60 nanometers, and applying voltage is 3000 volts, the dispersion angle of divergent bundle is 3 degree, and emitter brightness is 4E7 ampere per unit square centimeter unit solid angle Rad kilovolt.
Embodiment 5:
Fig. 6 has shown the embodiment of another needle-like transmitting body acupuncture roof construction 500.In this side cutaway view, a needle point component 504 is set on the axis of hole shape component 502.This needle point component 504 is comprised of single fiber shape material.Positive direction is whole needle-like emitter pin top direction, as shown in arrow 508.The front end face plane of hole shape component 502 is labeled as 512.Its rear end facial plane is labeled as 516.The most front summit that comprises fibrous needle point component 504 and be parallel to 512 plane and be labeled as 514.Fibrous needle point component 504 is connected to and connects on component 510, and its position part is controlled by the shape size of component 510.In a preferred embodiment, 512 end faces are positioned at the front end of 514 planes, and 516 end faces are positioned at the rear end of 514 planes, the front summit of fibrous needle point component 504 is positioned at the inside of hole shape component 502, and the rear summit of fibrous needle point component 504 is positioned at the outside of hole shape component 502.In another preferred embodiment, 512 end faces are positioned at the rear portion of 514 planes, and 516 end faces are positioned at the front end on fibrous component 504 rear summits, be the outside that the front summit of fibrous needle point component 504 is positioned at hole shape component 502, the rear summit of fibrous needle point component 504 is also positioned at the outside of hole shape component 502.Charged particle beam at least from fibrous component 504 summit send.In the example of some needle-like transmitting body acupuncture roof construction 5000, its vertical view as shown in Figure 7.In Zhong， hole, this visual angle shape component 5002, be ring-type, fibrous needle point component 5004 is positioned at hole shape component circle centre position and is connected in and connects on component 5006.
At least a portion of needle point component 504 is positioned at the outside of hole shape component 502, such designs simplification manufacturing process.This is because in manufacturing process, can needle point component 504 be operated in the outside of hole shape component 502.The operation here comprises and is not limited in cutting, connects, and shifts, fixing, covers.Although the described charge particle emission performance of Fig. 9 and Figure 11 is based on another concrete emitter shape, but the emitter needle-like form that they show, the effect of hole shape component and needle point component is equally applicable to the emitter being formed by similar shape state combination in this example.These effects can partly be summarised as: emitter needle-like form has strengthened the electric field strength that pin top is divided, and hole shape component 502 has been controlled direction and the dispersion angle of the charged particle beam of launching from needle point component 504.In a preferred example, charged particle beam is electron beam.
In a specific embodiment, the basic configuration of needle-like emitter forms by corroding an one metal wire.For example, an one metal wire, puts into etchant solution by one, and wire enters one of liquid level part placed around to electrode.Apply voltage between to electrode and wire until wire in liquid level corrosion fracture.Now one wiry just forms needle-like.Then by focused ion beam, cut out platform-like pin top and connect component 510.Afterwards, with the rounded pattern of focused ion beam, in face of pin top pointing direction scanning platform shape pin top, material is removed in the region being scanned.Scanning continues until pin top forms hole shape component 502.Fibrous component 504 is connected and connects on component 510 and fix afterwards.The relative position of plane 512 and plane 514 and distance are determined by length and the link position of fibre fractionation 504.In a preferred example, wire is tantalum wire, and corrosive liquid is phosphoric acid, acetic acid, the mixed liquor of sulfuric acid and hydrofluoric acid; To electrode, it is platinum electrode.Fibre fractionation 504 is zinc oxide fiber, titanium dioxide fiber, boride metal fiber, silica fibre or carbon fiber.The making of fibrous component, operation and fixing means are open in pertinent literature.
In a concrete example, when hole diameter is 1 micron, end face 512 be positioned at plane 514 before, and distance is 500 nanometers, pin top front end face diameter is 4 microns, and the diameter of fibrous component 504 is in the situation of 50 nanometers, and applying voltage is 2800 volts, the dispersion angle of divergent bundle is 4 degree, and electron emitter brightness is 3E7 ampere per unit square centimeter unit solid angle Rad kilovolt.
Embodiment 6:
Fig. 8 has shown the embodiment of another needle-like transmitting body acupuncture roof construction 600.In this side cutaway view, a needle point component 604 is set on the axis of hole shape component 602.This needle point component 604 is comprised of single fiber shape material.Positive direction is whole needle-like emitter pin top direction, as shown in arrow 608.The front end face plane of hole shape component 602 is labeled as 612.Its rear end facial plane is labeled as 616.The most front summit that comprises fibrous needle point component 604 and be parallel to 612 plane and be labeled as 614.Hole shape needle point component 602 is connected to and is connected on component 610 by intermediate species 606.Fibrous needle point component 604 is connected to and connects on component 610, and its position part is controlled by the shape size of component 610.In a preferred embodiment, 612 end faces are positioned at the front end of 614 planes, and 616 end faces are also positioned at the front end of 614 planes, and the summit, front and back of fibrous needle point component 604 is all positioned at the outside of hole shape component 602.Charged particle beam at least from fibrous component 604 summit send.
In a specific embodiment, the basic configuration of needle-like emitter forms by corroding an one metal wire.For example, an one metal wire, puts into etchant solution by one, and wire enters one of liquid level part placed around to electrode.Apply voltage between to electrode and wire until wire in liquid level corrosion fracture.Now one wiry just forms needle-like.Then by focused ion beam, cut out platform-like pin top, intermediate species 606 and connection component 610.Afterwards, with the rounded pattern of focused ion beam, in face of pin top pointing direction scanning platform shape pin top, material is removed in the region being scanned.Scanning continues until pin top forms hole shape component 602.Fibrous component 604 is connected and connects on component 610 and fix afterwards.The relative position of plane 616 and plane 614 and distance are determined by length and the link position of fibre fractionation 604.In a preferred example, wire is tantalum wire, and corrosive liquid is phosphoric acid, acetic acid, the mixed liquor of sulfuric acid and hydrofluoric acid; To electrode, it is platinum electrode.Fibre fractionation 604 is zinc oxide fiber, titanium dioxide fiber, boride metal fiber, silica fibre or carbon fiber.The making of fibrous component, operation and fixing means are open in pertinent literature.
In a concrete example, when hole diameter is 2 microns, end face 612 be positioned at plane 614 before, and distance is 1 micron, pin top front end face diameter is 5 microns, and the diameter of fibrous component 604 is in the situation of 60 nanometers, applies voltage for negative 2900 volts, the dispersion angle of divergent bundle is 2 degree, and emitter brightness 5E7 is ampere per unit square centimeter unit solid angle Rad kilovolt.
Embodiment 7:
As shown in Figure 7, the present embodiment is shown an electron emission source 1100 that uses needle-like emitter described in the invention.It is configured to a needle-like emitter 100 and is welded on filament 1106.The two ends of filament 1106 are welded on respectively on two metal columns 1110.These two metal columns 1110 are linked togather and provide electric insulation by collets 1112 machineries.Needle-like emitter 100 has the pin top 102 of a small curvature radius, and this radius of curvature should be less than 100 microns.Thereby filament 1106 is the modes that heat with Jiao Er for the electric current by certain heats needle-like emitter 100.Needle-like emitter 100 is made by high-melting-point electric conducting material.These materials include but not limited to carbon, tungsten, rhenium, tantalum, and molybdenum.Needle-like emitter 100 not only can be single crystals but also can be polycrystalline.Its pin top 102 can be any crystal structure orientation.Positive direction is pin top pointing direction, by arrow 1108, is marked.
Embodiment 8
The present embodiment provides needle-like emitter of the present invention has been arranged on to an application example in charged particle instrument.As shown in figure 14, the electron beam apparatus in the present embodiment is a field emission scanning electron microscope (SEM) 1200.The electron emission source shown in Figure 13 is selected in the Field Electron Emission source 1100 of the present embodiment, this emission source is arranged in the vacuum cavity 1220 of SEM, and two heater current pin posts of this emitter are connected to the outside of cavity 1220.A filament supply 1204 is used to provide filament heating current used.The tip vicinity that extraction electrode 1212 is placed on this Field Electron Emission source 1100 is used for making needle-like emitter can discharge electronics.Extraction electrode 1212 imports terminal by vacuum and is connected with the external world of cavity 1220.It is poor that extraction voltage power supply 1206 is used to the extraction voltage that maintains between this Field Electron Emission source 1100 and extraction electrode 1212.By applying extraction voltage, from this emission source 1100, produced electron beam 1218.An accelerating electrode 1214 is used for setting the energy of electron beam 1218, and is controlled by the voltage source 1210 outside cavity 1220.Scanning and focusing system 1216 are used for that this electron beam 1218 is focused into a little electron microprobe and at sample 1224 this probe scannings of surface.Sample 1224 is to be contained in a use to help to observe on the travelling carriage 1226 of sample.A signal sensor 1222 is arranged on contiguous being used for of sample 1224 and gathers by the produced signal that interacts between electron microprobe and sample.A vacuum pump 1228 is used to generate the interior required vacuum of cavity 1220.
Above the present invention is described in detail; its object is to allow the personage who is familiar with this art can understand content of the present invention and be implemented; can not limit the scope of the invention with this; the equivalence that all Spirit Essences according to the present invention are done changes or modifies, and all should be encompassed in protection scope of the present invention.
Claims (16)
1. an electron emitter, it is characterized in that: described emitter is needle-like, and pin head portion at least comprises two components, component one is the hole shape component having at least towards pin top pointing direction opening, component two is the needle point components that are arranged in component one cavity, and electronics is at least launched from the needle point summit of component two.
2. according to electron emitter described in claim 1, it is characterized in that: its component one and component two are electric conducting state, and its voltage is identical.
3. according to electron emitter described in claim 1, it is characterized in that: its component one, in the direction of pointing on transmitting body acupuncture top, it is face foremost, if as plane, effectively overall diameter is less than 100 microns, if as spherical calotte, minimum effectively curvature diameter is less than 100 microns.
4. according to electron emitter described in claim 1, it is characterized in that: its component one is on the pointing direction of pin top, towards front and back, to distinguish the hollow round table body structure of opening.
5. according to electron emitter described in any one in claim 1 ~ 4, it is characterized in that: its component one, on the pointing direction of pin top, its foremost face higher than the needle point summit of component two.
6. according to electron emitter described in claim 4, it is characterized in that: its open circles stage body component one, on the pointing direction of pin top, end face is lower than the needle point summit of component two thereafter.
7. according to electron emitter described in claim 1, it is characterized in that: its needle point component two consists of effective single fiber shape material.
8. according to electron emitter described in claim 7, it is characterized in that: its fibrous component two, on the pointing direction of pin top, its part is positioned at outside component one cavity.
9. according to electron emitter described in claim 4, it is characterized in that: its component two consists of effective single fiber shape material, and at least a portion of this fibrous material, in the direction of pointing on pin top, lower than the Rotary-table rear end face of component one.
10. according to electron emitter described in any one in claim 1 ~ 9, it is characterized in that: its main composition material comprises: tungsten, molybdenum, tantalum, rhenium, titanium, chromium, platinum, osmium, iridium and the alloy that these elements are main component of take, main component is carbon, silicon, the material of germanium, metal oxide, metal boride, metal nitride, metal carbides, and metallic element is wherein calcium, strontium, barium, scandium, yttrium, all lanthanide series, thorium, titanium, the combination of one or more in zirconium and hafnium.
11. according to electron emitter described in any one in claim 1 ~ 9, it is characterized in that: the main composition material of its component one is for being comparatively difficult for the high work function electric conducting material of electron emission, and the main composition material of component two is the low work function electric conducting material of comparatively easy electron emission.
12. according to electron emitter described in any one in claim 1 ~ 9, it is characterized in that: the main composition material of its component two is metal oxide, metal boride, metal nitride, metal carbides, and metallic element is wherein calcium, strontium, barium, scandium, yttrium, all lanthanide series, thorium, titanium, the combination of one or more in zirconium and hafnium.
13. according to electron emitter described in any one in claim 1 ~ 12, the method of its electron emission at least comprises that following step: a. arranges a reference electrode near needle-like emitter, and it is negative voltage on needle point component two at least with respect to this reference electrode that b. applies one.
In 14. claims 1 ~ 13, any one is as the electron beam apparatus of electron emitter, and it comprises: scanning electron microscopy, transmission electron microscope, scanning transmission electron microscope, electron beam lithography machine, electron-beam excitation X-ray energy spectrometer, electron energy loss spectroscopy instrument, Auger electron spectrometer.
The preparation method of 15. 1 electron emitters, it is characterized in that: described emitter is needle-like, and pin head portion at least comprises two components, component one is the hole shape component having at least towards pin top pointing direction opening, component two is the needle point components that are arranged in component one cavity, electronics is at least launched from the needle point summit of component two, the process of preparing this emitter comprises following steps: a. prepares the element body of needle-like, b. in face of pin top pointing direction, Zhen Ding local limited region with this needle-like element body of ion beam bombardment, thereby the material in the region bombarded is removed, thereby form hole shape structure.
Preparation method described in 16. claims 15, it is characterized in that: local limited region described in step b is ring-type, thereby form empty time, empty central reserve part material, this reserve part directly as or be further processed into described needle point component two.
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| CN201310494493.4A CN103531423A (en) | 2013-10-21 | 2013-10-21 | Needle-shaped charged particle beam emitter and manufacturing method thereof |
| PCT/CN2014/085644 WO2015058588A1 (en) | 2013-10-21 | 2014-08-31 | Needle-shaped emitter of charged particle beam and manufacturing method thereof |
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| WO (1) | WO2015058588A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015058588A1 (en) * | 2013-10-21 | 2015-04-30 | 严建新 | Needle-shaped emitter of charged particle beam and manufacturing method thereof |
| CN110556279A (en) * | 2019-08-13 | 2019-12-10 | 河南河大科技发展有限公司 | Cathode electron gun filament device |
| CN114121577A (en) * | 2020-08-25 | 2022-03-01 | 埃尔思科技股份有限公司 | Emitter structure for enhancing ion current |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9984846B2 (en) | 2016-06-30 | 2018-05-29 | Kla-Tencor Corporation | High brightness boron-containing electron beam emitters for use in a vacuum environment |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0261941A (en) * | 1988-08-26 | 1990-03-01 | Sony Corp | Electric field dissociative ion source |
| JP3832402B2 (en) * | 2002-08-12 | 2006-10-11 | 株式会社日立製作所 | Electron source having carbon nanotubes, electron microscope and electron beam drawing apparatus using the same |
| KR101542631B1 (en) * | 2007-07-26 | 2015-08-07 | 전자빔기술센터 주식회사 | Electron emitter having nano-structure tip and electron column using the same |
| US8736170B1 (en) * | 2011-02-22 | 2014-05-27 | Fei Company | Stable cold field emission electron source |
| CN103531423A (en) * | 2013-10-21 | 2014-01-22 | 严建新 | Needle-shaped charged particle beam emitter and manufacturing method thereof |
-
2013
- 2013-10-21 CN CN201310494493.4A patent/CN103531423A/en active Pending
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- 2014-08-31 WO PCT/CN2014/085644 patent/WO2015058588A1/en active Application Filing
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015058588A1 (en) * | 2013-10-21 | 2015-04-30 | 严建新 | Needle-shaped emitter of charged particle beam and manufacturing method thereof |
| CN110556279A (en) * | 2019-08-13 | 2019-12-10 | 河南河大科技发展有限公司 | Cathode electron gun filament device |
| CN114121577A (en) * | 2020-08-25 | 2022-03-01 | 埃尔思科技股份有限公司 | Emitter structure for enhancing ion current |
| CN114121577B (en) * | 2020-08-25 | 2025-02-14 | 埃尔思科技股份有限公司 | Emitter structure for enhanced ion current |
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| Publication number | Publication date |
|---|---|
| WO2015058588A1 (en) | 2015-04-30 |
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